CN215953691U - Probe module for point measurement equipment - Google Patents
Probe module for point measurement equipment Download PDFInfo
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- CN215953691U CN215953691U CN202122314975.XU CN202122314975U CN215953691U CN 215953691 U CN215953691 U CN 215953691U CN 202122314975 U CN202122314975 U CN 202122314975U CN 215953691 U CN215953691 U CN 215953691U
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Abstract
The application relates to a probe module for point measurement equipment, which comprises a mounting rack and a probe assembly, wherein an elastic assembly is arranged between the mounting rack and the probe assembly; the probe assembly has normal position and butt position for the mounting bracket, the probe assembly can move to the butt position from the normal position because of the atress, elastic component can make the probe assembly that does not receive the force move to the normal position from the butt position. The method and the device have the effect of improving the stability and accuracy of the test data of the point testing equipment.
Description
Technical Field
The application relates to the field of semiconductor detection, in particular to a probe module for point measurement equipment.
Background
At present, a chip point testing machine is an indispensable process in a semiconductor manufacturing process, in recent years, with the rapid development of photoelectric and semiconductor industries, the demand for high-integration and high-performance semiconductor chips is increasing, hundreds of chips can be simultaneously manufactured in the chip mass production, and then the photoelectric performance test after the chip wafer is cut is carried out through the point testing machine.
Before the chip is electrified and detected by using point detection equipment, the chip is required to be orderly paved on a preset supporting table, the supporting table is driven to be close to the probe, and the chip is electrified and detected after being contacted with the probe, so that the electrical parameters of the chip are detected; after the chip is inspected, the operator determines whether the chip is sufficiently contacted with the probe according to the pin mark on the chip, and generally, the size of the pin mark is about 1/4 of the electrode.
In view of the above-mentioned related art, the inventor believes that, when the optoelectronic performance of the chip is tested, the chip is driven by the tray to move towards the probe, if the contact force at the moment of the contact between the chip and the probe is too large, the pin mark is too large or the chip is crushed, and if the contact force at the moment of the contact between the chip and the probe is too small, the pin mark is not present or the contact is poor; therefore, the stability and accuracy of the test data of the point test equipment are low.
SUMMERY OF THE UTILITY MODEL
In order to improve the stability and the accuracy of the test data of the point testing equipment, the application provides a probe module for the point testing equipment.
The application provides a probe module for some survey equipment adopts following technical scheme:
a probe module for point measurement equipment comprises a mounting frame and a probe assembly, wherein an elastic assembly is arranged between the mounting frame and the probe assembly; the probe assembly has normal position and butt position for the mounting bracket, the probe assembly can move to the butt position from the normal position because of the atress, elastic component can make the probe assembly that does not receive the force move to the normal position from the butt position.
By adopting the technical scheme, when the probe assembly is in a normal position, the elastic assembly does not deform, and when the tray table moves the signal input end of the chip to be detected to be abutted against the probe assembly, the probe assembly is stressed to force the elastic assembly to deform, so that the probe assembly is elastically abutted against the chip to be detected; therefore, chip crush damage caused when the chip is subjected to power-on detection by using a probe is reduced, and a needle mark with a proper size on the chip is kept, so that the stability and the accuracy of test data of the point test equipment are improved.
Optionally, the probe assembly includes a probe fastener and a probe body disposed at one end of the probe fastener; one end of the probe body, which is far away from the probe fastener, is a detection end, and the other end of the probe body is an electric connection end; the electric connection end of the probe body can be electrically connected with a control system of the point measurement equipment; the detection end of the probe body can be in position measuring contact with the point of the chip.
By adopting the technical scheme, after the control system of the point measurement equipment supplies power to the probe body, the detection end of the probe body is abutted against the point measurement position of the chip, and the chip is electrified, so that the photoelectric performance of the chip is conveniently detected.
Optionally, the elastic component comprises an elastic sheet; one end of the elastic piece is connected with the mounting frame, and the other end of the elastic piece is connected with the probe assembly; when the probe assembly is in a normal position, the elastic sheet is in a natural state; when the probe assembly is in the abutting position, the elastic sheet is in an elastic deformation state.
