TWM450422U - Advanced oxidation processing device for organic waste gas - Google Patents

Description

Advanced oxidation treatment device for organic waste gas

The present invention relates to an advanced oxidation treatment device for organic waste gas, in particular to a treatment device for removing the exhaust gas of VOCs generated by the semiconductor industry, whereby the advanced oxidation treatment device of the present invention enhances oxidation power and efficiency without generating chlorine. The advantages of organic materials are in line with the semiconductor manufacturing air pollution control and emission standards and low power consumption requirements, and achieve an efficient removal rate for innovative applications.

According to the vigorous development of the domestic electronic technology industry, and the government agencies vigorously promote high-tech industrial industries, the domestic photovoltaic industry and the semiconductor industry have become China's double-star industry. When the high-tech industry is changing with the market demand, the species that are harmful to the environment are also relatively large and more difficult to handle. Due to the semiconductor component process, many environmental problems such as waste liquid, waste water, and exhaust gas may be derived. For example, a semiconductor process may use an organic solvent such as a photoresist liquid or a cleaning liquid to cause VOC (Volatile Organic Compound) to escape pollution. These spilled organic solvent vapors are extremely harmful to human health. When there is a foul smell or excessive concentration, there is a risk of explosion and burning. It must be disposed of and must not be directly discharged into the atmosphere.

After the press, with the completion of the Air Pollution Prevention and Control Law and the improvement of environmental awareness by the Environmental Protection Agency of the Executive Yuan, the concept of social responsibility related to environmental protection has gradually been established in major enterprises, and the concentration of ozone in the air has gradually increased year by year. It replaces the suspended particles and becomes the main pollutant affecting the air pollution index. The ozone concentration is mainly derived from the reaction of ozone precursors and light after VOCs and NOx emissions, and the requirements for air pollution prevention and control are improved to granular pollution. Oxidation The discharge of substances and sour gas gradually shifts to pollution emission control such as NOx and VOCs and odors. Therefore, it is imperative to improve the control of VOCs emissions.

Most of the treatment methods for VOCs are scrubbers (tanks). The scrubbers are used in exhaust gas treatment systems for many years. They are mainly used to treat acid waste gas and ammonia gas. The focus is on the use of acid waste gas and ammonia waste gas. The characteristics of water absorption are treated under the appropriate pH control. The main treatment methods are as follows:

(1) Chemical oxidation method: the volatile organic compound is decomposed and oxidized by adding hydrogen peroxide or sodium hypochlorite aqueous solution (bleached water) to the washing water. Although this method can remove volatile organic compounds (VOC), the reaction rate is slow, resulting in the suspension of the washing tower. The time needs to be lengthened to form a burden on equipment investment, and the residual hydrogen peroxide or sodium hypochlorite aqueous solution (bleached water) forms a problem of wastewater.

(2) Activated carbon tower absorption method: The activated carbon column is used as the absorption tower of volatile organic compounds (VOC). This method can effectively adsorb volatile organic compounds (VOC) to achieve the purpose of waste gas treatment; Carbon can cause solid waste, secondary pollution, and high cost.

(3) Ozone treatment method: Decomposition of volatile organic compounds (VOC) by ozone, this method can also effectively adsorb volatile organic compounds (V0C) to achieve the purpose of exhaust gas treatment, but the equipment cost and operation cost are expensive, and it is ozone. The main reason why the treatment method cannot be promoted.

(4) Plasma treatment method: Decomposing volatile organic compounds (VOC) by using plasma, this method can also effectively adsorb volatile organic compounds (VOC) to achieve the purpose of exhaust gas treatment, but the equipment cost and operation cost are expensive. It is the main reason why the plasma processing method cannot be promoted.

(5) Thermal cracking method: Decomposing volatile organic compounds (VOC) by using plasma, this method can also effectively adsorb volatile organic compounds (VOC) to achieve the purpose of exhaust gas treatment, but the same equipment cost and operation cost are expensive. problem.

The reason is that the creator has been rich in design and development and practical production experience in the relevant industries for many years. Further research and improvement will be provided to provide an advanced oxidation treatment device for organic waste gas, which is expected to have a more diverse and different structure and is expected to achieve better practical value.

The main purpose of this creation is to provide an advanced oxidation treatment device for organic waste gas, which utilizes a technology such as a double oxidation tank to oxidize organic substances into non-polluting devices, and the technology can be effectively applied to air pollution prevention and control, and wastewater. Treatment and recycling, environmental re-cultivation, deodorization, etc. are aimed at improving organic waste gas pollution.

