TWM556017U - Wafer carrier system - Google Patents

Description

Wafer cassette carrier system

The present invention relates to a carrier system, and more particularly to a wafer cassette carrying system.

A wafer cassette is a container commonly used to carry wafers. Most of the wafer cassettes are provided with a movable door. The movable door can be opened by related equipment and personnel to take out the wafers disposed in the wafer cassette. The wafer is either placed in a wafer cassette. In the existing application, when the movable door of the wafer cassette is opened, the particles of the external environment will easily enter the wafer cassette, which may affect the problem of the wafer disposed in the wafer cassette for subsequent processing operations. Therefore, the author is concentrating on research and using the application of theory, and proposes a creation that is reasonable in design and effective in improving the above problems.

The main purpose of the present invention is to provide a wafer cassette carrying system for improving the problem that the wafer disposed in the wafer cassette will be easily affected by the external environment when the movable door of the wafer cassette is opened.

In order to achieve the above object, the present invention provides a wafer cassette carrying system comprising: a wafer carrying platform and an air curtain device. The carrying device comprises: a platform, an inflatable module and a control module. The platform is used to set up a wafer cassette. The inflatable module is used to inflate the wafer cassette disposed on the platform. The control module is electrically connected to the inflatable module, and the control module can control the inflatable module to inflate the inside of the wafer cassette disposed on the platform. The air curtain device is disposed adjacent to the platform, and the air curtain device is electrically connected to the control module, and the control module can control the opening and closing of the air curtain device; wherein, when the air curtain device is activated, the air curtain device can be a movable door of the wafer cassette disposed on the platform Blow at the location. Wherein, the control module can be opened on the movable door of the wafer cassette set on the platform At this time, the air curtain device is controlled to be blown to the position where the movable door is originally provided with the movable door.

The beneficial effect of the present invention may be that, when the movable door of the wafer cassette is opened by the mutual cooperation of the air curtain device and the control module, the air curtain device can be blown at the position where the movable box is originally provided with the movable door, thereby being effective The inside of the wafer cassette is protected from the external environment.

In order to further understand the features and technical contents of the present invention, please refer to the following detailed description and drawings of the present invention. However, the drawings are only for reference and description, and are not intended to limit the creation.

1‧‧‧Facsimile Carrying System

10‧‧‧ Carrying device

11‧‧‧ platform

12‧‧‧Inflatable module

13‧‧‧Control Module

14‧‧‧Limited components

20‧‧‧Air curtain device

21‧‧‧ body

211‧‧‧ accommodating slots

22‧‧‧ Cover

221‧‧‧Air intake

23‧‧‧ Breathable plate

231‧‧‧Perforation

30‧‧‧Opening components

B‧‧‧ wafer cassette

B1‧‧‧ activity gate

C‧‧‧Processing Module

D‧‧‧Detection Module

E‧‧‧Open door assembly

S1‧‧‧Open signal

S2‧‧‧Close signal

FIG. 1 is a schematic diagram of a wafer cassette carrying system of the present invention.

2 is a block diagram of the wafer cassette carrying system of the present invention.

FIG. 3 is a schematic diagram of the operation of the wafer cassette carrying system of the present invention.

4 is a schematic view of the air curtain device of the wafer cassette carrying system of the present invention.

FIG. 5 is a block diagram showing another embodiment of the wafer cassette carrying system of the present invention.

6 is a block diagram of still another embodiment of the wafer cassette carrying system of the present invention.

The embodiments of the present invention are described below by way of specific examples, and those skilled in the art can readily appreciate other advantages and utilities of the present invention from the disclosure herein. The present invention may be embodied or applied in various other specific embodiments, and various modifications and changes may be made without departing from the spirit and scope of the invention. Further, the drawings of the present invention are merely illustrative, and are not depicted in actual dimensions, that is, the actual dimensions of the related structures are not reflected, which will be described first. The following embodiments are intended to describe the present invention in further detail, but are not intended to limit the scope of the invention.

Please refer to FIG. 1 and FIG. 2 together, which is a schematic diagram of the created wafer cassette carrying system. As shown, the wafer cassette carrying system 1 includes a carrier device 10 and an air curtain device 20. The carrying device 10 includes a platform 11, an inflatable module 12 and a control Module 13. The platform 11 is configured to provide a wafer cassette B (FOUP), which may be provided with a limiting component 14 and a plurality of air nozzle components (not shown), and the limiting component 14 can be coupled to the wafer cassette B disposed on the platform 11 Engage each other to limit the actuation of the wafer cassette B relative to the platform 11.

