TWM470377U - The wafer cassette plate positioning calibrator - Google Patents

Description

Wafer tray positioning proofreader

The present invention relates to a positioning auxiliary proofing instrument, in particular to a simple structure and easy operation, and is particularly suitable for use in a wafer planting machine for quickly proofreading the wafers of the wafer trays relative to the axis of the rotating support. Disk positioning proofreader.

Most of the optoelectronic components, electronic components, and microelectromechanical components are manufactured using wafers as substrates, and include: thermal oxidation, chemical vapor deposition (CVD), and lithography ( Multiple processes such as lithography), etching, and ion implanting can be used to manufacture the required components.

In the above various wafer processing processes, wafers of different numbers are usually applied to the same processing at the same time to achieve better throughput: wafer implantation by performing ion implantation processing on the wafer. For example, a cloth machine usually puts a plurality of wafers together in a reaction chamber that performs a required process to achieve the purpose of processing one batch of wafers at a time.

A similar wafer planter mainly has a rotating support, the rotating support is provided with a plurality of arms in the radial direction, and a wafer tray for receiving the wafer is respectively disposed at the tail end of each arm, and another The group can reciprocate the clamping arm on the predetermined stroke, and a clamp for fixing the wafer is fixed at the end of the clamping arm. When each movement of the clamping arm reciprocates, the rotating bearing is rotated in a stepwise manner to reach Wafers are placed one by one into the rotating branch The wafers on the wafer are mounted on the wafer tray, or the wafers on the wafer tray of the rotary holder are taken out one by one.

Furthermore, the clip arms must be accurately positioned and calibrated prior to actual operation to ensure that the wafers on the wafer tray are indeed clamped during each capture process, and that the wafers are indeed placed on the rotating branches. On the wafer tray of the seat; however, after the clamp arm is positioned and adjusted, it is necessary to further determine that the total number of wafer turns of the rotary support is maintained relative to the axis of the rotary support (center of the support). The preset distance avoids undue damage to the wafer during the process of fetching/disposing the wafer; therefore, how to provide a timely and rapid proofreading of the distance between the wafer reels and the axis of the rotating support, so that Maintaining the processing capacity of wafer processing equipment has always been a problem that academics and industry are eager to solve.

In view of this, the present invention provides a wafer tray alignment corrector which is simple in structure and easy to operate, and is particularly suitable for use in a wafer planting machine for quickly proofing the distance between each wafer tray and the axis of the rotating support. For its main purpose.

In order to achieve the goal, the wafer tray positioning proofer of the present invention basically comprises: a shaft seat for mounting at the pivot center of the wafer processing equipment; an arm with one end and a shaft seat The shaft shaft is rotatable relative to the shaft seat, and the arm rod is provided with a mounting seat relative to the other end axially coupled to the shaft seat; a calibration member is mounted on the mounting seat of the arm rod and has a relative extension The reference edge at the end of the boom.

By using the above structural features, the wafer tray positioning proofreader of the present invention can be used to position the wafer holder of the wafer holder to be mounted on the pivot base of the wafer processing equipment, and then The shaft seat is an axial rotating arm, so that the tail end of the arm is directed to the wafer tray to be proofed, and the alignment of the edge of the wafer is aligned with the reference edge of the calibration member to achieve rapid proofing of each crystal. Round disk To the purpose of the pivot distance of the rotating support.

According to the above structural feature, the wafer tray positioning corrector further includes a pillow member disposed under the arm for generating a support for the arm.

According to the above structural feature, the arm is composed of a first rod and a second rod, and one end of the first rod is provided with a shaft hole for axially connecting with the shaft seat, relative to the shaft hole. The other end is provided with a first long slot; the mounting base of the arm is disposed at one end of the second rod, and the second rod is provided with at least two first screw holes with respect to the other end of the assembly. Further, at least two screws pass through the first long slot of the first rod and are respectively screwed into the first screw holes of the second rod.

According to the above structural feature, the wafer tray positioning proofer further includes a pillow member installed under the arm for generating a support for the arm; and the arm is made of the first member And a second rod is locked, one end of the first rod is provided with a shaft hole for axially connecting with the shaft seat, and a first long slot is provided at the other end of the shaft hole; The mounting seat is disposed at one end of the second rod, the second rod is provided with at least two first screw holes with respect to the other end of the mounting seat, and at least two screws pass through the first rod The long slots are each screwed into the first screw hole of the second lever.

The mounting base of the arm is provided with a second screw hole, and the calibration component is provided with a second long slot corresponding to the screw hole of the mounting seat, and another screw passes through the second long slot of the calibration component. Screw into the second screw hole of the mount.

The pillow member is provided with a first magnetic element, and the arm is provided with a plurality of second magnetic elements for adsorbing with the first magnetic element at a predetermined interval.

