CN216947174U - Film coating device with multi-axis rotating workpiece disc - Google Patents
Film coating device with multi-axis rotating workpiece disc Download PDFInfo
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- CN216947174U CN216947174U CN202220308268.1U CN202220308268U CN216947174U CN 216947174 U CN216947174 U CN 216947174U CN 202220308268 U CN202220308268 U CN 202220308268U CN 216947174 U CN216947174 U CN 216947174U
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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Abstract
The utility model discloses a film coating device with a multi-axis rotating workpiece disc, which comprises: the multi-shaft rotating mechanism is arranged inside the vacuum chamber and comprises a first frame and a second frame, one end of the first frame is connected with the driving mechanism through a first rotating shaft, the other end of the first frame is respectively connected with the second frame through a second rotating shaft and a third rotating shaft in a rotating mode and is connected with the second frame through a first transmission mechanism, M rotating drums are arranged on the second frame, the outer surfaces of the M rotating drums are used for placing workpieces and are respectively connected with the second frame in a rotating mode through a fourth rotating shaft, a second transmission mechanism is arranged on the second frame and is connected with the rotating drums, and the first frame rotates around the first rotating shaft under the driving of the driving mechanism. The utility model can realize that the workpiece coils 3 shafts to rotate.
Description
Technical Field
The application relates to the field of vacuum coating, in particular to a coating device with a multi-axis rotating workpiece disc.
Background
As for a coating process of a substrate, a coating apparatus currently used is shown in fig. 1, and includes: a drive motor mechanism 101, a work tray 102, a vacuum chamber 103, an evaporation source 104, and a plurality of sets of rollers. The workpiece disc of the film coating device can only rotate along two shafts, in the film coating process, only the revolution and the rotation of the roller can be realized, the film coating device is suitable for coating films on substrates such as arc lenses and thin film lenses, but when long-strip-shaped workpieces are processed, particularly long-strip-shaped workpieces with inner grooves, the problem that all film coating surfaces of the complex workpieces of the structure can be coated cannot be guaranteed due to the fact that the rotating shafts are few in the existing two-shaft rotating workpiece disc, the film coating inside the grooves can be carried out on the workpieces only by adjusting the positions of the workpieces by operators, and the processing efficiency is reduced.
Disclosure of Invention
To the above technical problem, the technical scheme adopted by the application is as follows:
the embodiment of the application provides a coating device with multiaxis rotates work piece dish, includes: the vacuum chamber, the driving mechanism and the multi-axis rotating mechanism, the driving mechanism is arranged outside the vacuum chamber, the multi-axis rotating mechanism is arranged inside the vacuum chamber, and comprises a first frame and a second frame, one end of the first frame is connected with the driving mechanism through a first rotating shaft, the other end of the first frame is respectively connected with the second frame through a second rotating shaft and a third rotating shaft in a rotating manner and is connected with the second frame through a first transmission mechanism, the second frame is provided with M rotating drums, the outer surfaces of the M rotating drums are used for placing workpieces and are respectively connected with the second frame through a fourth rotating shaft in a rotating manner, the second frame is provided with a second transmission mechanism, the second transmission mechanism is connected with the rotating drums, under the driving of the driving mechanism, the first frame rotates around the first rotating shaft, and then the first transmission mechanism drives the second frame to rotate around the second rotating shaft and the third rotating shaft, and the rotating drum is driven to rotate around the fourth rotating shaft through a second transmission mechanism.
The coating device with the multi-axis rotating workpiece disc provided by the embodiment of the application has the following technical effects at least: because on the basis of the two-shaft workpiece disc, the rotating shaft is additionally arranged, the workpiece rotates three-dimensionally along three shafts in the coating process, all surface coatings can be finished at one time even if the workpiece with a complex structure is used, and an operator does not need to adjust the position of the workpiece with the complex shape to process the inner part of the concave surface of the workpiece, thereby improving the working efficiency.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments or related technologies of the present application, the drawings needed to be used in the description of the embodiments or related technologies are briefly introduced below, it is obvious that the drawings in the following description are only some embodiments of the present application, and for those skilled in the art, other drawings can be obtained according to these drawings without creative efforts.
