M413964 五、新型說明： 【新型所屬之技術領域】 本新型是有關於一種資料收集裝置，特別是指一種能精 確管控並降低掃描成本的資料收集裝置。 【先前技術】 在半導體製造過程中，對於研發實驗、製程參數調整、 或是客戶要求的製程條件修正，半導體代卫廠會利用流程卡 (Run card)來詳細描述相應資訊，如半導體設備編號、晶圓 數量、晶BI編號、製程程式、或用於實驗的分劃板等資訊。 以測試半導體晶圓的晶片為主的測試流程為例，一晶片 盒所要經歷❹m站'氧機h及㈣錢载程式名都 紀錄在—張黏貼於該晶片盒上之流程卡上；線上的操作員便 依照流程卡上的指示，在指定的測試機台以指定的測試程式 進行測試。賴完錢，_作歧㈣試絲紀錄於該流 程卡上，然後依照該流程卡上的指示將該晶片盒送到負責 下一個測試站的操作員手中。 、 現有的流程卡記錄方式有以下的缺失： 1·人工作業難以管控：由於是操作員自行負責處理， 在工廠管理上無法精4管理。 掃&成本N·自動化輸人需要每—檢測站都配置— 條碼機，且將條碼機連接一電腦主機或者是個人數位助理 (PDA)以收集資料’但由於各檢測站太多且會分散在不同 地點’同時攜帶不便且撼古 一、 小便且擴充性低，且在較惡劣的工廠環境 時凡件成本及維護成本，讓整體自動化代價高昂。 3 M413964 【新型内容】 因此，本新型之目的，即在提供一種能精域管控並降低 掃描成本的資料收集裝置。 本新型的資料收集裝置是配合連接一條碼讀取器，該資 料收集裝置包含一輸入介面模組、一管控電路及一輸出介面 模組；該管控電路具有一單晶片控制器、二個雙工收發器及 一切換模組；該輸出介面模組具有二個RJ45連接器。 該輸入介面模組包括一 PS/2連接介面，該PS/2連接介 面電性連接該條碼讀取器，取得該條碼讀取器偵測產生的一 數據資料；該單晶片控制器控制各元件運作，並接收來自該 PS/2連接介面的數據資料；二個雙工收發器電性連接各該 RJ45連接器；二個RJ45連接器分別連接各該雙工收發器； 該切換模組介於該單晶片控制器及該等雙工收發器之間，包 括一切換路徑是讓各RJ45連接器分別傳輸兩線式RS422的 串列訊號，及另一切換路徑是讓該等RJ45連接器共同傳輸 四線式的RS422的串列訊號。 較佳的，該切換模組包括多條切換路徑及一跳接器，該 跳接器用以擇取任一切換路徑，其中一切換路徑是讓各該 RJ45連接器分別傳輸兩線式RS422的串列訊號，另一切換 路徑是讓該等RJ45連接器共同傳輸四線式的RS422的串列 訊號。 較佳的，該輸入介面模組還包括至少一接取外部電源以 供應該資料收集裝置的内部電力的USB連接介面；該管控 電路還包括一時鐘晶片及一備用電源，該備用電源是於該 4 M413964 USB連齡面沒有接取外部電源時供應該時鐘晶片及該單 晶片控制器運作時的所需電力。 較佳的，該資料收集裝置還配合連接一鍵盤，且該輸入 介面模組的的PS/2連接介面包括兩個PS/2連接器，-個 PS/2連接器連接該條碼讀取器， 另一個PS/2連接器連接該M413964 V. New description: [New technical field] The present invention relates to a data collecting device, in particular to a data collecting device capable of accurately controlling and reducing the scanning cost. [Prior Art] In the semiconductor manufacturing process, for the R&D experiment, process parameter adjustment, or customer-required process condition correction, the semiconductor manufacturer will use the Run card to describe the corresponding information, such as the semiconductor device number. Information on the number of wafers, the crystal BI number, the process program, or the reticle used for the experiment. For example, in the test flow of testing wafers of semiconductor wafers, a wafer cassette is subjected to the ❹m station 'oxygen machine h and (4) money-loaded program names are recorded on the process card attached to the wafer cassette; The operator will test the specified test program on the designated test machine according to the instructions on the process card. After the money is finished, the test strip is recorded on the process card, and then the wafer cassette is sent to the operator in charge of the next test station according to the instructions on the process card. The existing process card recording methods have the following shortcomings: 1. Manual operation is difficult to control: Because the operator is responsible for the processing, it is impossible to manage the factory management. Sweep & cost N · automated input needs to be configured for each - detection station - bar code machine, and the bar code machine is connected to a computer host or a personal digital assistant (PDA) to collect data 'but because each test station is too much and will be scattered In different locations, 'at the same time, it is inconvenient to carry and urinate, and the urination is low, and the cost of the parts and the maintenance cost in the harsh factory environment make the overall automation costly. 