JP5352550B2 - Stage equipment - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To materialize a simple structure and downsizing, and to facilitate positioning adjustment by the manual work of an operator. <P>SOLUTION: A stage device 1 is configured by laminating a rotation base 10, a Y base 20, an X base 30, a Z/tilt base 40, and a unit base 50. Positioning in a rotating direction is carried out by a rotation adjusting tool 100 while using a stand pin 29 of the Y base 20. Positioning in a Y direction is carried out by using a Y cam follower (a nut) 23 of the Y base 20 and a Y cam follower 32 of the X base 30, and moving the Y cam follower 32 into a Y guide hole 33 by a Y axis adjusting tool 200. Positioning in an X direction is carried out by using an X cam follower (a nut) 34 of the X base 30 and an X cam follower 42 of the Z/tilt base 40, and moving the X cam follower 42 into an X guide hole 43 by an X axis adjusting tool 300. Positioning in a Z/tilt direction is carried out by a Z/tilt adjusting screw 45 of the Z/tilt base 40. <P>COPYRIGHT: (C)2012,JPO&amp;INPIT

Description

  The present invention relates to a stage apparatus capable of positioning in the X direction, Y direction, Z direction, tilt, and rotation direction.

  Conventionally, stage devices that perform positioning in the X direction, the Y direction, and the like are known. For example, Patent Document 1 describes a stage device that includes a plurality of stages (bases) guided in a predetermined axial direction by guide rollers and performs positioning in the X direction and the Y direction by an ultrasonic motor. In this stage apparatus, V-grooves of guide rollers are arranged in the vertical direction as a mechanism for guiding each stage. Thus, the operator can simply perform the maintenance work by lifting the stage vertically upward and disassembling and assembling the maintenance work after the maintenance work is completed.

  Further, in Patent Document 2, in a stage device that performs positioning in the X direction, Y direction, Z direction, tilt, and rotation direction, positioning is performed by an ultrasonic motor, and another plate is accommodated in the recess of the base plate, and the tilt plate In which the X-axis plate is accommodated in the recess and the Y-axis plate is accommodated in the recess of the X-axis plate. Due to the plate accommodation structure and the laminated structure of the stage apparatus, the entire stage can be reduced in size and thickness.

JP 2000-58629 A JP 2007-95943 A

  Since the above-described stage apparatus of Patent Document 1 is provided with guide rollers, the cost is increased, and further, the size in the thickness direction and the planar direction increases, so that the entire stage apparatus becomes large. was there. In addition, the stage apparatus of Patent Document 2 is not provided with a guide roller and achieves miniaturization. However, since the housing structure is provided, the configuration of the entire stage becomes complicated and expensive. There was a problem.

  In addition, the stage apparatuses of Patent Documents 1 and 2 both perform positioning and adjustment with high accuracy by using an ultrasonic motor. For example, for exposure or electron beam drawing in a semiconductor manufacturing process, Used to position and adjust the semiconductor wafer.

  On the other hand, in a simple stage device that performs positioning by operating an adjustment knob by an operator's manual operation, the entire stage device can be reduced in size, cost, and positioning adjustment work can be facilitated. It is desirable that the apparatus pursues simplification of the above.

  Accordingly, the present invention has been made to solve the above-described problems, and an object of the present invention is to provide a simple configuration and miniaturization in a stage apparatus capable of positioning in the X direction, the Y direction, the Z direction, the tilt, and the rotation direction. And to provide a stage device that can be easily positioned and adjusted by an operator.

  In order to achieve the above object, a stage apparatus according to the present invention includes a unit base that performs positioning in a X direction, a Y direction, a Z direction, a tilt, and a rotation direction with respect to a base for a predetermined object installed on a mounting table, In a stage apparatus including a Z / tilt base, an X base, a Y base, and a rotation base, the unit base includes a through hole through which a support attached to the mounting table is passed, and is fixedly installed on the base. A plurality of Z / tilt adjustment members that adjust the distance and tilt in the Z direction by contacting the unit base with the tilt base, an X guide hole that accommodates the X guide member and guides the X guide member in the X direction, And a through-hole through which the support is passed, provided opposite to the plane of the unit base and spaced apart by a predetermined distance by the adjustment, wherein the X base is the X guide portion And an X guide holding member for holding the X base between the X guide member, a groove for receiving the X guide holding member, and a Y guide member for receiving the Y guide member in the Y direction. A Y guide hole and a through hole through which the support column passes, and are provided to face the plane of the Z / tilt base, and the Y base is configured integrally with the Y guide member, A Y guide gripping member for gripping the Y base, a groove for accommodating the Y guide gripping member, a projection serving as a base point for rotating the rotation base, and a through hole through which the support column is passed. The rotation base includes a recess that fits into a protrusion of the Y base and rotates the rotation base, and an attachment member that attaches the column. Characterized in that provided opposite the face.

  The stage apparatus according to the present invention may further include a fixing member that fixes the Z / tilt base at a predetermined distance while facing the plane of the unit base, and the X base is a plane of the Z / tilt base. A fixing member that is overlapped and fixed in a state of being opposed to the X guide member, and an X guide member that is configured integrally with the X guide holding member is moved along the X guide hole in which the X guide member is accommodated. The X base, the Y base, and the X base adjustment tool for moving the rotation base in the X direction, the Y base being fixed in a state of being opposed to the plane of the X base, and the Y guide grip By moving the Y guide member integrally formed with the member along the Y guide hole in which the Y guide member is accommodated, the Y base and the rotary base are moved. A Y-axis adjusting instrument that moves the Y base in the Y direction, a stand pin fixedly installed on the Y base, and a fixing member that overlaps and fixes the rotating base in a state of facing the plane of the Y base, and The rotation base is rotated in the rotation direction by pressing the first side surface of the stand pin or pressing the side surface opposite to the first side surface and rotating the concave portion with the convex portion as a base point. It is characterized by having a rotating adjustment tool that moves the head to the right.

