M438630 五、新型說明： 【新型所屬之技術領域】 本創作係與利用探針(probe)檢測諸如發光二極體:等半 導體晶粒性能之點測裝置(pr〇ber)有關，特別是關於一種 點測裝置之尋邊器（edge sensor)。 【先前技術】 點測裝置係為一種利用探針檢測諸如發光二極體等半 φ 導體晶粒性能表現或特性參數之設備。在點測作業進行 時’假使探針針壓(probing force)過大，可能會造成晶粒 表面損傷’亦容易造成探針磨損，而一旦針壓過小，可能 造成探針與晶粒接點接觸不良，進而影響點測結果，因 此，探針針壓之設定、監測與調整，一直都是點測作業進 行時需格外注意之事項。 利用搭載於點測裝置中之尋邊器，可達成確保探針能 確實接觸並施予一定壓抵力量於待測晶粒之接點的目的。 • §青參閱第一圖及第二圖，習用之尋邊器1〇〇包含有-座體 110、一懸臂12〇、一彈性片13〇,以及一設置於該懸臂 U0 —端之探針14〇。該彈性片13〇實質上係以水平的姿 態連接於該座體110與該懸臂120之間，詳而言之，該彈 陡片I30之一端部固接於該座體110底面，該懸臂120之 中段固接於該雜片13()之另—端部底面 。此外，該懸臂 120與雜體UG之間設有—可調預力施加器⑼，以及 一刀別固設於該懸臂12〇及該座體11〇之導電體16〇、 170 ’該二導電體·、17〇受該預力施加_ 15〇施予之預 3 M438630 力作用而保持接觸並電性導通。 下隊j — Ϊ垂直往愎運動之進給機構帶動該尋邊器100 :降或使-承餅_之承載台上升，該探針_可 待測物由上而下地_該待測物，在持續進給之過程中， :旦該待測物施予探針⑽之反作用力克㈣預力時，將 k成該懸臂120擺動且該彈性片13()彈性彎曲變形 該二導電體⑽、17M目互分離而斷路，同時，點測裝置 此旦偵測_二導電體16G、m斷路之訊號則立即停止 則迷進給動作。藉此’該尋邊器⑽不但可雜探針140 與待測物有效麵’且可避統針_對制物所施之針 壓過大而造成待測物或探針14〇損傷。 然而，在裝設探針140或更換探針140時，操作員係 藉由_⑽由上而下地將探針⑽鎖設固定於該懸臂 120之^過私中，由於其施力方向係垂直於該彈性片 130之設置方向’亦即對該彈性片13〇施加—彎曲力量 (bendingf〇rCe) ’相當容易因施力過大而造成該彈性片13〇 塑性彎曲變形，進而影響針壓設紐，而必須進—步更換 該彈性片130。換言之，_之尋邊器之彈性片設置方式 以及探針之蚊方式實有其不足之處，而有待改進。工 【新型内容】 有鑑於上述缺失’本創作之主要目的在於提供—種點 測裝置之尋邊!§，可改善習科邊器之彈性片容易塑性 曲變形之缺點者。 為達成上述目的’本創作所提供之點測裝置之尋邊器 4 座體、一懸臂件，以及一連接於該座體與該懸臂 4間的雜片，鮮邊It之特财於：該彈性片具有-=大表面’且該彈性片係以其最大表面實質上垂直該懸臂 之，轴方向之方式，連接於該座體與㈣臂件之間。 、藉此，虽操作員將螺絲由上而下地鎖設於該懸臂件， 彈性探針固定於該㈣件上時’其施力方向係平行於該 一片之°又置方向，換言之，前述施力係對該彈性片施加 拉伸力量，較可能使該彈性片拉伸變形而非彎曲變形， ^彈陡片之k拉強度遠大於抗彎強度’因此該彈性片不 易口操作員鎖设螺絲之施力過大而塑性變形。 較佳地，前述點測裝置之尋邊器中，該座體具有一前 侧面，娜性片具有—前表面及—後表面該後表面可固 接^該座m側面，誠料可具妹於該座體下方之 1懸臂及-後懸臂，該前懸臂具有—前端及—後端，該 後端係固接於該彈性片之前表面，該前端係用以供一探針 裝設’該後懸臂可與該前懸臂相對固定。 較佳地，前述點測裝置之尋邊器令，該後懸臂之一前 端可固接㈣雜 >；之後表面。或者，該前㈣與該後懸 臂可一體連接。 較佳地，前述點測裝置之尋邊器+，該彈性片可具有 -鏤空部。更㈣’郷性狀齡部可對絲該座體與 該懸臂件之_ ”。最好，該鏤空部之長軸方向係實質 上垂直於該懸臂件之長軸方向。 較佳地，前述點測裝置之尋邊器中，用以供探針裝設 具有—定位切及-卡扣部；而裝設於該前 針具有-長練身部、—連接於該長條狀身部之 向下延伸的触部’以及—連接於該長條狀身部之 f2且向下延伸的定位部；該探針Μ位部係插置於該 定㈣巾’且職針之長錄身料雜彎曲變 η 前_之卡扣部。藉由此探針固定方式的改 ^二吏得探針不需藉助固定螺絲即能_於該前懸臂上， 更可確保前述彈性片不易塑性彎曲變形。 較佳地’前述_裝置之尋邊財，該㈣臂具有一 t由該本體具#1面；蚊位孔係自該本體之頂面向 P伸’而該卡扣部係、銜接於該本體並具有一面向下方之 抵面；該探狀長條料部斜抵於該卡扣部之卡抵 好’财Μ之卡扣部具有_向下相放之卡槽，-遠卡槽之槽娜賴卡扣部之卡抵面。_ 更為穩固地卡抵於該卡扣部。 g ^ =佳地’前賴職置之尋邊斜，該前懸臂之卡扣 I、有-無之本雜接之向 =技伸颇接讀向料段，针抵面躲於i躺 申&之底部。亦即，該卡扣部係形成一勾狀結構，缺 而’該卡扣部之結構並不以此為限。 前述關裝置之尋邊Μ，簡料之定位 =向實質上健直該前Μ本體之頂面，而該探針之 目職長躲身„折—預0度地向下延伸， 且則述預定角度實質上係大於90度且小於135卢。 M438630 或者’前述點測裝置之尋邊器中’該探針之定位部實 質上係相對該長條狀身部垂直彎折地向下延伸，而該前懸 臂之定位孔係相對該祕臂本紅頂面傾斜延伸，且該定 位孔之軸向係與該頂面之-法線相交—大於q度且^於 45度之夾角。藉由以上二種探針之定位部與定位孔之結 構搭配設計’使得探針之定位部插置於該定位孔中時，探M438630 V. New description: [New technology field] This creation is related to the use of probes to detect spotting devices such as light-emitting diodes and other semiconductor grain properties, especially The edge sensor of the spotting device. [Prior Art] The spot measuring device is a device that uses a probe to detect the performance or characteristic parameters of a semi-φ conductor such as a light-emitting diode. When the spotting operation is carried out, if the probe probing force is too large, the surface damage of the crystal may be caused, which may cause the probe to wear. If the needle pressure is too small, the probe may be in poor contact with the die contact. Therefore, the point measurement results are affected. Therefore, the setting, monitoring and adjustment of the probe needle pressure have always been a matter of special attention when performing the point measurement operation. By using the edge finder mounted in the spotting device, it is possible to ensure that the probe can be surely contacted and a certain pressure is applied to the contact of the die to be tested. • §青 Referring to the first and second figures, the conventional edge finder 1〇〇 includes a body 110, a cantilever 12〇, an elastic piece 13〇, and a probe disposed at the end of the cantilever U0. 14〇. The elastic piece 13 is substantially connected between the base 110 and the cantilever 120 in a horizontal posture. In detail, one end of the elastic piece I30 is fixed to the bottom surface of the base 110. The cantilever 120 The middle section is fixed to the other end surface of the chip 13 (). In addition, an adjustable pre-applied force applicator (9) is disposed between the cantilever 120 and the hybrid body UG, and a conductive body 16〇, 170' fixed to the cantilever 12〇 and the base 11〇 ·, 17〇 is pre-stressed by the application of _ 15 〇 pre- 3 M438630 force to maintain contact and electrical conduction. The lower team j — the feed mechanism of the vertical 愎 movement drives the edge finder 100 : the lower or the load bearing _ the carrying platform is raised, the probe _ the object to be