五、新型說明： 【新型所屬之技術領域】 本創作係關於一種晶圓盒底座，特別是一種使用透 明底板以方便由外部檢視底座内部元件情況、並於透明 底板與轉動開關之間加設耐磨環來避免透明底板與轉 動開關因磨擦產生粉塵的晶圓盒底座。 【先前技術】 為避免晶圓在運送過程中受到污染及碰撞，現有晶 圓代工廠會利用一可運送及可密封的晶圓盒來放置及 運送晶圓。 請參考第1圖所示，其揭示一種習用的晶圓盒，其 包含一盒罩A、一晶圓放置架B及一晶圓盒底座C。該 晶圓盒底座C具有一本體91，該本體91為一内部中空 之盒體，其内部設有一閂鎖機構92，其底部設有一底 板93。該盒罩A為一透明材質之盒罩A，其套設於該 本體91上形成容置空間。該晶圓放置架B設於該本體 91之頂面，用以承載複數個晶圓（未繪示）。 如第1圖所示，該閂鎖機構92包含一轉動開關921 及二對稱設置之閂鎖板922。該轉動開關921設有一樞 接孔921a、二凸輪921b及二驅動銷孔921c。該樞接孔 921a設於該轉動開關921之中心，該二凸輪921b係對 稱的設在該樞接孔921a之兩侧，該二驅動銷孔921c分 別係為一盲孔，設於該轉動開關921之底部，且分別伸 M429684 入該二凸輪921b之内部。該閂鎖板922設有一抵接邊 922a及二卡掣部922b。 如第1圖所示，該本體91内部中央設有一枢接座 911，該底板93中央設有一軸孔931，一樞接件a從底 部向上依序穿過該底板93之軸孔931、該轉動開關921 之柩接孔921a及該本體91之樞接座911。該底板93 進一步設有二弧型孔932,以供一外部之驅動裝置（未繪 示）穿過該二弧型孔932而插設於該轉動開關921之該 二驅動銷孔921c内，以便控制該轉動開關921做一限 定角度之轉動，該閂鎖機構92具有一縮入位置（解鎖狀 態）及一伸出位置（扣鎖狀態）。 請再參考第1圖所示，該閂鎖機構92之該二閂鎖板 922係對稱的設於該轉動開關921之兩側，受到彈性件 (未繪示）的作用，該抵接邊922a係保持抵接於該轉動開 關921之凸輪921b上。另外，相對於該卡掣部922之 位置，該本體91二相對之側面共開設有四開口 912。 當該閂鎖機構92處於解鎖狀態時，各該卡掣部922b會 位於該-本體91之各該開口 912之内部；當轉動開關921 受外部驅動做一限定角度之轉動時，該凸輪921b抵接 該閂鎖板922之抵接邊922a，以推動該二閂鎖板922 分別向外伸出一段距離。因此，當該閂鎖機構92處於 扣鎖狀態時，各該卡掣部922b會伸出該本體91之各該 開口 912之外部，並且扣住該盒罩A對應設置的卡槽 A1内，進而使該盒罩A與該晶圓盒底座C形成密封之 4 M429684 狀態。 如上所述，該晶圓盒是藉著該閂鎖機構92來確保該 盒罩A舆該晶圓盒底座C之鎖固來形成密閉。然而， 該閂鎖機構92會因為内部元件長期使用而產生損壞， 進而造成該閂鎖機構92沒有確實將該盒罩A與該晶圓 盒底座C鎖固。由於缺乏檢視此狀態之機制，使得在搬 運該未確實鎖固的晶圓盒時，因為晶圓盒密封性不足， 而使該晶圓盒内之晶圓受到微粒污染。或者，由於搬運 時有可能是以該盒罩A之把手（未繪示）作為支撐，更可 能因為該盒罩A與該晶圓盒底座C意外分開，造成該 晶圓盒底座C連同該晶圓放置架B及晶圓（未繪示）掉 落，造成晶圓（未續示）之損壞。 另外，該晶圓盒底座C的底板9 3係以不透明材料製 成，因此無法直接由外部檢視該晶圓盒底座C之内部元 件是否良好堪用。結果，為了確認内部元件是否良好堪 用，必需拆下該底板93進行檢視，但此拆卸作業容易 造成内部被污染，進而可能提高後續裝載晶圓時晶圓被 污染的風險，且若重新組裝該底板93鎖固不確實時， 該晶圓盒底座C的底板93可能在使用期間意外掉落， 而造成晶圓被污染或摔毁的情形。此外，長期使用該晶 圓盒時，由於該轉動開關921之底部與該底板93不斷 接觸與摩擦，有可能造成微粒（particle)而污染該晶圓 盒。習用之解決方法為：在該底板93之頂面摩擦處貼 設一鐵氟龍材質之墊片933，以減少摩擦造成微粒的情 5 形，但在使用一段時間之後，該墊片933可能破裂毁 損，故仍需更換該墊月933。 故，有必要提供一種晶圓盒底座，以解決習知技術 所存在的缺陷。 【新型内容】 •本創作之主要目的在於提供一種晶圓盒底座，其係 使用透明底板，以方便由外部直接檢視該晶圓盒底座之 内部元件是否良好堪用，並可由外部直接確認盒罩與晶 圓盒底座鎖固之狀態是否無誤，進而減少拆裝底板之需 求，並避免因重新組裝底板鎖固不確實而造成的底板與 該晶圓盒底座意外分開，而造成晶圓被污染或摔毀的情 形。 本創作之次要目的在於提供一種晶圓盒底座，其係 利用一耐磨耗之耐磨環設置於轉動開關底部與透明底 板之間，以減少上述兩者因摩擦而產生微粒的情形，進 而減少該晶圓盒受到微粒污染的情形。 本創作之另一目的在於提供一種晶圓盒底座，其中 可在該透明底板的成形製造階段將已製好的支撐環部 份加入，以達到使該透明底板及支撐環結合成一體，藉 此達到最佳的結合效果。 為達上述之目的，本創作提供一種晶圓盒底座，其 包含一本體、一閂鎖機構及一透明底板。該本體與一盒 罩及一晶圓放置架組合，共同形成一用以承載晶圓之晶 圓盒。該至少二開口對稱的設於該本體之兩側面。該閃 鎖機構設於該本體之内，其具有至少二卡掣部可伸出該 至少二開口，以固鎖該盒罩。該透明底板設於該本體 及閃鎖機構的底部，該透明底板係方便由外部直接檢 視該底座内部的元件使用情形，以確保該閂鎖機構是： 確實固鎖該盒罩。 此外，於該透明底板與轉動開關之間加設-耐磨環 來避免該底板與轉動開關因磨擦產生粉塵的目的。藉 =主可確保该盒罩與該晶81盒底座固定與密封，以免搬 損=罩與晶圓盒底座意外分開，造成晶圓被污染或者 之門且右幻作的a施例中，該轉動開關與該透明底板 <间具有一耐磨環。 合成在=創作的—實施例中，該耐磨環與該透明底板結 【實施方式】 明顯創作之上述及其他目的、雜、優點能 圖弋# ⑽特舉本創作較佳實㈣，並配合所 圖式，作詳細說明如下。 請參考第2圖所示，苴 圓盒之立體分解圓士 作第—貫施例之 盒罩Α、— ΘΡ1。本創作第—實施例之晶圓盒包含 旱 一日日圓放置架Β及—曰圓人 底座D具有—切】及曰曰0益底座D。該晶圓 本體1，該本體1為一内部中空之盒體 M429684 其2部設有一閂鎖機構2，其底部設有一透明底板3 ^ 該盒罩A為一透明材質之盒罩A，其套設於該本體i 上形成容置空間。該晶圓放置架B設於該本體1之頂 面，用以承載複數個晶圓（未繪示）。 如第2圖所示，該閂鎖機構2包含一轉動開關21及 -對稱設置之卩鎖板22。該轉動關21 有-樞接孔 —凸輪21 b及二驅動銷孔21 c。該樞接孔2丨a設於 該轉動開關21之中心，該二凸輪m係對稱的設在該 樞接孔21a之兩侧，該二驅動銷孔21〇分別係為一盲 孔，設於該轉動開關21之底部，且分別伸入該二凸輪 21b之内部。該⑽板η設有—抵接邊瓜及二卡擎 部 22b 〇 如第2圖所示，該透明底板3中央設有一環座33， 該環座33係-環型凹槽’其係選擇以卡掣、螺固、共 射成型、超音波或黏膠之方式結合—耐磨冑34，該環 座33之中央凸設有一島狀凸部(未標示），其上開設有 一軸孔31。該本體1内部中央設有一樞接座n。再者， 一抱接件a從底部向上依序穿過該透明底板3之抽孔 31、該轉動開關2】之樞接孔21a及該本體丨之樞接座 η。該透明底板3之環座33的島狀凸部進一步設有二 弧型孔32’以供-外部之驅動裝置（未綠示）穿過該二弧 型孔32而插設於該轉動開關21之該二驅動銷孔… 内，以便控制該轉動開關21做—限定角度之轉動，該 閃鎖機構2具有-縮人位置（解鎖狀態）及—伸出位置 8 M429684 (扣鎖狀態）。 作二，該耐磨環34較佳係以耐磨耗之材” :之广:置與轉動開關21相同，故該轉動開關 環34相較其他材質^^接觸及磨擦。目為該耐磨 關2!底部與該耐磨产、3 4 ^門所以能避免因為該轉動開 段可將已製好的耐磨淨3=底板3 :成形製造階 2。3及耐磨環34結合成-體，藉此達到最佳的結合 請再參考第2圖所示，該_機構2之該二閃鎖板 22係對稱的設於該轉動開關21之兩侧，受.