3 M413964 [New content] Therefore, the purpose of the present invention is to provide a data collecting device capable of controlling the fine field and reducing the scanning cost. The data collecting device of the present invention is coupled with a code reader, the data collecting device comprises an input interface module, a control circuit and an output interface module; the control circuit has a single chip controller and two duplexes The transceiver and a switching module; the output interface module has two RJ45 connectors. The input interface module includes a PS/2 connection interface electrically connected to the barcode reader to obtain a data data detected by the barcode reader; the single chip controller controls each component Operating and receiving data from the PS/2 connection interface; two duplex transceivers are electrically connected to the RJ45 connectors; two RJ45 connectors are respectively connected to the duplex transceivers; The single-chip controller and the duplex transceivers include a switching path for each RJ45 connector to transmit a two-wire RS422 serial signal, and another switching path for the RJ45 connectors to transmit together. Four-wire RS422 serial signal. Preferably, the switching module includes a plurality of switching paths and a jumper, wherein the jumper is configured to select any switching path, wherein a switching path is for each RJ45 connector to transmit a string of two-wire RS422 respectively. The other signal is the serial signal that allows the RJ45 connectors to jointly transmit the four-wire RS422 serial signal. Preferably, the input interface module further includes at least one USB connection interface for receiving external power to supply internal power of the data collection device; the control circuit further includes a clock chip and a backup power source, wherein the backup power supply is 4 M413964 USB power supply unit supplies the clock chip and the required power when the single chip controller is operating when no external power source is connected. Preferably, the data collection device is further connected to a keyboard, and the PS/2 connection interface of the input interface module comprises two PS/2 connectors, and a PS/2 connector is connected to the barcode reader. Another PS/2 connector connects to the
鍵盤此外，該負料收集裝置還配合連接-溫度伯測裝置、 -濕度偵測裝置及/或儀表侧裝置，且該輸人介面模組還 包括-擴充介面及該管控電路還包括—記憶模組，該擴充介 面及該記憶模組皆電性連接該單晶片控制器，該溫度制裝 置、該濕度偵測裝置及/或該儀表摘測裝置電性連接該擴充 介面’並將產生的溫度、濕度或儀表資料經由該擴充介面提 供給該單晶片控制器以與該數據資料記錄予該記憶模組。 較佳的，該管控電路還且古—姐 电塔還具有鈥不該早晶片控制器的處 理狀態的提示單元，且命担+ ¾ _ ,, 代早7L且奸不早凡包括一蜂鳴器及/或一顯 示器。In addition, the negative material collecting device is further provided with a connection-temperature detecting device, a humidity detecting device and/or a meter side device, and the input interface module further comprises an expansion interface and the control circuit further comprises a memory module The expansion interface and the memory module are electrically connected to the single-chip controller, and the temperature device, the humidity detecting device and/or the meter measuring device are electrically connected to the expansion interface and generate a temperature The humidity or meter data is provided to the single chip controller via the expansion interface to record the data data to the memory module. Preferably, the control circuit and the ancient-sister electric tower also have a prompting unit that does not have the processing state of the early wafer controller, and the life is + 3⁄4 _ , and the generation is 7L early and the rape does not include a buzzer. And/or a display.
