TWM512589U - Multi-shaft planetary coating device - Google Patents
Multi-shaft planetary coating device Download PDFInfo
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- TWM512589U TWM512589U TW104214462U TW104214462U TWM512589U TW M512589 U TWM512589 U TW M512589U TW 104214462 U TW104214462 U TW 104214462U TW 104214462 U TW104214462 U TW 104214462U TW M512589 U TWM512589 U TW M512589U
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Description
本創作係有關於一種多軸行星式鍍膜裝置,尤指有關使鍍膜片可具有三維立體運轉鍍膜效果之光學產品製造的技術領域。The present invention relates to a multi-axis planetary coating device, and more particularly to the technical field of optical product manufacturing in which a coating film can have a three-dimensional operation coating effect.
按,鑑於光電產業所製造的晶片尺寸越來越大,而現有的晶片在進行鍍膜時,現有的治具係以傘狀式為主,而受限於此種現有傘狀式鍍膜機的治具,在進行鍍膜時必須先將欲鍍膜的晶片切割成較小的尺寸,方能在治具中進行鍍膜,而鍍膜時係經由傘狀式治具公轉的方式,然而此種方式所形成的鍍膜晶片其均勻度較差易產生明顯的色差,又容易產生變形,使得鍍膜晶片的品質受到相當大的影響,再者,現有傘狀式治具進行鍍膜時,必須事先將晶片切割成較小的尺寸,不但增加切割的時間與人力,且在切割過程中亦會造成晶片的破裂及毀損。According to the fact that the wafers manufactured by the optoelectronic industry are getting larger and larger, and the existing wafers are being coated, the existing fixtures are mainly umbrella-shaped, which is limited by the treatment of such existing umbrella coating machines. When the coating is carried out, the wafer to be coated must be cut into a small size to be coated in the jig, and the coating is rotated by the umbrella-shaped jig, but the method is formed by this method. The uniformity of the coated wafer is easy to produce obvious chromatic aberration, and it is easy to be deformed, which makes the quality of the coated wafer considerably affected. Moreover, when the existing umbrella-shaped fixture is coated, the wafer must be cut into small beforehand. The size not only increases the cutting time and manpower, but also causes cracking and damage of the wafer during the cutting process.
因此,業者遂有如我國專利公告第I 330668號之前案創作產生,其主要提供一種大尺寸平面之鍍膜片治具,藉由驅動軸、驅動齒輪與從動齒輪使結合框產生運轉,使鍍膜晶片能放置在治具中而同時產生公轉及自轉的效果。Therefore, the manufacturer has created a pre-production case such as China Patent Publication No. I 330668, which mainly provides a large-sized flat coated jig, which is driven by the drive shaft, the drive gear and the driven gear to make the coated wafer Can be placed in the fixture while producing the effect of revolution and rotation.
上述該專利前案主要係將現有的鍍膜機治具由傘狀式公轉治具的結構改變為平面式的公自轉治具結構,然而, 該專利前案雖可提供大尺寸之鍍膜效果,且無需事先切割成較小的尺寸,但因為其僅能做到平面式之鍍膜效果,故對於現今光面鏡片特殊之曲面鍍膜,仍存在無法做到均勻鍍膜的效果,因此,仍具有改善之必要。The above-mentioned patent premise mainly changes the structure of the existing coating machine jig from the structure of the umbrella-shaped revolving jig to the planar type of public-revolution jig structure, however, Although the patent can provide a large-size coating effect without cutting into a small size in advance, because it can only achieve a flat coating effect, there is still no way for the special curved coating of today's glossy lenses. The effect of uniform coating is achieved, so there is still a need for improvement.
可知本案所欲解決的技術問題在於:針對現有技術之行星式鍍膜裝置存在上述的缺陷,提供一種有效的改善技術構造,且經過不斷的研究與試驗,終於發展出一種能改進現有缺失之本創作。It can be seen that the technical problem to be solved in this case is that the above-mentioned defects exist in the planetary coating device of the prior art, and an effective technical structure is improved, and after continuous research and experiment, a creation which can improve the existing deficiency is finally developed. .
