TWM548253U - Cooling device - Google Patents

Description

Cooling device

This creation is related to a cooling device, and in particular to a cooling device that prevents leakage of coolant.

According to the air-conditioned building, semiconductor factory, refrigerator, etc., the internal cooling must be carried out through the cooling system, especially in the integrated circuit manufacturing process of the semiconductor industry, whether it is film deposition, etching or heat treatment. To ensure the stability of the manufactured products, the temperature must be maintained within a certain range.

At present, the chiller is widely used in the cooling device of the industry. The existing chiller structure is mainly composed of components such as an evaporator, a water tank and a pump, and the pipeline is sequentially connected to each other to form a cooling circulation system.

When the water tank supplies cold water to the pump through the pipeline, the pump transports the cold water to the object to be cooled through the pipeline, so that the cold water exchanges heat with the object to be cooled, and the heat energy of the object to be cooled is taken away, at this time, in the pipeline The cold water becomes hot water by absorbing the heat energy of the object to be cooled, and then the hot water is sent to the evaporator through the pipeline to exchange heat between the evaporator and the cold source inside the ice water machine to heat the pipeline. After the heat energy of the water is taken away, the water in the pipeline becomes cold water, and then flows back into the water tank. Accordingly, the reciprocating circulation cooling can achieve the effect of maintaining the ambient temperature of the semiconductor plant and the like in a desired range.

However, the above-mentioned ice water machine often uses a vertical pump, and the main components thereof are composed of a motor seat, a pipe body, an impeller and a front cover, and the pump pumps the liquid upwards and is sent out by the outlet of one side, but When the operation is stopped, a negative pressure is generated to pour the liquid back into the pipe body, and it will quickly overflow upward, and the pump discharge and overflow capacity is insufficient, which often causes damage to the pump.

In addition, because of the long-term use of the vertical pump, the coolant in the pump easily leaks between the bearings of the impeller, and the coolant (for example, hydrochlorofluorocarbon (CFC), hydrochlorofluorocarbon (HCFC) or hydrofluorocarbon (HFC) After the leak, it will also evaporate to make fluoride ions in the air, and the fluoride ions may also react with water molecules (H2O) in the air to form hydrofluoric acid (HF), which may also be hydrofluoric acid (HF). Erosion of wafers in semiconductor processes.

Furthermore, since the above-mentioned vertical pump shaft seal is prone to leakage, it causes loss in the production process; if the coolant is a highly toxic chemical substance, it will cause irreparable damage to the environment, products and workers. .

Therefore, the creator of this case is observing the above-mentioned deficiencies, and there is a creation of this creation.

The main purpose of this creation is to provide a cooling device which is mainly provided with a magnetic pump in the internal coolant circulation circuit, thereby preventing the leakage of the cooling liquid due to the friction loss, and at the same time, the product of the production equipment. The yield is kept above a certain level.

The secondary objective of this creation is to provide a cooling device that is applied to the integrated circuit manufacturing process of the semiconductor industry, and that is stable in manufacturing products and prevents leakage of coolant and water molecules (H2O) in the air. The problem of hydrofluoric acid (HF) is generated by the reaction, and the damage to the environment, products and workers caused by the leakage of the coolant during the production process is eliminated.

In order to achieve the above object, the cooling device provided by the present invention comprises: a casing having an accommodating space therein, and having at least one supply port and at least one return port; and a plurality of connecting pipe members In the accommodating space, a cooling cycle module is disposed in the accommodating space, and the cooling cycle module has an evaporator, and the evaporator is connected to a heater through at least one connecting pipe. The heater is connected to a storage tank through at least one connecting pipe. The storage tank is connected to a magnetic pump through at least one connecting pipe. The magnetic pump is connected to a pressure gauge through at least one connecting pipe, and the pressure gauge is connected through at least one connection. The pipe is connected to a flow meter, and a coolant flows in the connecting pipe; and a cold coal circulation module is connected to the cooling cycle module, and a cold coal system in the cooling cycle module The coolant is heat exchanged in the evaporator.

Preferably, the cooling cycle module uses a magnetic pump to transport the coolant through the flowmeter to the supply port, so that the supply port is connected to a production device for temperature control, and then the coolant is directly entered into the storage box from the return port. .

Preferably, the cooling cycle module and the production device form a coolant circulation circuit.

Preferably, the method further includes a control module electrically connected to the cooling cycle module and the cold coal circulation module.

Preferably, the control module has a control panel and a plurality of processing units, the control panel is disposed on the outer side of the casing, and the processing units are disposed in the accommodating space for controlling and monitoring the Operation of the cooling cycle module and the cold coal circulation module.

Preferably, the cold coal circulation module has a compressor, and the compressor is connected to a condenser through at least one connecting pipe, the condenser is connected to an expansion valve through at least one connecting pipe, and the expansion valve is transmitted through At least one connecting pipe is connected to the evaporator, and the evaporator is connected to the compressor through at least one connecting pipe.

Preferably, the cold coal circulation module comprises a cold coal circulation loop.

