M429692 • 五、新型說明： 【新型所屬之技術領域】 本創作係涉及一種基板輸送設備之校正裝置，特別是 指一種非接觸式校正裝置之創新結構型態設計者。 .【先前技術】 按’玻璃基板（本創作簡稱基板）於加工製程中，不 同加工點之間通常必須通過輸送設備進行基板的輸送位移 ’而基板在到達下一個加工點之前，若該加工點具有精準 定位的需求，則必須於該加工點前置處設一校正裝置，以 對基板先進行擺放角度及中心位置的校正校直動作。 承上，所述校正裝置的習知結構設計上，其感應功能 部份通常係採用接觸式感應器來達成，亦即藉由玻璃基板 邊際碰觸感應器的型式來產生訊號，以作為校正計算的參 考數值’然而，此種習知校正裝置於實際應用經驗中卻發 現，所述接觸式感應器碰觸玻璃基板過程中，往往容易因 碰觸力道過大或碰觸角度偏差而造成玻璃基板表面的刮傷 現象，此刮傷現象縱然是輕微的，但對於某些高品質要求 的成品而言’可能因此無法通適品檢而成為瑕疵不良品， 鲁進而造成無謂的損失浪費與成本的提高，實有必要再加以 改善突破。 是以，針對上述習知基板輸送設備之校正結構所存在 之問題點，如何開發一種更具理想實用性之創新結構，實 係相關業者須再努力研發突破二目標及方向。 有鑑於此’創作人本於多争從事相關產品之製造開發 與設計經驗’針對上述之目標，詳加設計與審慎評估後， 終得，確具實用性之本創作。 【新逛内容】 M429692 本創作之主要目的，係在提供一種基板輸送設備之非 接觸式权正裝置，其所欲解決之問題點，係針對習知所存 在之問題點加以改良突破； 點，主要係藉由所述非接觸 台’包括一旋轉缸以及設於 該升降台頂端形成一置放台 導轨座，設於該可升降旋轉 降旋轉台能夠沿著該平移導 狀態；一第一非接觸式感應 一側向位置處，包括一第一 退平移之一第一活動架以及 非接觸式感應件所構成，所 過非接觸形式感應基板的擺 轉動校正基板擺放角度的依 設於該可升降旋轉台的第二 '能夠沿著該第二軌道進退 於該第二活動架上之第二非 第二轨道與前述第一轨道的 所述第二非接觸式感應件能 擺放中心位置狀態，以作為 台校正基板中心位置的依據 作對照先前技術而言，俾可 ’即能達到精準校正定位基 之實用進步性與較佳產業利 本創作解決問題之技術特 式权正裝置包括一可升降旋轉 該旋轉缸上之一升降台，其中 面以供基板放置其上；一平移 台之旋轉缸底部’構成該可升 軌座進行預設軸向平移動作之 Φ組，設於該可升降旋轉台的第 執道、能夠沿著該第一執道進 組設於該第一活動架上之第一 述第一非接觸式感應件能夠通 放角度狀態’以作為該旋轉缸 據’一第二非接觸式感應組， 側向位置處’包括一第二軌道 平移之一第二活動架以及組設 接嗶式感應件所構成；其中該 延伸方向係互成垂直關係，又 攀夠通過非接觸形式感應基极的 該平移導轨座帶動可升降旋轉 ;藉此創新獨特設計，使本創 在完全不碰觸到基板的情況下 板而大幅提昇產品品質與良率 用效益。 【實施方式】 請參閱第1至8圖所示， 接觸式校正裝置之較佳實施例 係本創作基板輸送設備之非 ’惟此等實施例僅供說明之 4 在專利申請上並不受此結構之限制。所述基 &之非接觸式校正裝置，係專用以校正基板〇1於 ^裎中的擺放角度及中心位置；該非接觸式校正 M429692 可升降旋轉台10，包括一旋轉缸11以及設 11上之一升降台12，其中該升降台12頂端形成 3以供基板01放置其上；其中該置放台面13可 -吸部14 ’藉以穩固基板〇1放置狀態；又其中如 該升降台12呈可控制基板01升降作動型態； _ -平移導執座2。’設於該可升降旋轉台1〇之 部，構成該可升降旋轉台10能夠沿著該平移導 仃預設軸向平移動作之狀態（如第5圖所示）； 一第一非接觸式感應組30，如第3圖所示， 夠：ί轉台1〇的第-側向位置處，包括-第-軌 該第一執道31進退平移之一第一活動架32 诚;第—活動架32上之第一非接觸式感應件33所 的Ϊ I ΐ接觸式感應件33能夠通過非接觸形式感 角二 度狀態，以作為該旋轉缸U轉動校正基 零角度的依據； 愿殂4U ’如第乙 升降旋轉台10的第-相M429692 • V. New description: [New technical field] This creation relates to a correction device for substrate conveying equipment, in particular to an innovative structural type designer of a non-contact correction device. [Prior Art] According to the 'glass substrate (referred to as the substrate for short) in the processing process, the transfer of the substrate must usually be carried out between the different processing points by the transport device', and before the substrate reaches the next processing point, if the processing point For precise positioning requirements, a calibration device must be placed at the front of the processing point to correct the alignment angle of the substrate and the center position. In the conventional structure design of the calibration device, the sensing function portion is usually achieved by using a contact sensor, that is, the signal is generated by the type of the glass substrate marginal touch sensor as a correction calculation. The reference value of the present invention is found in the practical application experience. However, in the process of touching the glass substrate, the contact sensor is often prone to the surface of the glass substrate due to excessive contact force or contact angle deviation. The scratching phenomenon, although the scratching phenomenon is slight, but for some high-quality finished products, it may not be able to pass the quality inspection and become a defective product, which in turn causes unnecessary loss of waste and cost. It is necessary to improve the breakthrough. Therefore, in view of the problems existing in the above-mentioned correction structure of the conventional substrate transporting device, how to develop an innovative structure that is more ideal and practical, and the relevant industry must further strive to develop the breakthrough goal and direction. In view of this, the creators are eager to engage in the manufacturing development and design experience of related products. In view of the above objectives, after detailed design and careful evaluation, the original