TWM570949U - Particle detection module - Google Patents

Particle detection module

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Publication number
TWM570949U
TWM570949U TWM570949U TW M570949 U TWM570949 U TW M570949U TW M570949 U TWM570949 U TW M570949U
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TW
Taiwan
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detecting
particle
channel
gas
base
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Chinese (zh)
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Abstract

一種微粒偵測模組,包含:基座,內部具有偵測通道及光束通道;偵測部件,設置於基座內,並包含雷射光器及微粒傳感器,雷射光器發射光束投射於光束通道中,微粒傳感器對應設置到偵測通道與光束通道正交位置;微型泵,由噴氣孔片、腔體框架、致動體、絕緣框架及導電框架依序堆疊組成,承載於基座中,並封蓋導氣凹槽;其中微型泵受驅動吸附引導基座外部之氣體快速導入偵測通道中,氣體通過偵測通道與光束通道正交位置,受雷射光器照射而投射光點至微粒傳感器,微粒傳感器偵測氣體中所含懸浮微粒大小及濃度。A particle detecting module comprises: a base having a detecting channel and a beam channel therein; a detecting component disposed in the base and including a laser and a particle sensor, wherein the laser beam emitted by the laser is projected into the beam path The particle sensor is correspondingly disposed to the orthogonal position of the detection channel and the beam channel; the micropump is composed of a jet orifice plate, a cavity frame, an actuating body, an insulating frame and a conductive frame, which are stacked in the base and sealed. The gas guiding groove is covered; wherein the micropump is driven into the detection channel by the gas outside the driving adsorption guiding base, and the gas passes through the detecting channel and the beam path is orthogonal to the position, and is irradiated by the laser to project the light spot to the particle sensor. The particle sensor detects the size and concentration of suspended particles contained in the gas.

Description

微粒偵測模組Particle detection module

本案關於一種微粒偵測模組,尤指一種可組配於薄型可攜式裝置進行氣體監測的微粒偵測模組。The present invention relates to a particle detecting module, and more particularly to a particle detecting module that can be combined with a thin portable device for gas monitoring.

懸浮微粒是指於氣體中含有的固體顆粒或液滴,由於其粒徑非常細微,容易通過鼻腔內的鼻毛進入人體的肺部,因而引起肺部的發炎、氣喘或心血管的病變,若是其他汙染物依附於懸浮微粒上,更會加重對於呼吸系統的危害。近年來,氣體汙染問題漸趨嚴重,尤其是細懸浮微粒(例如:PM2.5或PM10)之濃度數據常常過高,氣體懸浮微粒濃度之監測漸受重視,但由於氣體會隨風向、風量不定量的流動,而目前檢測懸浮微粒的氣體品質監測站大都為定點,所以根本無法確認當下周遭的懸浮微粒濃度,因此需要一個微型方便攜帶的氣體偵測裝置來供使用者可無時無刻、隨時隨地的檢測周遭的懸浮微粒濃度。Suspension particles refer to solid particles or droplets contained in a gas. Because of their very small particle size, they easily enter the lungs of the human body through the nasal hair in the nasal cavity, thus causing inflammation, asthma, or cardiovascular disease in the lungs. Contaminants adhere to the suspended particles, which will increase the harm to the respiratory system. In recent years, the problem of gas pollution has become more and more serious. Especially the concentration data of fine aerosols (such as PM2.5 or PM10) is often too high. The monitoring of the concentration of gas aerosols is gaining attention, but because the gas will follow the wind direction and air volume. Unquantitative flow, and the current gas quality monitoring stations for detecting suspended particles are mostly fixed points, so it is impossible to confirm the concentration of suspended particles in the current week. Therefore, a micro-portable gas detection device is needed for users to be able to use them all the time, anytime, anywhere. Detecting the concentration of suspended particles around.

有鑑於此,要如何能夠隨時隨地監測懸浮微粒的濃度,實為目前迫切需要解決之問題。In view of this, how to monitor the concentration of suspended particulates anytime and anywhere is an urgent problem to be solved.

本案之主要目的係提供一種微粒偵測模組,利用薄型基座之偵測通道及光束通道,配置定位偵測部件之雷射光器及微粒傳感器在其中,以偵測通過偵測通道與光束通道正交位置之氣體中所含懸浮微粒大小及濃度,並利用微型泵將基座外氣體快速汲取進入偵測通道去偵測氣體中懸浮微粒的濃度,使應用組裝於可攜式電子裝置及穿戴配件上,以形成移動式微粒偵測模組,供使用者可無時無刻、隨時隨地的監測周遭的懸浮微粒濃度。The main purpose of the present invention is to provide a particle detecting module, which uses a detecting channel and a beam channel of a thin base to configure a laser detector and a particle sensor for positioning and detecting components to detect the passage through the detection channel and the beam path. The size and concentration of suspended particles contained in the gas at the orthogonal position, and the micro-pump is used to quickly extract the gas outside the pedestal into the detection channel to detect the concentration of suspended particles in the gas, so that the application is assembled in the portable electronic device and wearable The accessories are used to form a mobile particle detection module, so that the user can monitor the concentration of suspended particles at any time and any place.

