TWM557908U - Vehicle conveying apparatus - Google Patents

Abstract

A carrier handling device includes a clamping member and a detecting device. The clamping member includes at least one clamping segment for clamping the carrier, the at least one clamping segment may be in an unclamped state in which the carrier is not clamped, and a clamping of the carrier is clamped Transition between states. The detecting device is disposed on the at least one clamping segment and includes a sensing component and a triggering unit. The trigger unit is movable between an initial position where the sensing element is not triggered, and a trigger position that triggers the sensing element to generate a sensing signal. When the at least one clamping segment is in the unclamped state, the triggering unit is in the initial position, and when the at least one clamping segment is changed from the unclamped state to the clamping state, the triggering unit is subjected to the The carrier is moved against the top and moved from the initial position to the trigger position.

Description

Vehicle handling equipment

The present invention relates to a carrier handling device, and more particularly to a handling device having a carrier for detecting whether or not to clamp a carrier.

The carrying device of the existing carrier usually has a clamping member for holding the carrier of the carrier substrate, and the detecting component can be disposed on the moving path of the carrier carrying the carrier by the detecting component, so that the detecting component can It is detected whether the carrier is clamped by the clamp. The light generated by the detecting component moves along a light path intersecting the moving path, and whether the light is blocked by the carrier or not by the carrier moving along the moving path determines whether the carrier is held by the clamping member. . However, the detecting component is detected by detecting the carrier only on a single light path. Therefore, the light generated by the detecting component is only required to pass through the light path such as dust or other non-carriers. When the object is interrupted, a detection signal is generated, which causes the detecting component to misjudge the condition that the clamping member has clamped the carrier. Moreover, since the detecting component is exposed to the process environment, the detecting component is susceptible to a micro-dust in the process environment or a detection signal that is misjudged due to interference of the gas to refract light. In addition, the material of the handling equipment may have a light reflection effect, and when the other light source reflected by the conveying device is received by the detecting component, the detecting component may malfunction.

Accordingly, it is an object of the present invention to provide a handling apparatus for a vehicle that overcomes at least one of the disadvantages of the prior art, which is capable of detecting whether or not the carrier is being clamped.

Therefore, in some embodiments, the carrying device of the present invention is suitable for holding the carrier carrying at least one substrate, the carrying device comprising a clamping member and a detecting device. The clamping member includes at least one clamping segment for clamping the carrier, the at least one clamping segment may be in an unclamped state in which the carrier is not clamped, and a clamping of the carrier is clamped Transition between states. The detecting device is disposed on the at least one clamping segment and includes a sensing component and a triggering unit. The trigger unit is movable between an initial position where the sensing element is not triggered, and a trigger position that triggers the sensing element to generate a sensing signal. When the at least one clamping segment is in the unclamped state, the triggering unit is in the initial position, and when the at least one clamping segment is changed from the unclamped state to the clamping state, the triggering unit is subjected to the The carrier is abutted and moved from the initial position to the trigger position.

In some embodiments, the detecting device further includes a carrying unit disposed on the at least one clamping segment and carrying the sensing component, the carrying unit is a casing and defines a capacity for receiving the sensing component The trigger unit is movably connected to the carrying unit, and the trigger unit is partially located in the accommodating space and the other portion is exposed outside the carrying unit.

In some embodiments, the detecting device further includes a carrying unit disposed on the at least one clamping segment and carrying the sensing component, the triggering unit being pivotally pivoted to the carrying unit and capable of being Rotate between the initial position and the trigger position.

In some embodiments, the detecting device further includes an elastic member that presses the trigger unit toward the initial position to be in the initial position.

In some embodiments, the carrying unit is a housing and defines an accommodating space for receiving the sensing component. The triggering unit includes a rotating shaft rotatably pivotally connected to the carrying unit, and is fixedly connected to One end of the rotating shaft is located outside the carrying unit and is suitable for the swinging rod that is touched by the carrier, and is fixedly connected to the other end of the rotating shaft and located in the receiving space for triggering the triggering of the sensing component Rod.

