TWM511730U - Apparatus for continuous manufacturing - Google Patents

Apparatus for continuous manufacturing Download PDF

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Publication number
TWM511730U
TWM511730U TW104209739U TW104209739U TWM511730U TW M511730 U TWM511730 U TW M511730U TW 104209739 U TW104209739 U TW 104209739U TW 104209739 U TW104209739 U TW 104209739U TW M511730 U TWM511730 U TW M511730U
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Taiwan
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plating
circuit board
continuous manufacturing
manufacturing apparatus
fabricated
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TW104209739U
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Chinese (zh)
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Cheng-Po Yu
Yin-Ju Chen
Ai-Hwa Lin
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Unimicron Technology Corp
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Priority to TW104209739U priority Critical patent/TWM511730U/en
Publication of TWM511730U publication Critical patent/TWM511730U/en

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  • Manufacturing Of Printed Wiring (AREA)

Abstract

An apparatus for continuous manufacturing includes a development equipment, a rinse equipment, a deoxidized equipment, a pre-plating treatment equipment, a baking equipment, and a plating equipment. The rinse equipment is continuously connected to the development equipment. The deoxidized equipment is continuously connected to the rinse equipment. The pre-plating treatment equipment is continuously connected to the deoxidized equipment, in which the pre-plating treatment equipment is configured to provide a circuit board to be manufactured with an adhesion promoter. The baking equipment is continuously connected to the pre-plating treatment equipment. The plating equipment is continuously connected to the baking equipment.

Description

連續式製作設備Continuous production equipment

本創作是有關於一種連續式製作設備,且特別是有關於一種用以製造電路板的連續式製作設備。The present invention relates to a continuous production apparatus, and more particularly to a continuous production apparatus for manufacturing a circuit board.

隨著科技之進步,越來越多消費性電子產品隨之被開發出來,而無論是何種電子產品,其常設置有電路板以作為各元件連接之橋樑。也因此,廣泛被使用於相關產業之電路板也與所生產之電子產品的成本息息相關。目前電路板之製作流程之中,其流程包含有多道製程,例如,其包含有曝光、顯影、電鍍與蝕刻等步驟。With the advancement of technology, more and more consumer electronic products have been developed, and no matter what kind of electronic products, they often have a circuit board as a bridge for connecting various components. As a result, circuit boards that are widely used in related industries are also closely related to the cost of the electronic products produced. In the current production process of the circuit board, the process includes multiple processes, for example, it includes steps of exposure, development, plating, and etching.

然而,於不同製程之間,尚未完成製造之電路板常是以人工方式輸送至下一道製程所用之設備內。於此輸送過程中,一旦發生有不預期之外在因素,例如尚未完成製造之電路板發生氧化或污染,甚至因撞擊而產生的破損,此些外在因素將造成電路板的報廢,進而使得成本也連帶增加。換言之,於電路板之製造流程中,電路板於各製程之間的細節也會是製造成本上的一個重要考量因素。However, between different processes, boards that have not yet been manufactured are often manually transferred to the equipment used in the next process. During the transportation process, if there are unexpected factors, such as oxidation or contamination of the board that has not been manufactured, or damage caused by the impact, such external factors will cause the circuit board to be scrapped, thereby making Costs have also increased. In other words, in the manufacturing process of the board, the details of the board between the various processes are also an important consideration in manufacturing cost.

有鑑於此,本創作之一態樣提供一種連續式製作設備,其為透過連續連接(或相接)之各裝置組成,使得待製電路板不用透過人工傳輸的方式,即可自其中的顯影製程輸送至電鍍製程。因此,連續式製作設備可減少待製電路板於各製程之間的傳輸所發生之不預期的外在因素,其除了可以有效降低所製造之電路板的成本之外,也可以提升其良率與製造品質。In view of this, one aspect of the present invention provides a continuous manufacturing apparatus which is composed of successively connected (or connected) devices, so that the circuit board to be fabricated can be developed from it without manual transmission. The process is transferred to the electroplating process. Therefore, the continuous manufacturing equipment can reduce the unexpected external factors that occur in the transmission of the circuit board between the various processes, in addition to effectively reducing the cost of the manufactured circuit board, the yield can also be improved. With manufacturing quality.

本創作之一態樣提供一種連續式製作設備,包含顯影裝置、清洗裝置、去氧化裝置、電鍍前處理裝置、烘乾裝置、電鍍裝置與移動單元。清洗裝置連接並接續於顯影裝置。去氧化裝置連接並接續於清洗裝置。電鍍前處理裝置連接並接續於去氧化裝置,其中電鍍前處理裝置設置以提供附著促進劑至待製電路板。烘乾裝置連接並接續於電鍍前處理裝置。電鍍裝置連接並接續於烘乾裝置。移動單元設置以使待製電路板自顯影裝置依序通過清洗裝置、去氧化裝置、電鍍前處理裝置、烘乾裝置與電鍍裝置。One aspect of the present invention provides a continuous manufacturing apparatus comprising a developing device, a cleaning device, a deoxidizing device, a pre-plating processing device, a drying device, a plating device, and a moving unit. The cleaning device is connected and connected to the developing device. The deoxidation device is connected and connected to the cleaning device. The electroplating pretreatment device is connected and connected to the deoxidation device, wherein the electroplating pretreatment device is arranged to provide an adhesion promoter to the circuit board to be fabricated. The drying device is connected and connected to the pre-plating treatment device. The plating device is connected and connected to the drying device. The mobile unit is arranged to sequentially pass the self-developing device to be manufactured by the cleaning device, the deoxidizing device, the pre-plating processing device, the drying device and the plating device.

於部分實施方式中,移動單元由滾輪組成。滾輪自顯影裝置延伸設置至電鍍裝置。In some embodiments, the mobile unit is comprised of a scroll wheel. The roller self-developing device is extended to the plating device.

