TWM438631U - Probe, probe and probe seat assembly, and edge finder using the same - Google Patents
Probe, probe and probe seat assembly, and edge finder using the same Download PDFInfo
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- TWM438631U TWM438631U TW101205918U TW101205918U TWM438631U TW M438631 U TWM438631 U TW M438631U TW 101205918 U TW101205918 U TW 101205918U TW 101205918 U TW101205918 U TW 101205918U TW M438631 U TWM438631 U TW M438631U
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Description
M438631 五、新型說明: 【新型所屬之技術領域】 本創作係與利用探針(probe)檢測諸如發光二極體等半 導體晶粒性能之點測裝置(prober)有關,特別是關於一種 探針、探針與針座之總成,以及使用該總成之尋邊器 (edge sensor)。 【先前技術】 φ 點測裝置為一種利用探針檢測諸如發光二極體(light emitting diode,LED)等半導體晶粒性能表現或特性參數 之。又備點測裝置通常包含有一尋邊器(edge sensor),請 參閱第一圖及第二圖,習用之尋邊器1〇〇包含有一座體 、一懸臂120、一連接於該座體u〇與該懸臂12〇之 間的彈性片130,以及一設置於該懸臂12〇 一端之探針 该懸臂120與該座體no之間更設有一可調預力施 力器150,以及一分別固設於該懸臂120及該座體11〇之 參導電體160、170 ’該二導電體16〇、17〇受該預力施加器 150施予之預力作用而保持接觸並電性導通。 藉由—可垂直往復運動之進給機構帶動該尋邊器100 下降或藉由一可垂直往復運動之承載台帶動一待測物上 升《亥探針140可與該待測物接觸,一旦該探針對該 待測物所施之針壓(pr〇bing f〇rce)使得其反作用力克服該 預力時,將造成該懸臂120擺動且該彈性片13〇彈性彎曲 變形’使得該二導電體·、17〇相互分離而斷路,同 ^ ’點测裝置-旦偵測到該二導電體16G、I%斷路之訊 3 M438631 號則立即停止前述進給動作。藉此,該尋邊器1〇〇可確保 該採針140能破實接觸並施予一定壓抵力量於待測物,而 且,該尋邊器100更可避免該探針14〇對該待測物所施之 針壓過大而造成待測物或探針丨4〇損傷。 傳統上,該探針140之設置方式係先將探針14〇設置 於該懸臂120之一可對該探針14〇限位之針座122,再將 螺絲180鎖緊於該針座122,以將該探針14〇固定於該針 座122。然而,該探針設置方式不但費時, 丨8。之動作會對該懸臂丨2。施予一下壓力,使得= 體160、17G相互推抵之力量增加,祕作還可能使該二 導電體160、170相互磨擦,以及使該彈性片13〇塑性變 形。換言之’㈣尋邊器1GG之探針裝設方式不但較為不 便與耗時’且在裝設或更換習用尋邊器1〇〇的探針14〇 時,該尋邊器獅之導電體⑽、m及彈性片13〇容易 損壞。 【新型内容】 有鑑於上述缺失,本創作之主要目的在於提供一種探 針與針座之總成’可讓❹者快速地拆卸及安裝探針。 之一端 為達成上述目的,本創作所提供之 包含有-具有-定位礼及-卡扣部之針座,以成 =針具有-長條狀㈣連接於條狀身部針 扣部。藉此’由於該探針不顯㈣絲即能固 疋於該針座上’使用者可快速地拆卸及絲探針。口 之她A目的在於提供—種使用前述探針與針座 ==在:了二有可快速拆卸及安裝探針之優點 ⑷如彈糾)4_料造餘尋衫之其他零件 體」的#本創作所提供之尋邊器包含有-座 之間的彈性片,以及__+接於该座體與該懸臂件 卡扣部.背二 該針座具有一定位孔以及- 邱之: 長條狀身部、一連接於該長條狀身 二:=:r,及:連接於該二 於該針座之定位孔中,且:採針之定位部係插置 地卡抵於該針座之卡扣針之長條狀身部係彈性彎曲 固定於該針座i 4 於該探針不須藉由螺絲即能 鎖二而ΐ用者在拆卸及安裝探針時,可避免因 器之作而使該彈性片塑性弯曲變形或損壞該尋邊 較佳地,前述該總 體,該本體具有-頂面^ ^中,該針座具有一本 延伸,而該卡扣部係銜接孔係自該本體之頂面向下 -較:if狀身部斜抵於計扣部之卡抵面。 卡“前述探針可更為穩 較佳地 ,前述該總成或該尋邊器中,該針座之卡扣 具有-與料紅本麟接之向上延伸段,以及— t延伸段銜接之橫向延伸段,該卡抵面係位於該橫’向M438631 V. New description: [New technical field] This creation is related to the use of probes to detect probes of semiconductor crystals such as light-emitting diodes, especially with regard to a probe, The assembly of the probe and the hub, and the edge sensor using the assembly. [Prior Art] The φ spot measuring device is a type of semiconductor film performance or characteristic parameter such as a light emitting diode (LED) that is detected by a probe. Moreover, the spot measuring device usually includes an edge sensor. Referring to the first figure and the second figure, the conventional edge finder 1 includes a body, a cantilever 120, and a connecting body. An elastic piece 130 between the cymbal and the cantilever 12〇, and a probe disposed at one end of the cantilever 12〇, an adjustable pre-force applicator 150 is further disposed between the cantilever 120 and the seat body no. The two conductors 16 , 17 ′ respectively fixed to the cantilever 120 and the seat body 11 保持 are held by the pre-forcer 150 to maintain contact and electrically conduct. . The edge finder 100 is driven down by a vertical reciprocating feed mechanism or a test object is lifted by a vertically reciprocable carrier. The probe 140 can be in contact with the object to be tested. When the probe applies a needle pressure (pr〇bing f〇rce) to the object to be tested, such that the reaction force overcomes the pre-force, the cantilever 120 swings and the elastic piece 13 elastically bends and deforms, so that the two conductors ·, 17〇 are separated from each other and disconnected. The same as the ^ 'point measuring device - once the two conductors 16G, I% open circuit 3 M438631 is detected, the feed operation is immediately stopped. Thereby, the edge finder 1 ensures that the stylus 140 can break the contact and apply a certain pressure to the object to be tested, and the edge finder 100 can prevent the probe 14 from being The needle pressure applied by the test object is too large, causing damage to the test object or the probe. Conventionally, the probe 140 is disposed in a manner that the probe 14 is first disposed on the needle holder 122 of the cantilever 120 to limit the probe 14 , and the screw 180 is locked to the needle holder 122 . The probe 14 is fixed to the hub 122. However, the way the probe is set up is not only time-consuming, 丨8. The action will be on the cantilever 丨2. The pressure is applied so that the force of the body 160, 17G is pushed against each other, and the secret can also cause the two conductors 160, 170 to rub against each other and the plastic sheet 13 to be plastically deformed. In other words, the (4) finder of the edge finder 1GG is not only inconvenient and time consuming, and when the probe 14 of the conventional edge finder is installed or replaced, the lion's conductor (10), m and the elastic sheet 13 are easily damaged. [New content] In view of the above-mentioned shortcomings, the main purpose of this creation is to provide a probe and a hub assembly that allows the latter to quickly disassemble