In some embodiments, the axial direction of the rotating shaft extends along a first transverse direction, the swinging rod is perpendicular to the axial direction of the rotating shaft and is sleeved on the rotating shaft, and the triggering rod is perpendicular to the axial direction of the rotating shaft and The detecting device further includes an elastic member disposed in the accommodating space, the two ends of the elastic member respectively abutting the carrying unit and the triggering rod, the elastic member facing the trigger rod The initial positional direction is applied such that the triggering unit is in the initial position when the at least one clamping section is in the unclamped state.

In some embodiments, the swinging rod forms an upper card hole adjacent to the top end, and the triggering rod forms a lower card hole adjacent to the bottom end, the upper card hole and the lower card hole are both non-circular, and the rotating shaft has a a first shaft segment located outside the load bearing unit, and a second shaft segment located in the accommodating space, the first shaft segment and the second shaft segment are both non-cylindrical, the first shaft segment shape and the Corresponding to the shape of the upper hole, the first shaft segment is bored and fixed in the upper hole, the shape of the second shaft corresponds to the shape of the lower hole, and the second shaft is pierced and fixed Inside the lower card hole.

In some embodiments, the carrying unit forms a connecting hole, the triggering rod is formed with a hole corresponding to the position of the connecting hole, and the detecting device further comprises a threaded through the hole and movably connected to the connecting An adjusting member of the hole, the adjusting member is controllably movable along a second transverse direction perpendicular to the first lateral direction and driving the trigger lever to rotate to adjust the trigger lever and the sensing in the initial position The spacing between components.

In some embodiments, the connecting hole is a screw hole, the adjusting member is a screw screwed to the screw hole, and the adjusting member has a head that abuts against the triggering rod opposite to the side of the connecting hole .

In some embodiments, the detecting device further includes a gas supply unit connected to the carrying unit, and the gas supply unit is configured to supply gas into the accommodating space such that the internal pressure thereof is greater than the external environment.

In some implementations, the sensing component is an electrically conductive sensing component, and the triggering unit has a conductance trigger body that mates with the electrically conductive sensing component.

In some embodiments, the sensing component is a photo-sensing component, and the triggering unit has a photo-shielding body that cooperates with the photo-sensing component.

In some implementations, a control unit coupled to the sensing element and configured to control the clamping member is further disposed, the control unit is configured to receive the sensing signal generated by the sensing component to determine the clip After the holder holds the carrier, the clamping member is controlled to cause the clamping member to move the carrier to perform a carrying stroke.

In some implementations, when the handling device performs the carrying stroke, if the control unit does not receive the sensing signal, the control unit determines that the clamping member is a clamping abnormality.

The triggering unit of the detecting device is designed such that it can be moved by the carrier and trigger the sensing component to enable the handling device to detect whether the carrier is clamped.

