101年08月27日梭正替換頁 M443098 五、新型說明： 【新型所屬之技術領域】 [0001] 本新型係有關於一種充氣閥，特別是指一種具有逆 止功能並用於欲充入一流體之容器的充氣閥。 【先前技術】 [0002] 近年來，半導體科技發展迅速，其中光學微影技術On August 27, 101, Shuttle is replacing page M443098. V. New description: [New technical field] [0001] The present invention relates to an inflation valve, in particular to a function having a reverse function and for filling a fluid. The inflation valve of the container. [Prior Art] [0002] In recent years, semiconductor technology has developed rapidly, among which optical lithography
扮演重要的角色，只要是關於圖形定義，皆需仰賴光學 微影技術。光學微影技術在半導體的應用上，是將設計 好的線路製作成具有特定形狀於可透光之光罩，然將光 源通過光罩並投影至晶圓上，且進行曝光，以於晶圓上 顯示特定圖案。由於任何附著於光罩上的塵埃顆粒（如微 粒、粉塵或有機物）會造成投影成像的品質劣化，所以用 於產生圖形的光罩必須保持絕對潔淨，而被投射的矽晶 圓或者其他半導體投射體亦必須保持絕對清靜，因此在 一般的晶圓製程中，都提供無塵室的環境以避免空氣中 的顆粒污染。但是目前的無塵室也無法達到絕對無塵的 狀態。 因此，目前半導體製程將光罩或半導體元件儲存於 具有高潔淨度之容器，以防止空氣_中之顆粒汙染光罩或 半導體元件，使光罩或半導體元件保持潔淨，避免光罩 或半導體元件被雜質汙染而產生變化。然後透過儲存光 罩或半導體元件之容器運輸光罩或半導體元件於各機台 之間。因此，在先進的半導體廠中，通常會要求儲存光 罩或半導體元件之容器的潔淨度要符合機械標準介面 (Standard Mechanical Interface ; SMIF)，也就是 麗單編號A0101 第3頁/共20頁 1013326409-0 M443098 101年08月27日核正替换頁 說保持潔淨度在Class 1.以下，即儲存光罩或半導體元件 之容器具有高潔淨度。 為了使儲存光罩或半導體元件之容器達到高潔淨度 ，目前主要充入氣體於儲存光罩或半導體元件之容器中 ，以使儲存光罩或半導體元件之容器達到高潔淨度。因 此，容器之底部通常設有至少一充氣閥，欲充入氣體於 容器内時，容器之充氣閥連接一充氣設備，充氣設備供 應氣體並透過充氣閥導入容器内。但目前的充氣閥沒有 逆止功能，導致充入容器内之氣體從充氣閥洩出。 為了解決上述之問題，本新型提供一種具有逆止功 _ 能之充氣閥，充氣閥用於儲存半導體元件之容器，並具 有逆止功能，不但可充入流體至容器内，亦可防止容器 内之流體流出。 【新型内容】 [0003]Playing an important role, as long as it is about graphic definition, depends on optical lithography. In the application of semiconductors, optical lithography is to make a designed circuit into a permeable permeable mask with a specific shape, then pass the light source through the reticle and project it onto the wafer, and expose it to the wafer. A specific pattern is displayed on it. Since any dust particles (such as particles, dust, or organic matter) attached to the reticle will degrade the quality of the projected image, the reticle used to create the pattern must remain absolutely clean, and the projected enamel wafer or other semiconductor projection The body must also remain absolutely quiet, so in a typical wafer process, a clean room environment is provided to avoid particle contamination in the air. However, the current clean room cannot reach an absolutely dust-free state. Therefore, current semiconductor processes store photomasks or semiconductor components in containers with high cleanliness to prevent particles in the air from contaminating the mask or semiconductor components, keeping the mask or semiconductor components clean, and avoiding masks or semiconductor components being shielded. Impurities contaminate and change. The reticle or semiconductor component is then transported between the stations through a container that stores the reticle or semiconductor component. Therefore, in advanced semiconductor factories, it is usually required that the container for storing the reticle or the semiconductor component should have a cleanliness conforming to the standard mechanical interface (SMIF), that is, the singular number A0101 page 3 / 20 pages 1013326409 -0 M443098 On August 27, 101, the replacement page stated that the cleanliness is kept below Class 1. The container that stores the reticle or semiconductor component has high cleanliness. In order to achieve high cleanliness of the container in which the reticle or the semiconductor element is stored, it is currently mainly filled with a gas in a container for storing the reticle or the semiconductor element, so that the container for storing the reticle or the semiconductor element achieves high cleanliness. Therefore, the bottom of the container is usually provided with at least one