TWM481772U - Fluid nozzle - Google Patents

Description

Fluid nozzle

The present invention relates to a fluid nozzle, and more particularly to a fluid nozzle capable of cleaning a substrate such as a semiconductor wafer or a substrate for a display.

Semiconductor wafers are subjected to multiple process steps. Since each wafer process step has a potential source of contamination, there are residues on the wafer surface that can cause defect formation and component failure. In the cleaning process, the fluid nozzle processes the wafer to remove particles and contaminants while keeping the wafer surface clean.

Referring to FIG. 1 and FIG. 2, a conventional fluid nozzle includes a nozzle body 11 having a chamber 111, an air inlet tube 12 disposed above the nozzle body 11 and communicating with the chamber 111, and a water supply flow therein, and a The head side of the head body 11 communicates with the chamber 111 and the inlet pipe 13 through which air flows. The head body 11 further has two sides 112 on the left and right sides of the chamber 111 (only one side 112 of the side faces 112 are shown in FIG. 1 ), a longitudinal extension and opposite ends are respectively connected to the sides 112 . The partition column 113, and a plurality of flow paths 114 spaced apart from each other and communicating between the chamber 111 and the outside, and opposite to the side of the intake pipe 12. The partition column 113 is divided into two when the air flows in, and when the water flows into the chamber 111, the partition column 113 And the design of the chamber 111 causes water to flow in the chamber 111, creating a turbulence. Then, water and air flow out from the flow path 114. Therefore, the use of a fluid jet to clean the surface of the wafer results in poor cleaning and affects the yield of subsequent processes.

Therefore, the object of the present invention is to provide a fluid nozzle that enhances the cleaning effect.

Therefore, the fluid nozzle of the present invention comprises: a nozzle body including a chamber extending in a first direction, and at least one jet flow passage communicating with the chamber, the jet prop having an inlet connecting the chamber, And an outlet opposite to the inlet and communicating with the outside; an intake pipe disposed above the nozzle body and communicating with the top side of the chamber and located on the opposite side of the jet flow path; and a liquid inlet tube The first direction extends into the chamber, the inlet tube having a number of outlets corresponding to the number of inlets of the injection channel and located above the inlet location.

Preferably, the fluid jet head comprises a plurality of jet flow channels formed on the nozzle body at intervals in the first direction, the inlet pipe having a number of inlets corresponding to the jet flow channels and located above the inlets Liquid outlet.

Preferably, the chamber has an upper portion that communicates with the intake pipe, and a lower portion that communicates with the upper portion and the inlet of the injection flow passages, the width of the lower portion being tapered toward the inlet direction.

Preferably, wherein the jet channels are elongated.

The effect of the novel is: through the design of the fluid nozzle, And supplying the treatment liquid and the gas to the fluid nozzle, so that the treatment liquid can be accelerated out of the injection flow channel, thereby increasing the ability and efficiency of cleaning or removing the coating material or the pollutant substance on the surface of the substrate, and facilitating the subsequent process treatment, thereby improving the product quality. rate.

2‧‧‧Substrate

3‧‧‧ sprinkler body

31‧‧ ‧ room

311‧‧‧上段

312‧‧‧ lower section

32‧‧‧Spray runner

321‧‧‧ entrance

322‧‧‧Export

4‧‧‧ gas

5‧‧‧Intake pipe

6‧‧‧Processing fluid

7‧‧‧Inlet pipe

71‧‧‧liquid outlet

D1‧‧‧ first direction

Other features and advantages of the present invention will be apparent from the detailed description of the preferred embodiments illustrated in the accompanying drawings. FIG. 1 and FIG. 2 are schematic cross-sectional views illustrating the prior art; FIG. 3 is a schematic cross-sectional view A first preferred embodiment of the fluid nozzle of the present invention is illustrated; FIGS. 4 and 6 are schematic views illustrating a process of cleaning a substrate by using a fluid jet through a fluid jet; FIG. 5 is a partially enlarged view showing a chamber; FIG. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 8 is a schematic cross-sectional view showing a second preferred embodiment of the fluid nozzle of the present invention; and FIG. 8 is a schematic view showing the process of cleaning a substrate by using a dual fluid through a fluid nozzle.

Before the present invention is described in detail, it should be noted that in the following description, similar elements are denoted by the same reference numerals.

The following description of the preferred embodiments is intended to be illustrative of the specific embodiments Directional terms mentioned in this new model, such as "upper", "lower", "before", "after", "left", "right" Etc. Just refer to the direction of the additional schema. Therefore, the directional terminology used is intended to be illustrative, and not to limit the invention.

Referring to Figures 3 through 5, the first preferred embodiment of the novel fluid ejection head is suitable for cleaning a substrate 2. The fluid jet head comprises a head body 3, an intake pipe 5 through which the gas 4 flows, and an inlet pipe 7 through which the treatment liquid 6 flows. In the present embodiment, the treatment liquid 6 is water.

