CN207599340U - Inflation system - Google Patents
Inflation system Download PDFInfo
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- CN207599340U CN207599340U CN201721331667.5U CN201721331667U CN207599340U CN 207599340 U CN207599340 U CN 207599340U CN 201721331667 U CN201721331667 U CN 201721331667U CN 207599340 U CN207599340 U CN 207599340U
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- air inlet
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Abstract
The utility model is related to a kind of inflation systems.The inflation system includes air inlet module, exhaust module and processing module.Air inlet module includes main air inlet pipe road, jettron unit, secondary air inlet pipeline and electric switching element.Main air inlet pipe road connects air feed equipment and enclosure space.Jettron unit can selectively block main air inlet pipe road.Secondary air inlet pipeline both ends connection jettron unit and main air inlet pipe road.Electric switching element can selectively block secondary air inlet pipeline.When electric switching element connects secondary air inlet pipeline, the gas that air feed equipment provides can enter enclosure space by main air inlet pipe road.Exhaust module can discharge selectively the gas of enclosure space.Detecting module can selectively generate detection signal.Processing module can be according to detection signal, and air inlet module and exhaust module is controlled to carry out gas exchanges operation to enclosure space.
Description
Technical field
The utility model is related to a kind of inflation system, detecting state of particularly a kind of energy according to detecting module, and to envelope
Close the inflation system that space is inflated.
Background technology
With the development of science and technology the manufacturer of various product (such as electronic component, food etc.) has found to influence finished product qualification
The factor of rate, in addition to related process design and control other than, semi-finished product and finished product in delivery or manufacturing process, residing for ring
Border state, to final product qualified rate, there is also influences either directly or indirectly.Therefore the manufacturer for various product
For, the ambient condition of semi-finished product and finished product in delivery or manufacturing process how is controlled, becomes an important subject.
Utility model content
The main purpose of the utility model is that provide a kind of inflation system, to improve in the prior art, various half into
The problem of product and finished product are easily influenced in delivery or manufacturing process by ambient condition.
To achieve these goals, the utility model provides a kind of inflation system, to the inside to an enclosure space
Gas exchanges are carried out, inflation system includes：One air inlet module, an exhaust module and a processing module.Air inlet module includes：It is main into
Air pipe, jettron unit, secondary air inlet pipeline and electric switching element.The both ends on main air inlet pipe road are respectively defined as an air inlet
End and an outlet side, inlet end are connect with an air feed equipment, and outlet side is connected with enclosure space.Jettron unit is set to master
Air inlet pipeline, jettron unit can selectively block the connection of inlet end and outlet side.The both ends difference of secondary air inlet pipeline
It is connected with jettron unit and main air inlet pipe road.Electric switching element is set to secondary air inlet pipeline, electric switching element energy
Selectively block the connection at secondary air inlet pipeline both ends；When electric switching element makes the both ends of secondary air inlet pipeline be interconnected,
The gas entered by inlet end, can be by jettron unit, and enters enclosure space by outlet side.Exhaust module passes through a row
Go out pipeline with enclosure space to be connected, exhaust module can discharge selectively the gas of enclosure space.Detecting module energy
Selectively generate a detection signal.Processing module electrical connection air inlet module, exhaust module and detecting module；Processing module can be according to
According to detection signal, the action of air inlet module and exhaust module is controlled, selectively to carry out gas exchanges operation to enclosure space.
Preferably, exhaust module also includes an exhaust unit and an auxiliary exhaust unit, exhaust unit and discharge line
It is connected, exhaust unit is the gas in discharge line to be discharged；Auxiliary exhaust unit is set to discharge line, auxiliary
Exhaust unit energy auxiliary exhaust module quickly discharges the gas of enclosure space.
Preferably, auxiliary exhaust unit is also connected with main air inlet pipe road, and the gas on part main air inlet pipe road can enter
Auxiliary exhaust unit, auxiliary exhaust unit can cooperate with exhaust unit, so that discharge line is rendered as negative pressure state.