tested from top to bottom _ the object to be tested During the continuous feeding process, when the object to be tested is applied to the reaction force (4) of the probe (10), the cantilever 120 is swung and the elastic piece 13() elastically bends and deforms the two conductors (10), The 17M mesh is separated and disconnected. At the same time, the signal measuring device detects the signal of the disconnection of the two conductors 16G and m, and immediately stops the motion. Thereby, the edge finder (10) not only can make the probe 140 and the effective surface of the object to be tested and can avoid damage to the object to be tested or the probe 14 due to excessive needle pressure applied to the workpiece. However, when the probe 140 is installed or the probe 140 is replaced, the operator locks the probe (10) from the top to the bottom by means of _(10), and the direction of the force is vertical. In the direction in which the elastic piece 130 is disposed, that is, the bending force (bendingf〇rCe) is applied to the elastic piece 13 相当, the elastic piece 13 is plastically bent and deformed due to excessive application force, thereby affecting the needle pressing setting. And the elastic piece 130 must be replaced step by step. In other words, the arrangement of the elastic piece of the edge finder and the mosquito method of the probe have their deficiencies, and need to be improved. [New content] In view of the above-mentioned shortcomings, the main purpose of this creation is to provide the search for a kind of measuring device! § It can improve the shortcomings of the elastic sheet of the leg machine. In order to achieve the above object, the edge detector 4 of the spotting device provided by the present invention, a cantilever member, and a chip connected between the seat and the cantilever 4, the special side of the fresh side It: The elastic piece has a -= large surface' and the elastic piece is connected between the seat body and the (four) arm member with its largest surface substantially perpendicular to the cantilever, in the axial direction. Therefore, although the operator locks the screw from the top to the bottom of the cantilever member, when the elastic probe is fixed to the (four) member, the direction of the force applied is parallel to the direction of the piece, and in other words, the foregoing application The force exerts a tensile force on the elastic piece, and it is more likely that the elastic piece is stretched and deformed instead of being bent. The k-stretching strength of the elastic piece is much greater than the bending strength. Therefore, the elastic piece is not easy for the operator to lock the screw. The force applied is too large and plastically deformed. Preferably, in the edge finder of the above-mentioned spot measuring device, the seat body has a front side surface, and the inner piece has a front surface and a rear surface. The rear surface can be fixed to the side of the seat m. a cantilever and a rear cantilever under the seat, the front cantilever has a front end and a rear end, the rear end is fixed to the front surface of the elastic piece, and the front end is used for a probe mounting The rear cantilever can be relatively fixed to the front cantilever. Preferably, the edge finder of the above-mentioned spotting device allows one of the front ends of the rear cantilever to be fixed to the (four) impurity > Alternatively, the front (four) and the rear cantilever can be integrally connected. Preferably, the edge finder of the aforementioned pointing device +, the elastic piece may have a hollow portion. Further, (4) the 'sexual age portion may be opposite to the body of the wire and the cantilever member. Preferably, the long axis direction of the hollow portion is substantially perpendicular to the long axis direction of the suspension member. Preferably, the foregoing point In the edge finder of the measuring device, the probe device is provided with a positioning cutting and a locking portion, and the front needle is provided with a long body portion and a direction connected to the elongated body portion. a lower extending contact portion and a positioning portion connected to the f2 of the elongated body portion and extending downward; the probe clamping portion is inserted into the fixed (four) towel and the long needle of the job needle is mixed The buckle is changed to the front part of the η. By means of the probe fixing method, the probe