本創作為達成上述功能,所採取之技術結構為:創作一種多軸行星式鍍膜裝置,其包括有一殼體、一驅動組件及一行星齒輪組所組成,其中,驅動組件包含有一驅動軸、一傳動齒輪、一公轉盤轉軸及一公轉盤,而驅動軸設有一驅動齒輪,且嚙合於傳動齒輪,而傳動齒輪結合於公轉盤轉軸之一端,公轉盤轉軸之另端則固接公轉盤,使驅動軸被輸入動力時,公轉盤可以被轉動,而公轉盤轉軸係由外向內穿入殼體,而公轉盤位於殼體之內部。而行星齒輪組包含有一太陽齒輪、複數行星齒輪及複數行星軸,而太陽齒輪設有複數固定柱,利用固定柱與殼體之內側相結合,使太陽齒輪被固定,且太陽齒輪位於殼體與公轉盤之間,另外,而複數行星齒輪係分別嚙接於太陽齒輪之周邊,而複數行星軸係穿過公轉盤,且行星軸之一端分別對應固接於行星齒輪;而主要在於:複數行星軸之另端係分別同軸固結一自轉盤及一太陽傘齒輪,且自轉盤及太陽傘齒輪之間設置有複數行星傘軸,其中,行星傘軸各利用一軸 承座與自轉盤組接,且行星傘軸之一端各固接一行星傘齒輪而嚙接於太陽傘齒輪,且行星傘軸之另端結合一滾筒,滾筒係用以提供至少一鍍膜片組接。據此,公轉盤被轉動時,使得滾筒可隨著公轉盤、行星齒輪繞著太陽齒輪公轉,以及可繞著行星軸再公轉,且滾筒又可繞著行星傘軸再自轉,而使鍍膜片可呈現三維立體轉動之鍍膜效果。In order to achieve the above functions, the technical structure adopted is: creating a multi-axis planetary coating device comprising a casing, a driving assembly and a planetary gear set, wherein the driving assembly comprises a driving shaft and a a transmission gear, a male turntable shaft and a male turntable, and the drive shaft is provided with a drive gear and meshed with the transmission gear, and the transmission gear is coupled to one end of the male turntable shaft, and the other end of the male turntable shaft is fixed to the male turntable, so that When the drive shaft is input with power, the male turntable can be rotated, and the male turntable shaft is inserted into the casing from the outside to the inside, and the male turntable is located inside the casing. The planetary gear set includes a sun gear, a plurality of planetary gears and a plurality of planetary shafts, and the sun gear is provided with a plurality of fixed columns, and the fixed column is combined with the inner side of the casing to fix the sun gear, and the sun gear is located in the casing and Between the male turntables, in addition, the plurality of planetary gear trains respectively mesh around the sun gear, and the plurality of planetary shafts pass through the male turntable, and one end of the planetary shaft is respectively fixed to the planetary gear; and the main one is: a plurality of planets The other ends of the shaft are respectively coaxially fixed with a self-rotating wheel and a sun bevel gear, and a plurality of planetary umbrella shafts are arranged between the rotating wheel and the sun bevel gear, wherein each of the planetary umbrella shafts utilizes one axis The socket is assembled with the self-rotating wheel, and one of the planetary umbrella shafts is fixedly connected with a planetary bevel gear to be engaged with the sun bevel gear, and the other end of the planetary umbrella shaft is combined with a roller, and the roller is used to provide at least one coating group Pick up. According to this, when the male turntable is rotated, the drum can revolve around the sun gear with the male turntable and the planetary gear, and can re-rotate around the planetary shaft, and the drum can rotate around the planetary umbrella shaft again, so that the coated film It can display the coating effect of three-dimensional rotation.
其中,滾筒提供鍍膜片組接處係固設一彈片,而鍍膜片係組接於彈片,而彈片係具有二腳卡,二腳卡各具有一卡端,而鍍膜片之二側係分別由該二卡端而卡組。Wherein, the roller provides a resilient piece for the plate assembly, and the coated film is assembled to the elastic piece, and the elastic piece has a two-legged card, the two-footed card each has a card end, and the two sides of the coated film are respectively The two card ends and the card group.
