TWM555557U - Inflation system - Google Patents

Description

Inflatable system

The present invention relates to an inflation system, and more particularly to an inflation system capable of inflating an enclosed space according to the detection state of the detection module.

With the advancement of technology, manufacturers of various products (such as electronic parts, food, etc.) have found factors affecting the yield of finished products. In addition to the related process design and control, semi-finished products and finished products are in the process of carrying or manufacturing. The state of the environment also has a direct or indirect correlation with the final yield. Therefore, for manufacturers of various products, how to control the environmental state of semi-finished products and finished products in the process of carrying or manufacturing has become an important issue.

Therefore, the author is concentrating on research and using the application of theory, and proposes a creation that is reasonable in design and effective in improving the above problems.

The main purpose of the present invention is to provide an inflation system for improving the problems of various types of semi-finished products and finished products in the prior art which are susceptible to environmental conditions during transportation or production.

In order to achieve the above object, the present invention provides an inflation system for performing gas exchange on the interior of a closed space. The inflation system includes: an air intake module, an exhaust module, and a processing module. The intake module includes: a main intake line, a pneumatic switch unit, a secondary intake line, and an electric switch unit. The two ends of the main intake pipe are respectively defined as an intake end and an outlet end, and the intake end is connected with a gas supply device, and the outlet end is connected with the closed space. The pneumatic switch unit is disposed in the main intake line, and the pneumatic switch unit can selectively block the communication between the intake end and the outlet end. Both ends of the auxiliary air intake pipe are respectively The pneumatic switch unit is in communication with the main intake line. The electric switch unit is disposed in the auxiliary air intake pipe, and the electric switch unit can selectively block the communication between the two ends of the auxiliary air intake pipe; when the electric switch unit connects the two ends of the auxiliary air intake pipe to each other, the air intake end The incoming gas can pass through the pneumatic switch unit and enter the enclosed space from the outlet end. The exhaust module communicates with the enclosed space through a discharge line, and the exhaust module selectively discharges the gas in the enclosed space outward. The detection module can selectively generate a detection signal. The processing module is electrically connected to the air intake module, the exhaust module and the detecting module; the processing module can control the operation of the air intake module and the exhaust module according to the detecting signal to selectively close the closed space Perform gas exchange operations.

The beneficial effects of the present invention may be that through the mutual cooperation of the air intake module, the exhaust module, the detection module and the processing module, gas exchange can be performed on the enclosed space at an appropriate timing, thereby effectively controlling the closure. The environmental state of the space can effectively reduce the influence of the environmental state of the closed space on the semi-finished or finished products disposed in the closed space.

In order to further understand the features and technical contents of the present invention, please refer to the following detailed description and drawings of the present invention. However, the drawings are only for reference and description, and are not intended to limit the creation.

1‧‧‧Inflatable system

10‧‧‧Air intake module

101‧‧‧Main intake line

101a‧‧‧ intake end

101b‧‧‧Exhaust end

102‧‧‧pressure valve

103‧‧‧Pneumatic switch unit

104‧‧‧Pneumatic detection unit

105‧‧‧Flow detection unit

106‧‧‧Gas filter unit

11‧‧‧Sub intake line

111‧‧‧Electric switch unit

112‧‧‧Pressure adjustment valve

20‧‧‧Exhaust module

201‧‧‧Drainage line

21‧‧‧Exhaust unit

22‧‧‧ solenoid valve

23‧‧‧Pneumatic detection unit

24‧‧‧Auxiliary exhaust unit

25‧‧‧Adjustment unit

30‧‧‧Detection module

31‧‧‧ Temperature and Humidity Detection Unit

32‧‧‧Carriage detection unit

321‧‧‧First detector

322‧‧‧Second detector

33‧‧‧Carriage type detection unit

IN‧‧‧ gas supply equipment

A‧‧‧ Wafer Carrier Platform

A1‧‧‧bearing station

A2‧‧‧ nozzle

A3‧‧‧Snap assembly

B‧‧‧ wafer carrier

SP‧‧‧closed space

Figure 1 is a block diagram of the inflated system of the present invention.

