TWM599323U - Feeding and withdrawing device of sputtering coating equipment - Google Patents

Abstract

The new model relates to the field of coating equipment, and specifically discloses an in and out device for sputtering coating equipment, a base frame, an in and out cavity and a control machine; the in and out cavity is installed on the base frame, and one side of the in and out cavity A film inlet is provided, and the other side is spliced by an assembling board. The splicing board is provided with an observation port; the edge of the inlet and outlet is provided with alarm lights and operations; the control machine is arranged at the inlet and outlet cavity away from the film inlet One side of the new type of film in and out device can carry out the loading operation on one side and the processing operation on the other side, complementing interference, improving production safety and production efficiency.

Description

Piece in and out device of sputtering coating equipment

The new model relates to the field of coating equipment, in particular to a piece in and out device of sputtering coating equipment.

傷操作人員，極度危險。 In the field of coating, at present, the coating method of glass cover or acrylic cover is mostly carried out by electron gun thermal vapor deposition or furnace-type magnetron sputtering; however, the structure of the in and out of film device of the currently used coating machine It is complicated and requires continuous observation of the substrate after the film is installed. However, if the substrate such as glass is not placed during the operation or the equipment fails, it is easy to cause cracks during transportation, or the corners and corners are easy to sputter

It is extremely dangerous to hurt the operator.

The purpose of the present invention is to provide a piece-in-out device for sputtering coating equipment, which has a simple structure and high safety.

In order to solve the above technical problems, the present invention provides a sputtering film coating equipment in and out device, including a bottom frame, an in and out cavity and a control machine; the in and out cavity is installed on the bottom frame, and one side of the in and out cavity The film inlet is provided, and the other side is spliced by assembling panels. The splicing panel is provided with an observation port; the edge of the entrance and exit is provided with an alarm lamp and an operation panel; the control machine is arranged at the entrance and exit cavity away from the entrance One side of the film mouth.

As a preferred solution, supporting feet and pulleys are provided at the bottom end of the underframe.

As a preferred solution, a pulley is provided at the bottom end of the control platform.

As a preferred solution, a foot support is provided on the side of the bottom frame close to the film inlet, and a plurality of through holes are opened on the foot support.

As a preferred solution, a connecting frame for connecting other cavities is provided on one side of the cavity.

As a preferred solution, the number of splicing plates is four.

As a preferred solution, transparent tempered glass is provided on the observation port.

The new model has the following beneficial effects:

(1) The film inlet and outlet device of the sputtering coating equipment of the present invention is equipped with a film inlet cavity and a film inlet. The operator can add films at the film inlet. The film inlet cavity protects the surroundings, that is, to ensure the equipment in the device There is no cross contamination with the outside world, and the outside world is also protected to avoid damage to surrounding equipment and operators due to equipment failure.

(2) The film inlet cavity of the film inlet and outlet device of the new sputtering coating equipment is spliced by splicing plates, and the splicing plate is provided with an observation port to facilitate the operator to observe at the observation hole, avoid observation at the film inlet, and protect the operator. Safety.

(3) The film inlet and outlet device of the new sputtering coating equipment is small in size, and a control machine is set on one side of the splicing plate, which can observe the condition of the film inlet cavity while performing remote operation at the same time, which improves the safety of production.

1: bottom frame

2: In and out of the cavity

3: control machine

4: film inlet

5: Splicing board

6: Observation port

7: connecting frame

8: pulley

9: Foot support

10: Warning light

11: Operation panel

FIG. 1 is a schematic diagram of the structure of the chip in and out device of the sputtering coating equipment provided by the embodiment of the present invention; Fig. 2 is another schematic diagram of the structure of the chip in and out device of the sputter coating equipment provided by the embodiment of the present invention.

The technical solutions in the embodiments of the present invention will be described clearly and completely in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, not all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative work shall fall within the protection scope of the present invention.

