TWM519317U - Six-shaft adjustment device - Google Patents

Description

Six-axis adjustment device

The present invention relates to a six-axis adjustment device, and more particularly to a six-axis adjustment device suitable for use in a positioning detection device in the field of semiconductor testing.

The general-purpose displacement adjustment device is commonly used in various technical fields, such as the fixture of the workpiece or tool in the machine tool, or the fine adjustment mechanism of the detection device in the detection device, and even the common items in daily life are also one-dimensional, two-dimensional, or three-dimensional. Wait for the adjustment mechanism. Moreover, the displacement adjustment device or mechanism is commonly used for positioning, that is, its main purpose is to provide a target object (such as a probe, a test object, a workpiece, a tool, or the like) attached thereto in one or more specific directions. Displacement, positioning.

However, common displacement adjustment devices are mostly two-dimensional or three-dimensional adjustments, that is, providing displacement adjustment of the plane X-axis, Y-axis direction, or X-axis, Y-axis, and Z-axis of the three-dimensional space. In addition, please refer to the "four-axis displacement adjustment device" of China Patent Bulletin No. M472945. The device disclosed therein can provide the adjustment of the horizontal rotation angle in addition to the linear displacement of the three axes for the positioning of the three-dimensional space. Therefore, it is called four-axis displacement adjustment. However, the patent on the opening can only provide four-axis adjustment, and it cannot provide more axial adjustment functions.

Therefore, a six-axis adjustment device capable of providing a three-dimensional position adjustment function in addition to the displacement on the X-axis, the Y-axis, and the Z-axis, and rotating or flipping along the X-axis, the Y-axis, and the Z-axis can be known. It is actually the expectation of the industry.

The main purpose of this creation is to provide a six-axis adjustment device that provides three-axis space adjustment functions on the X-axis, Y-axis, and Z-axis, and can be along the X-axis, Y-axis, and Z-axis. Adjustment of the angle of rotation or flipping.

In order to achieve the above object, the present invention provides a six-axis adjusting device, comprising: a three-axis displacement adjusting mechanism and a three-axis angular adjusting mechanism, wherein the three-axis angular adjusting mechanism is assembled on the three-axis displacement adjusting mechanism; The three-axis angle adjusting mechanism mainly comprises a U-shaped bracket, a carrying platform and a pivoting plate. The U-shaped bracket includes a bottom rod and two side rods, wherein the two side rods are respectively connected to the two ends of the bottom rod, and the bottom rod is pivotally connected to the three-axis displacement adjusting mechanism, and the U-shaped bracket is relatively The three-axis displacement adjusting mechanism rotates along a second axial direction; the corresponding two side end faces respectively include a central pivot shaft, and the central pivot shafts are respectively pivotally connected to the two side rods of the U-shaped bracket, and The carrying platform is rotatable relative to the U-shaped bracket in a first axial direction, and the carrying platform includes a first guiding member; the pivoting plate includes a second guiding member, and the second guiding member is coupled to the bearing The first guiding member of the table, and the pivoting plate is rotatable relative to the loading table in a third axial direction by the first guiding member and the second guiding member.

Accordingly, the six-axis adjustment device of the present invention can provide the position on the X-axis, the Y-axis, and the Z-axis of the three-dimensional space by the three-axis displacement adjustment mechanism. The adjustment function is provided, and the adjustment function of the angle of rotation or inversion of the three axes along the X-axis, the Y-axis, and the Z-axis is provided by the three-axis angle adjustment mechanism; wherein the U-shaped bracket is adjustable relative to the three-axis displacement mechanism Rotating along a second axial direction, and the carrying platform is rotatable relative to the U-shaped bracket in a first axial direction, and the pivoting plate is movable relative to the bearing by the first guiding member and the second guiding member The table rotates along a third axis.

Preferably, the present stage can include a central through hole, the first guiding member can include a plurality of guiding grooves, and the plurality of guiding grooves are respectively equidistantly arranged along the outer circumference of the central through hole; The lead includes a plurality of guide pins that are equidistantly disposed on the lower surface of the pivot plate; and the plurality of guide pins are respectively coupled into the plurality of guide grooves and are relatively slidable. Accordingly, the present invention can be accommodated in the guide groove through the guide pin, and the guide pin can be guided by the guide groove to slide into the guide groove, thereby guiding the pivot plate relative to the support table along the third axial direction. Rotate.