Figures 2 and 3 are schematic views of the inflated system of the present invention applied to a wafer carrier platform.

The embodiments of the present inflated system are described below by way of specific specific examples, and those skilled in the art can readily appreciate other advantages and effects of the present disclosure from the disclosure herein. The present invention may also be implemented or applied by other specific examples. The details of the present specification may also be based on different viewpoints and applications, and various modifications and changes may be made without departing from the spirit of the present invention. The drawing of this creation is only a brief description, and is not depicted in actual size, that is, the actual size of the relevant composition is not reflected, which will be described first. The following embodiments are further detailed in this section. The idea of creation, but does not limit the scope of this creation by any point of view.

Please refer to FIG. 1 , which is a schematic diagram of the inflated system of the present invention. As shown, the inflating system 1 includes an air intake module 10, an exhaust module 20, a detecting module 30, and a processing module (not shown). The inflation system 1 is for gas exchange of the inside of a closed space SP. The closed space SP may be, for example, an interior of any device (for example, a wafer cassette) or an interior of a room or the like as needed.

The intake module 10 includes a main intake line 101 and a pair of intake lines 11. The two ends of the main intake line 101 are defined as an intake end 101a and an outlet end 101b, respectively, and the intake end 101a is connected to a gas supply device IN, and the outlet end 101b is in communication with the closed space SP. The actual implementation of the main intake line 101 can be, for example, a hose or a hard tube, which can be changed according to requirements without limitation. The air supply device IN can be, for example, a steel cylinder or a factory building. The gas distribution line and the like; of course, the gas outlet end 101b of the main intake line 101 may be provided with a pressure valve 102 for regulating the gas pressure of the gas supply device IN into the main intake line 101. The connection manner of the air outlet end 101b and the closed space may be changed according to requirements. For example, the closed space may be an inner space of a wafer cassette (for example, FOUP, FOSB), and the air outlet end 101b may be a through nozzle or the like. The associated structure is in communication with the interior space of the wafer cassette.

The air intake module 10 further includes a pneumatic switch unit 103 disposed in the main intake line 101. The pneumatic switch unit 103 can selectively block the communication between the intake end 101a and the air outlet end 101b, that is, the pneumatic switch unit 103. The gas entering the main intake line 101 from the intake end 101a can be selectively prevented from flowing into the closed space SP. When the pressure of the gas introduced by the pneumatic switch unit 103 reaches a predetermined pressure, the pneumatic switch unit 103 will connect the connected pipelines, and the predetermined pressure may be designed according to requirements. In practical applications, the pneumatic switch unit 103 may be in a normally closed state, and when the gas pressure entering the pneumatic switch unit 103 reaches a predetermined state, the pneumatic switch unit 103 corresponds to the intake end 101a and the outlet end 101b being connected to each other. through.

Both ends of the auxiliary air inlet pipe 11 are respectively connected to the pneumatic switch unit 103 and the main intake pipe 101 is connected. The electric switch unit 111 is disposed in the auxiliary air inlet pipe 11 , and the electric switch unit 111 can selectively block the communication between the two ends of the auxiliary air inlet pipe 11; the electric switch unit 111 is electrically connected to the processing module, and the processing module can The opening and closing of the electric switch unit 111 is controlled by means of electronic control. When the electric switch unit 111 causes both ends of the auxiliary air inlet pipe 11 to communicate with each other, the gas entering from the intake end 101a passes through the auxiliary air intake pipe 11 to open the pneumatic switch unit 103 accordingly, so that the intake air is accordingly The end 101a and the outlet end 101b are in communication with each other, and the gas entering by the intake end 101a will flow into the closed space SP. In other words, the pneumatic switch unit 103 must be opened in a state where the auxiliary air intake line 11 is unblocked, and when the auxiliary air intake line 11 is not clear (that is, when the processing module controls the electric switch unit 111 to be closed) The pneumatic switch unit 103 is in a state of being turned off. Of course, in different applications, the pneumatic switch unit 103 can be opened and closed by the gas directly flowing through the main intake line 101 in a specific state.