The mounting base of the arm has a sloped shape.

Specifically, the creation of the wafer tray positioning proofer can produce the following effects:

1. Simple structure, can directly correct the wafers of wafer processing equipment directly at the processing site The distance between the disk and the axis of the rotating support.

2. High applicability, the arm can be designed by the first rod and the second rod, which meets the requirements of different specifications of the rotary support.

3. The structure is stable and reliable, and the pillow can be used to produce a stable support for the arm, thereby improving the accuracy of proofreading.

4. It is more convenient to operate. The second long slot design of the calibration piece can be used to quickly fine-tune the reference edge of the calibration piece to extend the length of the end of the arm.

10‧‧‧Rotary support

11‧‧‧ wafer tray

20‧‧‧ shaft seat

21‧‧‧Axis

22‧‧‧Assembly holes

23‧‧‧ screws

30‧‧‧Boom

31‧‧‧First member

311‧‧‧Axis hole

312‧‧‧First long slot

32‧‧‧Second bars

321‧‧‧Assemble

322‧‧‧First screw hole

323‧‧‧Second screw hole

33‧‧‧Second magnetic component

34‧‧‧ screws

40‧‧‧ Calibration parts

41‧‧‧ reference side

42‧‧‧Second long slot

43‧‧‧ screws

50‧‧‧Pillow

51‧‧‧First magnetic component

The first picture is a perspective view of the appearance of the wafer tray positioning proofreader.

The second figure is an exploded view of the structure of the wafer tray positioning proofreader.

The third figure is a schematic diagram of the installation state of the wafer tray positioning proofreader of the present invention.

The fourth picture is a schematic diagram of the operation of the wafer tray positioning proofreader of the present invention.

The present invention mainly provides a wafer tray alignment corrector which is simple in structure and easy to operate, and is particularly suitable for use in a wafer planting machine, and quickly corrects the distance between each wafer tray and the axis of the rotating support; The creation of the wafer tray positioning proofreader appearance stereoscopic view, the second diagram of the creation of the wafer tray positioning proofreader structure exploded view, the third figure of the creation of the wafer tray positioning proofreader use state installation diagram, The wafer tray positioning proofer of the present invention basically comprises: a shaft seat 20 for mounting at the pivot center of the rotary support 10 of the wafer processing apparatus; in implementation, the shaft base 20 has a supply arm The shaft 30 is axially coupled to the shaft portion 21, and a plurality of mounting holes 22 are additionally provided, and the shaft base 20 can be mounted on the screw through the screw 23. The pivot center of the support base 10.

An arm 30 having one end axially coupled to the shaft base 20 for relative rotation with the shaft base 20, the arm rod 30 being provided with a mounting seat 321 opposite to the other end axially coupled to the shaft base 20; The arm 30 can be formed by the first lever member 31 and a second lever member 32 as shown in the drawing.

A calibration member 40 is mounted on the mounting base 321 of the arm 30 and has a reference edge 41 opposite the rear end of the arm 30. In practice, the calibration member 40 can be made of a metal as shown. The plate stamping and bending forms a stepped shape such that the reference edge 41 can be relatively close to the lower edge of the arm 30; and the mounting seat 321 of the arm 30 for mounting the calibration member 40 can be inclined. The reference edge 41 of the calibration member 40 is caused to produce an angle of inclination corresponding to the disk surface of the wafer tray 11.

As shown in the third and fourth figures, the overall structure of the wafer aligning proofreader of the present invention is extremely simple. In use, only the wafer holder 20 of the wafer aligner is mounted on the crystal. At the pivot center of the rotary bearing 10 of the circular processing device, the arm 30 is pivoted about the shaft base 20, and the tail end of the arm 30 is directed to the wafer tray 11 to be proofed, and the wafer tray 11 is aligned. The distance between the edge of each of the wafer trays 11 and the pivotal support 10 can be quickly corrected by the edge of the calibration member 40 being aligned with the reference edge 41 of the calibration member 40.

The wafer tray positioning proofreader of the present invention, as shown in the first to third figures, further includes a mounting under the arm 30 for supporting the arm 30. The pillow member 50 can use the pillow member 50 to produce a stable support for the arm 30, thereby improving the accuracy of proofreading; and the pillow member 50 is provided with a first magnetic member 51, and the arm member 30 is provided with a first magnetic member 51. The predetermined spacing is provided with a plurality of second magnetic members 33 that are attracted to the first magnetic member 51 so as to quickly adsorb the pillow member 50 at different positions of the arm 30, thereby improving the operational convenience and practicability.