於部分實施方式中,顯影裝置、清洗裝置、去氧化裝置、電鍍前處理裝置、烘乾裝置與電鍍裝置為沿同一配置方向連接,且待製電路板於滾輪上之傳輸方向平行於配置方向。In some embodiments, the developing device, the cleaning device, the deoxidizing device, the pre-plating processing device, the drying device, and the plating device are connected in the same configuration direction, and the transmission direction of the circuit board to be mounted on the roller is parallel to the configuration direction.

於部分實施方式中,移動單元包含夾持器。夾持器設置以使待製電路板懸吊於顯影裝置、清洗裝置、去氧化裝 置、電鍍前處理裝置、烘乾裝置與電鍍裝置的其中一者之中。夾持器於顯影裝置至電鍍裝置之間與鉛直方向上具有可移動性。In some embodiments, the mobile unit includes a gripper. The holder is arranged to suspend the circuit board to be mounted on the developing device, the cleaning device, and the deoxidizing device One of the pretreatment, electroplating pretreatment devices, drying devices, and electroplating devices. The holder is movable between the developing device and the plating device in the vertical direction.

於部分實施方式中,電鍍前處理裝置具有浸漬池,附著促進劑填充於浸漬池內。In some embodiments, the pre-plating treatment apparatus has an immersion tank, and the adhesion promoter is filled in the immersion tank.

於部分實施方式中,連續式製作設備更包含滾輪。滾輪設置以使待製電路板自顯影裝置依序通過清洗裝置、去氧化裝置、電鍍前處理裝置、烘乾裝置與電鍍裝置,其中部分位於電鍍前處理裝置中的滾輪位於浸漬池的液面之下。In some embodiments, the continuous manufacturing apparatus further includes a roller. The roller is arranged to sequentially pass the self-developing device of the circuit board to be cleaned, the deoxidizing device, the pre-plating pre-processing device, the drying device and the electroplating device, wherein some of the rollers located in the pre-plating processing device are located at the liquid level of the dipping pool. under.

於部分實施方式中,連續式製作設備更包含噴嘴。噴嘴設置於電鍍前處理裝置之中,電鍍前處理裝置透過噴嘴提供附著促進劑。In some embodiments, the continuous manufacturing apparatus further includes a nozzle. The nozzle is disposed in the pre-plating treatment device, and the pre-plating treatment device provides an adhesion promoter through the nozzle.

於部分實施方式中,連續式製作設備更包含印刷頭。印刷頭設置於電鍍前處理裝置之中,電鍍前處理裝置透過印刷頭提供附著促進劑。In some embodiments, the continuous manufacturing apparatus further includes a print head. The print head is disposed in the pre-plating processing apparatus, and the pre-plating processing apparatus provides an adhesion promoter through the print head.

於部分實施方式中連續式製作設備,更包含入口與出口。入口設置於顯影裝置,用以提供待製電路板置入於連續式製作設備。出口設置於電鍍裝置,其中透過入口置入於連續式製作設備之中的待製電路板透過出口離開連續式製作設備。In some embodiments, the continuous production apparatus further includes an inlet and an outlet. The inlet is disposed in the developing device for providing the circuit board to be fabricated into the continuous manufacturing apparatus. The outlet is disposed in the electroplating apparatus, wherein the circuit board to be fabricated placed in the continuous manufacturing apparatus through the inlet exits the continuous manufacturing apparatus through the outlet.

於部分實施方式中,連續式製作設備更包含異常處理單元與異常處理移動單元。異常處理移動單元設置以輸送位於顯影裝置、清洗裝置、去氧化裝置、電鍍前處理裝置、烘乾裝置與電鍍裝置的其中一者內之異常的待製電路板至異常 處理單元。In some embodiments, the continuous production device further includes an exception handling unit and an exception handling mobile unit. The abnormal processing mobile unit is configured to transport an abnormal circuit board to be abnormal in one of the developing device, the cleaning device, the deoxidizing device, the pre-plating processing device, the drying device, and the plating device to an abnormality Processing unit.

100‧‧‧連續式製作設備100‧‧‧Continuous production equipment

101‧‧‧壓合裝置101‧‧‧ Pressing device

102‧‧‧曝光裝置102‧‧‧Exposure device

103‧‧‧顯影裝置103‧‧‧Developing device

104‧‧‧清洗裝置104‧‧‧cleaning device

106‧‧‧去氧化裝置106‧‧‧Deoxidation unit

108‧‧‧電鍍前處理裝置108‧‧‧Electroplating pretreatment device

110‧‧‧烘乾裝置110‧‧‧Drying device

112‧‧‧電鍍裝置112‧‧‧Electroplating unit

114‧‧‧異常處理單元114‧‧‧Exception handling unit

120‧‧‧移動單元120‧‧‧Mobile unit

122、122’‧‧‧滾輪122, 122’‧‧‧Rollers

124‧‧‧夾持器124‧‧‧Clamps

126‧‧‧附著促進劑126‧‧‧Adhesion promoter

128‧‧‧浸漬池128‧‧‧dip pool

130‧‧‧噴嘴130‧‧‧Nozzles

132‧‧‧印刷頭132‧‧‧Print head

134‧‧‧入口134‧‧‧ entrance

136‧‧‧出口136‧‧‧Export

140、140’‧‧‧待製電路板140, 140’‧‧‧Son-made circuit boards

D‧‧‧傳輸方向D‧‧‧Transport direction

第1A圖繪示壓合裝置、曝光裝置與本創作之連續式製作設備之一實施方式的配置示意圖。FIG. 1A is a schematic view showing the configuration of an embodiment of a press-making device, an exposure device, and a continuous production apparatus of the present invention.

第1B圖繪示第1A圖之連續式製作設備的示意圖。FIG. 1B is a schematic view showing the continuous production apparatus of FIG. 1A.