100‧‧‧Handling equipment

1‧‧‧Clamping parts

11‧‧‧Clamping section

12‧‧‧ Pedestal

2‧‧‧Detection device

21‧‧‧Loading unit

211‧‧‧ accommodating space

212‧‧‧Shell

213‧‧‧ side cover

214‧‧‧Outlet cover

215‧‧‧First pivoting cover

215a‧‧‧Pivot

216‧‧‧Second pivoting cover

217‧‧‧connection hole

218‧‧‧Installation board

219‧‧‧ side wall

23‧‧‧Sensor components

231‧‧‧transmitter

232‧‧‧ Receiver

233‧‧‧Infrared beam

24‧‧‧Trigger unit

241‧‧‧ shaft

242‧‧‧swing rod

242a‧‧‧Upper hole

243‧‧‧Trigger rod

243a‧‧‧下卡孔

243b‧‧‧ hole

243c‧‧‧Light occlusion

244‧‧‧First shaft segment

245‧‧‧second shaft segment

25‧‧‧Flexible parts

26‧‧‧Adjustment

261‧‧‧ head

27‧‧‧shims

28‧‧‧ gas supply unit

281‧‧‧ joint

29‧‧‧Outlet connector

3‧‧‧ Vehicles

31‧‧‧Side

4‧‧‧Substrate

D1‧‧‧ first horizontal direction

D2‧‧‧ second horizontal direction

R1‧‧‧first direction of rotation

R2‧‧‧second direction of rotation

F‧‧‧ reaction

Other features and effects of the present invention will be apparent from the following description of the drawings. FIG. 1 is a front elevational view of an embodiment of the handling device of the present invention, illustrating two of the embodiments. The clamping section is in an un-clamped state in which the carrier is not clamped, and the detecting device is located at an initial position where the sensing component is not triggered; FIG. 2 is a side view of the detecting device of the embodiment. The detection device is located at the initial position, wherein a bearing unit of the detecting device is represented by an imaginary line; FIG. 3 is a perspective exploded view of the detecting device of the embodiment; 1 is a front view showing the clamping state of the two clamping segments of the embodiment in a clamping state of the carrier, and the detecting device is located at a triggering position for triggering a sensing component; and FIG. 5 is a viewing angle Similar to the side view of FIG. 2, the detecting device is located at the trigger position, and the carrying unit of the detecting device is represented by an imaginary line.

Before the present invention is described in detail, it should be noted that in the following description, similar elements are denoted by the same reference numerals.

Referring to FIG. 1 , an embodiment of a handling device of the present invention, the handling device 100 is used in a semiconductor wet processing process, and the handling device 100 is adapted to clamp a carrier 3 carrying at least one substrate 4 and to move The carrier 3 is such that the substrate 4 on the carrier 3 is sequentially disposed in a plurality of processing tanks (not shown) To carry out the required process, the handling device 100 comprises a clamping member 1, a detecting device 2, and a control unit (not shown).

The clamping member 1 includes at least one clamping segment 11 for controlling the two side protrusions 31 of the carrier 3 by the control unit. In the embodiment, the two clamping segments 11 are taken as an example. The two clamping segments 11 can be held in an unclamped state (as shown in FIG. 1) where the side protrusions 31 of the carrier 3 are not clamped, and a clamping of the side protrusions 31 of the carrier 3 The transition between states (shown in Figure 4). In this embodiment, the two clamping segments 11 are pivotally mounted on a base 12, whereby the clamping segments 11 can be in an initial position as shown in FIG. Rotate between the illustrated clamping positions. It should be noted that, in some other embodiments, each clamping segment 11 is slidably coupled to the base 12, whereby each clamping segment 11 is laterally movable between an initial position and a clamping position. This embodiment is not limited. It should be noted that, in this embodiment, the number of the clamping segments 11 is two and the carrier 3 has two side convex portions 31 on both sides, but in other variations, only the clamping is required. The holding portion 11 can hold the carrier 3, and does not limit the number of the clamping portions 11 and the convex portions 31 of the carrier 3.

Referring to FIG. 2 and FIG. 3 , the detecting device 2 is disposed on one of the clamping segments 11 and includes a sensing component 23 coupled to the control unit and a triggering unit 24 . In this embodiment, the detecting device 2 further includes a carrying unit 21 disposed on one of the clamping segments 11 and carrying the sensing component 23, the carrying unit 21 is a casing and defines a sensing component 23 The accommodating space 211 is accommodated. The triggering unit 24 is movably connected to the carrying unit 21, and a part of the triggering unit 24 is located in the accommodating space 211 and the other part is exposed outside the carrying unit 21, and the triggering unit 24 can trigger the sensing. The initial position of the component 23 (as shown in FIG. 2), and a triggering of the sensing component 23 to generate a sensing signal The triggering position (as shown in FIG. 5) is moved between. In the embodiment, when the clamping segments 11 of the clamping member 1 are in the clamping state, the control unit can receive the sensing component. After the sensing signal is generated to determine that the clamping member 1 holds the carrier 3, the clamping member 1 is controlled to cause the clamping member 1 to move the carrier 3 to perform a carrying stroke.