Through adopting above-mentioned technical scheme, set up the flexure strip and be convenient for adapt to probe body and receive to produce deformation after the butt, follow-up probe body does not receive the chip butt back, and the flexure strip is convenient for resume deformation because of the material characteristic to the next chip of being convenient for detects.
Optionally, the elastic assembly further comprises a first spring, and the mounting bracket is provided with an abutting piece; one end of the first spring is abutted against the abutting part, and the other end of the first spring is abutted against the probe assembly.
By adopting the technical scheme, on the first aspect, the first spring is arranged to be matched with the spring piece to fix the probe assembly in a double-point position, so that the amplitude generated when the probe body resets after the detection of the previous chip is finished is reduced, and the detection speed of the next chip is improved conveniently; the second aspect provides that the abutment member is adjustable for the pretension of the first spring.
Optionally, the mounting bracket is provided with a through hole into which the first spring can extend, the abutting piece is in threaded connection with an adjusting screw rod of the through hole, and the central axis of the adjusting screw rod is parallel to the length direction of the first spring.
Through adopting above-mentioned technical scheme, set up the lateral wall that the stop bolt withdrew into spacing downthehole and bottom can be in the butt state with the inner wall in spacing hole, receive the first spring of the last apical force of chip to the direction compression that is close to the mount pad and when forcing elastic component deformation, the bottom lateral wall butt of stop bolt in spacing downthehole wall to the completion is to the wobbling space restriction of probe fastener, thereby reduces rocking of probe fastener when the sense terminal of probe body is in the user state.
Optionally, the spot-testing device further comprises a detection assembly, wherein the detection assembly comprises a detection piece arranged on the mounting frame and a power-on rod arranged on the probe assembly, and the detection piece is in communication connection with a control system of the spot-testing device;
when the probe assembly is in a normal position, the detection piece is abutted against the power-on rod;
when the probe assembly is in the abutting position, the detection piece and the power rod are spaced.
By adopting the technical scheme, when the probe assembly is in a normal position, the power-on rod and the detection piece are in an abutting state, the detection piece sends an abutting signal to a control system of the point measurement equipment, and the control system of the point measurement equipment stops supplying power to the probe body after receiving the abutting signal; when the probe assembly is in the abutting position, the power-on rod and the detection piece are separated from abutting and have a certain distance, and then the current abutting state of the probe body and the chip to be detected can be known; the detection piece stops sending the butt signal to the control system of the point measurement equipment, and the control system of the point measurement equipment stops receiving the butt signal and then supplies power to the probe body, so that the photoelectric performance test of the chip is performed after the probe body supplies power to the electrode of the chip.
Optionally, the detection piece includes the montant that sets up on the mounting bracket and sets up in the horizontal pole of montant bottom, the perisporium of horizontal pole can supply the perisporium of circular telegram pole to contradict, the one end that the horizontal pole was kept away from to the montant is connected with the control system communication of point survey equipment.
By adopting the technical scheme, the control system of the equipment is connected with the vertical rod under the conventional state; the cross rod and the electrifying rod are communicated, the detection piece sends a butt connection signal to the control system of the point measurement equipment, if the cross rod is not in butt connection with the electrifying rod, the cross rod and the electrifying rod are in a disconnected state, the detection piece stops sending the butt connection signal to the control system of the point measurement equipment, and power supply of the control system of the point measurement equipment to the probe body can be achieved.
In summary, the present application includes at least one of the following beneficial technical effects:
the probe assembly is stressed to force the elastic assembly to deform, so that the probe assembly is elastically abutted to the chip to be detected; therefore, chip crush injury caused when the chip is subjected to power-on detection by using the probe is reduced;
the elastic piece is arranged to be convenient for adapting to the deformation of the probe body after being abutted, and the elastic piece is convenient to recover the deformation due to the material characteristics after the subsequent probe body is not abutted by the chip, so that the next chip can be conveniently detected;
connecting a control system of the equipment by the vertical rod in a conventional state; the cross rod and the electrifying rod are communicated, the detection piece sends a butt connection signal to the control system of the point measurement equipment, if the cross rod is not in butt connection with the electrifying rod, the cross rod and the electrifying rod are in a disconnected state, the detection piece stops sending the butt connection signal to the control system of the point measurement equipment, and power supply of the control system of the point measurement equipment to the probe body can be achieved.
