TWM574332U - Light source system - Google Patents

Abstract

A light source system including a light emitting device, a first lens, and a second lens is provided. The light emitting device is adapted to provide a light beam. The first lens is disposed on a transmission path of the light beam. The second lens is disposed on the transmission path of the light beam. The first lens is located between the light emitting device and the second lens, wherein the light beam is transmitted in a first direction through the first lens, and the light beam is transmitted in a second direction by the reflection of the second lens. The first direction is different from the second direction.

Description

Light source system

The novel creation is related to an optical system, and in particular to a light source system.

In the current technology for fabricating a semiconductor device, since the size of the semiconductor device is gradually reduced, a temporary bonding process is often used in the fabrication process, and the semiconductor device is bonded to the temporary substrate through the adhesive layer to facilitate fabrication of the semiconductor device. When the fabrication of the semiconductor device is completed, the adhesive layer is irradiated with laser light to perform a separation process between the semiconductor device and the temporary substrate.

In general, devices that provide laser light must be equipped with F-Theta lenses so that the laser light can be smoothly illuminated onto a plane at the semiconductor component. However, this will make it impossible to reduce the volume of the device providing the laser light. If you need to illuminate a large area of the sample, it will make the device too bulky. In addition, in the semiconductor components having a small size, the application range of the current laser device is more and more limited by the size factor, for example, the semiconductor element having a small size is prone to warpage. Therefore, how to design a light source device that can eliminate the need to configure a flat field lens group to reduce the volume while avoiding the warpage of the semiconductor component and reducing the accuracy is The surgeon is committed to research.

The novel creation provides a light source system that can perform large-area illumination without the need to additionally configure a flat field lens group, and can reduce the size of the device.

The light source system created by the present invention comprises a light emitting device, a first lens and a second lens. The illumination device is adapted to provide a light beam. The first lens is disposed on the transmission path of the light beam. The second lens is disposed on the transmission path of the light beam. The first lens is located between the illuminating device and the second lens, wherein the light beam is transmitted through the first lens in a first direction, and the light beam is transmitted in a second direction through the reflection of the second lens. The first direction is different from the second direction.

In an embodiment of the novel creation, the first direction is perpendicular to the second direction.

In an embodiment of the present invention, the light emitting device is a laser device.

In an embodiment of the present invention, the light beam is reflected by a second lens to a projection space.

In an embodiment of the novel creation, the first lens adjusts a focus position of the light beam in a horizontal direction in the projection space.

In an embodiment of the novel creation, the second lens adjusts a focus position of the light beam in a vertical direction in the projection space.

In an embodiment of the novel creation, the above light source system conforms to a formula (1) A>40B and (2)2B>C>0, where A is the distance between the beam and a reference plane in the projection space, B is the distance between the first lens and the second lens, and C is the projection space. The distance perpendicular to the reference plane.

In an embodiment of the novel creation, the first lens includes a focusing lens group adapted to move on a transmission path of the light beam to adjust a focus position of the light beam.

In an embodiment of the present invention, the light source system further includes a controller electrically connected to the first lens and adapted to control the movement of the focusing lens group on the transmission path of the light beam.

In an embodiment of the present invention, the second lens includes a first reflecting device and a second reflecting device, wherein the first reflecting device is adapted to rotate in the second direction to adjust the focus position of the light beam, and the second reflection The device is adapted to rotate in a first direction to adjust a focus position of the beam.

In an embodiment of the present invention, the light source system further includes a controller electrically connected to the second lens, adapted to control the first reflecting device to rotate in the second direction, and to control the second reflecting device to be along the first The direction is rotated.

Based on the above, in the embodiment of the present invention, the illumination device is adapted to transmit the provided light beam in the first direction by the first lens, and in the second direction different from the first direction by the reflection of the second lens Directional delivery. Therefore, there is no need to additionally configure the flat field lens group, which can further reduce the system height and reduce the size of the device, while avoiding the problem that the vibration is easily generated due to the system being too high.

The above described features and advantages of the present invention will become more apparent and understood from the following description.

10‧‧‧ Targets

50‧‧‧Correction component

60‧‧‧Light guiding elements

100‧‧‧Electronic devices

110‧‧‧Lighting device

120‧‧‧ first shot

122‧‧‧Shell

124‧‧‧ Focusing mirror

130‧‧‧second lens

132‧‧‧First reflection device

134‧‧‧second reflector

D1, D2, D3‧‧‧ distance

F1‧‧‧ first direction

F2‧‧‧second direction

L‧‧‧beam

S‧‧‧projection space

1 is a schematic view of a light source system in accordance with an embodiment of the present invention.

