R434196 五、新型說明： 【新型所屬之技術領域】 本創作係有關一種雙遠心干涉儀連續變焦成像裝置，特別是指一種模 • 組化設計的機體以提高維修組裝、客製化的便利性，以及使用雙段遠心成 像方式來改善光學崎·變的問題’以及提高較長的物距量測功效。 【先前技術】 隨著精密量測的發展’利用光學量測微小、精密元件的技術，是同時 •具備高敏感性與非破壞性之優點，因此已廣泛應用於不同工程應用領域。 以干涉儀為例說明，其係一種利用光的干涉現象作為量測光學元件或其他 物理量的光機設備，目前光機設備的設計與組裝相當的複雜’且預先調校 好的光路容易受外在影響而產生偏移狀況，使得事後維修的困難度極高。 舉例來說，光機設備係使用多.個零件搭接組合而成主體架構，且大多光學 元件皆設置於主體架構内部；其中主體架構内在組裝此些光學元件的同 時，就必須預先調校好及定位，以確保光路行進路線之準確度。 籲—’於搬運難巾，光機設備會因主體_本身的搭接設計而產生 剛性不足的問題’且容易造成光路偏移發生的機率。另，主體架構受外部 -撞擊時，容易產生震動干擾，如此亦會產生光路偏移的問題。再者，此些 .光學元件並未模組化，而是零散的--組裝於主體架構内，當發生故障時， 必須整台拆卸檢查、維修或#換，不僅耗時費力 '維修成本昂貴，且祕 效率相當低。除此之外，光機設備之CCD及其外掛鏡頭的重量、體積龐大： 於調焦時，必須調整CCD來配合成像面，但卻容易造成整體主體J構重心 偏移及震動，使得調整CCD及鏡頭的手續變的相當複雜。 3 M434196 不僅存在上述光機设備的話病之外，干涉條紋品質的優劣係取決於成 像系統，當制物轉改變時，祕系_放大料、崎變與解析度會有 所改變，如此即限制了量測上的條件。 有4_oa於此本創作遂針對上述先前技術之缺失，提出一種雙遠心干涉 儀連續M、成縣置，以有效纽上述之該等問題。 【新型内容】 本創作之主要目的在提供—種雙遠针賴連續變減像裝置，其可 將模組化的各辟模組分別組裝於—體成型的機體上，不僅提高了整體剛 性、組裝維修便繼，又能降低光路偏移發生的機會。 本創作之次要目的在提供一種雙遠心干涉儀連續變焦成像裝置，其利 用雙段遠心鏡頭成像方式，有較大的景深，有利於非平面物件的量測，同 時維持干涉敝影像大小能不受物距影響，進而制高品質的功效。 本創作之3目的在提供_種雙遠，叶涉儀連續變減絲置其可 單獨作為定料线制，何作為雙段遠心絲成⑽統使用，能有效 增加操作便利性及使用彈性。 本創作之再目的在提供—種雙遠心干涉儀連續變焦成像裝置，其利 用軟性懸吊組件來降低各光學模組受外部撞料搬運過程中所造成的影 響’同時降低震動干擾之問題。 ^本創作之又-目的在提供一種雙遠心干涉儀連續變焦成像裝置，其利 用多重隔離設計，可有效將麵阻隔在外而影響光學模組，且每一光學模 組皆可單縣修、組裝、拆卸輯換，使整體結構更佳彈性化。 為達上述之目的’本創作提供一種雙遠心干涉儀連續變焦成像裝置， 圓㈣、—機辦、，她驗―細續變焦模組 及一電輕合元件^先將模組化醇直物鏡組遠心成像模組遠心連續變 鎌組及梅元件各肋裝於—體成_管主體上，並分卿先雛 使批時便於整組替換’以提高維修效率及節省成本等優點。其 令，利用產生投射光線之投光裝置輸出一雷射光束並射入準直物鏡組中， 經過反射、調光後產生-干涉_之平行光，將其轉換為㈣光，再將其 引導至錄通道上。遠心成像模組位於準直物鏡組前側係將成像通道 上的干涉_髮為—树像，啊景_持干罐影像的放大 倍率不受御伽E遠近的影響。錄準絲鏡_如雜之間的遠 心連續M、池，射遠喊像贼大鲜，錢出—㈣像；最後 將物影像直接麟於綠合元件上，並無錢子訊號。藉由模組化的組 裝設計及上述光學元件的位置配置方式，能有效降低光路偏移發生的機會。 底下藉由具體實施例詳加說明，當更容易瞭解本創作之目的、技術内 谷、特點及其所達成之功效。 【實施方式】 由於白知的、.Ό構相當複雜，且容S受搬運或外部碰撞影響而造成光路 偏移問題’使得可移動性差且組裝、拆卸維翁相#複雜及不便。為了改 善習知料結構上的_，本創作提出_種龍的雙遠針涉儀連續變焦 成像裝置，藉以提升整體性能與使用的穩定性。 是以’在此針對結構改良予以詳細說明，請一併參閱第1圖及第2 圖，分別為本創作之立體結構圖及部分光學模組之放大圖。雙遠心連續變 焦成像裝置包括i管主體1G及裝設於，主體1G外側上的—遠心成像 M434196 板組12、一遠心連續變焦模組14、一電耦合元件16及一準直物鏡組。其 中’圓管主體10係為一體成型的鋁合金圓管設計，以提高整體剛性，進而 以改善習知利用多個零件搭接組成而造成剛性不足的問題。 準直物鏡組係將一干涉圖形之平行光轉換為收斂光，並將其引導至一 成像通這上，其申，準直物鏡紕更包括二平面（圖中未示）、一準直裝置18、 一調校分光稜鏡組20、擴光鏡組22及一偏振分光稜鏡組24及一反射鏡組 26。調校分光棱鏡組20及偏振分光稜鏡組24係位於二平面及準直裝置18 之下方；偏振分光稜鏡組24、擴光鏡組22與調校分光稜鏡組20呈同平面 水平叹置，且偏振分光稜鏡組24位於調校分光稜鏡組2〇及擴光鏡組之 間。退心成像模組12位於準直物鏡組前側，遠心成像模組12係將成像通 道上的干涉_轉換為—遠心成像，反射鏡組％與位於遠心絲模組η Ί〜連、㈣焦模組14之間’可藉由反射鏡組26將遠心成像反射至遠心 '、..ΐ义’、’、模且14，由达心連續變焦模組14調整遠心成像的放大倍率，並輸 出物衫像。電輕合元件16位於遠心連續變焦模组14之側邊，物影像係 成像於電轉合元件16上，並賴成電子訊號。 中又遠^連續薆焦成像裝置更包括用以產生投射光線之一投光裝 置28，裝設於圓管主體料側上，且位於偏振分光稜鏡組％下方。由於 遠。成像她12、避心連續魏模組Μ '電輕合元件16、準直物鏡組及其 各’·’田4光子兀件皆已模組化’故裝設於圓管主體⑴上之後，可各別預先調 定位如此於維修時，能將各模組獨立替換，據以提高維修效率及維 =成本甚至此因應市场需求而直接對光學模組設計加以變更，以達到客 製之力放再者，搭配圓官主體1〇之剛性性能及各光學模組組裝方式， M.434196 月b有效降低光路偏移發生的機會。 接續’為了能進—步提物震效果，如第3圖麻，雙遠心連續變隹 成像裝置包括-殼體3G，其内更設有—軟簡組件幻，係贿主2 之兩端係抵觸固定於軟觸組㈣上，《管主體H)粒於殼體30内。 由於軟性㈣轉32域輯質，或是具梭震效果陳歸質，可大幅 降低’’且衣糊e主㈣相上的各光學龜受外部鮮或麟過程中所造 成的影響’同畴低额干狀_，_增加整㈣構及光路的穩定性。 其中’殼體30係為多重隔離設計，如第4圖所示，殼體3〇包含複數 個隔離搶302 ’分別對應容設各光學模組，如準直物鏡組、遠心成像模組 ⑴遠心連續軸組Η及雜合元件10，或上述各細部光學模組，使得 所有光學模組各卿成不同的獨立空間。詳言之，每—光學模組搭配一個 隔離搶搬，每-隔離搶搬可單獨開啟，因此每—光學模組科獨維修、 組裝、拆卸及替換’讓整體結構更具維修彈性；換言之，不需要維修之光 學模組’能藉由隔離艙3〇2之設計而有效將灰塵阻隔在外，以避免灰塵造 成成像通道上多餘的雜訊。 由上述新穎的結構設計可得知，本創作確實能解決習知結構上的話 病田;、.；本創作亦能改善光學性能，請同時配合第！圖及第$圖。投光 裝置28與偏振分光稜鏡組μ之間的光學路徑上更包括至少一反射鏡料及 擴光鏡組22。其中投光裝置28可為雷射裝置，係輸出_氦氖雷射光束，其 經反射鏡34至縣鏡組22後，再錢光鏡組22擴大雷狀束並傳送至偏 振分光稜鏡組24。其中，投光裝置28的光學路徑上更可設一衰減片 (att⑽主要是在使雷射光束的振幅減少，且其相位及鮮皆不失真 7 M434196 的’進而達到調光作用者。偏振分光稜鏡組24包含有1/4波片，穿透偏振 分光稜鏡組24之偏振光經由調校分光稜鏡組2〇與一主反射鏡（primary mirror) 36調整方向之反射後，即可將光線射入準直裝置18中。準直裝置 18通常由準直鏡片所組成，進而使光線進入二平面38之間，其中二平面 38係包含參考平面（reference piane)及測試平面（咖phne)。 接續說明如何達成雙遠心光學成像，當光線進入二平面38之間後，參 考平面之反射光與測試平面之反射光互相干涉產生一待測物之干涉圖形， 由準直衣置18將干涉圖形之平行光轉換為具有干涉條紋之收斂光。