Drawings
FIG. 1 is a schematic diagram of the overall structure of a probe module of the present application;
figure 2 is an exploded view of the probe module;
FIG. 3 is a schematic view of the mounting structure of the probe assembly and the detection assembly.
Description of reference numerals: 1. a mounting frame; 11. a through hole; 2. a probe assembly; 21. a probe fastener; 211. a cantilever; 212. a mounting seat; 22. a limiting hole; 23. a probe body; 24. a stop bolt; 3. an elastic component; 31. an elastic sheet; 32. a first spring; 33. an abutting member; 5. a detection component; 51. a detection member; 511. a vertical rod; 512. a cross bar; 52. a power-on pole; 54. avoiding the groove.
Detailed Description
In order to make the objects, technical solutions and advantages of the present application more apparent, the present application is further described in detail below with reference to fig. 1-3 and the embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present application and are not intended to limit the present application.
The embodiment of the application discloses a probe module for point measurement equipment.
Referring to fig. 1, a probe module for a spot-measuring device includes a mounting frame 1, a probe assembly 2, an elastic assembly 3, and a detection assembly 5; one end of the mounting rack 1 is mounted on the point measurement equipment, and the other end of the mounting rack is connected with the elastic component 3 through a bolt; one end of the elastic component 3, which is far away from the mounting frame 1, is connected with the probe component 2 through a bolt; the probe assembly 2 is electrically connected to a control system of the point device.
The probe assembly 2 has a normal position and an abutting position relative to the mounting frame 1; the detection assembly 5 is arranged on the mounting frame 1 and used for detecting whether the probe assembly 2 is in a normal position or an abutting position at present, if the probe assembly 2 is in the normal position, the detection assembly 5 sends an abutting signal to a control system of the point measurement equipment, and the control system of the point measurement equipment stops supplying power to the probe assembly 2; when the probe assembly 2 is abutted by the chip, the probe assembly moves to the abutting position, the detection assembly 5 stops sending the abutting signal to the control system of the point measurement equipment, and the control system of the point measurement equipment stops receiving the abutting signal and then supplies power to the probe assembly 2, so that the photoelectric performance detection of the chip is completed.
Referring to fig. 1 and 2, the elastic member 3 includes an elastic piece 31, a first spring 32, and an abutment 33; one end of the elastic sheet 31 is connected with the end face of the bottom end of the vertical seat through a bolt, and the other end of the elastic sheet is connected with the probe assembly 2 through a bolt; a through hole 11 for coaxially mounting the first spring 32 is formed in the mounting rack 1; the through-hole 11 extends in the vertical direction; the first spring 32 is sleeved at the lower half end inside the through hole 11, the top end of the first spring 32 is in a butting state with the butting piece 33, and the other end is butted with the probe assembly 2.
With reference to fig. 2 and 3, wherein the abutment 33 is mounted on the mounting frame 1; the abutting piece 33 is an adjusting screw rod which is connected with the inner wall of the through hole 11 in a threaded manner; the adjusting screw is positioned at the upper half end inside the through hole 11, and the central axis is parallel to the length direction of the first spring 32; the bottom end of the adjustment screw abuts the top end of the first spring 32.
The probe assembly 2 comprises a cantilever 211, a mounting base 212 and a probe body 23, wherein the bottom end of the first spring 32 is fixedly connected to the upper surface of the cantilever 211; the cantilever 211 is horizontally arranged in an installation state, and the side wall of one end of the cantilever 211 is abutted with the side wall of one end of the elastic component 3 away from the installation frame 1; a stop bolt 24 is in threaded connection with the side wall of one end, close to the elastic component 3, of the cantilever 211, and the stop bolt 24 is in threaded connection with the elastic component 3 and the cantilever 211 in sequence, so that the elastic component 3 and the cantilever 211 are fixedly installed; wherein the cantilever 211 and the mount 212 constitute the probe fastener 21.
