CN206903885U - The magnetic force pump configuration of cooling device - Google Patents
The magnetic force pump configuration of cooling device Download PDFInfo
- Publication number
- CN206903885U CN206903885U CN201720602686.0U CN201720602686U CN206903885U CN 206903885 U CN206903885 U CN 206903885U CN 201720602686 U CN201720602686 U CN 201720602686U CN 206903885 U CN206903885 U CN 206903885U
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- Prior art keywords
- drive
- cooling device
- magnetic force
- pump
- cage
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Abstract
A kind of magnetic force pump configuration of cooling device, in its cooling loop module of one in a cooling device, a magnetic drive pump in the cooling loop module includes a drive motor, the drive motor side has a drive shaft, the drive shaft connects an outer drive magnet, the outer drive magnet is in a beam barrel, and the recessed storage tank of outer drive magnet, the storage tank is provided with a cage, pivot structure in one is provided with the cage, the interior pivot structure has a rotating shaft, one end of the rotating shaft is provided with drive magnet in one, and the other end connects an impeller, the impeller is in the pump case component；With this, in operating state, be may be limited to because the cage is in closed setting, therefore when the liquid in the pump case component flows in the cage, without leaking to the drive motor.
Description
Technical field
The utility model is relevant with a kind of cooling device, particularly relates to a kind of magnetic force pump configuration of cooling device.
Background technology
Press, have air-conditioned building, semiconductor factory building, freezer etc., it is necessary to through cooling system, to be carried out to inside
In the integrated circuit procedure for producing of refrigeration, especially semi-conductor industry, the whether processing procedure such as thin film deposition, etching or heat treatment is
Ask manufacture product yield stable, temperature must be maintained in a particular range.
Industry provides the device cooled down and uses frozen water machine more at present, and existing frozen water machine structure is mainly by evaporator, water tank
And the component such as pumping is formed, and sequentially mutually contacted by pipeline and form a cooling recirculation system.
When cold water is supplied pumping by water tank by the road, cold water is delivered to object to be cooled down by pumping by the road, so that cold water
Heat exchange is carried out with object to be cooled down, and the heat energy for being intended to cool down object is taken away, now, cold water in pipeline is intended to cool down because of absorption
The heat energy of object and become hot water, followed by, the hot water is delivered to evaporator by the road, with by inside evaporator and frozen water machine
Low-temperature receiver carries out heat exchange, and after the heat energy of the hot water in pipeline is taken away, the water in pipeline turns into cold water, and again in reflow tank,
According to this, reciprocation cycle cooling, which can reach, makes the environment temperatures such as semiconductor factory building maintain required range effect.
However, above-mentioned frozen water machine often uses vertical pump, its main component is by motor base, body, impeller and protecgulum
Composition, and pump is to take out liquid upwards when operating, is sent out by the outlet of side, but negative pressure can be produced by liquid when shutting down
Body is filled in return pipe body, and quickly can up be overflowed, and the scarce capacity of pump excretion overflow, often results in the damage of pump.
In addition, vertical pump uses because permanent, the coolant in pump easily leaks between the bearing of impeller, and coolant
(for example, fluorochlorohydrocarbon (CFC), hydrogen fluorochlorohydrocarbon (HCFC) or HFC (HFC)) after leakage, can also evaporate makes to be furnished with fluorine in air
Ion, and fluorine ion it is also possible to aerial hydrone (H2O) react, so as to generate hydrofluoric acid (HF), the hydrofluoric acid
(HF) it is also possible to the chip corroded in manufacture of semiconductor.
Furthermore due to being also easy to produce leakage at above-mentioned vertical pump axle envelope, thus cause the loss in production process；If cooling
Liquid is tool hypertoxicity chemical substance, then for environment, soil and staff, will cause irreparable harm.
Therefore this case creator is observing above-mentioned missing, there is generation of the present utility model then.
