TWM481113U - Robot arm paddle with embedded leakproof vacuum for stable wafer suction - Google Patents

Description

Machine with internal vacuum protection against leakage and stable suction of wafers Arm leaf

The present invention relates to a mechanical manipulator blade with a built-in vacuum anti-leakage stable suction wafer, and particularly relates to a multi-point bearing vacuum suction technology using a male and female snap to overcome a wafer having a deformation amount. The film also quickly and stably moves the carrier.

The ever-changing technology makes a large number of wafers widely used in many electronic products. However, the production and fabrication of wafers are extremely sophisticated processing techniques. Therefore, it is usually necessary to use various kinds of special-purpose robotic arms to carry out transportation and other operations. In general, the wafer manufacturing process must be carried by the vacuum robot arm with a completely flat front end. Because of the manufacturing process requirements, two wafer bonding or multiple etching and baking processes are often required. The flatness deformation of the wafer is abnormally large, causing the front end of the conventional vacuum robot arm to flatten the end face, and it is not able to effectively conform to the surface of the wafer with the deformed crystal amount, which leads to an increase in the defective rate of the unsteady suction and fixed transmission. The need for the industry in the era of non-conformity, the need for improvement is also necessary.

In view of this, the creator of the case believes that the ability to improve the ability A solution to the dilemma is to bury the first research and development, and actively engage in the creative experiment of the tired moon, which is the pioneer of the creation of more practical effects than the past.

The main purpose of the present invention is to provide a mechanical arm blade with a built-in vacuum anti-leakage stable suction wafer, which comprises a blade, a number of carriers, a number of venting ring plugs, a number O-ring and a cover. The film is composed of the upper carrier carrier to provide a variety of deformation wafers to ensure complete vacuum adsorption, fast and accurate transfer of transport, and improve product yield characteristics.

The second objective of the present invention is to provide a mechanical arm leaf plate having an inner-type vacuum anti-leakage stable suction wafer, and specifically, the other end of each positioning hole is provided with a reaming hole for a venting ring plug. The upper end of the stagnation ring plug is designed with an outer convex ring, which can be characterized by pressing the lower end ring surface of the bearing seat to prevent leakage.

Another object of the present invention is to provide a mechanical arm blade with an internal vacuum type anti-leakage stable suction wafer, which means that a concave ring is arranged in the middle of the anti-leak ring plug, which can be forced into an O-ring. The tightening of the holes forms a second anti-leakage performance.

Another object of the present invention is to provide a mechanical arm leaf plate having an inner vacuum type anti-leakage stable suction wafer, and the outer side of the reaming hole is provided with an outwardly increasing stepped inner groove and a concave surface. The grooves are connected to each other to extend and connect the rear end vent holes, so that the other corresponding external The groove-shaped cover sheet is tightly integrated, and the inner groove is formed by forming a vacuum evacuation flow path inside the blade.

A‧‧‧ wafer

B‧‧‧Vacuum exhaust runner

1‧‧‧leaf board

12A, 12B, 12C, 12D‧‧‧ positioning holes

13‧‧‧Reaming

15‧‧‧ Inside groove

16‧‧‧ outer groove

17‧‧‧ venting holes

2‧‧‧bearing seat

21‧‧‧ concave ring

22‧‧‧Sucking tray

23‧‧‧Inhalation hole

3‧‧‧Stop venting ring plug

32‧‧‧Outer ring

35‧‧‧ concave ring

36‧‧‧through hole

5‧‧‧O-ring

6‧‧‧ Cover

Figure 1 is a perspective view of the implementation of the present creation.

Figure 2 is an exploded perspective view of the components of the present invention.

The third figure is a schematic diagram of the function of the outer ring of the outer ring and the outer hole of the O-ring.

Figure 4 is a schematic cross-sectional view of the flipped portion of the present creation.

Figure 5 is a schematic view showing the formation of a vacuum exhaust runner extending into the rear exhaust hole in the groove of the present invention.

Fig. 6 is a schematic diagram showing the function of the wafer for the bonding deformation of the carrier of the present invention.

In order to enable the reviewing committee to further understand the present work, a preferred embodiment will be described below, and the contents of the present creation and the functions achieved by the present invention will be described in detail with reference to the drawings and drawings: see Figure 2 As shown, the present invention provides a mechanical arm blade with a built-in vacuum venting stable suction wafer, which comprises a blade (1), a number of carriers (2), and a number of venting ring plugs (3). a plurality of O-rings and (5) a cover sheet (6); the leaf plate (1) is a thin plate There are at least one positioning hole (12A, 12B, 12C, 12D), and each of the positioning holes is provided with a reaming hole (13) at the other end, and the outer side of each reaming hole is provided with an outwardly increasing stepped inner groove ( 15) and the outer groove (16) is integrally connected to the rear end to extend the rear end venting hole (17); the bearing seat (2) is an elastic rubber material body, and the lower end of the outer ring of the body is provided with a concave ring ( 21) can be inserted into each positioning hole, the upper end of which has an adsorption disk (22) which is expanded upwardly, and a suction hole (23) is arranged in the center of the adsorption disk; the leakage ring plug (3) is available for relative a circular ring plug that is inserted into the reaming hole (13), the outer ring of the ring plug is designed with an outer convex ring (32), wherein the inner ring is provided with a concave ring (35), and a through hole is provided in the upper end to the lower end of the ring plug (36). The O-ring (5) is an elastic material O-ring for inserting the concave ring (35); a cover sheet (6) is a thin plate cover sheet corresponding to the shape of the outer groove (16). The constructor of the main components of this creation.