是以,可知本創作之主要目的係在於提供一種多軸行星式鍍膜裝置,其主要藉由組接鍍膜片之滾筒除了可隨公轉盤、行星齒輪而公轉,以及可繞著行星軸再公轉之外,又可繞著行星傘軸再自轉,使得鍍膜片可呈三維立體轉動,而能改善鍍膜片的鍍膜均勻度,尤其適用於曲面鏡片之鍍膜處理,綜此而排除現有者之缺失。Therefore, it can be seen that the main purpose of the present invention is to provide a multi-axis planetary coating device which is mainly revolved around the planetary shaft by means of a drum which is assembled with a coating film, in addition to being able to revolve around the planetary shaft and the planetary gear. In addition, it can rotate around the planetary umbrella shaft, so that the coated film can be rotated in three dimensions, which can improve the coating uniformity of the coated film, and is especially suitable for the coating treatment of the curved lens, thereby eliminating the lack of the existing one.
1‧‧‧殼體1‧‧‧shell
11‧‧‧開孔11‧‧‧Opening
12‧‧‧開口12‧‧‧ openings
2‧‧‧驅動組件2‧‧‧Drive components
21‧‧‧驅動軸21‧‧‧Drive shaft
211‧‧‧驅動齒輪211‧‧‧ drive gear
22‧‧‧傳動齒輪22‧‧‧Transmission gear
23‧‧‧公轉盤轉軸23‧‧‧ Male turntable shaft
24‧‧‧公轉盤24‧‧‧public turntable
241‧‧‧穿孔241‧‧‧Perforation
3‧‧‧行星齒輪組3‧‧‧ planetary gear set
31‧‧‧太陽齒輪31‧‧‧Sun Gear
311‧‧‧固定柱311‧‧‧ fixed column
32‧‧‧行星齒輪32‧‧‧ planetary gear
33‧‧‧行星軸33‧‧‧ planet shaft
34‧‧‧自轉盤34‧‧‧From the turntable
35‧‧‧太陽傘齒輪35‧‧‧Sun bevel gear
36‧‧‧行星傘軸36‧‧‧ Planetary Umbrella
361‧‧‧行星傘齒輪361‧‧‧ Planetary Bevel Gear
37‧‧‧軸承座37‧‧‧ bearing housing
38‧‧‧滾筒38‧‧‧Roller
381‧‧‧結合孔381‧‧‧bond hole
39‧‧‧彈片39‧‧‧Shrap
391‧‧‧腳卡391‧‧‧ foot card
392‧‧‧卡端392‧‧‧ card end
4‧‧‧鍍膜片4‧‧‧coated film
第一圖係本創作之立體組合結構實施例圖。The first figure is a diagram of an embodiment of a three-dimensional composite structure of the present creation.
第二圖係本創作之立體組合實施狀態的外觀圖。The second figure is an appearance view of the stereoscopic implementation state of the present creation.
第三圖係本創作之側視組合結構圖。The third picture is a side view combination structure diagram of the present creation.
第四圖係本創作之行星齒輪組部份之放大結構圖。The fourth figure is an enlarged structural view of the portion of the planetary gear set of the present creation.
第五圖係本創作之滾筒與鍍膜片之結構組成及部份分解圖。The fifth figure is the structural composition and partial exploded view of the roller and the coated film of the present invention.
第六圖係本創作於實施時之鍍膜片卡組定位於滾筒的組 合示意圖。The sixth figure is the set of the coated film card group positioned in the drum during the implementation of the present invention. Schematic diagram.
第七圖係本創作於實施時之作動示意圖。(鍍膜片未繪出)The seventh picture is a schematic diagram of the operation of the creation at the time of implementation. (coated film is not drawn)
請參閱第一圖所示,本創作「多軸行星式鍍膜裝置」,其係由一殼體1、一驅動組件2及一行星齒輪組3所組成。其中:殼體1,其一側邊具有一開孔11連接排氣幫浦裝置(另見第二圖,排氣幫浦裝置在圖中未繪出),另一側邊為殼體1之一開口12,開口12設有殼門可供關閉(殼門亦未繪出),而使殼體1內部可形成密閉的腔體結構。Referring to the first figure, the "multi-axis planetary coating device" of the present invention is composed of a casing 1, a driving assembly 2 and a planetary gear set 3. Wherein: the housing 1 has an opening 11 connected to the exhaust pump device on one side (see also the second figure, the exhaust pump device is not shown in the figure), and the other side is the housing 1 An opening 12 is provided with a door for closing (the door is also not shown), so that the inside of the casing 1 can form a closed cavity structure.