The purpose and efficacy of the advanced oxidation treatment device for organic waste gas is achieved by the following technology: the washing tower unit is connected to the double oxidation tank, and the oxidant (ozone or hydrogen peroxide) is introduced into the pipeline to destroy the pollutant by the oxidant. Ingredients to oxidize volatile organic compounds in waste gas or waste water into carbon dioxide, water and inorganic salts to achieve low energy consumption and high efficiency and meet the air pollution control and emission standards of semiconductor manufacturing industries. Environmental and derivative environmental issues, and increase the efficiency of the treatment; thereby, through this device to achieve increased oxidative power and efficiency without the formation of chlorine-containing organic substances, and achieve high efficiency.

The advanced oxidation treatment device for organic waste gas as described above further, when introducing an oxidant such as ozone or hydrogen peroxide into the pipe between the scrubber unit and the first oxidation tank, is provided with a mixer on the pipe to dissolve the oxidant Introduced into the liquid.

In the advanced oxidation treatment device for organic waste gas as described above, when an oxidant such as ozone or hydrogen peroxide is introduced into the pipe between the first oxidation tank and the second oxidation tank, a mixer is disposed on the pipe to dissolve the oxidant. Those who are introduced into the liquid.

The advanced oxidation treatment device for organic waste gas as described above is further provided with a circulation return pipe to the water storage tank of the scrubber unit after the second oxidation tank.

The advanced oxidation treatment device for organic waste gas as described above further comprises a first intermediate return pipe after the second oxidation tank, wherein the first intermediate return pipe directs the treatment liquid back to the pipe before the first oxidation tank to allow the treatment liquid Partial recirculation of the double oxidation tank reprocessing process.

The advanced oxidation treatment device for organic waste gas as described above further comprises a second intermediate return pipe after the first oxidation tank, wherein the second intermediate return pipe directs the treatment liquid back to the pipe before the first oxidation tank to allow the treatment liquid Partially repeating the reprocessing of the first oxidation tank.

<Creation>

(1)‧‧‧Washing tower unit

(11) ‧‧‧ air inlet

(12) ‧ ‧ vents

(13) ‧‧‧Water storage tank

(2) ‧‧‧first oxidation tank

(21) ‧‧‧First pipeline

(22) ‧‧‧Second midway return pipeline

(3) ‧‧‧Second oxidation tank

(31) ‧‧‧Second Pipeline

(32) ‧‧‧Second halfway return pipeline

(4) ‧ ‧ Circulating return pipeline

(5) ‧‧‧Power Pump

(6) ‧ ‧ oxidant

(7)‧‧‧ Mixer

(8) ‧‧‧Water quality monitoring device

(9) ‧ ‧ Wastewater discharge pipeline

(A) ‧ ‧ valves

The first picture: the structure of the creation

In order to make the technical content, creative purpose and the effect achieved by this creation more complete and clear, please elaborate on it below, and please refer to the illustrated drawings and drawings: First, please Referring to the first figure, the structural diagram of the advanced oxidation treatment device of the organic waste gas of the present invention comprises: a washing tower unit (1), which is provided with an air inlet (11) for receiving organic waste gas to The organic waste gas body is spray-washed in the washing liquid, and an exhaust port (12) for extracting the cleaned gas, and the washing tower unit (1) has a water storage tank (13) for supplying the liquid for spray washing; The first oxidation tank (2) is connected to the scrubber unit (1) via a first conduit (21), and the oxidant (6) is correspondingly introduced in the first conduit (21), and a mixing is provided at the introduction of the oxidant (6). The oxidant (6) is further ozone or hydrogen peroxide; and a second oxidation tank (3) is connected to the first oxidation tank (2) via a second conduit (31) and to the second conduit (21) Corresponding to the introduction of the oxidant (6), the oxidant (6) is provided with a mixer (7), the oxidant is further ozone or hydrogen peroxide; a circulating return pipe (4), which is a pipe for recycling and reprocessing in the water storage tank (13) of the washing tower unit (1) by the second oxidation tank (3); a power pump (5) for use The driving cycle is formed by the first and second pipes (21), (31) and the circulating return pipe (4) connected to the washing tower unit (1), the first and second oxidation tanks (2), and (3). Power equipment.

