五、新型說明： 【新型所屬之技術領域】 本創作係關於-種測試頭升降設備，尤指一種適用於 半導體封裝測4« 備中’輔助測試頭升降之測試頭升降設 備0 【先前技術】 半導體元件、或積體電路等經過設計、並製造後尚 須經過封裝及測試i別是測試，其可⑽保半導體元件、 或積體電路正常運作與否。然而，所謂的丨⑶!試可以分為 封裝前的晶圓檢測、以及封裝後的成品檢測。纟中，晶圓 檢測是在晶圓切割與封裝前’先以探針(Probe)測試晶圓内 的積祖電路疋否正常。另一方面，封裝後的成品測試則需 依照封裝的形式’在適合的測試裝置⑴巧心仙如㈣， DUT)上進行測試，以確保各項特性或功能皆符合所需規 格。 請參閱圖丨，圖】係習知測試頭升降設備之整體立體 圖。圖中顯不有一測試頭丨〇，其主要於晶圓測試時直接電 陳接觸並進行測試。測試頭1 〇係由一夾持臂11所固定，且 夹持臂11可提供測試頭1〇三個維度的旋轉。另外，圖中另 顯不有—升降立柱12,其主要使夾持臂11上升或下降，俾 利進行測試或檢修維護。 °月併參閱圖2、圖3 A、及圖3B，圖2係習知測試頭升 降設備之傳動機構的大部分解圖，圖3A係習知測試頭升降 M393682 設備之傳動機構中A_A線段之剖視圖’圖3B係習知測試頭 升降設備之傳動機構中B-B線段之剖視圖。如圖中所示， 驅動裝置13驅動其下方之升降導桿丨4上升或下降，進而連 動升降導桿14下方之鏈輪15上升或下降。此外，再透過鏈 條16套設於鏈輪15上。因此，當鏈輪15上升或下降時，鏈 條16隨之連動，進而促使鏈條16連接之夾持臂u下降或上 升。 / 然而’習知測試頭升降設備之傳動機構組裝、及檢修 維護時相當麻煩，耗時費工。其主要是因為，必須將内部 整組機構整串取出或置入，亦即包含驅動裝置13、升降導 桿14、鏈輪15、及其他周邊元件，無法單獨分解組設。也 就是說，檢修維護時仍必須一體取出後進行維護，而組裝 時則必須整組一體置入並固定之，相當費力且稍微不慎將 導致人員受傷、或元件毀損。 【新型内容】 本創作為一種測試頭升降設備，包括：一驅動螺桿、 一動力源、一升降座、一殼體、一升降台、及一傳動帶。 其中，驅動螺桿係包括有一第一端' 及一第二端；動力源 係動力連接驅動螺桿之第一端，動力源驅動驅動螺桿旋 轉。升降座係螺設於驅動螺桿並藉由驅動螺桿旋轉帶動上 升或下降’且升降座一側樞設有一活動輪，而活動輪包括 有一中心滑軸。至於，驅動螺桿之第二端係樞設於殼體， 且级體之一側組設有一滑槽，而活動輪之中心滑抽係滑設 M393682 於滑槽。以及，傳動帶係包括有一固定端、及一活動端， 固定端組設於殼體上，活動端組設於升降台，而傳動帶套 設於活動輪，且升降座之活動輪帶勤傳動帶以連動升降台 上升或下降。因此，本創作俾能大幅減少組立件，組裝容 易’維修快速’且運轉穩定使用壽命大幅增長。V. New description: [New technical field] This creation is about a kind of test head lifting equipment, especially a test head lifting device suitable for semiconductor package testing 4' auxiliary test head lifting and lowering 0 [Prior Art] Semiconductor Components, or integrated circuits, etc., must be packaged and tested after being designed and manufactured. It can be (10) to ensure the normal operation of semiconductor components or integrated circuits. However, the so-called 丨(3)! test can be divided into wafer inspection before packaging and finished product inspection after packaging. In the middle, wafer inspection is to test the progenitor circuit in the wafer with the probe before the wafer is cut and packaged. On the other hand, the packaged finished product test is tested on the appropriate test device (1) Qiao Xinxian (4), DUT according to the package form to ensure that the features or functions meet the required specifications. Please refer to the figure, which is an overall perspective view of the conventional test head lifting device. There is no test head in the figure, which is mainly used for direct contact and testing during wafer testing. The test head 1 is held by a clamp arm 11 and the clamp arm 11 provides rotation of the test head 1 in three dimensions. In addition, there is no other display in the figure - the lifting column 12, which mainly raises or lowers the clamping arm 11 for testing or maintenance. Referring to FIG. 2, FIG. 3A, and FIG. 3B, FIG. 2 is a majority of the solution of the transmission mechanism of the conventional test head lifting device, and FIG. 3A is the A_A line segment of the transmission mechanism of the conventional test head lifting M393682 device. Cross-sectional view 'Fig. 3B is a cross-sectional view of a BB line segment in a transmission mechanism of a conventional test head lifting device. As shown in the figure, the driving device 13 drives the lifting guide bar 4 below it to ascend or descend, thereby moving the sprocket 15 below the lifting guide 14 to ascend or descend. In addition, the chain 16 is placed over the sprocket 