and practical creations are made. [New Content] M429692 The main purpose of this creation is to provide a non-contact weighting device for substrate transport equipment. The problem to be solved is to improve the problem of the existing problems; Mainly by the non-contact station 'including a rotary cylinder and a top of the lift platform to form a placement rail seat, the swingable lowering rotary table can be arranged along the translational state; a first The non-contact sensing side position includes a first movable frame and a non-contact sensing member, and the pendulum rotation correction substrate of the non-contact type sensing substrate is disposed according to the angle of the substrate a second 'the second non-second track capable of advancing and retreating along the second track along the second track and the second non-contact type sensing member capable of placing the center of the first track The positional state is used as the basis for correcting the center position of the substrate as compared with the prior art, and the utility model can achieve the practical progress of the accurate correction of the positioning base and the better industrial profit creation solution. The technical special right device of the problem comprises a lifting and lowering rotation platform of the rotary cylinder, wherein the surface is for the substrate to be placed thereon; the bottom of the rotary cylinder of the translation stage constitutes the adjustable rail seat for a predetermined axial direction a Φ group of the translational action, the first non-contact sensing member disposed on the first movable frame and capable of being placed on the first movable frame along the first way The angle state 'constructs the rotating cylinder as a second non-contact sensing group, the lateral position includes a second movable frame of the second track translation, and the assembled contact sensing member; wherein the extension The direction of the system is perpendicular to each other, and the translational rail seat of the non-contact type sensing base is driven to be lifted and lowered; thereby, the innovative and unique design enables the board to be greatly reduced without touching the substrate. Improve product quality and yield efficiency. [Embodiment] Referring to Figures 1 to 8, the preferred embodiment of the contact correction device is not the case of the substrate transfer device. However, these embodiments are for illustrative purposes only. Structural limitations. The non-contact correction device of the base & is dedicated to correct the placement angle and the center position of the substrate 于1 in the ;1; the non-contact correction M429692 can lift the rotary table 10, including a rotary cylinder 11 and a set 11 a lifting platform 12, wherein the top end of the lifting platform 12 is formed 3 for the substrate 01 to be placed thereon; wherein the placing table 13 can be used by the suction portion 14' to stabilize the substrate 〇1; and wherein the lifting table 12 is The control substrate 01 is lifted and actuated; _ - the translation guide seat 2. 'provided in the movable turret 1 ,, constituting the state in which the elevating rotary table 10 can be axially translated along the translation guide (as shown in FIG. 5); a first non-contact type The sensing group 30, as shown in FIG. 3, is sufficient for: 第 turntable 1〇 at the first lateral position, including - first rail, the first lane 31 forward and backward translation one of the first movable frame 32; The ΪI ΐ contact-type sensing member 33 of the first non-contact sensing member 33 on the frame 32 can pass the non-contact form-angle second-degree state as the basis for rotating the correction base zero angle of the rotary cylinder U; 'The first phase of the B-lifting rotary table 10