之後利 用主反射鏡36和調校分光稜鏡組20所形成的光學路徑調整功能手段導引 干涉條紋《準錄置18至驗分紐餘24，馳分錢餘24反射干 涉條紋，再將其引轩涉條紋至成像通道上，並由遠心成像模組U將成像 通道上的干涉圖形轉換為平行光軸的—遠心、成像，故糊和成像模组η 來调正干賴㈣衡定放大率之遠心成像，使得干涉條紋影像放大倍率可 以，准持至夂，不會因待測物的距離改變而受影響。其中遠心成像模組^較 佳可由二個繼光鏡組所組成。 接續’本創作係使用遠心連續變焦模組M來配合遠心成像模組12，其 中光學調整功能手段係將遠心光學成像分成兩段部分，由準直物鏡組與遠 成象拉，.且I2之部分作為前段定焦成像系統，使進入成像側的主光線 (ChiefRay)设定為與光軸平行;而遠心連續變焦模組μ作為後段連續變 焦成«統’使物_域雜光行，如❹卩可喊雙遠叶涉儀連 土成像裝置。6羊吕之，若因待測物距離改變而需要調整聚焦時，可利 用遂心連纟繼顧14來觸綱放吻。其巾，遠心成像模組 M434196 U與反射鏡組26之間的光學路徑上更設有一平面反射鏡4〇，且位於成像 通迢上，平行光轴的遠心成像依序經平面反射鏡4〇及反射鏡組％，以引導 平行光軸的遠,叫像至遠心連續變錢組14内，其可輕遠心成像的放大 • 倍率。詳5之，遇心連續變焦模組14係連續變倍介於}倍（丨乂）至6倍（6又） .之間，用以調整成像通逼上之干涉光的放大倍率並輸出__物影像；舉例來 兒运。連、’·只义焦模組14包含四調焦鏡片（z〇〇m iens)，主要是調整其中 •二個調焦鏡片⑷、144,可藉由調整該二調焦鏡片142、144之間距而放大 *或縮小物影像。當二調焦鏡片⑷⑷間的距離調整的越近，相對地物影 像的放大料獻。祕如連續變韻組M係直接置於—雜合元件Μ 之焦平面，故可獅雜絲雜於·合元件16上，並轉誠電子訊號； 如此-來’本創作確實能改善光學性能。值得注意的是，傳統調焦使用調 整電搞合元件來配合成像面，而電耗合元件及其加掛鏡頭重量及體積龐 大’使得調整電純it件及其加掛鏡頭的裝置複雜，並且儀器内部的大部 件移動容易造成重心偏移及縣。因此，本創作之反射鏡組26#、設計為兩 鲁片對稱傾角的反射鏡’藉由兩片反射鏡前後移動來調整成像面位置以配合 電耗合元件16，因此，本創作即可簡單將電輕合元件16及其加掛鏡顧定 * 於圓管主體10上，同時也易於更換。 • ㈣，本創作之結構設計可因應量測需求而隨之替換光學模組，由於 習知存在著光學崎變之話病，因此本創作針對此問題特別設計雙段式遠心 光學成像系統，使得光學性能不受待測物的景深和焦深對焦影響，同時維 持干涉條紋影像大小能不受物距影響，進而得到高品質的功效。除此之外， 當然可僅使_心成像模組丨2，單獨作騎倍钱統賴，在此不加以限 9 M434196 定’因此確魏有效增加操作侧性及使用彈性。 综上所述，本創作新穎設計之雙遠心干涉儀連續變焦成像裝 t _ ± | 創 作能同時改善結構上的缺*，提高了整酬性、組祕修便舰、維修成 本，以及降低光路偏移發生喊會；又兼具改善光學性能， . 為知因 距越遇’使得*學畸變顧重的問題，以及⑽放大率仍能維持—致 以保持干涉條紋影像的亮度，使成像範圍能固定而提高絲品質。本創作 成將諸多優雜於-身，確魏大幅提昇光學量_精準度及實用性，又 月b增加珂所未有的附加價值，極具產業競爭優勢。 ^唯社所述者，僅為本創作之較佳實關而已，並_來蚊本創作 貫施之範®。故即凡依本_申請範_述之概及料所為之均等變化 或修飾，均應包括於本創作之申請專利範圍内。 【圖式簡單說明】 第1圖為本創作之立體結構圖。 第2圖為本創作之部分光學模組之放大圖。 第3圖為本創作具有防震功能之示意圖。 第4圖為本創作具有多重隔離設計之示意圖。 第5圖為本創作之光行進路線示意圖。 【主要元件符號說明】 10 圓管主體 12 遠心成像模組 14 遠心連續變焦模組 142調焦鏡片 調焦鏡片 電耦合元件 準直裝置 調校分光稜鏡組 擴光鏡組 偏振分光稜鏡組 反射鏡組 投光裝置 殼體 隔離艙 軟性懸吊.組件 反射鏡 主反射鏡 平面 平面反射鏡 11R434196 V. New description: [New technology field] This creation is about a dual-telecentric interferometer continuous zoom imaging device, especially a mold-based design body to improve the convenience of maintenance assembly and customization. And the use of two-stage telecentric imaging to improve the problem of optical distortion and improve the long-distance measurement. [Prior Art] With the development of precision measurement, the technology of measuring small and precision components by optical measurement is simultaneously and highly sensitive and non-destructive, and has been widely used in various engineering applications. Taking an interferometer as an example, it is an optical device that uses optical interference as a measuring optical component or other physical quantity. At present, the design and assembly of optical equipment is quite complicated, and the pre-adjusted optical path is easily affected. Deviation occurs in the impact, making the difficulty of after-the-fact maintenance extremely high. For example, a optomechanical device is assembled using a plurality of parts to form a main body structure, and most of the optical components are disposed inside the main body structure; wherein the optical components are assembled in the main body structure, and must be pre-adjusted at the same time. And positioning to ensure the accuracy of the path of the light path. —————————————————————————————————————————————————————————————————————————————————————————————————————————————————————————————————————————————————————————————— In addition, when the main body structure is subjected to external-impact, it is easy to generate vibration interference, which also causes a problem of optical path deviation. Furthermore, the optical components are not modular, but are scattered - assembled in the main structure. When a failure occurs, the entire assembly must be disassembled, inspected, repaired or replaced, which is time consuming and laborious. And the secret efficiency is quite low. In addition, the weight and volume of the CCD and its external lens of the optical machine equipment are large: When focusing, the CCD must be adjusted to match the imaging surface, but it is easy to cause the center of the body to shift and vibrate, so that the CCD is adjusted. And the procedures of the lens become quite complicated. 