15 again. Therefore, when the sprocket 15 ascends or descends, the chain 16 is interlocked, thereby causing the clamp arm u to which the chain 16 is attached to descend or rise. / However, the assembly of the transmission mechanism of the conventional test head lifting device and the maintenance and repair are quite troublesome and time consuming. The main reason is that the entire entire group of mechanisms must be taken out or placed, that is, the driving device 13, the lifting guide 14, the sprocket 15, and other peripheral components, and cannot be separately disassembled. That is to say, maintenance must be carried out after maintenance and maintenance, and the entire group must be integrally placed and fixed during assembly, which is quite laborious and slightly inadvertent, resulting in personal injury or component damage. [New Content] The present invention is a test head lifting device comprising: a driving screw, a power source, a lifting seat, a casing, a lifting platform, and a transmission belt. Wherein, the driving screw system comprises a first end 'and a second end; the power source is connected to the first end of the driving screw, and the power source drives the driving screw to rotate. The lifting base is screwed to the driving screw and driven to rotate up or down by the rotation of the driving screw and the movable seat side is pivotally provided with a movable wheel, and the movable wheel includes a central sliding shaft. As a result, the second end of the driving screw is pivotally disposed on the housing, and one side of the step body is provided with a sliding slot, and the center of the movable wheel is slidably disposed with the M393682 in the sliding slot. And the transmission belt system comprises a fixed end and a movable end, the fixed end set is arranged on the casing, the movable end is set on the lifting platform, and the transmission belt is sleeved on the movable wheel, and the movable wheel of the lifting seat is connected with the transmission belt to link The lifting platform rises or falls. Therefore, this creation can significantly reduce the number of components, and the assembly is easy to maintain quickly and the service life is greatly increased.
較佳的是’本創作可更包括有一另一活動輪、一另一 滑槽、及一另一傳動帶。其中，另一活動輪係樞設相對應 於活動輪之一側’另一活動輪包括有一另一中心滑軸：另 一滑槽係組設於殼體内相對應於滑槽之一側，另一活動輪 之另一中心滑軸係滑設於另一滑槽；另一傳動帶套設於另 一活動輪，另一傳動帶之二端分別組設於殼體與升降台。 據此，本創作採雙側驅動’其不僅具受力平均可提高使用 壽命的優點，而且雙側受力可支撐更大負载，可更為穩固Preferably, the creation may further include a further movable wheel, a further chute, and a further drive belt. Wherein, another movable wheel train is pivoted corresponding to one side of the movable wheel. The other movable wheel includes a further central sliding shaft: the other sliding slot is disposed in the housing corresponding to one side of the sliding slot. The other central sliding shaft of the other movable wheel is slidably disposed on the other sliding slot; the other transmission belt is sleeved on the other movable wheel, and the other ends of the other transmission belt are respectively disposed on the casing and the lifting platform. According to this, the creation adopts double-sided driving, which not only has the advantage of being able to increase the service life on average, but also supports the larger load on both sides and can be more stable.