本案之一廣義實施態樣為一種微粒偵測模組,包含:一基座,內部具有一偵測部件承載區、一微型泵承載區、一偵測通道及一光束通道,該微型泵承載區具有一導氣凹槽,該微型泵承載區與該偵測通道連通,該偵測部件承載區與該光束通道連通,且該偵測通道與該光束通道為正交設置;一偵測部件,包含一雷射光器及一微粒傳感器,該雷射光器設置於該基座之該偵測部件承載區定位,並能發射光束投射於該光束通道中,該微粒傳感器對應設置到該偵測通道與該光束通道正交位置;一微型泵,由一噴氣孔片、一腔体框架、一致動體、一絕緣框架及導電框架依序堆疊組成,承載於該基座之該微型泵承載區中,並封蓋該導氣凹槽;其中該微型泵受驅動吸附引導該基座外部之氣體快速導入該偵測通道中,該氣體通過該偵測通道與該光束通道正交位置,受該雷射光器照射而投射光點至該微粒傳感器,該微粒傳感器偵測氣體中所含懸浮微粒大小及濃度。A generalized embodiment of the present invention is a particle detecting module comprising: a base having a detecting component carrying area, a micro pump carrying area, a detecting channel and a beam path, the micro pump carrying area Having a gas guiding groove, the micro pump bearing area is in communication with the detecting channel, the detecting component carrying area is in communication with the beam path, and the detecting channel and the beam path are orthogonally disposed; a detecting component, a laser device and a particle sensor are disposed, the laser device is disposed on the detecting component carrying area of the base, and the emitted light beam is projected into the beam channel, and the particle sensor is correspondingly disposed to the detecting channel and The microchannel pump is composed of a jet hole plate, a cavity frame, a uniform moving body, an insulating frame and a conductive frame, and is stacked in the micro pump bearing area of the base. And sealing the air guiding groove; wherein the micro pump is driven to adsorb and guide the gas outside the base to be quickly introduced into the detecting channel, and the gas passes through the detecting channel and the beam path is orthogonal to the position The emitted light is irradiated to the light spot projected particle sensor, a sensor to detect the particulate concentration and size of suspended particles contained in the gas.

體現本案特徵與優點的一些典型實施例將在後段的說明中詳細敘述。應理解的是本案能夠在不同的態樣上具有各種的變化,其皆不脫離本案的範圍,且其中的說明及圖示在本質上當作說明之用,而非用以限制本案。Some exemplary embodiments embodying the features and advantages of the present invention are described in detail in the following description. It is to be understood that the present invention is capable of various modifications in various embodiments, and is not intended to limit the scope of the invention.

請參閱第1圖至第4圖所示,本案提供一種微粒偵測模組,包含一基座1、一偵測部件2及一微型泵3。本案所提供微粒偵測模組為了能組裝應用於可攜式電子裝置及穿戴配件上,其中基座1具有一長度L、一寬度W及一高度H之外觀尺寸,為了與偵測部件2及微型泵3組配,依目前最佳化配置且符合薄型微小化之設計,將基座1之長度L配置為10~60mm,長度L為34~36mm為最佳,寬度W配置為10~50mm,寬度W為29~31mm為最佳,以及高度H配置為1~7mm,高度H為4.5~5.5mm為最佳,讓整個微粒偵測模組具備攜帶便利性之實施設計。Referring to FIG. 1 to FIG. 4 , the present invention provides a particle detecting module comprising a base 1 , a detecting component 2 and a micro pump 3 . In order to be able to be assembled and applied to a portable electronic device and a wearable accessory, the base 1 has a length L, a width W and a height H, for the purpose of detecting the component 2 and The micro-pump 3 is equipped with the current optimized configuration and conforms to the thin and miniaturized design. The length L of the base 1 is configured to be 10 to 60 mm, the length L is 34 to 36 mm, and the width W is configured to be 10 to 50 mm. The width W is preferably 29~31mm, and the height H is configured to be 1~7mm, and the height H is 4.5~5.5mm. The whole particle detection module is designed to be convenient to carry.

請參閱第1圖至第4圖所示,上述之基座1具有一第一表面1a及一第二表面1b,第一表面1a及第二表面1b為相對設置之兩個表面,內部具有一偵測部件承載區11、一微型泵承載區12、一偵測通道13及一光束通道14,其中微型泵承載區12設置於第一表面1a,並具有一導氣凹槽121,而偵測部件承載區11、偵測通道13及光束通道14分別貫通第一表面1a及第二表面1b,且微型泵承載區12與偵測通道13連通,偵測部件承載區11與光束通道14連通,且偵測通道13與光束通道14為正交設置,又基座1側邊上具有一進氣入口15及一排氣出口16,進氣入口15與偵測通道13連通,排氣出口16與導氣凹槽121連通。Referring to FIGS. 1 to 4, the susceptor 1 has a first surface 1a and a second surface 1b. The first surface 1a and the second surface 1b are opposite surfaces, and have a surface inside. The detecting component carrying area 11 , a micro pump carrying area 12 , a detecting channel 13 and a beam path 14 , wherein the micro pump carrying area 12 is disposed on the first surface 1 a and has an air guiding groove 121 and detecting The component carrying area 11 , the detecting channel 13 and the beam path 14 respectively penetrate the first surface 1 a and the second surface 1 b , and the micro pump carrying area 12 is connected to the detecting channel 13 , and the detecting component carrying area 11 is connected to the beam path 14 . The detection channel 13 and the beam path 14 are orthogonally disposed, and the side of the base 1 has an intake inlet 15 and an exhaust outlet 16, and the intake inlet 15 communicates with the detection passage 13, and the exhaust outlet 16 is The air guiding groove 121 is in communication.