and mount the probe. One end In order to achieve the above object, the present invention provides a needle holder including a - locating ceremony and a buckle portion, and the needle is connected to the strip portion of the strip body. Thereby, the user can be fastened to the needle holder because the probe is not visible (four), and the user can quickly disassemble and wire the probe. Ms. A's purpose is to provide the use of the aforementioned probes and the needle holder == in the second: the advantages of quick disassembly and installation of the probe (4) such as elastic correction) 4_ material surplus to find other parts of the body # The edge seeker provided by the creation includes an elastic piece between the seats, and the __+ is connected to the seat body and the buckle portion of the suspension arm member. The back of the needle holder has a positioning hole and - Qiu Zhi: a strip-shaped body, one connected to the strip-shaped body 2:=:r, and: is connected to the positioning hole of the needle holder, and the positioning portion of the needle is inserted into the needle The long strip of the snap pin of the seat is elastically bent and fixed to the hub i 4 . The probe can be locked without the need of a screw, and the user can avoid the device when disassembling and installing the probe. Preferably, the elastic sheet is plastically deformed or damaged, or the edge is preferably damaged. Preferably, the body has a top surface, the needle holder has a stretch, and the buckle portion is a connecting hole system. From the top of the body facing downwards - comparison: if the body is inclined to the card to the face of the buckle. The card "the aforementioned probe can be more stably and preferably. In the foregoing assembly or the edge finder, the buckle of the needle holder has an upwardly extending section with the red body, and the extension of the - t extension a lateral extension, the card abutment is located in the transverse direction
部。亦即’該卡扣部係形成—勾狀結構,然而,該 卡扣部之結構並不以此為限。 X 較佳地’前述該總成或該尋邊針,該針座之定位孔 ,轴向實質上係垂直該針座本體之頂面而該探針之定位 4係相對該長餘身料折_預定肖度地向下延伸,且 述預疋角度實質上係大於9〇度且小於135度。 或者,前述該總成或該尋邊器中,該探針之定位部實 質士係相對該長條狀身部垂直彎折地向下延伸,而該針^ 之定位孔係相對該針座本體之頂面傾斜延伸,且該定位孔 之軸向係與該頂面之一法線相交一大於0度且小於45度 之夾角。藉由以上二種探針之定位部與針座之定位孔之結 構搭配,使得探針之^位部插置於該定位孔巾時,探針的 長條狀身部可相龍針座本體之頂面傾斜地向上延伸,俾 =該長條狀身部錢—外力龍之後,可以向下塑性彎曲 交形而卡抵於該卡扣部,並藉由其雜回復力而定位。 較佳地,前述該總成或該尋邊器中,該針座之定位孔 |為柄孔’其具有_錐狀頭部以及_與該錐狀頭部連 :立身邛藉此,該探針之定位部可以輕易地經由該錐狀 頭部之導引而插人該定位孔之身料而定位。 +較佳地’該尋邊器中,該彈性片具有一最大表面,且 °亥彈性片係以其最大表面實質上平行該懸臂件之長軸方向 M438631 之方=冑接於該座體與該懸臂件之間。 彈二片具有-最大表面,且該 方式,連心 垂直鶴料之長轴方向之 接於該座體與該懸臂件之間。 及安二目的在於提供—種探針’可快速地拆卸 該探針具有特殊之結構設計,使其可 4位置的彈性變形回復力量卡抵於針座之特定部位而固 疋再位罝。unit. That is, the snap portion is formed into a hook-like structure, however, the structure of the snap portion is not limited thereto. X preferably 'the aforementioned assembly or the edge-trimming needle, the positioning hole of the needle holder is substantially perpendicular to the top surface of the needle holder body and the positioning position of the probe is folded relative to the long body The predetermined length is extended downwards, and the pre-twist angle is substantially greater than 9 degrees and less than 135 degrees. Alternatively, in the above-mentioned assembly or the edge finder, the positioning portion of the probe extends downwardly perpendicularly to the elongated body, and the positioning hole of the needle is opposite to the body of the needle holder. The top surface of the locating hole extends obliquely, and the axial direction of the locating hole intersects with a normal of the top surface by an angle greater than 0 degrees and less than 45 degrees. By aligning the positioning portions of the above two kinds of probes with the positioning holes of the needle holder, when the position of the probe is inserted into the positioning hole, the long body of the probe can be the body of the dragon needle seat The top surface of the top surface extends obliquely upwards, 俾=the long strip-shaped body money-external force dragon, which can be plastically bent downward to be snapped against the buckle portion and positioned by its hybrid restoring force. Preferably, in the foregoing assembly or the edge finder, the positioning hole of the needle seat is a shank hole having a _conical head and _ connected to the tapered head: The positioning portion of the needle can be easily positioned by inserting the body of the positioning hole through the guiding of the tapered head. + Preferably, in the edge finder, the elastic sheet has a maximum surface, and the elastic sheet has a maximum surface substantially parallel to the longitudinal direction of the cantilever member M438631 = 胄 于 该Between the suspension members. The two pieces have a maximum surface, and in this manner, the long axis direction of the continuous vertical ground material is connected between the seat body and the suspension member. The purpose of the second is to provide a probe that can be quickly disassembled. The probe has a special structural design that allows the elastic deformation of the 4-position to restore the force of the card to a specific portion of the needle holder to be repositioned.
