TWM471932U - Apparatus for substrate coating - Google Patents

Description

Substrate coating device

The present invention relates to a coating device, and more particularly to a substrate coating device.

Referring to FIG. 1 , FIG. 2 and FIG. 3 , a conventional substrate coating apparatus 1 mainly includes a loading platform 11 , a pick-and-place unit 12 , an air pump 13 , a coating unit 14 , and a control unit 15 . The loading platform 11 includes an adsorption zone 111 for a substrate 10 and at least one air channel 112. The air channel 112 forms a plurality of spaced openings 113 on the surface of the adsorption zone 111. The pick-and-place unit 12 is configured to place or take the substrate 10 into the adsorption zone 111 of the loading platform 11 . The air pump 13 communicates with the air passage 112 by a line 16. The coating unit 14 is configured to form a coating layer 17 on the substrate 10 . The control unit 15 is electrically connected to the pick and place unit 12, the air pump 13, and the coating unit 14.

However, the coating process of the substrate coating apparatus 1 is: after the control unit 15 controls the pick-and-place unit 12 to place a substrate 10 on the adsorption area 111 of the stage 11, the control unit 15 controls the air pump 13 to The air passage 112 of the carrying platform 11 is evacuated such that the air pressure of the air passage 112 is smaller than the outside air pressure, whereby the substrate 10 is fixed to the carrying platform 11 through the openings 113 and adsorbed by the air passage 112. The adsorption unit 111; then, the control unit 15 controls the coating unit 14 to form a coating layer 17 on the substrate 10; afterwards, the control unit 15 controls the air pump 13 to stop pumping the ventilation passage 112 to The air supply is performed such that the air pressure of the air passage 112 is greater than the external air pressure, whereby the substrate 10 is pushed outward through the openings 113 by the air pressure of the air passage 112 without being adsorbed and fixed to the loading platform 11. The adsorption zone 111; finally, the control unit 15 controls the pick-and-place unit 12 to take out the substrate 10 on which the coating layer 17 is formed, and take out the adsorption zone 111 of the stage 11.

During the formation of the coating layer 17 by the substrate 10, the air pump 13 continuously draws air for the air passage 112, and the substrate 10 continues to be adsorbed by the adsorption force generated by the openings 113 of the air passage 112. (The bottom surface of the substrate 10 is not uniformly applied to the entire surface, and the partial region corresponding to the opening 113 is subjected to an adsorption force). Generally, the substrate 10 has a thickness of about several hundred micrometers and is malleable and easily deformed. Therefore, the substrate 10 is temporarily deformed under the above-mentioned non-uniform stress, thereby causing uneven thickness of the coating layer 17 formed thereon. . In addition, since particles (not shown) existing between the bottom surface of the substrate 10 and the surface of the adsorption region 111 are uniaxially supported by the bottom surface of the substrate, the substrate 10 receives the openings 113. In the case of strong negative pressure suction, the substrate 10 is conformed to the grain protrusion due to its ductility, and thus the thickness of the coating layer 17 formed thereon is also uneven.

However, under the current requirements of the micro-nano process conditions, the uniform control of the thickness of the coating layer 17 is even more important. Therefore, how to make the thickness of the coating layer 17 uneven during the formation of the coating layer 17 is excluded as much as possible. factor It is the goal of the industry to work together.

Therefore, it is an object of the present invention to provide a substrate coating apparatus having a uniform coating layer thickness.

Therefore, the novel substrate coating device comprises a carrying platform, a pick-and-place unit, a gas pump unit, a coating unit, and a control unit.

The carrying platform includes an adsorption zone for a substrate and at least one air channel. The air passage forms a plurality of spaced apart openings in the surface of the adsorption zone.

The pick-and-place unit is configured to place or take the substrate into an adsorption zone of the carrier.

The air pump unit includes an air pump and a three-way solenoid valve. The two ports of the three-way solenoid valve respectively communicate with the air passage and the air pump through a pipeline, and the other port communicates with the outside atmosphere.

The coating unit is configured to form a coating layer on the substrate.

The control unit is electrically connected to the pick and place unit, the air pump, the three-way solenoid valve, and the coating unit.

The coating process of the substrate coating device is: the control unit controls the pick-and-place unit to place a substrate on the adsorption area of the loading platform, and the control unit controls the three-way electromagnetic valve to communicate only the air pump and the air passage And controlling the air pump to pump the air passage such that the air pressure of the air passage is smaller than the outside air pressure, whereby the substrate is fixed to the adsorption zone of the loading platform through the openings through the openings; The control unit controls the three-way solenoid valve to communicate only the air passage and the outside air. The air pressure of the air passage is equal to the outside air pressure; then, the control unit controls the coating unit to form a coating layer on the substrate; afterwards, the control unit controls the three-way solenoid valve to communicate only the air pump and the air Channel and controlling the air pump to stop pumping for the air passage to supply air, so that the air pressure of the air passage is not less than the outside air pressure, whereby the substrate is not adsorbed and fixed to the adsorption zone of the loading platform; And the control unit controls the pick-and-place unit to take out the substrate on which the coating layer is formed and take out the adsorption area of the loading platform.