未 繪W的作用，該抵接邊22a係保持抵接於該轉動開關 21之凸輪21b上。另外，該本體！二相對之側面共開 設有四開口 12，該些開口 12與該些卡掣部22b之位置 與數量是姆顧，雖財實_中_㈣是四 口 12與ng個卡掣部22b，但本創作並不限制該開口 η 與该卡掣部22b之數量’至少二個開口 12與卡掣部饥 是基本的需要。 ^參考第2、3及4圖所示’其中第3圖揭示本創作 第-實施例之晶US底座之解鎖狀態之俯視圖，第4圖 揭示本創作第-實施例之晶圓盒底座之扣鎖狀態之俯 視圖。當該閂鎖機構2處於一解鎖狀態時， 对位於該本體丨之各該開口 12之内部;二 9 M429684 關21受外部驅動做一限定角度之轉動，該凸輪21b抵 接該閂鎖板22之抵接邊22a，推動該二閂鎖板22分別 向外伸出一段距離。因此，當該閂鎖機構2處於一扣鎖 狀態時，各該卡掣部22b會伸出該本體1之各該開口 12之外部，並且扣住該盒罩A對應設置的卡槽A1内， 進而使該盒罩A被鎖固於該晶圓盒底座D上，以形成 密封之狀態。 如上所述，相較於習用之晶圓盒，本創作的晶圓盒 底座藉由該透明底板係以一透明材料所製成，透過該透 明底板來檢視該底座内部的使用情形，可以簡單明瞭的 確認該閂鎖機構是否確實固鎖該盒罩。藉此，可確保該 盒罩與該晶圓盒底座確實固定與密封，以免搬運時盒罩 意外脫落，造成晶圓被污染或者損壞，亦可藉此簡易確 認該晶圓盒底座内部之閂鎖機構的相官員建是否堪用 無誤。此外本創作亦利用一对磨耗之而才磨環增加設置於 轉動開關底部與透明底板之間，以減少上述兩者因摩擦 而產生微粒的情形，進而減少該晶圓盒受到微粒污染的 情形。 雖然本創作已以較佳實施例揭露，然其並非用以限 制本創作，任何熟習此項技藝之人士，在不脫離本創作 之精神和範圍内，當可作各種更動與修飾，因此本創作 之保護範圍當視後附之申請專利範圍所界定者為準。 【圖式簡單說明】 10 M429684 第1圖：習用之晶圓盒之立體分解圖。 第2圖：本創作第一實施例之晶圓盒之立體分解 圖。V. New description: [New technical field] This is a kind of wafer cassette base, especially a transparent bottom plate to facilitate the external inspection of the internal components of the base, and to provide resistance between the transparent bottom plate and the rotary switch. Grinding ring to avoid the transparent base plate and the rotary switch to generate dust due to friction of the wafer cassette base. [Prior Art] In order to avoid contamination and collision of wafers during transportation, existing wafer foundries use a transportable and sealable wafer cassette to place and transport wafers. Referring to FIG. 1, a conventional wafer cassette is disclosed, which includes a box cover A, a wafer placement frame B, and a wafer cassette base C. The pod base C has a body 91. The body 91 is an inner hollow box body having a latch mechanism 92 disposed therein and a bottom plate 93 at the bottom. The box cover A is a transparent material cover A, which is sleeved on the body 91 to form an accommodation space. The wafer placement frame B is disposed on a top surface of the body 91 for carrying a plurality of wafers (not shown). As shown in FIG. 1, the latch mechanism 92 includes a rotary switch 921 and two latch plates 922 symmetrically disposed. The rotary switch 921 is provided with a pivot hole 921a, two cams 921b and two drive pin holes 921c. The pivoting holes 921a are disposed at the center of the rotary switch 921. The two cams 921b are symmetrically disposed on opposite sides of the pivoting hole 921a. The two driving pin holes 921c are respectively formed as a blind hole. At the bottom of the 921, M429684 is respectively inserted into the interior of the two cams 921b. The latching plate 922 is provided with an abutting edge 922a and a second latching portion 922b. As shown in FIG. 1 , a pivoting seat 911 is disposed in the center of the main body 91. A pivot hole 931 is defined in the center of the bottom plate 93. A pivoting member a sequentially passes through the shaft hole 931 of the bottom plate 93 from the bottom. The splicing hole 921a of the switch 921 and the pivoting seat 911 of the body 91 are rotated. The bottom plate 93 is further provided with two arc-shaped holes 932 for an external driving device (not shown) to pass through the two arc-shaped holes 932 and inserted into the two driving pin holes 921c of the rotary switch 921 so as to The rotary switch 921 is controlled to rotate at a limited angle, and the latch mechanism 92 has a retracted position (unlocked state) and an