inflation valve. When the gas is to be filled in the container, the inflation valve of the container is connected to an inflation device, and the inflation device supplies the gas and is introduced into the container through the inflation valve. However, current inflation valves do not have a reverse function, causing gas filled in the container to escape from the inflation valve. In order to solve the above problems, the present invention provides an inflation valve having an anti-stop function, which is used for storing a container of a semiconductor component and has a reverse function, which can not only fill the fluid into the container, but also prevent the inside of the container. The fluid flows out. [New content] [0003]
本新型之目的，在於提供一種具有逆止功能之充氣 閥，該充氣閥用於欲充入一流體之容器，並具有逆止功 能，不但可充入流體至容器内，亦可防止容器内之流體 流出。 本新型提供一種具有逆止功能之充氣閥，用於一容 器，該充氣閥係包含一承載座，其設置於該容器之一配 置口，並具有一容置空間，該承載座之底部具有一組接 口，其頂端具有與組接口對應之一開口；一活動件，其 設置於該承載座内，並於該容置空間内作線性運動，該 活動件具有一本體及複數延伸臂，該本體對應該組接口 ，該些延伸臂從該本體之周緣向該容置空間之一側壁延 伸，相鄰的該二延伸臂之間具有一間隙，該些間隙與該 1013326409-0 A0101 第4頁/共20頁 M443098 101年08月27日修正替換頁 承載座之該組接口相互連通；以及一蓋體，其設置於該 誉載座，並覆蓋該開口，該蓋體具有複數流體出入口， 該些流體出入口與該些間隙相互連通；其中當該活動件 覆蓋該組接口時，阻斷該組接口與該些間隙間之連通。 【實施方式】 [0004] 兹為使對本新型之結構特徵及所達成之功效有更進 一步之瞭解與認識，謹佐以較佳之實施例及配合詳細之 說明，說明如後： _ 習知用於容器之充氣閥可讓外部流體衝入一容器内 ，但容器内之流體透過充氣閥流出，即習知之充氣閥無 逆止的功效。有鑒於上述問題，本新型提供一種具有逆 止功能之充氣閥，並可用於欲充入流體之容器。 請參閱第一圖及第二圖，係本新型之第一實施例之 充氣閥的剖面圖及分解圖。如圖所示，本實施例係提供 一種具有逆止功能之充氣閥1，其可用於須要充入一流體 的一容器2，例如：存放半導體元件之容器。容器2具有 g —殼體21，殼體21具有一配置口 211，而本實施例之充氣 閥1係配置於配置口 211。本實施例之充氣閥1係包含一承 載座11、一活動件12及一蓋體13。承載座11之頂端具有 一凸緣111，而配置口 211的側壁2111具有對應凸緣111 之一凹槽2112，當承載座11之凸緣111設置於配置口 211 之凹槽2112時，使承載座11卡設於配置口 211。 請一併參閱第三圖，承載座11之底部具有一組接口 112，其頂端具有與組接口 112對應之一開口 113，而承 載座11具有與組接口 112及開口 113相連通之一容置空間 114。充氣閥1之活動件12設置於容置空間114内，並沿 1012050#單編號 AQ1Q1 ^ 5 I / * 20 I 1013326409-0 M443098 101年.08月27日核正眷換頁 著容置空間114之側壁11 5作線性運動。活動件1 2具有一 本體121及複數延伸臂122，本體121對應組接口 112，並 可穿過組接口 112。該些延伸臂122設置於本體121之周 緣並呈輻射狀，且自本體121之周緣向容置空間11 4之側 壁115延伸。而本實施例之該些延伸臂122往容置空間 114之側壁11 5延伸之一端非常接近容置空間114之側壁 115 ’以使活動件12可沿著容置空間114之側壁115作線 性運動。而相鄰的二延伸臂122之間具有一間隙123，間 隙123可與組接口 112相連通。而蓋體13設置於承載座11 之開口 113’開口 113之側壁115具有一凹槽116，凹槽 儀 116係供蓋體13卡設。而蓋體13具有複數流體出入口 131 ’該些流體出入口 131與該些延伸臂1 22之該些間隙1 23 相連通。 請一併參閱第四圖’係本新型之第一實施例之使用 狀態圖。如圖所示，欲充入一流體至容器2内，係利用外 部之一充氣裝置3穿過容器2之配置口 211，並組接於充氣 閥1之組接口 112。當充氣裝置3未組接於組接口 112時， 活動件12位於承載座11之底部，其本體121係穿過組接口 ® 112 ’並使活動件12覆蓋於組接口 112，使組接口 11 2與 活動件12之該些間隙123暫時不會相互連通，以阻擋外部 流體通過充氣閥1而進入容器2内（參閱第一圖）。 當充氣裝置3組接於組接口 112時，充氣裝置3先推 動活動件12之本體121，並使活動件12之該些延伸臂122 沿著承載座11之侧壁11 5向上移動，且使活動件12移動至 承載座11之頂端並位於蓋體13之下方。此時，組接口 112 、該些間隙123(參閱第三圖）及該些流體出入口 1 31相互 10120505^^ A〇101 第6頁/共20頁 1013326409-0 M443098 101年08月27日修正替換π 連通，並形成複數流體流動通道，充氣裝置3提供一流體 ，流體從充氣閥1之组接口 112進入，並沿著該些流體流 動通道流至容器2内（參閱第四圖），達到充入流體至容器 2内之目的。 當充氣裝置3停止充入流體至容器2内時，充氣裝置3 與充氣閥1之組接口 112脫離，承載座11内之活動件12係 沿著承載座11的侧壁115向下移動，而活動件12之本體 121穿過組接口 112，且使活動件12覆蓋組接口 U2(參閱 第一圖），此時，該些間隙123與組接口 112不會相互連通 ’導致容器2之内部流體不會透過充氣閥1流至外部，達 到逆止效果。為了確實容器2之内部流體不會流至外部， 承載座11之底部上更設有一密封件14，密封件14環繞組 接口 112，並位於活動件12之下方，且對應本體i21與該 些延伸臂122之連接處。當活動件12向下移動時，活動件 12抵壓於密封件14，密封件14位於組接口 112之外側， 並位於該些間隙123之内側’以阻斷組接口 112與該些間 隙123之連通，確保容器2之内部流體不會流至外部，使 容器2達到良好的氣密性》 請參閱第五A及五B圖’係本新型之第二實施例之使 用狀態圖。如圖所示’為了確保活動件1 2可沿著承載座 11之侧壁115，並於承載座11内作線性運動，活動件12 靠近承載座11之頂端的表面具有至少一凹槽124，一彈性 件15之一端設置於凹槽124内，彈性件15之另一端柢於蓋 體13。當活動件12於承載座11内向上移動時，彈性件15 受活動件12抵壓而產生壓縮，並使活動件12平穩地向上 1013326409-0 移動；當活動件12於承載座11内向下移動時，被壓縮的 10120505$單編號A0101 第7頁/共20買 M443098 ”__ 101年08月27日按正替換頁 彈性件15被釋放並提供一回復力予活動件12，使活動件 12平穩地向下移動，並快速地回復原始位置。本實施例 之彈性件15係使用彈簧’當然，彈性件丨5亦可使用橡膠 ’於此不再贅述》 請參閱第六圖，係本新型之第三實施例之充氣閥的 分解圖。如圖所示，本實施例之充氣閥1係更包含一過濾 件16，過濾件16係設置於承載座丨丨之凹槽116，並覆蓋 承載座11之開口 113，蓋體13設置於過濾件16上。當充 氣裝置所提供之流體欲進入容器2内時，流體係先穿過過 渡件16才能進入容器2 ’而過濾件16可過濾流體内之雜質 . 或汙染物’以防止含有雜質或汙染物之流體進入容器2而 污染存放於容器2内之物件，使容器2達到高潔度。