The utility model has the advantages that the three-way electromagnetic valve of the air pump unit and the air pump cooperate to fix the substrate to the adsorption zone of the loading platform, and the air channel is firstly evacuated, whereby the substrate is adsorbed. The adsorption zone fixed to the loading platform, and then the air pressure of the air passage is equal to the external air pressure, because the flowing air rubs the substrate and the adsorption zone to form the substrate and the adsorption zone respectively during the pumping process. Different electrical charges are accumulated, but the substrate can be fixed to the adsorption region by the electrostatic attraction force formed by the accumulated charge, but the substrate is uniformly electrostatically fixed to the adsorption region, so the substrate is not caused The deformation further makes the thickness of the coating layer formed on the substrate uniform.

2‧‧‧bearing station

21‧‧‧Adsorption zone

22‧‧‧Air passage

221‧‧‧ openings

23‧‧‧ thimble

3‧‧‧ pick and place unit

4‧‧‧Air pump unit

41‧‧‧Air pump

42‧‧‧Three-way solenoid valve

43‧‧‧pipe

5‧‧‧ Coating unit

6‧‧‧Sensor unit

61‧‧‧ Coating Start Sensor

62‧‧‧ Coating End Sensor

7‧‧‧Control unit

8‧‧‧Substrate

80‧‧‧coating layer

A‧‧‧Coating path

Other features and advantages of the present invention will be apparent from the detailed description of the preferred embodiments of the accompanying drawings, wherein: FIG. 1 is a schematic diagram illustrating a component of a conventional substrate coating apparatus; FIG. A cross-sectional view showing a conventional air pump of the substrate coating device FIG. 3 is a schematic view showing a control unit of the substrate coating apparatus electrically connecting a pick-and-place unit, the air pump and a coating unit; FIG. 4 is a schematic view FIG. 5 is a schematic view showing the electrical connection relationship between a control unit and other components of the preferred embodiment; FIG. 6 is a cross-sectional view showing the preferred embodiment of the preferred embodiment Figure 7 is a cross-sectional view showing one of the coating processes of the preferred embodiment; Figure 8 is a cross-sectional view showing one of the coating processes of the preferred embodiment; Figure 9 is a cross-sectional view illustrating One of the coating processes of the preferred embodiment; and FIG. 10 is a cross-sectional view illustrating one of the coating processes of the preferred embodiment.

Referring to FIG. 4, FIG. 5 and FIG. 6, a preferred embodiment of the substrate coating apparatus comprises a loading platform 2, a pick-and-place unit 3, a gas pump unit 4, a coating unit 5, and a sensing unit. 6, and a control unit 7.

The loading platform 2 includes an adsorption zone 21 for a substrate 8, at least one air channel 22, and a plurality of thimbles 23 spaced apart from the adsorption zone 21. The surface of the adsorption zone 21 is a plane, and the air channel 22 A plurality of spaced-apart openings 221 are formed in the surface of the adsorption zone 21. The thimbles 23 may protrude upwardly from the surface of the adsorption zone 21 to cooperate with the surface of the substrate 8 away from the adsorption zone 21, or may be constricted downward below the surface of the adsorption zone 21.

The pick-and-place unit 3 is configured to place or take the substrate 8 into the adsorption zone 21 of the loading platform 2. In the preferred embodiment, the pick and place unit 3 includes at least one robotic arm for grasping the substrate 8.

The air pump unit 4 includes an air pump 41 and a three-way solenoid valve 42. The two ports of the three-way solenoid valve 42 are respectively connected to the air passage 22 and the air pump 41 through a line 43, and the other port is in the atmosphere of the outside.

The coating unit 5 coats the substrate 8 along a coating path A to form a coating layer 80.

The sensing unit 6 includes a coating start sensor 61 and a coating end sensor 62. The coating start sensor 61 and the coating end sensor 62 are respectively disposed at the start end and the end end of the coating path A adjacent to the coating unit 5.

The control unit 7 electrically connects the thimble 23, the pick and place unit 3, the air pump 41, the three-way solenoid valve 42, the coating unit 5 and the sensing unit 6.