Referring to FIG. 2 and FIG. 3 , the present embodiment is further described below. The carrying unit 21 has a housing 212 , a side cover 213 covering one side of the housing 212 , and another housing 212 disposed on the housing 212 . The side panel 214 is disposed on a side of the housing 212 opposite to the first pivoting plate 215 and a second pivoting plate 216, and a mounting plate 218. The housing 212 defines the accommodating space 211. The side cover 213 is detachably coupled to the housing 212 to close the accommodating space 211. The mounting plate 218 is disposed in the accommodating space 211 and fixedly coupled to the housing 212 . The sensing component 23 is fixed to the bottom end of the mounting plate 218 . In the embodiment, the detecting device 2 further includes an outlet connector 29 disposed on the side plate 214, and the outlet connector 29 is configured to be electrically connected to the sensing element 23 and the wire between the control unit. Assume. The triggering unit 24 includes a rotating shaft 241 pivotally connected to the first pivoting plate 215 and the second pivoting plate 216 of the carrying unit 21, and is fixedly connected to one end of the rotating shaft 241 and located outside the carrying unit 21 A swinging rod 242 for the vehicle 3 to be touched against the top, and a triggering rod 243 fixedly coupled to the other end of the rotating shaft 241 and located in the receiving space 211 for triggering the sensing element 23 are provided. The first pivoting plate 215 is formed with a pivot hole 215a extending through the rotating shaft 241, and one end of the rotating shaft 241 is located outside the carrying unit 21, and the other end is located therein. Within space 211. It should be noted that the housing 212 of the carrying unit 21 defines the accommodating space 211 for the sensing component 23 to be further protected from the dust and gas interference in the process environment. Or other light source affects the sensor element The piece 23 generates a false positive detection signal. However, in other embodiments, the carrying unit 21 may not be in the form of a shell, but may be a structure similar to a bracket or the like, and is not limited thereto.

The axial direction of the rotating shaft 241 extends along a first lateral direction D1. The rotating shaft 241 has a first shaft section 244 located outside the housing 212 and a second shaft section 245 located in the receiving space 211. Both the first shaft segment 244 and the second shaft segment 245 are non-cylindrical. The swinging rod 242 is perpendicular to the axial direction of the rotating shaft 241 and is sleeved on the first shaft section 244. The swinging rod 242 is formed with an upper circular hole 242a adjacent to the top end and having a non-circular shape. The shape of the first shaft segment 244 corresponds to the shape of the upper hole 242a. The first shaft segment 244 is bored and fastened in the upper hole 242a. The triggering rod 243 is perpendicular to the axial direction of the rotating shaft 241 and is sleeved on the second shaft section 245. The triggering rod 243 is formed with a lower circular hole 243a adjacent to the bottom end. The second shaft segment 245 has a shape corresponding to the shape of the lower card hole 243a. The second shaft portion 245 is bored and fastened in the lower card hole 243a. The swinging rod 242 and the triggering rod 243 are respectively sleeved on the first shaft section 244 and the second shaft section 245 of the rotating shaft 241, so that the swinging rod 242 is simultaneously touched by the carrier 3 The rotation shaft 241 and the trigger rod 243 are rotated, and the trigger unit 24 is rotatable between the initial position (as shown in FIG. 2) and the trigger position (shown in FIG. 5) with the rotation shaft 241 as an axis. Specifically, although the motion mode of the trigger unit 24 in this embodiment is rotated relative to the load bearing unit 21, in other implementation manners, the motion manner of the trigger unit 24 may also be performed relative to the load bearing unit 21. The sliding of the lateral translation.

In this embodiment, the sensing component 23 is a photo-sensing component, and an infrared photoelectric switch is taken as an example. The sensing component 23 has a transmitting portion 231, and a first lateral direction D1 and a transmitting portion 231. The receiving portion 232 is spaced apart. The transmitting portion 231 is configured to emit an infrared light beam 233 (in FIG. 2 In Fig. 5, the infrared light beam is indicated by a dot. The receiving unit 232 is configured to receive the infrared light beam 233. In the normally conducting state, the receiving portion 232 continuously receives the infrared light beam 233. When the infrared light beam 233 is blocked and the receiving portion 232 cannot receive the infrared light beam 233, the sensing element 23 will immediately Generating a sensing signal, the sensing signal is transmitted to the control unit through a wire; in the normally closed state, the receiving portion 232 is continuously unable to receive the infrared light beam 233, and the infrared light beam 233 is turned on to cause the receiving When the infrared light beam 233 is received by the portion 232, the sensing component 23 generates a sensing signal, and the sensing signal is transmitted to the control unit through a wire. The present invention is only illustrated by a normally conducting state, which can be implemented according to actual needs. Changing the detection state is not limited to the examples of the present invention. The trigger lever 243 has a rod body 246 and a light blocking piece 243c disposed at the top end of the rod body 246. The light blocking piece 243c is for blocking the infrared light beam 233. In other embodiments, the sensing component 23 can also be a photo-electrical sensing component such as a fiber optic switch, and the sensing component 23 can also be an electrical conductivity sensing component. The light blocking piece 243c is replaced by a conductance trigger body that cooperates with the conductive sensing element.