Preferably, exhaust module also includes an adjusting unit, connects main air inlet pipe road and auxiliary exhaust unit, adjusts
Unit can adjust the gas flow for entering auxiliary exhaust unit by main air inlet pipe road.
Preferably, inflation system is applied to a wafer carrier platform, and wafer carrier platform includes a plummer, plummer
To carry a wafer carrier；Plummer is provided with multiple nozzles, and detecting module includes an at least carrier type detecting unit,
Carrier type detecting unit can detect the type of the wafer carrier of plummer setting；Processing module can be single according to the detecting of carrier type
The type of member detecting wafer carrier, and control air inlet module and exhaust module are corresponded to, by multiple nozzles, in wafer carrier
Enclosure space carries out gas exchanges.
Preferably, when plummer is provided with specific wafer carrier, and plummer correspondence be fixed wafer carrier when, it is brilliant
Circle carrier platform generates an engaging signal by corresponding；Carrier type detecting unit includes a sensor, is set to plummer,
When plummer sets specific wafer carrier, sensor, which can correspond to, generates a sensing signal, and processing module can be believed in receiving sensing
Number and engaging signal, and air inlet module and exhaust module is selectively controlled to be acted.
Preferably, plummer has an engaging component, and engaging component is to clamp wafer carrier, so that wafer carrier can be steady
Admittedly be set to plummer, when engage component clamping wafer carrier when, can correspond to generate one engage signal；The detecting of carrier type is single
Member includes a sensor, is set to plummer, and when plummer sets specific wafer carrier, sensor can correspond to generation
One sensing signal；When processing module receives sensing signal and engaging signal, processing module will control air inlet module and exhaust mould
Block is inflated operation to wafer carrier.
Preferably, detecting module includes an at least carrier detecting unit, and carrier detecting unit can be detecting plummer
Whether wafer carrier is provided with；Processing module can be when carrier detecting unit detects plummer and is provided with wafer carrier, selectivity
Ground controls air inlet module and exhaust module, and gas exchanges are carried out to the enclosure space in wafer carrier.
Preferably, detecting module also includes a humiture detecting unit, is set to discharge line, and humiture detecting is single
Member is detecting the temperature for the gas discharged by enclosure space and humidity.
Preferably, secondary air inlet pipeline is more provided with a pressure-regulating valve, to adjust the gas pressure of secondary air inlet pipeline；
Main air inlet pipe road is adjacent to outlet side and is additionally provided with a flow detecting unit, to detect the gas by jettron unit
Flow；Main air inlet pipe road is adjacent to outlet side and is additionally provided with a filtering unit, can be filtered through jettron unit
Specific molecular in gas.
The beneficial effects of the utility model also reside in：Pass through air inlet module, exhaust module, detecting module and processing module
It cooperates, gas exchanges can be carried out to enclosure space in appropriate opportunity, the ring of enclosure space can be efficiently controlled whereby
Border state, so as to effectively reduce the ambient condition of enclosure space to being set to the semi-finished product of enclosure space or the shadow of finished product
It rings.
Description of the drawings
Fig. 1 is the block schematic diagram of the inflation system of the utility model；
Fig. 2,3 are that the inflation system of the utility model is applied to the schematic diagram of wafer carrier platform.
Specific embodiment
Referring to Fig. 1, the schematic diagram of its inflation system for the utility model.As shown in the figure, inflation system 1 includes
One air inlet module 10, an exhaust module 20, a detecting module 30 and a processing module (not shown).Inflation system 1 is to one
The inside of enclosure space SP carries out gas exchanges.The enclosure space SP for example can be according to demand for any device (such as
Wafer cassette) inside or room inside etc..
