TWM534436U - Frame, multi-piece under substrate cover frame and processing chamber - Google Patents
Frame, multi-piece under substrate cover frame and processing chamberInfo
- Publication number
- TWM534436U TWM534436U TW104217922U TW104217922U TWM534436U TW M534436 U TWM534436 U TW M534436U TW 104217922 U TW104217922 U TW 104217922U TW 104217922 U TW104217922 U TW 104217922U TW M534436 U TWM534436 U TW M534436U
- Authority
- TW
- Taiwan
- Prior art keywords
- frame
- processing chamber
- substrate cover
- piece under
- under substrate
- Prior art date
Links
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Plasma & Fusion (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Organic Chemistry (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Materials Engineering (AREA)
- General Chemical & Material Sciences (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
A multi-piece under substrate cover frame for a processing chamber is disclosed herein. In one embodiment a frame has two short bodies and two long bodies configured to interface with the short frames to form a rectangular shape, wherein each of the two long bodies comprises two or more segments, and at least one or the segments has a relief forming at least a portion of a lift pin hole.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201562188568P | 2015-07-03 | 2015-07-03 |
Publications (1)
Publication Number | Publication Date |
---|---|
TWM534436U true TWM534436U (en) | 2016-12-21 |
Family
ID=56855925
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW104217922U TWM534436U (en) | 2015-07-03 | 2015-11-09 | Frame, multi-piece under substrate cover frame and processing chamber |
Country Status (4)
Country | Link |
---|---|
JP (1) | JP3206236U (en) |
KR (1) | KR200492981Y1 (en) |
CN (1) | CN205710904U (en) |
TW (1) | TWM534436U (en) |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7501161B2 (en) | 2004-06-01 | 2009-03-10 | Applied Materials, Inc. | Methods and apparatus for reducing arcing during plasma processing |
US20070283884A1 (en) * | 2006-05-30 | 2007-12-13 | Applied Materials, Inc. | Ring assembly for substrate processing chamber |
KR101504085B1 (en) * | 2006-12-19 | 2015-03-19 | 어플라이드 머티어리얼스, 인코포레이티드 | non-contact process kit |
WO2011094230A2 (en) * | 2010-01-27 | 2011-08-04 | Applied Materials, Inc. | Life enhancement of ring assembly in semiconductor manufacturing chambers |
-
2015
- 2015-11-09 TW TW104217922U patent/TWM534436U/en unknown
- 2015-12-03 CN CN201520995613.3U patent/CN205710904U/en active Active
- 2015-12-30 KR KR2020150008627U patent/KR200492981Y1/en active IP Right Grant
-
2016
- 2016-06-24 JP JP2016003007U patent/JP3206236U/en active Active
Also Published As
Publication number | Publication date |
---|---|
KR200492981Y1 (en) | 2021-01-11 |
JP3206236U (en) | 2016-09-08 |
CN205710904U (en) | 2016-11-23 |
KR20170000175U (en) | 2017-01-11 |
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