3 M434196 In addition to the above-mentioned optomechanical equipment, the quality of the interference fringe depends on the imaging system. When the material changes, the secret _ amplification material, the change and the resolution will change. Limits the conditions on the measurement. There are 4_oa in this creation. In view of the lack of the above prior art, a double telecentric interferometer is proposed for continuous M and Chengxian, in order to effectively solve the above problems. [New content] The main purpose of this creation is to provide a double-distance-needle continuous variable reduction device, which can assemble the modular modules into the body-molded body, which not only improves the overall rigidity, Assembly and maintenance will continue, and it will reduce the chance of optical path drift. The second objective of this creation is to provide a dual-telecentric interferometer continuous zoom imaging device that utilizes a two-stage telecentric lens imaging method with a large depth of field, which is advantageous for the measurement of non-planar objects while maintaining the interference image size. Affected by the object distance, and then the effect of high quality. The purpose of this creation is to provide a kind of double-distance, and the leaf-related continuous reduction wire can be used as a fixed line system alone, and as a double-stage telecentric wire (10) system, which can effectively increase the convenience of operation and the flexibility of use. A further object of the present invention is to provide a dual telecentric interferometer continuous zoom imaging device that utilizes a flexible suspension assembly to reduce the effects of each optical module caused by external bump handling while reducing vibration interference. ^ The purpose of this creation is to provide a dual telecentric interferometer continuous zoom imaging device, which utilizes multiple isolation designs to effectively block the surface and affect the optical module, and each optical module can be repaired and assembled in a single county. , disassembly and replacement, so that the overall structure is more flexible. In order to achieve the above purpose, the present invention provides a dual telecentric interferometer continuous zoom imaging device, a circle (four), a machine, a test, a thin zoom module and an electric light-emitting component, and a modular alcohol objective lens. The telecentric imaging module of the telecentric imaging module and the ribs of the plum components are mounted on the main body of the body, and are divided into two groups to facilitate the replacement of the entire group to improve maintenance efficiency and cost. Therefore, a light projecting device that generates the projected light is used to output a laser beam and enter the collimated objective lens group, and after the reflection and the dimming, the parallel light of the interference is generated, converted into (four) light, and then guided. On the record channel. The telecentric imaging module is located on the front side of the collimating objective lens group, and the interference on the imaging channel is