101年8月23日修正替換頁 M44249条 1012〇4272 號 五、新型說明： 【新型所屬之技術領域】 ^新型係有關於一種加熱爐的爐内加熱器配置構造。 【先刖技術】 作為電子元件用粉體的嬉士 燒成技術，將粉末原料收納在 被稱為窯的耐熱容器内，一 古 _ 遠在尚〉凰的加熱爐内搬送、一 =溫下進行熱處理的方法係為熟知的。在此加熱處理 =二㈣内的污染防止的觀點上，陶究製的加熱器被 使用的情开> 多，特別是大多 知用棒狀的碳化矽加熱器（專利 又默1 )。 有關該棒狀碳化矽加熱器的 业A 配置習知從迴避棒 狀反化石夕加熱器所貫通的爐壁的内壁面側 -加熱以及伴隨於此的知刼„„ Ω …盜的過 料於此的加熱裔惡化的觀點上，如第5圖所干 ':置熱器的發熱部調整至與内壁面分離5〇-程度的 爐辟的放被知用。原本爐壁附近的溫度係，藉由來自 放熱變低的傾向可被預見，但採用如上述般的棒狀 碳化矽加埶器的發埶邱邴罢1奴的棒狀 …：的洁，内壁鄰近的溫度降低變 仔更顯者的現象被觀察到。 _ 2別是近年來’以爐的生產性提升作為目的而有爐寬 7 、大的傾向，然而伴隨於此，存在著爐寬方向中 不均變大，被燒成物的品質產生不均的問題。 ’皿又 [習知技術文獻] [專利文獻] [專利文獻1]日本特開2009_1 03331號公報 3 101. 8 年 【新型内容】 [新型所欲解決之問題]Amendment page on August 23, 2011 M44249 Article 1012〇4272 V. New description: [New technical field] The new type relates to the configuration of the heater in the furnace of a heating furnace. [First-hand technology] As a technology for the production of electronic components, the powder raw material is stored in a heat-resistant container called a kiln, and it is transported in a heating furnace of the shang yang. The method of performing the heat treatment is well known. In the case of the heat treatment = the prevention of the pollution in the second (four), the heaters used in the ceramics are used in many cases, and in particular, the bar-shaped niobium carbide heaters are widely used (patent 1). The configuration of the rod A of the rod-shaped niobium carbide heater is known from the side of the inner wall surface of the furnace wall through which the rod-shaped anti-fossil heater is circumvented, and the knowledge associated with this is... In the point of view of the deterioration of the heating element, as shown in Fig. 5, the heat-generating part of the heat-receiver is adjusted to be separated from the inner wall surface by a degree of 5 〇. The temperature in the vicinity of the original furnace wall can be foreseen by the tendency to become lower from the heat release, but the rod-like shape of the rod-shaped carbonized crucible twister as described above is used. The phenomenon that the adjacent temperature is lowered and becomes more prominent is observed. _ 2 In recent years, the furnace width is 7 and the tendency is large for the purpose of improving the productivity of the furnace. However, the unevenness in the furnace width direction is large, and the quality of the burned material is uneven. The problem. [Patent Document] [Patent Document] [Patent Document 1] JP-A-2009_1 03331 3 101. 8 years [New content] [New problem to be solved]
本新型的目的传M '、解決上述，提供一種可減低伴隨爐寬 擴大 '爐寬方向之π南了 ^ J 度不均的加熱爐。 [用以解決問題的手段] ^為解決上述問題的本新型的加熱爐係，在將具有發熱 非&熱。P的棒狀碳化碎加熱器在爐寬方向貫通爐壁而 =縱長方向複數配置的加熱爐中，其特徵係在爐縱長方 t皮複數配置的棒狀碳切加熱器間，具備被保持在-邊 的爐壁：將該内壁面鄰近加熱的補助加熱器。 申Μ專利Id SI第2項所記載的新型係在巾請專利範圍 第1項所記載的加敎、隨+ …、爐中’其特徵係在該棒狀碳化埶 器所貫通的爐壁的内壁面如 … ^面側，缺口部被形成；該棒狀碳化 石夕加熱器係將缺口部 作為非發熱部、將自内壁面的爐内 側作為發熱部^ 申明專利範圍第3項所記載的新型係在申請專利範圍 :1或2項所5己載的加熱爐中，其特徵係將補助加熱器在 爐縱長方向與該棒狀碳切加熱器交互地配置。 申請專利㈣第4項所記載㈣型係在W專利範圍 第1項至第3項中之任_馆 、. 項所記載的加熱爐中，其特徵係 補助加熱器具有棒形壯， 自爐壁的凸出部係為爐寬的 1/20〜1/5 。 申請專利範圍第5項所記載的新型係在中請專利範圍 第1項至第3項中之任—頂“ 項所記載的加熱爐中，其特徵係 4 -^4 -^4 1)1. 補助加熱器具有17字形狀 丁年月Ε [新型效果] 習知，自迴避碳仆 1^ σ…、器所貫通的爐壁的内壁面側 中的力，，.、益的過加熱以芬处士 .,^ 伴隨於此的加熱器惡化的觀點 上’如第5圖所示般， 八μ ς η ώ σ ·，，、器的發熱部調整至與内壁面 为離50mm程度的位置般 六朴十咖 的方法破採用，起因於該構造，存 在者在内壁鄰近、爐内、、θ ^ '麗又變低的現象，但有關本新型的 加熱爐係，在姨官古a.、 取 〇貝通爐壁而配置的加熱爐中，藉由 配合採用具備被伴牲A .. 、 邊的爐壁、將内壁面鄰近加熱的 補助加熱器的構成，可迴 避各知在内壁鄰近、爐内溫度變 低的現象。 亦即，根據本新型的話’由於可迴避習知在内壁鄰近、 爐内溫度變低的現象’即使在以爐的生產性提高作為目的 而擴大爐寬的情形’可有效地抑制爐寬方向的溫度不均。 又，在棒狀碳化矽加熱器所貫通的爐壁的内壁面側， 更形成缺口部’該棒狀碳化矽加熱器係、，藉由追加具備將 缺口部内作為非發熱部、自内壁面的爐内側作為發熱部的 構成的話，可更有效地抑制在爐寬方向中的溫度不均。 【實施方式】 以下表示本新型的較佳實施例。 在第1圖方面，表示本實施例的加熱爐的爐寬方向的 擴大剖面圖。在本實施例中的加熱爐係為輥道窯，爐體ι 係熟知的隧道構造，在其内部以一定間距、多數的搬送用 的滾筒2被配置。