Air inlet module 10 includes：One main air inlet pipe road 101 and a secondary air inlet pipeline 11.The both ends on main air inlet pipe road 101 point
Be not defined as an inlet end 101a and an outlet side 101b, inlet end 101a connect with an air feed equipment IN, outlet side 101b with
Enclosure space SP is connected.The practical embodiments on main air inlet pipe road 101, such as can be hose or hard tube, it does not limit,
It can be changed according to demand；Air feed equipment IN is such as can be distribution pipeline that steel cylinder or workshop are configured with originally；When
So, the outlet side 101b on main air inlet pipe road 101 can be provided with pressure valve 102, to enter master to adjust air feed equipment IN
The gas pressure of air inlet pipeline 101.The connection mode of outlet side 101b and enclosure space can be changed according to demand, be lifted
For example, the enclosure space can be the inner space of wafer cassette (such as FOUP, FOSB), and the outlet side 101b can be with
It is to be connected by dependency structures such as nozzles with the inner space of wafer cassette.
Air inlet module 10 also includes a jettron unit 103, is set to main air inlet pipe road 101, jettron list
Member 103 can selectively block the connection of inlet end 101a and outlet side 101b, that is, jettron unit 103 can be selective
Ground makes the gas for entering main air inlet pipe road 101 by inlet end 101a that can not flow in enclosure space SP.Jettron unit 103
The gas pressure being passed through, when reaching predetermined pressure, jettron unit 103 will make its pipeline connected be connected, institute
It can be designed according to demand to state predetermined pressure.In practical applications, jettron unit 103 can be to maintain normally closed
State, and when the gas pressure for entering jettron unit 103 reaches scheduled state, jettron unit 103 just corresponds to
Inlet end 101a and outlet side 101b is made to be connected with each other logical.
The both ends of secondary air inlet pipeline 11 are connected respectively with jettron unit 103 and main air inlet pipe road 101.Motor switch
Unit 111 is set to secondary air inlet pipeline 11, and electric switching element 111 can selectively block the company at secondary 11 both ends of air inlet pipeline
It is logical；The electric switching element 111 is electrically connected processing module, and processing module can utilize electronically controlled mode, control driven opening
Close the keying of unit 111.When electric switching element 111 makes the both ends of secondary air inlet pipeline 11 be interconnected, by inlet end 101a
The gas of entrance after secondary air inlet pipeline 11, can correspond to and open jettron unit 103, make inlet end 101a according to this with going out
Gas end 101b is connected with each other logical, and the gas entered by inlet end 101a can be flowed in enclosure space SP.In other words
It says, jettron unit 103 necessarily in a state that secondary air inlet pipeline 11 is unimpeded, is just able to be opened, and in secondary air inlet pipe
During road 11 not smooth (i.e. processing module control electric switching element 111 is closed), jettron unit 103 is then to be rendered as closing
The state closed.Certainly, in different application or allow jettron unit 103 in the state of specific, Ke Yizhi
The gas for connecting main air inlet pipe road 101 carries out keying operation.
In preferable application, main air inlet pipe road 101 is also provided with an air pressure detecting unit 104, secondary air inlet pipeline
11 are also provided with a pressure-regulating valve 112.Air pressure detecting unit 104 to detect the gas pressure on main air inlet pipe road 101,
It can be by wired or wirelessly, and it (is, for example, industry meter that the relevant information that it is detected is transferred to processing module
Calculation machine etc.)；Certainly, air pressure detecting unit 104 can also be mechanical pointer, not limit.Pressure-regulating valve 112 is adjusting
The whole gas pressure by electric switching element 111, that is, corresponding control when electric switching element 111 is opened, by pair into
The gas pressure of air pipe 11 and entrance jettron unit 103.In practical applications, pressure-regulating valve 112 can be manual
Or powered version, it does not limit；And the pressure value that pressure-regulating valve 112 is detected can be by wired or wireless
Mode be transferred to processing module.