請參閱如第2圖所示,上述偵測部件2包含有一偵測驅動電路板21、一微粒傳感器22、一雷射光器23及一微處理器24。其中微粒傳感器22、雷射光器23及微處理器24封裝於偵測驅動電路板21上,而偵測驅動電路板21封蓋於基座1之第二表面1b上,並使雷射光器23對應設置於偵測部件承載區11中,並能發射光束投射於光束通道14中,以及微粒傳感器22對應設置到偵測通道13與光束通道14正交位置,如此微處理器24控制雷射光器23及微粒傳感器22之驅動,使雷射光器23發射光束照射於光束通道14中通過偵測通道13與光束通道14正交位置之氣體,並使氣體產生投射光點投射於微粒傳感器22,微粒傳感器22偵測氣體中所含懸浮微粒大小及濃度,並輸出偵測訊號,而微處理器24接收微粒傳感器22所輸出偵測訊號進行分析,以輸出偵測數據。上述之雷射光器23包含一光定位部件231及一雷射發射元件232,光定位部件231設置定位於偵測驅動電路板21上,而雷射發射元件232嵌入設置於光定位部件231中,並電性連接偵測驅動電路板21,以受微處理器24控制驅動,並發射光束照射於光束通道14中。其中微粒傳感器22為PM2.5傳感器或PM10傳感器。As shown in FIG. 2, the detecting component 2 includes a detecting driving circuit board 21, a particle sensor 22, a laser lighter 23, and a microprocessor 24. The particle sensor 22, the laser device 23 and the microprocessor 24 are packaged on the detection driving circuit board 21, and the detecting driving circuit board 21 is sealed on the second surface 1b of the base 1 and the laser device 23 is provided. Correspondingly disposed in the detecting component carrying area 11 and capable of emitting a light beam projected into the beam path 14, and the particle sensor 22 is correspondingly disposed to the detecting channel 13 and the beam path 14 orthogonally, so that the microprocessor 24 controls the laser lighter 23 and the driving of the particle sensor 22, the laser beam emitted by the laser device 23 is irradiated to the gas in the beam path 14 through the detection channel 13 and the beam channel 14 at the position orthogonal to the beam channel 14, and the gas generating projection light spot is projected on the particle sensor 22, the particle The sensor 22 detects the size and concentration of the suspended particles contained in the gas and outputs a detection signal, and the microprocessor 24 receives the detection signal output by the particle sensor 22 for analysis to output the detection data. The laser illuminator 23 includes a light locating component 231 and a laser emitting component 232. The light locating component 231 is disposed on the detecting driving circuit board 21, and the laser emitting component 232 is embedded in the light locating component 231. The detection driving circuit board 21 is electrically connected to be driven by the microprocessor 24, and the emitted light beam is irradiated into the beam path 14. The particle sensor 22 is a PM2.5 sensor or a PM10 sensor.

請參閱第2圖所示,微粒偵測模組進一步包括一絕緣板件4,封蓋於基座1之第一表面1a上,使基座1外部之氣體如第4圖所示由進氣入口15導入偵測通道13中,再通過微型泵承載區12之導氣凹槽12,再由排氣出口16於基座1外,以形成一導氣路徑。又如第2圖及第7圖所示,微粒偵測模組進一步包含一基座外蓋板件5,承置於絕緣板件4上封閉基座1的第一表面1a,以形成電子干擾防護作用,而基座外蓋板件5對應到基座1之進氣入口15位置也具有一進氣入口51予以對應連通,基座外蓋板件5對應到基座1之排氣出口16位置也具有一排氣出口52予以對應連通。Referring to FIG. 2, the particle detecting module further includes an insulating plate member 4, which is capped on the first surface 1a of the base 1, so that the gas outside the base 1 is as shown in FIG. The inlet 15 is introduced into the detecting passage 13 and then passed through the air guiding groove 12 of the micro pump bearing area 12, and then the exhaust outlet 16 is outside the base 1 to form a gas guiding path. As shown in FIG. 2 and FIG. 7, the particle detecting module further includes a base outer cover member 5, which is placed on the insulating plate member 4 to close the first surface 1a of the base 1 to form an electronic interference. The pedestal outer cover member 5 corresponding to the intake inlet 15 of the base 1 also has an intake inlet 51 for corresponding communication, and the base outer cover member 5 corresponds to the exhaust outlet 16 of the base 1. The position also has an exhaust outlet 52 for corresponding communication.