而過 濾件16很輕薄，因此更設置一支撐件17於承載座丨丨之凹 槽116，並位於過濾件16之下方，以支撐過濾件16 ^本實 施例之支撐件17為一網狀體，以讓流體可穿過。本實施 例之支撐件17也可具有複數穿孔，只要能讓流體穿過即 可，於此不再贅述。 請參閱第七圖，係本新型之第四實施例之剖面圖。 € 如圖所示’本實施例與上述實施例不同在於，本實施例 於承載座11與容器2之配置口 211的側壁2111間更設有一 密封件18，密封件18設置於配置口 211之側壁2111的凹 槽2112，承載座11之凸緣ill設置於配置口 211之側壁 2111的凹槽2112，並抵壓密封件18。密封件18係使容器 2之内部流體不會從承載座丨丨與配置口 211之間流出，使 谷器達到良好的氣密性。 綜上所述，本新型提供一種具有逆止功能之充氣闊 10120505产單编號 A〇101 第8頁/共20頁 1013326409-0 M443098 101年08月27日修正替換百The purpose of the present invention is to provide an inflation valve having a reverse function, which is used for a container to be filled with a fluid, and has a reverse function, which can not only fill the fluid into the container, but also prevent the inside of the container. The fluid flows out. The present invention provides an inflation valve having a reverse function for a container, the inflation valve comprising a carrier disposed at one of the container ports and having an accommodation space, the bottom of the carrier having a a group interface having a top end having an opening corresponding to the group interface; a movable member disposed in the carrier and linearly moving in the accommodating space, the movable member having a body and a plurality of extension arms, the body Corresponding to the group interface, the extension arms extend from the periphery of the body toward a side wall of the accommodating space, and a gap is formed between the adjacent two extension arms, and the gaps are related to the 1013326409-0 A0101 page 4 / A total of 20 pages M443098 on August 27, 101, the set of interfaces of the replacement page carrier are interconnected; and a cover disposed on the cover and covering the opening, the cover having a plurality of fluid inlets and outlets, The fluid inlet and outlet are in communication with the gaps; wherein when the movable member covers the set of interfaces, the communication between the set of interfaces and the gaps is blocked. [Embodiment] [0004] For a better understanding and understanding of the structural features and the effects of the present invention, the preferred embodiment and the detailed description are as follows: _ The inflation valve of the container allows external fluid to be flushed into a container, but the fluid in the container flows out through the inflation valve, that is, the conventional inflation valve has no adverse effect. In view of the above problems, the present invention provides an inflation valve having a reverse function and can be used for a container to be filled with a fluid. Referring to the first and second figures, there is shown a cross-sectional view and an exploded view of the inflation valve of the first embodiment of the present invention. As shown, the present embodiment provides an inflation valve 1 having a reverse function which can be used for a container 2 which is required to be filled with a fluid, for example, a container for storing a semiconductor element. The container 2 has g-housing 21, and the housing 21 has a configuration port 211, and the inflation valve 1 of the present embodiment is disposed at the disposition port 211. The inflation valve 1 of the present embodiment includes a carrier 11, a movable member 12, and a cover 13. The top end of the carrier 11 has a flange 111, and the side wall 2111 of the port 211 has a groove 2112 corresponding to the flange 111. When the flange 111 of the carrier 11 is disposed in the groove 2112 of the port 211, the bearing is carried. The seat 11 is provided in the configuration port 211. Referring to the third figure, the bottom of the carrier 11 has a set of interfaces 112, the top end of which has an opening 