TWM585426U - Protective film device for die - Google Patents

Abstract

A die coating device is used to protect multiple die and includes a first coating unit and a second coating unit. The first protective film unit includes a first base layer and a carrier layer combined with the first base layer. The bearing layer includes a bearing portion and a surrounding portion surrounding the bearing portion and including a three-dimensional pattern structure. The load-bearing portion has a load-bearing surface that is planar and suitable for placing the grains. The second pellicle unit is suitable for protecting the grains together with the bearing portion of the first pellicle unit, and includes a second base layer opposite to the first base layer, and an adhesive layer combined with the second base layer. . The adhesive layer can tearably bond the bearing layer of the first protective film unit. Thereby, in addition to the adhesive layer being easily torn off, the crystal grains located between the first and second coating units are prevented from tilting.

Description

Crystal film protective device

The present invention relates to a film protective device, in particular to a crystal film protective device that is easy to tear and can maintain the flatness and inclination of crystal grains.

It is known that after the wafer is manufactured, in order to facilitate the use of subsequent processing, the wafer is cut into individual grains.

Referring to FIG. 1, a protective film for protecting the die currently includes a carrier unit 91 and a cover unit 92. The carrying unit 91 includes a first base layer 911 and a carrying layer 912 disposed on the first base layer 911 and having a protruding structure 913. The protruding structure 913 has a plurality of protrusions 914. The covering unit 92 includes a second base layer 921 and an adhesive layer 922 disposed on the second base layer 921. The crystal grains are placed on the protruding structure 913 of the bearing layer 912. The bonding layer 922 covers the crystal grains and adheres to a part of the protruding structure 913, so that the crystal grains are sandwiched in the bearing layer 912. And the adhesive layer 922. The above-mentioned patent makes use of the small contact area between the adhesive layer 922 and the carrier layer 912, which can be easily torn apart. Cover unit 92.

However, due to the small size of the grains, usually only about 100 μm, when the grains are located on the protrusions 914 of the protruding structure 913, the grains that fall between two adjacent protrusions 914 are easily skewed. The gap is difficult to maintain the flatness of the placement position, which causes problems such as that the crystal grains are difficult to be taken out by the clamp during the subsequent processing, or that the crystal grains are difficult to use the automated machine for related test items.

Therefore, an object of the present invention is to provide a die coating device capable of overcoming at least the disadvantages of the prior art.

Therefore, the novel die-coating device is suitable for protecting multiple dies, and includes a first coat-coating unit and a second coat-coating unit.

The first pellicle unit includes a first base layer and a carrier layer combined with the first base layer. The carrier layer includes a carrier portion and a three-dimensional pattern structure surrounding the carrier portion and including a three-dimensional pattern away from the first base layer. The surrounding section. The bearing portion has a bearing surface spaced from the first base layer and being planar and suitable for placing the crystal grains.

The second pellicle unit is suitable for protecting the grains together with the bearing portion of the first pellicle unit, and includes a second base layer opposite to the first base layer, and an adhesive layer combined with the second base layer. . The adhesive layer can tearably bond the bearing layer of the first protective film unit.

The utility model has the advantages that: using the three-dimensional pattern structure, the adhesive layer of the second protective film unit is easy to be separated from the bearing layer of the first protective film unit; in addition, the bearing surface of the bearing portion that is flat can maintain the Equal crystal grains are placed flat between the bearing layer of the first protective film unit and the adhesive layer of the second protective film unit.

1‧‧‧The first protective film unit

11‧‧‧ the first base

111‧‧‧first surface

112‧‧‧Second surface

12‧‧‧ bearing layer

121‧‧‧bearing department

122‧‧‧Surrounding

123‧‧‧bearing surface

124‧‧‧Three-dimensional pattern structure

125‧‧‧ Fitting surface

126‧‧‧ recessed surface

127‧‧‧airflow channel

128‧‧‧ substrate

129‧‧‧ protrusion

13‧‧‧ surface

2‧‧‧Second pellicle unit

21‧‧‧Second-level

211‧‧‧ surface

22‧‧‧ Adhesive layer

221‧‧‧ Adhesive surface

9‧‧‧ Grain

w‧‧‧ width

x1‧‧‧first direction

x2‧‧‧ second direction

Other features and effects of the present invention will be clearly presented in the embodiment with reference to the drawings, in which: FIG. 1 is an exploded perspective view illustrating a conventional protective film; and FIG. 2 is an exploded perspective view illustrating the new model. A first embodiment of a die film coating device; FIG. 3 is a schematic cross-sectional view taken along the line III-III of FIG. 1; and FIG. 4 is an exploded perspective view illustrating a second embodiment of the novel die film coating device. Examples.