The detecting device 2 further includes an elastic member 25 that presses the trigger unit 24 toward the initial position to position the trigger unit 24 in the initial position. In this embodiment, the elastic member 25 is a compression spring disposed in the accommodating space 211 and abutting against a side wall 219 of the housing 212 and the trigger rod 243. The trigger lever 243 is pressed by the elastic member 25 such that the trigger unit 24 is in the initial position when the two clamping segments 11 are in the unclamped state. In other embodiments, the elastic member 25 may be a set of torsion springs disposed on the rotating shaft 241 and connected to the housing 212 and the trigger rod 243 respectively, and is not limited to the disclosed in the embodiment. The elastic member 25 is in the form of a compression spring.

The side wall 219 of the housing 212 defines a connecting hole 217, and the rod body 246 of the trigger rod 243 is formed with a hole 243b corresponding to the position of the connecting hole 217. The detecting device 2 further includes an adjusting member 26 and a spacer 27. The spacer 27 sandwiches between the elastic member 25 and the rod body 246 of the trigger lever 243. The adjusting member 26 is sequentially disposed through the hole 243b of the trigger lever 243, the spacer 27 and the elastic member 25, and is movably coupled to the connecting hole 217. The adjusting member 26 is controllable to move the trigger rod 243 along a second lateral direction D2 perpendicular to the first lateral direction D1 to adjust between the trigger rod 243 and the sensing element 23 in the initial position. Pitch. In this embodiment, the connecting hole 217 is a screw hole, and the adjusting member 26 is a screw screwed to the screw hole. The adjusting member 26 has a head portion 261 opposite to the side of the connecting rod 217. The head portion 261 is used to push the rod body 246 of the trigger rod 243 to rotate the trigger rod 243 around the rotating shaft 241. . By rotating the adjusting member 26 to move relative to the side wall 219, the triggering rod 243 can be rotated by the head 261 to adjust the position of the triggering lever 243, whereby the triggering lever 243 and the swinging lever 242 can be changed. The amplitude of the swing rotation between the initial position and the trigger position. In detail, if the head 261 of the adjusting member 26 is closer to the side wall 219 of the housing 212 of the carrying unit 21, the trigger lever 243 and the swing lever 242 are between the initial position and the trigger position. The smaller the amplitude of the wobble rotation, the more easily the sensing element 23 of the detecting device 2 is triggered. When the head 261 of the adjusting member 26 is farther from the side wall 219 of the housing 212 of the carrying unit 21, the trigger lever 243 and the swinging lever 242 swing and rotate between the initial position and the trigger position. The larger the amplitude, the more sensitive the sensing element 23 of the detecting device 2 is now triggered.

In addition, in the embodiment, the detecting device 2 further includes a gas supply unit 28 connected to the housing 212 of the carrying unit 21. The air supply unit 28 has a connector disposed on one side of the housing 212 281, a gas supply source (not shown), and a gas pipe (not shown) connected between the joint 281 and the gas supply source. The gas supply source of the gas supply unit 28 supplies gas to the accommodating space 211 through the gas supply pipe and the joint 281 to make the internal pressure thereof larger than the external environment, so as to prevent the acid etching gas in the process environment from entering the accommodating space 211. Affecting the accuracy of the detection of the sensing element 23.

Referring to FIG. 1 and FIG. 2, when the two clamping segments 11 are in the unclamped state, the two clamping segments 11 are respectively located outside the convex portions 31 on both sides at an appropriate distance, and the swinging bar 242 is located on one side of the convex portion. The outer side of the portion 31 is at an appropriate distance. The triggering rod 243 is pressed by the elastic member 25, and the head portion 261 of the adjusting member 26 is blocked from the side of the triggering member 243 opposite to the elastic member 25, thereby enabling the triggering unit 24 to be positioned. In this initial position. At this time, the light blocking piece 243c of the trigger lever 243 does not penetrate between the transmitting portion 231 and the receiving portion 232 and does not block the infrared light beam 233 emitted by the emitting portion 231, so that the receiving portion 232 receives the light. Infrared beam 233.