The head body 3 includes a chamber 31 extending in the first direction D1, and a plurality of jet channels 32 spaced apart from each other in the first direction D1 and communicating with the chamber 31. Each of the injection flow passages 32 is located on the side opposite to the intake pipe 5, and has an inlet 321 that communicates with the chamber 31, and an outlet 322 that is opposite to the inlet 321 and communicates with the outside. Preferably, the chamber 31 has an upper section 311 that communicates with the intake duct 5, and a lower section 312 that communicates the upper section 311 with the inlets 321 of the jet channels 32. The upper section 311 has the same width, and the width of the lower section 312 is tapered toward the inlets 321 , and the diameters and lengths of the jet channels 32 are narrowly designed to facilitate the flow of the treatment liquid 6 through the The chamber 31 and the jet channels 32 increase the fluid velocity.

The intake pipe 5 is disposed above the shower head body 3 and communicates with the top side of the chamber 31.

The inlet pipe 7 extends into the chamber 31 in the first direction D1. The inlet pipe 7 has a number of inlet ports 321 corresponding to the number of inlets 321 of the injection flow path 32 and corresponding to the outlet port 71 above the inlet 321 position.

It should be noted that FIG. 3 is a cross-sectional view, and the opposite sides of the chamber 31 of the head body 3 along the first direction D1 should be sealed. In the closed state, the inlet pipe 7 should be a chamber 31 that communicates with the outside and penetrates the head body 3 in the first direction D1.

The following description uses the present embodiment to clean the substrate 2 by using a two-fluid fluid nozzle.

When the gas 4 enters the chamber 31 by the intake pipe 5, the gas inlet pipe 4 is disposed under the intake pipe 5, so that the gas 4 flows through the inlet pipe 7 to block and divide into two. The gas is further caused to flow down the gas 4 to prevent the gas 4 from directly impacting downward, and the average thrust can be achieved. Meanwhile, since a large amount of the treatment liquid 6 is introduced into the liquid inlet pipe 7, the first direction is D1. Flow, and then through the liquid outlet 71, the treatment liquid 6 is more easily diffused downward to the chamber 31, and since the liquid outlet 71 of the inlet pipe 7 corresponds to the position of the inlet 321 of each of the injection channels 32, Therefore, the treatment liquid 6 flowing out from the liquid outlet 71 quickly flows into the inlet 321 of each of the injection passages 32, and at this time, the gas 4 advances the treatment liquid 6 to flow through the corresponding injection flow path 32 to accelerate the discharge from the outlet 322. .

When a large amount of the treatment liquid 6 is poured into the liquid inlet pipe 7, the treatment liquid 6 is uniformly accumulated in the chamber 31, and the gas 4 is uniformly advanced to flow through the corresponding injection flow path 32 to accelerate the discharge. Through the foregoing design, the ejection processing liquid 6 of each of the ejection channels 32 can be made to have the same rate, and the ejection uniformity can be greatly improved. As shown in Fig. 6, since the surface of the substrate 2 is not flat, there are blocks having undulating protrusions, and the ejection channels 32 passing through the head body 3 are provided to be cleaned by areas which are difficult to protrude in the terrain.

Referring to FIG. 7 and FIG. 8, a second preferred embodiment of the fluid nozzle of the present invention is substantially the same as the first preferred embodiment, and the difference lies in the nozzle. The body 3 includes only a jet flow path 32 having only one liquid outlet 71 corresponding to the position above the inlet 321 . In the present embodiment, the detailed structure of the jet flow path 32 is the same as the detailed structure of each of the jet flow paths 32 of the first embodiment. The second embodiment uses the two-fluid cleaning of the substrate 2 through the fluid ejection head. The process of cleaning the substrate 2 through the fluid ejection head of the first embodiment is the same, and will not be described in detail herein.

In summary, through the design of the fluid nozzle, and the supply of the treatment liquid 6 and the gas 4 to the chamber 31, the gas 4 can be accelerated by the average propelling treatment liquid 6 flowing out of the injection channel 32. Increasing the ability and efficiency of cleaning or removing the coating material or pollutants on the surface of the substrate 2 contributes to the subsequent process processing, thereby improving the yield of the product, so that the object of the present invention can be achieved.

However, the above is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention, that is, the simple equivalent changes and modifications made in accordance with the scope of the present patent application and the contents of the patent specification, All remain within the scope of this new patent.

3‧‧‧ sprinkler body

31‧‧ ‧ room

32‧‧‧Spray runner

321‧‧‧ entrance

322‧‧‧Export

5‧‧‧Intake pipe

7‧‧‧Inlet pipe

71‧‧‧liquid outlet

D1‧‧‧ first direction

Claims (4)

A fluid nozzle includes: a nozzle body including a chamber extending in a first direction, and at least one jet flow passage communicating with the chamber, the jet prop having an inlet communicating with the chamber, and a reverse An inlet pipe connected to the outside; an intake pipe disposed above the nozzle body and communicating with the top side of the chamber and located on the opposite side of the jet flow channel; and a liquid inlet pipe along the first The direction extends into the chamber, the inlet tube having a number of inlets corresponding to the injection passage and corresponding to the outlet above the inlet position. The fluid jet head according to claim 1, comprising a plurality of jet flow passages formed on the nozzle body at intervals in the first direction, the inlet pipe having a number of inlets corresponding to the jet flow passages and located at the inlets Above the liquid outlet. The fluid jet head according to claim 2, wherein the chamber has an upper portion communicating with the intake pipe, and a lower portion connecting the upper portion and the inlet of the jet flow passages, the width of the lower portion being adjacent to the inlets The direction is shrinking. The fluid jet head according to claim 2, wherein the jet flow paths are elongated.