—鱗虹述目的,本_所提供之探針侧以裝設固 疋於具有—定位孔以及—卡扣部之針座,該探針具有一 長條f身部、—連接於該長條狀身部之-端且向下延伸的 針尖部H連接於職條狀身部之另—端並相對該長 條狀身部彎折-預定角度而向下延伸的定位部;前述預定 角度實質上係、大於90度且小於135纟,而前述定位部係 用以插置_針座之定位孔中,俾使該探針之長條狀身部For the purpose of the scales, the probe side provided by the present invention is mounted on a needle holder having a positioning hole and a buckle portion, the probe having a long strip body, connected to the strip a tip end portion H of the body portion extending downwardly and connected to the other end of the body portion and bent at a predetermined angle with respect to the elongated body portion; the predetermined angle is substantially The upper system is greater than 90 degrees and less than 135 inches, and the positioning portion is used for inserting the positioning hole of the _ needle holder to make the long body of the probe
:彈性f曲地卡抵於該針座之卡扣部。藉此,該探針不須 糟由螺絲即可©定於針座,因此可讓使用者快速地拆卸及 安裝。 較佳地,該探針之長條狀身部、針尖部以及定位部實 質上係位於同一平面上。 有關本創作所提供之探針、探針與針座之總成以及使 用5玄總成之寻邊益的詳細構造、特點、組裝或使用方式, 將於後續的實施方式詳細說明中予以描述。然而,在本創 作領域中具有通常知識者應能瞭解,該等詳細說明以及實 7 m-Γ J 丄 A本創作所列舉的特定實施例,僅係用於說明本創作,ϋ =用以限制本創作之專利申請範圍。 【實施方式】 以下將藉由所列舉之實施例配合隨附之圖式 ,洋細說 明本創作之技術内容及特徵,其中: 於 第三圖為本創作一第一較佳實施例所提供之尋邊器設 進給單元的立體纟且合圖;: The elastic f-bucks the card to the buckle portion of the needle seat. Thereby, the probe can be fixed to the needle holder without the need for screws, so that the user can be quickly disassembled and installed. Preferably, the elongated body, the tip portion and the positioning portion of the probe are substantially in the same plane. The detailed construction, features, assembly, or use of the probes, probes, and hub assemblies provided with this creation, as well as the use of the 5 Xuancheng, will be described in the detailed description of the subsequent embodiments. However, those of ordinary skill in the art should be able to understand that the detailed description and the specific examples enumerated in this creation are only used to illustrate the creation, ϋ = to limit The scope of the patent application for this creation. The following is a description of the technical content and features of the present invention by using the illustrated embodiments in conjunction with the accompanying drawings, wherein: FIG. 3 is a first preferred embodiment of the present invention. The edge finder sets the three-dimensional 纟 and the drawing of the feeding unit;
氏第四圖為第三圖之局部側視圖,係顯示該尋邊器之一 探針與—針座未相互卡接固定之態樣; 第五圖為本創作該第一較佳實施例所提供之尋邊器之 針座與探針的立體分解圖; 第六圖係類同於第四圖,惟顯示該尋邊器之探針與針 座相互卡接固定,且該探針與—制物接觸之態樣; 第七圖為本創作一第二較佳實施例所提供之尋邊器的 側視圖,係顯示該尋邊器之_探針與—針座未相互卡^固 定之態樣;The fourth figure is a partial side view of the third figure, showing that one of the probes of the edge finder and the needle holder are not fixed to each other; the fifth figure is the first preferred embodiment of the present invention. An exploded view of the needle holder and the probe provided with the edge finder; the sixth figure is similar to the fourth figure, except that the probe of the edge finder and the needle holder are fixed to each other, and the probe and the The seventh embodiment is a side view of the edge finder provided by the second preferred embodiment of the present invention, which shows that the probe and the needle holder of the edge finder are not fixed to each other. Aspect
第八圖為本創作一第三較佳實施例所提供之尋邊器與 一進給單元的立體分解圖;以及 、 第九圖為第八圖之局部側視圖,係顯示該尋邊器之一 探針與一針座未相互卡接固定之態樣。 申請人首先在此說明,在以下將要介紹之實施例以及8 is an exploded perspective view of an edge finder and a feeding unit provided by a third preferred embodiment of the present invention; and a ninth drawing is a partial side view of the eighth drawing, showing the edge finder A probe and a needle holder are not locked to each other. The Applicant first describes here, the embodiments to be described below and
圖式中’㈣之參考號碼,表示姉或類似之元件或其結 構特徵。 、Q 10,以及 請先參閱第三圖,第三圖顯示一進給單元 8 M438631 設於該進給單元1〇之本創作 尋邊器如,該尋邊器加係受該進仏蝴所提供之 三軸向移動而調整其位^。有 Φ動而可沿 探針與針座之總成的詳細結構及特徵作之探針以及 之尋邊器2〇的整體構造而得到充分的“由=所, 創作說明中料針輯述探針 此’在此 說明。 錢針與針紅總成單獨 請參閱第三圖至第六圖,該 3〇、-_4〇、—懸臂件5G、=2包含有一座體 單元7〇,以及-導電單元8(N ^6G、—預力施加 該座設於一連魏12之底部 於該進給料10,觀,該賴3Q衫 連= 之,著X、Mz轴方向往復位移。由於該進料 兀10係為-般自動化機械中常見、可沿χ、γ及z =往復位移之三轴位移機構,且並非本創作之技㈣徵 所在,因此其詳細結構容申請人在此不予贅述。必須說明 的是,在本實施例中該尋邊_ 20係藉由前述進給單元10 而可沿著z軸方向相對一待測物90 (如第六圖所示)下 降或上升以點觸或離開該待測物9〇之導電接點92,以進 =該待測物90之特性檢測作業。然而,本創作所提供之 尋邊器20亦可不搭配前述進給單元1〇而主動進給,而係 搭配承載台(圖中未示)作被動進給,亦即,係由 以承載待測物90且可作χ、γ、z三轴方向線性位移以及 Θ方向(繞Z車由方向)旋轉之承載台的上升或下降動 9 作,=測物90與尋邊器2〇的探 該彈性片40係甴金屬材料 {互點觸。 ^段及後半段係分別固接於該座體邓底5製^ ’其前 頂部。 抵。