The second guiding member of the present invention may further include a fixing ring and a plurality of bumps, the plurality of bumps may be disposed on the fixing ring, and the plurality of guiding pins are respectively connected to the plurality of bumps and partially along the fixing ring It is in a ring configuration. In addition, the fixing ring may be disposed under the loading platform and connected to the pivoting plate, and the lower surface of the pivoting plate may include a plurality of fixing grooves, and the plurality of protrusions may be radially protruded toward the central through hole of the carrying platform and respectively fastened A plurality of fixing slots of the pivoting plate.

Furthermore, the present invention may further include a first axial rotation adjustment rod, a second axial rotation adjustment rod, and a third axial rotation adjustment rod; wherein the first axial rotation adjustment rod may be assembled on the U The bracket is placed between the bracket and the carrier; and the second axial rotation adjustment lever can be assembled on the three-axis displacement adjustment machine The structure is disposed between the U-shaped bracket; and the third axial rotation adjusting rod is disposed between the carrying platform and the pivoting plate. Accordingly, the first axial rotation adjustment rod, the second axial rotation adjustment rod, and the third axial rotation adjustment rod can be used to finely adjust the first axial direction, the second axial direction, and the third axial direction, respectively. The angle of rotation.

In addition, the U-shaped bracket of the present invention may further comprise a U-shaped stand set on the bottom bar, and the carrying platform may further comprise a long bump and an L-shaped fixing block, and the pivoting plate may further Includes a short bump. Wherein, the long protrusion can protrude from one side end of the carrying platform and is located in the opening of the U-shaped vertical frame, and the first axial rotation adjusting rod can be assembled on the U-shaped vertical frame, and pushes the long convex block to make the carrying platform Rotating in a first axial direction relative to the U-shaped bracket; in addition, the short protrusions may protrude from one side end of the pivoting plate, and the L-shaped fixing blocks may be assembled on one side of the carrying platform, and the third axial direction The rotation adjusting rod is assembled on the L-shaped fixing block, and can push against the short protrusion so that the pivoting plate can rotate in the third axial direction with respect to the loading platform.

Moreover, the present invention may further include a first axial positioning plate and a first axial positioning pin, one end of the first axial positioning plate may be fixed to the carrying platform, and the other end of the first axial positioning plate is opened. A vertical arcuate slot, and the first axial positioning pin passes through the vertical arcuate slot and is secured to the U-shaped bracket. According to this, when the carrying platform rotates in a first axial direction with respect to the U-shaped bracket, the first axial positioning plate will oscillate accordingly, and the vertical curved long groove provides a margin for adjusting the rotation angle; When the predetermined angle is reached, the first axial positioning pin is used to lock, so that the carrier is fixed at the predetermined angle.

Moreover, the present invention may further include a third axial positioning plate and a third axial positioning pin, one end of the third axial positioning plate is fixed to the pivot plate, and the other end of the third axial positioning pin is opened. A horizontal arcuate slot and the third axial locating pin passes through the horizontal arcuate slot and is secured to the carrier. Accordingly, similarly, when the pivoting plate rotates relative to the loading table in the third axial direction, the third axial positioning plate will rotate accordingly, and the horizontal curved long groove provides a margin for adjusting the rotation angle; When the predetermined angle is reached, the third axial positioning pin is used to lock, so that the pivoting plate is fixed at the predetermined angle.

Preferably, the U-shaped bracket of the present invention further includes a rocking handle that can be coupled to the bottom rod of the U-shaped bracket, and the three-axis displacement adjusting mechanism can include a shaft hole seat, and the rocking handle is pivotally connected to the shaft hole. seat. Accordingly, the present invention can quickly flip the U-shaped bracket by manually operating the crank handle by the user, even if the U-shaped bracket quickly flips in a second axial direction.

