JP3173376U - heating furnace - Google Patents

heating furnace Download PDF

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JP3173376U
JP3173376U JP2011006881U JP2011006881U JP3173376U JP 3173376 U JP3173376 U JP 3173376U JP 2011006881 U JP2011006881 U JP 2011006881U JP 2011006881 U JP2011006881 U JP 2011006881U JP 3173376 U JP3173376 U JP 3173376U
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furnace
wall
heater
rod
heating
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倫弘 伊藤
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NGK Insulators Ltd
NGK Kilntech Corp
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NGK Insulators Ltd
NGK Kilntech Corp
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Priority to JP2011006881U priority Critical patent/JP3173376U/en
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Priority to TW101204272U priority patent/TWM442494U/en
Priority to CN2012200913660U priority patent/CN202547402U/en
Priority to KR2020120001914U priority patent/KR200483126Y1/en
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
    • F27B9/30—Details, accessories, or equipment peculiar to furnaces of these types
    • F27B9/36—Arrangements of heating devices
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
    • F27B9/02—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity of multiple-track type; of multiple-chamber type; Combinations of furnaces
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27—FURNACES; KILNS; OVENS; RETORTS
    • F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
    • F27B9/00—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity
    • F27B9/14—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment
    • F27B9/20—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment the charge moving in a substantially straight path tunnel furnace
    • F27B9/22—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment the charge moving in a substantially straight path tunnel furnace on rails, e.g. under the action of scrapers or pushers
    • F27B9/222—Furnaces through which the charge is moved mechanically, e.g. of tunnel type; Similar furnaces in which the charge moves by gravity characterised by the path of the charge during treatment; characterised by the means by which the charge is moved during treatment the charge moving in a substantially straight path tunnel furnace on rails, e.g. under the action of scrapers or pushers the path comprising a section specially adapted for effecting equalisation of the temperature of the charge

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Furnace Details (AREA)
  • Resistance Heating (AREA)

Abstract

【課題】炉幅の拡張に伴う炉幅方向の温度ばらつきを低減することができる加熱炉を提供する。
【解決手段】発熱部と非発熱部を有する棒状ＳｉＣヒータ５を、炉幅方向で炉壁を貫通して、炉長手方向に複数配置した加熱炉において、炉長手方向に複数配置された棒状ＳｉＣヒータ５間には、一方の炉壁４に保持されて該内壁面７近辺を加熱する補助ヒータを備える。
【選択図】図１A heating furnace capable of reducing temperature variations in the furnace width direction accompanying the expansion of the furnace width is provided.
In a heating furnace in which a plurality of rod-shaped SiC heaters 5 having a heat generating portion and a non-heat generating portion are disposed in the furnace longitudinal direction through the furnace wall, a plurality of rod-shaped SiC heaters disposed in the furnace longitudinal direction. Between the heaters 5, there is provided an auxiliary heater that is held by one furnace wall 4 and heats the vicinity of the inner wall surface 7.
[Selection] Figure 1

Description

本考案は、加熱炉の炉内ヒータ配置構造に関するものである。   The present invention relates to an in-furnace heater arrangement structure of a heating furnace.

電子部品用粉体の焼成技術として、粉末原料を匣鉢と呼ばれる耐熱容器内に収納し、高温の加熱炉内を搬送しながら高温で熱処理する方法が知られている。当該加熱処理方法においては、炉内でのコンタミ防止の観点から、セラミック製のヒータが使用されることが多く、特に、棒状のＳｉＣヒータが多く採用されている（特許文献１）。   As a technique for firing powder for electronic parts, a method is known in which a powder raw material is stored in a heat-resistant container called a mortar and heat-treated at a high temperature while being conveyed in a high-temperature heating furnace. In the heat treatment method, a ceramic heater is often used from the viewpoint of preventing contamination in the furnace, and in particular, a rod-shaped SiC heater is often used (Patent Document 1).

