CN209626192U - Crystal grain cuticula device - Google Patents

Abstract

A kind of crystal grain cuticula device for protecting multiple crystal grain, and includes the first cuticula unit and the second cuticula unit.The first cuticula unit includes the first base and the bearing bed for being incorporated into first base.The bearing bed includes supporting part, and surrounds portion around the supporting part and including space pattern structure.The supporting part has in plane and is suitable for the loading end that the crystal grain is put.The second cuticula unit is suitable for protecting the crystal grain jointly with the supporting part of the first cuticula unit, and including second base opposite with first base, and is incorporated into the adhesive layer of second base.The adhesive layer can cohere the bearing bed of the first cuticula unit with tearing off.Whereby, other than the adhesive layer is easily torn off, the crystal grain between the first cuticula unit and the second cuticula unit is also avoided to tilt.

Description

Crystal grain cuticula device

Technical field

The utility model relates to a kind of cuticula devices, tear well more particularly to one kind and crystal grain can be maintained smooth not inclined Crystal grain cuticula device.

Background technique

Wafer after fabrication, in order to facilitate the utilization of following process, can be cut into many crystal grain by known wafer.

Refering to fig. 1, a kind of for protecting the cuticula of the crystal grain at present, it is main single comprising a load bearing unit 91 and a covering Member 92.The load bearing unit 91 includes that one first base 911 and one is set in first base 911 and has a prominent structure 913 bearing bed 912.The protrusion structure 913 has multiple projections 914.The capping unit 92 includes one second base 921, and One is set to the gluing layer 922 in second base 921.The crystal grain is placed in the protrusion structure 913 of the bearing bed 912, The gluing layer 922 covers the crystal grain, and binds with the partial region of the protrusion structure 913, so that the crystal grain is located in this Between bearing bed 912 and the gluing layer 922.Above-mentioned patent utilizes the contact area between the gluing layer 922 and the bearing bed 912 It is small, the capping unit 92 can be facilitated the tearing off.

However, it is small-sized due to the crystal grain, usually only about 100 μm, so that the crystal grain is located at the protrusion structure When in 913 projection 914, easy skew falls into the gap between two adjacent bumps 914, and is not easy to maintain placement location It is smooth, it causes during following process, the crystal grain is difficult to be clamped out by fixture or automation is difficult to be utilized in the crystal grain Board carries out the problems such as dependence test project.

Summary of the invention

The crystal grain cuticula device for the shortcomings that background technique can at least be overcome the purpose of this utility model is to provide one kind.

The crystal grain cuticula device of the utility model is suitable for protecting multiple crystal grain, and includes the first cuticula unit and second Cuticula unit.The first cuticula unit includes the first base, and is incorporated into the bearing bed of first base.The second cuticula list Member is suitable for protecting the crystal grain jointly with the supporting part of the first cuticula unit, and including opposite with first base second Base, and it is incorporated into the adhesive layer of second base.The adhesive layer can cohere the bearing bed of the first cuticula unit with tearing off. The bearing bed of the first cuticula unit includes supporting part, and around the supporting part and including the perspective view far from first base Case structure surrounds portion, which has with first base layer separation and in plane, and is suitable for what the crystal grain was put Loading end.

Crystal grain cuticula device described in the utility model, should have around the space pattern structure in portion it is multiple for this Binding face that the adhesive layer of two cuticula units coheres and multiple it is recessed respectively from the binding face toward the direction of first base Concave face.

Crystal grain cuticula device described in the utility model should include being laid in first base around the space pattern structure in portion The substrate of layer and multiple from the substrate toward the protrusion of the direction projection of the second cuticula unit, each protrusion has the patch One of them of conjunction face.

Crystal grain cuticula device described in the utility model, the binding face of the protrusion and the loading end of the supporting part It flushes.

Crystal grain cuticula device described in the utility model, it is outer that the concave face of the space pattern structure defines connection jointly The airflow channel on boundary.

The protrusion of crystal grain cuticula device described in the utility model, the space pattern structure is connected to each other and networking Shape.

The protrusion of crystal grain cuticula device described in the utility model, the space pattern structure is spaced each other.

Crystal grain cuticula device described in the utility model, the area of the loading end of the supporting part be the bearing bed towards this The 20%~80% of the area on the surface of two cuticula units.

Crystal grain cuticula device described in the utility model, the first cuticula unit further include that be bonded in first base opposite In the surface layer on the surface of the bearing bed, which is made of polymer.

The utility model has the beneficial effects that: using the space pattern structure, the adhesive layer of the second cuticula unit It is easy to separate with the bearing bed of the first cuticula unit；In addition, the loading end of the supporting part in plane, can maintain the crystal grain It is placed in being flattened between the bearing bed of the first cuticula unit and the adhesive layer of the second cuticula unit.