In addition, the three-axis displacement adjustment mechanism of the present invention may include a first axial displacement module, a second axial displacement module, and a third axial displacement module; the first axial displacement module may include a a bottom plate, a first axial sliding block, and a first axial displacement adjusting rod, wherein the first axial sliding block is slidably coupled to the bottom plate, and the first axial displacement adjusting rod is assembled on the bottom plate and the first Between the axial slides, and the first axial displacement adjustment rod is used to adjust the slip of the first axial slide in the first axial direction. In addition, the second axial displacement module may include a second axial sliding block and a second axial displacement adjusting rod, and the second axial sliding block is slidably coupled to the first axial sliding block, and The second axial displacement adjustment lever is disposed between the first axial slider and the second axial slider, and the second axial displacement adjustment lever is adjustable to adjust The two axial sliders slide in the second axial direction. Moreover, the third axial displacement module can include a support base, a third axial slide block, and a third axial displacement adjustment rod, and the support base is assembled on the second axial slide block, The three-axis sliding block can be coupled to the support seat in an upright sliding manner, the third axial displacement adjusting rod is disposed between the support seat and the third axial sliding block, and the third axial displacement adjusting rod can be adjusted The third axial slider slides in the third axial direction Z. Accordingly, the present invention provides a two-axis displacement on a horizontal plane through the first axial displacement module and the second axial displacement module, and provides a third dimension in three dimensions through the third axial displacement module. The lifting displacement of the shaft.

Furthermore, the first axial displacement module, the second axial displacement module, and the third axial displacement module of the present invention may respectively include a guide rail and a guiding slot, and the first axial displacement module, The second axial displacement module and the third axial displacement module are respectively slidable by coupling of the guide rails and the guide grooves. In other words, the first axial displacement module, the second axial displacement module, and the third axial displacement module of the present invention can guide the displacement of the three axial directions by fitting the guide rails to the guide grooves, respectively.

2‧‧‧Three-axis displacement adjustment mechanism

20‧‧‧Axis hole seat

21‧‧‧First Axial Displacement Module

211‧‧‧floor

212‧‧‧First axial slider

213‧‧‧First axial displacement adjustment rod

214,223,234‧‧‧rails

215,224,235‧‧

216‧‧‧First screw block

217‧‧‧First stop block

22‧‧‧Second axial displacement module

221‧‧‧Second axial slider

222‧‧‧Second axial displacement adjustment lever

225‧‧‧Second screw block

226‧‧‧second stop block

23‧‧‧ Third axial displacement module

231‧‧‧ support

232‧‧‧third axial slider

233‧‧‧ Third axial displacement adjustment rod

236‧‧‧ Third screw block

237‧‧ Third stop block

3‧‧‧Three-axis angle adjustment mechanism

31‧‧‧U-bracket

311‧‧‧ bottom pole

312‧‧‧ sidebar

32‧‧‧Loading station

320‧‧‧Central through hole

321‧‧‧Central pivot

322‧‧‧First guide

323‧‧ ‧ guide slot

324‧‧‧ long bumps

325‧‧‧L type fixed block

336‧‧‧Short bumps

33‧‧‧ pivot board

331‧‧‧Second guide

332‧‧ ‧ sales guide

333‧‧‧Fixed ring

334‧‧‧Bumps

335‧‧‧fixed slot

34‧‧‧U-shaped stand

341‧‧‧ openings

41‧‧‧Second axial rotation adjustment lever

42‧‧‧First axial rotation adjustment lever

43‧‧‧ Third axial rotation adjustment lever

51‧‧‧First axial positioning plate

511‧‧‧Vertical curved long groove

52‧‧‧First axial positioning pin

53‧‧‧ Third axial positioning plate

531‧‧‧ horizontal curved long groove

54‧‧‧ Third axial positioning pin

6‧‧‧Handle

Figure 1A is a perspective view of a preferred embodiment of the present invention.

Figure 1B is a perspective view of another orientation of a preferred embodiment of the present invention.

2 is an exploded view of an exploded view of the first axial displacement module and the second axial displacement module of the preferred embodiment of the present invention.

3 is an exploded view of a third axial displacement module of a preferred embodiment of the present invention.

4 is an exploded view of a three-axis angle adjustment mechanism of a preferred embodiment of the present invention.

Figure 5 is a perspective view of a three-axis angle adjustment mechanism of a preferred embodiment of the present invention.

Before the present six-axis adjustment device is described in detail in the present embodiment, it is to be noted that in the following description, similar elements will be denoted by the same reference numerals.

1A and FIG. 1B, FIG. 1A is a perspective view of a preferred embodiment of the six-axis adjustment device of the present invention, and FIG. 1B is a perspective view of another preferred embodiment of the six-axis adjustment device of the present invention. As shown in the figure, the six-axis adjustment device of the embodiment mainly includes a three-axis displacement adjustment mechanism 2 and a three-axis angle adjustment mechanism 3, and the three-axis angle adjustment mechanism 3 is assembled on the three-axis displacement adjustment mechanism. 2 on. The three-axis displacement adjusting mechanism 2 provides a displacement adjustment function on the X-axis, the Y-axis, and the Z-axis of the three-dimensional space, and the three-axis angle adjustment mechanism 3 provides three-axis rotation along the X-axis, the Y-axis, and the Z-axis. Or the adjustment of the angles θ x, θ y, θ z of the flip.

