TWM449346U - Die bonding device - Google Patents

Die bonding device Download PDF

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Publication number
TWM449346U
TWM449346U TW101221843U TW101221843U TWM449346U TW M449346 U TWM449346 U TW M449346U TW 101221843 U TW101221843 U TW 101221843U TW 101221843 U TW101221843 U TW 101221843U TW M449346 U TWM449346 U TW M449346U
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TW
Taiwan
Prior art keywords
needle
die bonding
colloid
bonding device
glue
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Application number
TW101221843U
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Chinese (zh)
Inventor
zong-han Li
Cheng-Ping Chang
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Lextar Electronics Corp
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Publication date
Application filed by Lextar Electronics Corp filed Critical Lextar Electronics Corp
Priority to TW101221843U priority Critical patent/TWM449346U/en
Publication of TWM449346U publication Critical patent/TWM449346U/en
Priority to CN 201320169996 priority patent/CN203192773U/en

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Abstract

A die bonding device includes a glue needle and a rotating module. The glue needle provides a colloid. The rotating module has a spindle for rotating the glue needle and the colloid on the glue needle changes its viscosity by a horizontal rotating force from the stir of the glue needle.

Description

固晶裝置Solid crystal device

本創作是有關於一種固晶裝置,且特別是有關於一種用以減少固晶膠厚度的固晶裝置。The present invention relates to a die bonding device, and more particularly to a die bonding device for reducing the thickness of a die bond.

顧名思義,固晶裝置乃是將晶粒固定在基板上的自動化設備。固晶裝置包括一取晶機構、一輸送帶以及一點膠機構。輸送帶輸送一基板至點膠機構。點膠機構將固晶膠移至基板上欲放置晶粒的位置,接著再由輸送帶將基板輸送至取晶機構。取晶機構可將晶粒移轉至基板上與固晶膠接合。As the name implies, the die bonding device is an automated device that holds the die on the substrate. The die bonding device comprises a crystal taking mechanism, a conveyor belt and a glue dispensing mechanism. The conveyor belt transports a substrate to the dispensing mechanism. The dispensing mechanism moves the die attach glue to the position on the substrate where the die is to be placed, and then the substrate is transported to the pick-up mechanism by the conveyor belt. The crystal pulling mechanism can transfer the crystal grains to the substrate and bond with the solid crystal glue.

然而,固晶膠的厚度受到膠針的下壓力與固晶膠的本身特性的影響,黏滯力(黏滯係數)越高的膠體,流動性越差;而黏滯力(黏滯係數)越低的膠體,流動性越佳。若受限於固晶膠的材料特性,選擇黏滯力較高的膠體,而無法使其厚度降低時,將造成晶粒與基板之間的熱阻過高。若為了減少熱阻,而需要進行減少固晶膠厚度的相關製程時,又會影響單位時間的產能,造成產品出貨時間(cycle time)的增加。However, the thickness of the solid crystal glue is affected by the downforce of the glue needle and the characteristics of the solid glue. The higher the viscosity (viscosity coefficient), the worse the fluidity; the viscosity (viscosity coefficient) The lower the colloid, the better the fluidity. If it is limited by the material properties of the solid crystal glue, if the colloid with higher viscous force is selected and the thickness cannot be reduced, the thermal resistance between the crystal grains and the substrate will be too high. If the related process of reducing the thickness of the solid crystal glue is required in order to reduce the thermal resistance, the production capacity per unit time is affected, resulting in an increase in the cycle time of the product.

本創作係有關於一種固晶裝置,用以減少固晶膠的厚度。This creation is about a die bonding device to reduce the thickness of the die bond.

根據本創作之一方面,提出一種固晶裝置,包括一膠 針以及一轉動模組。膠針用以提供一膠體。轉動模組具有一旋轉軸,以帶動膠針旋轉,並使膠體受膠針之一水平旋轉力的攪動而改變其黏性。According to one aspect of the present invention, a solid crystal device is proposed, including a glue The needle and a rotating module. The glue needle is used to provide a gel. The rotating module has a rotating shaft to drive the rubber needle to rotate, and the colloid is changed by the horizontal rotating force of the rubber needle to change its viscosity.