For the regulation seat that can realize XYZ direction regulation, because the pointed end of probe body 23 is in the state of often using, so inevitably have wearing and tearing in this embodiment mounting bracket 1, when setting up mounting bracket 1 and carrying out the displacement adjustment in the three orientation of XYZ, can realize the pointed end of probe body 23 and wait to detect the interval between the point survey position of chip to further improve the data accuracy when detecting the chip.
The lower surface of the mounting bracket 1 is provided with a limiting hole 22 for the bottom end of the stop bolt 24 to be buckled in an inwards concave manner, the inner diameter of the limiting hole 22 is larger than the outer diameter of the stop bolt 24, and when the probe body 23 is in an unused state, the bottom end side wall of the stop bolt 24 and the inner wall of the limiting hole 22 are in a non-butt state.
The mounting base 212 is bolted to one end of the cantilever 211 far away from the elastic component 3, and two ends of the probe body 23 are respectively an electric connection end and a detection end; the electrical connection end of the probe body 23 is fixedly connected to the mounting base 212 and electrically connected to the control system of the spot-testing device, and the detection end of the probe body 23 penetrates through one side of the mounting base 212 far away from the cantilever 211 and can be abutted to the signal input end of the chip.
Referring to fig. 1 and 2, the detecting assembly 5 includes a detecting member 51 and an energizing rod 52, wherein the detecting member 51 is mounted on the mounting frame 1, the energizing rod 52 horizontally penetrates through the cantilever 211, an avoiding groove 54 for the detecting member 51 to slide back and forth is formed in the upper surface of the cantilever 211, the avoiding groove 54 is formed along the length direction of the cantilever 211, and the detecting member 51 can move back and forth in the avoiding groove 54; the power-on pole 52 is electrically connected to the control system of the point device.
Referring to fig. 2 and 3, the detecting member 51 includes a vertical bar 511 and a horizontal bar 512; the axis of the vertical rod 511 is arranged in the vertical direction and is connected to the base through a bolt, the axis of the cross rod 512 is arranged horizontally, and one end of the cross rod is fixedly connected with the bottom end of the vertical rod 511; the upper surface of one end of the cross rod 512 far away from the vertical rod 511 is electrically connected with a control system of the point measurement equipment.
The implementation principle of the embodiment 1 is as follows: when the probe assembly 2 is in the normal position, the elastic assembly 3 does not deform, and when the pallet moves the signal input end of the chip to be detected to be abutted against the probe assembly 2, the probe assembly 2 moves from the normal position to the abutting position; the probe assembly 2 is stressed to force the elastic assembly 3 to deform, so that the probe assembly 2 is elastically abutted to the chip to be detected; when the probe assembly 2 is in a normal position, the electrifying rod 52 and the detection piece 51 are in a state of being connected with a channel of a control system of the point measurement equipment, and the detection piece 51 sends an abutting signal to the control system of the point measurement equipment; when the probe assembly 2 is in the butt position, the energizing rod 52 and the detecting piece 51 are separated from the butt and have a certain distance, the energizing rod 52 and the detecting piece 51 are in an open circuit state of a control system of the point measurement equipment, and the detecting piece 51 stops sending butt signals to the control system of the point measurement equipment, so that the photoelectric performance detection is performed after the control system of the point measurement equipment supplies power to the probe body 23 and then energizes the chip.
The foregoing is a preferred embodiment of the present application and is not intended to limit the scope of the application in any way, and any features disclosed in this specification (including the abstract and drawings) may be replaced by alternative features serving equivalent or similar purposes, unless expressly stated otherwise. That is, unless expressly stated otherwise, each feature is only an example of a generic series of equivalent or similar features.