卩及該懸臂件50 該懸臂件50包含有位於該座體3〇下方之 針座5卜以及-固接於該針 纽4 :圖及第五圖_’料座51^== 2 2二筹Reference numerals in '(d)' in the drawings denote 姊 or similar elements or structural features thereof. , Q 10, and please refer to the third figure, the third figure shows a feeding unit 8 M438631 is set in the feeding unit 1 本 the original edge finder, for example, the edge finder is attached to the butterfly Provide three axial movements to adjust its position ^. There is a Φ motion that can be used along the probe and the assembly of the probe and the overall structure of the probe and the overall structure of the edge finder 2 而 to obtain a sufficient "by =, the description of the needle in the creative description The needle is described here. The money needle and the needle red assembly are separately shown in the third to sixth figures. The 3〇, -_4〇, - the suspension member 5G, = 2 contain a body unit 7〇, and - Conductive unit 8 (N ^ 6G, - pre-force application of the seat at the bottom of a series of Wei 12 on the feed material 10, view, the Lai 3Q shirt = =, in the X, Mz axis direction reciprocating displacement. Because of the feed The 兀10 series is a three-axis displacement mechanism that is common in general-purpose machinery and can be reciprocally displaced along χ, γ, and z =, and is not the technique of the creation (4). Therefore, the detailed structure of the applicant is not described here. It should be noted that in the embodiment, the edge finding -20 is lowered or raised relative to an object to be tested 90 (as shown in the sixth figure) along the z-axis direction by the aforementioned feeding unit 10 to touch Or leaving the conductive contact 92 of the object to be tested 9 to detect the characteristic of the object to be tested 90. However, the present invention provides The edger 20 can also be actively fed without the aforementioned feeding unit 1〇, and is matched with a carrying platform (not shown) for passive feeding, that is, by carrying the object to be tested 90 and can be used as χ, γ. , z linear displacement in the three-axis direction and the ascending or descending movement of the stage in the Θ direction (around the Z-vehicle direction), = the object 90 and the edge finder 2 探 the elastic piece 40 is a metal material { The two segments are fixed to the front of the body. Block 5 and - fixed to the needle 4: picture and fifth picture _ 'seat 51 ^ == 2 2 two
512b,:、以及一自該頂面仙向下延伸之定位孔 m。二皿的轴向U實質上係垂直該頂面 & a〜卡扣部514具有-與該本體512銜接之向上延伸 k 14a以及一與該向上延伸段51如銜接之橫向延伸段 皿,該橫向延伸段51扑之底部具有一向下方開放之卡 槽514c ’該卡槽⑽之槽壁形成一面向下方之卡抵面 514d,且其下方形成一開放空間516。512b,:, and a positioning hole m extending downward from the top surface. The axial direction U of the second dish is substantially perpendicular to the top surface & a~ the buckle portion 514 has an upwardly extending k 14a that engages with the body 512 and a laterally extending segment that engages with the upwardly extending section 51, The bottom portion of the lateral extension 51 has a card slot 514c that is open downwardly. The groove wall of the card slot (10) forms a downward facing surface 514d, and an open space 516 is formed below it.
°亥探針6〇具有一長條狀身部62、一連接於該長條狀 身4 62之一端且向下延伸的針尖部64,以及一連接於該 長條狀身部62之另一端且向下延伸的定位部66,該定位 部66係相對該長條狀身部62彎折一預定角度α地向下延 伸’且該預定角度α實質上係大於90度(在此實施例中 該預定角度α係為100度),而且,該長條狀身部62、針 尖部64以及定仇部66實質上係位於同一平面上。 該預力施加單元70包含有一穿設於該座體30之螺栓 72 ’以及一穿設於該後懸臂52之金屬螺絲74,該螺栓72 M438631 與該螺絲74相對之磁鐵(圖令未示),藉由改 吸力,一 〈距離了調整其相互糾之磁 進而調整其所施予該懸臂件5〇之The cymbal probe 6 has an elongated body 62, a tip portion 64 connected to one end of the elongated body 4 62 and extending downward, and a other end connected to the elongated body 62 And a downwardly extending positioning portion 66, the positioning portion 66 is bent downwardly with respect to the elongated body portion 62 by a predetermined angle α and the predetermined angle α is substantially greater than 90 degrees (in this embodiment) The predetermined angle α is 100 degrees), and the elongated body portion 62, the needle tip portion 64, and the venge portion 66 are substantially in the same plane. The pre-applied applying unit 70 includes a bolt 72' that is disposed on the base body 30 and a metal screw 74 that is disposed on the rear cantilever 52. The bolt 72 M438631 is opposite to the screw 74 (not shown) By changing the suction force, a distance is adjusted to adjust the magnetic force of each other to adjust the weight of the cantilever member 5
預力施加單之結構並不以此為限,例如,^磁= 斥/力或以彈簧之彈性力來達成可調預力之目的。換言之, 種型態之預力施加單元皆可應用於本創作之尋 令’而且,由於前述各種型態之預力施加單元 結構,係屬所屬技術領域中具有通常知識者所熟知,並可 見於诸如中華民國第刷綱號及第職攻9號等專利 中’且並非本創作據以請求專利之技術特徵所在,因此, 申請人在此不予贅述。 該導電單元80包含有一固設於座體30底部之絕緣件 82 ’以及分設於該絕緣件82及該後懸臂52之一第一 導電件84及-第二導電件86,該二導電件84、%係可 相互接觸而電性導通。 該探針6G係設置於該懸臂件%之針座5卜用以藉 由該針尖部64與待測物9〇接觸。該探針6()設置於 座Η之方式,係先以該定位部66如第四圖所示地插設於 該針座5丨之定位孔512b,此時,由於該定位孔51沘之 軸向係垂直該針座51本體512之頂面512a,而該探針6〇 定位部66與該長條狀身部62之炎角α係為大於9〇度之 鈍角,因此’在探針60之定位部66插入該定位孔512b 之後,該長條狀身部62會自然相對該頂面512&傾斜地向 上延伸,此外,藉由該長條狀身部62之長度設計加上前 M438631 述角度配合關係,此時該長條狀身部62之—接近該針尖 部64的扣接段622擗高於該針座51之卡扣部二了實二 上,只要該扣接段622之高度高於卡抵面⑽之高度即 可)。然後’使用者可以施以-外力愿抵該探針6〇之長條 狀身部62,以使該長條狀身部62向下彈性彎曲變形,並 使得其扣接段622先被麼抵到該開放空間5】6,再進入該 針座51之卡扣部514的卡槽514c,進而卡抵於該卡扣部/ 514之卡抵面514d ’如此一來,藉由該探針6〇本身之彈 性回復力量,該探針60與該針座51即可如第六圖所示地 相互固定。當使用者要將該探針6〇拆卸下來時,只要再 次壓抵該探針60而使該長條狀身部62脫離該卡扣部 514 ’即可解除該探針6〇與該針座51之固接關係,進而 將s亥探針60自該針座51取下。 值」寻一提的是’在上述實施例中,為了避免該探針 60在剛述女裝及拆卸過程中過度弯曲而塑性變形,以及 為了能使該探針保有適當的彈性回復力而卡抵定位於該卡 扣部514,該預定角度α係較佳之設計一 1〇〇度為例,然 而’但該預定角度α並不以等於100度為限,例如,其可 以為95度' 105度等等。實際上,該預定角度α之設 定,只要能使該長條狀身部62能適當地傾斜向上延伸即 可’然而’考慮到安裝的容易度、塑性變形的可能性以及 現有探針的材料特性、直徑與該長條狀身部的長度等參 數’該預定角度α之設定,實質上以大於9〇度且 135度為宜。 ' 由於該探針60不須藉由螺絲即可固定於該針座51 上使用者可决速地拆卸及安裝探針,且可避免因鎖 設螺絲之動作而損壞該彈性片4〇與該二導電件料、%。 而且’如第六圖所示,由於該探針60之定位部66與針尖 4 64係相對該長條狀身部&向下彎折延伸錄於同一平 面上’當該探針6G固定於該魅51時,該探針60上方 僅有該針座51之卡扣部.514,且該卡扣部…與待測物 9〇之最β大距離相當,J、,故當本創作之尋邊器 20搭配一用 乂 ,助里測諸如發光二極體等發光元件的發光特性之積分 球(integrating sphere)(圖中未示)使用時,設置於該探針 之上方之積”球將可不受該針座Μ之干涉而能夠盡复 =能地貼近待測物9G,從而獲得更為準確的檢測結果了 探針6〇與針座51之結構設計,使得該探針 貼、斤接、^ 軸—個職的㈣,允許積分球盡量 貼^測物90’因此’該探針6〇之定位部%向下^ ^且與雜錄身部62及針尖部64位關—平面上, ^胃^較佳化之設計’因為’設若定位部係向上彎折延 二須相對配合設置固定該定位部之結構’此社 ==針上方—⑽空間,而造成積分球之開1 Z地㈣祕待_ W轉縣為科的檢挪結 此外,請參閱第七圖,第七圖揭 = 提供之尋邊器。如第七圖所 = 位部66亦可實質上相對該長條狀身部62垂直彎折地= 延伸,亦即前述該預定角度α等於90度;同時,該針座 51之定位孔512b係相對該本體512之頂面512a傾斜向 上並向後延伸’使該定位孔512b之軸向L1係與該頂面 512a之一法線L2相父一約略等於1 〇度之夾角β。同樣必 須說明的是,在此實施例中,該1〇度之夾角ρ係為一較 佳之設計,實際上,該夾角β不以等於1〇度為限,該夾 角β實質上以大於0度且小於45度為宜。如此,該探針 60之定位部66插置於該定位孔512b中時,該長條狀身 部62同樣地會相對該頂面512a呈傾斜延伸,使得該長條 狀身部62可受外力作用而彈性彎曲地卡抵於該卡扣部 514,而同樣可以達成如本創作第一較佳實施例所 尋邊器的功能。 八 >在前述各實施例t,該彈性片4〇實質上係以水平的 姿態連接於該座體30與該懸臂件50之間,亦即,如第四 圖及第七圖所示’該彈性片40係以其最大表面4卜42實 質上平行雜料5G之餘方向之方式,連接於該座體 30與該懸臂件5〇之間。 然而,如第八圖及第九圖所示之本創作一第三較佳给 施例’該彈性片4G亦可實質上以垂直的姿態 ^ 體3〇與該懸臂件50之間;詳而言之,該彈性片4〇 $ ^及—後表面42,該彈性片4〇之上半部係以 面42貼接固定於該座體3〇之一前側面%,該彈 料440之下+部係分m前、後表面41、42貼接固定 …針座51後端及該後懸臂%前端。換言之該彈性片 M438631 40係以其最大表面(亦即該前表面41或該後表面42)實 質上垂直该懸臂件50之長軸方向之方式,連接於該座體 30與该懸臂件50之間。藉此,即使使用者壓抵該探針6〇 之施力過大而使該懸臂件5〇擺動,該彈性片4〇亦不易塑 性變形,因為前述施力之方向基本上係平行於該彈性片 40之設置方向’亦即前述施力大體上係對該彈性片4〇施 加一拉伸力量而非一彎曲力量,因此該彈性片不易塑性變 形。The structure of the pre-stress application unit is not limited thereto, for example, the magnetic force = repulsion/force or the elastic force of the spring to achieve the purpose of the adjustable pre-force. In other words, the pre-force applying unit of the seed type can be applied to the search of the present invention. Moreover, due to the foregoing various types of pre-force applying unit structures, it is well known to those of ordinary skill in the art and can be found in For example, the patents of the Republic of China No. 1 and No. 9 are not the technical features of the patents requested by the author. Therefore, the applicant will not repeat them here. The conductive unit 80 includes an insulating member 82' fixed to the bottom of the base 30, and a first conductive member 84 and a second conductive member 86 disposed on the insulating member 82 and the rear cantilever 52. The two conductive members 84,% can be in contact with each other and electrically conductive. The probe 6G is disposed on the hub 5 of the suspension member for contacting the object to be tested 9 by the needle tip portion 64. The positioning of the probe 6 ( ) in the seat , is first inserted into the positioning hole 512 b of the needle holder 5 以 as shown in FIG. 4 , and the positioning hole 51 is The axial direction is perpendicular to the top surface 512a of the body 512 of the needle holder 51, and the yoke angle α of the probe 6 〇 positioning portion 66 and the elongated body portion 62 is an obtuse angle greater than 9 degrees, so 'in the probe After the positioning portion 66 of the 60 is inserted into the positioning hole 512b, the elongated body portion 62 naturally extends obliquely upward relative to the top surface 512& and further, the length of the elongated body portion 62 is designed to be added to the front M438631. The angle of the fastening portion is such that the fastening portion 622 接近 of the elongated body portion 62 adjacent to the needle tip portion 64 is higher than the buckle portion of the needle holder 51 as long as the height of the fastening portion 622 is high. Higher than the height of the card (10)). Then, the user can apply an external force to the elongated body 62 of the probe 6 to elastically bend and deform the elongated body 62 downward, so that the fastening section 622 is firstly defeated. Going to the open space 5]6, and then entering the card slot 514c of the latching portion 514 of the needle holder 51, and then engaging the card engaging surface 514d of the latching portion 514, by the probe 6 The elastic restoring force of the crucible itself, the probe 60 and the hub 51 can be fixed to each other as shown in FIG. When the user wants to remove the probe 6 ,, the probe 6 is released from the probe portion 60 and the elongated body portion 62 is disengaged from the buckle portion 514 ′ to release the probe 6 〇 and the hub. The fixing relationship of 51 is further removed from the needle holder 51. It is found that in the above embodiment, in order to prevent the probe 60 from being plastically deformed due to excessive bending during the dressing and disassembly process, and in order to enable the probe to maintain an appropriate elastic restoring force, the card is stuck. The predetermined angle α is preferably designed to be one degree, but the predetermined angle α is not limited to 100 degrees, for example, it may be 95 degrees '105. Degree and so on. In fact, the predetermined angle α can be set as long as the elongated body portion 62 can be appropriately tilted and extended upwards, however, the ease of installation, the possibility of plastic