In a preferred application, the main intake line 101 can also be provided with a gas pressure detecting unit 104, and the auxiliary air inlet line 11 can also be provided with a pressure regulating valve 112. The air pressure detecting unit 104 is configured to detect the gas pressure of the main air intake pipe 101, and the related information detected by the air intake detecting unit 104 can be transmitted to the processing module (for example, an industrial computer, etc.) by wire or wireless. Of course, the air pressure detecting unit 104 can also be a mechanical pointer type, which is not limited herein. The pressure regulating valve 112 is for adjusting the gas pressure passing through the electric switch unit 111, that is, correspondingly controlling the gas pressure entering the pneumatic switch unit 103 through the auxiliary air intake line 11 when the electric switch unit 111 is turned on. In practical applications, the pressure regulating valve 112 may be in a manual or electric form, and is not limited thereto; and the pressure value detected by the pressure regulating valve 112 may be transmitted to the processing module through a wired or wireless manner.

In a special application, the electric switch unit 111 may be designed to maintain an unpowered state of the electric switch unit 111 while the electric switch unit 111 remains in a state before the power is turned off. That is, when the electric switch unit 111 is energized to bring the both ends of the auxiliary air intake line 11 into communication, when an unexpected power failure occurs, the electric switch The unit 111 may be a communication that still maintains the both ends of the auxiliary air intake line 11; conversely, when the electric switch unit 111 is energized and the auxiliary air intake line 11 is blocked, the electric switch unit is encountered when an unexpected power failure occurs. 111 may be that the both ends of the auxiliary intake line 11 are still not connected.

In a practical application, the main intake line 101 may further be provided with a flow detecting unit 105 and a gas filtering unit 106. The flow detecting unit 105 may be disposed between the pneumatic switch unit 103 and the air outlet end 101b, and the gas filtering Unit 106 can then be disposed adjacent to outlet end 101b. The flow detecting unit 105 is configured to detect the flow of gas through the pneumatic switch unit 103. The traffic detection unit 105 can be electrically connected to the processing module through a wired or wireless manner, and can transmit the relevant signals generated by the detection to the processing module. Of course, the traffic detection unit 105 can also be a mechanical pointer. formula. Through the setting of the flow detecting unit 105, not only the gas flow rate through the pneumatic switch unit 103 can be measured, but also whether the pneumatic switch unit 103 is normally operated.

The exhaust module 20 can be connected to the closed space SP through a discharge line 201. The exhaust module 20 includes at least one exhaust unit 21, and the exhaust unit 21 can be controlled by the processing module to selectively discharge the gas of the closed space SP outward. The exhaust unit 21 referred to herein may be any member that enables the gas in the discharge line 201 to flow in a direction away from the closed space SP. Preferably, the exhaust module 20 further includes a solenoid valve 22 and a gas pressure detecting unit 23. The solenoid valve 22 is electrically connected to the processing module, and the processing module can selectively control the opening and closing of the solenoid valve 22. The solenoid valve 22 is selectively blocked from the discharge line 201. The air pressure detecting unit 23 is configured to detect the gas pressure of the discharge line 201. The air pressure detecting unit 23 can be electrically connected to the processing module, and the processing module can immediately receive the measured air pressure detecting unit 23 for discharging. The gas pressure of the line 201.

In different applications, the exhaust module 20 may further include an auxiliary exhaust unit 24 disposed in the discharge line, and the auxiliary exhaust unit 24 can assist the exhaust module 20 to rapidly open the gas in the closed space SP. discharge. For example, an auxiliary exhaust unit 24 may be in communication with the main intake line 101, and some of the main intake line 101 can enter the auxiliary exhaust unit 24, and the auxiliary exhaust unit 24 can cooperate with the exhaust unit 21 to make the discharge tube The road 201 is in a negative pressure state, so as to accelerate the discharge of the gas in the discharge line. Preferably, the exhaust module 20 further includes an adjustment unit 25, the two ends of which are respectively connected to the main intake line 101 and The exhaust unit 24 is assisted, and the adjusting unit 25 can be used to adjust the flow rate of the gas entering the auxiliary exhaust unit 24 from the main intake line 101, thereby correspondingly adjusting the magnitude of the negative pressure generated by the auxiliary exhaust unit 24.