  In the stage apparatus according to the present invention, the predetermined object is a camera, and the rotation base, the Y base, the X base, the Z / tilt base, and the unit base have through holes, and the camera is accommodated in the through holes. Alternatively, the optical axis of the camera is passed through the through hole.

  As described above, the stage apparatus of the present invention is configured by laminating a plurality of bases that perform positioning in the X direction, the Y direction, the Z direction, the tilt, and the rotation direction. As a whole, downsizing can be realized. Further, the stage apparatus of the present invention is provided with a member that can be guided and moved for positioning, and is provided with an adjustment tool for positioning adjustment by this member. A fixing member for fixing between the bases is provided at a place where the operator can work. Thereby, since the stage apparatus does not need to be provided with mechanical elements such as guide rollers for positioning, positioning can be performed with a simple configuration. In addition, the operator manually tightens the target fixing member during positioning adjustment in the X direction, Y direction, Z direction, tilt, and rotation direction, operates the adjustment tool to perform positioning, After completion, the fixing screw may be tightened. Thereby, the positioning adjustment by an operator's manual work becomes easy.

It is the schematic which shows the cross-section of the stage apparatus by embodiment of this invention. It is a figure which shows the upper surface structure which looked at the stage apparatus from upper direction (alpha direction). (1) is a figure which shows the structure of a rotation base. (2) is a diagram showing a Y-base configuration. (3) is a diagram showing an X-based configuration. (4) is a diagram showing the configuration of the Z / tilt base. (5) is a diagram showing a configuration of a unit base.

  The best mode for carrying out the present invention will be described below with reference to the drawings. A stage apparatus according to an embodiment of the present invention includes a rotation base for positioning in the rotational direction, a Y base for positioning in the Y direction, an X base for positioning in the X direction, a Z / tilt base for positioning in the Z direction and tilt, The stage apparatus is configured to include a unit base for fixing and mounting the stage device on the base, a mounting base for fixing and mounting the camera, and a column for mounting the mounting base on the rotating base. Each base is formed by stacking and is provided to face the plane of the adjacent base. This stage device positions the optical axis of the camera by manually moving and guiding the camera fixedly installed on the mounting table in the X direction, Y direction, Z direction, tilt and rotation directions by an operator. It is.

  FIG. 1 is a schematic diagram showing a cross-sectional structure of a stage apparatus according to an embodiment of the present invention. The stage apparatus 1 includes a rotation base 10, a Y base 20, an X base 30, a Z / tilt base 40, a unit base 50, a support 71, and a mounting table 70. The rotation base 10 of the uppermost layer (first layer), the Y base 20 of the second layer, the X base 30 of the third layer, the Z / tilt base 40 of the fourth layer, and the unit base 50 of the lowermost layer (fifth layer) are The rotary base 10, the Y base 20, the X base 30, and the Z / tilt base 40 are provided with no gap so as to face the plane of the adjacent base. The Z / tilt base 40 faces the plane of the unit base 50 and is provided at a predetermined distance from the unit base 50 where the Z direction and tilt are positioned. The operator uses the rotation adjustment tool 100, the Y-axis adjustment tool 200, and the X-axis adjustment tool 300 for positioning adjustment, but these adjustment tools and the like are omitted for convenience of explanation. The thickness of the rotation base 10, the Y base 20, the X base 30, the Z / tilt base 40, and the unit base 50 is about 10 mm.

  The column fixing screw 13 provided on the rotation base 10 attaches the column 71 to the rotation base 10. The column 71 is provided in the column hole 26 provided in the Y base 20, the column hole 38 provided in the X base 30, the column hole 46 provided in the Z / tilt base 40, and the unit base 50. It is attached to the mounting table 70 through the support / camera window hole 53. In addition, a column 71 is attached to the mounting table 70 by screws or the like, and a camera 80 is fixedly installed at a predetermined location. As shown in FIG. 2, which will be described later, the rotation base 10 is provided with four column fixing screws 13 and the number of columns 71 is four.

  Returning to FIG. 1, the rotation fixing screw 11 provided on the rotation base 10 fixes the rotation base 10 positioned in the rotation direction to the Y base 20. An X fixing screw 36 provided on the X base 30 fixes the X base 30 positioned in the X direction to the Z / tilt base 40. Here, the head portion 36 a of the X fixing screw 36 is accommodated in a support / camera window hole 28 (see FIG. 3B described later) provided in the Y base 20. Thereby, the Y base 20 and the X base 30 can be stacked without causing a gap between the Y base 20 and the X base 30.

  A Z / tilt fixing screw 44 provided on the Z / tilt base 40 fixes the Z / tilt base 40 positioned in the Z direction and tilt to the unit base 50 at a predetermined distance. Although not shown in FIG. 1, a Y fixing screw 21 provided on the Y base 20 fixes the Y base 20 positioned in the Y direction to the X base 30. A base fixing screw 52 provided on the unit base 50 fixes and installs the unit base 50 on the base 60. Thereby, the stage apparatus 1 is fixedly installed on the base 60. Then, the camera 80 fixedly installed on the mounting table 70 is guided to move in the X direction, Y direction, Z direction, tilt and rotation directions with reference to the base 60 by the procedure and mechanism described below. Is done.

(Rotation direction positioning)
When the rotation fixing screw 11 provided in the rotation base 10 is loosened by the operator and the rotation base 10 is released from the Y base 20 and the operator performs an adjustment operation in the rotation direction, the stand pin hole 102-1 is performed. , 102-2 (see FIGS. 2 and 3 (1) to be described later), and stand pins 29-1 and 29-2 (shown in FIGS. 2 and 3 (1) to be described later) provided on the Y base 20 protruding. ) The rotation base 10 moves in the rotation direction with reference to (2)). In this case, since the Y base 20, the X base 30, the Z / tilt base 40, and the unit base 50 are fixed to the base 60, the rotary base 10, the column 71, the mounting table 70, and the camera 80 move in the rotation direction. To do. Thereby, the camera 80 is positioned and adjusted in the rotation direction.