113 corresponding to the group interface 112, and the carrier 11 has a connection with the group interface 112 and the opening 113. Space 114. The movable member 12 of the inflation valve 1 is disposed in the accommodating space 114, and along the 1012050# single number AQ1Q1 ^ 5 I / * 20 I 1013326409-0 M443098 101. August 27th, the 眷 眷 眷 容 容 114 114 114 The side wall 11 5 performs a linear motion. The movable member 1 2 has a body 121 and a plurality of extension arms 122. The body 121 corresponds to the group interface 112 and can pass through the group interface 112. The extension arms 122 are disposed on the periphery of the body 121 and radiate, and extend from the periphery of the body 121 toward the side wall 115 of the accommodating space 11 4 . The extending end of the extending arm 122 of the embodiment to the side wall 115 of the accommodating space 114 is very close to the side wall 115 ′ of the accommodating space 114 for linear movement of the movable member 12 along the side wall 115 of the accommodating space 114 . . The gap between the adjacent two extension arms 122 is a gap 123, and the gap 123 can communicate with the group interface 112. The side wall 115 of the opening 113 of the opening 13 of the cover 13 is provided with a recess 116 for the cover 13 to be latched. The cover 13 has a plurality of fluid inlets and outlets 131'. The fluid inlets and outlets 131 communicate with the gaps 1 23 of the extension arms 1 22 . Please refer to the fourth figure as a use state diagram of the first embodiment of the present invention. As shown, a fluid to be filled into the container 2 is passed through the dispensing opening 211 of the container 2 by an external inflator 3 and assembled to the group interface 112 of the inflation valve 1. When the inflator 3 is not assembled to the group interface 112, the movable member 12 is located at the bottom of the carrier 11, and the body 121 passes through the group interface® 112' and covers the movable member 12 to the group interface 112, so that the group interface 11 2 The gaps 123 with the movable member 12 are temporarily not in communication with each other to block external fluid from entering the container 2 through the inflation valve 1 (refer to the first figure). When the inflator 3 is assembled to the group interface 112, the inflator 3 first pushes the body 121 of the movable member 12, and moves the extension arms 122 of the movable member 12 upward along the side wall 115 of the carrier 11, and The movable member 12 is moved to the top end of the carrier 11 and is located below the cover 13. At this time, the group interface 112, the gaps 123 (refer to the third figure) and the fluid inlets and outlets 1 31 mutual 10120505 ^ ^ A 〇 101 page 6 / total 20 pages 1013326409-0 M443098 revised on August 27, 101 The π is connected and forms a plurality of fluid flow channels, and the inflator 3 provides a fluid that enters from the group interface 112 of the inflation valve 1 and flows along the fluid flow channels into the container 2 (see the fourth figure) to achieve charging The purpose of injecting fluid into the container 2. When the inflator 3 stops filling the fluid into the container 2, the inflator 3 is disengaged from the group interface 112 of the inflation valve 1, and the movable member 12 in the carrier 11 is moved downward along the side wall 115 of the carrier 11, The body 121 of the movable member 12 passes through the group interface 112, and the movable member 12 covers the group interface U2 (refer to the first figure). At this time, the gaps 123 and the group interface 112 do not communicate with each