本新型的資料收集裝置之功效在於：資料收集裝置的構 成凡件包括單晶片㈣器、PS/2連接介面其他的元件成本 :廉’降低掃描成本及維護成本’並且資料收集裝置能彼此 耳《•接’對工廠製程能精確管控。【實施方式】 有關本新型之前述及其他技術内容、_與功效，在以 下配合參相式之較佳實_的詳細㈣巾將可清楚的呈 現。 參閱圖i’本新型的較佳實施例是以測試半導體晶圓的 5 M413964 晶片的測試流程為例說明，該測試流程經歷的測試指示以及 相對應的條碼都紀錄在一流程卡7，且流程卡7黏貼於一待 測試晶片置放的晶片盒（圖未示），工廠令不同位置的測試站 的操作員（圖未示）需依照流程卡7上的指示，在指定的測試 機台（圖未示）以指定的測試程式進行測試。 本較佳實施例中，每部測試機台的位置都配置有一資料 收集裝置1GG’各資料收集裝置⑽合連接—條瑪讀取器 61 ^鍵盤62，用以於測試完成後，操作員便使用條碼讀 取器61偵測流程卡7上的條碼，將條碼對應的數據資料記 錄於資料收集裝置100,操作員也可使用鍵盤62輸入相關 的資料記錄於資料收集裝置1〇〇;操作員完成掃描條碼及輪 入資料後，再依照該流程卡7上的指示，將晶片盒送到負責 下一個測試站的操作員手中。 為了能監控測試流程的相關數據資料，可以使用傳輸線 101將多台資料收集裝置100彼此串接連線，並由一監測主 機500接收各資料收集裝置1〇〇傳來的數據資料以方便管控 測試流程。 參閱圖2及圖3 ’本較佳實施例中，資料收集裝置100 除了連接有條碼讀取器61及鍵盤62，還配合連接有一外部 電源60、-儀表偵測裝置63、一渔度偵測裝置64及一溫度 偵測裝置65 ;資料收集裝置1〇〇包含一輸入介面模組21、 -管控電路22及-輪出介面模組23’各模組具有的元件介 紹如下》 輸入介面模組21包括一 USB連接介面12、一 ps/2連 M413964 接介面13及一擴充連接介面ι4;管控電路22具有一單曰曰 片控制器10、一提示單元u、一記憶模組15、一備用電源 151、一時鐘晶片（Real-Time cl〇ck;簡稱 RTC)152、二個雙 工收發器161、162及一切換模組18 ;輸出介面模組23具 有二個RJ45連接器171、172，各元件作用介紹如下。八 輸入介面模組21的USB連接介面12是接取外部電源 - 6〇(如：可將市電轉換為USB電源的電源轉換器）的供電以 供應資料收集裝置1〇〇的内部電力；PS/2連接介面π具有 兩個PS/2連接n 131、132(如圖3)，分別連接條碼讀取器 61及鍵盤62 ;擴充連接介面14配合連接溫度偵測裝置65、 濕度偵測裝置64及/或儀表偵測裝置63，當以掃描器6ι掃 描或鍵盤62輸入相關資料時，可藉由擴充介面14將產生的 '服度、濕度或儀表資料經由擴充介面14提供給單晶片控制 器1〇以與相關的資料一起記錄在記憶模組15内。 管控電路22的單晶片控制器1〇又稱作單片機，用以控 • 料元件運作，是將中央處理器、記憶體、定時/計數器 • /c〇unter)、各種輸入輸出介面等都整合在一積體電 路晶片的控制器’若内部記憶體不足，還可存至外部的記憶 模組15以擴充儲存空提示單it 11包括一顯示模組m 蜂烏器112 ’用於提示單晶片控制器i G的處理狀態， 貝丁模組ill為簡易型顯示器，蜂鳴器ιΐ2於資料輸入後產 生提示音效。 。早晶片控制ϋ 1〇電性連接ps/2連接介面13、條碼讀 取器61及鍵盤62，兩個PS/2連接器m ' 132(如圖3)分別 7 M413964 取得條碼讀取器61偵測流程卡7上的條碼而產生的數據資 料，並將該數據資料傳輸給單晶片控制器1〇，或將鍵盤62 輸入的數字或文字資料傳輸給單晶片控制器1〇 ’然後，單 晶片控制器10接收到相關資料可儲存於内部記憶體或外部 的記憶模組15。 參閲圖3,備用電源151於本實施例是一個備用鋰電 池，於USB連接介面12沒有接取外部電源時供應時鐘晶片 21及單晶片控制器1〇運作時的所需電力；時鐘晶片152的 型號是U3 DS1307，其功能特性是提供單晶片控制器1〇取 得每一筆資料發生的時間，例如：於一批待測物品經過各加 工站時，操作員需要去刷這批待測物品的批號，這時單晶片 控制器10就可取得時鐘晶片152的時間，將批號、站別、 操作員代號等資料處理成一筆記錄資料，紀錄資料可以作為 各站的嫁動率（throughput)或品質回溯分析之用，也就是生 產履歷，諸如此類的資料收集，可大幅降低以往的操作員寫 工作日報表及資料輸入的時間。 本較佳實施例的雙工收發器161、162是採用型號為 SN75176B的積體電路(IC)，二個rJ45連接器171、m分 別連接各雙工收發器161、162 ;切換模組18介於單晶片控 制器10及該等雙工收發器161、162之間，包括多條切換路 徑及一跳接器（jumper)181，跳接器181用以擇取任—切換 路徑，其中一切換路徑是讓各rJ45連接器171、172分別 傳輸兩線式RS422的串列訊號，另一切換路徑是讓該等 RJ45連接器171及172共同傳輸四線式的RS422的串列訊 8 M413964 號 不 ’由於使用跳接器 給出具體結構關係 計 的跳線技術已經很成熟，所以這裡 ，其跳線組合方式可根據需要自行設 ^間圖！ ’兩兩資料收集裳置1〇〇之間以傳輸線仙 接，且其中—資料收集裝置100的RJ45連接器171 串接另-資料收集裝置剛，另_卿連接器Μ可連接 監測主機500’透過串列傳輸協定的軟體編程設定可確定監The function of the data collection device of the present invention is that the components of the data collection device include a single wafer (four) device, a PS/2 connection interface, and other component costs: inexpensive 'reduce scanning cost and maintenance cost' and the data collection device can be mutually • Connected to the factory process for precise control. [Embodiment] The above-mentioned and other technical contents, _ and efficacy of the present invention, and the detailed (four) towel of the following collocation phase can be clearly presented. Referring to FIG. 1A, a preferred embodiment of the present invention is an example of testing a test process of a 5 M413964 wafer for testing a semiconductor wafer. The test instructions and corresponding barcodes experienced by the test flow are recorded in a process card 7, and the process is The card 7 is adhered to a wafer cassette (not shown) placed on the wafer to be tested. The factory allows the operator of the test station at different