(Positioning in X direction)
An X cam follower (nut) (X guide member) 34 provided on the X base 30 is inserted into a stud of the X cam follower and abuts the X base 30 at the bottom surface of the groove 35. The X cam follower (nut) 34 is integrated with the X cam follower (X guide gripping member) 42 and grips the X base 30. When the X fixing screw 36 is loosened by the operator and the X base 30 is released from the Z / tilt base 40 and the operator performs an adjustment operation in the X direction, the X cam follower (nut) 34 is integrated. The X cam follower 42 moves in the X direction along an X guide hole 43 provided in the Z / tilt base 40. In this case, since the Z / tilt base 40 and the unit base 50 are fixed to the base 60, the X base 30, the Y base 20, the rotation base 10, the support 71, the mounting base 70, and the camera 80 move in the X direction. To do. Thereby, the camera 80 is positioned and adjusted in the X direction.

  The X cam follower (nut) 34 is accommodated in a groove 35 provided in the X base 30, and the height size of the X cam follower (nut) 34 is shorter than the depth of the groove 35. The Y base 20 and the X base 30 can be overlapped and fixed without generating a gap therebetween.

(Z direction and tilt positioning)
With the Z / tilt fixing screw 44 provided on the Z / tilt base 40 loosened by the operator, and the Z / tilt base 40 is released from the unit base 50, the operator performs Z-direction and tilt adjustment operations. That is, the operator operates by turning the Z / tilt adjustment screw 45 using a tool or the like. Then, the Z / tilt base 40 moves upward or downward (Z direction) while the front end surface 45a of the Z / tilt adjustment screw 45 is in contact with the upper surface of the unit base 50. In this case, since the unit base 50 is fixed to the base 60, the Z / tilt base 40, the X base 30, the Y base 20, the rotation base 10, the support 71, the mounting table 70, and the camera 80 move in the Z direction. To do. Thereby, the camera 80 is positioned and adjusted in the Z direction. Further, as shown in FIG. 2 to be described later, the Z / tilt adjustment screw 45 has four corners on the Z / tilt base 40 (the Z / tilt base 40 is formed in a substantially rectangular shape and is close to the apex of the substantially rectangular shape). Is provided. By changing the degree of turning these four Z / tilt adjustment screws 45, the tilt (tilt) of the camera 80 is adjusted.

(Y direction positioning)
Although not shown in FIG. 1, referring to FIGS. 2 and 3 (2) and (3) described later, a Y cam follower (nut) (Y guide member) 23 provided on the Y base 20 is It is inserted into the stud of the cam follower and is in contact with the Y base 20 at the bottom surface of the groove 24. The Y cam follower (nut) 23 is integrated with a Y cam follower (Y guide holding member) 32 and holds the Y base 20. When the Y fixing screw 21 is loosened by the operator and the Y base 20 is released from the X base 30 and the operator performs an adjustment operation in the Y direction, the Y cam follower (nut) 23 integrated with the Y cam follower (nut) 23 32 moves in the Y direction along a Y guide hole 33 provided in the X base 30. In this case, since the X base 30, the Z / tilt base 40, and the unit base 50 are fixed to the base 60, the Y base 20, the rotation base 10, the support 71, the mounting base 70, and the camera 80 move in the Y direction. To do. Thereby, the camera 80 is positioned and adjusted in the Y direction.

  The Y cam follower (nut) 23 is accommodated in a groove 24 provided in the Y base 20, and the height size of the Y cam follower (nut) 23 is shorter than the depth of the groove 24. The rotation base 10 and the Y base 20 can be stacked and fixed without causing a gap therebetween.

  Therefore, the camera 80 is moved and guided in the X direction, the Y direction, the Z direction, the tilt, and the rotation direction by the operator's manual work while the stage device 1 is fixedly installed on the base 60, and positioning is performed. Thereby, the optical axis of the camera 80 is determined.

  As described above, according to the stage apparatus 1, the plurality of bases 10, 20, 30, 40, 50 that perform positioning in the X direction, the Y direction, the Z direction, the tilt, and the rotation direction are configured to be stacked. A simple configuration can be realized and the height size is reduced. Therefore, it is possible to reduce the size of the stage apparatus 1 as a whole.

  FIG. 2 is a diagram showing a top structure of the stage apparatus 1 as viewed from above (α direction). As shown in FIG. 2, the stage apparatus 1 includes a rotating base 10, a Y base 20, an X base 30, a Z / tilt base 40, and a unit base 50 from the uppermost layer to the lowermost layer. It has become.

  The rotation base 10 of the uppermost layer (first layer) has two rotation fixing screws 11 that pass through the screw holes 12 and fix the rotation base 10 to the Y base 20, and four screws for attaching the columns 71. A column fixing screw 13 and two sets of rotating adjustment tools 100 are provided. Accordingly, the operator can access the rotation fixing screw 11 from above the stage device 1 for positioning adjustment in the rotation direction, and can operate the adjustment tool 100 for rotation. The rotary base 10 is provided with an X fixing screw window hole 14. The rotating adjustment tool 100 will be described later.

  The second layer Y base 20 includes four Y fixing screws 21 inserted into the screw holes 22 to fix the Y base 20 to the X base 30, a set of Y-axis adjusting devices 200, and the like. Yes. In addition, a Y cam follower (nut) 23 and the like are also provided, but are omitted here. The connecting bar 202 of the Y-axis adjusting device 200 and the connecting bar 311 of the Y-axis fixing device 310 provided in the X base 30 described later are joined, and the operation of the adjusting knob 201 at the time of Y-direction positioning adjustment is performed. The Y base 20 and the rotary base 10 are moved in the Y direction with respect to the fixed X base 30. Further, the Y fixing screw 21 and the screw hole 22 are provided at a location deviated from the laminated portion between the uppermost rotation base 10 and the second layer Y base 20. The Y base 20 is provided with a support / camera window hole 28 (not shown). As a result, the operator can access the Y fixing screw 21 from above the stage apparatus 1 and can operate the Y-axis adjusting tool 200 for positioning adjustment in the Y direction. The Y-axis adjusting device 200 will be described later.

