TWM433630U - Device for mixing gas with different flow rate - Google Patents

Device for mixing gas with different flow rate

Info

Publication number
TWM433630U
TWM433630U TW100222446U TW100222446U TWM433630U TW M433630 U TWM433630 U TW M433630U TW 100222446 U TW100222446 U TW 100222446U TW 100222446 U TW100222446 U TW 100222446U TW M433630 U TWM433630 U TW M433630U
Authority
TW
Taiwan
Prior art keywords
flow rate
different flow
mixing gas
mixing
gas
Prior art date
Application number
TW100222446U
Other languages
Chinese (zh)
Inventor
Ning Zhou
chao-yang Xu
xu-sheng Zhou
Original Assignee
Advanced Micro-Fabrication Equipment (Shanghai) Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Advanced Micro-Fabrication Equipment (Shanghai) Co Ltd filed Critical Advanced Micro-Fabrication Equipment (Shanghai) Co Ltd
Publication of TWM433630U publication Critical patent/TWM433630U/en

Links

TW100222446U 2011-05-11 2011-11-28 Device for mixing gas with different flow rate TWM433630U (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN2011201484846U CN202096901U (en) 2011-05-11 2011-05-11 Device for mixing gases with different flow rates

Publications (1)

Publication Number Publication Date
TWM433630U true TWM433630U (en) 2012-07-11

Family

ID=45382936

Family Applications (1)

Application Number Title Priority Date Filing Date
TW100222446U TWM433630U (en) 2011-05-11 2011-11-28 Device for mixing gas with different flow rate

Country Status (2)

Country Link
CN (1) CN202096901U (en)
TW (1) TWM433630U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023221830A1 (en) * 2022-05-20 2023-11-23 北京北方华创微电子装备有限公司 Gas mixing device and semiconductor process apparatus

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023221830A1 (en) * 2022-05-20 2023-11-23 北京北方华创微电子装备有限公司 Gas mixing device and semiconductor process apparatus

Also Published As

Publication number Publication date
CN202096901U (en) 2012-01-04

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Legal Events

Date Code Title Description
MK4K Expiration of patent term of a granted utility model