為了對本創作之上述及其他方面有更佳的瞭解,下文特舉較佳實施例,並配合所附圖式,作詳細說明如下:In order to better understand the above and other aspects of the present invention, the preferred embodiments are described below, and in conjunction with the drawings, the detailed description is as follows:

本實施例之固晶裝置,係改良負責轉移膠體至基板上的點膠機構,使其膠針具有旋轉功能。當膠針沾附膠體或膠針射出膠體以提供固晶用的膠體時,膠針藉由轉動模組控制其旋轉速度,而膠體被膠針攪動後將以一剪切應變速率流動。當膠體的剪切應變速率越高時,膠體的黏性(黏滯係數)會隨之降低,因而改變膠體的黏性。The die bonding device of this embodiment improves the dispensing mechanism responsible for transferring the colloid onto the substrate, so that the rubber needle has a rotating function. When the glue sticks the colloid or the glue needle to spray the gel to provide the colloid for the solid crystal, the needle controls the rotation speed by the rotation module, and the gel is agitated and then flows at a shear strain rate. When the shear strain rate of the colloid is higher, the viscosity (viscosity coefficient) of the colloid is reduced, thereby changing the viscosity of the colloid.

請參照第1A及1B圖,其分別繪示剪切應力(τ)與剪切應變速率(ν)的關係圖以及膠體黏性(μ)與剪切應變速率(ν)的關係圖。在第1A圖中,線段1表示為賓漢形流體,其剪切應力(τ)與剪切應變速率(ν)呈線性關係的直線,而線段2表示為剪切變稀型流體,其黏性(μ)與剪切應變速率(ν)呈非線性關係的曲線。Please refer to Figures 1A and 1B, which respectively show the relationship between shear stress (τ) and shear strain rate (ν) and the relationship between colloidal viscosity (μ) and shear strain rate (ν). In Figure 1A, line 1 is represented as a Bingham-shaped fluid with a linear relationship between shear stress (τ) and shear strain rate (ν), while line 2 is represented as a shear-thinning fluid with a viscosity A curve in which the property (μ) is nonlinearly related to the shear strain rate (ν).

由第1B圖可知,無論是賓漢形流體或剪切變稀型流體,當剪切應變速率越高時,黏性會隨之降低。因此,本實施例可利用剪切應變速率越高則黏性越低的特性來改變膠體的黏性,並增加膠體的流動性,使得固晶用的導熱膠的厚度相對較薄,以減少熱阻。此外,當膠針停止旋轉並將膠體移至基板上時,由於膠體的黏性已被改變,因此 即使選擇黏滯力較高的膠體,膠體附著在基板上的厚度也可以控制在預定的厚度範圍內,而達到預期的功效。It can be seen from Fig. 1B that the viscosity is reduced as the shear strain rate is higher, whether it is a Bingham-shaped fluid or a shear-thinning fluid. Therefore, in this embodiment, the viscosity of the colloid can be changed by using the characteristic that the higher the shear strain rate is, the lower the viscosity is, and the fluidity of the colloid is increased, so that the thickness of the thermal conductive adhesive for the solid crystal is relatively thin to reduce heat. Resistance. In addition, when the glue needle stops rotating and the colloid is moved to the substrate, since the viscosity of the colloid has been changed, Even if a colloid having a higher viscous force is selected, the thickness of the colloid attached to the substrate can be controlled within a predetermined thickness range to achieve the desired effect.

以下係提出實施例進行詳細說明,實施例僅用以作為範例說明,並非用以限縮本創作欲保護之範圍。The following is a detailed description of the embodiments, which are intended to be illustrative only and not to limit the scope of the invention.

第2圖繪示依照本創作一實施例之膠針110以及轉動模組120的示意圖。膠針110固定於轉動模組120的旋轉軸130上。旋轉軸130的一端具有一夾頭140,用以夾持膠針110。在一實施例中,轉動模組120包括一馬達150,馬達150可直接驅動旋轉軸130並控制旋轉軸130的轉速。此外,馬達150亦可透過變速機構(例如齒輪組)來驅動旋轉軸130並控制旋轉軸130的轉速。FIG. 2 is a schematic view of the plastic needle 110 and the rotating module 120 according to an embodiment of the present invention. The glue needle 110 is fixed to the rotating shaft 130 of the rotating module 120. One end of the rotating shaft 130 has a collet 140 for holding the plastic needle 110. In one embodiment, the rotary module 120 includes a motor 150 that directly drives the rotary shaft 130 and controls the rotational speed of the rotary shaft 130. Further, the motor 150 can also drive the rotating shaft 130 and control the rotational speed of the rotating shaft 130 through a shifting mechanism such as a gear train.