  The X-layer 30 of the third layer is inserted into the screw hole 37 and has four X-fixing screws 36 for fixing the X-base 30 to the Z / tilt base 40, one set of the X-axis adjusting device 300, and the Y-axis A set of Y-axis fixing devices 310 corresponding to the adjusting device 200 is provided. In addition, an X cam follower (nut) 34 and the like are also provided, but are omitted here. The connecting bar 302 of the X-axis adjusting device 300 and the connecting bar 401 provided in the Z / tilt base 40 described later are joined, and are fixed in accordance with the operation of the adjusting knob 301 at the time of positioning adjustment in the X direction. With respect to the Z / tilt base 40, the X base 30, the Y base 20, and the rotation base 10 are moved in the X direction. The X fixing screw 36 and the screw hole 37 are a camera window hole 15 provided in the uppermost rotation base 10 and a column / camera window hole 28 provided in the second layer Y base 20 (see FIG. (Not shown) is provided at a location deviated from the laminated portion between the rotary base 10, the Y base 20, and the X base 30. As a result, the operator can access the X fixing screw 36 from above the stage apparatus 1 via the camera window hole 15 and the support / camera window hole 28 for positioning adjustment in the X direction. The X-axis adjusting instrument 300 can be operated. The X-axis adjusting instrument 300 will be described later.

  The fourth layer Z / tilt base 40 includes four Z / tilt fixing screws 44, four Z / tilt adjusting screws 45, a set of X-axis fixing devices 400, and the like. In addition, although an X guide hole 43 is provided, it is omitted here. The Z / tilt fixing screw 44 and the Z / tilt adjusting screw 45 are provided at a location deviated from the laminated portion between the rotation base 10, the Y base 20, the X base 30 and the Z / tilt base 40. As a result, the operator can access the Z / tilt fixing screw 44 and the Z / tilt adjustment screw 45 from above the stage apparatus 1 for positioning adjustment in the Z direction and tilt.

  The lowermost (fifth layer) unit base 50 includes four base fixing screws 52 and the like. In addition, a Z / tilt fixing screw groove 51 and the like are provided, but are omitted here. The base fixing screw 52 is provided at a position removed from the laminated portion among the rotation base 10, the Y base 20, the X base 30, the Z / tilt base 40 and the unit base 50. Thus, the operator can access the base fixing screw 52 from above the stage device 1 in order to install the stage device 1 on the base 60.

  As described above, according to the stage apparatus 1, the rotation fixing screw 11, the Y fixing screw 21, the X fixing screw 36, the Z / tilt fixing screw 44, and the Z / tilt adjusting screw that are necessary for manual positioning adjustment by the operator. 45 is provided in a location accessible from the upper direction (α direction) of the stage device 1 without being provided in the stage device 1. Specifically, since the rotation base 10 is provided in the uppermost layer, the operator can access the rotation fixing screw 11. In addition, since the Y fixing screw 21 is provided at a location off the laminated portion of the rotary base 10 and the Y base 20, the operator can access the Y fixing screw 21. In addition, since the X-fixing screw window hole 14 is provided in the rotary base 10 and the support / camera window hole 28 (see FIG. 3 (2) described later) is provided in the Y base 20, the operator fixes the X. The screw 36 can be accessed through the X fixing screw window hole 14 and the post / camera window hole 28. In addition, since the Z / tilt fixing screw 44 and the Z / tilt adjusting screw 45 are provided at a position off the laminated portion of the rotary base 10, the Y base 20, the X base 30 and the Z / tilt base 40, the operator can / Tilt fixing screw 44 and Z / tilt adjustment screw 45 can be accessed. Thereby, at the time of positioning adjustment, the operator accesses from above the stage device 1 (α direction), loosens the tightening of the target fixing screw, and rotates the target rotating adjustment tool 100 and the Y-axis adjusting tool 200. Alternatively, the X-axis adjusting instrument 300 may be operated or the Z / tilt adjusting screw 45 may be accessed and the fixing screw tightened. Therefore, the operator can easily perform positioning adjustment by manual work. Further, since the X fixing screw window hole 14 and the like are provided, the stage device 1 can be downsized.

  Furthermore, according to the stage apparatus 1, in order to accommodate the support 71 in the stage apparatus 1, the support hole 26 is provided in the Y base 20, the support hole 38 is provided in the X base 30, and the Z / tilt base 40 is provided. The support hole 46 is provided, and the support / camera window hole 53 is provided in the unit base 50. Thereby, the further size reduction of the stage apparatus 1 is realizable.

  FIG. 3 is a diagram showing the configuration of each base. Hereinafter, the configuration of each base shown in FIGS. 1 and 2 will be described in detail. (1) is a top view of the rotary base 10, and (1.1) is a cross-sectional view taken along d1-d2 in (1). The rotation base 10 is formed in a plate shape as a whole, and is substantially square when viewed from above. The size is about 190 × 190 mm. The rotation base 10 is provided with two screw holes 12, and the rotation fixing screw 11 inserted into the screw hole 12 is inserted into a rotation fixing screw groove 25 provided in the Y base 20. The base 10 is fixed to the Y base 20 by lamination. Four struts 71 are attached to the rotary base 10 by four strut fixing screws 13. The rotary base 10 is provided with four X fixing screw window holes 14 and one camera window hole 15.

  The rotation base 10 is provided with two sets of adjustment tools 100 for rotation. The adjustment tool 100 for rotation is provided with adjustment knobs 101-1 to 101-4 for performing positioning adjustment in the rotation direction, and is fixed to the rotation base 10 with brackets 103 by screwing at four locations. The fixing screw 13 provided on the bracket 103 of the rotating adjustment tool 100 is accommodated in the groove 16. Further, the rotation adjusting device 100 is provided with stand pin holes 102-1 and 102-2 into which the stand pins 29-1 and 29-2 fixedly installed on the Y base 20 are inserted. , The rotation base 10 has the stand pin holes 102-1 and 102-2 with the stand pins 29-1 and 29-2 protruding from the stand pin holes 102-1 and 102-2 as base points. Along the direction of rotation. In other words, the stand pin holes 102-1 and 102-2 accommodate the stand pins 29-1 and 29-2 and do not come into contact with the stand pins 29-1 and 29-2 when adjusting the rotation direction. The size is such that the rotary base 10 moves.