第2A圖與第2B圖繪示第1A圖之連續式製作設備中的移動單元於不同實施例的示意圖。2A and 2B are schematic views showing different embodiments of the mobile unit in the continuous production apparatus of FIG. 1A.

第3A圖至第3C圖繪示第2A圖之電鍍前處理裝置提供附著促進劑至待製電路板於不同實施例的示意圖。3A to 3C are schematic views showing different embodiments of the pre-plating processing apparatus of FIG. 2 to provide an adhesion promoter to a circuit board to be fabricated.

第4A圖至第4C圖繪示第2B圖之電鍍前處理裝置提供附著促進劑至待製電路板於不同實施例的示意圖。4A to 4C are schematic views showing different embodiments of the pre-plating processing apparatus of FIG. 2B for providing an adhesion promoter to a circuit board to be fabricated.

下文係舉實施例配合所附圖式作詳細說明,但所提供之實施例並非用以限制本創作所涵蓋的範圍,而結構操作之描述非用以限制其執行之順序,任何由元件重新組合之結構,所產生具有均等功效的裝置,皆為本創作所涵蓋的範圍。此外,圖式僅以說明為目的,並未依照原尺寸作圖。為使便於理解,下述說明中相同元件將以相同之符號標示來說明。The embodiments are described in detail below with reference to the drawings, but the embodiments are not intended to limit the scope of the present invention, and the description of structural operations is not intended to limit the order of execution, and any components are recombined. The structure of the device, which produces equal devices, is the scope covered by the creation. In addition, the drawings are for illustrative purposes only and are not drawn to the original dimensions. For ease of understanding, the same elements in the following description will be denoted by the same reference numerals.

有鑑於尚未完成製造之電路板於輸送過程中,一旦發生有不預期之外在因素,將造成製造品質下降與成本方面的提升。本創作之連續式製作設備透過連續連接(或相接)之各 裝置組成,使得待製電路板不用透過人工傳輸的方式,即可自其中的顯影製程輸送至電鍍製程。因此,連續式製作設備可減少待製電路板於各製程之間的傳輸所發生的不預期外在因素,並藉以提升所製造之電路板的品質。In view of the fact that the circuit board that has not been manufactured is in the process of transportation, if there are unexpected factors, it will result in a decrease in manufacturing quality and an increase in cost. The continuous production equipment of the creation is continuously connected (or connected) The device is configured such that the circuit board to be manufactured can be transported from the developing process to the electroplating process without manual transmission. Therefore, the continuous manufacturing apparatus can reduce the unexpected external factors that occur in the transmission of the circuit board to be processed between the various processes, and thereby improve the quality of the manufactured circuit board.

請參照第1A圖與第1B圖。第1A圖繪示壓合裝置101、曝光裝置102與本創作之連續式製作設備100之一實施方式的配置示意圖。第1B圖繪示第1A圖之連續式製作設備100的示意圖。第1A圖中,壓合裝置101、曝光裝置102與連續式製作設備100可組成一個電路板製作裝置。亦即,待製電路板(未繪示)可依序透過壓合裝置101、曝光裝置102與連續式製作設備100完成其製造流程。Please refer to Figure 1A and Figure 1B. FIG. 1A is a schematic diagram showing the configuration of one embodiment of the press-making device 101, the exposure device 102, and the continuous production device 100 of the present invention. FIG. 1B is a schematic diagram showing the continuous production apparatus 100 of FIG. 1A. In Fig. 1A, the pressing device 101, the exposure device 102, and the continuous manufacturing apparatus 100 can constitute a circuit board making device. That is, the circuit board (not shown) can be sequentially processed through the pressing device 101, the exposure device 102, and the continuous manufacturing apparatus 100.

連續式製作設備100包含顯影裝置103、清洗裝置104、去氧化裝置106、電鍍前處理裝置108、烘乾裝置110與電鍍裝置112。清洗裝置104連接並接續於顯影裝置103。去氧化裝置106連接並接續於清洗裝置104,其中去氧化裝置106提供去氧化製程,其由酸洗製程組成,藉以除去待製電路板表面的氧化物。電鍍前處理裝置108連接並接續於去氧化裝置106,其中電鍍前處理裝置108設置以提供附著促進劑(未繪示)至待製電路板。烘乾裝置110連接並接續於電鍍前處理裝置108。電鍍裝置112連接並接續於烘乾裝置110。The continuous production apparatus 100 includes a developing device 103, a cleaning device 104, a deoxidizing device 106, a pre-plating processing device 108, a drying device 110, and a plating device 112. The cleaning device 104 is connected and connected to the developing device 103. The deoxidation unit 106 is coupled to and continues to the cleaning unit 104, wherein the deoxidation unit 106 provides a deoxidation process which is comprised of a pickling process whereby the oxide on the surface of the board to be fabricated is removed. The pre-plating processing unit 108 is coupled to and connected to the deoxidizing unit 106, wherein the pre-plating unit 108 is configured to provide an adhesion promoter (not shown) to the board to be fabricated. The drying device 110 is connected and connected to the pre-plating processing device 108. The plating apparatus 112 is connected and connected to the drying apparatus 110.

本實施方式中,連續式製作設備100為用來對待製電路板進行連續的多個製程,其依序包含對待製電路板進行顯影製程、清洗製程、去氧化製程、電鍍前處理製程、烘乾製程與電鍍製程。也就是說,待製電路板不用透過人工傳輸的方 式,即可自顯影製程進行並輸送至電鍍製程。因此,連續式製作設備100可減少待製電路板於各製程之間的傳輸所發生之不預期的外在因素,例如汙染或氧化,藉以提升待製電路板於電鍍製程中的品質。In the embodiment, the continuous manufacturing apparatus 100 is a plurality of processes for performing a continuous process on the circuit board to be processed, and sequentially includes a developing process, a cleaning process, a deoxidation process, a pre-plating process, and drying of the circuit board to be processed. Process and plating process. In other words, the circuit board to be fabricated does not need to be transmitted manually. The self-developing process can be carried out and transported to the electroplating process. Therefore, the continuous manufacturing apparatus 100 can reduce unintended external factors, such as contamination or oxidation, which occur in the transmission of the circuit board to be processed between the processes, thereby improving the quality of the circuit board to be fabricated in the electroplating process.