Detailed description of the invention

Other features and effect of the utility model will be clearly presented in the embodiment referring to schema, in which:

Fig. 1 is a stereogram exploded view, illustrates an existing cuticula；

Fig. 2 is a stereogram exploded view, illustrates a first embodiment of the utility model crystal grain cuticula device；

Fig. 3 is a schematic cross-sectional view of the line II-II along Fig. 2；And

Fig. 4 is a stereogram exploded view, illustrates a second embodiment of the utility model crystal grain cuticula device.

Specific embodiment

Before the utility model is described in detail, it shall be noted that in the following description content, similar element be with It is identically numbered to indicate.

Refering to Fig. 2 and Fig. 3, a first embodiment of the utility model crystal grain cuticula device is suitable for protecting multiple crystal grain 9, the crystal grain 9 be wafer manufacture after the completion of, cutting crystal wafer and formed.The first embodiment of the crystal grain cuticula device includes one First cuticula unit 1 and one second cuticula unit 2.

The first cuticula unit 1 includes first base with opposite a first surface 111 and a second surface 112 11, one be incorporated into first base 11 first surface 111 bearing bed 12 and one be bonded in the second of first base 11 The surface layer 13 on surface 112.

First base 11 of the first cuticula unit 1 is a paper products, and for example, every side length is 20 centimetres Square.The bearing bed 12 of the first cuticula unit 1 and the surface layer 13 are respectively thin slice made of polymer, and can be by phase Same or different material is made.The polymer is selected from polyolefin (PO), ethylene-vinyl acetate copolymer (EVA) and above-mentioned Combination.Polyolefin can be selected from polyethylene (PE) or polypropylene (PP).

The bearing bed 12 include a centrally located supporting part 121 and one from the edge of the supporting part 121 horizontally outward Extend and surround the supporting part 121 around portion 122.The supporting part 121 is the square that every side length is 12 centimetres, and has one It is spaced with the first base 11 of the first cuticula unit 1 and is in the loading end 123 of plane, which is suitable for described Crystal grain 9 is put thereon.This is whole in " mouth " font for surrounding the supporting part 121 around portion 122, and has one from the supporting part 121 periphery surrounds the width (w) of the periphery in portion 122 to being somebody's turn to do.Preferably, the area of the loading end 123 of the supporting part 121 is should Bearing bed 12 towards the surface of the second cuticula unit area (namely the supporting part 121 and should around portion 122 area it is total With) 20%~80%.On the other hand, which is not limited to the square, also can be other kinds of rectangular, circle Shape, or ellipse, as long as being surrounded by this around portion 122.

This includes a space pattern structure 124 far from first base 11 around portion 122.The space pattern structure 124 The substrate 128 for the first surface 111 for being laid in first base 11 including one and it is multiple from the substrate 128 toward this second shield The direction projection of film unit 2 and the protrusion 129 being spaced each other.Each protrusion 129 is a rectangle, and have one towards this The binding face 125 of two cuticula units 2.The binding face 125 of the protrusion 129 and the loading end 123 of the supporting part 121 are in water Square to flushing.Also, each protrusion 129 also can be diamond shape or oval.

Therefore, generally speaking with the space pattern structure 124, there are multiple patches towards the second cuticula unit 2 Conjunction face 125 and it is multiple respectively from the binding face 125 toward the first base 11 of the first cuticula unit 1 direction be recessed Concave face 126.The concave face 126 defines the connection external world and jointly at a netted airflow channel 127, the airflow channel 127 can enter wherein for outside air.

The surface layer 13 is used to support first base 11 and the bearing bed 12.It should be noted that when first base 11 has Have a scheduled flatness, even and if after absorption aqueous vapor when still can maintain its flatness, which can also be omitted.

The second cuticula unit 2 is used to protect the crystal grain 9 jointly with the supporting part 121 of the first cuticula unit 1, and wraps Include that one is opposite with first base 11 and identical with first base 11 second base of area 21 and one be incorporated into this second The adhesive layer 22 of base 21.

Second base 21 is made of polymer, the polymer be by selected from polypropylene (PP), polyvinyl chloride (PVC), Polyethylene terephthalate (PET) and it is above-mentioned wherein one group be combined into material and be made.

The adhesive layer 22 is formed in a surface 211 directed downwardly of second base 21 in a manner of coating, and has an energy It coheres the loading end 123 of the supporting part 121 with tearing off and face 221 should be pasted around the binding face 125 in portion 122.This pastes face 221 be a flat plane.The adhesive layer 22 is made of an adhesive agent (adhesive), and the concrete example of the adhesive agent is acryl The pressure-sensing glue of system or rubber series.