The implementation state is as follows: Please refer to the first figure together. First, the scrubber unit (1) receives the organic polluted exhaust gas into the scrubber unit (1) via the air inlet (11), via the scrubber. The unit (1) is introduced into the washing liquid from the water storage tank (13), and the organic contaminated exhaust gas is washed by spray washing to dissolve the pollutants in the washing liquid, and the cleaned air after washing is exhausted through the washing tower unit (1). The mouth (12) is led out, after which the washing wastewater washed by the washing tower unit (1) is actuated by the power pump (5), and is transported by the first pipe (21) to the first oxidation tank (2), and During the retransporting process, an oxidant (6) is introduced onto the first conduit (21). The oxidant (6) is ozone or hydrogen peroxide, and the oxidant (6) is introduced into the first conduit (21) via a mixer (7). Corresponding to oxidizing the oxidant (6) in the washing wastewater, and simultaneously performing an oxidation reaction in the first oxidation tank (2) to destroy the pollutant component by the oxidant (6), and decompose the volatile organic substance to oxidize to carbon dioxide ( CO.'s _2), water (H ₂ O) and inorganic salts; Next, after the completion of a first oxide oxidation tank (2) reaction of It is transported to the second oxidation tank (3) via the second conduit (31), and during the delivery thereof, an oxidant (6) is introduced on the second conduit (31), the oxidant (6) being ozone or hydrogen peroxide, and the oxidant thereof (6) When the second pipe (31) is introduced, the oxidant (6) is required to be fused to the washing wastewater via a mixer (7), and the second oxidation reaction is carried out in the second oxidation tank (3). The oxidant (6) destroys the pollutant components, decomposes the volatile organic substances and oxidizes them into carbon dioxide (CO2), water (H2O) and inorganic salts, and after the secondary oxidation reaction, there is still trace organic waste in the washing liquid. Therefore, the second oxidation tank (3) is led back to the water storage tank (13) via the circulation return pipe (4) through the washing liquid to be reprocessed through the cycle.

The implementation state 2 is as follows: Please refer to the first figure together, and the implementation state 2 is substantially the same as the above-mentioned implementation state 1, and the organic pollution exhaust gas is received by the air inlet (11) of the washing tower unit (1) to the washing tower. In the unit (1), the washing liquid is introduced from the water storage tank (13) via the washing tower unit (1), and the organic contaminated exhaust gas is washed by spray washing to dissolve the pollutants in the washing liquid, and the clean air after washing is passed through The exhaust port (12) of the washing tower unit (1) is led out, and then the washing wastewater washed by the washing tower unit (1) is actuated by the power pump (5) and transported by the first pipe (21) to the first In the oxidation tank (2), during the re-conveying process, an oxidant (6) is introduced into the first pipe (21), the oxidant (6) is ozone or hydrogen peroxide, and the oxidant (6) is introduced into the first pipe (21). At the same time, the oxidant (6) is required to be fused to the washing wastewater via a mixer (7), and at the same time, an oxidation reaction is performed in the first oxidation tank (2) to destroy the pollutant component by the oxidizing agent (6). decomposition of volatile organic materials into carbon dioxide (CO _2), water (H ₂ O) and inorganic salts; Next, when the first oxygen After the primary oxidation reaction of the tank (2) is completed, it is transported to the second oxidation tank (3) via the second conduit (31), and the oxidant (6) is introduced into the second conduit (31) during the conveying process. The oxidant (6) is ozone or hydrogen peroxide, and when the oxidant (6) is introduced into the second conduit (31), the oxidant (6) is required to be dissolved in the washing wastewater via a mixer (7), and at the same time, in the second The oxidation tank (3) undergoes a secondary oxidation reaction to destroy the pollutant component by the oxidant (6), decompose the volatile organic substance to oxidize into carbon dioxide (CO2), water (H2O) and inorganic salts, and in the secondary oxidation reaction After that, there is still a trace of organic waste in the washing liquid. Therefore, a first intermediate return pipe (32) is provided after the second oxidation tank (3), and the first intermediate return pipe (32) returns the washing liquid to the first a first pipe (21) in front of the oxidation tank (2) to allow the washing liquid to partially recycle the oxidation treatment of the first and second oxidation tanks (2), (3); or after the first oxidation tank (2) a second intermediate return pipe (22) is provided, and the second intermediate return pipe (22) guides the washing liquid back to the first pipe (21) before the first oxidation tank (2) to allow The polyester liquid portion repeatedly circulates the oxidation reprocessing process of the first oxidation tank (2); however, the above partial reflux recirculation treatment, similarly, still has to pass through the circulation return pipe (4) after the second oxidation tank (3), The washing liquid is led back to the water reservoir (13) for reprocessing through the overall cycle.

Further, a water quality monitoring device (8) is further disposed on the circulation return pipe (4) after the second oxidation tank (3), and the water quality monitoring device (8) may include a pH meter and a redox potentiometer [ ORP], in order to detect the water quality and oxygen content of the oxidized liquid, to determine the liquid ORP value after the oxidation reaction as a parameter for controlling the addition of the oxidant (6), and at the same time, the concentration of the organic pollutant contained in the liquid is known. As a benchmark for loop processing.