The detection module 30 is configured to detect an environmental state to generate a detection signal; the processing module is electrically connected to the detection module 30, and the processing module can control the air intake module 10 according to the detection signal. And the exhaust module 20 performs a gas exchange operation on the closed space SP. For example, the detection module 30 may include a temperature and humidity detecting unit 31, which may be disposed in the discharge line 201, and the temperature and humidity detecting unit 31 is configured to detect the humidity of the gas in the discharge line 201 and The temperature is based on the state of the gas in the closed space SP. The detection module 30 is not limited to the temperature and humidity detecting unit 31 disposed in the discharge line 201. The detecting module 30 may include various types of detectors (for example, detecting specific gases). The processing module may be configured to determine the actuation of the intake module 10 and the exhaust module 20 according to the detection signals transmitted by the different detectors.

The processing module is electrically connected to the air intake module 10, the exhaust module 20, and the detection module 30. The processing module can control the air intake module 10 according to the detection signal transmitted by the detection module 30. The exhaust module 20 performs a gas exchange operation on the enclosed space. For example, the processing module may control the related device to operate when the temperature and humidity detecting unit 31 detects that the humidity of the specific gas discharged by the closed space SP is higher than a predetermined value (for example, a screen, a warning light, an alert) The sound is used to remind the relevant personnel, and then the relevant personnel may control the operation of the intake module 10 and the exhaust module 20 through the processing module according to the demand. The processing module may be, for example, an industrial computer, a microprocessor, or the like, and is not limited herein.

Please refer to FIG. 1 to FIG. 3 together, the inflatable system 1 of the present invention can be applied to crystal The circular carrier platform A; the various components defined in the foregoing embodiments will be used in the following description, and in the following embodiments, the components will not be described in detail. The wafer carrier platform A includes a carrying platform A1 and a plurality of nozzles A2. The carrier A1 is used to set a wafer carrier (FOUP) B. The plurality of nozzles A2 are disposed on the stage A1, and the plurality of nozzles A2 are connected to the air outlet end 101b and the discharge line 201 of the main intake line 101, respectively. The arrangement positions of the plurality of nozzles A2 shown in the drawings of the present embodiment are merely intended to be used in practical applications, and are not limited thereto.

The detection module 30 may further include at least one carrier detecting unit 32. The carrier detecting unit 32 is configured to detect whether the carrying station A1 is provided with the wafer carrier B. The processing module can detect the vehicle. When the measuring unit 32 detects that the carrying station A1 is provided with the wafer carrier B, the measuring unit 32 selectively controls the intake module 10 and the exhaust module 20 to perform gas exchange on the closed space SP in the wafer carrier B. In an actual application, the vehicle detecting unit 32 may include a first detector 321 and three second detectors 322. The first detector 321 may use a wireless method (for example, infrared, ultrasonic sensing). And determining whether the wafer carrier B is disposed on the carrier A1, and the three second detectors 322 may be pressed by the wafer carrier B to generate a signal when the wafer carrier B is fixedly disposed on the carrier A1. After the processing module receives the signals generated by the first detector 321 and the second detector 322 to detect the wafer carrier B, it can be confirmed whether the carrier A1 is provided with the wafer carrier B. It should be noted that the first detector 321 and the three second detectors 322 referred to herein can be used to detect any form of the wafer carrier B, and utilize three second detectors 322. The accuracy of the detection can be effectively improved; of course, in different applications, the number of second detectors 322 can also be increased or decreased according to requirements.