Utility model content
Main purpose of the present utility model is to provide a kind of magnetic force pump configuration of cooling device, and it is in a cooling device
One cooling loop module in, the rotating shaft in the magnetic drive pump inside configuration impeller needs not extend to the drive motor of rear end,
And can be completely sealed in a cage, therefore interior rotating shaft need not be extended into the isolation using traditional axle envelope mechanism
Cover, effectively can prevent coolant from leaking on the whole.
Secondary objective of the present utility model is to provide a kind of magnetic force pump configuration of cooling device, its can exempt above-mentioned bearing with
Abrasive conditions caused by the direct contact of rotor, and then lift service life.
A further object of the present utility model is to provide a kind of magnetic force pump configuration of cooling device, and it is using semi-conductor industry
In integrated circuit procedure for producing, and it is stable its is manufactured product yield, and can prevent coolant from revealing and with aerial hydrone
(H2O) the problem of reaction generation hydrofluoric acid (HF), and exempt and causing because coolant leaks in production process, institute is to environment, production
Injured caused by product and staff.
For the above-mentioned purpose, the magnetic force pump configuration of cooling device provided by the utility model, it is located at a cooling device
In an interior cooling loop module, the cooling loop module has an evaporator, and the evaporator connects a heater, described
Heater one storage bin of connection, one magnetic drive pump of the storage bin connection, one pressure gauge of the magnetic drive pump connection, and the pressure gauge
Flow meters are connected, wherein, the magnetic drive pump, include a drive motor, its side has a drive shaft, and the driving turns
Axis connection has an outer drive magnet, and the outer drive magnet is in a beam barrel, and the recessed storage tank of the outer drive magnet,
The storage tank is provided with a cage, and the outer drive magnet is mutually separated with a spacing with the cage, also, the cage
Inside there is an accommodation space, pivot structure in one is provided with the accommodation space, the interior pivot structure has a rotating shaft, institute
The one end for stating rotating shaft is provided with drive magnet in one, and the other end connects an impeller, and the impeller, and institute are provided with a pump case component
State and be provided with an at least suction inlet and an at least outlet on the outside of pump case component.
It is preferred that wherein described pump case component has an impeller cover and a housing, the housing side is equipped with a perforation,
And opposite side has an opening, and the impeller cover covers the opening.
It is preferred that wherein described impeller has an axis hole, a bushing is provided with the axis hole.
It is preferred that the side that wherein described beam barrel corresponds to the pump case component is further provided with a fixed mount, the fixed mount
Connect the cage.
It is preferred that wherein described outer drive magnet has a connecting portion and a drive division, the connecting portion connects the drive
Turn axle, and the drive division is provided with the storage tank.
It is preferred that wherein described outer drive magnet is outer-rotor structure.
It is preferred that wherein described interior drive magnet is inner rotor core.
It is preferred that wherein when the drive motor drives the outer drive magnet rotation, the outer drive magnet application
The mode of magnetic force drives the interior drive magnet rotation, so as to drive the interior pivot structure and the impeller to rotate, and pushes
A liquid in the pump case component.
It is preferred that wherein described liquid is coolant.
The magnetic force pump configuration of cooling device provided by the utility model, when the cooling loop module is in operating state
When, because the cage is in closed setting, therefore when the liquid flowing in the pump case component may be limited to the isolation
In cover, without leaking to the outer drive magnet.With this, the rotating shaft in the magnetic drive pump inside configuration impeller need not extend
It to the drive motor of rear end, and can be completely sealed in a cage, therefore traditional axle envelope mechanism need not be used by
The cage is extended in rotating shaft, can effectively prevent leaked liquid on the whole；Importantly, when using semi-conductor industry
In integrated circuit procedure for producing, can prevent coolant reveal and with aerial hydrone (H2O) reaction generates hydrofluoric acid (HF)
Problem, and exempt and causing because coolant leaks in production process, institute's injury to caused by environment, product and staff.
Brief description of the drawings
Fig. 1 is the stereogram of the preferred embodiment of the utility model one.
Fig. 2 is the loop structure schematic diagram of the preferred embodiment of the utility model one.
Fig. 3 is the exploded perspective view of the preferred embodiment of the utility model one.