can be ensured that the elastic piece is not easily plastically bent and deformed without the aid of a fixing screw. Preferably, the 'fourth arm has a t from the body member #1 face; the mosquito bit hole extends from the top surface of the body to the P and the buckle portion is coupled to the body And having a facing surface facing downward; the strip of material of the probe is obliquely offset by the card of the buckle portion, and the buckle portion of the fortune has a downward phase Slot, the card of the far card slot is the opposite of the card of the Naraya buckle. _ The card is more firmly stuck to the buckle. g ^ =Jiadi's front slanting position, the front cantilever The buckle I, the presence/absence of the miscellaneous connection = the technical extension is read to the material section, and the needle abuts the surface to hide at the bottom of the application. That is, the buckle portion forms a hook structure. Lack of 'the structure of the buckle is not limited to this. The edge of the above-mentioned closing device, the positioning of the material = the body of the front body is substantially straightened, and the target of the probe is hiding. „Fold—extends 0 degrees forward, and the predetermined angle is substantially greater than 90 degrees and less than 135 lbs. M438630 or 'the edge detector of the aforementioned spot measuring device', the positioning portion of the probe is substantially downwardly bent perpendicularly to the elongated body, and the positioning hole of the front cantilever is opposite to the secret arm The red top surface extends obliquely, and the axial direction of the positioning hole intersects with the normal of the top surface - greater than q degrees and at an angle of 45 degrees. By locating the positioning portion of the above two kinds of probes with the structure of the positioning holes, when the positioning portion of the probe is inserted into the positioning hole,
針的長條狀身部可相對該針座本體之頂面傾斜地向上延 伸，俾使該長錄料在受—外力壓抵之後，可以向下塑 性彎曲變形而卡抵於該卡扣部，域由其雜回復力而定 位。 有關本創作所提供之點測裝置之尋邊器的詳細構造、 特點、組裝或使財式’將於後續的實施方式詳細說明中 nr然而，在本創作領域中具有通常知識者應能瞭The long strip-shaped body of the needle can extend obliquely upward with respect to the top surface of the needle seat body, so that the long recording material can be plastically bent downward and deformed to be pressed against the buckle portion after being pressed by the external force. Positioned by its heterogeneous force. The detailed construction, characteristics, assembly or making of the edge finder of the spotting device provided by this creation will be described in the detailed description of the subsequent embodiments. However, those who have the usual knowledge in the field of creation should be able to
本創作所列舉的特定實施例， ^圍係用於說明本創作’並_以限制本創作之專利申請範 【實施方式】 ^下將藉由所列舉之實施例配合隨附之圖式，詳細 明本創作之技術内容及特徵，其中： 、、° 置 之，ϊ 本卿—第—錄實施靖提供之點測裝 哥、盗設於該點測裝置之一進給單元的立體組合圖； 置 2圖為本創作該第—較佳實施例所提供之 之哥邊器與該進給單元的立體分解圖； 第五圖及第六圖為本創作該第一較佳實施例所提供之 7 點測裝置之尋邊器作用於一待測物之側視圖； 4第七圖為本創作—第二較佳實施例所提供之點測裝置 之寻邊器之側視圖，係顯示該尋邊器之一探針縣 未相互卡接固定之態樣； 4第八圖為本創作該第二較佳實施例所提供之點測裝置 之尋邊器之前懸臂與探針的立體分解圖； ㈣f九圖係類同於第七圖，惟顯示該尋邊11之探針與前 懸臂相互卡接固定之態樣；以及 十圖為本:作帛二較佳實施例所提供之點 態r該尋邊器之-探針與-_ 二圖’本創作一第一較佳實施例所 元2。帶動而可㈣向移動置:-進給單 星分m Α ㈣而碰其位置。由於該進給 早疋2〇係為-般自動化機械中常見、可沿χ、 軸線性往復位移之三軸位蒋 〇 ^ 一 此其詳細結構容申駄在此不4:?= 1〇 2°储由麵進給單元 對—待測物90 (如第五m抓-、 下降或上升以點觸或離開該待_ 9〇之第五圖不) =待測物9。之待性檢測作業。然二二 ”邊器2°亦可不搭配前述進給單元Π)而主：Γ供 :搭配-承載台㈣未示)作被動進給，亦即 用以承栽待測物90且可作γ 系藉由 作X、Y、Z三轴方向線性位移以 M438630 及Θ方向（繞z轴方向）㈣ 作，使^9GWiS2㈣探升觸或下降動 "亥寸邊态10包含有—座體3〇、— ” 件50、一探針6〇、 f生片40、一懸臂 80。 ㈣及-導電單元 該座體30係固設於該進給單元2 部’藉此’該賴3G可受該進給單元—|塊2^ X、Y及Z軸方向往復位移。 之驅動而沿者 該彈性片40係由金屬 前表…-後表面42,該雜片：= 二螺絲U鎖固於該座體3〇，使得該彈性片上:部係藉由 42貼接固定於該座體3〇之一前側面32。 之後表面 該懸臂件5G包含有位於該座體％ ▲ 51及-後懸臂52,該前、後懸臂51、5 U鎖固於該彈性片4〇下半部，使得該前懸臂螺絲 端512貼接固定於該彈性片4()之前表面41，且 ^ 52之-前端522貼接固定於該彈性片4〇之後表面^換 言之’該彈性片40係以其最大表面（亦即該前表 = 該後表面42)實質上垂直該財件％之長輪方= 式，連接於該座體30與該懸臂件5〇之間。1欠 絲12之轴向實質上係平行該彈性片40之最;;表面。_ 該探針6G係藉由—螺絲13固設於該前懸臂 一 前端514。 該預力施加單元70包含有一穿設於該座體％之螺检 9 72二及穿δ又於該後懸臂52之金屬螺絲μ，該螺检72 底部设有—與該螺絲74相對之磁鐵（圖中未示），藉由改 變該螺栓72 __ 74之距離，可調整其相互吸引之磁 吸力’進而調整其馳予該懸臂件50之預力。 該導電單兀80包含有1設於座體3〇底部之絕緣件 道雷=及分·設_味件82及該㈣臂52之-第- 万接觸84及帛一導電件86 ’該二導電件84、86係相 互接觸而電性導通。 ιτ^ 該尋邊II 1G制目對—_㈣ =待測㈣之導電接點92 (如第五下= 持續進給之過程中，一旦 牡 用力克服該預力施加單^ 施予探針60之反作 示），該懸臂件50連同該探針^之預力時（如第六圖所 而擺動，此時，該彈性^相將以該彈性片仙為支點 體％係相互分離:係彈㈣曲變形’該二導電 裝置停止前親給動作。—―斷路訊號’以利點測 藉此，該尋邊器10 之導電接點92有效接觸，：:::探針60與待測物90 果，該尋邊器10還可避免_ 、接觸不良影響點測結 壓(probing f0rce)過大而造二對待測物90所施之針 更重要的是，當操作員將該成^ 前懸臂51以固定該探針6〇 、由上而下地鎖設於該 性片40之設置方向，換言之，’二、施力方向係平行於該彈 施加-拉伸力量，較可能使別述施力係對該彈性片40 月匕使该彈性片40拉伸變形而非彎 曲變形。然而，就該薄片型彈性片40而言，該彈性片40 。