The inflator module 12 is used to inflate the wafer cassette B disposed on the platform 11. The inflating module 12 may be in communication with at least one external air supply device according to requirements, and the inflating module 12 may be filled with gas provided by the external air supply device through the air nozzle assembly disposed on the platform 11 It is disposed in the wafer cassette B on the platform 11. In practical applications, the inflator module 12 may include an intake line and an exhaust line, and the inflator module 12 can use an intake line to supply the gas supplied by the external air supply device (for example, CDA, nitrogen, etc.) The charging module 12 can also be used to discharge the gas in the wafer cassette B to the outside by using the exhaust line.

The control module 13 is electrically connected to the inflator module 12, and the control module 13 can control the inflating module 12 to inflate the interior of the wafer cassette B disposed on the platform 11. The control module 13 can be, for example, a microprocessor. In an actual application, the control module 13 can also be connected to an external processing device (such as a computer or the like) to receive control information transmitted by the external processing device.

The air curtain device 20 is disposed adjacent to the platform 11 , and the air curtain device 20 is electrically connected to the control module 13 , and the control module 13 can control the opening and closing of the air curtain device 20 . When the air curtain device 20 is activated, the air curtain device 20 can blow a position of a movable door B1 of the wafer cassette B disposed on the platform 11, thereby preventing the inside of the wafer cassette B from being affected by the external environment.

Referring to FIG. 4 , in an actual application, the air curtain device 20 may include a body 21 , a cover body 22 and at least one gas permeable plate 23 . One side of the body 21 is concavely formed with a receiving groove 211 , and the body 21 is opposite to the inside. One side of the concave forming receiving groove 211 has a plurality of air outlet holes (not shown). The cover body 22 is fixedly disposed on the main body 21 to shield the accommodating groove 211. The cover body 22 includes a plurality of air inlet holes 221, and can communicate with an external gas supply device. In practical applications, The aforementioned inflatable module 12, the air module 12 of the carrying device 10 may be inflated inside the wafer cassette B disposed on the platform 11, or may be connected to the air curtain device 20, and the air curtain device 20 may be blown. The gas required. The gas permeable plate 23 includes a plurality of perforations 231 (not shown). The gas permeable plate 23 is disposed in the accommodating groove 211. The number, shape, arrangement, and the like of the perforations 231 of each gas permeable plate 23 can be designed according to requirements. No restrictions. The actual operation of the air curtain device 20 may be that the gas enters the accommodating groove 211 of the body 21 from the air inlet hole 221 of the cover body 22. When the gas pressure in the accommodating groove 211 reaches a predetermined pressure, the gas will pass through the air. The plurality of perforations 231 of the plate 23 are discharged outward from the plurality of air outlets of the body 21, and through the arrangement of the plurality of gas permeable plates 23 and the plurality of air outlets, the air curtain device 20 can discharge the stable and uniform airflow wall. The components included in the air curtain device 20 and the manner of actuation thereof are only one of the exemplary aspects, and are not limited thereto in practical applications.

Regarding the control method of the air blowing operation of the air curtain device 20, an electric control air valve may be provided in the air inlet hole 221 of the cover body 22, and the control gas may enter the cover body 22 by the electronically controlled air valve. In addition, in the embodiment in which the air curtain device 20 and the air module 12 of the carrier device 10 are connected to each other, the air supply operation of the air module 12 to the air curtain device 20 may be directly controlled by the control module 13 .

Referring to FIG. 1 , in different applications, the wafer cassette carrying system 1 may further include a door opening assembly 30 disposed adjacent to the platform 11 , and the door opening assembly 30 can be coupled to the wafer cassette B disposed on the platform 11 . The movable doors B1 are connected to each other, and the movable door B1 is moved to connect the inside and the outside of the wafer cassette B. In practical applications, the door opening assembly 30 can be electrically connected to the control module 13 of the carrying device 10, and the control module 13 can control the actuation of the door opening assembly 30 to selectively control the opening of the door opening assembly 30 to be set on the platform. The movable door B1 of the wafer cassette B on 11; of course, in various embodiments, the door opening assembly 30 can also be controlled by a control module different from the carrier device 10.