各滚筒2係為高溫強度方面優良的s卜The purpose of the present invention is to solve the above problem, and to provide a heating furnace capable of reducing the unevenness of the furnace width and the π south of the furnace width direction. [Means for Solving the Problem] ^ In order to solve the above problems, the novel heating furnace system will have heat and non-heating. In the heating furnace in which the rod-shaped carbonized powder heater of P is passed through the furnace wall in the width direction of the furnace and is arranged in the longitudinal direction, it is characterized in that it is provided between the rod-shaped carbon-cut heaters arranged in the longitudinal direction of the furnace. Maintaining the wall on the side: the inner wall is adjacent to the heated auxiliary heater. The new type described in the second item of the patent application Id SI is added to the furnace wall of the rod-shaped carbonized niobium according to the twisting, following, and the furnace described in the first paragraph of the patent application scope. The inner wall surface is formed on the surface side, and the notch portion is formed. The rod-shaped carbonized stone heater has a notch portion as a non-heat generating portion and a furnace inner portion from the inner wall surface as a heat generating portion. The new type is in the heating furnace of the patent application scope: 1 or 2, which is characterized in that the auxiliary heater is arranged alternately with the rod-shaped carbon cut heater in the longitudinal direction of the furnace. The type (4) described in item 4 of the application for patent (4) is in the heating furnace described in items 1-3 of the scope of the W patent, and the characteristics of the auxiliary heater are rod-shaped and strong. The projection of the wall is 1/20 to 1/5 of the width of the furnace. The new type described in item 5 of the scope of application of the patent is in the first to third items of the scope of the patent application - in the heating furnace described in the above paragraph, the characteristic is 4 -^4 -^4 1)1 The auxiliary heater has a 17-character shape. [New effect] It is known that the self-avoiding carbon servant 1^ σ..., the force in the inner wall surface side of the furnace wall through which the device passes, Fen Shishi. From the viewpoint of the deterioration of the heater, as shown in Fig. 5, the heat generating portion of the device is adjusted to a position of 50 mm from the inner wall surface as shown in Fig. 5. The method of Liupu Shicai was broken, which was caused by the structure, and the existence of the inner wall adjacent to the furnace, and the phenomenon of θ ^ 'Li is lower, but the heating furnace system of this new type is in the elders a. In the heating furnace arranged to take the shell wall of the shell, the structure of the furnace wall with the side of the A.. side and the auxiliary heater which is heated adjacent to the inner wall surface can be avoided, and the inner wall can be avoided. The phenomenon that the temperature in the furnace becomes low. That is, according to the present invention, 'because it can be avoided, the inner wall is adjacent, the temperature inside the furnace In the case where the furnace width is increased for the purpose of improving the productivity of the furnace, the temperature unevenness in the furnace width direction can be effectively suppressed. Further, in the furnace wall through which the rod-shaped tantalum carbide heater passes In the wall surface side, the notch portion is further formed, and the inside of the furnace having the inside of the notch portion and the furnace inner portion as the heat generating portion can be more effectively suppressed. [Embodiment] The preferred embodiment of the present invention is shown below. Fig. 1 is an enlarged cross-sectional view showing the furnace width direction of the heating furnace of the present embodiment. The heating furnace is a roller kiln, and the furnace body is a well-known tunnel structure, and is disposed inside the drum 2 for transportation at a constant pitch. Each drum 2 is excellent in high-temperature strength.