When the organic waste gas is cyclically oxidized, the water produced by the washing and oxidation treatment may extend a waste water discharge pipe (9) on the first pipe (21), and the waste water is discharged through the waste water discharge pipe (9). Excluded, the valve (9) is provided with a valve (A) corresponding to the control of the discharge aging; in addition, the first and second intermediate return pipes (32), (22) are also provided with a valve (A) Corresponding to the timing of the control loop.

The above-mentioned embodiments or drawings are not intended to limit the structure of the present invention, and any suitable variations or modifications of those skilled in the art should be considered as not departing from the scope of the invention.

From the above, the composition and use of the creation structure can be seen that this creation has the following advantages compared with the existing structure, and is described as follows:

1. Consumables without frequent replacement

2. Small land area demand

3. No need to consume fuel

4. Not affected by high boiling substances

5. No high temperature operation, low risk

6. Significant reduction in water and wastewater

In summary, the present embodiment can achieve the expected use efficiency, and the specific structure disclosed is not only found in similar products, nor has it been disclosed before the application, and has fully complied with the requirements and requirements of the Patent Law.爰Proposing an application for a new type of patent in accordance with the law, and pleading for a review and granting a patent, it is really sensible.

(1)‧‧‧Washing tower unit

(11) ‧‧‧ air inlet

(12) ‧ ‧ vents

(13) ‧‧‧Water storage tank

(2) ‧‧‧first oxidation tank

(21) ‧‧‧First pipeline

(22) ‧‧‧Second midway return pipeline

(3) ‧‧‧Second oxidation tank

(31) ‧‧‧Second Pipeline

(32) ‧‧‧Second halfway return pipeline

(4) ‧ ‧ Circulating return pipeline

(5) ‧‧‧Power Pump

(6) ‧ ‧ oxidant

(7)‧‧‧ Mixer

(8) ‧‧‧Water quality monitoring device

(9) ‧ ‧ Wastewater discharge pipeline

(A) ‧ ‧ valves

Claims (10)

The invention relates to an advanced oxidation treatment device for organic waste gas, which comprises: a washing tower unit, which is provided with an inlet port for receiving organic waste gas to spray and wash the organic waste gas body in the washing liquid, and a gas after washing and discharging a venting port, the washing tower unit has a water storage tank for supplying the liquid for spraying; a first oxidation tank is connected to the washing tower unit via a first pipe, and an oxidant is introduced correspondingly to the first pipe; The second oxidation tank is connected to the first oxidation tank via a second pipeline, and the second pipeline is correspondingly introduced with an oxidant; and a circulation reflux pipeline is recycled and recirculated in the water storage tank connected to the scrubber unit by the second oxidation tank. The utility model relates to a pipeline, and a power pump, which is a power device for driving the washing tower unit, the first and second pipelines connected to the first and second oxidation tanks, and the circulating return pipeline to form a driving cycle. The advanced oxidation treatment apparatus for organic waste gas according to claim 1, wherein the first and second conduits are provided with a mixer. The advanced oxidation treatment device for organic waste gas according to claim 1, wherein a first intermediate return conduit is disposed behind the second oxidation tank, and the first intermediate return conduit is coupled back to the first before the first oxidation tank. On the pipe. An advanced oxidation treatment apparatus for organic waste gas according to claim 1 or 3, wherein a second intermediate return conduit is disposed on the second conduit between the first oxidation tank and the second oxidation tank, and the second intermediate return conduit The first pipe that leads back to the first oxidation tank. An advanced oxidation treatment device for organic waste gas according to claim 4, wherein a water quality monitoring device is disposed on the circulation return pipe after the second oxidation tank. The advanced oxidation treatment device for organic waste gas according to claim 5, wherein the water quality monitoring device comprises a pH meter and a redox potentiometer (ORP). The advanced oxidation treatment device for organic waste gas according to claim 4, wherein the first pipe extends a waste water discharge pipe for discharging waste water. The advanced oxidation treatment device for organic waste gas according to claim 7, wherein the waste water discharge pipe is provided with a valve corresponding to the control of the discharge aging. The advanced oxidation treatment device for organic waste gas according to claim 3, wherein the first intermediate return pipe is provided with a valve corresponding to the control cycle timing. The advanced oxidation treatment device for organic waste gas according to claim 4, wherein the second intermediate return pipe is provided with a valve corresponding to the control cycle timing.