Preferably, the storage box is located on the upper side of the magnetic pump.

The cooling device provided by the present invention is mainly provided with the magnetic pump in the cooling cycle module, and the magnetic pump utilizes the internal structure design to avoid the problem of friction loss, thereby improving the prior cooling device (eg, Bleed water machine) The problem that the cooling effect is reduced due to the long-term use of the vertical pump, which causes the coolant to leak easily from the wear of the bearing; importantly, the cooling device of the present invention is set by the magnetic pump, so the product in the semiconductor industry In the production process of bulk circuits, it can prevent the leakage of coolant and react with water molecules (H2O) in the air to form hydrofluoric acid (HF), and avoid the leakage of coolant due to the production process, the environment, products and staff. The damage caused, at the same time, can make the production rate of the products manufactured by the production equipment stable.

Referring to FIG. 1 and FIG. 2 , together with FIG. 3 and FIG. 4 , a perspective view, a cycle structure diagram and an exploded perspective view of a preferred embodiment of the present invention are disclosed. The cooling device 100 is disclosed. The system contains:

A casing 10 has an accommodating space 12 therein and has at least one supply port 13 and at least one return port 14.

A plurality of connecting tubular members 20 are disposed in the accommodating space 12.

a cooling cycle module 30 is disposed in the accommodating space 12, and the cooling cycle module 30 has an evaporator 31. The evaporator 31 is connected to a heater 32 through at least one connecting pipe member 20. The heater 32 is connected to a storage tank 33 through at least one connecting pipe member 20. The storage box 33 is connected to a magnetic pump 34 through at least one connecting pipe member 20, and the storage box 33 is located on the upper side of the magnetic pump 34. The magnetic pump 34 is connected to a pressure gauge 35 through at least one connecting pipe member 20. The pressure gauge 35 is connected to a flow meter 36 through at least one connecting pipe member 20. Further, a coolant flows in the connecting pipe members 20.

In the present embodiment, as shown in FIG. 2, the cooling cycle module 30 uses the magnetic pump 34 to transport the coolant through the flow meter 36 to the supply port 13, and connects the supply port 13 to a production device for temperature control. 200. Then, the cooling liquid directly enters the storage tank 33 from the return port 14; further, the cooling cycle module 30 and the production equipment 200 form a coolant circulation circuit.

a cooling coal circulation module 40 is connected to the cooling cycle module 30. A cold coal system in the cooling cycle module 30 exchanges heat with the coolant in the evaporator 31. In this embodiment, The cold coal circulation module 40 has a compressor 41. The compressor 41 is connected to a condenser 42 through at least one connecting pipe member 20. The condenser 42 is connected to an expansion valve 43 through at least one connecting pipe member 20. The valve 43 is connected to the evaporator 31 through at least one connecting pipe member 20, and the evaporator 31 is connected to the compressor 41 through at least one connecting pipe member 20; and as shown in FIG. 2, the cold coal circulating module 40 is configured as a Cold coal circulation loop.

A control module 50 is electrically connected to the cooling cycle module 30 and the cold coal circulation module 40. The control module 50 has a control panel 51 and a plurality of processing units 52. The processing unit 52 is disposed on the outer side of the casing 10 and is used to control and monitor the operation of the cooling cycle module 30 and the cold coal circulation module 40. In this embodiment, the processing units 52 are electronic components that provide operations, control, sensing, and conversion for control circuits, frequency converters, sensors, and the like.

In order to further understand the characteristics of this creation, the use of technical means and the expected results, we will describe the use of this creation, and believe that we can have a deeper and more specific understanding of this creation, as follows:

Please refer to FIG. 1 and FIG. 2 , together with FIG. 3 and FIG. 4 , which are perspective views, a cyclic structure diagram and an exploded perspective view of a preferred embodiment of the present invention. In the state of use, the cooling cycle module 30 mainly uses the magnetic pump 34 to pass the coolant through the evaporator 31, the heater 32, the storage tank 33, the pressure gauge 35, the flow meter 36, and the production equipment 200. So that a coolant circulation loop is formed. The cold coal circulation module 40 causes the refrigerant to flow through the condenser 42 from the compressor 41, and cools the refrigerant by the cooling water, and the condenser 42 is connected to the expansion valve 43 and the evaporator 31 to form a Refrigerant circulation loop.

What is important is that the present invention is provided with the magnetic pump 34 in the cooling cycle module 30, and the magnetic pump 34 utilizes a structure in which the internal inner rotor and the outer rotor are not in contact with each other to avoid the problem of friction loss. The cooling device (for example, a chiller) in the prior art is improved, and the problem that the cooling effect is lowered due to the long-term use of the vertical pump causes the coolant to leak easily from the bearing wear.

It is worth mentioning that, since the present cooling device 100 is disposed through the magnetic pump 34, in the integrated circuit manufacturing process of the semiconductor industry, the coolant can be prevented from leaking and reacting with water molecules (H2O) in the air to generate hydrogen fluoride. The problem of acid (HF), as well as the damage caused to the environment, products and workers caused by the leakage of coolant during the production process, and the stability of the products manufactured by the production equipment 200.