2 is a side elevational view of the first lens and the second lens of FIG. 1.

3 is a perspective view of the first lens and the second lens of FIG. 1.

1 is a schematic view of a light source system in accordance with an embodiment of the present invention. Referring to FIG. 1, in the embodiment, the light source system 100 is adapted to provide a light beam L, and control the light beam L for sample positioning, scanning detection, or cleaning, separation, and the like. The separation process will be described as an example below, but the novel creation is not limited thereto.

The light source system 100 includes a light emitting device 110, a first lens 120, and a third lens 130. The light emitting device 110 is adapted to provide the light beam L, and the first lens 120 and the second lens 130 are disposed on the transmission path of the light beam L, and the first lens 120 is located between the light emitting device 110 and the second lens 130. In other words, the light beam L provided by the illuminating device 110 is sequentially transmitted through the first lens 120 and the second lens 130 and the second lens 130 illuminates the light beam L onto a target.

Specifically, the light source device 100 is disposed, for example, on an optical table, and further includes optical elements such as the correction element 50 and the light guiding element 60 to assist the quality of the light beam L provided by the light source device 100. The correcting element 50 is, for example, an optical component such as a calibration lens group, a beam current collector or a laser power attenuator, wherein the laser power attenuator can further Used to adjust the laser power. The light guiding element 60 is, for example, an optical element such as a beam splitter or a mirror. However, the novel creation is not limited to this.

2 is a side elevational view of the first lens and the second lens of FIG. 1. Referring to FIG. 1 to FIG. 2, in the embodiment, the light emitting device 110 is, for example, a laser device to provide a laser beam. The light beam L is transmitted through the first lens 120 in a first direction F1, and the light beam L is transmitted through the second lens 130 in a second direction F2, and the first direction F1 is different from the second direction F2. In the present embodiment, the first direction F1 is perpendicular to the second direction F2. In this way, the light beam L can be transmitted to the second lens 130 via the first lens 120, and then projected and focused by the second lens 130 onto the object 10, thereby performing illumination without additional configuration of the flat field lens group to reduce the device. volume.

In this embodiment, the light beam L passes through the first lens 120 and the second lens 130 in sequence, and is emitted by the second lens 130 and focused into a projection space S where the object 10 is located. The target 10 is, for example, a semiconductor element. For example, the semiconductor element is a wafer and a temporary substrate bonded by an adhesive layer. Therefore, the light beam L can be used to scan the adhesive layer on the target 10 to separate the wafer from the temporary substrate, thereby completing the semiconductor element. Separation process, but the creation of this novel is not limited to this. The projection space S refers to a space in which the light beam L can be focused to produce a substantial effect. The first lens 120 is adapted to adjust a focus position of the light beam L in a vertical direction in the projection space S (ie, perpendicular to the extending direction of the object 10), and the second lens 130 is adapted to adjust the vertical direction of the light beam L in the projection space S ( That is, the focus position parallel to the extending direction of the object 10).

As such, since the first lens 120 can focus the light beam L at different positions in the vertical direction in the projection space S. Therefore, it can be adapted to different sizes or different The thickness of the target 10 further enhances the precision of the laser beam illuminating the adhesion layer to separate the wafer from the temporary substrate. In addition, in the thin semiconductor device, the first lens 120 can be focused on the side of the adhesive layer closer to the temporary substrate to prevent the wafer from being damaged by the irradiation of the light beam L. .

It is worth mentioning that in the present embodiment, the relative positions of the first lens 120, the second lens 130, and the object 10 in the light source system 100 are related to each other. In detail, the light source system 100 conforms to the formula: (1) A>40B and (2)2B>C>0, where A is the distance D1 between the light beam L and a reference plane E in the projection space S (and the light source system 100) The working distance to the target 10), B is the distance D2 between the first lens 120 and the second lens 130, and C is the distance D3 perpendicular to the reference plane E in the projection space S. For example, A is, for example, 1164 mm, B is, for example, 20 mm and C is, for example, 30 mm or 10 mm. Therefore, in the present embodiment, the relative positions of the first lens 120, the second lens 130, and the object 10 can be adjusted in accordance with the object 10 and its required illumination space (ie, the projection space S).