該棒状ＳｉＣヒータの炉内配置に関し、従来、棒状ＳｉＣヒータが貫通する炉壁の内壁面側におけるヒータの過加熱およびこれに伴うヒータ劣化を回避する観点から、図５に示すように、棒状ヒータの発熱部が内壁面と５０ｍｍ程度離れた位置にくるように調整する方法が採用されていた。元来、炉壁付近の温度は、炉壁からの放熱により低くなる傾向が見られるが、前記のような棒状ヒータの発熱部配置を採用すると、内壁近辺における温度低下が更に顕著になる現象が観察される。   With respect to the arrangement of the rod-shaped SiC heater in the furnace, conventionally, from the viewpoint of avoiding overheating of the heater on the inner wall surface side of the furnace wall through which the rod-shaped SiC heater penetrates and accompanying heater deterioration, as shown in FIG. The method of adjusting so that the heat generating part of the head is positioned about 50 mm away from the inner wall surface has been adopted. Originally, the temperature in the vicinity of the furnace wall tends to be lowered due to heat radiation from the furnace wall. However, if the heat generating part arrangement of the rod heater as described above is adopted, the temperature decrease near the inner wall becomes more remarkable. Observed.

特に、近年、炉の生産性向上を目的として炉幅が拡張される傾向にあるが、これに伴って、炉幅方向における温度ばらつきも大きくなり、被焼成物の品質にバラつきが生じる問題があった。   In particular, in recent years, there is a tendency for the furnace width to be expanded for the purpose of improving the productivity of the furnace, but with this, the temperature variation in the furnace width direction also increases, and there is a problem that the quality of the material to be fired varies. It was.

特開２００９−１０３３３１号公報JP 2009-103331 A

本考案の目的は前記を解決し、炉幅の拡張に伴う炉幅方向の温度ばらつきを低減することができる加熱炉を提供することである。   An object of the present invention is to provide a heating furnace that solves the above and can reduce temperature variations in the furnace width direction accompanying the expansion of the furnace width.

上記課題を解決するためになされた本考案の加熱炉は、発熱部と非発熱部を有する棒状ＳｉＣヒータを、炉幅方向で炉壁を貫通して、炉長手方向に複数配置した加熱炉において、炉長手方向に複数配置された棒状ＳｉＣヒータ間には、一方の炉壁に保持されて該内壁面近辺を加熱する補助ヒータを備えることを特徴とするものである。   The heating furnace of the present invention made to solve the above problems is a heating furnace in which a plurality of rod-shaped SiC heaters having a heating part and a non-heating part are arranged in the furnace longitudinal direction through the furnace wall in the furnace width direction. Between the plurality of rod-shaped SiC heaters arranged in the furnace longitudinal direction, there is provided an auxiliary heater that is held on one furnace wall and heats the vicinity of the inner wall surface.

請求項２記載の考案は、請求項１記載の加熱炉において、該棒状ＳｉＣヒータが貫通する炉壁の内壁面側に、切欠き部が形成され、該棒状ＳｉＣヒータは、切欠き部内を非発熱部、内壁面から炉内側を発熱部とすることを特徴とするものである。   The invention according to claim 2 is the heating furnace according to claim 1, wherein a notch is formed on the inner wall surface side of the furnace wall through which the rod-shaped SiC heater penetrates, and the rod-shaped SiC heater is not formed in the notch. The heat generating part is characterized in that the inside of the furnace is the heat generating part from the inner wall surface.

請求項３記載の考案は、請求項１または２記載の加熱炉において、補助ヒータを、炉長手方向で該棒状ＳｉＣヒータと交互に配置したことを特徴とするものである。   The invention according to claim 3 is characterized in that, in the heating furnace according to claim 1 or 2, auxiliary heaters are arranged alternately with the rod-like SiC heaters in the longitudinal direction of the furnace.

請求項４記載の考案は、請求項１〜３の何れかに記載の加熱炉において、補助ヒータは、棒形状を有し、炉壁からの突出部が、炉幅の１／２０〜１／５であることを特徴とするものである。   The invention described in claim 4 is the heating furnace according to any one of claims 1 to 3, wherein the auxiliary heater has a rod shape, and the protruding portion from the furnace wall is 1/20 to 1/1 of the furnace width. It is characterized by being 5.

請求項５記載の考案は、請求項１〜３の何れかに記載の加熱炉において、補助ヒータは、コ字形状を有することを特徴とするものである。   The invention according to claim 5 is the heating furnace according to any one of claims 1 to 3, wherein the auxiliary heater has a U-shape.