FIG. 1 is a schematic structural view of a conventional coating apparatus;
FIG. 2 is a schematic structural diagram of a coating apparatus with a multi-axis rotating workpiece tray according to an embodiment of the present invention;
FIG. 3 is a schematic view showing a part of the structure in FIG. 2;
FIG. 4 is an enlarged view of portion A of FIG. 3;
FIG. 5 is a schematic view of the multi-axis turning mechanism of FIG. 2;
FIG. 6 is a schematic diagram of a workpiece structure according to an embodiment of the present disclosure;
FIG. 7 is a schematic structural diagram of a coating apparatus having a multi-axis rotary workpiece tray according to another embodiment of the present invention;
fig. 8 is a schematic view showing a part of the structure in fig. 7;
fig. 9 is an enlarged view of a portion B in fig. 8;
FIG. 10 is a schematic view of the multi-axis pivot mechanism of FIG. 7;
fig. 11 is a schematic view of a multi-axis rotating mechanism according to another embodiment of the present invention.
Detailed Description
In order to make the technical problems, technical solutions and advantages to be solved by the present application clearer, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the drawings in the embodiments of the present application.
(example 1)
As shown in fig. 2 to 5, an embodiment of the present application provides a coating apparatus with a multi-axis rotating workpiece tray, including: a vacuum chamber 1, a driving mechanism 2 and a multi-axis rotating mechanism.
Wherein the driving mechanism 2 is provided outside the vacuum chamber 1. The drive mechanism 2 may be of conventional construction and may, for example, include a drive motor and a rotary drum.
The multi-axis rotating mechanism is arranged inside the vacuum chamber 1 and comprises a first frame 3 and a second frame 4. One end of the first frame 3 is connected with the driving mechanism 2 through a first rotating shaft 5, and the other end is respectively connected with the second frame 4 through a second rotating shaft 6 and a third rotating shaft 7, and is connected with the second frame 4 through a first transmission mechanism. As shown in fig. 4, the first rotating shaft 5 may be rotatably connected to the rotary drum through a connecting member such as a flange, and may rotate clockwise or counterclockwise under the driving of the driving motor.
The second frame 4 is provided with M rotating drums 8, the outer surfaces of the M rotating drums 8 are used for placing workpieces 9, and are respectively rotatably connected with the second frame 4 through fourth rotating shafts 10, the second frame 4 is provided with a second transmission mechanism, and the second transmission mechanism is connected with the rotating drums 8.
Thus, under the driving of the driving mechanism, the first frame 3 rotates around the first rotating shaft 5, and then the first transmission mechanism drives the second frame to rotate around the second rotating shaft 6 and the third rotating shaft 7, and the second transmission mechanism drives the rotating drum to rotate around the fourth rotating shaft 10. Namely, the cylinder rotates along the first axis of rotation of vertical setting under the drive of first frame, and second axis of rotation and the third axis of rotation that sets up along the level rotate under the drive of second frame, along self axis rotation simultaneously, realize rotating along 3 axles three-dimensionally.
As shown in fig. 6, the workpiece 9 may include a rectangular base body having one side opened, and a plurality of partitions are provided inside the base body, thereby forming a plurality of inner grooves inside the base body. All surfaces in the substrate need to be coated. The workpiece may be held to the outer surface of the drum by a special fixture or may be held to the outer surface of the drum by an adhesive, such as a glue strip. The workpiece may be a substrate. The rotating drum 8 can rotate three-dimensionally along 3 axes, so that coating of all coating surfaces of the workpiece can be realized. In the embodiment of the present application, the number of the drums 8 may be set according to actual needs, and preferably, M is 4.
Further, as shown in fig. 5, the first frame 3 may be a square frame with an open lower end, and the second frame 4 may be a square frame. The plurality of rollers are disposed inside the second frame at intervals by the rotating shaft.
