TWM481113U - Robot arm paddle with embedded leakproof vacuum for stable wafer suction - Google Patents
Robot arm paddle with embedded leakproof vacuum for stable wafer suction Download PDFInfo
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- TWM481113U TWM481113U TW103201739U TW103201739U TWM481113U TW M481113 U TWM481113 U TW M481113U TW 103201739 U TW103201739 U TW 103201739U TW 103201739 U TW103201739 U TW 103201739U TW M481113 U TWM481113 U TW M481113U
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- ring
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- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Description
本創作係有關於一種具有內崁式真空防洩穩定吸取晶圓片之機械手臂葉板,尤其涉及一種應用公母崁扣之多點承載座真空吸取之技術,以克服具有變形量之晶圓片亦能快速穩定移動運送者。The present invention relates to a mechanical manipulator blade with a built-in vacuum anti-leakage stable suction wafer, and particularly relates to a multi-point bearing vacuum suction technology using a male and female snap to overcome a wafer having a deformation amount. The film also quickly and stably moves the carrier.
科技日新月異,使得各種晶圓片大量應用在許多電子產品上,然而晶圓片之生產與製作屬極為精密之加工技術,故其通常需藉助各種特殊功能之機械手臂來進行運輸傳遞等作業,查一般晶圓片製造過程亦須賴由前端完全平整之真空機械手臂進行吸取搬運傳輸,因其因製作製程之需求,常需要兩片晶圓片黏合或多道蝕刻、烘烤等製程,而導致晶圓片之平整性變形量異常變大,致使傳統真空機械手臂前端平整吸取端面,無法有效貼合具變形晶量之晶圓片表面,而導致非穩固吸取固定傳輸致產品不良率攀升,實不合現時代業界所需,極待改進之必要性也。The ever-changing technology makes a large number of wafers widely used in many electronic products. However, the production and fabrication of wafers are extremely sophisticated processing techniques. Therefore, it is usually necessary to use various kinds of special-purpose robotic arms to carry out transportation and other operations. In general, the wafer manufacturing process must be carried by the vacuum robot arm with a completely flat front end. Because of the manufacturing process requirements, two wafer bonding or multiple etching and baking processes are often required. The flatness deformation of the wafer is abnormally large, causing the front end of the conventional vacuum robot arm to flatten the end face, and it is not able to effectively conform to the surface of the wafer with the deformed crystal amount, which leads to an increase in the defective rate of the unsteady suction and fixed transmission. The need for the industry in the era of non-conformity, the need for improvement is also necessary.
鑒此,本案創作人乃認為就吸取能力改良能 一解困境,乃埋首創研,並積極從事累月之創作實驗,終為本創作較往昔更增益實用效果之首創者。In view of this, the creator of the case believes that the ability to improve the ability A solution to the dilemma is to bury the first research and development, and actively engage in the creative experiment of the tired moon, which is the pioneer of the creation of more practical effects than the past.
本創作之主要目的係提供一種具有內崁式真空防洩穩定吸取晶圓片之機械手臂葉板,係指包括由一葉板、數承載座、數止洩環塞、數O型環及一蓋片所組成,藉以上方承載座承載座提供各種變形量之晶圓片座落,予確保完全真空吸附穩定快速精準傳遞運輸性,俾提昇產品良率為其特徵者。The main purpose of the present invention is to provide a mechanical arm blade with a built-in vacuum anti-leakage stable suction wafer, which comprises a blade, a number of carriers, a number of venting ring plugs, a number O-ring and a cover. The film is composed of the upper carrier carrier to provide a variety of deformation wafers to ensure complete vacuum adsorption, fast and accurate transfer of transport, and improve product yield characteristics.
本創作之次要目的係提供一種具有內崁式真空防洩穩定吸取晶圓片之機械手臂葉板,特指該各定位孔另端設有擴孔可供內崁置有一止洩環塞,其止洩環塞上端設計有一外凸環,可向上迫緊承載座下端環面發揮防漏氣功能為其特徵者。The second objective of the present invention is to provide a mechanical arm leaf plate having an inner-type vacuum anti-leakage stable suction wafer, and specifically, the other end of each positioning hole is provided with a reaming hole for a venting ring plug. The upper end of the stagnation ring plug is designed with an outer convex ring, which can be characterized by pressing the lower end ring surface of the bearing seat to prevent leakage.