従来、ＳｉＣヒータが貫通する炉壁の内壁面側におけるヒータの過加熱およびこれに伴うヒータ劣化を回避する観点から、図５に示すように、ヒータの発熱部が内壁面と５０ｍｍ程度離れた位置にくるように調整する方法が採用されており、当該構造に起因して、内壁近辺では炉内温度が低くなる現象があったが、本考案に係る加熱炉は、炉幅方向で炉壁を貫通して配置した加熱炉において、一方の炉壁に保持されて内壁面近辺を加熱する補助ヒータを備える構成を合わせて採用することにより、従来、内壁近辺では炉内温度が低くなっていた現象を回避可能としている。   Conventionally, from the viewpoint of avoiding overheating of the heater and the accompanying heater deterioration on the inner wall surface side of the furnace wall through which the SiC heater penetrates, as shown in FIG. However, due to the structure, there was a phenomenon that the temperature in the furnace was lowered near the inner wall, but the heating furnace according to the present invention has the furnace wall in the furnace width direction. Phenomenon that the furnace temperature has been lowered in the vicinity of the inner wall in the past by adopting a configuration including an auxiliary heater that is held by one furnace wall and heats the vicinity of the inner wall surface in the heating furnace that is disposed through. Can be avoided.

すなわち、本考案によれば、従来、内壁近辺では炉内温度が低くなっていた現象を回避することができるため、炉の生産性向上を目的として炉幅を拡張した場合であっても、炉幅方向における温度ばらつきを効果的に抑制することができる。   That is, according to the present invention, the phenomenon that the temperature in the furnace has been lowered in the vicinity of the inner wall can be avoided conventionally, so even if the furnace width is expanded for the purpose of improving the productivity of the furnace, Temperature variations in the width direction can be effectively suppressed.

なお、更に、棒状ＳｉＣヒータが貫通する炉壁の内壁面側に、切欠き部を形成され、該棒状ＳｉＣヒータは、切欠き部内を非発熱部、内壁面から炉内側を発熱部とする構成を追加して備える構成によれば、より効果的に炉幅方向における温度ばらつきを抑制することができる。   Further, a notch portion is formed on the inner wall surface side of the furnace wall through which the bar-shaped SiC heater passes, and the bar-shaped SiC heater has a non-heat generating portion inside the notched portion and a heat generating portion from the inner wall surface to the inside of the furnace. According to the configuration additionally provided, temperature variations in the furnace width direction can be more effectively suppressed.

本実施形態の加熱炉の炉幅方向拡大断面図である。It is an expanded sectional view of the furnace width direction of the heating furnace of this embodiment. 図１のＡ−Ａ断面図である。It is AA sectional drawing of FIG. 図１のＡ−Ａ断面図である。（補助ヒータに関する他の実施形態）It is AA sectional drawing of FIG. (Other embodiment regarding an auxiliary heater) 本実施形態の加熱炉に使用される棒状ＳｉＣヒータの構成説明図および炉内温度分布図である。It is composition explanatory drawing and the furnace temperature distribution figure of the rod-shaped SiC heater used for the heating furnace of this embodiment. 従来技術の加熱炉に使用される棒状ＳｉＣヒータの構成説明図および炉内温度分布図である。It is a structure explanatory drawing and furnace temperature distribution figure of the rod-shaped SiC heater used for the heating furnace of a prior art.

以下に本考案の好ましい実施形態を示す。   Hereinafter, preferred embodiments of the present invention will be described.

図１には、本実施形態の加熱炉を示す炉幅方向の拡大断面図を示している。本実施形態における加熱炉は、ローラーハースキルンであり、炉体１は周知のトンネル構造であり、その内部に一定ピッチで多数の搬送用のローラ２が配置されている。各ローラ２は高温強度に優れたＳｉ−ＳｉＣ製であり、炉外に設置された駆動装置によって一定速度で駆動されている。なおＳｉ−ＳｉＣはＳｉを含浸させた緻密なＳｉＣであり、１３００℃において２５０ＭＮ/ｍ２という高強度を有する。また耐クリープ性、耐酸化性、赤外線の放射性にも優れる材質である。 In FIG. 1, the expanded sectional view of the furnace width direction which shows the heating furnace of this embodiment is shown. The heating furnace in the present embodiment is a roller hearth kiln, and the furnace body 1 has a well-known tunnel structure, and a large number of conveying rollers 2 are arranged at a constant pitch therein. Each roller 2 is made of Si—SiC having excellent high-temperature strength, and is driven at a constant speed by a driving device installed outside the furnace. Si-SiC is dense SiC impregnated with Si and has a high strength of 250 MN / m 2 at 1300 ° C. It is also a material with excellent creep resistance, oxidation resistance, and infrared radiation.