第1B圖中,連續式製作設備100更包含入口134與出口136。入口134設置於顯影裝置103,用以提供待製電路板置入於連續式製作設備,即待製電路板可透過入口134進行投板。出口136設置於電鍍裝置112,其中透過入口134置入(或投板)於連續式製作設備100之中的待製電路板可透過出口136離開連續式製作設備100。In FIG. 1B, the continuous manufacturing apparatus 100 further includes an inlet 134 and an outlet 136. The inlet 134 is disposed in the developing device 103 for providing the circuit board to be fabricated in the continuous manufacturing apparatus, that is, the circuit board to be fabricated can be cast through the inlet 134. The outlet 136 is disposed in the electroplating apparatus 112, wherein the circuit board to be fabricated placed (or plated) through the inlet 134 in the continuous manufacturing apparatus 100 can exit the continuous manufacturing apparatus 100 through the outlet 136.

換言之,當操作者透過入口134將待製電路板置入連續式製作設備100後,可於出口136將已完成電鍍製程之電路板取出。更進一步而言,待製電路板於各製程之間的傳輸不會與外界有接觸。透過各裝置為連續地連接(或相接),待製電路板自顯影裝置103輸送至電鍍裝置112之過程不用透過人工傳輸來完成,藉以減少不預期的外在因素。In other words, when the operator places the circuit board to be fabricated into the continuous manufacturing apparatus 100 through the inlet 134, the circuit board on which the plating process has been completed can be taken out at the outlet 136. Furthermore, the transmission of the circuit board to be manufactured between the processes is not in contact with the outside world. Through continuous connection (or connection) of the devices, the process of transporting the circuit board from the developing device 103 to the plating device 112 is accomplished without manual transmission, thereby reducing unintended external factors.

此外,第1A圖中,連續式製作設備100更包含檢測單元(未繪示)、異常處理單元114與異常處理移動單元(未繪示),其中檢測單元設置於各裝置之中。各裝置中的檢測單元可耦接至外部的顯示器或電腦上。檢測單元例如可以是光學鏡頭,藉以觀察待製電路板的表面或外觀是否有重工需求或有瑕疵等異常狀況發生。In addition, in FIG. 1A, the continuous production apparatus 100 further includes a detecting unit (not shown), an abnormality processing unit 114, and an abnormality processing moving unit (not shown), wherein the detecting unit is disposed in each device. The detection unit in each device can be coupled to an external display or computer. The detecting unit can be, for example, an optical lens, so as to observe whether the surface or the appearance of the circuit board to be manufactured has a heavy work demand or an abnormal condition such as flaws.

異常處理單元114可設置於相對各裝置之一側,其中異常處理單元114包含顯影異常處理單元、清洗異常處理 單元、去氧化異常處理單元、電鍍前處理異常處理單元、烘乾異常處理單元與電鍍異常處理單元。The exception processing unit 114 may be disposed on one side of the opposite device, wherein the exception processing unit 114 includes a development exception processing unit, and a cleaning exception processing Unit, deoxidation abnormal processing unit, pre-plating abnormal processing unit, drying abnormal processing unit, and plating abnormal processing unit.

當待製電路板於顯影裝置103、清洗裝置104、去氧化裝置106、電鍍前處理裝置108、烘乾裝置110與電鍍裝置112的其中一者內發生異常現象時,異常處理單元114可以透過異常移動單元將觀測到具有問題或異常的待製電路板輸送到各裝置所對應的異常處理單元。例如,當顯影裝置103之中的檢測單元發現待製電路板有顯影不潔的狀況時,異常處理單元114可以透過異常移動單元將待製電路板自顯影裝置103輸送至異常處理單元114的顯影異常處理單元之中。以上說明為更請楚說明本創作之連續式製作設備100的技術內容,但不以此為限。When an abnormality occurs in one of the developing device 103, the cleaning device 104, the deoxidizing device 106, the pre-plating processing device 108, the drying device 110, and the plating device 112, the abnormality processing unit 114 can transmit an abnormality. The mobile unit transmits a circuit board to be processed having a problem or an abnormality to an abnormality processing unit corresponding to each device. For example, when the detecting unit among the developing device 103 finds that the circuit board to be manufactured has a dirty development condition, the abnormality processing unit 114 can convey the developing board abnormally moving unit to the developing abnormality of the abnormality processing unit 114 through the abnormal moving unit. Among the processing units. The above description is for further explanation of the technical content of the continuous production device 100 of the present invention, but is not limited thereto.

待製電路板於連續式製作設備100之中的傳輸可以透過自動化完成,以下將對此作更進一步的說明。請參照第2A圖與第2B圖,第2A圖與第2B圖繪示第1A圖之連續式製作設備100中的移動單元120於不同實施例的示意圖。本實施方式中,連續式製作設備100更包含移動單元120。移動單元120設置以使待製電路板140自顯影裝置103依序通過清洗裝置104、去氧化裝置106、電鍍前處理裝置108、烘乾裝置110與電鍍裝置112。換言之,待製電路板140可以自待製電路板140的位置被輸送至如待製電路板140’的位置。The transfer of the circuit board to be fabricated in the continuous production apparatus 100 can be accomplished automatically, as will be further explained below. Please refer to FIG. 2A and FIG. 2B . FIG. 2A and FIG. 2B are schematic diagrams showing different embodiments of the mobile unit 120 in the continuous production apparatus 100 of FIG. 1A . In the present embodiment, the continuous production device 100 further includes a mobile unit 120. The moving unit 120 is disposed to sequentially pass the circuit board 140 to be manufactured from the developing device 103 through the cleaning device 104, the deoxidizing device 106, the pre-plating processing device 108, the drying device 110, and the plating device 112. In other words, the circuit board 140 to be fabricated can be transported from the position of the circuit board 140 to be placed to the position of the circuit board 140' to be fabricated.