再者’本創作可更包括有-軸承底座，係組設於殼 體，而驅動螺桿之第二端係樞設於軸承底座。據此，藉由 轴承底座支樓、及固定驅動螺桿，可避免驅動螺桿於^ 過程中晃動影響運轉的穩定性。此外，本創作可更包括有 -導軌、及-導槽，而導軌係立設於殼體外，導槽 < 於升降台’且導槽係滑設於導軌。其中，本創作藉由導執二 及導槽的料’升降台於上生或下降的過程中，可 引避免升降台晃動或側向移動。 每—輔助 一輔助出 另外’本創作可更包括有二輔助出力裝置 出力裝置包括有一第一端'及一第二端。其中 M393682 力裝置之第一端係分別組設於殼體，二辅助出力裝置之第 :端係分別組設於升降座之相對應二側。據此，本創作之 Z出力裝置除主要用以輔助動力源，使其可㈣更重的 ’亦具有穩定1載之功效1而，本創作之輔助出 刀裝置可為氮氣缸、油壓缸、或其他等效裝置。 又本創作之可更包括有一固定輪其係組設於殼體 端’而傳動帶套設於活動輪、及固定輪上。因此本創 固定輪主要用以改變傳動帶之施力方向，進而改變升 降座之移動方向。铁而 _本創作之活動輪可為一鏈輪，傳 ΐ帶可為—鏈條。當然，亦可為其他等效之傳動元件或裝 此外，本創作可更包括有一聯轴座，其係組設於動力 t與㈣螺桿間’而動力源係、透過聯轴座動力連接驅動螺 ，之第―端°據此’聯軸座主要用以連接動力源及驅動螺 :，其可為-般之連軸裝置’當然亦可包括減速元件，如 減速齒輪等。 冉且 , 創作可更包括有二緩衝彈簧，其一端組設於 喊體内，另-端组設於傳動帶之固定端。因此，本創作藉 由緩衝彈簧可緩衝負載直接對傳動機構的衝擊。缺而，本 創作亦可於緩衝彈簧上另增設指示㈣'及負載感測器。 其中指示元件主要用以指示目前荷重，而負載感測器主要 則用以感測是否超重。 【實施方式】 M393682 "月同時參閱圖4、圖5A、及圖5B，圖4係本創作測試碩 升降設備一較佳實施例之大部分解圖圖5a係本創作測試 頭升降設備-較佳實施例之A_A線段之到視圖，圖5B測試 頭升降二備係本創作一較佳實施例之BB線段之剖視圖。 圖中顯示—種職頭升降設備其主要用以舉升或降低測 試頭（圖_未示）’以供測試、或檢修維護時使用。當然，Furthermore, the present invention may further include a bearing base disposed on the casing, and the second end of the drive screw is pivotally mounted on the bearing base. Accordingly, the bearing base and the fixed drive screw can avoid the stability of the operation caused by the sway of the drive screw during the process. In addition, the creation may further include a guide rail and a guide groove, and the guide rail is erected outside the casing, and the guide groove is disposed on the lift platform and the guide groove is slidably disposed on the guide rail. Among them, this creation can avoid the sway or lateral movement of the lifting platform during the process of ascending or descending by the material of the guide 2 and the guide. Each of the auxiliary aids may additionally include a second auxiliary output device. The output device includes a first end and a second end. The first end of the M393682 force device is respectively set in the casing, and the second end of the auxiliary power output device is respectively arranged on the corresponding two sides of the lifting seat. Accordingly, the Z output device of the present invention is mainly used to assist the power source, so that the (4) heavier 'has a stable one-load effect 1 , and the auxiliary cutting device of the creation can be a nitrogen cylinder or a hydraulic cylinder. Or other equivalent device. Further, the creation may further include a fixed wheel set at the end of the casing and the transmission belt is sleeved on the movable wheel and the fixed wheel. Therefore, the intrinsic fixed wheel is mainly used to change the direction of the force applied by the belt, thereby changing the moving direction of the step. Iron and _ The creative wheel of this creation