3 is a perspective view of the first lens and the second lens of FIG. 1. Referring to FIG. 1 to FIG. 3 , in detail, the first lens 120 includes a housing 122 and a focusing lens set 124 . The focusing lens assembly 124 is disposed in the housing 122 to allow the light beam L to enter the first lens 120 and pass through the focusing mirror. Group 124. Therefore, the focus position of the light beam L in the vertical direction in the projection space S can be adjusted by adjusting the front and rear positions of the focusing mirror group 124 in the transmission path of the light beam L in the casing 122.

The second lens 130 includes a first reflecting device 132 and a second reflecting device 134, wherein the first reflecting device 132 is adapted to rotate in the second direction F2 to adjust the light. The focus position of the bundle L, and the second reflecting means 134 is adapted to rotate in the first direction F1 to adjust the focus position of the light beam L. Specifically, the first reflecting device 132 and the second reflecting device 134 are, for example, a mirror and a motor. Therefore, the mirror L can be rotated by the motor to drive the mirror to reflect the light beam L. In other words, when the light beam L is supplied, only the first reflecting means 132 and the second reflecting means 134 in the second lens 130 are actually moved at a high speed. In the present embodiment, the light beam L is first reflected by the second reflecting device 134 to the first reflecting device 132 and then reflected to the target 10 via the first reflecting device 132.

The light beam L emitted by the light-emitting device 110 can adjust the focus position in the vertical direction of the projection space S by the focusing mirror group 124 of the first lens 120, and adjust the projection space S by the first reflecting device 132 and the second reflecting device 134. The focus position in the horizontal direction. Therefore, the light beam L emitted from the light-emitting device 110 can be stereoscopically scanned or focused in the projection space S. In addition, since there is no need to additionally configure the flat field lens group, the system height can be further reduced to reduce the size of the device, and at the same time avoid the problem that the system is too high to generate vibration.

In some embodiments, the light source system 100 further includes a controller electrically connected to the first lens 120 and the second lens 130 to enable the user to control the focusing lens group 124 of the first lens 120 in the light beam L through the controller. Moving on the transfer path, or controlling the first reflecting means 132 of the second lens 130 to rotate in the second direction F2, and controlling the second reflecting means 134 of the second lens 130 to rotate in the first direction F1. Therefore, the effect of the light source system 100 scanning the target can be improved by an automated operation.

In summary, in the embodiment of the novel creation, the light-emitting device is suitable for The provided light beam is transmitted in a first direction by the first lens and in a second direction different from the first direction by reflection of the second lens. Therefore, there is no need to additionally configure the flat field lens group, which can further reduce the system height and reduce the size of the device, while avoiding the problem that the vibration is easily generated due to the system being too high.

Although the present invention has been disclosed in the above embodiments, it is not intended to limit the novel creation, and any person skilled in the art can make some changes without departing from the spirit and scope of the novel creation. Retouching, the scope of protection of this new creation is subject to the definition of the scope of the patent application attached.

Claims (11)

A light source system comprising: a light emitting device adapted to provide a light beam; a first lens disposed on the transmission path of the light beam; and a second lens disposed on the transmission path of the light beam, the first lens position Between the illuminating device and the second lens, wherein the light beam is transmitted through the first lens in a first direction, and the light beam is transmitted in a second direction by reflection of the second lens, the first direction being different The second direction. The light source system of claim 1, wherein the first direction is perpendicular to the second direction. The light source system of claim 1, wherein the light emitting device is a laser device. The light source system of claim 1, wherein the light beam is reflected by the second lens to a projection space. The light source system of claim 4, wherein the first lens adjusts a focus position of the light beam in a horizontal direction in the projection space. The light source system of claim 4, wherein the second lens adjusts a focus position of the light beam in a vertical direction in the projection space. The light source system of claim 4, wherein the light source system conforms to the formulas (1) A>40B and (2)2B>C>0, wherein A is between the light beam and a reference plane in the projection space. The distance between B is the distance between the first lens and the second lens, and C is the distance perpendicular to the reference surface in the projection space. The light source system of claim 1, wherein the first lens comprises a focusing lens adapted to move on a transmission path of the light beam to adjust a focus position of the light beam. The light source system of claim 8, further comprising: a controller electrically connected to the first lens, adapted to control the focusing mirror to move on the transmission path of the beam. The light source system of claim 1, wherein the second lens comprises a first reflecting device and a second reflecting device, wherein the first reflecting device is adapted to rotate in the second direction to adjust the light beam In the focus position, the second reflecting means is adapted to rotate in the first direction to adjust the focus position of the light beam. The light source system of claim 10, further comprising: a controller electrically connected to the second lens, adapted to control the first reflecting device to rotate in the second direction, and to control the second reflection The device rotates in the first direction.