Referring to FIG. 3, the actual operation mode of the wafer cassette carrying system 1 of the present invention may be: when the wafer cassette B is disposed on the platform 11, the control module 13 corresponds to the control limit. The bit assembly 14 and the wafer cassette B are interconnected to limit the movement of the wafer cassette B relative to the platform 11; then, the control module 13 controls the air module 12 to inflate the interior of the wafer cassette B. When the wafer in the wafer cassette B needs to be taken out (or the wafer needs to be set in the wafer cassette B), the control module 13 may first confirm whether the limiting component 14 is connected to the wafer cassette B. In the case where the limiting component 14 and the wafer cassette B are connected to each other, the control module 13 controls the opening of the door opening assembly 30 to open the movable door B1 of the wafer cassette B by the opening assembly 30, and at the same time, the control module 13 The control air curtain device 20 is actuated to cause the air curtain device 20 to blow the position of the wafer cassette B originally provided with the movable door B1, thereby forming an air flow wall at the opening of the wafer cassette B communicating with the outside. In this way, when the external device carries the wafer inside the wafer cassette B, through the arrangement of the air flow wall, particles, gases, and the like in the external environment will not easily enter the wafer cassette B, and the wafer cassette B can be effectively reduced. During the opening of the movable door B1, it is affected by the external environment.

It is to be noted that when the control module 13 controls the door opening assembly 30 to open the movable door B1 of the wafer cassette B, the control module 13 can continuously control the inflation module 12 to inflate the interior of the wafer cassette B, that is, When the external device operates the wafer in the wafer cassette B, the gas input by the gas-filling module 12 will continue in the wafer cassette B, and the gas will be guided by the inner wall of the wafer cassette B. It will flow to the opening of the wafer cassette B, and the gas blown by the air curtain device 20, the particles, gas, and the like located outside the wafer cassette B will be less likely to enter the wafer cassette B. When the external device completes the internal operation of the wafer cassette B, the control module 13 may first control the door opening assembly 30 to move the movable door B1 to close the wafer cassette B, and then control the air curtain device 20 to be closed; when the wafer cassette B When the external device is to be removed from the platform 11, the control module 13 may first control the inflation module 12 to stop inflating the inside of the wafer cassette B, and then control the limiting component 14 and the wafer cassette B to be separated from each other.

As shown in FIG. 5 and FIG. 6, it is a block diagram showing two other embodiments of the present wafer cassette carrying system. In the following, only the two embodiments are largely different from the previous embodiments, and the remaining unillustrated portions are the same as the previous embodiments.

As shown in the figure, the maximum difference between the embodiment and the foregoing embodiment is that the control module 13 of the carrying device 10 is not electrically connected to the door opening assembly E, and the control module 13 cannot directly control the operation of the door opening assembly E. The door opening assembly E is directly controlled by another processing module C. In this embodiment, the operation of the wafer cassette carrying system 1 may be such that when the movable door B1 of the wafer cassette B disposed on the platform 11 is opened, the control module 13 receives an opening signal S1 and controls the mode. The group 13 can control the opening of the air curtain device 20 to blow the position of the wafer cassette B originally provided with the movable door B1. In contrast, when the movable door B1 of the wafer cassette B disposed on the platform 11 is closed, the control module 13 can receive a closing signal S2 correspondingly, and the control module 13 can control the air curtain device 20 to stop the blowing operation accordingly. .

As shown in FIG. 5, in one embodiment, the turn-on signal S1 and the turn-off signal S2 may be a processing module C from the direct control of the door opener E. The control module 13 of the carrying device 10 is communicatively coupled to the processing module C. When the processing module C drives the door opening assembly E to open the movable door B1 of the wafer cassette B disposed on the platform 11, the processing module C transmits the opening signal S1 to the control module 13; When the control door opening unit E drives the door opening assembly E to close the movable door B1 of the wafer cassette B disposed on the platform 11, the processing module C transmits the closing signal S2 to the control module 13.

As shown in FIG. 6 , in another embodiment, the activation signal S1 and the shutdown signal S2 may be from a detection module D, and the detection module D may be disposed adjacent to the platform or disposed on the platform 11 . . The detecting module D can detect the opening and closing state of the movable door B1 of the wafer cassette B disposed on the platform 11, and the detecting module D can detect the movable door B1 of the wafer cassette B disposed on the platform 11. When the detection module D detects that the movable door B1 of the wafer cassette B is closed, the detection module D can transmit the shutdown signal when the detection module D detects that the activation signal S1 of the wafer cassette B is closed. S2 to the control module 13.