deformation, and the material properties of the existing probe can be considered. The parameter "the diameter and the length of the elongated body portion" is set to be substantially greater than 9 degrees and 135 degrees. Since the probe 60 can be fixed to the needle holder 51 without a screw, the user can quickly disassemble and mount the probe, and the elastic piece 4 can be prevented from being damaged by the action of the locking screw. Two conductive parts, %. Moreover, as shown in the sixth figure, since the positioning portion 66 of the probe 60 and the needle tip 4 64 are opposite to the elongated body & and are bent downward and extended on the same plane 'When the probe 6G is fixed to When the charm is 51, the probe 60 has only the buckle portion .514 of the needle holder 51, and the buckle portion ... is equivalent to the maximum β distance of the object to be tested 9 ,, J, and thus, the creation The edge finder 20 is equipped with a ” 乂 助 乂 乂 乂 乂 乂 乂 乂 助 助 助 助 助 助 助 助 助 助 助 助 助 助 乂 乂 乂 乂 乂 乂 乂 乂 乂 乂 乂 ” ” ” ” ” ” ” ” ” ” ” It can be close to the object to be tested 9G without being interfered by the needle holder, thereby obtaining a more accurate detection result. The structure design of the probe 6〇 and the needle holder 51 makes the probe stick Connect, ^ Axis - Personal (4), allow the integrating sphere to be as close as possible to the object 90'. Therefore, the positioning portion of the probe 6〇 is down ^ ^ and is close to the miscellaneous body 62 and the needle tip 64 - plane On the top, ^ stomach ^ better design 'Because' set the positioning part is bent upwards and two must be fixed to fix the structure of the positioning part 'this body == Above the needle - (10) space, and cause the opening of the integrating sphere 1 Z (four) secret _ W turn the county for the inspection of the branch. In addition, please refer to the seventh figure, the seventh figure reveals the edge finder provided. The position portion 66 can also be substantially bent and extended perpendicularly to the elongated body portion 62, that is, the predetermined angle α is equal to 90 degrees; at the same time, the positioning hole 512b of the needle holder 51 is opposite to the body The top surface 512a of 512 is inclined upward and extends rearwardly such that the axial direction L1 of the positioning hole 512b and the normal line L2 of the top surface 512a are approximately equal to an angle β of 1 degree. Similarly, it must be stated that In this embodiment, the angle ρ of the 1 degree is a preferred design. Actually, the angle β is not limited to 1 degree, and the angle β is substantially greater than 0 degrees and less than 45 degrees. In this manner, when the positioning portion 66 of the probe 60 is inserted into the positioning hole 512b, the elongated body portion 62 similarly extends obliquely with respect to the top surface 512a, so that the elongated body portion 62 can be subjected to an external force. The card is elastically bent to the card portion 514, and the same can be achieved as in the first preferred embodiment of the present invention. The function of the device is as follows: in the foregoing embodiments t, the elastic piece 4 is substantially connected between the seat body 30 and the suspension member 50 in a horizontal posture, that is, as shown in the fourth figure and the seventh figure. As shown in the figure, the elastic piece 40 is connected between the base body 30 and the suspension member 5〇 in such a manner that its maximum surface 4 is substantially parallel to the direction of the material 5G. However, as shown in the eighth figure and The third embodiment shown in the ninth preferred embodiment is that the elastic piece 4G can also be substantially in a vertical position between the body 3 and the cantilever member 50; in detail, the elastic piece 4 〇 $ ^ and - the rear surface 42, the upper half of the elastic piece 4 is attached to the front side % of the seat body 3 by the surface 42 , and the lower portion of the elastic material 440 is + The rear surfaces 41, 42 are attached and fixed... the rear end of the needle holder 51 and the rear end of the rear cantilever arm. In other words, the elastic piece M438631 40 is connected to the base body 30 and the suspension arm member 50 such that the largest surface thereof (that is, the front surface 41 or the rear surface 42) is substantially perpendicular to the long axis direction of the suspension member 50. between. Therefore, even if the user presses the probe 6 过 too much to cause the suspension member 5 to swing, the elastic piece 4 不易 is not easily plastically deformed because the direction of the urging force is substantially parallel to the elastic piece. The direction in which the 40 is disposed, that is, the aforementioned urging force generally applies a tensile force to the elastic piece 4〇 instead of a bending force, so that the elastic piece is not easily plastically deformed.