抗拉強度遠大於其彳几―強度因此該彈性片不易因 操作員鎖設螺絲13之施力過大而塑性變形。 在本實施例中，該彈性片4〇具有—鎮空部44 (如第 四圖所不），且該鏤空部44係呈長條形且位於該彈性片 40之上、下半部之間並賴至該座體與該後懸臂％ 之間的空隙14 (如第五圖所示），且該鏤空部44之長軸 方向係實質上垂直於該懸臂件5〇之長轴方向；藉此在 该尋邊器10之導電件84、86斷路時，該彈性片4〇係於 忒鏤空部44左、右侧的條狀部位產生彈性彎曲變形，換 5之，该鏤空部44之設置可適度地降低該彈性片4〇的彈 性恢復力。然而，實際上，該彈性片4〇亦可不設置該鏤 空部44，而使該彈性片4〇之彎曲部位具有較佳之剛性。 值得一提的是’該懸臂件5〇之設置方式並不以前述 實施例所提供者為限，例如，該前、後懸臂51、52其中 之一可不與該彈性片40連接，且該前、後懸臂51、52係 固接或一體連接而可同步擺動。換言之，該懸臂件5〇可 以為一具有一彈性片安裝槽之單一構件，而可供該彈性片 40以實質上呈垂直之姿態插入固定即可。值得一提的 是’該前懸臂51通常為導電體，以將電壓傳輸至該探針 60，進而傳輸至待測物，當前、後懸臂51、52非一體連 接時，該後懸臂52可為絕緣體，以使該探針60與該導電 體86不會間接電性連接；然而，當前、後懸臂51、52 一 體成形且為導電體時，該後懸臂52與該導電體86之間必 M438630 須設置絕緣構件。 此外’上述實施例中所揭露之預力施加單元7〇係以 磁性吸引力來達成可調預力之目的，然而，前述預力施加 單元70之結構並不以此為限，例如，可以磁性斥力或以 彈簧之彈性力來達成可調預力之目的。換言之，現行已知 各種型態之預力施加單元皆可應用於本創作之尋邊器中， 而且，由於前述各種型態之預力施加單元的結構，係屬所 屬技術領域中具有通常知識者所熟知，並可見於諸如中華 民國第M345241號及第M382589號等專利中，且並非本鲁 創作據以請求專利之技術特徵所在，因此，申請人在此不 予贅述。 如第三圖至第六圖所示，前述該第一較佳實施例中， 雜針60係藉由-螺絲固定於該前懸f 51上。然而，如 第七圖至第十_示之本創作__第二較佳實施例及一第三 較佳實施例，聰針6〇亦可#由卡接之方式固定於該前 懸臂51上。The specific embodiments listed in the present application are used to illustrate the present invention and are intended to limit the patent application of the present invention. [Embodiment] The embodiments will be accompanied by the accompanying drawings. The technical content and characteristics of Mingben's creation, including: , , °, and ϊ 卿 — — 第 第 第 第 — — 靖 靖 靖 靖 靖 靖 靖 靖 靖 靖 靖 靖 靖 靖 靖 靖 靖 靖 靖 靖 靖 靖 靖 靖 靖 靖 靖 靖 靖 靖2 is an exploded perspective view of the edge device and the feed unit provided by the first preferred embodiment; the fifth and sixth figures are provided for creating the first preferred embodiment 7 The side finder of the spotting device acts on a side view of the object to be tested; 4th is a side view of the edge finder of the spotting device provided by the second preferred embodiment, showing the finder One of the edge detectors is not fixed to each other; 4 is an exploded perspective view of the cantilever and the probe before the edge finder of the spotting device provided by the second preferred embodiment; (4) The f-picture is similar to the seventh picture, except that the probe of the edge 11 is shown with the front cantilever The state of the card is fixed; and the ten figure is: the dot state provided by the second preferred embodiment, the probe of the edge finder, and the image of the second edge of the present invention. Yuan 2. It can be moved (4) to move: - Feed a single star to m Α (4) and touch its position. Because the feed is early, the two axes are common in the general automation machinery, and the three-axis position of the axis can be reciprocated along the axis, and the detailed structure of the machine is not 4:?= 1〇2 ° Store by the surface feed unit pair - the object to be tested 90 (such as the fifth m grab -, drop or rise to touch or leave the fifth map of the wait _ 9 不) = object to be tested 9. Waiting for testing. However, the 2nd and 2nd edge devices can also be used for passive feeding, which is used to carry the object to be tested 90 and can be used as γ. The linear displacement of the three directions of X, Y, and Z is performed in the M438630 and the Θ direction (around the z-axis direction) (4), so that the ^9GWiS2(4) probes up or downs and the "edge" 10 includes the body 3 〇, — ” 50, a probe 6〇, f green sheet 40, a cantilever 80. (4) and - Conductive unit The base body 30 is fixed to the feeding unit 2 portion. By this, the Lai 3G can be reciprocally displaced by the feeding unit -|block 2^X, Y and Z-axis directions. The elastic piece 40 is driven by the metal front surface ... - the rear surface 42, the chip: = two screws U are locked to the base body 3, so that the elastic piece: the part is fixed by the 42 joint On one of the front sides 32 of the seat body 3. After the surface, the suspension member 5G includes the base body ▲ 51 and the rear cantilever arm 52. The front and rear cantilever arms 51, 5 U are locked to the lower half of the elastic piece 4, so that the front cantilever screw end 512 is attached. Attached to the front surface 41 of the elastic piece 4 (), and the front end 522 of the 52 is attached and fixed to the surface of the elastic piece 4, in other words, the elastic piece 40 is the largest surface thereof (that is, the front table = The rear surface 42) is substantially perpendicular to the long wheel of the piece of money, and is coupled between the base 30 and the cantilever member 5''. 