Referring to FIG. 4 and FIG. 5, when the two clamping segments 11 are rotated by the un-clamped state in a first rotation direction R1 and a second rotation direction R2 opposite to the first rotation direction R1, the detection is performed. The device 2 is driven by one of the clamping segments 11 while rotating in the first rotational direction R1 (if the detecting device 2 is mounted in the other clamping segment 11 thereof, the other clamping segment 11 is Rotating in the second rotation direction R2). Since one side convex portion 31 of the carrier 3 is blocked on the rotation path of the swing lever 242 of the trigger unit 24, when the swing lever 242 touches the side convex portion 31 during the rotation, the side convex portion A reaction force F applied to the swinging lever 242 by the portion 31 causes the triggering unit 24 to rotate in the second rotational direction R2 with the rotating shaft 241 as the axis. The trigger lever 243 compresses the elastic member 25 to deform and accumulate the return elastic force during the rotation of the trigger unit 24 in the second rotational direction R2.

When each of the clamping segments 11 is rotated to the clamping position of the corresponding side convex portion 31, the two clamping segments 11 are changed to the clamping state, and at this time, the triggering unit 24 is rotated to the triggering position. When the triggering unit 24 is located at the triggering position, the light blocking piece 243c penetrates between the transmitting portion 231 and the receiving portion 232 and blocks the infrared light beam 233 emitted by the emitting portion 231, and the receiving portion 232 cannot accept The infrared light beam 233 is further caused to trigger the sensing element 23 to generate the sensing signal, and the sensing signal is transmitted to the control unit through the wire and received by the control unit. Thereby, the control unit can determine that the two clamping segments 11 have indeed clamped the carrier 3, and the control unit can control the driving mechanism to drive the handling device 100 to drive the carrier 3 to move. When the conveying device 100 performs the conveying stroke, if the control unit does not receive the sensing signal, the control unit determines that the clamping member 1 is a clamping abnormality.

When the handling device 100 drives the carrier 3 to move to a specific position and the two clamping segments 11 are changed from the clamping state to the un-clamped state, the swinging lever 242 is separated from the corresponding side convex portion 31. The triggering unit 24 is rotated by the accumulated elastic force accumulated by the elastic member 25, so that the trigger unit 24 can automatically return to the initial position.

The substrate mentioned in the present invention may be in the form of a carrier, a wafer, a wafer, or the like, and may be round or square, and is not limited thereto. And the carrying device of the present invention can be applied to the substrate wet process (cleaning, etching, etc.), for example: single substrate wet process, multi-substrate wet process, single square wafer solder ball under metal etching, thinned wafer support / Stripping, lamination/peeling processes, reclaimed wafers for reclaimed silicon carbide, reclaimed wafers, etc. are not limited to this.

In summary, in the handling device 100 of the embodiment, by the design of the triggering unit 24 of the detecting device 2, the two clamping segments 11 of the carrier 3 must be switched from the unclamped state to the clamping state. Load With the clamping state of 3, the triggering unit 24 is touched by the carrier 3 and is moved from the initial position to the sending position and triggers the sensing element 23, that is, the triggering unit 24 must be in two The sensing component 23 can be triggered by simultaneously moving the clamping section 11 while holding the carrier 3, thereby enabling the detecting device 2 to detect whether the carrier 3 is clamped. In addition, the sensing unit 23 can protect the sensing component 23 from being directly affected by dust, gas or other light sources in the process environment, thereby affecting the detection condition of the detecting device 2 . Further, the accuracy of the detection by the detecting device 2 is greatly improved, so that the object of the present invention can be achieved.

However, the above is only the embodiment of the present invention, and when it is not possible to limit the scope of the present invention, all the simple equivalent changes and modifications according to the scope of the patent application and the contents of the patent specification are still This new patent covers the scope.