在前述該第三較佳實施例中,該彈性片4〇具有一鎮 空部44 (如第八圖所示)’該鏤空部44係呈長條形且位 於該彈1±片4G之上、下半部之間並對應至該座體與該 後懸臂52之間的空隙24(如第九圖所示),且該鏤;部 料之長軸方向係實質上垂直於該懸臂件5〇之長軸方向; 藉此,在該尋邊器20之導電件84、86斷路時,該彈性片 4〇係於賴” 44左、右側的紐雜產生彈性彎曲變 心’该鏤空部44之設置可適度地降低該雜y 4()的彈性 恢復力 '然而,實際上,該彈性片40亦可不設置該鏤空 部44 ’而使該彈性片4〇之彎曲部位具有較佳之剛性。 在前述該第三較佳實施例中,該懸臂件50之設置方 式並不以該實施例所提供者為限,例如,該針座Μ _ 後懸臂52其中之-可不與該彈性片4〇連接,且該針座 =與該㈣臂52係相互固接或—體連接而可同步擺動。 換舌之’該懸臂件50可以為—具有—彈性片安艘槽之單 -構件,而可供該彈性片4〇以實質上呈垂直之姿能插入 15 M438631 固定即可。值得-提的是,該針座51通常為導電體,以 將電壓傳輸至該探針60,進而傳輸至待測物,當該針座 51與該後懸臂52非一體連接時,該後懸臂52可為絕緣 體,以使該探針60與該導電體86不會間接電性連接;然 而,當該針座51與該後懸臂52 —體成形且為導電體時”,、、 該後懸臂52與該導電體86之間必須設置絕緣構件。、, 值得一提的是,在前述各實施例令,該針座51之定 位孔512b係為一沈頭孔(countersink),其具有一錐狀頭邱 以及一與該錐狀頭部連通之身部;藉由此沉頭孔之設計°, 可讓探針60之定位部66容易被插置入該定位孔, 但該定位孔512b之形狀並不以此為限。另外,該針座51 之卡扣部514不一料具有卡槽514e,亦即,該卡扣部 514用以供探針6〇卡抵之卡抵面不限為呈狐形之槽 壁’只要可供該探針6G之長條狀身部62頂抵而固^ "5J* 〇 綜上所陳,本創作所提供之尋邊器之主要技術特徵在 於利用具有定位孔及卡扣部514的針座51來設置可 彈性變形的探針60 ’使得該探針6〇可受一外力壓抵而彈 性彎曲地卡抵於該卡扣部514,藉以達到快速拆裝探針卯 之功效。可想而知,該針座51可為—點測裝置之任何用 以固定地設置探針6〇的元件,意即,該針座51不一 使用於尋邊器20中。 最後,必須再次說明’本創作於前揭實施例中所揭露 的構成几件’僅為舉例說明,並_來限制本案之範圍, M438631 其他等效元件的替代或變化,亦應為本案之申請專利範圍 所涵蓋。 17 【圖式簡單說明】 第一圖為-種習用之尋邊器的立體組合圖; 第二圖為第—圖所示之尋邊器之側視圖; 第三實關 於一進給單元的立如合圖; 讀…又 ^四圖為第.之局部側視圖,係顯示該尋邊考之一 探針與-針絲相互切岐之祕; ° 之 第五圖為本創辆第—難實關所提供之尋 針座與探針的立體分解圖; w 第^係,於“圖,惟顯示該尋邊器之探針料 *目互卡接©定,且該探針與—制物接觸之態樣; 第七圖為本.創作—第二較佳實施例所提供之尋邊器 側視圖’係顯示該尋邊器之-探針與一針座未相接 定之態樣; 接固 第八圖為本創作-第三較佳實_所提供之尋邊器設 於一進給單元的立體分解圖;以及 又 第九圖為第八圖之局部側視圖,係顯示該尋邊器之一 探針與一針座未相互卡接固定之態樣。 【主要元件符號說明】 [先前技術] 100尋邊器 110座體 120懸臂 122針座 130彈性片 140探針 150可調預力施加器 160導電體 M438631In the foregoing third preferred embodiment, the elastic piece 4 has an empty portion 44 (as shown in the eighth figure). The hollow portion 44 is elongated and located above the elastic 1±4G. Between the lower half and corresponding to the gap 24 between the seat and the rear cantilever 52 (as shown in FIG. 9), and the longitudinal direction of the material is substantially perpendicular to the cantilever member 5 The long axis direction of the crucible; thereby, when the conductive members 84, 86 of the edge finder 20 are disconnected, the elastic piece 4 is tied to the left and right sides of the ray "44" to produce elastic bending and eccentricity. It is provided that the elastic restoring force of the miscellaneous y 4 () can be moderately reduced. However, in actuality, the elastic piece 40 may not have the hollow portion 44' provided so that the bent portion of the elastic piece 4b has a preferable rigidity. In the third preferred embodiment, the manner in which the suspension member 50 is disposed is not limited to the embodiment. For example, the needle holder _ _ the rear cantilever 52 may not be connected to the elastic piece 4 ,. And the needle seat = and the (four) arm 52 are fixedly connected or connected to each other to be synchronously oscillated. The tongue can be replaced by the tongue - the elastic piece is a single-member of the groove, and the elastic piece 4 can be inserted into the 15 M438631 in a substantially vertical position. It is worth mentioning that the needle holder 51 is usually an electric conductor to The probe 60 is transmitted to the probe 60 and then transmitted to the object to be tested. When the hub 51 is not integrally connected with the rear cantilever 52, the rear cantilever 52 can be an insulator to make the probe 60 and the conductor 86 There is no indirect electrical connection; however, when the hub 51 and the rear cantilever 52 are integrally formed and are electrically conductive, an insulating member must be disposed between the rear cantilever 52 and the electrical conductor 86. It is to be noted that, in the foregoing embodiments, the positioning hole 512b of the needle holder 51 is a countersink having a tapered head and a communicating with the tapered head. The positioning portion 66 of the probe 60 can be easily inserted into the positioning hole by the design of the countersink, but the shape of the positioning hole 512b is not limited thereto. In addition, the latching portion 514 of the hub 51 does not have a slot 514e, that is, the latching portion 514 is configured to allow the probe 6 to be abutted against the slotted wall of the fox-shaped groove. As long as the long strip 62 of the probe 6G can be abutted and solidified, the main