extended position (locked state). Referring to FIG. 1 again, the two latching plates 922 of the latching mechanism 92 are symmetrically disposed on opposite sides of the rotating switch 921, and are subjected to an elastic member (not shown). The abutting edge 922a It is kept in contact with the cam 921b of the rotary switch 921. In addition, a plurality of openings 912 are defined in the opposite sides of the body 91 relative to the position of the latch portion 922. When the latching mechanism 92 is in the unlocked state, each of the latching portions 922b is located inside each of the openings 912 of the body 91; when the rotary switch 921 is externally driven to rotate at a limited angle, the cam 921b is abutted The abutting edge 922a of the latching plate 922 is coupled to push the two latching plates 922 outwardly outwardly apart. Therefore, when the latching mechanism 92 is in the latching state, each of the latching portions 922b protrudes from the outside of the opening 912 of the body 91, and fastens the corresponding slot A1 of the box cover A, thereby further The box cover A is sealed with the wafer cassette base C in a state of 4 M429684. As described above, the wafer cassette is secured by the latch mechanism 92 to ensure that the cassette cover A is locked by the cassette base C. However, the latch mechanism 92 can be damaged by the long-term use of the internal components, thereby causing the latch mechanism 92 to not securely lock the cartridge cover A with the wafer cassette base C. Due to the lack of a mechanism for reviewing this state, the wafer inside the wafer cassette is contaminated by particles when the unsecured wafer cassette is transported due to insufficient sealing of the wafer cassette. Alternatively, since it may be supported by the handle (not shown) of the cover A during transportation, it is more likely that the cover C is accidentally separated from the base C of the cassette, and the base C of the cassette is combined with the crystal. The circular placement frame B and the wafer (not shown) are dropped, causing damage to the wafer (not renewed). In addition, the bottom plate 93 of the pod base C is made of an opaque material, so that it is not possible to directly view the internal components of the pod base C directly from the outside. As a result, in order to confirm whether the internal components are good or not, the bottom plate 93 must be removed for inspection, but the disassembly operation is likely to cause internal contamination, which may increase the risk of wafer contamination during subsequent loading of the wafer, and if the assembly is reassembled When the bottom plate 93 is not securely locked, the bottom plate 93 of the pod base C may accidentally fall during use, causing the wafer to be contaminated or broken. Further, when the wafer cassette is used for a long period of time, since the bottom of the rotary switch 921 is constantly in contact with and rubbed against the bottom plate 93, it is possible to cause particles to contaminate the wafer cassette. The conventional solution is to apply a Teflon-shaped gasket 933 to the top surface of the bottom plate 93 to reduce the frictional shape of the particles, but after using for a period of time, the gasket 933 may be broken. Damaged, so the padding 933 still needs to be replaced. Therefore, it is necessary to provide a wafer cassette base to solve the drawbacks