被焼成物である粉体はセラミック製の匣鉢３に収納され、複数の匣鉢３を配列した状態でローラ２上を搬送され、５００〜１２００℃で熱処理される。   Powder to be fired is housed in a ceramic mortar 3, conveyed on the roller 2 in a state where a plurality of mortar 3 is arranged, and heat treated at 500 to 1200 ° C.

炉内６の上部および下部には、各々、炉幅方向で炉壁４を貫通して棒状ＳｉＣヒータ５が配置されている。また、図２に示すように、炉長手方向には、該棒状ＳｉＣヒータ５と補助ヒータ９とが交互に配置されている。棒状ＳｉＣヒータ５の炉壁からの突出部が、炉幅の１/２０未満の場合、壁面の温度補助をするためのヒータ出力が稼げず、炉幅の１/５超の場合 、炉の中心部分の温度が高くなりがちな領域へ補助ヒータが影響を及ぼす恐れがあるため、棒状ＳｉＣヒータ５の炉壁からの突出部は、炉幅の１／２０〜１／５とすることが好ましい。   A bar-shaped SiC heater 5 is disposed in the upper and lower portions of the furnace 6 so as to penetrate the furnace wall 4 in the furnace width direction. Further, as shown in FIG. 2, the bar-shaped SiC heaters 5 and the auxiliary heaters 9 are alternately arranged in the furnace longitudinal direction. If the protruding portion of the rod-shaped SiC heater 5 from the furnace wall is less than 1/20 of the furnace width, the heater output for assisting the temperature of the wall surface cannot be gained, and if it exceeds 1/5 of the furnace width, the center of the furnace Since the auxiliary heater may affect a region where the temperature of the portion tends to be high, it is preferable that the protruding portion of the bar-shaped SiC heater 5 from the furnace wall be 1/20 to 1/5 of the furnace width.

ただし、補助ヒータは、一方の炉壁４に保持されて該炉壁４近辺を加熱する機能を奏すればよく、本実施形態では、棒状の補助ヒータ９を使用しているが、補助ヒータ９の形状等は特に限定されず、例えば、図３に示すようなコ字状のものを使用することもできる。   However, the auxiliary heater is only required to have a function of being held by one furnace wall 4 and heating the vicinity of the furnace wall 4. In this embodiment, the rod-shaped auxiliary heater 9 is used. There are no particular restrictions on the shape, and for example, a U-shape as shown in FIG. 3 may be used.

図３に示すように、棒状ＳｉＣヒータ５は、発熱を行う発熱部５１と、発熱を行わない非発熱部５２ｂを有している。   As shown in FIG. 3, the rod-shaped SiC heater 5 has a heat generating portion 51 that generates heat and a non-heat generating portion 52b that does not generate heat.

炉壁４の内壁面７側には、コーン形状の切欠き部８が形成されており、棒状ＳｉＣヒータ５は、切欠き部内を非発熱部５２ｂ、内壁面７から炉内６側を発熱部５１を有している。   A cone-shaped notch 8 is formed on the inner wall 7 side of the furnace wall 4, and the rod-shaped SiC heater 5 has a non-heat-generating part 52 b in the notch and a heat-generating part from the inner wall 7 to the furnace 6 side. 51.

従来、ＳｉＣヒータが貫通する炉壁４の内壁面７側におけるヒータの過加熱およびこれに伴うヒータ劣化を回避する観点から、図５に示すように、棒状ＳｉＣヒータ５の発熱部５１が内壁面７と５０ｍｍ程度離れた位置にくるように調整する方法が採用されており、当該構造に起因して、内壁面７近辺では炉内温度が低くなる現象があったが、本考案に係る加熱炉は、炉幅方向で炉壁を貫通して配置した加熱炉において、一方の炉壁に保持されて内壁面近辺を加熱する補助ヒータを備える構成を合わせて採用することにより、従来、内壁近辺では炉内温度が低くなっていた現象を回避可能としている。本実施形態では、棒状ＳｉＣヒータ５が貫通する炉壁４の内壁面７側に、切欠き部８を形成し、棒状ＳｉＣヒータの、切欠き部８内に配置される部分を非発熱部５２ｂ、内壁面から炉内側に配置される部分を発熱部５１とする構成、および、一方の炉壁４に保持されて内壁面７近辺を加熱する補助ヒータ９を備える構成を合わせて採用を採用することにより、当該現象を更に効果的に回避可能としている。   Conventionally, from the viewpoint of avoiding overheating of the heater on the inner wall surface 7 side of the furnace wall 4 through which the SiC heater penetrates and the accompanying heater deterioration, as shown in FIG. The method of adjusting the position so as to be about 50 mm away from 7 is adopted, and due to the structure, there was a phenomenon that the furnace temperature was lowered near the inner wall surface 7, but the heating furnace according to the present invention In the heating furnace arranged through the furnace wall in the furnace width direction, by adopting a configuration including an auxiliary heater that is held by one furnace wall and heats the vicinity of the inner wall surface, conventionally, in the vicinity of the inner wall, This makes it possible to avoid the phenomenon that the temperature in the furnace is low. In the present embodiment, a notch portion 8 is formed on the inner wall surface 7 side of the furnace wall 4 through which the rod-shaped SiC heater 5 penetrates, and a portion of the rod-shaped SiC heater disposed in the notch portion 8 is a non-heat generating portion 52b. In addition, a configuration in which a portion disposed from the inner wall surface to the inside of the furnace is used as the heat generating portion 51 and a configuration including the auxiliary heater 9 that is held by one furnace wall 4 and heats the vicinity of the inner wall surface 7 are employed. Therefore, the phenomenon can be avoided more effectively.