positions (not shown) to follow the instructions on the process card 7 at the designated test machine ( The figure is not shown) Tested with the specified test program. In the preferred embodiment, each test machine is equipped with a data collection device 1GG's data collection device (10) and a connection-strip reader 61^keyboard 62 for the operator to complete the test. The barcode reader 61 is used to detect the barcode on the process card 7, and the data corresponding to the barcode is recorded in the data collection device 100. The operator can also input the relevant data into the data collection device using the keyboard 62; the operator After scanning the barcode and wheeling the data, the wafer cassette is sent to the operator in charge of the next test station according to the instructions on the flow card 7. In order to monitor the relevant data of the test process, the plurality of data collection devices 100 can be connected to each other in series by using the transmission line 101, and the data collected by each data collection device 1 is received by a monitoring host 500 to facilitate the control test. Process. Referring to FIG. 2 and FIG. 3, in the preferred embodiment, the data collecting device 100 is connected with a bar code reader 61 and a keyboard 62, and is also connected with an external power source 60, a meter detecting device 63, and a fish detection. The device 64 and a temperature detecting device 65; the data collecting device 1 includes an input interface module 21, a control circuit 22, and a wheel interface module 23'. The components of each module are as follows: Input interface module 21 includes a USB connection interface 12, a ps/2 connection M413964 interface 13 and an expansion connection interface ι4; the control circuit 22 has a single slice controller 10, a prompt unit u, a memory module 15, and a spare The power supply 151, a clock chip (Real-Time cl〇ck; RTC) 152, two duplex transceivers 161, 162 and a switching module 18; the output interface module 23 has two RJ45 connectors 171, 172. The role of each component is described below. The USB connection interface 12 of the eight-input interface module 21 is powered by an external power source - 6 〇 (eg, a power converter that converts utility power to a USB power source) to supply internal power of the data collection device 1; PS/ 2 connection interface π has two PS/2 connections n 131, 132 (as shown in FIG. 3), respectively connected to the bar code reader 61 and the keyboard 62; the expansion connection interface 14 is coupled with the temperature detecting device 65, the humidity detecting device 64 and And the meter detecting device 63, when the scanner 6 scan or the keyboard 62 inputs the related data, the generated service, humidity or meter data can be supplied to the single chip controller 1 through the expansion interface 14 by the expansion interface 14 The 〇 is recorded in the memory module 15 together with the related data. The single-chip controller 1 of the control circuit 22, also referred to as a single-chip microcomputer, is used to control the operation of the components, and integrates a central processing unit, a memory, a timer/counter, and various input and output interfaces. The controller of an integrated circuit chip can be stored in the external memory module 15 if the internal memory is insufficient to expand