TWM502246U - Bearing seat for chip tester - Google Patents

Description

Carrier for wafer tester

The present invention is a carrier for a wafer testing machine, and more particularly a carrier that can carry two wafers at the same time.

矽 Wafer is the main material for making integrated circuits. After the refined bismuth ingot is sliced, it becomes a thick and uniform mirror-like wafer. Various kinds of electronic components, such as transistors, are formed from the wafer. And diodes.

Wafers are the most commonly used semiconductor materials. They are divided into 4", 5", 6", 8", ... 20" and above. The larger the wafer, the more ICs can be produced on the same wafer. The cost can be greatly reduced, but the production technology is more demanding. If the uniformity is insufficient, it will lead to the production of defective products. No matter what kind of wafer, after cutting, it needs to be inspected to avoid Good product output leads to subsequent production problems.

Referring to FIG. 1 , it is a conventional single wafer tester for a carrier 90 on which a wafer is mounted, on which a right alignment sheet 91 and a lower alignment sheet 92 for alignment are disposed. The right edge and the lower edge respectively lie on the right aligning piece 91 and the lower aligning piece 92, so that the wafer C is located at a position corresponding to the probe, and can be detected by the probe.

However, such a conventional carrier 90 can only perform one wafer C at a time. The load is inefficient, and in addition, if the number of inspections is accelerated, the only way is to increase the inspection machine and the carrier 90, which will greatly increase the cost.

In order to overcome the problems of the prior art, the present invention provides a carrier that can be placed on two wafers to be tested, thereby reducing the loading process, improving the efficiency of detection, and overcoming the problems of the prior art.

To achieve the above object, a carrier for a wafer testing machine of the present invention can be used to carry two wafers to be tested, including a body, a lower fixing piece, a right positioning block and a left positioning block. The lower fixing piece is disposed on the seat body. The right positioning block is disposed on the right side of the seat. The left positioning block is disposed on the seat body and is located on an opposite side of the right positioning block. The right positioning block and the lower fixing piece respectively abut on the right side and the lower side of a wafer; the left positioning block and the lower fixing piece are respectively used to abut the left side and the lower side of a wafer.

The wafers can be placed in two sets at the same time, so that the performance of carrying two wafers at a time can be achieved, and the probes for two sets of detection can be matched, and the two sets of wafers can be detected at the same time, thereby achieving the effect of accelerating detection.

Preferably, the right positioning block is combined with a displacement fine adjustment mechanism for changing the relative position of the right positioning block and the base body, thereby performing position adjustment of the wafer and the test probe.

Preferably, the left positioning block is a piece of the body, so that the top wafer can be abutted for the wafer to be used for alignment.

Preferably, the right positioning block is a corner cylinder, the top end of which is abutted against the left end of the wafer, so as to facilitate the alignment.

In order to understand the technical characteristics, content and advantages of the creation and the effects that can be achieved by the examiner, the author will use the drawings in detail and explain the following in the form of the examples, and the drawings used therein The subject matter is only for the purpose of illustration and supplementary instructions. It is not necessarily the true proportion and precise configuration after the implementation of the original creation. Therefore, the proportions and configuration relationships of the attached drawings should not be interpreted or limited in the actual implementation scope. First described.

C‧‧‧ wafer

10‧‧‧ body

30‧‧‧ lower fixed piece

40‧‧‧right positioning block

50‧‧‧Left positioning block

60‧‧‧ Displacement fine-tuning mechanism

Figure 1 is a schematic view of a conventional carrier.

Figure 2 is a top plan view of the present embodiment.

Figure 3 is a perspective view of the present embodiment.

Referring to FIG. 2 and FIG. 3, the carrier for the wafer testing machine of the embodiment can be used to carry two wafers C to be tested, including a body 10, a lower fixing piece 30, and a right. The positioning block 40 and a left positioning block 50 are located.

The seat body 10 is generally known in the art, and the types thereof are complicated. However, those skilled in the art can directly and without any knowledge, and thus will not be described in detail in this embodiment.

The lower fixing piece 30 is disposed on the seat body 10.

The right positioning block 40 is disposed on the right side of the base body 10 and protrudes into the seat body 10. The left positioning block 50 is disposed on the opposite side of the right positioning block 40. The right positioning block 40 and the lower fixing piece 30 are arranged to abut on the right side and the lower side of a wafer C, respectively, thereby achieving the purpose of fixing the position of the wafer C. of. The left positioning block 50 and the lower fixing piece 30 are arranged to abut against the left side and the lower side of the other wafer C, respectively.

As can be seen from the above, the arrangement of the embodiment can separately place two wafers C, so that when the wafer test is performed, the two sets of wafers can be tested at the same time after the initial position adjustment is completed, which can be accelerated. The testing industry is carried out, overcoming the trouble that the prior art can only place one wafer at a time.

Moreover, the right positioning block 40 can be combined with a displacement fine adjustment mechanism 60 for changing the relative position of the right positioning block 40 and the base 10. Since the displacement fine adjustment mechanism 60 can directly and unambiguously know the mechanism and technology for those skilled in the art, the composition thereof will not be described herein.

In addition, the left positioning block 50 can be a piece that protrudes perpendicularly from the upper surface of the base 10. The right positioning block 40 is a corner cylinder with its tip abutting against the wafer C.

The embodiments described above are only for explaining the technical idea and characteristics of the present invention, and the purpose thereof is to enable those skilled in the art to understand the contents of the present invention and implement them according to the scope of the patent. That is, the equivalent changes or modifications made by the people in accordance with the spirit revealed by this creation should still be covered by the scope of the patent of this creation.

C‧‧‧ wafer

10‧‧‧ body

30‧‧‧ lower fixed piece

40‧‧‧right positioning block

50‧‧‧Left positioning block

60‧‧‧ Displacement fine-tuning mechanism

Claims (3)

A carrier for a wafer testing machine, which can be used to carry two wafers to be tested, comprising: a body; a lower fixing piece disposed on the seat body; and a right positioning block disposed on the right side of the seat body And combining a displacement fine adjustment mechanism for changing a relative position of the right positioning block and the base; a left positioning block is disposed on a left side of the base; wherein the right positioning block and the lower fixing piece are respectively used for abutting On the right side and the lower side of a wafer; the left positioning block and the lower fixing piece respectively abut on the left side and the lower side of a wafer. The carrier for a wafer testing machine according to claim 1, wherein the left positioning block is a piece and protrudes perpendicularly from an upper surface of the base. The carrier for a wafer testing machine of claim 2, wherein the right positioning block is a corner cylinder.