Claims (8)
1. A probe module for a point measurement device, characterized by: the device comprises a mounting rack (1) and a probe assembly (2), wherein an elastic assembly (3) is arranged between the mounting rack (1) and the probe assembly (2); the probe assembly (2) is provided with a normal position and a butt joint position relative to the mounting frame (1), the probe assembly (2) can move to the butt joint position from the normal position due to stress, and the elastic assembly (3) can enable the probe assembly (2) which is not stressed to move to the normal position from the butt joint position.
2. The probe module for a spot testing apparatus of claim 1, wherein: the probe assembly (2) comprises a probe fastening piece (21) and a probe body (23) arranged at one end of the probe fastening piece; one end of the probe body (23) far away from the probe fastening piece (21) is a detection end, and the other end of the probe body is an electric connection end; the electric connection end of the probe body (23) can be electrically connected with a control system of the point measurement equipment; the detection end of the probe body (23) can be in position-finding contact with a point of the chip.
3. The probe module for a spot testing apparatus of claim 1, wherein: the elastic assembly (3) comprises an elastic sheet (31); one end of the elastic piece (31) is connected to the mounting frame (1), and the other end of the elastic piece is connected to the probe assembly (2); when the probe assembly (2) is in a normal position, the elastic piece (31) is in a natural state; when the probe assembly (2) is in the abutting position, the elastic sheet (31) is in an elastic deformation state.
4. The probe module for a spot testing apparatus according to claim 3, wherein: the elastic component (3) further comprises a first spring (32), and the mounting frame (1) is provided with an abutting piece (33); one end of the first spring (32) is abutted against the abutting piece (33), and the other end of the first spring is abutted against the probe component (2).
5. The probe module for a spot testing apparatus according to claim 4, wherein: mounting bracket (1) is equipped with through-hole (11) that can supply first spring (32) to stretch into, butt piece (33) be threaded connection in the adjusting screw of through-hole (11), adjusting screw's the central axis is on a parallel with the length direction of first spring (32).
6. The probe module for a spot testing apparatus according to claim 2, wherein: the probe fastening piece (21) is far away from the end part of one end of the probe body (23) and is connected with the elastic component (3) and is in threaded connection with the stop bolt (24), a limiting hole (22) for the stop bolt (24) to be buckled in is arranged on the mounting rack (1) in an inwards concave mode, and the inner diameter of the limiting hole (22) is larger than the outer diameter of the peripheral wall of the bottom end of the stop bolt (24).
7. The probe module for a spot testing apparatus of claim 2, wherein: the probe assembly is characterized by further comprising a detection assembly (5), wherein the detection assembly (5) comprises a detection piece (51) arranged on the mounting frame (1) and a power conducting rod (52) arranged on the probe assembly (2), and the detection piece (51) is in communication connection with a control system of the point measurement equipment;
when the probe assembly (2) is in a normal position, the detection piece (51) is abutted against the power conducting rod (52);
when the probe assembly (2) is in an abutting position, the detection piece (51) and the power conducting rod (52) have a distance.
8. The probe module for a spot testing apparatus of claim 7, wherein: the detection piece (51) comprises a vertical rod (511) arranged on the mounting rack (1) and a cross rod (512) arranged at the bottom end of the vertical rod (511), the peripheral wall of the cross rod (512) can be abutted against the peripheral wall of the power-on rod (52), and one end, far away from the cross rod (512), of the vertical rod (511) is in communication connection with a control system of the point measurement equipment.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122314975.XU CN215953691U (en) | 2021-09-24 | 2021-09-24 | Probe module for point measurement equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202122314975.XU CN215953691U (en) | 2021-09-24 | 2021-09-24 | Probe module for point measurement equipment |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN215953691U true CN215953691U (en) | 2022-03-04 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202122314975.XU Active CN215953691U (en) | 2021-09-24 | 2021-09-24 | Probe module for point measurement equipment |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN215953691U (en) |
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2021
- 2021-09-24 CN CN202122314975.XU patent/CN215953691U/en active Active
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