待製電路板140可以透過移動單元120於連續式製作設備100之中進行傳輸,且此傳輸為自動化傳輸。透過此自動化傳輸,待製電路板140於連續式製作設備100之中的位 置(例如高度)可以被控制,藉以使待製電路板140於製程中的環境因素更容易掌控,使得所製造之電路板的良率能獲得提升。The circuit board 140 to be manufactured can be transferred through the mobile unit 120 in the continuous production apparatus 100, and the transmission is an automatic transmission. Through this automated transmission, the position of the circuit board 140 to be fabricated in the continuous production apparatus 100 The placement (e.g., height) can be controlled so that the environmental factors of the circuit board 140 to be fabricated in the process are more easily controlled, so that the yield of the manufactured circuit board can be improved.

第2A圖中,移動單元120由滾輪122組成。滾輪122自顯影裝置103延伸設置至電鍍裝置112。此外,顯影裝置103、清洗裝置104、去氧化裝置106、電鍍前處理裝置108、烘乾裝置110與電鍍裝置112為沿同一配置方向連接,本實施方式是以第2A之水平方向為例,然而不以此為限。待製電路板140於滾輪122上之傳輸方向D平行於配置方向。In FIG. 2A, the mobile unit 120 is composed of a scroll wheel 122. The roller 122 is extended from the developing device 103 to the plating device 112. Further, the developing device 103, the cleaning device 104, the deoxidizing device 106, the pre-plating processing device 108, the drying device 110, and the plating device 112 are connected in the same arrangement direction. This embodiment is exemplified by the horizontal direction of the second AA. Not limited to this. The transmission direction D of the circuit board 140 to be mounted on the roller 122 is parallel to the arrangement direction.

透過滾輪122之配置,當待製電路板140自設置於顯影裝置103上的入口134(請見第1B圖)投板後,待製電路板140將可依序經過各裝置且依序地進行各項製程。此外,於移動單元120採滾輪122配置的實施例中,待製電路板140於連續式製作設備100之中所進行之傳輸可視為水平式傳輸,即待製電路板140於傳輸過程是呈水平方向放置。Through the configuration of the roller 122, when the circuit board 140 to be manufactured is cast from the inlet 134 (see FIG. 1B) disposed on the developing device 103, the circuit board 140 to be manufactured can be sequentially passed through the devices and sequentially Various processes. In addition, in the embodiment in which the mobile unit 120 is configured with the roller 122, the transmission of the circuit board 140 to be manufactured in the continuous manufacturing apparatus 100 can be regarded as horizontal transmission, that is, the circuit board 140 to be manufactured is horizontal in the transmission process. Place in the direction.

第2B圖中,移動單元120包含夾持器124。夾持器124透過夾持待製電路板140以使其懸吊於顯影裝置103、清洗裝置104、去氧化裝置106、電鍍前處理裝置108、烘乾裝置110與電鍍裝置112的其中一者之中。夾持器124於顯影裝置103至電鍍裝置112之間與鉛直方向上具有可移動性。In FIG. 2B, the mobile unit 120 includes a gripper 124. The holder 124 is suspended by the circuit board 140 to be suspended from the developing device 103, the cleaning device 104, the deoxidizing device 106, the pre-plating processing device 108, the drying device 110, and the plating device 112. in. The holder 124 has a movable property in the vertical direction between the developing device 103 and the plating device 112.

透過夾持器124之配置,待製電路板140同樣可於連續式製作設備100之中依序經過各裝置且依序地進行各項製程。再者,夾持器124提供待製電路板140於水平與鉛直方向上的自由度,即橫向與縱向或是一對互相垂直之方向上的自由 度,藉以使待製電路板140可滿足其於各裝置中進行製程時的位置。此外,於移動單元120採夾持器124配置的實施例中,待製電路板140於連續式製作設備100之中所進行之傳輸可視為垂直式傳輸,即待製電路板140於傳輸過程是呈鉛直方向放置。Through the configuration of the holder 124, the circuit board 140 to be manufactured can also sequentially pass through the devices in the continuous manufacturing apparatus 100 and sequentially perform various processes. Moreover, the holder 124 provides the degree of freedom of the circuit board 140 to be formed in the horizontal and vertical directions, that is, the horizontal and vertical directions or a pair of mutually perpendicular directions. The degree is such that the circuit board 140 to be fabricated can satisfy the position when it is processed in each device. In addition, in the embodiment in which the mobile unit 120 is configured by the holder 124, the transmission of the circuit board 140 to be manufactured in the continuous manufacturing apparatus 100 can be regarded as vertical transmission, that is, the circuit board 140 to be manufactured is in the transmission process. Place it in a vertical direction.

待製電路板140可以透過滾輪122或夾持器124於連續式製作設備100之中進行自動化的傳輸,使得所製造之電路板的良率能獲得提升。除此之外,由於連續式製作設備100之中設置有電鍍前處理裝置108,待製電路板140於電鍍製程中的品質也可以在更進一步被提升,請見以下說明。The circuit board 140 to be fabricated can be automatically transferred through the roller 122 or the holder 124 in the continuous manufacturing apparatus 100, so that the yield of the manufactured circuit board can be improved. In addition, since the pre-plating processing device 108 is provided in the continuous manufacturing apparatus 100, the quality of the circuit board 140 to be fabricated in the electroplating process can be further improved, as described below.