The coating process of the substrate coating device is: first, referring to FIG. 6, the control unit 7 controls driving the thimbles 23 to protrude upwardly on the surface of the adsorption zone 21 of the loading platform 2; then, the control unit 7 controls The pick and place unit 3 places a substrate 8 After the top edge of the thimble 23, referring to FIG. 7, the control unit 7 controls the thimbles 23 to be constricted downwardly under the surface of the adsorption zone 21 such that the bottom surface of the substrate 8 abuts against the surface of the adsorption zone 21; Next, referring to FIG. 7 , the control unit 7 controls the three-way solenoid valve 42 to communicate only with the air pump 41 and the air passage 22 and control the air pump 41 to evacuate the air passage 22 such that the air pressure of the air passage 22 Less than the outside air pressure, whereby the substrate 8 is adsorbed by the air passage 22 through the openings 221 and fixed to the adsorption zone 21 of the loading platform 2; and then, referring to FIG. 7, the control unit 7 controls the coating. The cloth unit 5 starts to form a coating layer 80 on the substrate 8 along the coating path A. Referring to FIG. 8, when the coating start sensor 61 senses that the coating unit 5 moves through the coating When the starting end of the path A is disposed, the control unit 7 controls the three-way solenoid valve 42 to communicate only with the air passage 22 and the outside air, so that the air pressure of the air passage 22 is equal to the external air pressure, at this time due to the pumping process in the front section. Medium, the flowing air rubs the substrate 8 and the suction Respectively of the surface region 21 on the substrate 8 and the adsorption zone 21 is formed of a different electrical charge accumulation, however, the electrostatic attraction of the substrate 8 may be formed by the above-described charge accumulation is fixed to the adsorption zone 21. Referring to FIG. 9 , when the coating end sensor 62 senses that the coating unit 5 moves past the end end of the coating path A, the control unit 7 controls the three-way solenoid valve 42 to communicate only with the air pump 41. And the air passage 22 and controlling the air pump 41 to stop pumping the air passage 22 to supply air, so that the air pressure of the air passage 22 is greater than the outside air pressure, whereby the substrate 8 is received through the openings 221 The air pressure of the air passage 22 is pushed outward without being adsorbed and fixed to the carrying platform 2 The adsorption zone 21; finally, with reference to FIG. 10, the control unit 7 controls the thimbles 23 to protrude upward again on the surface of the adsorption zone 21 of the carrier 2 to lift the bottom surface of the substrate 8 away from the surface of the adsorption zone 21. Thereafter, the control unit 7 controls the pick-and-place unit 3 to take out the substrate 8 on which the coating layer 80 is formed, and take out the adsorption zone 21 of the stage 2 .

In summary, the substrate squeezing device of the present invention cooperates with the three-way solenoid valve 42 of the air pump unit 4 and the air pump 41 to fix the substrate 8 to the adsorption zone 21 of the carrier 2, mainly for the first The air passage 22 is evacuated, whereby the substrate 8 is adsorbed and fixed to the adsorption zone 21 of the loading platform 2, and then the air pressure of the air passage 22 is equal to the external air pressure, since the air is flowing during the pumping process. Rubbing the substrate 8 and the adsorption region 21 to form different electrical charge accumulations on the substrate 8 and the adsorption region 21, respectively, but the substrate 8 can be fixed to the adsorption region 21 by the electrostatic attraction force formed by the accumulated charge. And the above-mentioned electrostatic attraction force is not so large that the pressing force of the particles applied to the substrate 8 is not excessively large, so that the deformation of the substrate 8 is not caused, and the coating layer formed on the substrate 8 can be caused. The thickness of 80 is uniform, so it can achieve the purpose of this new type.

However, the above is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention, that is, the simple equivalent changes and modifications made in accordance with the scope of the present patent application and the contents of the patent specification, All remain within the scope of this new patent.

2‧‧‧bearing station

21‧‧‧Adsorption zone

221‧‧‧ openings

23‧‧‧ thimble

3‧‧‧ pick and place unit

4‧‧‧Air pump unit

41‧‧‧Air pump

42‧‧‧Three-way solenoid valve

43‧‧‧pipe

5‧‧‧ Coating unit

6‧‧‧Sensor unit

61‧‧‧ Coating Start Sensor

62‧‧‧ Coating End Sensor

8‧‧‧Substrate

A‧‧‧Coating path

Claims (5)

A substrate coating apparatus comprising: a loading platform comprising an adsorption zone for a substrate and at least one air passage, the air passage forming a plurality of spaced openings on a surface of the adsorption zone; a gas pump unit comprising a gas pump and a three-way solenoid valve, wherein two ports of the three-way solenoid valve respectively communicate with the air passage and the air pump through a pipeline, and the other port communicates with the outside atmosphere; a coating unit is used for Forming a coating layer on the substrate; and a control unit electrically connecting the air pump, the three-way solenoid valve and the coating unit. The substrate coating apparatus of claim 1, further comprising a pick-and-place unit for placing or removing the substrate in an adsorption zone of the carrier. The substrate coating apparatus of claim 2, wherein the pick and place unit comprises at least one robot arm for grasping the substrate. The substrate coating apparatus of claim 1, further comprising a sensing unit including a coating start sensor and a coating end sensor, the coating unit is along the coating path of the substrate Coating is performed to form the coating layer, and the coating start sensor and the coating end sensor are disposed adjacent to the start end and the end end of the coating path, respectively. The substrate coating apparatus of claim 1, wherein the loading platform further comprises a plurality of ejector pins spaced apart from the adsorption zone and electrically connected to the control unit, the thimbles protruding upward from the surface of the adsorption zone, It can also be shrunk down the surface of the adsorption zone.