taken as a tree image, and the magnification of the image of the dry can is not affected by the distance of the gamma E. Recording wire mirror _ such as the distance between the heart of the continuous M, the pool, shoot far shouting like a thief big fresh, money out - (four) like; finally the object image directly on the green component, no money signal. The modular assembly design and the positional arrangement of the optical components described above can effectively reduce the chance of optical path offset. The details of the creation, the technical valley, the characteristics and the achieved effects are more easily understood by the detailed description of the specific embodiments. [Embodiment] Since the white structure is quite complicated, and the capacity S is caused by the handling or external collision, the optical path shift problem is made, which makes the mobility poor and the assembly and disassembly of the Von phase # complicated and inconvenient. In order to improve the structure of the conventional material, this creation proposes a continuous zoom imaging device for the dual-distance needles of the dragon to improve the overall performance and stability of use. Here is a detailed description of the structural improvement. Please refer to Figure 1 and Figure 2 for the three-dimensional structure diagram and the enlarged view of some optical modules. The dual telecentric continuous focus imaging device comprises an i-tube main body 1G and a telecentric imaging M434196 plate set 12, a telecentric continuous zoom module 14, an electrical coupling element 16 and a collimating objective lens set mounted on the outer side of the main body 1G. Among them, the 'circular pipe main body 10 is designed as an integrally formed aluminum alloy pipe to improve the overall rigidity, and further to improve the conventional problem of insufficient rigidity by using a plurality of parts to be overlapped. The collimating objective lens converts the parallel light of an interference pattern into a convergent light and directs it to an imaging pass. The collimating objective lens includes a second plane (not shown) and a collimating device. 18. A calibration pupil group 20, a concentrating mirror group 22, a polarization beam splitting group 24, and a mirror group 26. The tuned prism group 20 and the polarization beam splitter group 24 are located below the two planes and the collimating device 18; the polarization splitting group 24, the illuminating mirror group 22 and the tuned beam splitting group 20 are horizontally sighed horizontally The polarization splitting group 24 is located between the calibration beam splitting group 2 and the illuminating mirror group. The retracting imaging module 12 is located on the front side of the collimating objective lens group, and the telecentric imaging module 12 converts the interference _ on the imaging channel into telecentric imaging, the mirror group % is located in the telecentric wire module η Ί 连, and (4) the focal mode Between the groups 14 'the telecentric image can be reflected to the telecentric ', ΐ ' ', ', 模 and 14 by the mirror group 26, and the magnification of the telecentric imaging is adjusted by the continuous heart zoom module 14 and output Shirt like. The electric light-fitting component 16 is located on the side of the telecentric continuous zoom module 14, and the object image is imaged on the electrical turn-on component 16 and is based on an electronic signal. The center-to-center continuous focus imaging device further includes a light projecting device 28 for