  Referring to (1.1), in the d1-d2 cross-sectional view of the rotary base 10, a concave portion 17 is provided in the center of the rotary base 10 in addition to the camera window hole 15. A convex portion 27 provided in the Y base 20 is inserted into the concave portion 17. During positioning adjustment in the rotation direction, the peripheral surface of the concave portion 17 rotates along the peripheral surface of the convex portion 27 provided in the Y base 20. Thereby, the rotation base 10 rotates. Further, the rotation base 10 is provided with a screw hole 13a and a screw hole 12 through which the column fixing screw 13 passes.

  Next, positioning adjustment in the rotation direction will be described. First, the operator loosens the rotation fixing screw 11 by using a tool or the like so that the rotation base 10 is released from the Y base 20. For example, when rotating in the opposite direction of the timepiece, the adjustment knobs 101-2 and 101-4 of the adjustment tool 100 for rotation are operated and loosened. As a result, the stand pins 29-1 and 29-2 projecting from the stand pin holes 102-1 and 102-2, and the adjustment knobs 101-2 and 101- that are in pressure contact with the stand pins 29-1 and 29-2, respectively. A space corresponding to the loose length is generated between the front end surface of 4. Then, by operating the adjustment knobs 101-1 and 101-3 in the tightening direction, the tip surfaces of the adjustment knobs 101-1 and 101-3 in pressure contact with the stand pins 29-1 and 29-2 are −1, 29-2 are pressed. The stand pins 29-1 and 29-2 are fixedly installed on the Y base 20, and the Y base 20 is fixedly installed on the base 60 via the X base 30, the Z / tilt base 40 and the unit base 50. Therefore, the positions of the stand pins 29-1 and 29-2 do not change. On the other hand, the rotary base 10 is opened from the Y base 20. For this reason, it is rotated by pressing from the front end surface of the adjustment knobs 101-1 and 101-3 to the stand pins 29-1 and 29-2, which is generated by operating the adjustment knobs 101-1 and 101-3 in the tightening direction. The base 10 rotates and moves in the counterclockwise direction in the space between the stand pins 29-1 and 29-2 and the tip surfaces of the adjustment knobs 101-2 and 101-4. That is, the distance that the tip surface is moved by operating the adjustment knobs 101-1 and 101-3 in the tightening direction corresponds to the distance that the rotation base 10 rotates in the counterclockwise direction.

  The operator operates in the direction of tightening the adjustment knobs 101-1 and 101-3 to rotate the rotary base 10 to a predetermined position in the counterclockwise direction, and then uses a tool or the like to turn the rotation fixing screw 11. The rotating base 10 is fixed to the Y base 20 by tightening. Then, the adjustment knobs 101-2 and 101-4 in the loose state are operated in the tightening direction to press the tip surfaces of the adjustment knobs 101-2 and 102-4 against the stand pins 29-1 and 29-2. Thereby, the rotation base 10 and the Y base 20 are fixed by the rotation fixing screw 11, and the stand pin 29-1 is sandwiched from both sides by the tip surface of the adjustment knob 101-1 and the tip surface of the adjustment knob 101-2. It will be in the state. Similarly, the stand pin 29-2 is sandwiched from both sides by the tip surface of the adjustment knob 101-3 and the tip surface of the adjustment knob 101-4. Therefore, the rotation base 10 is in a fixed state without rotating. In this way, positioning adjustment in the direction opposite to the rotation of the timepiece is performed.

  On the other hand, when rotating in the clockwise direction, the rotation fixing screw 11 is loosened by using a tool or the like, and the adjustment knobs 101-1 and 101-3 of the adjustment tool 100 for rotation are loosened and adjusted. The knobs 101-2 and 101-4 are operated in the tightening direction. Thereby, the rotation base 10 rotates in the clockwise direction. In this case, the distance moved by operating the adjustment knobs 101-2 and 101-4 in the tightening direction corresponds to the distance rotated clockwise in the rotary base 10. Then, an operation in the direction of tightening the adjustment knobs 101-2 and 101-4 is performed, and the rotation base 10 is rotated and moved to a predetermined position in the clockwise direction, and then the rotation fixing screw 11 is tightened and loosened with a tool or the like. The adjustment knobs 101-2 and 101-4 are operated in the tightening direction. In this way, positioning adjustment in the rotation direction of the timepiece is performed.

  (2) is a top view of the Y base 20, (2.1) is a side view of the Y base 20, and (2.2) is a sectional view taken along line c1-c2 in (2). The Y base 20 is formed in a plate shape as a whole, and is substantially square when viewed from above. The size is about 240 × 240 mm. The Y base 20 is provided with two rotation fixing screw grooves 25, and the rotation fixing screw 11 is inserted to fix the rotation base 10 and the Y base 20. Further, the Y base 20 includes stand pins 29-1 and 29-2 serving as base points for moving the rotary base 10 in the rotation direction. The stand pins 29-1 and 29-2 protrude through the stand pin holes 102-1 and 102-2 provided in the rotation adjusting device 100 of the rotation base 10. The protruding stand pin 29-1 is pressed by the adjustment knobs 101-1 and 101-2 from both sides. Similarly, the protruding 29-2 is pressed from both sides by the adjustment knobs 101-3 and 101-4.

  The Y base 20 is provided with four screw holes 22, and the Y fixing screw 21 inserted into the screw hole 22 is inserted into the Y fixing screw groove 31 provided in the X base 30. The base 20 is stacked and fixed on the X base 30. The Y base 20 is provided with four grooves 24. A Y cam follower (nut) 23 housed in the groove 24 and a Y cam follower 32 provided on the X base 30 sandwich the Y base 20. Yes. When the Y cam follower 32 moves through the Y guide hole 33 provided in the X base 30, the Y base 20 moves with respect to the X base 30, and the positioning adjustment in the Y direction is performed. The Y base 20 is provided with four convex portions 27. The convex portion 27 is inserted into the concave portion 17 of the rotary base 10, and the rotary base 10 and the Y base 20 are stacked and fixed.

