TWM534436U - Frame, multi-piece under substrate cover frame and processing chamber - Google Patents

Frame, multi-piece under substrate cover frame and processing chamber

Info

Publication number
TWM534436U
TWM534436U TW104217922U TW104217922U TWM534436U TW M534436 U TWM534436 U TW M534436U TW 104217922 U TW104217922 U TW 104217922U TW 104217922 U TW104217922 U TW 104217922U TW M534436 U TWM534436 U TW M534436U
Authority
TW
Taiwan
Prior art keywords
frame
processing chamber
substrate cover
piece under
under substrate
Prior art date
Application number
TW104217922U
Other languages
Chinese (zh)
Inventor
Dong-Suh Lee
Robin L Tiner
John M White
William Norman Sterling
Soo-Young Choi
Lai Zhao
da-peng Wang
Gaku Furuta
Original Assignee
Applied Materials Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Applied Materials Inc filed Critical Applied Materials Inc
Publication of TWM534436U publication Critical patent/TWM534436U/en

Links

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Materials Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

A multi-piece under substrate cover frame for a processing chamber is disclosed herein. In one embodiment a frame has two short bodies and two long bodies configured to interface with the short frames to form a rectangular shape, wherein each of the two long bodies comprises two or more segments, and at least one or the segments has a relief forming at least a portion of a lift pin hole.
TW104217922U 2015-07-03 2015-11-09 Frame, multi-piece under substrate cover frame and processing chamber TWM534436U (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US201562188568P 2015-07-03 2015-07-03

Publications (1)

Publication Number Publication Date
TWM534436U true TWM534436U (en) 2016-12-21

Family

ID=56855925

Family Applications (1)

Application Number Title Priority Date Filing Date
TW104217922U TWM534436U (en) 2015-07-03 2015-11-09 Frame, multi-piece under substrate cover frame and processing chamber

Country Status (4)

Country Link
JP (1) JP3206236U (en)
KR (1) KR200492981Y1 (en)
CN (1) CN205710904U (en)
TW (1) TWM534436U (en)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7501161B2 (en) 2004-06-01 2009-03-10 Applied Materials, Inc. Methods and apparatus for reducing arcing during plasma processing
US20070283884A1 (en) * 2006-05-30 2007-12-13 Applied Materials, Inc. Ring assembly for substrate processing chamber
KR101504085B1 (en) * 2006-12-19 2015-03-19 어플라이드 머티어리얼스, 인코포레이티드 non-contact process kit
WO2011094230A2 (en) * 2010-01-27 2011-08-04 Applied Materials, Inc. Life enhancement of ring assembly in semiconductor manufacturing chambers

Also Published As

Publication number Publication date
KR200492981Y1 (en) 2021-01-11
JP3206236U (en) 2016-09-08
CN205710904U (en) 2016-11-23
KR20170000175U (en) 2017-01-11

Similar Documents

Publication Publication Date Title
CA164875S (en) Sofa
CA152446S (en) Jar
CA166474S (en) Bottle
CA167019S (en) Thermometer
CA158256S (en) Wheel
CA167903S (en) Basket for fryer
CA165885S (en) Robot
CA158887S (en) Brassiere
CA159367S (en) Fryer
AU365587S (en) Kettle
CA159438S (en) Bottle
CA180549S (en) Tile spacer
EP3501035A4 (en) Process enhancement using double sided epitaxial on substrate
PH12015502832B1 (en) Processes for producing dark red and dark brown natural cocoa
CA158346S (en) Diamond
BR112018005863A2 (en) brachyria endophytes and related methods
CA166513S (en) Motorcycle
CA166571S (en) Electrical breast pump
CA155961S (en) Travelator
TWM534436U (en) Frame, multi-piece under substrate cover frame and processing chamber
TW201613033A (en) Memory structure and manufacturing method therefor
BR112018067862A2 (en) method to improve the efficiency of yeast ethanol production.
GT201600050S (en) CUBETA UN GALON, WITH MULTIPLE DESIGN AND COLOR
CA162956S (en) Lifting device
CA175878S (en) Social robot