In summary, the created wafer cassette carrying system can cooperate with the air curtain device and the control module, and when the movable door of the wafer cassette is opened, the air curtain device can be used in the wafer cassette. The position of the movable door is originally set to blow, so that the inside of the wafer cassette can be effectively prevented from being affected by the external environment. In addition, the created wafer cassette carrying system can also be used when the movable door of the wafer cassette is opened. The inflator module continuously inflates the interior of the wafer cassette, which will make it easier for particles, gases, etc. located outside the wafer cassette to enter the wafer cassette.

The above description is only a preferred and feasible embodiment of the present invention, and thus does not limit the scope of the patent of the present invention. Therefore, any equivalent technical changes made by using the present specification and the contents of the schema are included in the scope of protection of the present creation. .

1‧‧‧Facsimile Carrying System

10‧‧‧ Carrying device

11‧‧‧ platform

12‧‧‧Inflatable module

20‧‧‧Air curtain device

30‧‧‧Opening components

B‧‧‧ wafer cassette

B1‧‧‧ activity gate

Claims (10)

A wafer cassette carrying system, comprising: a carrying device, comprising: a platform for setting a wafer cassette; and an inflatable module for the wafer cassette disposed on the platform And performing a charging operation; and a control module electrically connected to the gas-filling module, wherein the control module can control the gas-filling module to perform an inflation operation on the inside of the wafer cassette disposed on the platform; And an air curtain device disposed adjacent to the platform, the air curtain device is electrically connected to the control module, and the control module can control opening and closing of the air curtain device; wherein, when the air curtain device is activated The air curtain device can blow a position of a movable door of the wafer cassette disposed on the platform; wherein the control module can be disposed in the wafer cassette disposed on the platform When the movable door is opened, the air curtain device is controlled to perform an air blowing on a position where the movable door is originally provided with the movable door. The wafer cassette carrying system of claim 1, wherein the wafer cassette carrying system further comprises a door opening assembly disposed adjacent to the platform, the door opening assembly being capable of being disposed with the platform The movable doors of the wafer cassette are connected to each other to drive the movable door to move to communicate the inside and the outside of the wafer cassette. The wafer cassette carrying system of claim 2, wherein the control module is electrically connected to the door opening assembly, and the control module can control the air curtain device and the door opening assembly simultaneously or sequentially, so that The air curtain device blows a position where the movable door is originally provided with the movable door when the movable door of the wafer cassette is opened. The wafer cassette carrying system of claim 1, wherein the platform further comprises a limiting component that is selectively connectable to the wafer cassette disposed on the platform to limit the crystal The activity of the round box; the limiting component is electrically connected to the control module, and the control module can sequentially control the limiting component and the opening component to act to first limit the activity of the wafer cassette The door opening assembly is further controlled to drive the movable door of the wafer cassette to open. The wafer cassette carrying system of claim 4, wherein the control module can sequentially control the limiting component and the inflatable module to actuate the wafer cassette disposed on the platform After the limiting component is connected, the interior of the wafer cassette can be inflated by the inflatable module; the control module can control the inflatable module when the movable door of the wafer cassette is opened, The inside of the wafer cassette is continuously inflated. The wafer cassette carrying system of claim 5, wherein the control module can sequentially control the door opening assembly and the air curtain device such that the air curtain device is disposed at the platform when the door opening assembly is closed. When the movable door of the wafer cassette is stopped, the blowing operation is stopped. The wafer cassette carrying system of claim 1, wherein the control module is capable of receiving an opening signal when the movable door of the wafer cassette of the platform is opened. The control module can correspondingly control the activation of the air curtain device to blow the position of the wafer cassette where the movable door is originally disposed. The wafer cassette carrying system of claim 7, wherein the cassette carrying system further comprises a detecting module for detecting whether the movable door of the wafer cassette disposed on the platform is When the detection module is enabled, the detection module can generate the opening signal and transmit it to the control module when detecting that the movable door of the wafer cassette is opened. The wafer cassette carrying system of claim 7, wherein the control module can control the inflating module to continuously inflate the interior of the wafer cassette when the control module receives the opening signal operation. The wafer cassette carrying system of claim 7, wherein the control module is capable of receiving a shutdown signal when the movable door of the wafer cassette of the platform is closed. The control module can control the air curtain device to stop the blowing operation.