It is worth mentioning that the magnetic pump 34 of the present invention is a horizontal type, and the magnetic pump 34 is disposed on the lower side of the storage box 33. Therefore, the vertical pump of the prior art needs to be erected in the storage box. On the upper side of the 33, and as shown in FIG. 4, since the housing space 12 of the casing 10 is limited, it can be seen that the creation system has the advantage of better space and flexibility.

Hereby, the characteristics of this creation and its achievable expected effects are stated as follows:

First, the cooling device 100 of the present invention is provided with a magnetic pump 34 in the internal coolant circulation circuit, thereby preventing the leakage of the cooling liquid due to the friction loss, and at the same time, maintaining the product yield of the production equipment 200. Above a certain level.

Secondly, when the cooling device 100 of the present invention is applied to the integrated circuit manufacturing process of the semiconductor industry, the yield of the products manufactured by the semiconductor industry can be stabilized, and the leakage of the coolant in the pump body can be prevented, and the water molecules in the air ( H2O) Reacts to hydrofluoric acid (HF) and eliminates damage to the environment, products and workers caused by coolant leakage during production.

Thirdly, the cooling device 100 of the present invention can quickly maintain the constant temperature state of the production equipment 200, avoiding the situation that the process cannot be performed due to the high temperature of the process machine, and can keep the product yield above a certain level.

In summary, this creation has its excellent progress and practicality in similar products. At the same time, it has investigated the technical information about such structures at home and abroad. The same structure has not been found in the literature. This creation has already possessed new types of patent requirements, and applied for it according to law.

However, the above-mentioned embodiments are merely preferred embodiments of the present invention, and the equivalent structural changes that are applied to the present specification and the scope of the patent application are intended to be included in the scope of the present patent.

100‧‧‧Cooling device
10‧‧‧Chassis
12‧‧‧ accommodating space
13‧‧‧Supply
14‧‧‧Return port
20‧‧‧Connected fittings
30‧‧‧Cooling cycle module
31‧‧‧Evaporator
32‧‧‧heater
33‧‧‧ storage box
34‧‧‧Magnetic pump
35‧‧‧ pressure gauge
36‧‧‧ Flowmeter
40‧‧‧Cold coal circulation module
41‧‧‧Compressor
42‧‧‧Condenser
43‧‧‧Expansion valve
50‧‧‧Control module
51‧‧‧Control panel
52‧‧‧Processing unit
200‧‧‧Production equipment

1 is a perspective view of a preferred embodiment of the present invention. 2 is a schematic diagram of a loop architecture of a preferred embodiment of the present invention. Figure 3 is an exploded perspective view of a preferred embodiment of the present invention. Figure 4 is an exploded perspective view of a preferred embodiment of the present invention.

100‧‧‧Cooling device

10‧‧‧Chassis

50‧‧‧Control module

51‧‧‧Control panel

Claims (8)

A cooling device comprising: a casing having an accommodating space therein and having at least one supply port and at least one return port; a plurality of connecting pipe members disposed in the accommodating space; a circulation module, which is disposed in the accommodating space, and the cooling cycle module has an evaporator, and the evaporator is connected to a heater through at least one connecting pipe, and the heater is connected through at least one connecting pipe a storage tank connected to a magnetic pump through at least one connecting pipe, the magnetic pump is connected to a pressure gauge through at least one connecting pipe, and the pressure gauge is connected to a flowmeter through at least one connecting pipe, and a cooling liquid flowing in the connecting pipe; and a cold coal circulation module connected to the cooling cycle module, wherein a cooling coal system in the cooling cycle module and the cooling liquid are heated in the evaporator Exchanging; wherein the magnetic pump is mainly disposed through the cooling cycle module to avoid leakage of the coolant. The cooling device according to claim 1, wherein the cooling cycle module uses a magnetic pump to transport the coolant through the flowmeter to the supply port, and the supply port is connected to a production device for temperature control, and then the cooling is performed. The liquid system directly enters the storage tank from the return port. The cooling device according to claim 2, wherein the cooling cycle module and the production device form a coolant circulation circuit. The cooling device according to claim 1 further includes a control module electrically connected to the cooling cycle module and the cold coal circulation module. The cooling device of claim 4, wherein the control module has a control panel and a plurality of processing units, the control panel is disposed on an outer side of the casing, and the processing units are disposed on the The space is accommodated and used to control and monitor the operation of the cooling cycle module and the cold coal circulation module. The cooling device according to claim 1, wherein the cold coal circulation module has a compressor, and the compressor is connected to a condenser through at least one connecting pipe member, the condenser is transmitted through at least one connecting pipe member. An expansion valve is connected, and the expansion valve is connected to the evaporator through at least one connecting pipe, and the evaporator is connected to the compressor through at least one connecting pipe. The cooling device according to claim 6, wherein the cold coal circulation module constitutes a cold coal circulation circuit. The cooling device according to claim 1, wherein the storage tank is located on an upper side of the magnetic pump.