the memory prompt. It 11 includes a display module m. The device 112 is used to prompt the single chip control. The processing state of the device i G, the bedding module ill is a simple display, and the buzzer ιΐ2 generates a prompt sound effect after the data is input. . Early chip control ϋ 1 〇 electrically connected ps/2 connection interface 13, bar code reader 61 and keyboard 62, two PS/2 connectors m ' 132 (as shown in Figure 3) respectively 7 M413964 get barcode reader 61 detect Measuring the data generated by the barcode on the process card 7, and transmitting the data to the single-chip controller 1 or transferring the digital or text input from the keyboard 62 to the single-chip controller 1', then, the single-chip The controller 10 receives the relevant data and can store it in the internal memory or the external memory module 15. Referring to FIG. 3, the backup power supply 151 is a standby lithium battery in this embodiment, and supplies the required power when the clock chip 21 and the single-chip controller 1 are operated when the USB connection interface 12 is not connected to the external power supply; the clock chip 152 The model is U3 DS1307, its function is to provide the time for each single-chip controller to obtain each piece of data. For example, when a batch of items to be tested passes through each processing station, the operator needs to brush the items to be tested. Batch number, at this time, the single chip controller 10 can obtain the time of the clock chip 152, and process the batch number, the station number, the operator code and the like into a record data, and the record data can be used as the throughput or quality backtrack of each station. The use of analysis, that is, production history, and the like, can greatly reduce the time required for previous operators to write workday reports and data input. The duplex transceivers 161 and 162 of the preferred embodiment are integrated circuits (ICs) of the type SN75176B, and the two rJ45 connectors 171 and m are respectively connected to the duplex transceivers 161 and 162; Between the single-chip controller 10 and the duplex transceivers 161, 162, a plurality of switching paths and a jumper 181 are included, and the jumper 181 is used to select any switching path, wherein one of the switching The path is to let each rJ45 connector 171, 172 transmit the serial signal of the two-wire RS422, and the other switching path is to let the RJ45 connectors 171 and 172 jointly transmit the four-wire RS422 serial signal 8 M413964. 'Because the jumper technology that uses the jumper to give the specific structural relationship meter is very mature, here, the jumper combination method can set the ^ map according to the need! 'Two-two data collection is set between 1〇〇 and the transmission line is connected, and among them—the RJ45 connector 171 of the data collection device 100 is connected in series to the data collection device, and the other connector can be connected to the monitoring host 500' Software supervision through the serial transfer protocol can determine the supervision