請參閱如第2圖、第4圖、第5圖及第6A圖所示,上述之微型泵3承載於基座1之微型泵承載區12中,並封蓋導氣凹槽121。上述之微型泵3包含有依序堆疊之噴氣孔片31、腔體框架32、致動體33、絕緣框架34及導電框架35;噴氣孔片31包含了複數個連接件31a、一懸浮片31b及一中心孔洞31c,懸浮片31b可彎曲振動,複數個連接件31a鄰接於懸浮片31b的周緣,本實施例中,連接件31a其數量為4個,分別鄰接於懸浮片31b的4個角落,但不此以為限,而中心孔洞31c形成於懸浮片31b的中心位置;腔體框架32承載疊置於懸浮片31b上,致動體33承載疊置於腔體框架32上,並包含了一壓電載板33a、一調整共振板33b及一壓電板33c,其中,壓電載板33a承載疊置於腔體框架32上,調整共振板33b承載疊置於壓電載板33a上,壓電板33c承載疊置於調整共振板33b上,供施加電壓後發生形變以帶動壓電載板33a及調整共振板33b進行往復式彎曲振動;絕緣框架34則是承載疊置於致動體33之壓電載板33a上,導電框架35承載疊置於絕緣框架34上,其中,致動體33、腔體框架32及該懸浮片31b之間形成一共振腔室36,其中,調整共振板33b的厚度大於壓電載板33a的厚度。Referring to FIG. 2, FIG. 4, FIG. 5 and FIG. 6A, the micropump 3 described above is carried in the micropump carrying area 12 of the base 1 and covers the air guiding groove 121. The above-mentioned micropump 3 includes a gas jet orifice 31, a cavity frame 32, an actuating body 33, an insulating frame 34 and a conductive frame 35 which are sequentially stacked. The gas jet orifice 31 comprises a plurality of connecting pieces 31a and a suspension piece 31b. And a central hole 31c, the suspension piece 31b is bendable and vibrating, and the plurality of connecting members 31a are adjacent to the circumference of the suspension piece 31b. In the embodiment, the number of the connecting members 31a is four, respectively adjacent to the four corners of the suspension piece 31b. However, it is not limited thereto, and the central hole 31c is formed at a center position of the suspension piece 31b; the cavity frame 32 is carried on the suspension piece 31b, and the actuating body 33 is carried on the cavity frame 32, and includes A piezoelectric carrier 33a, an adjustment resonator 33b and a piezoelectric plate 33c, wherein the piezoelectric carrier 33a is stacked on the cavity frame 32, and the adjustment resonator 33b is placed on the piezoelectric carrier 33a. The piezoelectric plate 33c is placed on the adjustment resonance plate 33b for deformation after being applied to drive the piezoelectric carrier 33a and the adjustment resonance plate 33b for reciprocating bending vibration; the insulating frame 34 is stacked and actuated. On the piezoelectric carrier 33a of the body 33, the conductive frame 35 carries the overlay The insulating frame 34, wherein the actuator body 33, a resonant chamber 36 is formed between the cavity 32 and the suspension frame plate 31b, wherein adjusting the resonator plate 33b is thicker than the piezoelectric plate carrier 33a.

請參閱第6A圖至第6C圖,微型泵3透過連接件31a設置於微型泵承載區121上,噴氣孔片31與導氣凹槽121的底面間隔設置,並於兩者之間形成氣流腔室37;請再參閱第6B圖,當施加電壓於致動體33之壓電板33c時,壓電板33c因壓電效應開始產生形變並同部帶動調整共振板33b與壓電載板33a,此時,噴氣孔片31會因亥姆霍茲共振(Helmholtz resonance)原理一起被帶動,使得致動體33向上移動,由於致動體33向上位移,使得噴氣孔片31與導氣凹槽121的底面之間的氣流腔室37的容積增加,其內部氣壓形成負壓,於微型泵3外的氣體將因為壓力梯度由噴氣孔片31的連接件31a與導氣凹槽121的側壁之間的空隙進入氣流腔室37並進行集壓;最後請參閱第6C圖,氣體不斷地進入氣流腔室37內,使氣流腔室37內的氣壓形成正壓,此時,致動體33受電壓驅動向下移動,將壓縮氣流腔室37的容積,並且推擠氣流腔室37內氣體,使氣體由排氣出口16排出於基座1外,透過不斷地重複上述第6B圖至第6C圖所示之微型泵3提供氣體傳輸作動步驟,使微型泵3能夠連續將氣體由噴氣孔片31的連接件31a與導氣凹槽121的側壁之間的空隙進入氣流腔室37構成流道產生壓力梯度,使氣體高速流動,達到微型泵3傳輸氣體輸出的作動操作。Referring to FIGS. 6A-6C, the micropump 3 is disposed on the micropump carrying area 121 through the connecting member 31a. The air venting piece 31 is spaced apart from the bottom surface of the air guiding groove 121, and an air flow chamber is formed therebetween. Referring to FIG. 6B, when a voltage is applied to the piezoelectric plate 33c of the actuating body 33, the piezoelectric plate 33c is deformed by the piezoelectric effect and is driven by the same portion to adjust the resonant plate 33b and the piezoelectric carrier 33a. At this time, the gas vent sheet 31 is driven together by the Helmholtz resonance principle, so that the actuating body 33 moves upward, and the gas venting sheet 31 and the gas guiding groove are displaced due to the upward displacement of the actuating body 33. The volume of the airflow chamber 37 between the bottom surfaces of 121 increases, and the internal air pressure thereof forms a negative pressure, and the gas outside the micropump 3 will be separated from the side wall of the air guiding groove 31 by the connecting piece 31a of the air venting piece 31 due to the pressure gradient. The intervening space enters the airflow chamber 37 and collects pressure; finally, referring to FIG. 6C, the gas continuously enters the airflow chamber 37, causing the air pressure in the airflow chamber 37 to form a positive pressure. At this time, the actuating body 33 is subjected to The voltage drive moves downwards, compressing the volume of the airflow chamber 37, and The gas in the airflow chamber 37 is pushed, and the gas is discharged from the exhaust outlet 16 outside the susceptor 1, and the micropump is provided by continuously repeating the micropump 3 shown in FIGS. 6B to 6C to provide a gas transfer operation step. 3 can continuously flow the gas from the gap between the connecting piece 31a of the air venting piece 31 and the side wall of the air guiding groove 121 into the airflow chamber 37 to form a pressure gradient, so that the gas flows at a high speed, and the micropump 3 transmits the gas output. Actuation.