The utility model first embodiment when in use, the crystal grain 9 be placed in the bearing bed 12 supporting part 121 and Between the adhesive layer 22, which pastes the supporting part 121 and does not place the region of the crystal grain 9, and makes 9 quilt of crystal grain The flat of flat loading end 123 and the adhesive layer 22 for being positioned at the supporting part 121 is pasted between face 221.In addition, this holds Carrier layer 12 also sticks together fixation using the binding face 125 of the protrusion 129 and the adhesive layer 22 around portion 122.

It, need to be by the first cuticula unit 1 and the second cuticula unit 2 when user is intended to take out the crystal grain 9 with fixture Relatively tear.During tearing, since the bearing bed 12 is equipped with the space pattern structure 124 around portion 122, only with The binding face 125 at the interval sticks in the adhesive layer 22 and (rather than pastes the adhesive layer with continuous and large area a plane 22) there should be, and around portion 122 airflow channel 127 flowed into for outside air, so the bearing bed 12 surrounds portion 122 It is easy to tear off with the adhesive layer 22, the supporting part 121 for being further driven to be placed with the crystal grain 9 is also easy from the adhesive layer 22 It tears off.

It is a second embodiment of the utility model crystal grain cuticula device refering to Fig. 4, it is big with the structure of the first embodiment It causes identical, is different in, the concave and convex part of the space pattern structure 124 of the second embodiment is relative to the first embodiment For contradictory design.Therefore, the protrusion 129 of this second embodiment is connected to each other continuous solid netted into one.Specifically Say, the protrusion 129 of the space pattern structure 124 into strips, and the protrusion 129 it is wherein several along one be parallel to this The first direction (x1) of one base 11 extends, wherein in addition several be parallel to the substrate 128 along one and be different from the first direction (x1) second direction (x2) extends.Extend along the protrusion 129 of the first direction (x1) extension and along the second direction (x2) Protrusion 129 intersects netted into one.

In conclusion the utility model crystal grain cuticula device is by flat loading end 123 of the supporting part 121 for institute It states crystal grain 9 to put, which can provide a continuous and complete plane, so that the crystal grain 9 is located at first and second shield When between film unit 1,2 will not skew topple over.This is cooperated to surround the space pattern structure 124 in portion 122 again, so that first cuticula Unit 1 is easy to tear from the second cuticula unit 2, so can reach the purpose of this utility model really.

As described above, only the embodiments of the present invention, when the utility model implementation cannot be limited with this Range, i.e., it is all according to simple equivalent changes and modifications made by the utility model claims book and description, all still belong to The scope of the utility model.

Claims (9)

1. a kind of crystal grain cuticula device, it is suitable for protecting multiple crystal grain, and includes the first cuticula unit and the second cuticula unit, The first cuticula unit includes the first base, and is incorporated into the bearing bed of first base, which is suitable for The crystal grain is protected jointly with the bearing bed of the first cuticula unit, and including second base opposite with first base, with And it is incorporated into the adhesive layer of second base, which can cohere the bearing bed of the first cuticula unit, feature with tearing off Be: the bearing bed of the first cuticula unit includes supporting part, and around the supporting part and including separate first base Space pattern structure surrounds portion, which has with first base layer separation and in plane, and is suitable for the crystal grain The loading end put.

2. crystal grain cuticula device as described in claim 1, it is characterised in that: should have around the space pattern structure in portion multiple Binding face for being cohered with the adhesive layer of the second cuticula unit and multiple respectively from the binding face toward first base Direction recess concave face.

3. crystal grain cuticula device as claimed in claim 2, it is characterised in that: should include tiling around the space pattern structure in portion In the substrate of first base and multiple from the substrate toward the protrusion of the direction projection of the second cuticula unit, each is prominent Portion has one of them of the binding face.

4. crystal grain cuticula device as claimed in claim 3, it is characterised in that: the binding face and the supporting part of the protrusion The loading end flush.

5. crystal grain cuticula device as claimed in claim 4, it is characterised in that: the concave face of the space pattern structure is common Define the extraneous airflow channel of connection.

6. crystal grain cuticula device as claimed in claim 3, it is characterised in that: the protrusion of the space pattern structure connects each other It connects and reticulates.

7. crystal grain cuticula device as claimed in claim 3, it is characterised in that: the protrusion of the space pattern structure is to each other Every.

8. crystal grain cuticula device as described in claim 1, it is characterised in that: the area of the loading end of the supporting part is the carrying Layer towards the surface of the second cuticula unit area 20%~80%.

9. crystal grain cuticula device as described in claim 1, it is characterised in that: the first cuticula unit further include be bonded in this In contrast to the surface layer on the surface of the bearing bed, which is made of polymer for one base.