Fig. 4 is the exploded perspective view of the preferred embodiment of the utility model one.
Fig. 5 is the partial sectional view of the preferred embodiment of the utility model one.
Fig. 6 is the use state diagram of the preferred embodiment of the utility model one.
Description of reference numerals：
100- cooling devices；10- cools down loop module；11- evaporators；12- heaters；13- storage bins；14- magnetic drive pumps；
141- drive motors；142- drive shafts；The outer drive magnets of 143-；1431- connecting portions；1432- drive divisions；1433- storage tanks；
144- beam barrels；145- cages；1451- accommodation spaces；Rotating shaft knot in 146-；1461- rotating shafts；Drive magnet in 1462-；147-
Impeller；1471- axis holes；1472- bushings；148- pump case components；1481- suction inlets；1482- outlets；1483- impeller covers；
1484- housings；1485- perforates；1486- is open；149- fixed mounts；15- pressure gauges；16- flowmeters；The cold coal loop modules of 20-；
200- production equipments；A- coolants.
Embodiment
Fig. 1 and Fig. 2 is referred to, and is coordinated shown in Fig. 3, Fig. 4 and Fig. 5, is the solid of the preferred embodiment of the utility model one
Figure, loop structure schematic diagram, exploded perspective view and sectional view, it discloses the magnetic force pump configuration for having a kind of cooling device, and it is located at
In a cooling loop module 10 in one cooling device 100, the cooling loop module 10 has an evaporator 11, the evaporation
Device 11 connects a heater 12, and the heater 12 connects a storage bin 13, and the storage bin 13 connects a magnetic drive pump 14, described
Magnetic drive pump 14 connects a pressure gauge 15, and the pressure gauge 15 connects flow meters 16.
Also, the cooling loop module 10 conveys coolant A after flowmeter 16 using magnetic drive pump 14, the cooling follows
The connection of ring moulds block 10 one is intended to temperature controlled production equipment 200, and then coolant A backflows after cooling are directly entered storage
Deposit case 13；In addition, the cooling loop module 10 forms a coolant circulation loop with the production equipment 200.
Wherein, the magnetic drive pump 14 includes a drive motor 141, and its side has a drive shaft 142, the driving
Rotating shaft 142 is connected with an outer drive magnet 143, and the outer drive magnet 143 is in a beam barrel 144, and the outer driving magnetic
The recessed storage tank 1433 of iron 143, the storage tank 1433 are provided with a cage 145, and the outer drive magnet 143 with it is described
The phase of cage 145 is separated with a spacing, also, having an accommodation space 1451 in the cage 145, in the accommodation space 1451
Pivot structure 146 in one are provided with, the interior pivot structure 146 has a rotating shaft 1461, and one end of the rotating shaft 1461 is provided with
Drive magnet 1462 in one, and the other end connects an impeller 147, and the impeller 147 is provided with a pump case component 148, and it is described
The outside of pump case component 148 is provided with an at least suction inlet 1481 and an at least outlet 1482.
Please for quota refering to shown in Fig. 4 and Fig. 5, pump case component 148 has an impeller cover 1483 and a housing 1484, described again
The side of housing 1484 is equipped with a perforation 1485, and opposite side has an opening 1486, and the impeller cover 1483 cover it is described
Opening 1486；In addition, the impeller 147 has an axis hole 1471, a bushing 1472 is provided with the axis hole 1471.
Also, the side that the beam barrel 144 corresponds to the pump case component 148 is further provided with a fixed mount 149, the fixed mount
The 149 connection cages 145.
In the present embodiment, referring again to shown in Fig. 4, there is the outer drive magnet 143 connecting portion 1431 and one to drive
Dynamic portion 1432, the connecting portion 1431 connects the drive shaft 142, and the drive division 1432 is provided with the storage tank
1433.In addition, can be learnt by described above and diagram of arranging in pairs or groups, it is outer-rotor structure that can learn the outer drive magnet 143, and institute
It is inner rotor core to state interior drive magnet 1462.