Before the new model is described in detail, it should be noted that in the following description, similar elements are represented by the same number.

Referring to FIG. 2 and FIG. 3, a first embodiment of the novel die coating device is suitable for protecting a plurality of dies 9. The dies 9 are cut after the wafer is manufactured. Wafers. The first embodiment of the crystal film coating device includes a first film coating unit 1 and a second film coating unit 2.

The first pellicle unit 1 includes a first base layer 11 having a first surface 111 and a second surface 112 opposite to each other, a carrier layer 12 bonded to the first surface 111 of the first base layer 11, and an adhesive layer. The surface layer 13 on the second surface 112 of the first base layer 11.

The first base layer 11 of the first pellicle unit 1 is a paper product, and is, for example, a square with a length of 20 cm on each side. The carrying layer 12 and the surface layer 13 of the first protective film unit 1 are respectively thin sheets made of polymer, and can be made of the same or different materials. The polymer is selected from polyolefin (PO), ethylene-vinyl acetate copolymer (EVA), and combinations thereof. The polyolefin may be selected from polyethylene (PE) or polypropylene (PP).

The carrying layer 12 includes a central carrying portion 121 and a surrounding portion 122 extending horizontally outward from the edge of the carrying portion 121 and surrounding the carrying portion 121. The bearing portion 121 is a square with a length of 12 cm on each side, and has a planar bearing surface 123 spaced from the first base layer 11 of the first protective film unit 1. The bearing surface 123 is suitable for the grains. 9 Place on it. The surrounding portion 122 has a “mouth” shape surrounding the supporting portion 121 as a whole, and has a width (w) from the periphery of the supporting portion 121 to the periphery of the surrounding portion 122. Preferably, the area of the bearing surface 123 of the bearing portion 121 is 20% to 80% of the area of the surface of the bearing layer facing the second coating unit (that is, the total area of the bearing portion 121 and the surrounding portion 122). %. another On the one hand, the supporting portion 121 is not limited to the square, but may be other types of square, circle, or oval, as long as it is surrounded by the surrounding portion 122.

The surrounding portion 122 includes a three-dimensional pattern structure 124 away from the first base layer 11. The three-dimensional pattern structure 124 includes a base 128 tiled on the first surface 111 of the first base layer 11, and a plurality of protrusions 129 protruding from the base 128 toward the second protective film unit 2 and spaced apart from each other. Each of the protrusions 129 is rectangular and has a bonding surface 125 facing the second pellicle unit 2. The bonding surfaces 125 of the protrusions 129 are flush with the bearing surface 123 of the bearing portion 121 in the horizontal direction. In addition, each of the protrusions 129 may have a diamond shape or a round shape.

Therefore, as a whole, the three-dimensional pattern structure 124 has a plurality of the bonding surfaces 125 facing the second protective film unit 2 and a plurality of the bonding surfaces 125 toward the first protective film unit 1 respectively. The recessed surface 126 of the first base layer 11 is recessed in the direction. The recessed surfaces 126 collectively define an airflow channel 127 that communicates with the outside and forms a mesh. The airflow channel 127 can allow outside air to enter.

The surface layer 13 is used to support the first base layer 11 and the bearing layer 12. It should be noted that, when the first base layer 11 has a predetermined flatness, and the flatness can be maintained even after water vapor is absorbed, the surface layer 13 can be omitted.

The second pellicle unit 2 is used to protect the crystal grains 9 together with the supporting portion 121 of the first pellicle unit 1, and includes a first substrate layer 11 opposite to the first base layer 11 and having the same area as the first base layer 11. Two base layers 21, and one bonded to the second base layer 21 的 贴 贴 层 22。 21 of the adhesive layer 22.

The second base layer 21 is made of a polymer selected from the group consisting of polypropylene (PP), polyvinyl chloride (PVC), polyethylene terephthalate (PET), and a combination thereof. Made of materials.

The adhesive layer 22 is formed on a downward-facing surface 211 of the second base layer 21 in a coating manner, and has an attaching surface 125 that releasably adheres the bearing surface 123 of the bearing portion 121 and the surrounding portion 122.的 贴 面面 221。 The pasting surface 221. The adhesive surface 221 is a flat plane. The adhesive layer 22 is made of an adhesive. A specific example of the adhesive is an acrylic or rubber pressure-sensitive adhesive.