of the prior art. [New Content] • The main purpose of this creation is to provide a wafer cassette base that uses a transparent bottom plate to facilitate direct inspection of the internal components of the wafer cassette base from the outside, and to directly confirm the box cover from the outside. Whether the state of the wafer cassette base is locked or not, thereby reducing the need to disassemble the bottom plate, and avoiding accidental separation of the bottom plate from the base of the wafer cassette caused by the unfixed locking of the bottom plate, thereby causing the wafer to be contaminated or The situation of the crash. The second objective of the present invention is to provide a wafer cassette base which is disposed between the bottom of the rotary switch and the transparent bottom plate by using a wear-resistant wear ring to reduce the occurrence of particles due to friction between the two. Reduce the contamination of the wafer cassette by particles. Another object of the present invention is to provide a wafer cassette base in which a prepared support ring portion can be added during the forming and manufacturing stage of the transparent substrate to achieve integration of the transparent substrate and the support ring. Achieve the best combination. For the above purposes, the present invention provides a wafer cassette base that includes a body, a latch mechanism, and a transparent substrate. The body is combined with a box cover and a wafer placement frame to form a wafer box for carrying the wafer. The at least two openings are symmetrically disposed on both sides of the body. The flash lock mechanism is disposed within the body and has at least two latching portions extending from the at least two openings to lock the box cover. The transparent bottom plate is disposed at the bottom of the body and the flash lock mechanism. The transparent bottom plate facilitates direct inspection of component usage inside the base from the outside to ensure that the latch mechanism is: the glass cover is indeed locked. In addition, a wear ring is added between the transparent bottom plate and the rotary switch to prevent the bottom plate and the rotary switch from generating dust due to friction. Borrow = the main body can ensure that the box cover and the crystal 81 box base are fixed and sealed, so as to avoid the damage = the cover is accidentally separated from the wafer cassette base, causing the wafer to be contaminated or the door and the right side of the case, the The rotary switch has a wear ring between the transparent substrate and the transparent substrate. Synthetic in the creation of the embodiment, the wear ring and the transparent bottom plate [embodiment] obviously create the above and other purposes, miscellaneous, advantages and advantages of the figure # (10) specializes in this creation is better (four), and with The figure is described in detail below. Please refer to Figure 2, 立体 The three-dimensional decomposition of the round box is the first example of the box cover —, — ΘΡ1. The wafer cassette of the first embodiment of the present invention comprises a dry day Japanese yen placement frame and a 曰 round person base D having a cut-cut and a 曰曰 0 benefit base D. The wafer body 1 is an inner hollow box M429684. The two parts are provided with a latching mechanism 2, and a transparent bottom plate 3 is arranged at the bottom. The