上述微型泵3也可透過微機電製程的方式所製出的微機電系統氣體泵浦,其中噴氣孔片31、腔體框架32、致動體33、絕緣框架34及導電框架35皆可透過面型微加工技術製成,以縮小微型泵3的體積。The micropump 3 can also be MEMS pumped by a microelectromechanical process, wherein the air vent 31, the cavity frame 32, the actuating body 33, the insulating frame 34 and the conductive frame 35 are all permeable to the surface. A micromachining technique is made to reduce the volume of the micropump 3.

由上述說明可知,本案所提供一種微粒偵測模組在具體實施中,當微型泵3受驅動吸附引導基座1外部之氣體快速導入偵測通道13中,氣體通過偵測通道13與光束通道14正交位置,受雷射光器23照射而投射光點至微粒傳感器22,微粒傳感器22偵測氣體中所含懸浮微粒大小及濃度。如此本案所提供微粒偵測模組可應用組裝於可攜式電子裝置上,以形成移動式微粒偵測模組。其中可攜式裝置為一手機、一平板電腦、一穿戴式裝置及一筆記型電腦之其中之一。或者本案所提供微粒偵測模組可應用組裝於穿戴配件上,以形成移動式微粒偵測模組。其中該穿戴配件為一吊飾、一鈕扣、一眼鏡及一手錶之其中之一。As can be seen from the above description, in the specific implementation of the present invention, when the micropump 3 is driven by the gas adsorbing and guiding the outside of the susceptor 1 into the detection channel 13, the gas passes through the detection channel 13 and the beam path. At 14 orthogonal positions, the spot is projected by the laser lighter 23 to the particle sensor 22, and the particle sensor 22 detects the size and concentration of the suspended particles contained in the gas. Therefore, the particle detection module provided in the present invention can be applied to a portable electronic device to form a mobile particle detection module. The portable device is one of a mobile phone, a tablet computer, a wearable device and a notebook computer. Or the particle detection module provided in the present application can be applied to the wearable accessory to form a mobile particle detection module. The wearing accessory is one of a charm, a button, a pair of glasses and a watch.

綜上所述,本案所提供之微粒偵測模組,利用薄型基座之偵測通道及光束通道及配置定位偵測部件之雷射光器及微粒傳感器在其中,以偵測通過偵測通道與光束通道正交位置之氣體中所含懸浮微粒大小及濃度,並利用微型泵將基座外氣體快速汲取進入偵測通道去偵測氣體中懸浮微粒的濃度,而本裝置非常適合應用組裝於可攜式電子裝置及穿戴配件上,以形成移動式微粒偵測模組,供使用者可無時無刻、隨時隨地地監測周遭的懸浮微粒濃度,極具產業利用性及進步性。In summary, the particle detection module provided by the present invention utilizes a detection channel of a thin pedestal and a beam path and a laser and a particle sensor configured with a positioning detecting component to detect the passage through the detection channel. The size and concentration of suspended particles contained in the gas at the orthogonal position of the beam channel, and the micro-pump is used to quickly extract the gas outside the pedestal into the detection channel to detect the concentration of suspended particles in the gas, and the device is very suitable for application and assembly. The portable electronic device and the wearable accessory form a mobile particle detecting module, so that the user can monitor the concentration of suspended particles at any time and any place, and has great industrial applicability and advancement.