1 and 2, in a preferred embodiment of the present invention, a sputtering film-coating device in and out of the device, including a base frame 1, an in and out cavity 2 and a control machine 3; the in and out cavity 2 is installed on the base frame 1 One side of the entry and exit cavity 2 is provided with an entry port 4, and the other side is formed by splicing panels. The splicing panel 5 is provided with an observation port 6; the entrance and exit edges are provided with alarm lights 10 and operating Plate 11; The control machine 3 is set on the side of the inlet and outlet cavity 2 away from the film inlet 4.

The film inlet and outlet device of the sputtering coating equipment of the preferred embodiment of the present invention is provided with a film inlet cavity and a film inlet 4, and the operator can perform a film adding operation at the film inlet 4, and the film inlet cavity protects the surroundings. Ensure that the equipment in the device does not cross-contaminate with the outside world, and also protect the outside world to avoid equipment failures and damage the surrounding equipment and operators; and the splicing plate 5 is used for splicing in the film inlet cavity, and an observation port 6 is set on the splicing plate 5 to facilitate the operator Observe at the observation hole to avoid observation at the film inlet 4 to protect the safety of the operator; in addition, the film in and out device is small in size, and the control machine 3 is set on the side of the splicing plate 5 to observe the conditions in the film inlet cavity, and While carrying out remote operation, improve the safety of production.

As a preferred solution, the bottom end of the underframe 1 is provided with supporting feet and pulleys 8.

Specifically, the bottom frame 1 is provided with a pulley 8 to facilitate the movement or transportation of the film feeding cavity.

As a preferred solution, a pulley 8 is provided at the bottom end of the control machine 3.

Specifically, the pulley 8 provided on the control machine 3 is not only convenient for transportation and movement, but also convenient for switching the position of the control machine 3.

As a preferred solution, a step bracket 9 is provided on the side of the base frame 1 close to the film inlet 4, and a plurality of through holes are opened on the step bracket 9.

Specifically, the through hole can reduce the weight of the foot support 9.

As a preferred solution, a connecting frame 7 for connecting other cavities is provided on one side of the cavity 2.

Specifically, the connecting frame 7 is convenient to connect with other cavities, and a controllable door can be provided on the connecting frame 7 to facilitate the control between the cavities.

As a preferred solution, the number of splicing plates 5 is four.

Specifically, the four splicing plates are divided into five quarters, which is convenient to observe the conditions in and out of the cavity 2 to the greatest extent.

As a preferred solution, transparent tempered glass is provided on the observation port 6.

Specifically, the observation in and out of the cavity 2 can be performed through the toughened glass, and the toughened glass can play a protective role.

The above are only the preferred embodiments of the present invention. It should be pointed out that for those of ordinary skill in the art, without departing from the technical principles of the present invention, several improvements and substitutions can be made. These improvements and substitutions It should also be regarded as the protection scope of this new model.

1: bottom frame

2: In and out of the cavity

3: control machine

4: film inlet

7: connecting frame

9: Foot support

10: Warning light

11: Operation panel

Claims (7)

A film inlet and outlet device of a sputtering coating equipment, comprising a chassis inlet and outlet cavity, and a control machine; the inlet and outlet cavity is installed on the bottom frame, one side of the inlet and outlet cavity is provided with a film inlet, and the other side is provided with a film inlet The splicing board is formed by splicing, the splicing board is provided with an observation port; the edge of the film inlet is provided with an alarm lamp and an operation panel; the control machine is arranged on the side of the inlet and outlet cavity away from the film inlet. According to claim 1 of the sputtering film-coating equipment's chip in and out device, the bottom end of the chassis is provided with supporting feet and pulleys. According to claim 2 of the sputtering film-coating equipment in and out device, the bottom end of the control machine is provided with a pulley. According to the film feeding and unloading device of the sputtering coating equipment according to claim 1, a step bracket is provided on the side of the bottom frame close to the film inlet, and the step bracket is provided with a plurality of through holes. According to the chip in and out device of the sputtering coating equipment according to claim 1, one side of the in and out cavity is provided with a connection frame for connecting other cavities. According to the chip in and out device of the sputtering coating equipment according to claim 1, the number of splicing boards is 4. According to the in-and-out device of sputtering coating equipment according to claim 1, a transparent tempered glass is provided on the observation port.

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