1 The axial direction of the underwire 12 is substantially parallel to the most of the elastic sheet 40; The probe 6G is fixed to the front end 514 of the front cantilever by means of a screw 13. The pre-applied applying unit 70 includes a metal screw μ that is threaded through the body and has a metal screw μ that is worn by the rear cantilever 52. The bottom of the screw 72 is provided with a magnet opposite to the screw 74. (not shown), by changing the distance of the bolts 72__74, the magnetic attraction of each other can be adjusted to adjust the pre-force of the suspension member 50. The conductive unit 80 includes an insulating member disposed on the bottom of the base member 3, and a branching member 82 and a (four) arm 52-to-thousand contact 84 and a first conductive member 86' The conductive members 84, 86 are electrically connected to each other in contact with each other. Ιτ^ The edge-finding II 1G heading pair—_(4) = the conductive joint 92 to be tested (4) (as in the fifth lower = continuous feeding process, once the force is applied to overcome the pre-force application) In other words, the suspension member 50 is oscillated together with the pre-force of the probe (as shown in the sixth figure. At this time, the elastic phase will be separated from each other by the elastic piece as a fulcrum body: (4) The deformation of the song is performed before the stop of the two conductive devices. The break signal is taken to facilitate the measurement, whereby the conductive contacts 92 of the edge finder 10 are in effective contact, :::: probe 60 and the object to be tested 90, the edge finder 10 can also avoid _, the contact bad effect of the probing f0rce is too large and the second measuring object 90 is applied to the needle. More importantly, when the operator turns the front cantilever 51 is fixed to the probe 6 〇, locked from top to bottom in the direction of the setting of the sheet 40, in other words, 'two, the direction of the force is parallel to the force of the application - stretching force, it is more likely to force The elastic sheet 40 is stretched and deformed by the elastic sheet 40 without bending deformation. However, in the sheet type elastic sheet 40, the elasticity The sheet 40. The tensile strength is much larger than the strength of the crucible. Therefore, the elastic sheet is not easily plastically deformed due to the excessive force applied by the operator lock screw 13. In the embodiment, the elastic sheet 4 has an inner portion 44. (as in the fourth figure), and the hollow portion 44 is elongated and located between the upper and lower portions of the elastic piece 40 and depends on the gap 14 between the seat body and the rear cantilever arm ( As shown in the fifth figure, the long axis direction of the hollow portion 44 is substantially perpendicular to the long axis direction of the suspension member 5; thereby, when the conductive members 84, 86 of the edge finder 10 are open, The elastic piece 4 is elastically bent and deformed at the strip-shaped portion on the left and right sides of the hollow portion 44. In other words, the provision of the hollow portion 44 can moderately reduce the elastic restoring force of the elastic piece 4〇. However, the actual In addition, the elastic piece 4〇 may not be provided with the hollow portion 44, so that the curved portion of the elastic piece 4〇 has better rigidity. It is worth mentioning that the arrangement of the cantilever member 5〇 is not in the foregoing embodiment. The present invention is limited to, for example, one of the front and rear cantilevers 51, 52 may not be associated with the elastic piece 4. 0 is connected, and the front and rear cantilevers 51, 52 are fixedly connected or integrally connected to be synchronously oscillated. In other words, the cantilever member 5 can be a single member having an elastic piece mounting groove, and the elastic piece 40 can be used. It can be inserted and fixed in a substantially vertical posture. It is worth mentioning that 'the front cantilever 51 is usually an electrical conductor to transmit voltage to the probe 60, and then to the object to be tested, the current and rear cantilever 51, When the 52 is not integrally connected, the rear cantilever 52 can be an insulator so that the probe 60 and the electrical conductor 86 are not electrically connected indirectly; however, when the front and rear cantilevers 51, 52 are integrally formed and are electrical conductors, An insulating member must be provided between the rear cantilever 