technical feature of the edge finder provided by the present invention is that the positioning hole and the buckle portion are utilized. The needle holder 51 of the 514 is provided with the elastically deformable probe 60 ′ so that the probe 6 〇 can be pressed against the buckle portion 514 by an external force and elastically bent, thereby achieving the function of quickly disassembling the probe 卯. It is conceivable that the hub 51 can be any component of the spotting device for fixedly arranging the probe 6〇, that is, the hub 51 is not used in the edge finder 20. Finally, it must be stated again that 'the composition of the present invention disclosed in the previous examples' is only an example, and _ to limit the scope of the case, M438631 alternatives or changes to other equivalent components, should also apply for this case Covered by the scope of patents. 17 [Simple description of the diagram] The first picture is a three-dimensional combination diagram of the conventional edge finder; the second picture is the side view of the edge finder shown in the first figure; If the picture is combined; read... and ^ four pictures are the partial side view of the first part, which shows that one of the probes of the edge-finding test and the needle-thread are mutually secretive; ° the fifth picture is the first of the creation - difficult The stereoscopic exploded view of the stylus holder and the probe provided by the real off; w ^, in the figure, only the probe material of the edge finder is fixed, and the probe is The seventh aspect of the present invention is a side view of the edge finder provided by the second preferred embodiment, which shows that the probe of the edge finder is not connected to a needle holder; The eighth figure is the exploded view of the edge-trigger provided by the creation-third preferred embodiment in a feeding unit; and the ninth figure is a partial side view of the eighth figure, showing the seeking One of the probes and one of the needle holders are not fixed to each other. [Main component symbol description] [Prior Art] 100 edge finder 110 base 120 cantilever 122 needle holder 130 140 adjustable prestress probe 150 of applicator 160 conductor sheet M438631
170導電體 [實施例] 10進給單元 20尋邊器 30座體 40彈性片 42後表面(最大表面) 50懸臂件 512本體 512b定位孔 514a向上延伸段 514c卡槽 516開放空間 60探針 622扣接段 66定位部 70預力施加單元 74螺絲 80導電單元 84第一導電件 90待測物 L1軸向 α預定角度 180螺絲 12連接塊 24空隙 32前侧面 41前表面(最大表面) 44鏤空部 51針座 512a頂面 514卡扣部 514b橫向延伸段 514d卡抵面 52後懸臂 62長條狀身部 64針尖部 72螺栓 82絕緣件 86第二導電件 92導電接點 L2法線 β夾角 19170 electrical conductor [Embodiment] 10 feeding unit 20 edge finder 30 base 40 elastic sheet 42 rear surface (maximum surface) 50 cantilever 512 body 512b positioning hole 514a upwardly extending section 514c card slot 516 open space 60 probe 622 Fastening section 66 positioning portion 70 pre-applying force applying unit 74 screw 80 conductive unit 84 first conductive member 90 object to be tested L1 axial direction a predetermined angle 180 screw 12 connecting block 24 gap 32 front side 41 front surface (maximum surface) 44 hollow Part 51 needle seat 512a top surface 514 buckle portion 514b lateral extension 514d card abutment surface 52 rear cantilever 62 strip body 64 needle tip portion 72 bolt 82 insulation member 86 second conductive member 92 conductive contact point L2 normal line β angle 19
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TW101205918U TWM438631U (en) | 2012-03-30 | 2012-03-30 | Probe, probe and probe seat assembly, and edge finder using the same |
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TW101205918U TWM438631U (en) | 2012-03-30 | 2012-03-30 | Probe, probe and probe seat assembly, and edge finder using the same |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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TWI666455B (en) * | 2017-10-02 | 2019-07-21 | 美商弗姆費特比佛頓公司 | Probe systems for testing a device under test |
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Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
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TWI666455B (en) * | 2017-10-02 | 2019-07-21 | 美商弗姆費特比佛頓公司 | Probe systems for testing a device under test |
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