Furthermore, the wafer tray positioning proofer of this creation is as shown in the figure. The arm rod 30 is configured by a first rod member 31 and a second rod member 32. One end of the first rod member 31 is provided with a shaft hole 311 for axially connecting with the shaft seat 20. A first long slot 312 is defined at the other end of the shaft hole 311; the mount 321 of the arm 30 is disposed at one end of the second rod 32, and the second rod 32 is opposite to the mount 321 The end system is provided with at least two first screw holes 322, and at least two screws 34 pass through the first long slot holes 312 of the first rod member 31 and are respectively screwed into the first screw holes 322 of the second rod member 32. In order to achieve the purpose of locking and engaging the first and second rod members 31, 32, and adjusting the relative positions of the first and second rod members 31, 32 to meet the needs of the rotary bearing 20 of different specifications.

It is worth mentioning that the arm 318 of the arm 30 can be provided with a second screw hole 323, and the aligning member 40 is provided with a mounting seat 321 regardless of whether the arm 30 can be adjusted in length. The second long slot 42 corresponding to the screw hole 323, another screw 43 passes through the second long slot 42 of the calibration member 40 and is screwed into the second screw hole 323 of the mount 321 to fix and fix the calibration member 40. For the purpose of the rear end of the arm 30, and for quickly trimming the reference edge 41 of the calibration member 40 to extend the length of the end of the arm 30.

Specifically, the creation of the wafer tray positioning proofer can produce the following effects:

1. The structure is simple, and the distance between each wafer tray of the proof wafer processing equipment and the axis of the rotating support can be directly directly at the processing site.

2. High applicability, the arm can be designed by the first rod and the second rod, which meets the requirements of different specifications of the rotary support.

3. The structure is stable and reliable, and the pillow can be used to produce a stable support for the arm, thereby improving the accuracy of proofreading.

4. It is more convenient to operate. The second long slot design of the calibration piece can be used to quickly fine-tune the reference edge of the calibration piece to extend the length of the end of the arm.

In summary, the present invention provides a better and feasible wafer tray positioning proofreader, and submits a new patent application according to law; the technical content and technical features of the creation have been disclosed above, but those skilled in the art still It is possible to make various substitutions and modifications based on the disclosure of this creation without departing from the spirit of the creation of the case. Therefore, the scope of the present invention is not limited to the embodiments disclosed, but includes various alternatives and modifications that do not depart from the present invention and are covered by the following claims.

10‧‧‧Rotary support

11‧‧‧ wafer tray

20‧‧‧ shaft seat

30‧‧‧Boom

31‧‧‧First member

32‧‧‧Second bars

40‧‧‧ Calibration parts

41‧‧‧ reference side

50‧‧‧Pillow

Claims (7)

A wafer tray positioning proofreader comprises: a shaft seat for mounting at a pivot center of a rotary support of a wafer processing apparatus; and an arm rod having one end axially coupled to the shaft seat for relative rotation with the shaft seat, The arm is opposite to the other end axially coupled to the shaft seat and is provided with a mounting seat; a calibration member is mounted on the mounting base of the arm and has a reference edge extending from the end of the arm. The wafer tray positioning collimator of claim 1, wherein the wafer tray positioning collimator further comprises a pillow member disposed under the arm for generating a support for the arm. The wafer tray positioning corrector according to claim 1, wherein the arm is composed of a first rod and a second rod, and one end of the first rod is provided with a shaft seat. The shaft shaft of the shaft shaft is provided with a first long slot hole at the other end of the shaft hole; the mounting seat of the arm rod is disposed at one end of the second rod member, and the second rod member is opposite to the other end of the mounting seat At least two first screw holes are provided, and at least two screws are inserted through the first long slot of the first rod and then screwed into the first screw holes of the second rod. The wafer tray positioning proofreader of claim 1, wherein the wafer tray positioning proofreader further comprises a pillow member disposed under the arm for generating a support for the arm; And the arm is formed by locking the first rod and the second rod, and one end of the first rod is provided with a shaft hole for axially connecting with the shaft seat, and the other end of the shaft hole is opposite to the shaft hole. a first long slot; the mounting base of the arm is disposed at one end of the second rod, and the second rod is provided with at least two first screw holes relative to the other end of the mounting seat, and at least two The screws pass through the first long slot of the first rod and are respectively screwed into the first screw holes of the second rod. The wafer tray positioning proofer according to any one of claims 1 to 4, Wherein, the mounting base of the arm is provided with a second screw hole, the calibration member is provided with a second long slot corresponding to the screw hole of the mounting seat, and another screw passes through the second long slot of the calibration member. Screw into the second screw hole of the mount. The wafer tray positioning aligner according to claim 2, wherein the pillow member is provided with a first magnetic member, and the arm member is provided with a plurality of predetermined positions for absorbing the first magnetic member. Magnetic component. The wafer tray positioning collimator of any one of claims 1 to 4, wherein the mounting base of the arm has a sloped shape.