In another embodiment, the detection module 30 may further include at least one carrier type detecting unit 33. The carrier type detecting unit 33 is disposed on the carrying platform A1, and can be used to detect the type of the wafer carrier B that is disposed on the carrying platform A1 to generate a related detecting signal; and the processing module can detect the type according to the vehicle. The unit 33 detects the type of the wafer carrier B, and correspondingly determines whether the wafer carrier B needs to be inflated, and the processing module further controls the air intake module 10 and the exhaust module 20, respectively, respectively The nozzle A2 inflates the closed space SP in the wafer carrier B. Specifically, the placement positions of the inlet and exhaust holes of the different wafer carriers B and their related structures may be different. Therefore, the detection module can control the intake air through the detection of the vehicle type detecting unit 33. The module 10 and the exhaust module 20 exchange gas with the inside of the wafer carrier B by using different nozzles A2 according to different wafer carriers B. Alternatively, the processing module can control the intake module 10 and the exhaust module 20 to exchange different gases into the wafer carrier B according to different wafer carriers B.

In a practical application, when a specific wafer carrier B is fixedly disposed on the carrying platform A1, the vehicle type detecting unit 33 is triggered to generate a corresponding sensing signal, and the processing module receives the vehicle type detection. After the sensing signal transmitted by the unit 33, if the processing module also receives a latching signal transmitted from the engaging component A3 of the carrying platform A1, the processing module will correspondingly control the air intake module 10 and the exhaust mode. Group 20 inflates the interior of wafer carrier B. The engaging component A3 is configured to clamp the wafer carrier B disposed on the carrying platform A1, and the clamping component A3 will generate the engaging signal after clamping the wafer carrier B. If the processing module only receives the sensing signal or the locking signal, the processing module will not control the air intake module 10 and the exhaust module 20 to inflate the wafer carrier B. In different applications, the carrier type detecting unit 33 of the detecting module 30 of the inflating system 1 may include the engaging component A3 or the detecting component A3 and the wafer carrier. A sensor with a stuck state of B. The above description is only a preferred and feasible embodiment of the present invention, and thus does not limit the scope of the patent of the present invention. Therefore, any equivalent technical changes made by using the present specification and the contents of the schema are included in the scope of protection of the present creation. .

1‧‧‧Inflatable system

10‧‧‧Air intake module

101‧‧‧Main intake line

101a‧‧‧ intake end

101b‧‧‧Exhaust end

102‧‧‧pressure valve

103‧‧‧Pneumatic switch unit

104‧‧‧Pneumatic detection unit

105‧‧‧Flow detection unit

106‧‧‧Gas filter unit

11‧‧‧Sub intake line

111‧‧‧Electric switch unit

112‧‧‧Pressure adjustment valve

20‧‧‧Exhaust module

201‧‧‧Drainage line

21‧‧‧Exhaust unit

22‧‧‧ solenoid valve

23‧‧‧Pneumatic detection unit

24‧‧‧Auxiliary exhaust unit

25‧‧‧Adjustment unit

30‧‧‧Detection module

31‧‧‧ Temperature and Humidity Detection Unit

IN‧‧‧ gas supply equipment

SP‧‧‧closed space

Claims (10)