  The Y base 20 is provided with four support hole 26 and one support / camera window hole 28. A support 71 is passed through the support hole 26.

  The Y base 20 includes a set of Y-axis adjusting devices 200. The Y-axis adjusting device 200 includes an adjustment knob 201 for performing positioning adjustment in the Y direction, and a connecting bar 202 joined to a connecting bar 311 of the Y-axis fixing device 310 provided in the X base 30. It is fixed to the main body of the Y base 20 at 203. A movable portion that is linked to the operation of the adjustment knob 201 is attached to the fixing device 203, and this movable portion is based on the connecting bar 202 fixed to the X base 30 and is connected to the Y base via the fixing device 203. 20 The main body is movable so as to move in the Y direction.

  Referring to (2.1), in the side view of Y base 20, convex portion 27-2 is provided at the center of Y base 20, and convex portions 27-1 and 27-are provided on both sides thereof. 3 is provided. As described above, the convex portions 27-1 to 27-4 are inserted into the concave portion 17 of the rotation base 10.

  Referring to (2.2), in the c1-c2 cross-sectional view of the Y base 20, a column / camera window hole 28 is provided in the center of the Y base 20, and convex portions 27- are provided on both sides thereof. 1, 27-3, a post hole 26 and a rotation fixing screw groove 25 are provided.

  Next, positioning adjustment in the Y direction will be described. First, the operator loosens the Y fixing screw 21 by using a tool or the like to open the Y base 20 from the X base 30. Then, by operating the adjusting knob 201 of the Y-axis adjusting device 200 in the tightening direction or the loosening direction, the Y base 20 is moved in the Y direction with the fixed connecting bar 202 as a base point. The connection bar 202 is joined to the connection bar 311 of the X base 30, and the X base 30 is fixedly installed on the base 60 via the Z / tilt base 40 and the unit base 50. The position does not change. On the other hand, the Y base 20 is opened from the X base 30. For this reason, by operating the adjustment knob 201 in the tightening direction or the loosening direction, the movable portion at the tip of the adjustment knob 201 moves relative to the fixed connecting bar 202, and the Y base 20 is connected via the fixing device 203. Moves in the Y direction. That is, the distance that the adjustment knob 201 is operated to move the movable portion at the tip corresponds to the distance that the rotary base 10 is moved in the Y direction.

  The operator performs an operation in a direction in which the adjustment knob 201 is tightened or loosened, moves the Y base 20 to a predetermined position, and then tightens the Y fixing screw 21 with a tool or the like, thereby fixing the Y base 20 to the X base. Fix to 30. Thereby, the Y base 20 and the X base 30 are fixed by the Y fixing screw 21. In this way, positioning adjustment in the Y direction is performed.

  (3) is a top view of the X base 30. FIG. The X base 30 is formed in a plate shape as a whole, and is substantially square when viewed from above. The size is about 220 × 220 mm. The X base 30 is provided with four Y fixing screw grooves 31, and the Y fixing screw 21 is inserted to fix the Y base 20 and the X base 30. The X base 30 is provided with four Y guide holes 33, and Y cam followers 32 for guiding the Y base 20 in the Y direction are inserted into the Y guide holes 33. As described above, the Y cam follower 32 and the Y cam follower (nut) 23 are integrated and sandwich the Y base 20.

  The X base 30 is provided with four screw holes 37, and the X fixing screw 36 inserted into the screw hole 37 is inserted into the X fixing screw groove 41 provided in the Z / tilt base 40. The X base 30 is stacked and fixed on the Z / tilt base 40. The X base 30 is provided with four grooves 35, and an X cam follower (nut) 34 accommodated in the groove 35 and an X cam follower 42 provided on the Z / tilt base 40, It is sandwiched. When the X cam follower 42 moves through an X guide hole 43 provided in the Z / tilt base 40, the X base 30 moves relative to the Z / tilt base 40, and positioning adjustment in the X direction is performed.

  The X base 30 is provided with four support holes 38 and one camera window hole 39. A support 71 is passed through the support hole 38.

  The X base 30 includes a set of X-axis adjusting instruments 300 and a set of Y-axis fixing instruments 310. The Y-axis fixing device 310 includes a connecting bar 311 and a mounting bar 312, and is screwed to the main body of the X base 30 by the mounting bar 312. The connection bar 311 is joined to the connection bar 202 provided in the Y base 20. The X-axis adjustment instrument 300 includes an adjustment knob 301 for performing positioning adjustment in the X direction, and a connection bar 302 joined to the connection bar 401 of the X-axis fixing instrument 400 provided in the Z / tilt base 40. It is fixed to the main body of the X base 30 with a fixing device 303. A movable portion that is linked to the operation of the adjustment knob 301 is attached to the fixing device 303, and this movable portion is connected to the Z / tilt base 40 via the fixing device 303 with the connection bar 302 as a base point. The X base 30 is movable so as to move in the X direction.

  Next, positioning adjustment in the X direction will be described. First, the operator releases the X base 30 from the Z / tilt base 40 by loosening the X fixing screw 36 using a tool or the like. Then, by operating the adjusting knob 301 of the X-axis adjusting device 300 in the tightening direction or the loosening direction, the X base 30 is moved in the X direction with the fixed connecting bar 302 as a base point. Since the connecting bar 302 is joined to the connecting bar 401 of the Z / tilt base 40 and the Z / tilt base 40 is fixedly installed on the base 60 via the unit base 50, the position of the connecting bar 302 changes. Absent. On the other hand, the X base 30 is opened from the Z / tilt base 40. For this reason, by operating the adjustment knob 301 in the tightening direction or the loosening direction, the movable portion at the tip of the adjustment knob 301 moves relative to the fixed connecting bar 302, and the X base 30 via the fixing device 303. Moves in the X direction. That is, the distance that the adjustment knob 301 is operated to move the movable part at the tip corresponds to the distance that the X base 30 is moved in the X direction.