罘—側向位置處，包括一第J 多句沿著該第二轨道41 %、p τ你 ^ 杌道41進退平移之一第二活動！ 於該第二活動架42上 中今楚-絲、# /Μ & 第一非接觸式感應件4 、月j述第一軌道31的延伸方f 關係，又所述第二非垃 咸處# 1 Λ1 非接觸式感應件43能夠通玉 感應基板01的擺放中 * ^ β r、位置狀態，以作為該j 帶動可升降旋轉^ 叹锷Q 10奴正基板01中心位置的4 其中該第一非垃. 并接觸式感應組30之第一活j 板輸送設 輸送設備 裝置A包 於該旋轉 一置放台 設有負壓 第3圖所 旋轉缸11 執座20進 設於該可 道31、能 以及組設 構成，所 應基板01 板01擺放 設於該可 道41、能 以及組設 構成；其 互成垂直 接觸形式 導執座20 〇 32以及第 M429692 _读觸式感應组40之第二活動架42上均可包括間隔分開 第:支架部321 ' 421 ，以使該第一非接觸式感應件33與 於非接觸式感應件43可為二單元感應器331 、431分設 此—支架部321 、421 ，且二單元感應器331 、431彼 之間可呈别後錯置的相對關係；其中所述單元感應器3 ' 431可為光電雷射感應器。 籍由上述結構組成設計，茲就本創作之作動情形說明 如下： 如第7圖所示’所述單元感應器33丨為前後間隔配置 作惡’ 2能夠藉由其偏移距離或角度（如第1圖m所示） —為預設數值，藉此當該第一非接觸式感應組30沿著該第 。。執道31向基板移動時（如箭號L2所示），該單元感應 斋331可發出雷射光且藉由碰觸到.基板叽產生反射益接收 ^技術，點（如箭號L1所示），達到以非接觸式感應基板 1之$悲；如第8圖（a)所示’若所述基板〇1擺放角度不 確時’該單元感應器331所感應的數值則會不符合預設 數值’而會啟動旋轉缸11轉動（如第4圖所示）並校正基 •板01至正確角度（如第8圖（b)箭號L3所示）。 如第1圖所示’其中該單元感應器431之作動原理係 與上述單元感應器331相同’所述單元感應器431亦為前 後間隔配置型態，而能夠藉由其偏移距離或角度（如第1 圖H2所不）作為預設數值’藉此當該第二非接觸式感應組 40沿著該第二軌道41向基板〇1移動時（如第8圖（c)箭號 U所示）’該單元感應器431能夠以非接觸式感應基板〇1 、擺放中L位置並不正轉’而啟動平移導執座20帶動可升 降旋轉台10校正基板01至中心位置（如第8圖（d)箭號L5 所示）。 … M429692 ’ 功效說明： 本創作功效增進之事實如下： 本創作所述「基板輸送設備之非接觸 要藉由第一非接觸式感應組及第二非接觸 接觸形式感應基板的擺放角度與中心位置 紅、平移導執座及可升降旋轉台進行校: 獨特結構組成型態設計，使本創作對照【 ，知接觸式感應器容易因碰觸到玻璃基板 ，點來說’俾可在完全不碰觸到基板的情 鲁精準校正定位基板而大幅提昇產品品質與 性與較佳產業利用效益。 ' 上述實施例所揭示者係藉以具體說aj 雖透過特定的術語進行說明，告不处以士 範ffi ;熟悉此項技術領；之：士， ϋϊΐ: Ϊ後對其進行變更與修改“ 與修改，涵蓋於如后所述， 疋之耗轉中。 式校正裝置」主 式感應組通過非 狀態，以使旋轉 校直動作之創新 先前技術】所提 而產生刮傷之問 況下，即能達到 良率之實用進步 本創作，且文中 限定本新型創作 可在瞭解本創作 到等效目的，而 請專利範圍所界 M429692 圖式簡單說明】 第 1 圖 本創 作 之 平 面 俯 視 圖 第 2 圖 係第 1 圖 之 X 柏 方 向 第 3 圖 係第 1 圖 之 Y 抽 方 向 第 4 圖 本創 作 可 升 降 旋 轉 台 第 5 圖 本創 作 平 移 導 執 座 嫌 示意 圖 0 第 6 圖 •本創 作 基 板 擺 放 角 度 視圖 0 第 7 圖 :本創 作 單 元 感 應 器 通 第 應狀 態 示 意 圖 〇 8 圖 :本創 作 可 升 降 旋 轉 台 移導 執 座 帶 動 可 升 降 作動示意圖。 平面側視圖。 平面側視圖。 之旋轉作動示意圖。 動可升降旋轉台移動之作動 過非接觸形式感應基极罘—The lateral position, including a J-th sentence along the second track 41%, p τ you ^ 41 41 advance and retreat one of the second activities! On the second movable frame 42, the present non-contact sensing element 4, the first non-contact sensing element 4, the extension of the first track 31, and the second non-salty # 1 Λ1 The non-contact sensing member 43 can pass the position of the ^ j β in the placement of the jade sensing substrate 01, and the position state, as the j can drive the lifting and lowering rotation ^ 锷 锷 Q 10 slave positive substrate 01 central position 4 which The first non-la. The first movable j-plate transporting device of the contact-sensing group 30 is provided with a transport device A. The rotating one is provided with a negative pressure. The rotating cylinder of the third figure is mounted on the rotating cylinder 11 The circuit 31, the energy and the group structure, the substrate 01 plate 01 is disposed on the channel 41, the energy and the group configuration; the vertical contact form of the guide seat 20 〇 32 and the M429692 _ touch-sensitive sensor The second movable frame 42 of the group 40 can include a spacer portion 321 ' 421 so that the first non-contact sensing member 33 and the non-contact sensing member 43 can be two-unit sensors 331 and 431. The bracket portions 321 and 421 are separately disposed, and the relative relationship between the two unit sensors 331 and 431 can be misplaced. Wherein the unit sensor 3' 431 can be a photoelectric laser sensor. Based on the above-mentioned structural composition design, the following is the description of the operation of the present creation: As shown in Fig. 7, the unit sensor 33 is configured to be erected by the front and rear spacing, and can be offset by distance or angle (such as 1 m) - is a preset value whereby the first non-contact sensing group 30 follows the first. . When the way 31 moves toward the substrate (as indicated by the arrow L2), the unit sensing 331 can emit laser light and generate a reflection benefit receiving technique by touching