請參照第3A圖至第3C圖,第3A圖至第3C圖繪示第2A圖之電鍍前處理裝置108提供附著促進劑126至待製電路板140於不同實施例的示意圖。第3A圖至第3C圖之說明是以配合連續式製作設備100之移動單元120(請見第2A圖)為滾輪122配置作描述。本實施方式是以多個實施例來說明電鍍前處理裝置108提供附著促進劑126至待製電路板140的不同方式。Referring to FIGS. 3A-3C, FIGS. 3A-3C illustrate schematic views of the pre-plating processing apparatus 108 of FIG. 2A providing the adhesion promoter 126 to the circuit board 140 to be fabricated in different embodiments. The description of FIGS. 3A-3C is described with respect to the configuration of the roller 122 in conjunction with the mobile unit 120 of the continuous production apparatus 100 (see FIG. 2A). This embodiment illustrates, in various embodiments, different ways in which the pre-plating processing apparatus 108 provides the adhesion promoter 126 to the circuit board 140 to be fabricated.

電鍍前處理裝置108可以藉由提供附著促進劑126至待製電路板140,以加強接續於之後的電鍍製程時所使用之具離子溶液的附著力,藉以提高電鍍的品質。舉例而言,當待製電路板140於顯影裝置103(請見第1A圖)先形成有開口或通孔(未繪示)後,電鍍前處理裝置108可以將附著促進劑126提供至待製電路板140的開口或通孔之中,藉由此附著促進劑,電鍍製程中的銅離子溶液於待製電路板140上的附著力可藉由此附著促進劑126提升,以提高銅電鍍填孔的品質。此外, 附著促進劑126也可以改善使用特殊乾膜材料所組成之介層材料於電鍍填孔的效果,其中特殊乾膜材料所組成之介層材料包含感光型(photosensitive)材料。The pre-plating treatment device 108 can enhance the adhesion of the ionic solution used in the subsequent electroplating process by providing the adhesion promoter 126 to the circuit board 140 to be fabricated, thereby improving the quality of the electroplating. For example, when the circuit board 140 to be fabricated is first formed with openings or through holes (not shown) in the developing device 103 (see FIG. 1A), the plating pre-processing device 108 can provide the adhesion promoter 126 to be prepared. Among the openings or through holes of the circuit board 140, by the adhesion promoter, the adhesion of the copper ion solution in the electroplating process to the circuit board 140 to be fabricated can be lifted by the adhesion promoter 126 to improve the copper plating filling. The quality of the hole. In addition, The adhesion promoter 126 can also improve the effect of using a dielectric material composed of a special dry film material for electroplating and filling, wherein the dielectric material composed of the special dry film material comprises a photosensitive material.

第3A圖中,連續式製作設備100更包含噴嘴130,其中噴嘴130設置於電鍍前處理裝置108之中。當待製電路板140透過滾輪122被傳輸至電鍍前處理裝置108之中時,電鍍前處理裝置108可以透過噴嘴130提供附著促進劑126至待製電路板140。附著促進劑126可以附於待製電路板140的表面,或是進入/流入至其開口/通孔之中。In FIG. 3A, the continuous manufacturing apparatus 100 further includes a nozzle 130 in which the nozzle 130 is disposed in the pre-plating processing apparatus 108. When the circuit board 140 to be fabricated is transferred into the pre-plating processing device 108 through the roller 122, the pre-plating processing device 108 can provide the adhesion promoter 126 to the circuit board 140 to be fabricated through the nozzle 130. The adhesion promoter 126 may be attached to the surface of the circuit board 140 to be fabricated or may enter/flow into its opening/via.

第3B圖中,連續式製作設備100更包含印刷頭132,其中印刷頭132設置於電鍍前處理裝置108之中。當待製電路板140透過滾輪122被傳輸至電鍍前處理裝置108之中時,電鍍前處理裝置108可以透過印刷頭132提供附著促進劑126至待製電路板140。同樣地,附著促進劑126可以附於待製電路板140的表面,或是進入/流入至其開口/通孔之中。In FIG. 3B, the continuous manufacturing apparatus 100 further includes a print head 132 in which the print head 132 is disposed in the pre-plating processing apparatus 108. When the circuit board 140 to be fabricated is transferred into the pre-plating processing device 108 through the roller 122, the pre-plating processing device 108 can provide the adhesion promoter 126 to the circuit board 140 to be fabricated through the print head 132. Likewise, the adhesion promoter 126 may be attached to the surface of the circuit board 140 to be fabricated, or may enter/flow into its opening/via.

第3C圖中,電鍍前處理裝置108具有浸漬池128,其中附著促進劑126填充於浸漬池128內,且部分位於電鍍前處理裝置108中的滾輪122位於浸漬池128的液面之下。當待製電路板140透過滾輪122被傳輸至電鍍前處理裝置108之中時,由於部分的滾輪122’位於浸漬池128的液面之下,位於滾輪122’上的待製電路板140也會位於浸漬池128的液面之下,並浸於附著促進劑126之中,如待製電路板140’所示。因此,附著促進劑126可以進入至待製電路板140’的開口或通孔之中。In FIG. 3C, the pre-plating treatment unit 108 has an immersion tank 128 in which the adhesion promoter 126 is filled in the immersion tank 128, and the roller 122 partially located in the pre-plating treatment unit 108 is located below the liquid level of the immersion tank 128. When the circuit board 140 to be manufactured is transferred into the pre-plating processing device 108 through the roller 122, since the portion of the roller 122' is located below the liquid level of the immersion tank 128, the circuit board 140 to be fabricated on the roller 122' will also be It is located below the level of the immersion tank 128 and is immersed in the adhesion promoter 126 as shown by the circuit board 140' to be fabricated. Therefore, the adhesion promoter 126 can enter into the opening or through hole of the circuit board 140' to be fabricated.