Please refer to FIG. 1A , FIG. 1B , FIG. 2 , and FIG. 3 . FIG. 2 is an exploded view of an exploded view of the first axial displacement module and the second axial displacement module according to a preferred embodiment of the present invention. 3 is an exploded view of a third axial displacement module of a preferred embodiment. The configuration of the three-axis displacement adjusting mechanism 2 will be described below. As shown in the figure, the three-axis displacement adjusting mechanism 2 mainly includes a first axial displacement module 21, a second axial displacement module 22, and a third axial displacement module 23.

The first axial displacement module 21 includes a bottom plate 211, a first axial sliding block 212, and a first axial displacement adjusting rod 213, and the upper surface of the bottom plate 211 is provided with a guide rail 214, the first shaft A guide groove 215 is disposed on the lower surface of the slider 212, and the first axial slider 212 is slidable relative to the bottom plate 211 in the first axial direction X by the sliding pair of the guide rail 214 and the guide groove 215. In addition, a first screwing block 216 is protruded from a side surface of the bottom plate 211, and a first stopping block 217 is protruded from one side of the first axial sliding block 212, and the first axial displacement adjusting rod 213 is parallel to The guide rail 214 of the bottom plate 211 is screwed to the first screw block 216 and pushed against the first stop block 217. Accordingly, when the first axial displacement adjustment lever 213 is rotated, the first axial slider 212 can be caused to slide relative to the bottom plate 211 in the first axial direction X. Although not shown in the drawings, in practice, a reset element, such as a spring, may be disposed between the bottom plate 211 and the first axial slider 212 to provide a first axial slider 212 to be reset in the first axial direction X. Help.

As shown in the figure, the second axial displacement module 22 includes a second axial sliding block 221 and a second axial displacement adjusting rod 222, and the second axial sliding block 221 is guided by the guide rail 223 The coupling of the groove 224 allows the second axial slide 221 to slide relative to the first axial slide 212 in the second axial direction Y. Furthermore, a second screwing block 225 is protruded from the other side of the second axial sliding block 221, and a second stopping block 226 is protruded from one side of the second axial sliding block 221, and the second axial displacement is performed. The adjusting rod 222 is screwed to the second screwing block 225 and pushed against the second stopping block 226 in a manner parallel to the guide rail 223 of the first axial sliding block 212. According to this, when the second axial displacement adjusting rod 222 is rotated, the second axial sliding block 221 can be urged relative to the first An axial slider 212 slides in the second axial direction Y. Although not shown in the drawings, in practice, a reset element, such as a spring, may be disposed between the first axial slider 212 and the second axial slider 221 to provide a second axial slider 221 in the second The assist of resetting in the axial direction Y.

Furthermore, the third axial displacement module 23 includes a support base 231, a third axial slide 232, and a third axial displacement adjustment rod 233. The support base 231 is fixed to the second axial slide 221 The third axial slider 232 includes a guiding slot 235. The supporting base 23 includes a guiding rail 234. The third axial sliding block 232 is slidably assembled by the sliding pair of the guiding rail 234 and the guiding slot 235. On the support base 23, the third axial slide 232 is slidably coupled to the support base 231. Further, a third screwing block 236 protrudes from a vertical side of the third axial sliding block 232, and the supporting seat 231 also protrudes from the corresponding vertical side with a third stopping block 237, and the third shaft The displacement adjusting lever 233 is screwed to the third screw block 236 in a manner parallel to the guide groove 235 of the third axial slider 232 and pushed against the third stopper 237. Accordingly, when the third axial displacement adjustment lever 233 is rotated, the third axial slider 232 can be caused to slide relative to the support seat 231 in the third axial direction Z. Similarly, although not shown in the drawings, a reset element, such as a spring, may be disposed between the support base 231 and the third axial slide 232 to provide a third axial slide 232 to be reset in the third axial direction Z. Help.