In special application, electric switching element 111 can be designed as occurring in electric switching element 111 not pre-
During the outage problem of phase, electric switching element 111 can still keep the state before not powering off.Also that is, electric switching element 111 is logical
Electricity and make in a state that the both ends of secondary air inlet pipeline 11 are connected, when meeting with not expected power-off, electric switching element 111 can be with
Still keep the connection at secondary 11 both ends of air inlet pipeline；On the contrary, electric switching element 111 is being powered and is blocking secondary air inlet pipeline 11
In the state of, when meeting with not expected power-off, electric switching element 111 can still keep the both ends of secondary air inlet pipeline 11 not connect
It is logical.
In practical applications, main air inlet pipe road 101 is also provided with a flow detecting unit 105 and a gas filtration list
Member 106, flux detecting unit 105 can be set between jettron unit 103 and outlet side 101b, and gas filtration list
Member 106 can then be adjacent to outlet side 101b settings.Flux detecting unit 105 is detecting through jettron unit 103
Gas flow.Flux detecting unit 105 can be electrically connected processing module by wired or wireless mode, and will can detect according to this
Coherent signal is transferred to processing module caused by survey；Certainly, flux detecting unit 105 can also be mechanical pointer.Pass through
The setting of flux detecting unit 105 can be not only measured outside the gas flow by jettron unit 103, can also be to
Judge jettron unit 103 whether normal operation.
Exhaust module 20 can be connected by a discharge line 201 with enclosure space SP.Exhaust module 20, which includes at least, to be had
One exhaust unit 21, the exhaust unit 21 can be subject to processing module control and the gas of enclosure space SP selectively made to arrange outward
Go out.Signified exhaust unit 21 can be that any gas that can make in discharge line 201 is flowed to the direction far from enclosure space SP
Dynamic component.Preferably, exhaust module 20 can also include a solenoid valve 22 and an air pressure detecting unit 23,22 electricity of solenoid valve
Connection processing module, and processing module can selectively control the keying of solenoid valve 22, so that the selective ground resistance of solenoid valve 22
Disconnected discharge line 201.For air pressure detecting unit 23 to detect the gas pressure of discharge line 201, air pressure detecting unit 23 can be with
It is electrical connection processing module, and processing module can then receive the discharge line 201 that air pressure detecting unit 23 is measured in real time
Gas pressure.
In different applications, exhaust module 20, which can also be, includes an auxiliary exhaust unit 24, is set to discharge
Pipeline, 24 energy auxiliary exhaust module 20 of auxiliary exhaust unit quickly discharge the gas of enclosure space SP.For example, it is auxiliary
Exhaust-assisting unit 24 can be connected with main air inlet pipe road 101, and the gas on part main air inlet pipe road 101 can enter auxiliary row
Gas unit 24, auxiliary exhaust unit 24 can cooperate with exhaust unit 21, so that discharge line 201 is rendered as negative pressure state,
It can accelerate to discharge the gas in discharge line according to this；Preferably, exhaust module 20 can also include an adjusting unit 25,
Both ends connect main air inlet pipe road 101 and auxiliary exhaust unit 24 respectively, and adjust unit 25 can be adjusting by main air inlet pipe road
101 enter the gas flow of auxiliary exhaust unit 24, according to this size of negative pressure caused by corresponding adjustment auxiliary exhaust unit 24.
Detecting module 30 generates a detection signal to detect an ambient condition, with corresponding；Processing module electrical connection detecting
Module 30, and processing module can according to detection signal, corresponding control air inlet module 10 and exhaust module 20 to enclosure space SP, into
Promoting the circulation of qi body exchanging operation.For example, detecting module 30 can include a humiture detecting unit 31, can be setting
In discharge line 201, and humiture detecting unit 31 obtains according to this to detect the humidity of the gas of discharge line 201 and temperature
Know the gaseous state in enclosure space SP.Certainly, detecting module 30 is not limited to be set to the humiture detecting of discharge line 201
Unit 31, detecting module 30 can be according to demand include various detector (such as to detect the concentration of specific gas,
Temperature, soda acid etc.), and processing module can be then the detection signal transmitted according to different detectors, it is corresponding to determine air inlet mould
The action of block 10 and exhaust module 20.