For the implementation of this creation, please refer to the figure 3, which refers to the positioning hole (12A) on the leaf board. Firstly, the concave ring (21) of each bearing seat (2) is pressed and forced to form an inner fastening body. The efficiency is reduced by the main improvement of the venting ring plug (3). The upper end of the outer ring (32) is pressed upwards to the lower end of the bearing seat, resulting in the positioning is not easy to fall off and prevent leakage, and then the middle of the venting ring is recessed. The ring is provided with an O-ring (5), and the inner diameter surface of the reaming hole (13) is formed to form a second anti-leakage effect, and the anti-blocking bearing seat is easy to loose or fall off, which is easy to generate leakage and pressure relief. innovator.

Please refer to Figure 4, Figure 5 and Figure 6, and borrow another The cover plate (6) corresponding to the outer groove (16) is shaped to be close to the outer groove of the blade, so that the inner groove (15) forms a vacuum exhaust runner (B) inside the blade. The vent hole (17) of the rear end is extended, and the outer ring of the suction disk (22) at the upper end of each of the carrier (2) is protruded from the surface of the blade (1) to provide unevenness. When the wafer (A) is seated, the rear exhaust hole (17) is evacuated, the vacuum exhaust passage (B) is passed through the through hole (36) of each venting plug, and the center of the absorbing plate of the carrier The suction hole (23), forcing the outer ring of the suction disk to be subjected to vacuum pressure eversion, can fully conform to the wafer performance, and then the carrier seat provided at multiple points above provides a variety of deformation wafers to ensure crystal The wafer is completely vacuum-adsorbed, stable and fast, and conveys the transportability, and the industrial utilization of the product yield is improved.

However, the above is only the preferred embodiment of the present invention. When it is not possible to limit the scope of the creation of the present invention, the simple equivalent changes made by applying the scope of the patent application and the contents of the specification and the drawings are Modifications shall remain within the scope of this Creative Patent and shall be given to Chen Ming.

In summary, the creation of this creation is improved, the traditional single suction head is improved, and its efficacy is not achieved by the prior art. In order to meet the requirements of the new patent application, the application is filed according to law.

1‧‧‧leaf board

12A, 12B, 12C, 12D‧‧‧ positioning holes

13‧‧‧Reaming

15‧‧‧ Inside groove

16‧‧‧ outer groove

17‧‧‧ venting holes

2‧‧‧bearing seat

21‧‧‧ concave ring

22‧‧‧Sucking tray

23‧‧‧Inhalation hole

3‧‧‧Stop venting ring plug

32‧‧‧Outer ring

35‧‧‧ concave ring

36‧‧‧through hole

5‧‧‧O-ring

6‧‧‧ Cover

Claims (3)

The utility model relates to a mechanical arm leaf plate with an inner-type vacuum anti-leakage stable suction wafer, comprising: a leaf plate, wherein at least one positioning hole is arranged on a thin plate piece, and each of the positioning holes is provided with a reaming hole at the other end. The outer side of the reaming is provided with an outwardly increasing stepped inner groove and an outer groove, which are integrally connected to each other to extend a rear end of the venting opening; and the plurality of carrying seats are an elastic rubber material body, and the lower end outer ring of the body The middle section is provided with a concave ring which can be inserted into the positioning hole of each leaf plate, and the upper end thereof is provided with an adsorption disk which is expanded upward and expanded, and a suction hole is arranged in the center of the adsorption disk; a cover piece is a corresponding concave The slot-shaped thin plate cover piece can be integrally formed with the outer groove of the close-fitting leaf plate, so that the inner groove forms a vacuum exhaust flow path inside the blade plate; thereby, the outer ring of the suction disk opening of the upper end of each carrier is protruded In the design of the height difference of the blade surface, when the uneven wafer is provided, the vacuum exhaust channel can be pumped to force the outer ring of the adsorption disk to be subjected to vacuum pressure eversion to achieve a multi-point fully bonded wafer. Tablet adsorption is stable, fast and accurate, and transportability is Candidates. The mechanical arm blade having the inner-type vacuum anti-leakage stable suction wafer according to claim 1, wherein the reaming hole of the blade is provided with a stop ring plug, and the outer ring of the ring plug is provided with an outer ring. Convex ring, can be pressed upwards The lower end of the bearing seat has a function of not easily falling off and preventing leakage, and a through hole is provided at the upper end to the lower end of the ring plug. The mechanical arm blade with the internal vacuum type anti-leakage stable suctioning wafer as claimed in claim 1, wherein the middle portion of the anti-leakage ring plug is provided with a concave ring for an O-ring to be inserted, and the outer force is tight. The reaming inner diameter surface forms an anti-leakage effect.