In addition, the cooling device 100 has more a cold coal loop module 20, it connects the cooling loop module 10,
A cold coal in the cooling loop module 10 is with the coolant in progress heat exchange in the evaporator 11；In the present embodiment
In, the cold coal loop module 20 has a compressor (not shown), a condenser (not shown) and an expansion valve (not shown),
And a cold coal circulation loop is formed in the cold coal loop module 20, it is formed and implementation principle is prior art, is refused in this
Repeat.
For further appreciating that the utility model construction feature, application technology means and desired the effect of reaching, hereby will
The utility model occupation mode is described, it is believed that when that can have therefrom to the utility model deeper into and specifically understand, such as
It is lower described：
Referring to Fig. 2, and coordinate shown in Fig. 4, Fig. 5 and Fig. 6, show for the loop structure of the preferred embodiment of the utility model one
Intention, exploded perspective view, partial sectional view and use state diagram.When the cooling loop module 10 is in operating state,
When the drive motor 141 drives the rotation of outer drive magnet 143, the mode band of the outer application of drive magnet 143 magnetic force
Move the interior drive magnet 1462 to rotate, so as to drive the interior pivot structure 146 and the impeller 147 to rotate, and push institute
The liquid in pump case component 148 is stated, the liquid is coolant A.Further, since the cage 145 is in closed setting, and
The outer drive magnet 143 is separated with a spacing with the phase of cage 145, therefore when the liquid flow in the pump case component 148
It is dynamic to may be limited in the cage 145, without leaking to the outer drive magnet 143.More in detail and it, the magnetic drive pump
The rotating shaft 1461 of 14 inside configurations need not be connected to the drive shaft 142 of the drive motor 141 of rear end, and can be fully sealed
In in the cage 145, therefore, there is no need to that interior rotating shaft is extended into the cage 145 using traditional axle envelope mechanism,
In other words, this case can effectively prevent leaked liquid on the whole.
Importantly, when the cooling device 100 application semi-conductor industry integrated circuit procedure for producing in, can prevent cold
But liquid A leakage and with aerial hydrone (H2O) the problem of reaction generation hydrofluoric acid (HF), and exempt and causing in production process
Because coolant A is leaked, institute's injury to caused by environment, product and staff.
It is noted that furthermore the interior pivot structure 146 of this case, the pump case component 148 are dismountable, it is easy to more
Change and repair, therefore when the impeller 147, the rotating shaft 1461, the interior drive magnet 1462 damage, it is only necessary in will be described
Pivot structure 146 or the pump case component 148 are pulled down and changed, thus can be greatly reduced overall maintenance cost with
And maintenance time.
Hereby, then by feature of the present utility model and its attainable expected effect it is presented below：
The magnetic force pump configuration of cooling device of the present utility model, when the cooling loop module 10 is in operating state, by
It is in closed setting in the cage 145, therefore the liquid flowing in the pump case component 148 may be limited to the isolation
In cover 145, without leaking to the outer drive magnet 143.With this, the utility model has following technical effect and implements work(
Effect：
First, the rotating shaft 1461 of the inside configuration of magnetic drive pump 14 of the present utility model needs not extend to the drive motor of rear end
141, and can be completely sealed in a cage 145, therefore need not be extended interior rotating shaft using traditional axle envelope mechanism
The cage 145, it can effectively prevent coolant A from leaking on the whole.
Ground second, the utility model can be exempted caused by the direct contact of the bearing and rotor of above-mentioned existing vertical pump
Phenomenon is consumed, and then lifts service life.
Third, when in the integrated circuit procedure for producing of the utility model application semi-conductor industry, and it is good it is manufactured product
Rate is stable, and can prevent coolant A from revealing and with aerial hydrone (H2O) the problem of reaction generation hydrofluoric acid (HF), and
Release is caused because coolant A is leaked in production process, institute's injury to caused by environment, product and staff.
In summary, the utility model has its splendid progress practicality in fact in like product, while domestic and international all over looking into
Also find no identical construction on the technical data of this class formation, in document to exist formerly, therefore the utility model is real
Possesses new patent important document, whence is filed an application in accordance with the law.