Processing module electrical connection air inlet module 10, exhaust module 20 and detecting module 30, processing module can be that foundation is detectd
The detection signal that module 30 is transmitted is surveyed, and air inlet module 10 and exhaust module 20 is controlled to carry out gas exchanges to enclosure space
Operation.For example, processing module can be humiture detecting unit 31 detect discharged by enclosure space SP it is specific
When the humidity of gas is higher than a predetermined value, control relevant apparatus acts (such as screen-picture, warning lamp, alarming sound) to remind phase
Pass personnel, then related personnel can be then the action according to demand, processing module control air inlet module 10 and exhaust module 20.
Wherein, the processing module is not limited such as can be industrial computer, microprocessor.
Also referring to Fig. 1 to Fig. 3, the inflation system 1 of the utility model can be applied to wafer carrier platform A；
The each component that will be continued to use previous embodiment in illustrating below and defined, and in the examples below, it will be no longer for more described
Component is described in detail.The wafer carrier platform A includes a plummer A1 and multiple nozzle A2.Plummer A1 is setting
Put a wafer carrier (FOUP) B.It is to connect main air inlet pipe road respectively that multiple nozzle A2, which are set to plummer A1, multiple nozzle A2,
101 outlet side 101b and discharge line 201.In the installation position of the present embodiment multiple nozzle A2 shown in figure, only show
It is intended in practical application, is not limited with it.
Aforementioned detecting module 30, which can also be, includes an at least carrier detecting unit 32, carrier detecting unit 32 to
Whether detecting plummer A1 is provided with wafer carrier B；Aforementioned processing module can detect plummer A1 in carrier detecting unit 32 and set
When being equipped with wafer carrier B, air inlet module 10 and exhaust module 20 are selectively controlled, to the enclosure space SP in wafer carrier B
Carry out gas exchanges.In practical applications, carrier detecting unit 32 can include one first detector 321 and three second
Detector 322, the first detector 321 can judge wafer using wirelessly (such as infrared ray, ultrasonic sensing etc.)
Whether tool B is set to plummer A1, and three the second detectors 322 can be fixedly installed on plummer A1 in wafer carrier B
When, it is compressed by wafer carrier B and corresponds to generation signal.Processing module receives the first detector 321 and the second detector 322 is detectd
After surveying signal caused by wafer carrier B, it can confirm whether plummer A1 is provided with wafer carrier B according to this.It is worth mentioning
The first signified detector 321 and three the second detectors 322, be can to detect any type of wafer carrier B,
And the accuracy that using three the second detectors 322 will can effectively improve detection；Certainly, in different applications, the second detecting
The quantity of device 322 can also increase and decrease according to demand.
In a further embodiment, detecting module 30, which can also be, includes an at least carrier type detecting unit 33.It carries
Tool type detecting unit 33 is set to plummer A1, can to detect the type of the wafer carrier B of setting plummer A1, with
It is corresponding to generate related detection signal；Processing module can then detect the type of wafer carrier B according to carrier type detecting unit 33, and
It is corresponding to judge whether the wafer carrier B needs to be inflated, and processing module further controls air inlet module 10 and be vented
Module 20 is utilized respectively corresponding nozzle A2, and operation is inflated to the enclosure space SP in wafer carrier B.Specifically,
The inlet and outlet hole of different wafer carrier B and its installation position of dependency structure may be not quite similar, and therefore, pass through carrier kind
The detecting of class detecting unit 33, processing module can correspond to control air inlet module 10 and exhaust module 20, according to different wafers
Have B, and correspond to using different nozzle A2, gas exchanges are carried out to the inside of wafer carrier B.Alternatively, processing module energy foundation
Different wafer carrier B, and air inlet module 10 and exhaust module 20 is controlled to make different gas, it exchanges into wafer carrier B.