本創作之另一目的係提供一種具有內崁式真空防洩穩定吸取晶圓片之機械手臂葉板,乃指該止洩環塞中段設有一凹環,可供一O型環崁入外迫緊擴孔形成第二道防漏氣效能為其特徵者。Another object of the present invention is to provide a mechanical arm blade with an internal vacuum type anti-leakage stable suction wafer, which means that a concave ring is arranged in the middle of the anti-leak ring plug, which can be forced into an O-ring. The tightening of the holes forms a second anti-leakage performance.
本創作之又一目的係提供一種具有內崁式真空防洩穩定吸取晶圓片之機械手臂葉板,復指該該各擴孔外側則設有向外遞增階梯式之內凹槽及外凹槽,予相互連接一體延伸銜接後端排氣孔,得以另一相對應外 凹槽形狀之蓋片密合一體,而使內凹槽形成葉板內部真空排氣流道為其特徵者。Another object of the present invention is to provide a mechanical arm leaf plate having an inner vacuum type anti-leakage stable suction wafer, and the outer side of the reaming hole is provided with an outwardly increasing stepped inner groove and a concave surface. The grooves are connected to each other to extend and connect the rear end vent holes, so that the other corresponding external The groove-shaped cover sheet is tightly integrated, and the inner groove is formed by forming a vacuum evacuation flow path inside the blade.
A‧‧‧晶圓片A‧‧‧ wafer
B‧‧‧真空排氣流道B‧‧‧Vacuum exhaust runner
1‧‧‧葉板1‧‧‧leaf board
12A、12B、12C、12D‧‧‧定位孔12A, 12B, 12C, 12D‧‧‧ positioning holes
13‧‧‧擴孔13‧‧‧Reaming
15‧‧‧內凹槽15‧‧‧ Inside groove
16‧‧‧外凹槽16‧‧‧ outer groove
17‧‧‧排氣孔17‧‧‧ venting holes
2‧‧‧承載座2‧‧‧bearing seat
21‧‧‧凹環21‧‧‧ concave ring
22‧‧‧吸附盤22‧‧‧Sucking tray
23‧‧‧吸入孔23‧‧‧Inhalation hole
3‧‧‧止洩環塞3‧‧‧Stop venting ring plug
32‧‧‧外凸環32‧‧‧Outer ring
35‧‧‧凹環35‧‧‧ concave ring
36‧‧‧通孔36‧‧‧through hole
5‧‧‧O型環5‧‧‧O-ring
6‧‧‧蓋片6‧‧‧ Cover
第1圖係本創作之實施立體示意圖。Figure 1 is a perspective view of the implementation of the present creation.
第2圖係本創作之元件分解立體示意圖。Figure 2 is an exploded perspective view of the components of the present invention.
第3圖係本創作之外凸環迫緊承載座及O型環外迫緊擴孔防漏氣功能示意圖。The third figure is a schematic diagram of the function of the outer ring of the outer ring and the outer hole of the O-ring.
第4圖係本創作之翻轉部分剖面示意圖。Figure 4 is a schematic cross-sectional view of the flipped portion of the present creation.
第5圖係本創作之內凹槽形成真空排氣流道延伸銜接後端排氣孔示意圖。Figure 5 is a schematic view showing the formation of a vacuum exhaust runner extending into the rear exhaust hole in the groove of the present invention.
第6圖係本創作之承載座吸取貼合變形量晶圓片功能示意圖。Fig. 6 is a schematic diagram showing the function of the wafer for the bonding deformation of the carrier of the present invention.