驅動組件2,包含有一驅動軸21、一傳動齒輪22、一公轉盤轉軸23及一公轉盤24,驅動軸21設有一驅動齒輪211,此處之驅動軸21可為動力馬逹之動力輸出軸,而驅動齒輪211嚙合於傳動齒輪22,而傳動齒輪22結合於公轉盤轉軸23之一端,公轉盤轉軸23之另端則固接至公轉盤24之中央,使驅動軸21被輸入動力時,公轉盤24可被轉動,而公轉盤轉軸23係由外向內穿入殼體1,且公轉盤24位於殼體1之內部。另外。公轉盤24環設複數穿孔241(另見第四圖)。The drive assembly 2 includes a drive shaft 21, a transmission gear 22, a male turntable shaft 23 and a male turntable 24. The drive shaft 21 is provided with a drive gear 211, wherein the drive shaft 21 can be a power output shaft of the power stirrup. The drive gear 211 is meshed with the transmission gear 22, and the transmission gear 22 is coupled to one end of the male rotary shaft 23, and the other end of the male rotary shaft 23 is fixed to the center of the male rotary table 24, so that when the drive shaft 21 is input with power, The turntable 24 can be rotated, and the male turntable shaft 23 is inserted into the casing 1 from the outside to the inside, and the male turntable 24 is located inside the casing 1. Also. The male turntable 24 is provided with a plurality of perforations 241 (see also the fourth figure).
行星齒輪組3,請見第一、三圖,包含有一太陽齒輪31、複數行星齒輪32及複數行星軸33,其中,太陽齒輪31係位於殼體1與公轉盤24之間,且太陽齒輪31向外突伸有複數固定柱311,且利用固定柱311與殼體1之內側相結合(如第三圖),而使太陽齒輪31被固定,而複數 行星齒輪32係分別嚙接於太陽齒輪31之周邊,請見第四圖,複數行星軸33係穿過公轉盤24之穿孔241,且行星軸33之一端分別對應固接於行星齒輪32,行星軸33之另端則分別同軸固結一自轉盤34及一太陽傘齒輪35,且自轉盤34及太陽傘齒輪35之間設置有複數行星傘軸36,行星傘軸36各利用一軸承座37與自轉盤34組接,且行星傘軸36之一端各固接一行星傘齒輪361而嚙接於太陽傘齒輪35,且行星傘軸36之另端結合一滾筒38,請見第五圖,滾筒38設置有複數結合孔381,結合孔381提供一彈片39結合,而彈片39具有二腳卡391,二腳卡391各具有一卡端392,利用二卡端392卡組一鍍膜片4,使得鍍膜片4組接於滾筒38外側(圖中係以曲面狀之鍍膜片為例),且利於鍍膜片4之組裝與拆解。The planetary gear set 3, see the first and third figures, includes a sun gear 31, a plurality of planetary gears 32, and a plurality of planetary shafts 33, wherein the sun gear 31 is located between the casing 1 and the male turntable 24, and the sun gear 31 A plurality of fixing posts 311 are protruded outward, and the fixing post 311 is combined with the inner side of the housing 1 (as shown in the third figure), so that the sun gear 31 is fixed, and the plurality The planetary gears 32 are respectively engaged with the periphery of the sun gear 31. See the fourth figure. The plurality of planetary shafts 33 pass through the through holes 241 of the male turntable 24, and one end of the planetary shaft 33 is fixedly fixed to the planetary gears 32, respectively. The other ends of the shaft 33 are respectively coaxially fixed from the turntable 34 and a sun gear 35, and a plurality of planetary umbrella shafts 36 are disposed between the turntable 34 and the sun gear 35, and the planetary umbrella shafts 36 each utilize a bearing seat 37. Connected to the self-rotating disc 34, and one end of the planetary umbrella shaft 36 is fixed to a planetary bevel gear 361 to be engaged with the sun bevel gear 35, and the other end of the planetary umbrella shaft 36 is coupled with a drum 38, as shown in the fifth figure. The roller 38 is provided with a plurality of coupling holes 381. The coupling hole 381 provides a combination of the elastic pieces 39. The elastic piece 39 has a two-legged card 391. Each of the two-legged cards 391 has a card end 392. The coated sheets 4 are connected to the outside of the drum 38 (in the figure, a curved coated sheet is taken as an example), and the assembly and disassembly of the coated sheets 4 are facilitated.