Only, as described above, is only preferably possible embodiments of the present utility model, therefore apply the utility model such as
Equivalent structure change carried out by specification and claim, ought to be included in the scope of the claims of the present utility model.
Claims (9)
1. a kind of magnetic force pump configuration of cooling device, its one in a cooling device is cooled down in loop module, the cooling
Loop module has an evaporator, and the evaporator connects a heater, and the heater connects a storage bin, the storage bin
A magnetic drive pump is connected, the magnetic drive pump connects a pressure gauge, and the pressure gauge connects flow meters, it is characterised in that
The magnetic drive pump, include a drive motor, its side has a drive shaft, and the drive shaft is connected with outside one and driven
Moving magnet, the outer drive magnet is in a beam barrel, and the recessed storage tank of the outer drive magnet, the storage tank are provided with
One cage, and the outer drive magnet is mutually separated with a spacing with the cage, also, having an accommodating sky in the cage
Between, pivot structure in one is provided with the accommodation space, the interior pivot structure has a rotating shaft, and one end of the rotating shaft is set
There is drive magnet in one, and the other end connects an impeller, and the impeller is provided with a pump case component, and on the outside of the pump case component
Provided with an at least suction inlet and an at least outlet；
Wherein, when the cooling loop module is in operating state, because the cage is in closed setting, therefore the pump is worked as
Liquid flowing in shell component may be limited in the cage, without leaking to the outer drive magnet.
2. the magnetic force pump configuration of cooling device according to claim 1, it is characterised in that the pump case component has a leaf
Wheel cap and a housing, the housing side is equipped with a perforation, and opposite side has an opening, and described in impeller cover capping
Opening.
3. the magnetic force pump configuration of cooling device according to claim 1, it is characterised in that the impeller has an axis hole,
A bushing is provided with the axis hole.
4. the magnetic force pump configuration of cooling device according to claim 1, it is characterised in that the beam barrel corresponds to the pump
The side of shell component is additionally provided with a fixed mount, and the fixed mount connects the cage.
5. the magnetic force pump configuration of cooling device according to claim 1, it is characterised in that the outer drive magnet has one
Connecting portion and a drive division, the connecting portion connects the drive shaft, and the drive division is provided with the storage tank.
6. the magnetic force pump configuration of cooling device according to claim 1, it is characterised in that the outer drive magnet turns to be outer
Minor structure.
7. the magnetic force pump configuration of cooling device according to claim 1, it is characterised in that the interior drive magnet turns to be interior
Minor structure.
8. the magnetic force pump configuration of cooling device according to claim 1, it is characterised in that when the drive motor drives institute
When stating outer drive magnet rotation, the mode of the outer drive magnet application magnetic force drives the interior drive magnet rotation, so as to band
The interior pivot structure and impeller rotation are moved, and pushes the liquid in the pump case component.
9. the magnetic force pump configuration of cooling device according to claim 8, it is characterised in that the liquid is coolant.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720602686.0U CN206903885U (en) | 2017-05-26 | 2017-05-26 | The magnetic force pump configuration of cooling device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201720602686.0U CN206903885U (en) | 2017-05-26 | 2017-05-26 | The magnetic force pump configuration of cooling device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN206903885U true CN206903885U (en) | 2018-01-19 |
Family
ID=61285885
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201720602686.0U Expired - Fee Related CN206903885U (en) | 2017-05-26 | 2017-05-26 | The magnetic force pump configuration of cooling device |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN206903885U (en) |
-
2017
- 2017-05-26 CN CN201720602686.0U patent/CN206903885U/en not_active Expired - Fee Related
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| TR01 | Transfer of patent right | ||
| TR01 | Transfer of patent right |
Effective date of registration: 20200807 Address after: Room 116, area D, 1st floor, building 3, No.8 Xiushan Road, Chengqiao Town, Chongming District, Shanghai Patentee after: Shanghai Yuchang Electronic Technology Co.,Ltd. Address before: Hsinchu County, Taiwan, China Patentee before: GEMI TEK Corp. |
|
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180119 |