^ ι C M442494 HD1年8月23日修正替換頁 第101204272號 製，藉由被設置在爐外的驅動裝置以一定速度被驅動。又， Si-SiC係將Si填入的緻密Sic’在1300〇c中具有25〇MN/m2 的高強度。又’也在耐潛變（creep)性、耐氧化性、紅外線 的放射性方面具有優良的材質。 作為被燒成物的粉體係被收納在陶究製的窯3 ,在配 列複數的窯3的狀態下、在滾筒2上被搬送，在Mod2〇〇<t 被熱處理。^ ι C M442494 HD, August 23, Amendment Replacement Page No. 101204272, driven by a drive unit provided outside the furnace at a constant speed. Further, the dense Sic' in which Si-SiC is filled with Si has a high strength of 25 MN/m2 in 1300 〇c. In addition, it has excellent materials for recoil resistance, oxidation resistance, and infrared radiation. The kiln 3, which is a fired product, is stored in a kiln 3 of a ceramics, and is conveyed on the drum 2 in a state in which a plurality of kiln 3 are arranged, and is heat-treated at Mod2〇〇<t.
在爐内6的上部以及下部，分別被配置有沿爐寬方向 將爐壁4貫通的棒狀碳化矽（SiC)加熱器5。又，如第2圖 所示般，在爐縱長方向，該棒狀碳化矽加熱器5與補助加 熱器9交互地被配置。補助加熱器9長自爐壁的突出部係， 在未滿爐寬1/20的情形，用以進行壁面溫度補助的加熱器 輸出無法作用’在超過爐寬1/5的情形，補助加熱器恐怕 會給I爐中心部分的溫度變高傾向的領域影響，所以補助 ”、、器9自爐壁的大出部係作為爐寬的是較佳 的。In the upper portion and the lower portion of the furnace 6, a rod-shaped tantalum carbide (SiC) heater 5 that penetrates the furnace wall 4 in the furnace width direction is disposed. Further, as shown in Fig. 2, the rod-shaped tantalum carbide heater 5 is disposed alternately with the auxiliary heater 9 in the longitudinal direction of the furnace. When the heater heater 9 is longer than the protruding portion of the furnace wall, the heater output for the wall surface temperature subsidy cannot be applied when the furnace width is less than 1/20, and the heater is assisted when the furnace width exceeds 1/5. I am afraid that it will affect the field where the temperature of the center of the furnace is high. Therefore, it is preferable that the auxiliary portion of the furnace 9 is larger than the large portion of the furnace wall.
只是，補助加熱器係，被保持在—邊的爐壁4、達^ 將該爐壁4鄰近加熱的機能也可，在本實施例中，使用才 狀的：助加熱器9’但補助加熱器9的形狀等係並未特， 破限定’例如，也可使用如第3圖所示般的〕字狀物件。 如第4圖所示般’棒狀碳化矽加熱器5係具有進行$ 熱的發熱部51、以及不進行發熱的非發熱部⑽。 在爐壁4的内壁面7側’被形成有角錐(c蒙)細 缺口部8’其中缺口部8内設置有棒狀碳切加熱器^ 6 101年8月23日修正替換頁 M44249蠢 1Q12Q4272 號 非發熱部52b、自内壁面7的爐内6侧設置有發熱部51。 ； 習知，自迴避碳化矽加熱器所貫通的爐壁4的内壁面 7侧中的加熱器的過加熱以及伴隨於此的加熱器惡化的觀 •點上’如第5圖所示般，以棒狀碳化石夕加熱器5的發熱部 51調整至與内壁面7分離5〇_程度的位置般的方法被採 用，起因於該構造，存在著在内壁面7鄰近、爐内溫度變 :氏的現象，但有關本新型的加熱爐係，在棒狀碳化矽加熱 籲5於爐寬方向貫通爐壁而配置的加熱爐中，藉由配合採用 具備被保持在一邊的爐壁、將内壁面鄰近加熱的補助加熱 器的構成，可迴避習知在内壁鄰近、爐内溫度變低的現象。 在本實施例中，在棒狀碳化矽加熱器5所貫通的爐壁4的 内壁面7側，形成缺口部8，藉由採用將棒狀碳化石夕加熱 -器的、被配置在缺口部8内的部分作為非發熱部挪'自 •内壁面7被配置在爐内側的部分作為發熱部51的構成、以 及配合採用具備被保持在一邊的爐壁4、加熱内壁面7鄰 ’近的補助加熱器9的構成’可更有效地迴避此現象。 亦即，根據本新型的話，由於可迴避習知在内壁鄰近、 爐内溫度變低的現象，所以即使以爐的生產性提升作為目 的而擴大爐寬的情形，可更有效地抑制在爐寬方向中的溫 度不均。 【圖式簡單說明】 第1圖係為本實施例的加熱爐的爐寬方向擴大剖面 圖； 第2圖係為第1圖的a-A剖面圖； 7 M442494 l〇'L 辜 • 23修正 月曰補充 -- 圖係為第1圖的A-A剖面圖；（有關補助加熱器的 其他實施例 第4圖係為被使用在本實施例的加熱爐的棒狀碳化石夕 加熱器的構成說明圖以及爐内溫度分布圖；以及 的棒狀碳化矽 第5圖係為被使用在習知技術的加熱爐 加熱器的構成說明圖以及爐内溫度分布圖。 【主要元件符號說明】 1爐體' 2滾筒、 3窯、 4爐壁、 5棒狀碳化矽加熱器、 51發熱部、 5 2 b非發熱部、 6爐内、 7内壁面、 8缺口部、 9補助加熱器。 