すなわち本考案によれば、従来、内壁近辺では炉内温度が低くなっていた現象を回避することができるため、炉の生産性向上を目的として炉幅を拡張した場合であっても、炉幅方向における温度ばらつきを効果的に抑制することができる。   That is, according to the present invention, the phenomenon that the temperature in the furnace has been lowered in the vicinity of the inner wall can be avoided conventionally, so even if the furnace width is expanded for the purpose of improving the productivity of the furnace, The temperature variation in the direction can be effectively suppressed.

１ 炉体
２ ローラ
３ 匣鉢
４ 炉壁
５ 棒状ＳｉＣヒータ
５１ 発熱部
５２ｂ 非発熱部
６ 炉内
７ 内壁面
８ 切欠き部
９ 補助ヒータ Reference Signs List 1 furnace body 2 roller 3 bowl 4 furnace wall 5 bar-shaped SiC heater 51 heating part 52b non-heating part 6 furnace 7 inner wall surface 8 notch part 9 auxiliary heater

Claims (5)

発熱部と非発熱部を有する棒状ＳｉＣヒータを、炉幅方向で炉壁を貫通して、炉長手方向に複数配置した加熱炉において、
炉長手方向に複数配置された棒状ＳｉＣヒータ間には、一方の炉壁に保持されて該内壁面近辺を加熱する補助ヒータを備える
ことを特徴とする加熱炉。 In a heating furnace in which a plurality of rod-shaped SiC heaters having a heat generating part and a non-heat generating part are disposed in the furnace longitudinal direction through the furnace wall in the furnace width direction,
A heating furnace comprising an auxiliary heater that is held by one furnace wall and heats the vicinity of the inner wall surface between a plurality of rod-shaped SiC heaters arranged in the furnace longitudinal direction. 該棒状ＳｉＣヒータが貫通する炉壁の内壁面側に、切欠き部が形成され、
該棒状ＳｉＣヒータは、切欠き部内を非発熱部、内壁面から炉内側を発熱部とすることを特徴とする請求項１記載の加熱炉。 A notch is formed on the inner wall surface side of the furnace wall through which the rod-shaped SiC heater passes,
The heating furnace according to claim 1, wherein the bar-shaped SiC heater has a not-heat generating portion as a non-heating portion and a heating portion from the inner wall surface to the inside of the furnace. 補助ヒータを、炉長手方向で該棒状ＳｉＣヒータと交互に配置したことを特徴とする請求項１または２記載の加熱炉。   The heating furnace according to claim 1 or 2, wherein auxiliary heaters are arranged alternately with the rod-like SiC heaters in the longitudinal direction of the furnace. 補助ヒータは、棒形状を有し、炉壁からの突出部が、炉幅の１／２０〜１／５であることを特徴とする請求項１〜３の何れかに記載の加熱炉。   The heating heater according to any one of claims 1 to 3, wherein the auxiliary heater has a rod shape, and a protruding portion from the furnace wall is 1/20 to 1/5 of the furnace width. 補助ヒータは、コ字形状を有することを特徴とする請求項１〜３の何れかに記載の加熱炉。
The heating furnace according to claim 1, wherein the auxiliary heater has a U shape.
JP2011006881U 2011-11-22 2011-11-22 heating furnace Expired - Lifetime JP3173376U (en)

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