Further, as shown in fig. 3 to 5, the first transmission mechanism may include a first gear 11, a second gear 12, a first bevel gear 13, a second bevel gear 14, a first sprocket 15, a second sprocket 16, a third sprocket 17 provided on the first frame 3, and a fourth sprocket 18 provided on the second frame 4. The first gear 11, the second gear 12, the first bevel gear 13, the second bevel gear 14, the first sprocket 15, and the second sprocket 16 are disposed outside the first frame 3, and the third sprocket 17 is disposed inside the first frame 3. Specifically, the first gear 11 is fixedly disposed on the first rotating shaft 5, the first gear 11 is engaged with the second gear 12, the first bevel gear 13 is disposed coaxially with the second gear 12, the second bevel gear 14 is coupled to the first sprocket 15 via a first coupling shaft 19, the second bevel gear 14 is engaged with the first bevel gear 13, and the first sprocket 15 is coupled to the second sprocket 16 via a first chain 20. The third chain wheel 17 is connected with the second chain wheel 16 through a rotating shaft. The fourth sprocket 18 is disposed on the second rotating shaft 6 and connected to the third sprocket 17 via a second chain 21.
The second transmission mechanism may include a fifth sprocket 22, a sixth sprocket 23, a third bevel gear 24, a fourth bevel gear 25, and M end sprockets 26, including first to M end sprockets arranged in sequence from the third rotational axis to the second rotational axis. Wherein, the fifth chain wheel 22 is arranged on the third rotating shaft 7, the sixth chain wheel 23 is connected with the third bevel gear 24 through a third connecting shaft 27, the fifth chain wheel 22 is connected with the sixth chain wheel 23 through a third chain 28, the M end chain wheels 25 are respectively arranged on the rotating shafts of the M revolving drums and are connected through a fourth chain 29, and the fourth bevel gear 24 is coaxially arranged with the first end chain wheel and is meshed with the third bevel gear 24.
The coating apparatus of the present embodiment further includes an evaporation source 30 provided at the bottom of the vacuum chamber 1.
The working principle of the coating device provided by the embodiment is as follows: in the film coating process, the first frame is driven to rotate through the driving mechanism, and because the first gear is fixedly installed at the top of the vacuum chamber, when the first frame rotates, power is sequentially transmitted to the fourth chain wheel through the second gear, the first bevel gear, the second bevel gear, the first chain wheel, the second chain wheel and the third chain wheel, so that the second frame is driven to rotate along the rotation axis of the second frame, namely, the second frame rotates along the horizontal axis. The rotation of second frame can loop through the fifth sprocket, the sixth sprocket, third bevel gear, fourth bevel gear drives M terminal sprocket and rotates, thereby make the cylinder rotate along self axis, and like this, the cylinder rotates along the first axis of rotation of vertical setting under the drive of first frame, second axis of rotation and third axis of rotation that sets up along the level under the drive of second frame rotate, simultaneously along self axis rotation, realize rotating along 3 three-dimensional axles, and then can make all coating film faces of work piece can both once only be coated, coating film efficiency has been improved.
(example 2)
Another embodiment of the present application provides a film coating apparatus having a multi-axis rotating workpiece tray, which is substantially the same as the foregoing embodiments, except for the first and second transmission mechanisms. In order to avoid redundancy, the present embodiment omits the description of the same structure as the previous embodiments, and only the differences are described.
As shown in fig. 7 to 10, in the present embodiment, the first transmission mechanism may include a first gear 201, a second gear 202, a first bevel gear 203, a second bevel gear 204, a third bevel gear 205, a fourth bevel gear 206, a fifth bevel gear 207, and a first gear plate 208, the first gear 202 is fixedly arranged on the first rotating shaft 5, the first gear 201 is meshed with the second gear 202, the first bevel gear 203 and the second bevel gear 203 are coaxially arranged, the second bevel gear 204 and the third bevel gear 205 are connected by a first connecting shaft 209, the fourth bevel gear 206 and the fifth bevel gear 207 are connected by a second connecting shaft 210, the first gear plate 208 is disposed on the second rotation shaft 6, the third bevel gear 204 is engaged with the fourth bevel gear 206, and the fifth bevel gear 207 is engaged with the first gear plate 208.