承上組構而成,實施時如第六圖,係將欲鍍膜的鍍膜片4片卡組定位在滾筒38外側,再如第七圖(鍍膜片未繪出),此時即可使驅動軸21被輸入動力而使公轉盤24轉動,同時各行星軸33即與公轉盤24同步轉動,且繞著太陽齒輪31公轉,且因行星齒輪32嚙合於太陽齒輪31,故使得各行星軸33亦同時自轉,此時,滾筒38除隨著公轉盤24、行星齒輪32繞著太陽齒輪31公轉之外,滾筒38也即繞著行星軸33而公轉,再者,藉由行星傘軸36之行星傘齒輪361嚙接於太陽傘齒輪35(另參見第四圖),故使得滾筒38也同時具有再自轉的效果。亦即,使得滾筒38具有大公轉、小公轉及自轉的三維立體轉動的效果,而使鍍膜片4呈 現三維立體轉動之鍍膜效果。As shown in the sixth figure, the four sheets of the plated film to be coated are positioned on the outside of the drum 38, and as shown in the seventh figure (the film is not drawn), the drive can be made at this time. The shaft 21 is input with power to rotate the male turntable 24, and the respective planetary shafts 33 rotate in synchronization with the male turntable 24, and revolve around the sun gear 31, and because the planetary gears 32 mesh with the sun gear 31, the respective planetary shafts 33 are caused. At the same time, at the same time, the drum 38 revolves around the planetary shaft 33 in addition to the male turntable 24 and the planetary gear 32 revolving around the sun gear 31. Further, by the planetary umbrella shaft 36 The planetary bevel gear 361 is engaged with the sun bevel gear 35 (see also the fourth figure), so that the drum 38 also has the effect of re-rotating at the same time. That is, the roller 38 has the effect of three-dimensional rotation of large revolution, small revolution and rotation, and the coating film 4 is The coating effect of three-dimensional rotation is now available.
據上結構組成及實施說明,可知本創作主要藉由行星軸33再透過太陽傘齒輪35、行星傘軸36、行星傘齒輪361之結合設計,使得滾筒38具有大公轉、小公轉及再自轉的功能,以呈現三維立體轉動之鍍膜運轉,使鍍膜片4的鍍膜作業達到更均勻的效果,綜此而排除現有者之缺失,以及提升鍍膜良率。According to the above structural composition and implementation description, it can be seen that the design of the main shaft 33 is further transmitted through the combination of the sun bevel gear 35, the planetary umbrella shaft 36 and the planetary bevel gear 361, so that the drum 38 has a large revolution, a small revolution and a re-rotation. The function is to perform the coating operation of three-dimensional rotation, so that the coating operation of the coating film 4 can achieve a more uniform effect, thereby eliminating the lack of the existing one and improving the coating yield.
綜上所述,當知本創作之創新結構已有效排除現有者之缺失,而具有產業利用性、新穎性與進步性,符合新型專利要件。惟以上所述者,僅為本創作之較佳實施例而已,並非用來限定本創作實施之範圍。即凡依本創作申請專利範圍所做的均等變化與修飾,皆為本創作專利範圍所涵蓋。In summary, when the innovative structure of Zhiben's creation has effectively ruled out the lack of existing ones, it has industrial utilization, novelty and progress, and conforms to the new patent requirements. However, the above description is only for the preferred embodiment of the present invention and is not intended to limit the scope of the present invention. That is, the equal changes and modifications made by the patent application scope of this creation are covered by the scope of the creation patent.