52 and the conductor 86. In addition, the pre-force applying unit 7 disclosed in the above embodiments achieves the purpose of adjusting the pre-force by magnetic attraction. However, the structure of the pre-applying force applying unit 70 is not limited thereto, for example, it can be magnetic. Repulsive force or the elastic force of the spring to achieve the purpose of adjustable pre-force. In other words, various types of pre-force applying units of various types are known to be applicable to the edge finder of the present invention, and the structure of the pre-force applying unit of the various types described above is generally known in the art. It is well known and can be found in patents such as Republic of China No. M345241 and No. M382589, and is not the technical feature of Benru's creation of patents. Therefore, the applicant will not repeat them here. As shown in the third to sixth figures, in the first preferred embodiment, the needle 60 is fixed to the front suspension f 51 by screws. However, as shown in the seventh to tenth embodiments, the second preferred embodiment and the third preferred embodiment, the Clamp 6 can also be attached to the front cantilever 51 by snapping. .
詳而言之’如第七圖至第九圖所示，本創作之第二 佳實施射，該前懸f 51具有—本體516，以及一體 ，接於該本體加之卡扣部518。該本體516具有一頂 ，’以及一自該頂面516a向下延伸之定位孔516b，〗 =立孔516b的軸向u實質上係垂直該頂面％。該 =518具有—與該本體516銜接之向上延伸段池 2一與該向上延伸段偷銜接之橫向延伸段獅… 、°延伸段鳩之底部具有一向下方開放之卡槽偷 該卡槽518e之槽壁形成—面向下方之卡抵面测，且其 下方形成一開放空間519。 另外，在該第二較佳實施例中，該探針6〇具有一長 條狀身部62、一連接於該長條狀身部62之—端且向下延 伸的針尖部64，以及一連接於該長條狀身部62之另一端 且向下延伸狀位部66 ’該^位部66係相對該長條狀身 :62奇折-預定角度α地向下延伸，且該預定角度以實 質上係大於90度（在此實施例中該預定角度α係為削 度），而且’該長條狀身部62、針尖部64以及定位部的 實質上係位於同一平面上。 >該探針60設置於該前懸臂51之方式，係先以該定位 部66如第七圖所示地插置於該定位孔5说中，此時，由 於遠定位孔516b之軸向係垂直該前懸臂51本體516之頂 面516a，而该探針60定位部66與該長條狀身部62之夾 角α係為大於90度之鈍角，因此，在探針60之定位部 4插入及定位孔516b之後，該長條狀身部62會自然相 =頂面516a傾斜地向上延伸，此外，藉由該長條狀身 之長度設計加上錢肖度配合祕，此時該長條狀 ^ P 62之一接近該針尖部64的扣接段622將高於該卡扣 P 518 (實際上’只要該扣接段622之高度高於卡抵面 518d之高度即可）°然後，使用者可以施以-外力壓抵該 探，60之長條狀身部62，以使該長條狀身部向下彈 $聲曲㈣’並使得其扣接段622先被壓抵到該開放空間 進而卡抵於該前懸臂51之卡扣部518的卡抵面 13 M438630 518d，如此一來，藉由該探針6〇本身之彈性回復力量， 該探針60與該前懸臂51即如第九圖所示地相互固定。當 使用者要將該探針60拆卸下來時，只要再次壓抵該探針 60而使該長條狀身部62脫離該卡扣部，即可解除該 探針60與該前懸臂51之固接關，進而將該探針6〇自 該前懸臂51取下。 值知一提的是，在上述實施例♦，為了避免該探針 60在前述安裝及拆卸過程中過度彎曲而塑性變形，以及 為了能使該探針60保有適當的彈性回復力而卡抵定位於鲁 該卡扣部518，該預定角度α係較佳之設計一1〇〇度為 例，然而，該預定角度α並不以等於1〇〇度為限，例如， 其可以為95度、105度等等。實際上，該預定角度α之 設定，只要能使該長條狀身部62能適當地傾斜向上延伸 即可，然而，考慮到安裝的容易度、塑性變形的可能性以 及現有探針的材料特性、直徑與該長條狀身部的長度等參 數，該預定角度α之設定，實質上以大於9〇度且小於 135度為宜。 、· 由於該探針60不須藉由螺絲固定，使用者除了可快 速地拆卸及安裝探針60之外，更加可確保前述彈性片4〇 不易塑性彎曲變形。 此外，請再參閱第十圖，第十圖揭露有本創作一第三 較佳實施例所提供之尋邊器。如第十圖所示，前述藉由卡 接方式而相互固定的探針60與前懸臂51中，該探胃針 之定位部66亦可實質上相對該長條狀身部62垂直彎折地 向下延伸，亦即前述該預定角度α等於90度；同時，該 刖懸臂51之定位孔516b係相對該本體516之頂面516a 傾斜延伸’且該定位孔516b之軸向L1係與該頂面516a 之一法線L2相交一約略等於10度之夾角β。同樣必須說 明的是，在此實施例中，該1〇度之夾角ρ係為—較佳之 6又计，實際上，該夾角β不以等於1〇度為限，該夾角ρ 實貝上以大於0度且小於45度為宜。如此，該探針62之In detail, as shown in the seventh to ninth drawings, in the second preferred embodiment of the present invention, the front suspension f 51 has a body 516, and is integrally connected to the body and the buckle portion 518. The body 516 has a top, and a positioning hole 516b extending downward from the top surface 516a. The axial direction u of the vertical hole 516b is substantially perpendicular to the top surface %. The 518 has an upwardly extending section 2 that is coupled to the body 516, and a laterally extending section of the lion that is in contact with the upwardly extending section. The bottom of the extension section has a card slot that is open downward to steal the card slot 518e. The groove wall is formed—the downward facing card is abutted against the surface, and an open space 519 is formed below it. In addition, in the second preferred embodiment, the probe 6 has an elongated body 62, a tip portion 64 connected to the end of the elongated body 62 and extending downward, and a needle Attached to the other end of the elongated body 62 and extending downwardly from the position 66', the position 66 is extended downward relative to the elongated body: 62 odd-predetermined angle α, and the predetermined angle It is substantially greater than 90 degrees (in this embodiment, the predetermined angle α is a taper), and the 'elastic body portion 62, the needle tip portion 64, and the positioning portion are substantially in the same plane. > The manner in which the probe 60 is disposed on the front cantilever 51 is first inserted into the positioning hole 5 by the positioning portion 66 as shown in the seventh figure. At this time, due to the