other', resulting in the internal fluid of the container 2. It does not flow through the inflation valve 1 to the outside to achieve a reverse effect. In order to ensure that the internal fluid of the container 2 does not flow to the outside, the bottom of the carrier 11 is further provided with a sealing member 14 surrounding the group interface 112 and located below the movable member 12, and corresponding to the body i21 and the extensions The junction of the arms 122. When the movable member 12 moves downward, the movable member 12 is pressed against the sealing member 14, and the sealing member 14 is located on the outer side of the group interface 112 and is located inside the gaps 123 to block the group interface 112 and the gaps 123. The communication ensures that the internal fluid of the container 2 does not flow to the outside, so that the container 2 achieves good airtightness. Please refer to the fifth and fifth B drawings for the use state diagram of the second embodiment of the present invention. As shown in the figure, in order to ensure that the movable member 12 can be linearly moved along the side wall 115 of the carrier 11 and in the carrier 11, the surface of the movable member 12 near the top end of the carrier 11 has at least one groove 124. One end of an elastic member 15 is disposed in the recess 124, and the other end of the elastic member 15 is disposed on the cover 13. When the movable member 12 is moved upward in the carrier 11, the elastic member 15 is compressed by the movable member 12 to generate compression, and the movable member 12 is smoothly moved upward 1013326409-0; when the movable member 12 moves downward in the carrier 11 When the compressed 10120505$ single number A0101 page 7 / total 20 buy M443098 __ August 27, 101, according to the positive replacement page elastic member 15 is released and provide a restoring force to the movable member 12, so that the movable member 12 is smooth The ground moves downwards and quickly returns to the original position. The elastic member 15 of the present embodiment uses a spring. Of course, the elastic member 5 can also use rubber, which will not be described herein. Please refer to the sixth figure, which is a novel An exploded view of the inflation valve of the third embodiment. As shown, the inflation valve 1 of the present embodiment further includes a filter member 16 disposed on the recess 116 of the carrier seat and covering the carrier. The opening 113 of the cover 113 is disposed on the filter member 16. When the fluid supplied by the inflator is intended to enter the container 2, the flow system first passes through the transition piece 16 to enter the container 2' and the filter member 16 can filter the fluid. Impurities. or contaminants' to prevent inclusion The fluid with impurities or contaminants enters the container 2 to contaminate the articles stored in the container 2, so that the container 2 reaches a high degree of cleanliness. The filter member 16 is very thin and thin, so that a support member 17 is further disposed in the recess 116 of the bearing seat. And under the filter member 16 to support the filter member 16. The support member 17 of the embodiment is a mesh body for allowing fluid to pass through. The support member 17 of the embodiment may also have a plurality of perforations, as long as Let the fluid pass through, and will not be described here. Please refer to the seventh figure, which is a cross-sectional view of the fourth embodiment of the present invention. As shown in the figure, the present embodiment differs from the above embodiment in that the present embodiment A