generating a projected light, which is mounted on the material side of the main body of the circular tube and located below the polarization splitting group %. Because of the distance. Imaging her 12, avoiding the heart of the continuous Wei module Μ 'Electric light and light components 16, the collimating objective lens group and their '·' Tian 4 photon components have been modularized, so after being installed on the main body of the round tube (1), The pre-adjustable positioning can be used to replace the modules independently, so as to improve the maintenance efficiency and cost = even in response to market demand, the optical module design can be directly changed to achieve the custom force. Furthermore, with the rigid performance of the body and the assembly of the optical modules, M.434196 b effectively reduces the chance of optical path migration. In order to be able to advance - step to extract the effect of the object, such as Figure 3, the double telecentric continuous sputum imaging device includes - the shell 3G, which is further equipped with - soft and simple component illusion, the two ends of the bribe master 2 The interference is fixed to the soft touch group (four), and the "tube main body H" is granulated in the casing 30. Due to the soft (four) to 32 domain quality, or the effect of the shuttle effect, the optical turtles on the main (four) phase of the fabric can be greatly reduced by the external fresh or lining process. The low dry _, _ increases the stability of the whole (four) structure and the optical path. The housing 30 is a multiple isolation design. As shown in FIG. 4, the housing 3 includes a plurality of isolations 302' respectively corresponding to each optical module, such as a collimating objective lens group and a telecentric imaging module (1) telecentric. The continuous axis group 杂 and the hybrid component 10, or the above-mentioned detailed optical modules, make all the optical modules each have different independent spaces. In particular, each optical module is equipped with an isolated smash, and each quarantine can be opened separately. Therefore, each optical module is repaired, assembled, disassembled and replaced to make the overall structure more flexible; in other words, The optical module that does not need to be repaired can effectively block dust by the design of the isolation compartment 3〇2 to prevent dust from causing unnecessary noise on the imaging channel. It can be known from the above-mentioned novel structural design that this creation can indeed solve the traditional structure of the disease field;,; This creation can also improve the optical performance, please cooperate with the first! Figure and figure $. The optical path between the light projecting device 28 and the polarization splitting group μ further includes at least one mirror material and a lens assembly 22. The light projecting device 28 can be a laser device, which outputs a _ 氦氖 laser beam, which passes through the mirror 34 to the county mirror group 22, and then the light beam group 22 expands the ray beam and transmits it to the polarization beam splitter group. twenty four. Wherein, the optical path of the light projecting device 28 can further be provided with an attenuating sheet (att (10) is mainly for reducing the amplitude of the laser beam, and the phase and the fresh phase are not distorted by the 'M M M M M M M M The 稜鏡 group 24 includes a quarter-wave plate, and the polarized light penetrating the polarization beam splitting group 24 is adjusted by adjusting the direction of the