當電鍍前處理裝置108完成提供附著促進劑126至待製電路板140後,待製電路板140將藉由滾輪122被傳輸至烘乾裝置110之中,以移除附著於待製電路板140上的附著促進劑126所含之溶劑。例如,藉由烘烤製程所提供之高溫環境,可使附著促進劑126所含之溶劑揮發,其中烘烤製程的溫度與時間可以視附著促進劑126所含之溶劑的揮發溫度而定。After the pre-plating processing device 108 completes providing the adhesion promoter 126 to the circuit board 140 to be fabricated, the circuit board 140 to be fabricated will be transferred into the drying device 110 by the roller 122 to remove the adhesion to the circuit board 140 to be fabricated. The solvent contained in the adhesion promoter 126. For example, the solvent contained in the adhesion promoter 126 may be volatilized by the high temperature environment provided by the baking process, wherein the temperature and time of the baking process may depend on the volatilization temperature of the solvent contained in the adhesion promoter 126.

接著請參照第4A圖至第4C圖,第4A圖至第4C圖繪示第2B圖之電鍍前處理裝置108提供附著促進劑126至待製電路板140於不同實施例的示意圖。第4A圖至第4C圖之說明是以配合連續式製作設備100之移動單元120(請見第2B)為夾持器124配置作描述。同樣地,本實施方式是以多個實施例來說明電鍍前處理裝置108提供附著促進劑126至待製電路板140的不同方式。Referring to FIGS. 4A-4C, FIG. 4A to FIG. 4C are schematic diagrams showing different embodiments of the pre-plating processing apparatus 108 of FIG. 2B providing the adhesion promoter 126 to the circuit board 140 to be fabricated. The description of FIGS. 4A-4C is described in terms of the configuration of the gripper 124 in conjunction with the mobile unit 120 of the continuous manufacturing apparatus 100 (see FIG. 2B). As such, the present embodiment is a different embodiment of the manner in which the pre-plating processing device 108 provides the adhesion promoter 126 to the circuit board 140 to be fabricated in a number of embodiments.

第4A圖與第4B圖中,待製電路板140透過夾持器124懸吊於電鍍前處理裝置108之中。連續式製作設備100可以透過噴嘴130/印刷頭132提供附著促進劑126至待製電路板140,以使附著促進劑126可以附於待製電路板的表面,或是進入/流入至其開口/通孔之中。In FIGS. 4A and 4B, the circuit board 140 to be fabricated is suspended in the pre-plating processing apparatus 108 through the holder 124. The continuous manufacturing apparatus 100 can provide the adhesion promoter 126 to the circuit board 140 to be fabricated through the nozzle 130/print head 132 so that the adhesion promoter 126 can be attached to the surface of the circuit board to be fabricated, or can enter/flow into the opening/ In the through hole.

第4C圖中,待製電路板140透過夾持器124懸吊於電鍍前處理裝置108之中。同樣地,電鍍前處理裝置108具有浸漬池128,其中附著促進劑126填充於浸漬池128內。同前所述,夾持器124可以於鉛直方向上具有可移動性,因此,待製電路板140可以透過夾持器124朝浸漬池移動,並浸於浸漬池128內的附著促進劑126之中,使得附著促進劑126可進入至 其開口或其通孔之中。In FIG. 4C, the circuit board 140 to be fabricated is suspended in the pre-plating processing apparatus 108 through the holder 124. Likewise, the pre-plating treatment unit 108 has an immersion tank 128 in which the adhesion promoter 126 is filled. As described above, the holder 124 can be movable in the vertical direction. Therefore, the circuit board 140 to be manufactured can be moved toward the immersion tank through the holder 124 and immersed in the adhesion promoter 126 in the immersion tank 128. In the middle, the adhesion promoter 126 can be accessed to Its opening or its through hole.

綜上所述,本創作之連續式製作設備透過連續連接(或相接)之各裝置組成,使得待製電路板不用透過人工傳輸的方式,即可自其中的顯影製程輸送至電鍍製程。因此,連續式製作設備可減少待製電路板於各製程之間的傳輸所發生之不預期的外在因素,並藉以提升待製電路板於電鍍製程中的品質。此外,電鍍前處理裝置可以藉由多種方式將附著促進劑提供至待製電路板,例如透過噴嘴、印刷頭或是浸漬池,以加強接續於之後的電鍍製程時所使用之具離子溶液的附著力,藉以提高電鍍的品質。In summary, the continuous production equipment of the present invention is composed of successively connected (or connected) devices, so that the circuit board to be manufactured can be transported from the development process to the electroplating process without manual transmission. Therefore, the continuous manufacturing equipment can reduce the unexpected external factors that occur in the transmission of the circuit board between the various processes, and thereby improve the quality of the circuit board to be fabricated in the electroplating process. In addition, the pre-plating treatment device can provide the adhesion promoter to the circuit board to be fabricated by various means, such as through a nozzle, a print head or a immersion tank, to enhance the adhesion of the ionic solution used in the subsequent electroplating process. Force to improve the quality of plating.

雖然本創作已以實施方式揭露如上,然其並非用以限定本創作,任何熟習此技藝者,在不脫離本創作之精神和範圍內,當可作各種之更動與潤飾,因此本創作之保護範圍當視後附之申請專利範圍所界定者為準。Although the present invention has been disclosed in the above embodiments, it is not intended to limit the present invention, and any person skilled in the art can make various changes and refinements without departing from the spirit and scope of the present invention. The scope is subject to the definition of the scope of the patent application attached.