4 and FIG. 5, FIG. 4 is an exploded view of a three-axis angle adjusting mechanism according to a preferred embodiment of the present invention, and FIG. 5 is a perspective view of a three-axis angle adjusting mechanism according to a preferred embodiment of the present invention. The configuration of the three-axis angle adjustment mechanism 3 will be described below. As shown in the figure, the third axial slider of the third axial displacement module 23 of the three-axis displacement adjustment mechanism 2 A shaft hole holder 20 is disposed on the 232. A rocker handle 6 is pivotally connected to the shaft hole holder 20. The end of the rocker handle 6 is connected to the bottom rod 311 of a U-shaped bracket 31.

Furthermore, the U-shaped bracket 31 includes a bottom rod 311 and two side rods 312. The two side rods 312 are respectively connected to the two ends of the bottom rod 311, and the bottom rod 311 is pivotally connected to the shaft hole base 20 through the rocking handle 6. The U-shaped bracket 31 is rotatable relative to the shaft hole seat 20 of the three-axis displacement adjusting mechanism 2 in the second axial direction Y, and the crank handle 6 is manually operated by the user. The U-shaped bracket 31 can be quickly flipped, even if the U-shaped bracket 31 is quickly flipped in the second axial direction Y. Further, a second axial rotation adjusting lever 41 is disposed on one side of the shaft housing 20, and one end thereof is abutted between the U-shaped brackets 31. Accordingly, when the rotation angle of the second axial direction Y is to be adjusted, the user only needs to adjust the second axial rotation adjustment lever 41, and the second axial rotation adjustment lever 41 is pushed against the U-shaped bracket 31 side. And make it rotate.

In addition, a loading platform 32 is further shown in FIG. 4, and the corresponding two side end faces each include a central pivot 321 pivotally connected to the two side bars 312 of the U-shaped bracket 31, respectively. Therefore, the carrier 32 is rotatable in the first axial direction X with respect to the U-shaped bracket 31. Moreover, a U-shaped vertical frame 34 is disposed on a side of the bottom rod 311 of the U-shaped bracket 31, and a long protrusion 324 is connected to one end of the loading base 32 adjacent to the bottom rod 311, wherein the long protrusion 324 is from the carrying platform 32. One side end protrudes and is located in the opening 341 of the U-shaped vertical frame 34, and a first axial rotation adjusting rod 42 is assembled on the U-shaped vertical frame 34 and pushed against the long convex block 324, so that the carrying platform 32 can be Rotating in the first axial direction X with respect to the U-shaped bracket 31. Accordingly, when the rotation angle of the first axial direction X is to be adjusted, the user only needs to adjust the first axial rotation adjustment lever 42 to be pushed against the side of the carrier 32 by the first axial rotation adjustment lever 42. Rotation.

In addition, FIG. 4 shows a pivoting plate 33 including a second guiding member 331. The carrying platform 32 includes a first guiding member 322 and a central through hole 320. The second guiding member 331 is coupled to the second guiding member 331. The first guiding member 322 of the carrying platform 32, the pivoting plate 33 is rotatable relative to the loading table 32 in a third axial direction Z by the first guiding member 322 and the second guiding member 331. In this embodiment, the first guiding member 322 includes two guiding grooves 323 which are respectively equidistantly arranged along the outer circumference of the central through hole 320; and the second guiding member 331 includes two guiding pins. 332, which is equidistantly disposed on the lower surface of the pivoting plate 33; and the two guiding pins 332 are respectively received and coupled into the two guiding grooves 323 and are slidable therein.

In addition, the second guiding member 331 further includes a fixing ring 333 and two protrusions 334, and the two protrusions 334 are disposed on the fixing ring 333, and one end of the two guiding pins 332 are respectively connected to the two protruding blocks. The 334 is partially annularly disposed along the fixing ring 333; and the fixing ring 333 is disposed below the carrying platform 32 and connected to the pivoting plate 33. The lower surface of the pivoting plate 33 includes two fixing grooves 335, and the two convex blocks 334 The central through holes 320 of the pivoting plate 33 are respectively protruded and are respectively fixed to the two fixing grooves 335 of the pivoting plate 33. Accordingly, when the pivoting plate 33 is rotated in the third axial direction Z with respect to the loading table 32, the guide pin 332 and the guide groove 323 provide a guiding effect, so that the pivoting plate 33 can be coaxial along the third axial direction Z. Rotating, and the guide groove 323 provides the range of motion of the rotation of the bump 334.