在一實施例中,夾頭140可根據膠針110的尺寸來調整鬆緊度,並可更換適合尺寸的膠針110,以調整膠針110的沾膠量。舉例來說,膠針110的尺寸或針頭部分的表面積越大,沾膠量也會越大;反之,則沾膠量會越小。In an embodiment, the collet 140 can adjust the tightness according to the size of the needle 110, and can replace the needle 110 of a suitable size to adjust the amount of glue of the needle 110. For example, the larger the size of the needle 110 or the surface area of the needle portion, the greater the amount of glue; conversely, the smaller the amount of glue.

本實施例之膠針110不限定為沾附膠體用之膠針110,亦可為吸附膠體並將膠體射出之膠針110。當膠針110配合膠盤160一起使用時,膠盤160可盛放供膠針110沾附之膠體G,如第3A圖所示。當膠針110配合針管(未繪示)一起使用時,針管可容置供膠針110射出之膠體。The glue needle 110 of the embodiment is not limited to the glue needle 110 for adhering the glue, and may be the glue needle 110 for adsorbing the glue and ejecting the glue. When the glue needle 110 is used together with the rubber disk 160, the rubber disk 160 can hold the glue G to which the glue needle 110 is attached, as shown in FIG. 3A. When the glue needle 110 is used together with a needle tube (not shown), the needle tube can accommodate the gel for the glue needle 110 to be ejected.

請參照第3A~3F圖,其繪示膠針110與膠盤160一起使用的點膠步驟的示意圖。在第3A~3C圖中,膠針110先橫向移動至膠盤160上方,之後,膠針110往下移動至膠盤160的盛放皿162中,以沾附膠體G,接著,膠針110往上移動並且針頭沾附一部分的膠體G’。在第3D~3E圖 中,膠針110移動至基板111的上方,並旋轉膠針110使其產生一水平旋轉力F。膠體G’受到水平旋轉力F的攪動而產生剪切應力。隨著攪動的切線速度增加,膠體G’的剪切應變速率也相對增加,因而改變膠體G’的黏性。此外,膠體G’也會受到水平旋轉力F之攪動而產生離心力。在第3E~3F圖中,當膠體G’的黏性改變之後,膠針110往下移動至基板111,使膠體G’附著在基板111上欲放置晶粒的位置,接著,膠針110往上移動,以繼續執行下一個點膠步驟。Please refer to FIGS. 3A-3F for a schematic diagram of the dispensing step of the glue needle 110 used with the rubber disk 160. In the 3A-3C figure, the glue needle 110 is first moved laterally above the rubber disk 160, after which the glue needle 110 is moved down to the holding dish 162 of the plastic disk 160 to adhere to the colloid G, and then, the glue needle 110 Move up and the needle sticks to a part of the colloid G'. In the 3D~3E chart In the middle, the glue needle 110 moves above the substrate 111 and rotates the glue needle 110 to generate a horizontal rotational force F. The colloid G' is subjected to agitation by the horizontal rotational force F to generate shear stress. As the tangential velocity of the agitation increases, the shear strain rate of the colloid G' also relatively increases, thereby changing the viscosity of the colloid G'. Further, the colloid G' is also subjected to agitation by the horizontal rotational force F to generate centrifugal force. In the 3E~3F diagram, after the viscosity of the colloid G' is changed, the glue needle 110 is moved down to the substrate 111, so that the colloid G' is attached to the position on the substrate 111 where the crystal grain is to be placed, and then the glue needle 110 is moved toward Move up to continue with the next dispensing step.