sealing member 18 is disposed between the bearing seat 11 and the side wall 2111 of the disposition port 211 of the container 2. The sealing member 18 is disposed on the recess 2112 of the side wall 2111 of the disposition port 211, and the flange ill of the carrier 11 is disposed at the disposition port 211. The groove 2112 of the side wall 2111 is pressed against the sealing member 18. The sealing member 18 is such that the internal fluid of the container 2 does not flow out between the carrier seat and the disposition port 211, so that the barr achieves good airtightness. In summary, the present invention provides a Stop function of the width of 10,120,505 inflated production order number A〇101 page 8/20-page 1013326409-0 M443098 101 on August 27th amendment replacing one hundred
[0005] ，充氣閥可用於欲充氣之容器，可透過充氣閥内之活動 件之移動控制流體之出入，可讓流體透過充氣閥進入容 器内，充氣閥亦可防止容器内之流體流出。充氣閥設置 至少一密封件，有效防止容器内之流體流出，使容器具 有良好的氣密性。然充氣閥具有過濾件，可過濾流入之 流體，以防止含有汙染物之流體進入容器内而汙染容器 内之物件，使容器可達到高潔度。 【圖式簡單說明】 第一圖係為本新型之第一實施例之充氣閥的剖面圖； 第二圖係為本新型之第一實施例之充氣閥的分解圖； 第三圖係為本新型之第一實施例之充氣閥的俯視圖； 第四圖係為本新型之第一實施例之使用狀態圖； 第五A圖係為本新型之第二實施例之使用狀態圖； 第五B圖係為本新型之第二實施例之另一使用狀態圖； 第六圖係為本新型之第三實施例之充氣閥的分解圖；以 及 第七圖係為本新型之第四實施例之充氣閥的剖面圖。 10120505产単編號 [0006] 【主要元件符號說明】 1 充氣閥 11 承載座 111 凸緣 112 組接口 113 開口 114 容置空間 115 側壁 A0101 第 第9頁/共20頁 1013326409-0 M443098 116 凹槽 12 活動件 121 本體 122 延伸臂 123 間隙 124 凹槽 13 蓋體 131 流體出入口 14 密封件 15 彈性件 16 過滤件 17 支撐件 18 密封件 2 容器 21 殼體 211 配置口 2111 侧壁 2112 凹槽 3 充氣裝置 10120505#單编號 A〇101 第10頁/共20頁 101年08月27日按正替換頁[0005] The inflation valve can be used for a container to be inflated, and the movement of the fluid can be controlled by the movement of the movable member in the inflation valve, so that the fluid can enter the container through the inflation valve, and the inflation valve can also prevent the fluid in the container from flowing out. The inflation valve is provided with at least one sealing member to effectively prevent the fluid in the container from flowing out, so that the container has good airtightness. The inflation valve has a filter element that filters the influent fluid to prevent the contaminant-containing fluid from entering the container and contaminating the contents of the container, so that the container can be cleaned. BRIEF DESCRIPTION OF THE DRAWINGS The first drawing is a sectional view of the inflation valve of the first embodiment of the present invention; the second drawing is an exploded view of the inflation valve of the first embodiment of the present invention; A top view of a novel first embodiment of the inflation valve; a fourth diagram is a state of use of the first embodiment of the present invention; and a fifth diagram is a state of use of the second embodiment of the present invention; The figure is another use state diagram of the second embodiment of the present invention; the sixth figure is an exploded view of the inflation valve of the third embodiment of the present invention; and the seventh figure is the fourth embodiment of the present invention. A cross-sectional view of the inflation valve. 10120505 calving number [0006] [Main component symbol description] 1 Inflator valve 11 carrier 111 flange 112 group interface 113 opening 114 housing space 115 side wall A0101 page 9 / total 20 pages 1013326409-0 M443098 116 groove 12 Moving member 121 body 122 extension arm 123 gap 124 groove 13 cover body 131 fluid inlet and outlet 14 seal 15 elastic member 16 filter member 17 support member 18 seal member 2 container 21 housing 211 arrangement port 2111 side wall 2112 groove 3 inflator 10120505#单号A〇101 Page 10 of 20 pages 101 Aug. 27 Press the replacement page
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