As shown in FIG. 4, the pivoting plate 33 is connected to a short bump 336 adjacent to one end of the bottom bar 311, and an L-shaped fixing block 325 is connected to the other end of the carrying block 32 corresponding to the long bump 324, wherein the short The protrusion 336 protrudes from one end of the pivoting plate 33, and the L-shaped fixed block 325 is provided with a first A three-axis rotational adjustment lever 43 is provided for pushing against the short projections 336 such that the pivoting plate 33 is rotatable relative to the carrier 32 in the third axial direction Z. Accordingly, when the rotation angle of the third axial direction Z is to be adjusted, the user only needs to adjust the third axial rotation adjustment lever 43 to push the pivot plate 33 side by the third axial rotation adjustment lever 43. Make it rotate.

In addition, the present embodiment also provides the functions of the first axial X and the third axial Z positioning. In detail, FIG. 4 shows a first axial positioning plate 51 and a first axial positioning pin 52, wherein one end of the first axial positioning plate 51 is fixed to the end of the side end surface of the carrying platform 32, and The other end of the axial positioning plate 51 defines a vertical arcuate slot 511. The first axial positioning pin 52 passes through the vertical arcuate slot 511 and is attached to the U-shaped bracket 34 of the U-shaped bracket 31. On the side. Accordingly, when the stage 32 is rotated in the first axial direction X with respect to the U-shaped bracket 31, the first axial positioning plate 51 will oscillate accordingly, and the vertical curved long groove 511 provides an advantage of the angle adjustment. Degree; therefore, when the predetermined angle is reached, the first axial positioning pin 52 is used to lock, so that the carrier 32 is fixed at the predetermined angle.

Similarly, a third axial positioning plate 53 and a third axial positioning pin 54 are shown in FIG. 4, and one end of the third axial positioning plate 53 is fixed to the end surface of the pivoting plate 33 adjacent to the bottom rod 311. The other end of the third axial positioning pin 54 defines a horizontal arcuate slot 531. The third axial positioning pin 54 passes through the horizontal arcuate slot 531 and is locked to the L-shaped fixing block of the carrying platform 32. On 325. Accordingly, similarly, when the pivoting plate 33 is rotated relative to the loading table 32 in the third axial direction Z, the third axial positioning plate 53 will rotate therewith, and the horizontal curved long groove 531 provides an angle adjustment. The margin; therefore, when the predetermined angle is reached, the third axial positioning pin 54 is used to lock, so that the pivoting plate 33 is fixed at the predetermined angle.

The above-described embodiments are merely examples for convenience of description, and the scope of the claims is intended to be limited to the above embodiments.

2‧‧‧Three-axis displacement adjustment mechanism

211‧‧‧floor

212‧‧‧First axial slider

213‧‧‧First axial displacement adjustment rod

221‧‧‧Second axial slider

222‧‧‧Second axial displacement adjustment lever

231‧‧‧ support

232‧‧‧third axial slider

233‧‧‧ Third axial displacement adjustment rod

3‧‧‧Three-axis angle adjustment mechanism

31‧‧‧U-bracket

33‧‧‧ pivot board

41‧‧‧Second axial rotation adjustment lever

42‧‧‧First axial rotation adjustment lever

43‧‧‧ Third axial rotation adjustment lever

Claims (10)