為使審查委員對本創作能進一步的瞭解,以下茲舉一較佳實施例,並配合圖示、圖號,將本創作之構成內容及其所達成的功效詳細說明如后:請參閱第2圖所示,本創作係提供一種具有內崁式真空防洩穩定吸取晶圓片之機械手臂葉板,乃包括由一葉板(1)、數承載座(2)、數止洩環塞(3)、數O型環及(5)一蓋片(6)所組成;葉板(1),為一薄板片上 至少設有一個以上之定位孔(12A、12B、12C、12D),其各定位孔另端設有一擴孔(13),該各擴孔外側則設有向外遞增階梯式之內凹槽(15)及外凹槽(16),予相互連接一體延伸銜接後端排氣孔(17);承載座(2),為一彈性橡膠材質本體,該本體下端外環中段設有一內凹環(21)可崁入各定位孔,其上端設有向上開口外擴之吸附盤(22),而吸附盤中央則鑿設有一吸入孔(23);止洩環塞(3),為可供相對崁入擴孔(13)之圓形環塞,該環塞上端外環設計有一外凸環(32),其中段設有一凹環(35),環塞中央上端至下端設有一通孔(36);O型環(5),為一彈性材質O型環,供套入凹環(35);一蓋片(6),為一相對應外凹槽(16)形狀之薄板蓋片,為本創作主要元件之構造者。In order to enable the reviewing committee to further understand the present work, a preferred embodiment will be described below, and the contents of the present creation and the functions achieved by the present invention will be described in detail with reference to the drawings and drawings: see Figure 2 As shown, the present invention provides a mechanical arm blade with a built-in vacuum venting stable suction wafer, which comprises a blade (1), a number of carriers (2), and a number of venting ring plugs (3). a plurality of O-rings and (5) a cover sheet (6); the leaf plate (1) is a thin plate There are at least one positioning hole (12A, 12B, 12C, 12D), and each of the positioning holes is provided with a reaming hole (13) at the other end, and the outer side of each reaming hole is provided with an outwardly increasing stepped inner groove ( 15) and the outer groove (16) is integrally connected to the rear end to extend the rear end venting hole (17); the bearing seat (2) is an elastic rubber material body, and the lower end of the outer ring of the body is provided with a concave ring ( 21) can be inserted into each positioning hole, the upper end of which has an adsorption disk (22) which is expanded upwardly, and a suction hole (23) is arranged in the center of the adsorption disk; the leakage ring plug (3) is available for relative a circular ring plug that is inserted into the reaming hole (13), the outer ring of the ring plug is designed with an outer convex ring (32), wherein the inner ring is provided with a concave ring (35), and a through hole is provided in the upper end to the lower end of the ring plug (36). The O-ring (5) is an elastic material O-ring for inserting the concave ring (35); a cover sheet (6) is a thin plate cover sheet corresponding to the shape of the outer groove (16). The constructor of the main components of this creation.
本創作之實施,請參閱第3圖所示,係指該葉板上之定位孔(12A),先提供各承載座(2)之凹環(21)擠壓迫入形成內崁扣固一體效能;復藉由本案主要改良之止洩環塞(3)上端外凸環(32)向上迫緊承載座下端環面,產生定位不易脫落與防漏氣功能,再藉止洩環塞中段凹環崁置有一O型環(5),得外迫緊擴孔(13)內徑面形成第二道防漏氣效能,徹底防堵承載座易鬆動或脫落等易產生漏氣洩壓缺憾之創新者。For the implementation of this creation, please refer to the figure 3, which refers to the positioning hole (12A) on the leaf board. Firstly, the concave ring (21) of each bearing seat (2) is pressed and forced to form an inner fastening body. The efficiency is reduced by the main improvement of the venting ring plug (3). The upper end of the outer ring (32) is pressed upwards to the lower end of the bearing seat, resulting in the positioning is not easy to fall off and prevent leakage, and then the middle of the venting ring is recessed. The ring is provided with an O-ring (5), and the inner diameter surface of the reaming hole (13) is formed to form a second anti-leakage effect, and the anti-blocking bearing seat is easy to loose or fall off, which is easy to generate leakage and pressure relief. innovator.