  The operator performs an operation in a direction to tighten or loosen the adjustment knob 301, moves the X base 30 to a predetermined position, and then tightens the X fixing screw 36 with a tool or the like, thereby moving the X base 30 to the Z / Fix to the tilt base 40. Thereby, the X base 30 and the Z / tilt base 40 are fixed by the X fixing screw 36. In this way, positioning adjustment in the X direction is performed.

  (4) is a top view of the Z / tilt base 40. FIG. The Z / tilt base 40 is formed in a plate shape as a whole, and is substantially square when viewed from above. The size is about 285 × 285 mm. The Z / tilt base 40 is provided with four X fixing screw grooves 41, and an X fixing screw 36 is inserted to fix the X base 30 and the Z / tilt base 40. Further, four X guide holes 43 are provided in the Z / tilt base 40, and an X cam follower 42 for guiding the X base 30 in the X direction is inserted into the X guide hole 43. As described above, the X cam follower 42 and the X cam follower (nut) 34 are integrated and sandwich the X base 30.

  The Z / tilt base 40 is provided with four screw holes (not shown), and the Z / tilt fixing screw 44 inserted into the screw hole is a Z / tilt fixing screw groove provided in the unit base 50. 51 is inserted. As a result, the male screw of the Z / tilt fixing screw 44 and the female screw of the screw hole are joined, and the male screw of the Z / tilt fixing screw 44 and the female screw of the Z / tilt fixing screw groove 51 are joined. The tilt base 40 is fixed at a predetermined distance from the unit base 50. The Z / tilt base 40 is provided with four screw holes (not shown). The Z / tilt adjustment screw 45 inserted into the screw hole is a male screw of the Z / tilt adjustment screw 45. The unit base 50 is in contact with the upper surface of the unit base 50 in a state where the female screw in the screw hole is joined. The operator operates the Z / tilt adjustment screw 45 in the tightening direction or the loosening direction to move the Z / tilt base 40 in the Z direction with respect to the unit base 50, and the positioning adjustment of the Z direction and the tilt is performed.

  The Z / tilt base 40 is provided with four support holes 46 and one camera window hole 47. A support 71 is passed through the support hole 46.

  The Z / tilt base 40 includes a set of X-axis fixtures 400. The X-axis fixing device 400 includes a connection bar 401 and a mounting bar 402, and is screwed to the main body of the Z / tilt base 40 by the mounting bar 402. The connection bar 401 is joined to the connection bar 302 provided in the X base 30.

  Next, Z-direction and tilt positioning adjustment will be described. First, the operator releases the Z / tilt base 40 from the unit base 50 by loosening the Z / tilt fixing screw 44 using a tool or the like. Then, by operating the Z / tilt adjustment screw 45 in the tightening or loosening direction using a tool or the like, the Z / tilt adjustment screw 45 is in contact with the top surface of the unit base 50 in the Z / tilt adjustment screw 45 direction. The length of the Z / tilt adjustment screw 45 protruding from the lower surface of the base 40 (the distance between the Z / tilt base 40 and the unit base 50) changes, and the Z / tilt base 40 is moved in the Z direction with respect to the unit base 50. Move. The tip surface of the Z / tilt adjustment screw 45 abuts on the upper surface of the unit base 50 by its own weight such as the Z / tilt base 40, and the unit base 50 is fixedly installed on the base 60. Opened from the base 50. Therefore, by operating the Z / tilt adjustment screw 45 in a tightening direction or a loosening direction, the female screw in the screw hole is joined in a state where the tip surface of the Z / tilt adjustment screw 45 is in contact with the upper surface of the unit base 50. The position of the male screw of the Z / tilt adjustment screw 45 is changed, and the length of the Z / tilt adjustment screw 45 protruding from the lower surface of the Z / tilt base 40 is changed. And move in the Z direction, which is the vertical direction.

  The operator performs an operation in a direction in which the Z / tilt adjustment screw 45 is tightened or loosened, moves the Z / tilt base 40 to a predetermined position, and then tightens the Z / tilt fixing screw 44 using a tool or the like. As a result, the Z / tilt base 40 is fixed to the unit base 50 at a predetermined distance in the Z direction. Also, the operator performs tilt positioning adjustment by operating the four Z / tilt adjustment screws 45. In this way, positioning adjustment in the Z direction and tilt is performed.

  (5) is a top view of the unit base 50. FIG. The unit base 50 is formed in a plate shape as a whole, and is substantially rectangular when viewed from above. The size is about 285 × 250 mm. The unit base 50 is provided with four Z / tilt fixing screw grooves 51, and a Z / tilt fixing screw 44 is inserted in order to fix the Z / tilt base 40 and the unit base 50 at a predetermined interval. The Further, the unit base 50 is provided with four screw holes (not shown), and the base fixing screws 52 inserted into the screw holes are inserted into the grooves provided in the base 60, The unit base 50 is fixed to the base 60. The unit base 50 is provided with one support / camera window hole 53. A support 71 is passed through the support / camera window hole 53.

  As described above, according to the stage apparatus 1 according to the embodiment of the present invention, the flat plate-shaped rotary base 10, the Y base 20, the X base 30, the Z / tilt base 40, and the unit base 50 are stacked, Positioning in the direction, Y direction, Z direction, tilt, and rotation direction is performed. Thereby, the height dimension which laminated | stacked each base becomes small, and it can implement | achieve size reduction as a whole. The stage apparatus 1 also includes a stand pin 29 for positioning adjustment, a stand pin hole 102, a Y cam follower (nut) 23, a Y cam follower 32, an X cam follower (nut) 34, an X cam follower 42, and a Z / tilt adjustment screw. 45 and the like, and adjustment knobs 101, 201, 301 and Z / tilt adjustment screws 45, which are adjustment tools that can be operated by an operator, are provided. Further, the operator needs to loosen the rotation fixing screw 11, the Y fixing screw 21, the X fixing screw 36 and the Z / tilt fixing screw 44 prior to the adjustment work. Is provided. Thereby, since the stage apparatus 1 is provided with a bearing and a guide function in the base, it is not necessary to separately provide mechanical elements such as a bearing device and a guide roller, the number of parts can be reduced, and a simple configuration can be achieved. Positioning can be performed. In addition, the operator manually adjusts the positioning of the X direction, Y direction, Z direction, tilt, and rotation direction by loosening the target fixing screw and operating the adjustment tool to perform positioning. After completion, the fixing screw may be tightened. Thereby, the positioning adjustment by an operator's manual work becomes easy.