In practical applications, when specific wafer carrier B is fixedly installed on plummer A1, carrier type detecting unit 33
It will be triggered, and generate corresponding sensing signal, processing module receives the sensing that carrier type detecting unit 33 is transmitted
After signal, if processing module also receives the engaging signal that the engaging component A3 from plummer A1 is transmitted, mould is handled
Corresponding control air inlet module 10 and exhaust module 20 are inflated operation by block to the inside of wafer carrier B.The engaging component
A3 is to clamp the wafer carrier B being set on plummer A1, and engages component A3 after wafer carrier B is clamped, it will right
The engaging signal should be generated.If processing module only receives the sensing signal or engaging signal, processing module and will not control
Air inlet module 10 and exhaust module 20 processed are inflated operation to wafer carrier B.In different applications, the inflation system 1
Detecting module 30 carrier type detecting unit 33, can include the engaging component A3 or to detection card
The sensor of the fastening state of seaming element A3 and wafer carrier B.
Claims (10)
1. a kind of inflation system, which is characterized in that the inflation system to the inside of an enclosure space carry out gas exchanges,
The inflation system includes：
One air inlet module, it includes：
One main air inlet pipe road, both ends are respectively defined as an inlet end and an outlet side, and the inlet end and an air feed equipment connect
It connects, the outlet side is connected with the enclosure space；
One jettron unit, is set to the main air inlet pipe road, and the jettron unit can selectively block described
Inlet end and the connection of the outlet side；
One secondary air inlet pipeline, both ends are connected respectively with the jettron unit and the main air inlet pipe road；And
One electric switching element is set to the secondary air inlet pipeline, and the electric switching element can selectively block described
The connection at secondary air inlet pipeline both ends；When the electric switching element makes the both ends of the secondary air inlet pipeline be interconnected, by institute
The gas of inlet end entrance is stated,
Can be by the jettron unit, and the enclosure space is entered by the outlet side；
One exhaust module is connected by a discharge line with the enclosure space, and the exhaust module can selectively make
The gas of the enclosure space discharges；
One detecting module can selectively generate a detection signal；And
One processing module is electrically connected the air inlet module, the exhaust module and the detecting module；
The processing module can control the action of the air inlet module and the exhaust module according to the detection signal, with choosing
Gas exchanges operation is carried out to selecting property to the enclosure space.
2. according to inflation system described in claim 1, which is characterized in that the exhaust module also include an exhaust unit and
One auxiliary exhaust unit, the exhaust unit are connected with the discharge line, and the exhaust unit is to by the discharge pipe
Gas in road discharges；The auxiliary exhaust unit is set to the discharge line, and the auxiliary exhaust unit can assist
The exhaust module quickly discharges the gas of the enclosure space.
3. according to the inflation system described in claim 2, which is characterized in that the auxiliary exhaust unit also with the main air inlet pipe
Road is connected, and the gas on the part main air inlet pipe road can enter the auxiliary exhaust unit, the auxiliary exhaust unit energy
It cooperates with the exhaust unit, so that the discharge line is rendered as negative pressure state.
4. according to the inflation system described in claim 3, which is characterized in that the exhaust module also includes an adjusting unit,
It connects the main air inlet pipe road and the auxiliary exhaust unit, and the adjusting unit can be adjusted to be entered by the main air inlet pipe road
The gas flow of the auxiliary exhaust unit.
5. according to inflation system described in claim 1, which is characterized in that the inflation system is put down applied to a wafer carrier
Platform, the wafer carrier platform include a plummer, and the plummer is carrying a wafer carrier；The plummer setting
There are multiple nozzles, the detecting module includes an at least carrier type detecting unit, and the carrier type detecting unit can be detectd
Survey the type of the wafer carrier of the plummer setting；The processing module can be detectd according to the carrier type detecting unit
The type of the wafer carrier is surveyed, and corresponds to and controls the air inlet module and the exhaust module, it is right by multiple nozzles
Enclosure space in the wafer carrier carries out gas exchanges.