box cover A is a transparent material box cover A, and the sleeve is set. An accommodation space is formed on the body i. The wafer placement rack B is disposed on the top surface of the body 1 for carrying a plurality of wafers (not shown). As shown in Fig. 2, the latch mechanism 2 includes a rotary switch 21 and a symmetrical lock plate 22. The rotation switch 21 has a - pivot hole - a cam 21 b and two drive pin holes 21 c. The pivoting hole 2丨a is disposed at a center of the rotary switch 21, and the two cams are symmetrically disposed on two sides of the pivot hole 21a, and the two driving pin holes 21 are respectively formed as a blind hole, and are disposed on the pivot hole The bottom of the rotary switch 21 extends into the interior of the two cams 21b. The (10) plate η is provided with an abutting edge and a second card portion 22b. As shown in FIG. 2, a center of the transparent bottom plate 3 is provided with a ring seat 33, and the ring seat 33 is a ring-shaped groove. The wear-resistant cymbal 34 is combined with a card, a screw, a splicing, a supersonic or an adhesive. The center of the ring 33 is convexly provided with an island-shaped protrusion (not shown), and a shaft hole 31 is defined in the hole 33. . A pivoting seat n is disposed in the center of the body 1. Furthermore, a splicing member a sequentially passes through the punching hole 31 of the transparent bottom plate 3, the pivot hole 21a of the rotary switch 2, and the pivoting seat η of the main body 从 from the bottom. The island-shaped convex portion of the ring seat 33 of the transparent bottom plate 3 is further provided with a two-arc hole 32' for the external driving device (not shown) to be inserted into the rotary switch 21 through the two-arc hole 32. The two driving pin holes are configured to control the rotation switch 21 to perform a limited angular rotation. The flash lock mechanism 2 has a contracted position (unlocked state) and an extended position 8 M429684 (locked state). Secondly, the wear ring 34 is preferably made of wear-resistant material: wide: the same as the rotary switch 21, so the rotary switch ring 34 is in contact with and rubbed compared with other materials. Close 2! Bottom and the wear-resistant production, 3 4 ^ door can avoid avoiding the already-made wear-resistant net 3 = bottom plate 3: forming manufacturing step 2. 3 and wear ring 34 combined into - The body, thereby achieving the best combination, please refer to FIG. 2 again, the two flash lock plates 22 of the _ mechanism 2 are symmetrically disposed on both sides of the rotary switch 21, and are subjected to the function of not drawing W. The abutting edge 22a is abutted against the cam 21b of the rotary switch 21. In addition, the opposite sides of the main body are provided with four openings 12, the positions and the number of the openings 12 and the latch portions 22b. It is a m Gu, although the financial _ _ _ (four) is a four-port 12 and ng card 22 22b, but this creation does not limit the number of the opening η and the 掣 22b' at least two openings 12 and the 掣Hunger is a basic need. ^Refer to Figures 2, 3 and 4, where Figure 3 shows a top view of the unlocked state of the crystal US base of the first embodiment of the present invention, Figure 4 A top view showing the state of the buckle of the wafer cassette base of the present invention. When the latch mechanism 2 is in an unlocked