beam splitting group 2〇 and a primary mirror 36. The light is incident into the collimating device 18. The collimating device 18 is typically comprised of a collimating lens that in turn causes light to enter between the two planes 38, wherein the two planes 38 comprise a reference plane and a test plane. Continuing to explain how to achieve dual telecentric optical imaging, when the light enters between the two planes 38, the reflected light of the reference plane interferes with the reflected light of the test plane to generate an interference pattern of the object to be tested, and the interference is set by the collimating garment 18 The parallel light of the pattern is converted into a convergent light with interference fringes. Then, the optical path adjustment function formed by the main mirror 36 and the modulating beam splitting group 20 is used to guide the interference fringe. The balance of the remaining 24, the galloping of the remaining 24 reflection interference fringes, and then lead to the stripes on the imaging channel, and the telecentric imaging module U converts the interference pattern on the imaging channel into a parallel optical axis - telecentric, imaging Therefore, the paste and the imaging module η are used to adjust the telecentric imaging of the constant magnification (4), so that the magnification of the interference fringe image can be held to the 夂, and will not be affected by the change of the distance of the object to be tested. The imaging module ^ is preferably composed of two relay lens groups. The continuation of the present invention uses a telecentric continuous zoom module M to cooperate with the telecentric imaging module 12, wherein the optical adjustment function means that the telecentric optical imaging is divided into two parts. By the collimating objective lens group and the far imaging, the part of I2 is used as the front-end fixed-focus imaging system, so that the chief ray entering the imaging side is set to be parallel to the optical axis; and the telecentric continuous zoom module μ is used as The posterior segment is continuously zoomed into a «communication" object _ domain stray light line, such as ❹卩 ❹卩 双 双 远 远 涉 涉 连 连 连 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6 6遂心连纟继顾14 The contact is kissed. The towel, the optical path between the telecentric imaging module M434196 U and the mirror group 26 is further provided with a plane mirror 4〇, and is located on the imaging wanted, and the telecentric imaging of the parallel optical axis is sequentially The plane mirror 4〇 and the mirror group %, to guide the far side of the parallel optical axis, called the image to the telecentric continuous variable money group 14, which can be zoomed in and out of the telecentric image. Detail 5, the continuous zoom module The 14 series continuous zoom is between 倍 (丨乂) and 6 times (6 )). It is used to adjust the magnification of the interference light on the imaging and output the __ object image; for example, it is a child. The '-only focus module 14 includes four focus lenses (z〇〇m iens), mainly adjusting two of the focus lenses (4), 144, by adjusting the distance between the two focus lenses 142, 144 And zoom in* or zoom out the image. The closer the distance between the two focus lenses (4) (4) is adjusted, the larger the relative image of the object is. The secret is that the continuous rhyme group M is directly placed on the focal plane of the hybrid component ,, so the lion can be mixed with the component 16 and turned into the electronic signal; thus - the 'this