1‧‧‧基座1‧‧‧Base

1a‧‧‧第一表面 1a‧‧‧ first surface

1b‧‧‧第二表面 1b‧‧‧ second surface

11‧‧‧偵測部件承載區 11‧‧‧Detecting component bearing area

12‧‧‧微型泵承載區 12‧‧‧Micro pump bearing area

121‧‧‧導氣凹槽 121‧‧‧ air guiding groove

13‧‧‧偵測通道 13‧‧‧Detection channel

14‧‧‧光束通道 14‧‧‧beam channel

15‧‧‧進氣入口 15‧‧‧Intake inlet

16‧‧‧排氣出口 16‧‧‧Exhaust outlet

2‧‧‧偵測部件 2‧‧‧Detecting parts

21‧‧‧偵測驅動電路板 21‧‧‧Detection driver board

22‧‧‧微粒傳感器 22‧‧‧Particle sensor

23‧‧‧雷射光器 23‧‧‧Raylight

231‧‧‧光定位部件 231‧‧‧Light positioning parts

232‧‧‧雷射發射元件 232‧‧‧Laser emitting elements

24‧‧‧微處理器 24‧‧‧Microprocessor

3‧‧‧微型泵 3‧‧‧Micropump

31‧‧‧噴氣孔片 31‧‧‧Air hole film

31a‧‧‧連接件 31a‧‧‧Connecting parts

31b‧‧‧懸浮片 31b‧‧‧suspension tablets

31c‧‧‧中心孔洞 31c‧‧‧ center hole

32‧‧‧腔體框架 32‧‧‧ cavity frame

33‧‧‧致動體 33‧‧‧Acoustic body

33a‧‧‧壓電載板 33a‧‧‧Piezo carrier

33b‧‧‧調整共振板 33b‧‧‧Adjusting the resonance plate

33c‧‧‧壓電板 33c‧‧‧Piezoelectric plate

34‧‧‧絕緣框架 34‧‧‧Insulation frame

35‧‧‧導電框架 35‧‧‧Electrical frame

36‧‧‧共振腔室 36‧‧‧Resonance chamber

37‧‧‧氣流腔室 37‧‧‧Airflow chamber

H‧‧‧高度 H‧‧‧ Height

L‧‧‧長度 L‧‧‧ length

W‧‧‧寬度 W‧‧‧Width

第1圖所示為本案微粒偵測模組之外觀示意圖。 第2圖所示為本案微粒偵測模組之相關構件之分解示意圖。 第3圖所示為本案微粒偵測模組之基座示意圖。 第4圖所示為本案微粒偵測模組之偵測實施示意圖。 第5圖所示為本案微粒偵測模組之微型泵相關構件之分解示意圖。 第6A圖所示為本案微粒偵測模組之微型泵之剖面示意圖。 第6B圖至第6C圖所示為第6A圖中本案微粒偵測模組之微型泵作動示意圖。 第7圖所示為本案微粒偵測模組之基座外蓋板件之外觀示觀圖。Figure 1 shows the appearance of the particle detection module of the present invention. Figure 2 is an exploded view of the relevant components of the particle detection module of the present invention. Figure 3 shows the base of the particle detection module of the present invention. Figure 4 is a schematic diagram showing the detection implementation of the particle detection module of the present invention. Fig. 5 is a schematic exploded view of the micropump related components of the particle detecting module of the present invention. Figure 6A is a cross-sectional view showing the micropump of the particle detecting module of the present invention. Fig. 6B to Fig. 6C are schematic diagrams showing the operation of the micropump of the particle detecting module of Fig. 6A. Figure 7 is a view showing the appearance of the base cover member of the particle detecting module of the present invention.

Claims (14)