6. according to the inflation system described in claim 5, which is characterized in that when the plummer is provided with the wafer carrier,
And the plummer is corresponded to when being fixed the wafer carrier, the wafer carrier platform corresponding will generate an engaging signal；
The carrier type detecting unit includes a sensor, is set to the plummer, and the plummer sets the wafer
During carrier, the sensor, which can correspond to, generates a sensing signal, and the processing module can be in receiving the sensing signal and described
Engage signal, and the air inlet module and exhaust module is selectively controlled to be acted.
7. according to the inflation system described in claim 5, which is characterized in that the plummer has an engaging component, the card
Seaming element is to clamp the wafer carrier, so that the wafer carrier can firmly be set to the plummer, when the card
When seaming element clamps the wafer carrier, one engaging signal of generation can be corresponded to；The carrier type detecting unit includes a biography
Sensor is set to the plummer, and when the plummer sets the wafer carrier, the sensor can correspond to generation one
Sensing signal；When the processing module receives the sensing signal and the engaging signal, the processing module will control institute
It states air inlet module and exhaust module and operation is inflated to the wafer carrier.
8. according to the inflation system described in claim 5, which is characterized in that the detecting module includes the detecting of an at least carrier
Unit, the carrier detecting unit can be detecting whether the plummer is provided with the wafer carrier；The processing module
The air inlet mould can be selectively controlled when the carrier detecting unit detects the plummer and is provided with the wafer carrier
Block and the exhaust module carry out gas exchanges to the enclosure space in the wafer carrier.
9. according to inflation system described in claim 1, which is characterized in that the detecting module also includes humiture detecting
Unit, is set to the discharge line, and the humiture detecting unit is detecting the gas discharged by the enclosure space
The temperature and humidity of body.
10. according to inflation system described in claim 1, which is characterized in that the pair air inlet pipeline is more provided with a pressure tune
Valve is saved, to adjust the gas pressure of the secondary air inlet pipeline；The main air inlet pipe road is adjacent to the outlet side and more sets
There is a flow detecting unit, to detect the gas flow by the jettron unit；The main air inlet pipe road is neighbouring
A filtering unit is more provided in the outlet side, point that can be filtered through in the gas of the jettron unit
Son.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721331667.5U CN207599340U (en) | 2017-10-16 | 2017-10-16 | Inflation system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721331667.5U CN207599340U (en) | 2017-10-16 | 2017-10-16 | Inflation system |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207599340U true CN207599340U (en) | 2018-07-10 |
Family
ID=62756768
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721331667.5U Active CN207599340U (en) | 2017-10-16 | 2017-10-16 | Inflation system |
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| Country | Link |
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| CN (1) | CN207599340U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110571118A (en) * | 2018-06-06 | 2019-12-13 | 北京北方华创微电子装备有限公司 | Flow threshold determination method, control device and semiconductor processing equipment |
| WO2023024159A1 (en) * | 2021-08-23 | 2023-03-02 | 长鑫存储技术有限公司 | Control method, device, and system for semiconductor manufacturing device, and storage medium |
| CN115863248A (en) * | 2023-03-01 | 2023-03-28 | 昆山芯物联电子通讯有限公司 | Inflatable clamping device for wafer conveying carrier |
-
2017
- 2017-10-16 CN CN201721331667.5U patent/CN207599340U/en active Active
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110571118A (en) * | 2018-06-06 | 2019-12-13 | 北京北方华创微电子装备有限公司 | Flow threshold determination method, control device and semiconductor processing equipment |
| CN110571118B (en) * | 2018-06-06 | 2022-03-22 | 北京北方华创微电子装备有限公司 | Flow threshold determination method, control device and semiconductor processing equipment |
| WO2023024159A1 (en) * | 2021-08-23 | 2023-03-02 | 长鑫存储技术有限公司 | Control method, device, and system for semiconductor manufacturing device, and storage medium |
| CN115863248A (en) * | 2023-03-01 | 2023-03-28 | 昆山芯物联电子通讯有限公司 | Inflatable clamping device for wafer conveying carrier |
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