axial direction of the distal positioning hole 516b The top surface 516a of the front body 51 is perpendicular to the top surface 516a of the front cantilever 51, and the angle α between the positioning portion 66 of the probe 60 and the elongated body 62 is an obtuse angle greater than 90 degrees. Therefore, the positioning portion 4 of the probe 60 is After the insertion and positioning of the hole 516b, the elongated body 62 will extend obliquely upwardly from the top surface 516a. In addition, the length of the long body is added to the length of the long body. One of the fingers 62 is closer to the buckle portion 622 of the needle tip portion 64 than the buckle P 518 (actually as long as the height of the fastening portion 622 is higher than the height of the card abutment surface 518d). The user can apply an external force to the elongate body 60 of the probe 60 so that the elongate body bounces downwards (sound) (4) and causes the fastening section 622 to be pressed first. The open space is further engaged with the latching surface 13 M438630 518d of the latching portion 518 of the front cantilever 51, such that the elastic restoring force of the probe 6 itself is utilized. , The probe 60 to the front as shown by the boom 51 that is fixed to each of the ninth FIG. When the user removes the probe 60, the probe 60 and the front cantilever 51 can be released by pressing the probe 60 again to disengage the elongated body 62 from the buckle. After the switch is closed, the probe 6 is removed from the front cantilever 51. It is to be noted that, in the above embodiment ♦, in order to prevent the probe 60 from being excessively bent during the aforementioned mounting and disassembling, plastic deformation, and in order to enable the probe 60 to maintain an appropriate elastic restoring force, the card is positioned. For example, the predetermined angle α is preferably a design of one degree. However, the predetermined angle α is not limited to 1 degree, for example, it may be 95 degrees, 105 degrees. Degree and so on. Actually, the predetermined angle α is set as long as the elongated body portion 62 can be appropriately tilted and extended upward, however, considering the ease of installation, the possibility of plastic deformation, and the material properties of the existing probe. The diameter and the length of the elongated body are such that the predetermined angle α is set to be substantially greater than 9 degrees and less than 135 degrees. Since the probe 60 does not need to be fixed by screws, the user can ensure that the elastic piece 4 is less susceptible to plastic bending and deformation in addition to the quick disassembly and mounting of the probe 60. In addition, please refer to the tenth figure, which shows an edge finder provided by a third preferred embodiment of the present invention. As shown in FIG. 10, in the probe 60 and the front cantilever 51 which are fixed to each other by the snap-on method, the positioning portion 66 of the probe can also be substantially bent perpendicularly to the elongated body 62. Extending downwardly, that is, the predetermined angle α is equal to 90 degrees; at the same time, the positioning hole 516b of the cymbal cantilever 51 extends obliquely with respect to the top surface 516a of the body 516 and the axial direction L1 of the positioning hole 516b is coupled with the top One of the faces 516a, the normal L2, intersects an angle β which is approximately equal to 10 degrees. It should also be noted that, in this embodiment, the angle ρ of the 1 degree is -6, and in fact, the angle β is not limited to 1 degree, and the angle ρ is More than 0 degrees and less than 45 degrees is preferred. So, the probe 62
定位部66插置於該定位孔516b中時，該長條狀身部Q 同樣地會相對該頂面516a呈傾斜延伸，使得該長條狀身 部62可受外力作用而彈性彎曲地卡抵於該卡扣部518’ 而同樣可以達成如本創作第二較佳實施例所提供之尋邊 的功皞。 ° 值得-提的是，在前述第二及第三較佳實施例中，該 前懸臂51之卡扣部518不—定要具有卡槽通，亦即广 該卡扣部518用以供探針6〇卡抵之卡抵面不限為呈 弧形之槽壁’只要可供該探針6〇之長條狀身部62頂抿而 综上所陳，本創作所提供之點測裝置之尋邊器ι〇之 主要技術魏’在於_-薄型雜片4()來連接該 3〇與該懸臂件5〇 ’且該彈性片4〇係以其最大表面實 懸臂件5〇之長軸方向之方式連接於該座體3 之間，藉以克服習用以水平姿態設 t易因裝設探針之過當施力崎成彎__形的問題。 其次’翔作更提供-财跡鎖設方式而 固定探針的卡扣式齡㈣定結構，叫可快速地拆卸及安 裝探針60。 