A six-axis adjustment device includes a three-axis displacement adjustment mechanism and a three-axis angle adjustment mechanism, wherein the three-axis angle adjustment mechanism is assembled on the three-axis displacement adjustment mechanism; and the three-axis angle adjustment mechanism is The utility model comprises a U-shaped bracket, which comprises a bottom rod and two side rods, wherein the two side rods are respectively connected to two ends of the bottom rod, and the bottom rod is pivotally connected to the three-axis displacement adjusting mechanism, the U-shaped The bracket is rotatable relative to the three-axis displacement adjustment mechanism in a second axial direction; a corresponding one of the two side ends of the carrier includes a central pivot, and the central pivots are respectively pivotally connected to the U The two side bars of the type bracket are rotatable relative to the U-shaped bracket in a first axial direction, the carrying platform includes a first guiding member; and a pivoting plate includes a a second guiding member coupled to the first guiding member of the carrying platform, wherein the pivoting plate is opposite to the second guiding member by the first guiding member and the second guiding member The stage rotates in a third axial direction. The six-axis adjusting device of claim 1, wherein the carrying platform comprises a central through hole, the first guiding member comprises a plurality of guiding grooves, and the plurality of guiding grooves are respectively equidistantly arranged along a circumference of the central through hole The second guiding member includes a plurality of guiding pins which are equidistantly disposed on the lower surface of the pivoting plate; and the plurality of guiding pins are respectively coupled into the plurality of guiding grooves and are relatively slidable. The six-axis adjustment device of claim 2, wherein the second guiding member further comprises a fixing ring and a plurality of bumps, wherein the plurality of protruding blocks are disposed on the fixing ring, and the plurality of guiding pins are respectively connected to the a plurality of bumps disposed along the fixing ring in a ring shape; the fixing ring is disposed under the loading platform and connected to the pivoting plate, the lower surface of the pivoting plate includes a plurality of fixing grooves, and the plurality of fixing blocks The central through hole facing the ground toward the carrying platform is protruded and respectively fastened to the plurality of fixing grooves of the pivoting plate. The six-axis adjustment device of claim 1, further comprising a first axial rotation adjustment rod, a second axial rotation adjustment rod, and a third axial rotation adjustment rod; the first axial rotation adjustment rod group The second axial rotation adjusting rod is disposed between the three-axis displacement adjusting mechanism and the U-shaped bracket; the third axial rotation adjusting rod assembly is disposed between the U-shaped bracket and the loading platform; Between the carrying platform and the pivoting plate. The six-axis adjusting device of claim 4, wherein the U-shaped bracket further comprises a U-shaped vertical frame, the U-shaped vertical frame is disposed on the bottom rod, the loading platform further comprises a long bump, and a An L-shaped fixing block, the pivoting plate further comprising a short protrusion; the long protrusion protruding from one side end of the loading platform and located in the opening of the U-shaped vertical frame, the first axial rotation adjusting rod set Provided on the U-shaped stand and pushed against the long protrusion so that the stage can rotate relative to the U-shaped bracket along the first axial direction; the short protrusion protrudes from a side end of the pivot plate The L-shaped fixing block is disposed at one end of the loading platform, and the third axial rotation adjusting rod is disposed on the L-shaped fixing block, and pushes the short protrusion so that the pivoting plate can be opposite to the The carrier rotates in the third axial direction. The six-axis adjusting device of claim 1, further comprising a first axial positioning plate and a first axial positioning pin, one end of the first axial positioning plate being fixed to the loading platform, the first axis An vertical arcuate slot is formed to the other end of the positioning plate, and the first axial positioning pin passes through the vertical arcuate slot and is fixed to the U-shaped bracket. The six-axis adjusting device of claim 1, further comprising a third axial positioning plate and a third axial positioning pin, one end of the third axial positioning plate being fixed to the pivot plate, the third The other end of the axial positioning pin defines a horizontal arcuate slot, and the third axial positioning pin passes through the horizontal arcuate slot and is fixed to the carrier. The six-axis adjusting device of claim 1, wherein the U-shaped bracket further comprises a crank handle connected to the bottom rod of the U-shaped bracket, the three-axis displacement adjusting mechanism comprising a shaft hole seat, the crank handle The pivot hole is pivoted to the shaft seat. The six-axis adjustment device of claim 1, wherein the three-axis displacement adjustment mechanism comprises a first axial displacement module, a second axial displacement module, and a third axial displacement module; The axial displacement module includes a bottom plate, a first axial sliding block, and a first axial displacement adjusting rod, the first axial sliding block is slidably coupled to the bottom plate, and the first axial displacement adjustment a rod assembly is disposed between the bottom plate and the first axial sliding block, the first axial displacement adjusting rod is configured to adjust a slip of the first axial sliding block in the first axial direction; the second shaft The displacement module includes a second axial slider and a second axial displacement adjustment rod, the second axial slider being slidably coupled to the first axial slider, the second axial direction The displacement adjustment rod is disposed between the first axial slider and the second axial slider, and the second axial displacement adjustment rod is used to adjust the first a sliding of the two axial sliding blocks in the second axial direction; the third axial displacement module comprises a supporting base, a third axial sliding block, and a third axial displacement adjusting rod, the supporting base system The third axial sliding block is slidably coupled to the supporting seat, and the third axial displacement adjusting rod is disposed on the supporting base and the third The third axial displacement adjusting rod is used to adjust the sliding of the third axial sliding block in the third axial direction. The six-axis adjustment device of claim 9, wherein the first axial displacement module, the second axial displacement module, and the third axial displacement module respectively comprise a guide rail and a guiding slot, The first axial displacement module, the second axial displacement module, and the third axial displacement module are respectively relatively slidable by sliding pairs of the guide rails and the guide grooves.