在第3E圖中,當膠針110停止旋轉並下壓,以將膠體G’移至基板111上時,此時,無水平旋轉力F的作用下,膠體G’附著在基板111上直到剪切應變速率變為零時,膠體G’將不再流動。由於膠體G’附著在基板111上的厚度取決於膠針110沾附的膠體量以及膠針110下壓時所加入的水平旋轉力F,因此透過上述的點膠步驟時提供的水平旋轉力F,來改變膠體G’的黏性,可有效降低膠體G’附著在基板111上的厚度。In FIG. 3E, when the glue needle 110 stops rotating and is pressed down to move the colloid G' onto the substrate 111, at this time, the colloid G' is attached to the substrate 111 without the horizontal rotation force F until the shearing When the shear strain rate becomes zero, the colloid G' will no longer flow. Since the thickness of the colloid G' attached to the substrate 111 depends on the amount of colloid adhered to the needle 110 and the horizontal rotational force F added when the needle 110 is pressed, the horizontal rotational force F provided when the above dispensing step is passed. In order to change the viscosity of the colloid G', the thickness of the colloid G' attached to the substrate 111 can be effectively reduced.

本實施例之膠體為固晶用的導熱膠,例如銀膠或矽膠,較佳為賓漢型流體或剪切變稀型流體,使得膠體G’被攪動後,其黏性隨著水平旋轉力F的切線速度增加而降低,如第1B圖所示。即使選用的膠體為黏滯力較高的膠體,透過上述的點膠步驟使膠體G’的黏性降低,仍可有效地改變膠體G’的厚度,以控制膠體G’的厚度在預定的厚度範圍內,而達到減少熱阻的功效。The colloid of the embodiment is a thermal conductive adhesive for solid crystal, such as silver glue or silicone rubber, preferably a Bingham type fluid or a shear thinning type fluid, so that the viscosity of the colloid G' is agitated with horizontal rotation force. The tangential speed of F decreases and decreases, as shown in Figure 1B. Even if the selected colloid is a colloid having a higher viscous force, the viscosity of the colloid G' is lowered by the above-mentioned dispensing step, and the thickness of the colloid G' can be effectively changed to control the thickness of the colloid G' at a predetermined thickness. Within the range, the effect of reducing thermal resistance is achieved.

上述之點膠步驟可透過第4圖之固晶裝置100來完 成。請參照第4圖,其繪示依照一實施例之固晶裝置100的示意圖。固晶裝置100包括一工作站101以及一輸送帶104。輸送帶104用以承載一物件(例如基板111),並依序輸送基板111至點膠製程的工作站101。工作站101包括一移動平台102、一膠針110以及一轉動模組120。移動平台102例如是一水平移動平台102a以及一垂直移動平台102b,或是具有點對點移動功能的機械手臂,本創作對此不加以限制。水平移動平台102a用以調整膠針110相對於基板111或膠盤160的水平位置,而垂直移動平台102b用以調整膠針110相對於基板111或膠盤160的垂直位置。透過移動平台102之移動,轉動模組120與膠針110可於膠盤160與基板111之間來回移動,以將膠盤160中的膠體G透過膠針110移轉至基板111上,如第3A~3F圖所示。在點膠過程中,膠針110藉由轉動模組120之旋轉軸130提供一水平旋轉力F,而膠體G’藉由水平旋轉力F之攪拌與離心力的作用而改變其黏性。因此,被膠針110下壓並附著在基板111上的膠體G’,其厚度相對於未受水平旋轉力F攪動的膠體而言較薄,而達到減少熱阻的功效。The above dispensing step can be completed by the die bonding device 100 of FIG. to make. Please refer to FIG. 4 , which illustrates a schematic diagram of a die bonding apparatus 100 in accordance with an embodiment. The die bonding apparatus 100 includes a workstation 101 and a conveyor belt 104. The conveyor belt 104 is used to carry an object (for example, the substrate 111), and sequentially transports the substrate 111 to the workstation 101 of the dispensing process. The workstation 101 includes a mobile platform 102, a plastic needle 110, and a rotating module 120. The mobile platform 102 is, for example, a horizontal mobile platform 102a and a vertical mobile platform 102b, or a robotic arm having a point-to-point moving function, which is not limited in this creation. The horizontal moving platform 102a is used to adjust the horizontal position of the plastic needle 110 relative to the substrate 111 or the plastic disk 160, and the vertical moving platform 102b is used to adjust the vertical position of the plastic needle 110 relative to the substrate 111 or the plastic disk 160. Through the movement of the mobile platform 102, the rotating module 120 and the plastic needle 110 can be moved back and forth between the rubber disc 160 and the substrate 111 to transfer the colloid G in the plastic disc 160 to the substrate 111 through the plastic needle 110, as described in 3A~3F shown in the figure. In the dispensing process, the glue needle 110 provides a horizontal rotational force F by the rotary shaft 130 of the rotary module 120, and the colloid G' changes its viscosity by the action of the horizontal rotational force F and the centrifugal force. Therefore, the colloid G' pressed down by the glue needle 110 and attached to the substrate 111 is thinner than the colloid which is not agitated by the horizontal rotational force F, and the effect of reducing the thermal resistance is achieved.