When the first embodiment of the present invention is in use, the crystal grains 9 are placed between the bearing portion 121 of the carrier layer 12 and the adhesive layer 22. The adhesive layer 22 adheres to the bearing portion 121 without placing the crystal grains 9. And the crystal grains 9 are positioned between the flat bearing surface 123 of the bearing portion 121 and the flat adhesive surface of the adhesive layer 22. In addition, the surrounding portion 122 of the load-bearing layer 12 is also adhered and fixed to the adhesive layer 22 by the bonding surfaces 125 of the protrusions 129.

When the user wants to take out the crystal grains 9 with a jig, the first protective film unit 1 and the second protective film unit 2 need to be torn apart. During the tearing process, since the three-dimensional pattern structure 124 is provided at the surrounding portion 122 of the carrier layer 12, the adhesive layer 22 is adhered to the adhesive layer 22 only at the interval of the adhesive surfaces 125 (rather than a continuous and large area Planely adhere the adhesive layer 22), and the surrounding portion 122 has an airflow for external air to flow in The channel 127, so the surrounding portion 122 of the bearing layer 12 and the adhesive layer 22 are easily torn off, further driving the bearing portion 121 on which the crystal grains 9 are placed is also easily torn off from the adhesive layer 22.

Referring to FIG. 4, it is a second embodiment of the novel die-coating device. The structure is substantially the same as that of the first embodiment, except that the uneven portions of the three-dimensional pattern structure 124 of the second embodiment are relatively This first embodiment is the opposite design. Therefore, the protrusions 129 of the second embodiment are connected to each other to form a continuous three-dimensional mesh. Specifically, the protrusions 129 of the three-dimensional pattern structure 124 are in a strip shape, and several of the protrusions 129 extend along a first direction (x1) parallel to the first base layer 11, and the other several Each extends along a second direction (x2) parallel to the base 128 and different from the first direction (x1). The protrusions 129 extending in the first direction (x1) and the protrusions 129 extending in the second direction (x2) cross each other to form a mesh.

To sum up, the new type film protective film device is used for placing the crystal grains 9 through the flat bearing surface 123 of the bearing part 121. The bearing surface 123 can provide a continuous and complete plane, so that the crystal grains The granules 9 are not tilted and tilted when they are located between the first and second pellicle units 1 and 2. Together with the three-dimensional pattern structure 124 of the surrounding portion 122, the first pellicle unit 1 is easily torn from the second pellicle unit 2, so it can indeed achieve the purpose of a new type of cost.

However, the above are only examples of the new model. When the scope of the implementation of the new model cannot be limited in this way, any application for the patent scope and patent description of the new model is required. The simple equivalent changes and modifications made in the contents of the book are still covered by the new patent.

Claims (9)

A crystal film coating device is suitable for protecting a plurality of crystal grains, and includes: a first film coating unit including a first base layer, and a bearing layer combined with the first base layer, the bearing layer including a bearing portion And a surrounding portion that surrounds the bearing portion and includes a three-dimensional pattern structure far from the first base layer, the bearing portion has a space from the first base layer and is planar, and is suitable for carrying the grains Surface; and a second pellicle unit, which is suitable for jointly protecting the crystal grains with the bearing portion of the first pellicle unit, and includes a second base layer opposite to the first base layer, and a second base layer combined with the second base layer The base layer is an adhesive layer, and the adhesive layer can tearably bond the carrier layer of the first protective film unit. The crystal film coating device according to claim 1, wherein the three-dimensional pattern structure of the surrounding portion has a plurality of bonding surfaces for bonding with the adhesive layer of the second film coating unit, and a plurality of A recessed surface whose recessed surface is recessed toward the first base layer. The die-coating device according to claim 2, wherein the three-dimensional pattern structure of the surrounding portion includes a substrate tiled on the first base layer, and a plurality of protrusions from the base toward the second film-coating unit Each protrusion has one of the bonding surfaces. The die film coating device according to claim 3, wherein the bonding surfaces of the protrusions are flush with the bearing surface of the bearing portion. The die-coating device according to claim 4, wherein the recessed surfaces of the three-dimensional pattern structure collectively define an airflow channel communicating with the outside. The die coating device according to claim 3, wherein the three-dimensional pattern structure The protrusions are connected to each other to form a mesh. The die coating device according to claim 3, wherein the protrusions of the three-dimensional pattern structure are spaced apart from each other. The die coating device according to claim 1, wherein the area of the bearing surface of the bearing portion is 20% to 80% of the area of the surface of the bearing layer facing the second coating unit. The crystal film coating device according to claim 1, wherein the first film coating unit further comprises a surface layer adhered to a surface of the first base layer opposite to a surface of the bearing layer, and the surface layer is made of polymer.