最後’必須再次說明’本創作於前揭實施例中所揭露 的構成元件，僅為舉例說明，並非用來限制本案之範圍， 其他等效元件的替代或變化’亦應為本案之申請專利範圍 所涵蓋^ 【圖式簡單說明】 第一圖為習用之點測裝置之尋邊器的立體組合圖； 第二圖為該尋邊器之側視圖； 第二圖為本創作一較佳實施例所提供之點測裝置之尋 邊器設於該點測裝置之一進給單元的立體組合圖； 第四圖為本創作該較佳實施例所提供之點測裝置之尋 邊器與該進給單元的立體分解圖； 第五圖及第六圖為本創作該較佳實施例所提供之點測 裝置之哥邊器作用於一待測物之側視圖 4第七圖為本創作一第二較佳實施例所提供之點測裝置 之尋邊器之側視圖，係顯示該尋邊器之_探針與—前懸臂 未相互卡接固定之態樣； 〜 4第八圖為本創作該第二較佳實施例所提供之點測裝置 之尋邊器之前㈣與探針的立體分解圖； 第九圖係類同於第七圖，惟顯示該尋邊器之探針與 懸#相互卡接固定之態樣；以及 e第:圖為本創作—第三較佳實施例所提供之點測裝置 之哥邊S之側視圖’軸*料邊器之—探 未相互卡翻 【主要元件符號說明】 [先前技術] 100尋邊器 120懸臂 140探針 110座體 130彈性片 150可調預力施加器 M438630 160導電體 180螺絲 [實施例] 10尋邊器 12螺絲 14空隙 20進給單元 30座體 40彈性片 42後表面 50懸臂件 512後端 516本體 516b定位孔 518a向上延伸段 518c卡槽 519開放空間 L2法線 52後懸臂 60探針 622扣接段 66定位部 70預力施加單元 74螺絲 170導電體 11螺絲 13螺絲 22連接塊 32前側面 41前表面 44鐘空部 51前懸臂 514前端 516a頂面 518卡扣部 518b橫向延伸段 518d卡抵面 L1轴向 β夾角 522前端 62長條狀身部 64針尖部 α預定角度 72螺栓 M438630 80導電單元 84第一導電件 90待測物 82絕緣件 86第二導電件 92導電接點When the positioning portion 66 is inserted into the positioning hole 516b, the elongated body portion Q will also extend obliquely with respect to the top surface 516a, so that the elongated body portion 62 can be flexibly bent by an external force. The function of edge finding as provided in the second preferred embodiment of the present invention can also be achieved in the latching portion 518'. It is worth mentioning that, in the foregoing second and third preferred embodiments, the latching portion 518 of the front cantilever 51 does not have a card slot, that is, the latch portion 518 is used for detecting The needle 6 〇 抵 抵 抵 不限 不限 不限 不限 不限 不限 不限 不限 不限 不限 不限 不限 不限 不限 不限 不限 抵 只要 只要 只要 点 点 点 点 点 点 点 点 点 点 点 点 点 点 点 点 点 点 点 点 点 点The main technique of the edge finder 〇 在于 在于 薄 薄 薄 薄 薄 薄 薄 薄 薄 薄 薄 薄 薄 薄 薄 薄 薄 薄 薄 薄 薄 薄 薄 薄 薄 薄 薄 薄 薄 薄 薄 薄 薄 薄 薄 薄 薄 薄 薄 薄 薄 薄 薄 薄 薄 薄The axial direction is connected between the bases 3, thereby overcoming the problem that the conventional horizontal posture is set to be easy to install due to the application of the probe. Secondly, 'Xiang Zuo provides more-------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------------- Finally, 'there must be a re-explanation' of the constituent elements disclosed in the foregoing embodiments, which are merely illustrative and are not intended to limit the scope of the present invention. The alternative or variation of other equivalent elements shall also be the scope of patent application for this case. Covered ^ [Simple description of the drawing] The first figure is a three-dimensional combination diagram of the edge finder of the conventional spot measuring device; the second figure is a side view of the edge finder; The second figure is a preferred embodiment of the creation The finder of the provided measuring device is provided in a stereo combination diagram of a feeding unit of the measuring device; the fourth figure is the edge finder of the pointing device provided by the preferred embodiment and the An exploded view of the unit; the fifth and sixth figures are the side view of the device for the object to be tested, which is provided by the preferred embodiment of the present invention. The side view of the edge finder of the spotting device provided by the second preferred embodiment shows that the probe and the front cantilever of the edge finder are not fixed to each other; Searching for the spotting device provided by the second preferred embodiment Before the edge device (4) and the stereoscopic exploded view of the probe; the ninth figure is similar to the seventh figure, but shows that the probe of the edge finder and the suspension # are fixed to each other; and e: the figure is Creation - The side view of the side S of the spotting device provided by the third preferred embodiment is 'axis* edger' - the same is not mutually flipped [main component symbol description] [Prior Art] 100 edge finder 120 cantilever 140 probe 110 seat body 130 elastic piece 150 adjustable pre-applied force applicator M438630 160 electric conductor 180 screw [Embodiment] 10 edge finder 12 screw 14 gap 20 feed unit 30 seat body 40 elastic piece 42 rear surface 50 cantilever piece 512 rear end 516 body 516b positioning hole 518a upward extension section 518c card slot 519 open space L2 normal line 52 rear cantilever arm 60 probe 622 fastening section 66 positioning portion 70 pre-applying force unit 74 screw 170 conductor 11 screw 13 screw 22 connection Block 32 front side 41 front surface 44 clock portion 51 front cantilever 514 front end 516a top surface 518 buckle portion 518b lateral extension 518d card abutment surface L1 axial direction angle 522 front end 62 elongated body portion 64 needle tip portion α predetermined angle 72 bolt M438630 80 conductive unit 84 first conductive member 90 to be Measuring object 82 insulating member 86 second conductive member 92 conductive contact
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