測主機500與該等資料收集裝置⑽之間的主從關係監測 主機50G透過串列介面51就可與多台資料收集裝置⑽進 行通訊。 综上所述，本新型的資料收集裝置1〇〇之功效在於： 1·降低掃描成本：資料收集裝置議的構成元件單晶 片控制器ω、PS/2連接介面13等都採用成本低廉的元件， 可降低掃描的成本。The master-slave relationship monitoring host 50G between the test host 500 and the data collection devices (10) can communicate with a plurality of data collection devices (10) through the serial interface 51. In summary, the advantages of the data collection device of the present invention are as follows: 1. Reduce the scanning cost: the components of the data collection device, the single-chip controller ω, the PS/2 connection interface 13, etc., all adopt low-cost components. , can reduce the cost of scanning.
2. 精確管控：透過資料收集裝置1〇〇的RJ45連接器 171、172以傳輸線101彼此聯接，並由監測主機5〇〇統一 接收相關資料，可對工廠製程精確管控， 3. 降低連線成本：利用跳接器181設定兩線式或四線 式的連線方式’並採用成本低的RJ45連接器pi、172，可 節省建立網路所需的連線成本，故確實能達成本新型之目 的。 惟以上所述者，僅為本新型之較佳實施例而已，當不能 以此限定本新型實施之範圍，其他諸如倉儲管理、人員進出 管制等，均可應用本新型，因此，大凡依本新型申請專利範 9 M413964 圍及新型說明内容所作之簡單的等效變化與修飾，皆仍屬本 新型專利涵蓋之範圍内。 【圖式簡單說明】 圖1是說明本新型資料收集裝置彼此連接的系統方塊 ret! · 圍， 圖2是說明本新型資料收集裝置的較佳實施例的電路 方塊圖；及 圖3是說明本新型資料收集裝置的較佳實施例的電路 圖。 10 M413964 【主要元件符號說明】 100·. ••…資料收集裝置 18…… …··切換模組 101·· .....傳輸線 181 ··· •…跳接器 10… …· ·單晶片控制器 21 ·...· …·輸入介面模組 11 ... ••…提示單元 22…… •…管控電路 111 .. ••…顯示模組 23••… •…輸出介面模組 112·· ••…蜂鳴器 500… …·監測主機 12 ... ••…USB連接介面 51 ·.... •…串列介面 13 ··· •…· PS/2連接介面 60 •…外部電源 131、 132 PS/2連接器 61 ·.... …·條碼讀取器 14 .… .....擴充連接介面 62••… •…鍵盤 15… ••…記憶模組 63·.··· •…儀表偵測裝置 151.·. .....備用電源 64••… •…溼度偵測裝置 152··· •…時鐘晶片 65…… •…溫度偵測裝置 161、 162雙工收發器 7 ....... •…流程卡 171、 172 RJ45連接器 112. Precise control: The RJ45 connectors 171 and 172 of the data collection device 1 are connected to each other by the transmission line 101, and the monitoring host 5〇〇 uniformly receives relevant data, which can accurately control the factory process, 3. Reduce the connection cost : Using the jumper 181 to set the two-wire or four-wire connection method' and using the low-cost RJ45 connectors pi and 172, the wiring cost required to establish the network can be saved, so the new type can be achieved. purpose. However, the above-mentioned ones are only preferred embodiments of the present invention. When the scope of the present invention cannot be limited by this, other types such as storage management, personnel access control, etc. can be applied to the present invention. The simple equivalent changes and modifications made by the patent application model 9 M413964 and the new description are still within the scope of this new patent. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a block diagram showing a system block ret of the present invention, and FIG. 2 is a block diagram showing a preferred embodiment of the present data collecting device; A circuit diagram of a preferred embodiment of a novel data collection device. 10 M413964 [Description of main component symbols] 100·. ••...data collection device 18............··Switching module 101···..Transmission line 181 ··· •...jumper 10... Chip controller 21 ........ input interface module 11 ... ••... prompt unit 22... •... control circuit 111 .. ••...display module 23••... •...output interface module 112·· ••...Buzzer 500... ...monitoring host 12 ... ••...USB connection interface 51 ·.... •...serial interface 13 ··· •...· PS/2 connection interface 60 • ...external power supply 131, 132 PS/2 connector 61 ·.... ... barcode reader 14 ........ expansion connection interface 62••... •...keyboard 15...••...memory module 63 ·····•...meter detection device 151....... standby power supply 64••... •...humidity detection device 152···•...clock chip 65... •...temperature detection device 161 , 162 Duplex Transceiver 7 ....... •...Flow Card 171, 172 RJ45 Connector 11