由上述的說明可知,本實施例之固晶裝置100利用具有旋轉功能的膠針110及膠體本身的材料特性,來減少膠體G’附著於基板111上的厚度,設備簡易且容易實現,故不會因製程的難度過高或難以控制製程的參數而影響單位時間的產能或造成產品出貨時間的增加。It can be seen from the above description that the die bonding apparatus 100 of the present embodiment reduces the thickness of the colloid G′ attached to the substrate 111 by using the material characteristics of the rubber needle 110 having the rotation function and the colloid itself, and the device is simple and easy to implement, so It may affect the capacity per unit time or increase the shipment time of the product due to the difficulty of the process or the difficulty in controlling the parameters of the process.

綜上所述,雖然本創作已以較佳實施例揭露如上,然其並非用以限定本創作。本創作所屬技術領域中具有通常知識者,在不脫離本創作之精神和範圍內,當可作各種之更動與潤飾。因此,本創作之保護範圍當視後附之申請專利範圍所界定者為準。In summary, although the present invention has been disclosed above in the preferred embodiments, it is not intended to limit the present invention. Those who have ordinary knowledge in the technical field of the present invention can make various changes and refinements without departing from the spirit and scope of the present invention. Therefore, the scope of protection of this creation is subject to the definition of the scope of the patent application.

100‧‧‧固晶裝置100‧‧‧Solid crystal device

101‧‧‧工作站101‧‧‧Workstation

102‧‧‧移動平台102‧‧‧Mobile platform

102a‧‧‧水平移動平台102a‧‧‧Horizontal mobile platform

102b‧‧‧垂直移動平台102b‧‧‧Vertical mobile platform

110‧‧‧膠針110‧‧‧needle needle

111‧‧‧基板111‧‧‧Substrate

120‧‧‧轉動模組120‧‧‧Rotary Module

130‧‧‧旋轉軸130‧‧‧Rotary axis

140‧‧‧夾頭140‧‧‧ chuck

150‧‧‧馬達150‧‧‧Motor

160‧‧‧膠盤160‧‧‧MP

162‧‧‧盛放皿162‧‧‧Storage

G、G’‧‧‧膠體G, G’‧‧‧ colloid

F‧‧‧水平旋轉力F‧‧‧ horizontal rotation force

第1A及1B圖分別繪示剪切應力(τ)與剪切應變速率(ν)的關係圖以及膠體黏性(μ)與剪切應變速率(ν)的關係圖。Figures 1A and 1B show the relationship between shear stress (τ) and shear strain rate (ν), and the relationship between colloidal viscosity (μ) and shear strain rate (ν).

第2圖繪示依照本創作一實施例之固晶裝置的示意圖。FIG. 2 is a schematic view of a die bonding apparatus according to an embodiment of the present invention.

第3A~3F圖繪示膠針與膠盤一起使用的點膠步驟的示意圖。Figures 3A to 3F show schematic views of the dispensing steps used with the glue needle and the rubber disk.

第4圖繪示依照一實施例之固晶裝置的示意圖。FIG. 4 is a schematic view of a die bonding apparatus according to an embodiment.