An inflating system for gas exchange of an interior of an enclosed space, the inflation system comprising: an air intake module comprising: a main intake line, the two ends of which are respectively defined as an intake end and An air inlet end, the air inlet end is connected to a gas supply device, and the air outlet end is connected to the closed space; a pneumatic switch unit is disposed in the main intake line, and the pneumatic switch unit can be selected Correspondingly blocking the communication between the inlet end and the outlet end; a pair of intake lines, the two ends of which are respectively connected with the pneumatic switch unit and the main intake line; and an electric switch unit, Provided in the auxiliary air intake pipe, the electric switch unit can selectively block communication at both ends of the auxiliary air intake pipe; when the electric switch unit makes both ends of the auxiliary air intake pipe When communicating with each other, the gas entering from the inlet end can pass through the pneumatic switch unit, and the gas outlet enters the closed space; an exhaust module that passes through a discharge line and the closed The space is connected, and the exhaust module can selectively The gas in the enclosed space is discharged outward; a detection module selectively generates a detection signal; and a processing module electrically connected to the air intake module and the exhaust module And the detecting module, wherein the processing module can control the operation of the air intake module and the exhaust module according to the detecting signal to selectively perform gas exchange on the closed space operation. The inflation system of claim 1, wherein the exhaust module further comprises an exhaust unit and an auxiliary exhaust unit, the exhaust unit being connected to the discharge line, the exhaust unit Used to outwardly discharge the gas in the discharge line Discharging; the auxiliary exhaust unit is disposed in the discharge line, and the auxiliary exhaust unit can assist the exhaust module to quickly discharge the gas in the enclosed space. The inflation system of claim 2, wherein the auxiliary exhaust unit is further in communication with the main intake line, and a portion of the main intake line gas can enter the auxiliary exhaust unit The auxiliary exhaust unit can cooperate with the exhaust unit to cause the discharge line to assume a negative pressure state. The inflation system of claim 3, wherein the exhaust module further comprises an adjustment unit that connects the main intake line and the auxiliary exhaust unit, the adjustment unit being adjustable by the The main intake line enters the gas flow rate of the auxiliary exhaust unit. The inflation system of claim 1, wherein the inflation system is applied to a wafer carrier platform, the wafer carrier platform includes a carrier, the carrier is configured to carry a wafer carrier; The device is provided with a plurality of nozzles, and the detection module includes at least one carrier type detecting unit, and the vehicle type detecting unit can detect the type of the wafer carrier set by the carrying platform; The processing module can detect the type of the wafer carrier according to the vehicle type detecting unit, and correspondingly control the air intake module and the exhaust module, and pass through the plurality of the nozzles. The enclosed space in the wafer carrier is used for gas exchange. The inflation system of claim 5, wherein when the carrier is provided with a specific one of the wafer carriers, and the carrier corresponds to the wafer carrier, the wafer carrier platform Correspondingly, a sensor signal is generated; the vehicle type detecting unit includes a sensor disposed on the carrying platform, and when the carrying station is configured with the specific wafer carrier, the sensor can correspond to Generating a sensing signal, the processing module capable of receiving the sensing signal and the card And the signal is selected to selectively control the air intake module and the exhaust module to operate. The inflating system of claim 5, wherein the carrier has a snap-fit assembly, the snap-fit assembly is configured to clamp the wafer carrier, so that the wafer carrier can be stably disposed in the The loading platform can generate a latching signal when the latching component holds the wafer carrier; the carrier type detecting unit includes a sensor disposed on the carrying platform. When the carrier is configured with the specific wafer carrier, the sensor can generate a sensing signal correspondingly; when the processing module receives the sensing signal and the locking signal, the processing The module will control the air intake module and the exhaust module to inflate the wafer carrier. The inflating system of claim 5, wherein the detecting module comprises at least one carrier detecting unit, and the carrier detecting unit can be configured to detect whether the carrier is provided with the crystal The processing module can selectively control the air intake module and the exhaust module when the carrier detecting unit detects that the carrier is provided with the wafer carrier. Gas exchange is performed on the enclosed space within the wafer carrier. The inflating system of claim 1, wherein the detecting module further comprises a temperature and humidity detecting unit disposed in the discharge line, wherein the temperature and humidity detecting unit is configured to detect The temperature and humidity of the gas discharged from the enclosed space. The inflation system of claim 1, wherein the auxiliary air intake line is further provided with a pressure regulating valve for adjusting a gas pressure of the auxiliary air inlet line; the main air intake line is adjacent to the air outlet The end is further provided with a flow detecting unit for detecting the flow of gas through the pneumatic switch unit; the main intake pipe is further provided with a gas filtering unit adjacent to the outlet end, which can filter through the pneumatic A specific molecule in the gas of the switching unit.