Further, the second transmission mechanism may include a third connecting shaft 211, a fourth connecting shaft 212, a second gear disc 213, and M tip input bevel gears 214. The second gear disc 213 is disposed on the third rotating shaft 7, the third connecting shaft 7 is provided with a sixth bevel gear 215 and a seventh bevel gear 216, and the sixth bevel gear 216 is engaged with the second gear disc 213. The M tail end input bevel gears comprise first to Mth tail end input bevel gears which are sequentially arranged from a third rotating shaft to a second rotating shaft and are respectively arranged on the rotating shafts of the M rotating drums.
The fourth connecting shaft 212 is provided with M +1 tail end output bevel gears 217, which include first to M +1 tail end output bevel gears sequentially arranged from the third rotating shaft to the second rotating shaft, wherein the first tail end output bevel gear is engaged with the seventh bevel gear 216, and the second to M +1 tail end output bevel gears are respectively engaged with the first to M tail end input bevel gears.
In this embodiment, the first gear, the second gear, and the bevel gear may be identical in structure to those of the previous embodiments.
The working principle of the coating device provided by the embodiment is as follows: in the coating process, the first frame is driven to rotate through the driving mechanism, and because the first gear is fixedly installed at the top of the vacuum chamber, when the first frame rotates, power is transmitted to the first gear disc through the second gear, the first bevel gear, the second bevel gear, the third bevel gear, the fourth bevel gear and the fifth bevel gear in sequence, and then the second frame is driven to rotate along the rotating shaft of the second frame, namely, the second frame rotates along the horizontal shaft. The rotation of second frame can loop through the second toothed disc, the sixth bevel gear, the seventh bevel gear, M +1 end output bevel gear drives M end input bevel gear and rotates, thereby make the cylinder rotate along self axis, and like this, the cylinder rotates along the first axis of rotation of vertical setting under the drive of first frame, second axis of rotation and the third axis of rotation that sets up along the level under the drive of second frame rotate, simultaneously along self axis rotation, realize rotating along 3 three-dimensional axles, and then can make all coating film surfaces of work piece can both once only be coated with the membrane, coating film efficiency has been improved.
(example 3)
Another embodiment of the present application provides a coating apparatus having a multi-axis rotary workpiece tray, which is substantially the same as the structure of embodiment 2 described above, except that a second transmission mechanism is not provided and a plurality of rollers are not provided. Further, as shown in fig. 11, the plating workpiece 31 in the present embodiment is flat and rotatably disposed in the middle of the second frame 4.
The working principle of the coating device of the embodiment is as follows: when the driving mechanism drives, the first frame is driven to rotate through the first rotating shaft, the first frame drives the second frame to rotate through the first transmission mechanism, and then the workpiece is driven to rotate along the axis of the workpiece. In the whole film coating process, the workpiece can revolve under the drive of the first frame and rotate under the drive of the second frame, and the workpiece can rotate along the two shafts, so that the two surfaces of the workpiece can be coated with films simultaneously.
Although some specific embodiments of the present application have been described in detail by way of illustration, it should be understood by those skilled in the art that the above illustration is only for purposes of illustration and is not intended to limit the scope of the present application. It will also be appreciated by those skilled in the art that various modifications may be made to the embodiments without departing from the scope and spirit of the present application. The scope of the disclosure of the present application is defined by the appended claims.
Claims (7)
1. A film coating device having a multi-axis rotating workpiece tray, comprising: the vacuum chamber, the driving mechanism and the multi-axis rotating mechanism, the driving mechanism is arranged outside the vacuum chamber, the multi-axis rotating mechanism is arranged inside the vacuum chamber, and comprises a first frame and a second frame, one end of the first frame is connected with the driving mechanism through a first rotating shaft, the other end of the first frame is respectively connected with the second frame through a second rotating shaft and a third rotating shaft in a rotating manner and is connected with the second frame through a first transmission mechanism, the second frame is provided with M rotating drums, the outer surfaces of the M rotating drums are used for placing workpieces and are respectively connected with the second frame through a fourth rotating shaft in a rotating manner, the second frame is provided with a second transmission mechanism, the second transmission mechanism is connected with the rotating drums, under the driving of the driving mechanism, the first frame rotates around the first rotating shaft, and then the first transmission mechanism drives the second frame to rotate around the second rotating shaft and the third rotating shaft, and the rotating drum is driven to rotate around the fourth rotating shaft through a second transmission mechanism.