  The present invention has been described with reference to the embodiment. However, the present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the technical idea thereof. For example, in the above-described embodiment, the rotation base 10 is rotated by fitting the recess 17 of the rotation base 10 and the protrusion 27 of the Y base 20, but the protrusion of the rotation base 10 and the Y base You may make it fit 20 recessed parts.

  In addition, an abrasion-resistant dry lubricating film may be applied to the sliding portions where the rotary base 10, the Y base 20, the X base 30, and the Z / tilt base 40 move in accordance with the positioning adjustment. Thereby, the rotation base 10 etc. can be moved easily, without using a separate mechanical element. Further, since the wear-resistant dry lubricating film has a low dust generation property, the stage apparatus 1 can be used in a clean room.

DESCRIPTION OF SYMBOLS 1 Stage apparatus 10 Rotation base 11 Rotation fixing screw 12 Screw hole 13 Column fixing screw 14 X fixing screw window hole 15 Camera window hole 16 Groove 17 Recess 20 Y base 21 Y fixing screw 22 Screw hole 23 Y cam follower (nut)
24 Groove 25 Rotation Fixing Screw Groove 26 Prop Hole 27 Protrusion 28 Prop / Camera Window Hole 29 Stand Pin 30 X Base 31 Y Fixing Screw Groove 32 Y Cam Follower 33 Y Guide Hole 34 X Cam Follower (Nut)
35 Groove 36 X Fixing Screw 37 Screw Hole 38 Prop Hole 39 Camera Window Hole 40 Z / Tilt Base 41 X Fixing Screw Groove 42 X Cam Follower 43 X Guide Hole 44 Z / Tilt Fixing Screw 45 Z / Tilt Adjusting Screw 46 Prop Hole 47 Camera window hole 50 Unit base 51 Z / tilt fixing screw groove 52 Base fixing screw 53 Base / camera window hole 60 Base 70 Mounting base 71 Post 80 Camera 100 Rotating adjustment tool 101 Adjustment knob 102 Stand pin Hole 103 Bracket 200 Y-axis adjustment tool 201 Adjustment knob 202 Connecting bar 203 Fixing tool 300 X-axis adjustment tool 301 Adjustment knob 302 Connection bar 303 Fixing tool 310 Y-axis fixing tool 311 Connection bar 312 Mounting bar 400 X-axis fixing tool 401 Connection Bar 402 Mounting bar

Claims (3)

A unit base, a Z / tilt base, an X base, a Y base, and a rotating base that perform positioning in the X direction, the Y direction, the Z direction, the tilt, and the rotational direction with respect to the base for a predetermined object placed on the mounting table are provided. Stage device
The unit base is
It has a through hole through which the support attached to the mounting table passes, and is fixedly installed on the base.
The Z / tilt base is
A plurality of Z / tilt adjusting members that abut on the unit base and adjust the distance and tilt in the Z direction, an X guide hole that accommodates the X guide member and guides the X guide member in the X direction, and the support column Provided with a through-hole to pass through, provided opposite to the plane of the unit base and separated by a predetermined distance by the adjustment,
The X base is
An X guide holding member that is configured integrally with the X guide member and holds the X base between the X guide member, a groove that holds the X guide holding member, and a Y guide member that is contained in the Y guide member. Provided with a Y guide hole for guiding in the Y direction and a through hole through which the column is passed, and provided to face the plane of the Z / tilt base,
The Y base is
A Y guide holding member that is configured integrally with the Y guide member and holds the Y base between the Y guide member, a groove that houses the Y guide holding member, and a convex portion that serves as a base point for rotating the rotating base And a through-hole through which the column passes, provided opposite to the plane of the X base,
The rotating base is
A stage apparatus, comprising: a concave portion for fitting the convex portion of the Y base to rotate the rotary base; and an attachment member for attaching the column. The stage device is provided facing the plane of the Y base. The stage apparatus according to claim 1, wherein
The Z / tilt base is
A fixing member for fixing the unit base at a predetermined distance apart from the plane of the unit base;
The X base is
The X guide, in which the X guide member is housed, includes a fixing member that overlaps and fixes the Z / tilt base in a state facing the plane of the Z / tilt base, and an X guide member that is configured integrally with the X guide holding member. An X-axis adjusting device that moves the X base, the Y base, and the rotating base in the X direction by moving along the hole;
The Y base is
A fixing member that is overlapped and fixed in a state of being opposed to the plane of the X base, and a Y guide member that is configured integrally with the Y guide gripping member, along the Y guide hole in which the Y guide member is accommodated. A Y-axis adjusting device that moves the Y base and the rotation base in the Y direction by moving the lamp, and a stand pin fixedly installed on the Y base.
The rotating base is
The fixing member that is overlapped and fixed in a state facing the plane of the Y base, and the first side surface of the stand pin is pressed, or the side surface opposite to the first side surface is pressed, and the convex A stage apparatus comprising: a rotation adjusting device that moves the rotation base in a rotation direction by rotating the recess with the portion as a base point. The stage apparatus according to claim 1 or 2,
The predetermined object is a camera, and the rotation base, the Y base, the X base, the Z / tilt base, and the unit base are provided with through holes, and the camera is accommodated in the through holes, or the camera is installed in the through holes. A stage device characterized by passing an optical axis.

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