Claims (14)

A carrier handling device is adapted to hold the carrier carrying at least one substrate, the handling device comprising: a clamping member comprising at least one clamping segment for clamping the carrier, the at least one clamping The segment can be switched between an un-clamped state in which the carrier is not clamped and a clamped state in which the carrier is clamped; and a detecting device is disposed in the at least one clamping segment and includes: a sense And a triggering unit that is movable between an initial position where the sensing element is not triggered, and a triggering position that triggers the sensing element to generate a sensing signal, when the at least one clamping segment is In the un-clamped state, the trigger unit is located at the initial position, and when the at least one clamping segment is changed from the un-clamped state to the clamped state, the triggering unit is subjected to the carrier to be abutted by the initial The position moves to the trigger position. The handling device of the carrier of claim 1, wherein the detecting device further comprises a carrying unit disposed on the at least one clamping segment and carrying the sensing component, the carrying unit is a casing and defines a The accommodating space of the sensing component is movably connected to the carrying unit, the triggering unit is partially located in the accommodating space and the other part is exposed outside the carrying unit. The handling device of the carrier of claim 1, wherein the detecting device further comprises a carrying unit disposed on the at least one clamping segment and carrying the sensing component, the triggering unit being pivotally pivoted The carrier unit is rotatable between the initial position and the trigger position. The handling device of the carrier of claim 1, 2 or 3, wherein the detecting device further comprises an elastic member that presses the trigger unit toward the initial position to position it In this initial position. The handling device of the carrier of claim 3, wherein the carrying unit is a housing and defines an accommodating space for receiving the sensing component, the triggering unit includes a rotatably pivoting connection to the carrying unit a pivoting shaft fixedly connected to one end of the rotating shaft and located outside the carrying unit and adapted to be touched by the carrier, and fixedly connected to the other end of the rotating shaft and located in the receiving space To trigger the trigger lever of the sensing element. The carrying device of the carrier of claim 5, wherein the axial direction of the rotating shaft extends in a first transverse direction, the swinging rod is perpendicular to the axial direction of the rotating shaft and is sleeved on the rotating shaft, the triggering rod The detecting device further includes an elastic member disposed in the accommodating space, and the two ends of the elastic member abut against the carrying unit and the triggering rod, respectively, in the axial direction of the rotating shaft. The elastic member presses the trigger lever toward the initial position such that the trigger unit is in the initial position when the at least one clamping segment is in an unclamped state. The handling device of the carrier of claim 6, wherein the swinging rod forms an upper card hole adjacent to the top end, and the triggering rod forms a lower card hole adjacent to the bottom end, wherein the upper card hole and the lower card hole are Non-circular, the rotating shaft has a first shaft segment located outside the carrying unit, and a second shaft segment located in the receiving space, the first shaft segment and the second shaft segment are non-cylindrical. The shape of the first shaft segment corresponds to the shape of the upper hole, the first shaft segment is bored and fastened in the upper hole, and the shape of the second shaft corresponds to the shape of the lower hole, the second The shaft segment is threaded and secured in the lower card hole. The carrying device of the carrier of claim 6, wherein the carrying unit forms a connecting hole, the triggering rod is formed with a hole corresponding to the position of the connecting hole, and the detecting device further comprises a hole penetrating the hole And an adjusting member movably coupled to the connecting hole, the adjusting member is controllably movable along a second lateral direction perpendicular to the first lateral direction and driving the The trigger lever is rotated to adjust the spacing between the trigger lever and the sensing element in the initial position. The carrying device of the carrier of claim 8, wherein the connecting hole is a screw hole, the adjusting member is a screw screwed to the screw hole, and the adjusting member has a screw opposite to the trigger rod. The head of the connecting hole on one side. The handling device of the vehicle of any one of claims 5 to 9, wherein the detecting device further comprises a gas supply unit connected to the carrying unit, the gas supply unit for supplying gas to the receiving unit The internal pressure in the space is greater than the external environment. The handling device of the carrier of claim 1, wherein the sensing component is an electrically conductive sensing component, and the triggering unit has a conductance trigger body that cooperates with the electrically conductive sensing component. The handling device of the carrier of claim 1, wherein the sensing component is a photo-sensing component, and the triggering unit has a light-shielding body that cooperates with the photo-sensing component. The handling device of the carrier of claim 1, further comprising a control unit coupled to the sensing element and configured to control the clamping member, the control unit being capable of receiving the sense generated by the sensing component After the signal is judged to be that the holder clamps the carrier, the clamping member is controlled to cause the clamping member to move the carrier to perform a carrying stroke. The handling device of the carrier of claim 13, wherein when the conveying device performs the carrying stroke, if the control unit does not receive the sensing signal, the control unit determines that the clamping member is abnormally clamped. .