110‧‧‧膠針110‧‧‧needle needle

120‧‧‧轉動模組120‧‧‧Rotary Module

130‧‧‧旋轉軸130‧‧‧Rotary axis

140‧‧‧夾頭140‧‧‧ chuck

150‧‧‧馬達150‧‧‧Motor

F‧‧‧水平旋轉力F‧‧‧ horizontal rotation force

Claims (12)

一種固晶裝置,包括:一膠針,用以提供一膠體;以及一轉動模組,具有一旋轉軸,以帶動該膠針旋轉,並使該膠體受該膠針之一水平旋轉力的攪動而改變其黏性。A die bonding device comprising: a plastic needle for providing a colloid; and a rotating module having a rotating shaft for driving the plastic needle to rotate and causing the colloid to be agitated by a horizontal rotational force of the plastic needle And change its viscosity. 如申請專利範圍第1項所述之固晶裝置,其中該旋轉軸包括一夾頭,用以夾持該膠針。The die bonding device of claim 1, wherein the rotating shaft comprises a collet for clamping the plastic needle. 如申請專利範圍第1項所述之固晶裝置,更包括一膠盤,用以盛放供該膠針沾附之該膠體。The die bonding device of claim 1, further comprising a rubber disk for holding the gel for the glue needle to adhere. 如申請專利範圍第1項所述之固晶裝置,更包括一針管,用以容置供該膠針射出之該膠體。The die bonding device of claim 1, further comprising a needle tube for receiving the gel for the glue needle to be ejected. 如申請專利範圍第1項所述之固晶裝置,更包括一輸送帶,用以承載一物件,並藉由驅動該輸送帶以改變該物件與該膠針的相對位置,其中該膠體於該膠針旋轉及下壓至該物件時,附著在該物件上。The die bonding device of claim 1, further comprising a conveyor belt for carrying an object and changing the relative position of the object to the plastic needle by driving the conveyor belt, wherein the glue body is The needle is attached to the object when it is rotated and pressed down to the object. 如申請專利範圍第5項所述之固晶裝置,其中該膠體附著在該物件上的厚度取決於該膠針沾附的該膠體量以及該膠針下壓時所加入的該水平旋轉力。The die bonding device of claim 5, wherein the thickness of the gel attached to the article depends on the amount of the gel adhered to the needle and the horizontal rotational force added when the needle is depressed. 如申請專利範圍第5項所述之固晶裝置,更包括一工作站,該工作站包括一移動平台,用以移動該轉動模組以及該膠針相對於該物件的位置。The die bonding device of claim 5, further comprising a workstation, the workstation comprising a moving platform for moving the rotating module and the position of the needle relative to the object. 如申請專利範圍第1項所述之固晶裝置,其中該膠體的黏性隨著該水平旋轉力的切線速度增加而降低。The die bonding apparatus of claim 1, wherein the viscosity of the colloid decreases as the tangential speed of the horizontal rotational force increases. 如申請專利範圍第1項所述之固晶裝置,其中該膠體為賓漢型流體或剪切變稀型流體。The die bonding device of claim 1, wherein the colloid is a Bingham type fluid or a shear thinning type fluid. 如申請專利範圍第1項所述之固晶裝置,其中該膠體為固晶導熱膠。The die bonding device of claim 1, wherein the colloid is a solid crystalline thermal conductive adhesive. 如申請專利範圍第1項所述之固晶裝置,其中該膠體受該水平旋轉力之攪拌而產生離心力。The die bonding device of claim 1, wherein the colloid is subjected to a centrifugal force by agitation of the horizontal rotational force. 如申請專利範圍第1項所述之固晶裝置,其中該轉動模組包括馬達。The die bonding device of claim 1, wherein the rotating module comprises a motor.
TW101221843U 2012-11-12 2012-11-12 Die bonding device TWM449346U (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103311405A (en) * 2013-05-06 2013-09-18 芜湖锐拓电子有限公司 Die attach adhesive pressing method and pressurizing device

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CN107899847B (en) * 2017-12-31 2019-11-05 江苏永佳光电科技有限公司 A kind of dispensing electric automatization equipment of inductor assembling dispensing all-in-one machine

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103311405A (en) * 2013-05-06 2013-09-18 芜湖锐拓电子有限公司 Die attach adhesive pressing method and pressurizing device
CN103311405B (en) * 2013-05-06 2016-08-03 芜湖锐拓电子有限公司 Crystal-bonding adhesive drawing method and pressue device

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