1‧‧‧殼體1‧‧‧shell
2‧‧‧驅動組件2‧‧‧Drive components
21‧‧‧驅動軸21‧‧‧Drive shaft
211‧‧‧驅動齒輪211‧‧‧ drive gear
22‧‧‧傳動齒輪22‧‧‧Transmission gear
23‧‧‧公轉盤轉軸23‧‧‧ Male turntable shaft
24‧‧‧公轉盤24‧‧‧public turntable
3‧‧‧行星齒輪組3‧‧‧ planetary gear set
31‧‧‧太陽齒輪31‧‧‧Sun Gear
311‧‧‧固定柱311‧‧‧ fixed column
32‧‧‧行星齒輪32‧‧‧ planetary gear
33‧‧‧行星軸33‧‧‧ planet shaft
35‧‧‧太陽傘齒輪35‧‧‧Sun bevel gear
36‧‧‧行星傘軸36‧‧‧ Planetary Umbrella
361‧‧‧行星傘齒輪361‧‧‧ Planetary Bevel Gear
38‧‧‧滾筒38‧‧‧Roller
Claims (3)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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TW104214462U TWM512589U (en) | 2015-09-07 | 2015-09-07 | Multi-shaft planetary coating device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW104214462U TWM512589U (en) | 2015-09-07 | 2015-09-07 | Multi-shaft planetary coating device |
Publications (1)
Publication Number | Publication Date |
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TWM512589U true TWM512589U (en) | 2015-11-21 |
Family
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Family Applications (1)
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TW104214462U TWM512589U (en) | 2015-09-07 | 2015-09-07 | Multi-shaft planetary coating device |
Country Status (1)
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TW (1) | TWM512589U (en) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN107497312A (en) * | 2017-10-17 | 2017-12-22 | 浙江奥捷生物科技有限公司 | Fertilizer processing unit (plant) |
TWI616270B (en) * | 2016-05-05 | 2018-03-01 | 馗鼎奈米科技股份有限公司 | Revolution and rotation disk module |
CN109127273A (en) * | 2018-08-28 | 2019-01-04 | 芜湖聚鑫涂装有限公司 | A kind of the dacroment process equipment and the dacroment process method |
CN109652780A (en) * | 2018-12-12 | 2019-04-19 | 上海航天控制技术研究所 | A kind of control method improving special-shaped part plating film uniformity |
CN110760808A (en) * | 2019-12-10 | 2020-02-07 | 湘潭宏大真空技术股份有限公司 | Curved surface screen magnetron sputtering subassembly |
CN112877668A (en) * | 2021-01-13 | 2021-06-01 | 湘潭大学 | Large-area variable-radius curved surface film substrate frame |
-
2015
- 2015-09-07 TW TW104214462U patent/TWM512589U/en not_active IP Right Cessation
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI616270B (en) * | 2016-05-05 | 2018-03-01 | 馗鼎奈米科技股份有限公司 | Revolution and rotation disk module |
CN107497312A (en) * | 2017-10-17 | 2017-12-22 | 浙江奥捷生物科技有限公司 | Fertilizer processing unit (plant) |
CN109127273A (en) * | 2018-08-28 | 2019-01-04 | 芜湖聚鑫涂装有限公司 | A kind of the dacroment process equipment and the dacroment process method |
CN109652780A (en) * | 2018-12-12 | 2019-04-19 | 上海航天控制技术研究所 | A kind of control method improving special-shaped part plating film uniformity |
CN110760808A (en) * | 2019-12-10 | 2020-02-07 | 湘潭宏大真空技术股份有限公司 | Curved surface screen magnetron sputtering subassembly |
CN110760808B (en) * | 2019-12-10 | 2023-10-31 | 湘潭宏大真空技术股份有限公司 | Curved surface screen magnetron sputtering assembly |
CN112877668A (en) * | 2021-01-13 | 2021-06-01 | 湘潭大学 | Large-area variable-radius curved surface film substrate frame |
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Legal Events
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MM4K | Annulment or lapse of a utility model due to non-payment of fees |