2. The coating apparatus having a multi-axis rotary workpiece tray according to claim 1, wherein the first transmission mechanism comprises a first gear, a second gear, a first bevel gear, a second bevel gear, a third bevel gear, a fourth bevel gear, a fifth bevel gear, and a first gear tray, the first gear is disposed on the first rotary shaft, the first gear is engaged with the second gear, the first bevel gear and the second gear are coaxially disposed, the second bevel gear and the third bevel gear are connected by a first connecting shaft, the fourth bevel gear and the fifth bevel gear are connected by a second connecting shaft, the first gear tray is disposed on the second rotary shaft, the third bevel gear is engaged with the fourth bevel gear, and the fifth bevel gear is engaged with the first gear tray.
3. The coating device with the multi-axis rotary workpiece tray according to claim 1, wherein the second transmission mechanism comprises a third connecting shaft, a fourth connecting shaft, an eighth bevel gear, M ninth bevel gears, a fourth connecting shaft, a fifth connecting shaft, a second bevel gear disc and M end input bevel gears, the second bevel gear disc is arranged on the third rotating shaft, the third connecting shaft is provided with a sixth bevel gear and a seventh bevel gear, the sixth bevel gear is meshed with the second bevel gear disc, the seventh bevel gear is meshed with the eighth bevel gear, the eighth bevel gear is connected with the 1 st ninth bevel gear through the fourth connecting shaft, the M ninth bevel gears are connected with the fifth connecting shaft, and the ninth bevel gear is meshed with the end input bevel gear;
the M tail end input bevel gears are respectively arranged on the rotating shafts of the M rotating drums;
and M +1 tail end output bevel gears are arranged on the fourth connecting shaft, wherein the 1 st tail end output bevel gear is meshed with the seventh bevel gear, and the 2 nd tail end output bevel gear to the M +1 st tail end output bevel gear are respectively meshed with the M tail end input bevel gears.
4. The coating apparatus having a multi-axis rotary workpiece tray according to claim 1, wherein the first transmission mechanism comprises a first gear, a second gear, a first bevel gear, a second bevel gear, a first sprocket, a second sprocket, a third sprocket and a fourth sprocket arranged on a second frame, the first gear is arranged on the first rotary shaft, the first gear is engaged with the second gear, the first bevel gear and the second gear are coaxially arranged, the second bevel gear and the first sprocket are connected by a first connecting shaft, the second bevel gear is engaged with the first bevel gear, the first sprocket and the second sprocket are connected by a first chain, and the third sprocket and the second sprocket are connected by a rotary shaft;
and the fourth chain wheel is arranged on the second rotating shaft and is connected with the third chain wheel through a second chain.
5. The coating apparatus having a multi-axis rotary workpiece tray according to claim 1, wherein the second transmission mechanism comprises a fifth sprocket disposed on the third rotary shaft, a sixth sprocket connected to the third conical gear through a third connecting shaft, a third bevel gear disposed on the rotary shafts of the M drums, respectively, and connected through a fourth chain, a fourth bevel gear disposed coaxially with the first end sprocket and engaged with the third bevel gear, and M end sprockets connected to the third chain through a third chain.
6. The plating device with the multi-axis rotary workpiece tray according to any one of claims 1 to 5, wherein M-4.
7. The coating apparatus having a multi-axis rotary workpiece tray according to claim 1, wherein the workpiece comprises a rectangular base body having one side opened, and a plurality of partitions are provided inside the base body.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220308268.1U CN216947174U (en) | 2022-02-16 | 2022-02-16 | Film coating device with multi-axis rotating workpiece disc |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202220308268.1U CN216947174U (en) | 2022-02-16 | 2022-02-16 | Film coating device with multi-axis rotating workpiece disc |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN216947174U true CN216947174U (en) | 2022-07-12 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202220308268.1U Active CN216947174U (en) | 2022-02-16 | 2022-02-16 | Film coating device with multi-axis rotating workpiece disc |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN216947174U (en) |
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- 2022-02-16 CN CN202220308268.1U patent/CN216947174U/en active Active
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