state, it is located inside each of the openings 12 of the body ;; 2 9 M429684 The external drive is rotated at a limited angle, and the cam 21b abuts against the abutting edge 22a of the latching plate 22, pushing the two latching plates 22 outwardly outwardly apart. Therefore, when the latching mechanism 2 is in a In the latching state, each of the latching portions 22b extends out of the opening 12 of the body 1 and latches into the corresponding slot A1 of the box cover A, so that the box cover A is locked. The wafer cassette base D is formed in a sealed state. As described above, the wafer cassette base of the present invention is made of a transparent material through the transparent bottom plate, compared to the conventional wafer cassette. The transparent bottom plate can be used to check the inner working condition of the base, and it can be clearly and surely confirmed whether the latch mechanism actually locks the box cover, thereby ensuring that the box cover and the wafer cassette base are surely fixed and sealed, so as not to be carried. The cover is accidentally dropped, causing the wafer to be contaminated The damage is also used to easily confirm whether the official construction of the latch mechanism inside the wafer cassette base is correct. In addition, the creation also uses a pair of wear-receiving rings to increase the setting on the bottom of the rotary switch and the transparent bottom plate. In order to reduce the above-mentioned two cases of particles generated by friction, thereby reducing the contamination of the wafer cassette by particles. Although the present invention has been disclosed in the preferred embodiment, it is not intended to limit the creation, any familiarity The person of this skill can make various changes and modifications without departing from the spirit and scope of this creation. Therefore, the scope of protection of this creation shall be subject to the definition of the patent application scope attached. 】 10 M429684 Figure 1: An exploded view of a conventional wafer cassette. Fig. 2 is a perspective exploded view of the wafer cassette of the first embodiment of the present invention.
第3圖：本創作第 一實施例之晶圓盒底座之解鎖狀 態之俯視圖。 第4圖：本創作第 一實施例之晶圓盒底座之扣鎖狀 態之俯視圖。 【主要元件符號說明】 1 本體 11極接座 12開口 2 閂鎖機構 21轉動開關 21a柩接孔 21b凸輪 21c驅動銷孔 22 閂鎖板 22a抵接邊 22b卡掣部 3 透明底板 31 軸孔 32弧型孔 33環座 34.对磨環 91本體 911枢接座 912 開口 92閂鎖機構 921轉動開關 921a樞接孔 921b凸輪 921c驅動銷孔 922閂鎖板 922a抵接邊 922b卡掣部 93底板 11 M429684 931 軸孔 932 弧型孔 933 墊片 A 盒罩 A1 卡槽 B 晶圓放置架 C 晶圓盒底座(習用） D 晶圓盒底座(本創作) a 柩接件 12Fig. 3 is a plan view showing the unlocked state of the wafer cassette base of the first embodiment of the present invention. Fig. 4 is a plan view showing the buckle state of the wafer cassette base of the first embodiment of the present invention. [Description of main components] 1 body 11 pole socket 12 opening 2 latch mechanism 21 rotation switch 21a 孔 hole 21b cam 21c drive pin hole 22 latch plate 22a abutting edge 22b latching portion 3 transparent bottom plate 31 shaft hole 32 Arc hole 33 ring seat 34. Pair of grinding ring 91 body 911 pivoting seat 912 Opening 92 Latching mechanism 921 Rotary switch 921a Pivot hole 921b Cam 921c Driving pin hole 922 Latch plate 922a Abutting edge 922b Clamping part 93 Base plate 11 M429684 931 Axle hole 932 Arc hole 933 Gasket A Box cover A1 Card slot B Wafer placement frame C Wafer box base (used) D Wafer box base (this creation) a 柩 connector 12