一種微粒偵測模組,包含:一基座,內部具有一偵測部件承載區、一微型泵承載區、一偵測通道及一光束通道,該微型泵承載區具有一導氣凹槽,該微型泵承載區與該偵測通道連通,該偵測部件承載區與該光束通道連通,且該偵測通道與該光束通道正交設置;一偵測部件,包含一雷射光器及一微粒傳感器,該雷射光器設置於該基座之該偵測部件承載區定位,並能發射光束投射於該光束通道中,該微粒傳感器對應設置到該偵測通道與該光束通道正交位置;以及一微型泵,由一噴氣孔片、一腔體框架、一致動體、一絕緣框架及一導電框架依序堆疊組成,承載於該基座之該微型泵承載區中,並封蓋該導氣凹槽;其中,該微型泵受驅動吸附引導該基座外部之一氣體快速導入該偵測通道中,該氣體通過該偵測通道與該光束通道正交位置,受該雷射光器照射而投射光點至該微粒傳感器,該微粒傳感器偵測該氣體中所含懸浮微粒大小及濃度。 A particle detecting module includes: a base having a detecting component carrying area, a micro pump carrying area, a detecting channel and a beam path, the micro pump carrying area having an air guiding groove, The micro pump bearing area is in communication with the detecting channel, the detecting component carrying area is in communication with the beam path, and the detecting channel is orthogonally disposed with the beam path; a detecting component includes a laser lighter and a particle sensor The laser illuminator is disposed on the detecting component carrying area of the pedestal, and the emitted light beam is projected into the beam path, and the particle sensor is correspondingly disposed to the detecting channel and the beam path orthogonally; and The micropump is composed of a jet orifice piece, a cavity frame, a uniform moving body, an insulating frame and a conductive frame, which are sequentially stacked, are carried in the micro pump bearing area of the base, and cover the air guiding concave a slot; wherein the micropump is driven to attract a gas outside the pedestal to be quickly introduced into the detecting channel, and the gas passes through the detecting channel and is orthogonal to the beam path, and is irradiated by the laser Emitting a light spot to the particulate matter sensor, the particulate sensor to detect the size and concentration of suspended particles contained in the gas. 如申請專利範圍第1項所述之微粒偵測模組,其中該微粒傳感器為PM2.5傳感器。 The particle detection module of claim 1, wherein the particle sensor is a PM2.5 sensor. 如申請專利範圍第1項所述之微粒偵測模組,其中該基座具有一第一表面及一第二表面,該微型泵承載區設置於該第一表面,該偵測部件承載區、該偵測通道及該光束通道分別貫通該第一表面及該第二表面,以及該基座側邊上具有一進氣入口及一排氣出口,該進氣入口與該偵測通道連通,該排氣出口與該導氣凹槽連通,該微型泵受驅動吸附引導該基座外部之該氣體快速由該進氣入口導入該偵測通道中,並通過該偵測通道與該光束通道正交位置後,再進入該導氣凹槽中而由該排氣出口排出於 該基座外。 The particle detecting module of claim 1, wherein the base has a first surface and a second surface, and the micro pump bearing area is disposed on the first surface, the detecting component carrying area, The detection channel and the beam path respectively penetrate the first surface and the second surface, and the side of the base has an intake inlet and an exhaust outlet, and the intake inlet is in communication with the detection channel, An exhaust outlet is connected to the air guiding groove, and the micro pump is driven to attract the gas outside the base to be quickly introduced into the detecting channel from the air inlet, and is orthogonal to the beam path through the detecting channel After the position, it enters the air guiding groove and is discharged from the exhaust air outlet. Outside the pedestal. 如申請專利範圍第3項所述之微粒偵測模組,其中該偵測部件包含有一偵測驅動電路板及一微處理器,該雷射光器及該微粒傳感器封裝於該偵測驅動電路板上,且該偵測驅動電路板封蓋於該基座之該第二表面上,並使該雷射光器對應設置於該偵測部件承載區中,以及該微粒傳感器對應設置到該偵測通道與該光束通道正交位置,而該微處理器封裝於該偵測驅動電路板上,以控制該雷射光器及該微粒傳感器之驅動,使該雷射光器發射光束照射於該光束通道中通過該偵測通道與該光束通道正交位置之該氣體,並使該氣體產生投射光點投射於該微粒傳感器,該微粒傳感器該偵測該氣體中所含懸浮微粒大小及濃度,並輸出偵測訊號,而該微處理器接收該微粒傳感器所輸出偵測訊號進行分析,以輸出偵測數據。 The particle detecting module of claim 3, wherein the detecting component comprises a detecting driving circuit board and a microprocessor, and the laser light detector and the particle sensor are packaged on the detecting driving circuit board And the detection driving circuit board is capped on the second surface of the base, and the laser light device is correspondingly disposed in the detecting component carrying area, and the particle sensor is correspondingly disposed to the detecting channel Aligning with the beam path, the microprocessor is packaged on the detection driving circuit board to control the driving of the laser device and the particle sensor, so that the laser beam emitted by the laser beam passes through the beam channel The detection channel is adjacent to the beam channel, and the gas generates a projection spot to be projected on the particle sensor. The particle sensor detects the size and concentration of the suspended particles contained in the gas, and outputs the detection. The signal receives the detection signal output by the particle sensor for analysis to output the detection data. 如申請專利範圍第4項所述之微粒偵測模組,進一步包括一絕緣板件,封蓋於該基座之該第一表面上,使該基座外部之該氣體由該進氣入口導入該偵測通道中,再通過該微型泵承載區之該導氣凹槽,再由該排氣出口排出於該基座外,以形成一導氣路徑。 The particle detecting module of claim 4, further comprising an insulating plate member covering the first surface of the base, such that the gas outside the base is introduced from the air inlet In the detecting channel, the air guiding groove of the micro pump bearing area is further discharged from the exhausting outlet to form a gas guiding path. 如申請專利範圍第5項所述之微粒偵測模組,進一步包含一基座外蓋板件,承置於該絕緣板件上封閉該基座的該第一表面,以形成電子干擾防護作用,該基座外蓋板件對應到該基座之該進氣入口位置也具有一進氣入口予以對應連通,該基座外蓋板件對應到該基座之該排氣出口位置也具有一排氣出口予以對應連通。 