請參閱第4圖、第5圖及第6圖所示,另藉 由一蓋片(6)相對應外凹槽(16)形狀可供密合葉板外凹槽一體,得使內凹槽(15)於葉板內部形成一真空排氣流道(B),予延伸銜接後端之排氣孔(17),再以各承載座(2)上端吸附盤(22)開口外環凸伸於葉板(1)面之高低落差設計,得提供不平整之晶圓片(A)座落時,便以後端排氣孔(17)實施抽氣,經真空排氣流道(B)通過各洩環塞之通孔(36),及承載座吸附盤之中央吸入孔(23),得迫使吸附盤外環受真空壓力外翻可完全貼合晶圓片效能,進而以上方多點設立之承載座提供各種變形量之晶圓片座落時,以確保晶圓片完全真空吸附穩定快速精準傳遞運輸性,俾提昇產品良率之產業利用性者。Please refer to Figure 4, Figure 5 and Figure 6, and borrow another The cover plate (6) corresponding to the outer groove (16) is shaped to be close to the outer groove of the blade, so that the inner groove (15) forms a vacuum exhaust runner (B) inside the blade. The vent hole (17) of the rear end is extended, and the outer ring of the suction disk (22) at the upper end of each of the carrier (2) is protruded from the surface of the blade (1) to provide unevenness. When the wafer (A) is seated, the rear exhaust hole (17) is evacuated, the vacuum exhaust passage (B) is passed through the through hole (36) of each venting plug, and the center of the absorbing plate of the carrier The suction hole (23), forcing the outer ring of the suction disk to be subjected to vacuum pressure eversion, can fully conform to the wafer performance, and then the carrier seat provided at multiple points above provides a variety of deformation wafers to ensure crystal The wafer is completely vacuum-adsorbed, stable and fast, and conveys the transportability, and the industrial utilization of the product yield is improved.
惟以上所述者,僅為本創作之較佳實施例而已,當不能以此限定本創作實施之範圍,故舉凡運用本創作申請專利範圍及說明書及圖式內容所作之簡單的等效變化與修飾,皆應仍屬本創作專利涵蓋之範圍內,合予陳明。However, the above is only the preferred embodiment of the present invention. When it is not possible to limit the scope of the creation of the present invention, the simple equivalent changes made by applying the scope of the patent application and the contents of the specification and the drawings are Modifications shall remain within the scope of this Creative Patent and shall be given to Chen Ming.
綜上所述,本創作構造改良,改良傳統單一吸取頭缺失,且其功效確非昔技所能達到,為符合新型專利之申請要件,爰依法提出申請。In summary, the creation of this creation is improved, the traditional single suction head is improved, and its efficacy is not achieved by the prior art. In order to meet the requirements of the new patent application, the application is filed according to law.
1‧‧‧葉板1‧‧‧leaf board
12A、12B、12C、12D‧‧‧定位孔12A, 12B, 12C, 12D‧‧‧ positioning holes
13‧‧‧擴孔13‧‧‧Reaming
15‧‧‧內凹槽15‧‧‧ Inside groove
16‧‧‧外凹槽16‧‧‧ outer groove
17‧‧‧排氣孔17‧‧‧ venting holes
2‧‧‧承載座2‧‧‧bearing seat
21‧‧‧凹環21‧‧‧ concave ring
22‧‧‧吸附盤22‧‧‧Sucking tray
23‧‧‧吸入孔23‧‧‧Inhalation hole
3‧‧‧止洩環塞3‧‧‧Stop venting ring plug
32‧‧‧外凸環32‧‧‧Outer ring
35‧‧‧凹環35‧‧‧ concave ring
36‧‧‧通孔36‧‧‧through hole
5‧‧‧O型環5‧‧‧O-ring
6‧‧‧蓋片6‧‧‧ Cover
Claims (3)
Priority Applications (1)
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TW103201739U TWM481113U (en) | 2014-01-28 | 2014-01-28 | Robot arm paddle with embedded leakproof vacuum for stable wafer suction |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
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TW103201739U TWM481113U (en) | 2014-01-28 | 2014-01-28 | Robot arm paddle with embedded leakproof vacuum for stable wafer suction |
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TWM481113U true TWM481113U (en) | 2014-07-01 |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI644768B (en) * | 2015-05-24 | 2018-12-21 | 大陸商上海微電子裝備(集團)股份有限公司 | Silicon transfer system |
TWI686888B (en) * | 2014-12-06 | 2020-03-01 | 美商克萊譚克公司 | Chucking warped wafer with bellows |
-
2014
- 2014-01-28 TW TW103201739U patent/TWM481113U/en not_active IP Right Cessation
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI686888B (en) * | 2014-12-06 | 2020-03-01 | 美商克萊譚克公司 | Chucking warped wafer with bellows |
TWI644768B (en) * | 2015-05-24 | 2018-12-21 | 大陸商上海微電子裝備(集團)股份有限公司 | Silicon transfer system |
US10254661B2 (en) | 2015-05-24 | 2019-04-09 | Shanghai Micro Electronics Equipment (Group) Co., Ltd. | Silicon wafer transportation system |
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