8However, the auxiliary heater system is held in the furnace wall 4, and the function of heating the furnace wall 4 adjacent to the furnace wall 4 is also possible. In the present embodiment, the heater is used: the heater 9' is supplemented. The shape and the like of the device 9 are not particularly limited, and for example, a word member as shown in Fig. 3 may be used. As shown in Fig. 4, the rod-shaped tantalum carbide heater 5 has a heat generating portion 51 that performs heat and a non-heat generating portion (10) that does not generate heat. On the side of the inner wall surface 7 of the furnace wall 4, a pyramidal (c) thin notch portion 8' is formed, in which a rod-shaped carbon-cut heater is provided in the notch portion 8 ^ 6 August 23, revised replacement page M44249 stupid 1Q12Q4272 The non-heat generating portion 52b and the heat generating portion 51 are provided on the furnace inner side 6 of the inner wall surface 7. Conventionally, as shown in FIG. 5, the overheating of the heater in the inner wall surface 7 side of the furnace wall 4 through which the tantalum carbide heater is circumvented and the deterioration of the heater accompanying this are as shown in FIG. A method in which the heat generating portion 51 of the rod-shaped carbonized stone heater 5 is adjusted to a position separated from the inner wall surface 7 by 5 〇 is employed. Due to this configuration, there is a temperature adjacent to the inner wall surface 7 and the furnace temperature changes: In the heating furnace of the present invention, in the heating furnace in which the rod-shaped niobium carbide heating 5 is placed in the furnace width direction and penetrates the furnace wall, the furnace wall having the one side held therein is used. The configuration of the auxiliary heater adjacent to the wall surface can avoid the phenomenon that the temperature in the furnace is low near the inner wall. In the present embodiment, the notch portion 8 is formed on the inner wall surface 7 side of the furnace wall 4 through which the rod-shaped tantalum carbide heater 5 passes, and is disposed in the notch portion by using a rod-shaped carbonized stone heater. A portion of the portion 8 that is disposed on the inner side of the furnace as the non-heating portion is configured as a heat generating portion 51, and a furnace wall 4 that is held on one side and a heated inner wall surface 7 are adjacent. The configuration of the auxiliary heater 9 can more effectively avoid this phenomenon. In other words, according to the present invention, since the phenomenon that the temperature in the furnace is lowered in the vicinity of the inner wall can be avoided, the furnace width can be more effectively suppressed even if the furnace width is expanded for the purpose of improving the productivity of the furnace. The temperature in the direction is uneven. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1 is a cross-sectional view showing the furnace width direction of the heating furnace of the present embodiment; Fig. 2 is a sectional view of Fig. 1a; 7 M442494 l〇'L 辜•23 Revision month Supplementary drawings are a cross-sectional view taken along line AA of Fig. 1; (Fourth embodiment of the auxiliary heater is a configuration diagram of a rod-shaped carbonized stone heater used in the heating furnace of the present embodiment and Fig. 5 is a diagram showing the configuration of a heater heater used in a conventional technique and a temperature distribution map in the furnace. [Main component symbol description] 1 Furnace body 2 Roller, 3 kiln, 4 furnace wall, 5 rod-shaped niobium carbide heater, 51 heating part, 5 2 b non-heating part, 6 furnace inner, 7 inner wall surface, 8 notch part, 9 auxiliary heater. 8