TWM433630U - Device for mixing gas with different flow rate - Google Patents
Device for mixing gas with different flow rateInfo
- Publication number
- TWM433630U TWM433630U TW100222446U TW100222446U TWM433630U TW M433630 U TWM433630 U TW M433630U TW 100222446 U TW100222446 U TW 100222446U TW 100222446 U TW100222446 U TW 100222446U TW M433630 U TWM433630 U TW M433630U
- Authority
- TW
- Taiwan
- Prior art keywords
- flow rate
- different flow
- mixing gas
- mixing
- gas
- Prior art date
Links
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN2011201484846U CN202096901U (en) | 2011-05-11 | 2011-05-11 | Device for mixing gases with different flow rates |
Publications (1)
Publication Number | Publication Date |
---|---|
TWM433630U true TWM433630U (en) | 2012-07-11 |
Family
ID=45382936
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW100222446U TWM433630U (en) | 2011-05-11 | 2011-11-28 | Device for mixing gas with different flow rate |
Country Status (2)
Country | Link |
---|---|
CN (1) | CN202096901U (en) |
TW (1) | TWM433630U (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2023221830A1 (en) * | 2022-05-20 | 2023-11-23 | 北京北方华创微电子装备有限公司 | Gas mixing device and semiconductor process apparatus |
-
2011
- 2011-05-11 CN CN2011201484846U patent/CN202096901U/en not_active Expired - Lifetime
- 2011-11-28 TW TW100222446U patent/TWM433630U/en not_active IP Right Cessation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2023221830A1 (en) * | 2022-05-20 | 2023-11-23 | 北京北方华创微电子装备有限公司 | Gas mixing device and semiconductor process apparatus |
Also Published As
Publication number | Publication date |
---|---|
CN202096901U (en) | 2012-01-04 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
MK4K | Expiration of patent term of a granted utility model |