The particle detecting module of claim 5, further comprising a base outer cover member mounted on the insulating plate member to close the first surface of the base to form an electronic interference protection function The base outer cover member also has an air inlet inlet corresponding to the air inlet inlet position of the base, and the base outer cover member also has a position corresponding to the exhaust outlet of the base. The exhaust outlets are connected in communication. 如申請專利範圍第4項所述之微粒偵測模組,其中該雷射光器包含一光定位部件及一雷射發射元件,該光定位部件設置定位於該偵測驅動電路板上,而該雷射發射元件嵌入設置於該光定位部件中,並電性連接該偵測驅動電路板,以受該微處理器控制驅動,並發射光束照射於該光束通 道中。 The particle detecting module of claim 4, wherein the laser device comprises an optical positioning component and a laser emitting component, wherein the optical positioning component is disposed on the detecting driving circuit board, and the optical positioning component is disposed on the detecting driving circuit board. The laser emitting component is embedded in the optical positioning component and electrically connected to the detecting driving circuit board to be driven by the microprocessor, and the emitted light beam is irradiated to the light beam In the middle. 如申請專利範圍第1項所述之微粒偵測模組,其中:該噴氣孔片包含複數個連接件、一懸浮片及一中心孔洞,該懸浮片可彎曲振動,該複數個連接件鄰接於該懸浮片周緣並提供彈性支撐該懸浮片,而該中心孔洞形成於該懸浮片的中心位置,該噴氣孔片透過複數個連接件固定設置於該微型泵承載區之該導氣凹槽上方,該噴氣孔片與該導氣凹槽之間形成一氣流腔室,且該複數個連接件及該懸浮片之間形成至少一空隙;該腔體框架,承載疊置於該懸浮片上;該致動體,承載疊置於該腔體框架上,以接受電壓而產生往復式地彎曲振動;以及該絕緣框架,承載疊置於該致動體上,該導電框架,承載疊設置於該絕緣框架上;其中,該致動體、該腔體框架及該懸浮片之間形成一共振腔室,透過驅動該致動體以帶動該噴氣孔片產生共振,使該噴氣孔片之該懸浮片產生往復式地振動位移,以使該氣體通過該至少一空隙進入該氣流腔室,實現該氣體之傳輸流動。 The particle detecting module of claim 1, wherein the air venting piece comprises a plurality of connecting members, a suspension piece and a central hole, the floating piece is bendable and vibrating, and the plurality of connecting pieces are adjacent to The suspension sheet is provided at a periphery of the suspension sheet and elastically supports the suspension sheet, and the central hole is formed at a center position of the suspension sheet, and the gas injection hole sheet is fixedly disposed above the gas guiding groove of the micro pump bearing region through a plurality of connecting members. Forming an air flow chamber between the air venting piece and the air guiding groove, and forming at least one gap between the plurality of connecting members and the floating piece; the cavity frame is stacked on the floating piece; a movable body, the carrier is stacked on the frame of the cavity to receive a voltage to generate a reciprocating bending vibration; and the insulating frame is stacked on the actuating body, and the conductive frame is disposed on the insulating frame Forming a resonant cavity between the actuating body, the cavity frame and the suspension piece, and driving the actuating body to drive the air venting piece to resonate, so that the floating piece of the air venting piece is generated The displacement is reciprocally vibrated to allow the gas to enter the gas flow chamber through the at least one gap to effect the transport flow of the gas. 如申請專利範圍第8項所述之微粒偵測模組,其中該致動體包含:一壓電載板,承載疊置於該腔體框架上;一調整共振板,承載疊置於該壓電載板上;以及一壓電板,承載疊置於該調整共振板上,以接受電壓而驅動該壓電載板及該調整共振板產生往復式地彎曲振動。 The particle detecting module of claim 8, wherein the actuating body comprises: a piezoelectric carrier plate stacked on the cavity frame; and an adjustment resonant plate, the carrier is stacked on the pressure And a piezoelectric plate stacked on the adjustment resonator plate to receive the voltage to drive the piezoelectric carrier and the adjustment resonator plate to generate reciprocating bending vibration. 如申請專利範圍第1項所述之微粒偵測模組,其中該微型泵為一微機電系統之微型泵。 The particle detecting module of claim 1, wherein the micro pump is a micro pump of a micro electro mechanical system. 如申請專利範圍第1項所述之微粒偵測模組,其中該微粒偵測模組應用 組裝於一可攜式電子裝置上,以形成移動式微粒偵測模組。 The particle detection module of claim 1, wherein the particle detection module is applied The device is assembled on a portable electronic device to form a mobile particle detecting module. 如申請專利範圍第11項所述之微粒偵測模組,其中該可攜式裝置為一手機、一平板電腦、一穿戴式裝置及一筆記型電腦之其中之一。 The particle detection module of claim 11, wherein the portable device is one of a mobile phone, a tablet computer, a wearable device, and a notebook computer. 如申請專利範圍第1項所述之微粒偵測模組,其中該微粒偵測模組應用組裝於一穿戴配件上,以形成移動式微粒偵測模組。 The particle detection module of claim 1, wherein the particle detection module is assembled on a wearable accessory to form a mobile particle detection module. 如申請專利範圍第13項所述之微粒偵測模組,其中該穿戴配件為一吊飾、一鈕扣、一眼鏡及一手錶之其中之一。 The particle detecting module of claim 13, wherein the wearing accessory is one of a charm, a button, a pair of glasses, and a watch.

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI678525B (en) * 2018-08-30 2019-12-01 研能科技股份有限公司 Particle detecting module

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI678525B (en) * 2018-08-30 2019-12-01 研能科技股份有限公司 Particle detecting module

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