creation can indeed improve the optical performance . It is worth noting that the traditional focusing uses the adjustment of the electric component to match the imaging surface, and the power consumption component and its attached lens are heavy and bulky, which makes the adjustment of the electric pure piece and the device for attaching the lens complicated, and The movement of large parts inside the instrument is likely to cause a shift in the center of gravity and the county. Therefore, the mirror group 26# of the present invention is designed as a mirror with a symmetrical inclination of two slabs. The two mirrors are moved back and forth to adjust the position of the image plane to match the power consuming component 16, so that the creation can be simple. The electric light-fitting element 16 and its attached mirror are mounted on the main body 10 of the tube, and are also easy to replace. • (4) The structural design of this creation can replace the optical module according to the measurement requirements. Because of the existence of optical stagnation, this creation specially designed a two-stage telecentric optical imaging system for this problem, The optical performance is not affected by the depth of field and depth of focus of the object to be tested, while maintaining the size of the interference fringe image without being affected by the object distance, thereby obtaining high quality effects. In addition, of course, only the _ heart imaging module 丨2 can be used for riding alone, and it is not limited to 9 M434196. Therefore, it is effective to increase the operational side and the flexibility of use. In summary, the novel design of the dual telecentric interferometer continuous zoom imaging installed t _ ± | creation can simultaneously improve the structural defects*, improve the remuneration, the group secret repair ship, maintenance costs, and reduce the light path The offset occurs in a shout; it also improves the optical performance, and the problem is that the distance is increased, and the magnification is still maintained. (10) The magnification can still be maintained—to maintain the brightness of the interference fringe image, so that the imaging range Can be fixed to improve the quality of silk. This creation has many advantages and advantages, and Wei has greatly improved the optical quantity _ precision and practicality, and the monthly b has increased the added value of unprecedented value, which has great industrial competitive advantage. ^Weishe said that it is only the best practice of this creation, and _ 蚊 本 本 。 。 。 。 。 。 。. Therefore, any changes or modifications to the terms and conditions of this application shall be included in the scope of the patent application for this creation. [Simple description of the diagram] Figure 1 is a three-dimensional structure diagram of the creation. Figure 2 is an enlarged view of some of the optical modules of the creation. Figure 3 is a schematic diagram of the creation of a shockproof function. Figure 4 is a schematic diagram of the creation of multiple isolation designs. Figure 5 is a schematic diagram of the light travel route of the creation. [Major component symbol description] 10 Tube body 12 Telecentric imaging module 14 Telecentric continuous zoom module 142 Focusing lens Focusing lens Electrocoupling component Collimation device Calibration Splitter group Diffusion mirror group Polarization splitting group reflection Mirror group light projecting device housing isolation cabin soft suspension. Component mirror main mirror plane plane mirror 11