the substrate, as indicated by the arrow L1. , the sorrow of the non-contact sensing substrate 1 is reached; as shown in Fig. 8(a), 'If the substrate 〇1 is placed at an incorrect angle, the value sensed by the unit sensor 331 does not meet the pre-compensation. Setting the value 'will initiate rotation of the rotary cylinder 11 (as shown in Figure 4) and correct the base plate 01 to the correct angle (as shown in Figure 8 (b) arrow L3). As shown in FIG. 1 , the operation of the unit sensor 431 is the same as that of the unit sensor 331. The unit sensor 431 is also a front-rear configuration, and can be offset by an angle or an angle ( As shown in FIG. 1H2, as a preset value', when the second non-contact sensing group 40 moves along the second track 41 toward the substrate 〇1 (as shown in FIG. 8(c), the arrow U The unit sensor 431 can start the translation guide seat 20 with the non-contact sensing substrate 〇1 and the L position in the placement, and the translation guide 20 can be driven to rotate the rotary table 10 to align the substrate 01 to the center position (eg, 8th) Figure (d) is shown by the arrow L5). ... M429692 ' Efficacy Description: The fact that the creative effect is enhanced is as follows: The non-contact of the substrate transporting device described in the present application is to sense the placement angle and center of the substrate by the first non-contact sensing group and the second non-contact contact form. Position red, translation guide seat and liftable rotary table for school: Unique structure composition design, make this creation contrast [, know the contact sensor is easy to touch the glass substrate, point to say '俾 can not at all Touching the substrate to accurately correct the positioning of the substrate to greatly improve product quality and performance and better industrial utilization benefits. The above embodiments show that aj is specifically explained by specific terms, Ffi; familiar with this technology; it: Shi, ϋϊΐ: Ϊ after the change and modification of it and the modification, covered as described later, 疋 耗 耗 。. The correcting device "the main sensing group passes the non-state, so that the innovative prior art of the rotating straightening action" can cause scratches, which can achieve the practical progress of the yield, and the present invention limits the novel The creation can understand the creation to the equivalent purpose, but the scope of the patent scope is M429692. The schematic diagram of the first picture is the second plan of the first picture. The first picture is the X-ray direction, the third picture is the first picture. Y pumping direction 4th drawing This creation can be raised and lowered rotary table 5th picture creation translation guide seat schematic diagram 0 Figure 6 • The original substrate placement angle view 0 Figure 7: This creative unit sensor pass state diagram 〇8 Figure: This creation can be lifted and lowered by the rotary table to guide the lift and move. Plane side view. Plane side view. Schematic diagram of the rotation. Moving up and down the rotating table to move through the non-contact form sensing base
【主要元件符號說明】 非接觸式校正裝置 基板 可升降旋轉台 鲁旋轉紅 升降台 置放台面 負壓抽吸部 平移導軌座 第一非接觸式感應組 第一執道 第一活動架 支架部 第一非接觸式感應件 單元感應器 M429692 第二非接觸式感應組 4 0 第二執道 4 1 第二活動架 4 2 支架部 4 2 1 第二非接觸式感應件 4 3 單元感應器 4 3 1[Main component symbol description] Non-contact correction device substrate can be lifted and lowered Rotary table Rotary red lifting table placement table negative pressure suction part translation rail seat first non-contact induction group first road first movable frame bracket part A non-contact sensing unit sensor M429692 second non-contact sensing group 4 0 second lane 4 1 second movable frame 4 2 bracket portion 4 2 1 second non-contact sensing member 4 3 unit sensor 4 3 1