100‧‧‧連續式製作設備100‧‧‧Continuous production equipment

101‧‧‧壓合裝置101‧‧‧ Pressing device

102‧‧‧曝光裝置102‧‧‧Exposure device

103‧‧‧顯影裝置103‧‧‧Developing device

104‧‧‧清洗裝置104‧‧‧cleaning device

106‧‧‧去氧化裝置106‧‧‧Deoxidation unit

108‧‧‧電鍍前處理裝置108‧‧‧Electroplating pretreatment device

110‧‧‧烘乾裝置110‧‧‧Drying device

112‧‧‧電鍍裝置112‧‧‧Electroplating unit

114‧‧‧異常處理單元114‧‧‧Exception handling unit

Claims (10)

一種連續式製作設備,包含:一顯影裝置;一清洗裝置,連接並接續於該顯影裝置;一去氧化裝置,連接並接續於該清洗裝置;一電鍍前處理裝置,連接並接續於該去氧化裝置,設置以提供一附著促進劑至一待製電路板;一烘乾裝置,連接並接續於該電鍍前處理裝置;以及一電鍍裝置,連接並接續於該烘乾裝置;以及一移動單元,設置以使該待製電路板自該顯影裝置依序通過該清洗裝置、該去氧化裝置、該電鍍前處理裝置、該烘乾裝置與該電鍍裝置。A continuous manufacturing apparatus comprising: a developing device; a cleaning device connected and connected to the developing device; a deoxidizing device connected and connected to the cleaning device; a plating pretreatment device connected and connected to the deoxidizing device a device configured to provide an adhesion promoter to a circuit board to be fabricated; a drying device coupled to and connected to the plating pretreatment device; and a plating device coupled to and connected to the drying device; and a mobile unit The circuit board is configured to sequentially pass the cleaning device, the deoxidizing device, the pre-plating processing device, the drying device, and the plating device from the developing device. 如申請專利範圍第1項之連續式製作設備,其中該移動單元由複數個滾輪組成,其中該些滾輪自該顯影裝置延伸設置至該電鍍裝置。The continuous manufacturing apparatus of claim 1, wherein the moving unit is composed of a plurality of rollers, wherein the rollers are extended from the developing device to the plating device. 如申請專利範圍第2項之連續式製作設備,其中該顯影裝置、該清洗裝置、該去氧化裝置、該電鍍前處理裝置、該烘乾裝置與該電鍍裝置為沿同一配置方向連接,該待製電路板於該些滾輪上之傳輸方向平行於該配置方向。The continuous production apparatus of claim 2, wherein the developing device, the cleaning device, the deoxidizing device, the pre-plating processing device, the drying device, and the plating device are connected in the same configuration direction, The transmission direction of the circuit board on the rollers is parallel to the arrangement direction. 如申請專利範圍第1項之連續式製作設備,其中該移動單元包含一夾持器,該夾持器設置以使該待製電路板懸吊於該顯影裝置、該清洗裝置、該去氧化裝置、該電 鍍前處理裝置、該烘乾裝置與該電鍍裝置的其中一者之中,且該夾持器於該顯影裝置至該電鍍裝置之間與鉛直方向上具有可移動性。The continuous manufacturing apparatus of claim 1, wherein the moving unit comprises a holder, the holder is arranged to suspend the circuit board to be mounted on the developing device, the cleaning device, and the deoxidizing device The electricity Among the pre-plating treatment device, the drying device, and the plating device, and the holder has a movable property in a vertical direction between the developing device and the plating device. 如申請專利範圍第1項之連續式製作設備,其中該電鍍前處理裝置具有一浸漬池,且該附著促進劑填充於該浸漬池內。The continuous production apparatus of claim 1, wherein the plating pretreatment apparatus has an immersion tank, and the adhesion promoter is filled in the immersion tank. 如申請專利範圍第5項之連續式製作設備,更包含複數個滾輪,該些滾輪設置以使該待製電路板自該顯影裝置依序通過該清洗裝置、該去氧化裝置、該電鍍前處理裝置、該烘乾裝置與該電鍍裝置,其中部分位於該電鍍前處理裝置中的該些滾輪位於該浸漬池的液面之下。The continuous manufacturing apparatus of claim 5, further comprising a plurality of rollers arranged to sequentially pass the circuit board to be processed from the developing device to the cleaning device, the deoxidizing device, and the pre-plating treatment The device, the drying device and the plating device, wherein the rollers located in the pre-plating pretreatment device are located below the liquid level of the immersion tank. 如申請專利範圍第1項之連續式製作設備,更包含一噴嘴,設置於該電鍍前處理裝置之中,該電鍍前處理裝置透過該噴嘴提供該附著促進劑。The continuous manufacturing apparatus of claim 1, further comprising a nozzle disposed in the pre-plating processing apparatus, the pre-plating processing apparatus providing the adhesion promoter through the nozzle. 如申請專利範圍第1項之連續式製作設備,更包含一印刷頭,設置於該電鍍前處理裝置之中,該電鍍前處理裝置透過該印刷頭提供該附著促進劑。The continuous manufacturing apparatus of claim 1, further comprising a printing head disposed in the pre-plating processing apparatus, the pre-plating processing apparatus providing the adhesion promoter through the printing head. 如申請專利範圍第1項之連續式製作設備,更包含:一入口,設置於該顯影裝置,用以提供該待製電路板置 入於該連續式製作設備;以及一出口,設置於該電鍍裝置,其中透過該入口置入於該連續式製作設備之中的該待製電路板透過該出口離開該連續式製作設備。The continuous manufacturing apparatus of claim 1, further comprising: an inlet disposed in the developing device for providing the circuit board to be fabricated And the outlet device is disposed in the electroplating device, wherein the circuit board to be fabricated inserted into the continuous manufacturing device through the inlet exits the continuous manufacturing device through the outlet. 如申請專利範圍第1、2或4項之連續式製作設備,更包含:一異常處理單元;以及一異常處理移動單元,設置以輸送位於該顯影裝置、該清洗裝置、該去氧化裝置、該電鍍前處理裝置、該烘乾裝置與該電鍍裝置的其中一者內之異常的該待製電路板至該異常處理單元。The continuous manufacturing apparatus of claim 1, 2 or 4, further comprising: an abnormal processing unit; and an abnormal processing moving unit configured to be transported at the developing device, the cleaning device, the deoxidizing device, The abnormality of the electroplating pretreatment device, the drying device, and the plating device to the abnormal processing unit.
TW104209739U 2015-06-17 2015-06-17 Apparatus for continuous manufacturing TWM511730U (en)

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