can be a sprocket, and the belt can be a chain. Of course, it can also be other equivalent transmission components or devices. In addition, the creation may further include a coupling seat which is set between the power t and the (four) screw and the power source system and the power transmission system through the coupling seat. According to this, the coupling seat is mainly used to connect the power source and the drive screw: it can be a general-purpose coupling device. Of course, it can also include a reduction gear such as a reduction gear. Moreover, the creation may further include two buffer springs, one end of which is disposed in the body of the shout, and the other end is set at the fixed end of the belt. Therefore, this creation relies on a buffer spring to cushion the impact of the load directly on the transmission. In addition, this creation can also add an indication (4)' and a load sensor to the buffer spring. The indicating component is mainly used to indicate the current load, and the load sensor is mainly used to sense whether it is overweight. [Embodiment] M393682 " month also refers to Figure 4, Figure 5A, and Figure 5B, Figure 4 is the majority of the solution of the preferred embodiment of the prototype test lifting device. Figure 5a is the creation of the test head lifting device - A view of the A_A line segment of the preferred embodiment, and FIG. 5B is a cross-sectional view of the BB line segment of a preferred embodiment of the present invention. The figure shows that the seed head lifting device is mainly used to lift or lower the test head (Fig. _ not shown) for testing or maintenance. of course,
本創作並不僅以測試頭之升降設備為限本創作亦可運用 於其他升降設備或機具上。 <如圖中所示有一殼體5、及一升降台7，其中殼體5外立 設有導執54,升降台7則組設有導槽71，導槽71係滑設於導 軌54。然而，升降台7上另外組設測試頭夾持機構（圖中未 示）’其用以夾持測試頭。其中，升降台7藉由導㈣、及 導槽71的設計，於其上生或下降的過程中，可辅助導引避 免升降台7晃動或側向移動。 另外’殼體5内部設有—驅動螺桿3，其係包括有一第 一端31、及—第二端32。其中，驅動螺桿3之第-端31動力 連接-動力源2,其動力源2係、驅動驅動螺桿3旋轉。铁而， 在本實施例中，動力源2與驅動螺桿3間組設有_聯轴座 21 ’動力源2係透過聯軸座21動力連接驅動螺桿3之第一踹 3i。據此，雜座21主要用以連接動力源2及驅動螺桿3, 其可為-般之祕裝置，當㈣可包括減速元件如減速 齒輪等。3外’殼體5外相對應於聯轴座21位置植設有一手 搖柄57,其係連接至聯轴座2卜據此，手搖㈣主要_ 7 M393682 乏動力、或高度需微調時，可用以取代動力源2,直接以人 工手動方式進行升降。 再者’驅動螺桿3之第二端32樞設於一轴承底座53，且 軸承底座53係組設於殼體5底端。據此，本實施例藉由轴承 底座53支撐固定驅動螺桿3，可避免驅動螺桿3於運轉過程 中晃動影響運轉的穩定性。另外，圖中另顯示有一升降座 4’其係螺設於驅動螺桿3並藉由驅動螺桿3之旋轉，進而帶 動升降座4上升或下降。而且，升降座4二側分別樞設有一 活動輪4]，42 ’且活動輪41,42分別包括有一中心滑轴 41 1,421 〇 然而’殼體5内之相對應二側分別組設有滑槽51,52， 上述活動輪41,42之中心滑軸411，421係滑設於滑槽51，並 藉由滑槽51滑設、導引、及卡止，使升降台7不會隨著驅動 螺桿3旋轉而連動旋轉，反而形成上生或下降之結果。此 外，本實施例更包括有二輔助出力裝置8。其中，每一輔助 出力裝置8包括有一第一端81、及一第二端82。又，二辅助 出力裝置8之第一端81係分別組設固定於殼體5，而二輔助 出力裝置8之第二端82係分別組設於升降座4之相對廡一 側。據此，本創作之輔助出力裝置8除主要用以辅助動力源 2’使其可驅動更重的負載外，亦具有穩定負載之功效。然 而，本實施例之輔助出力裝置8為為氮氣缸，其當然亦可為' 油壓缸、或其他等效裝置。 再且，如圖所示，殼體5上端更包括有二固定輪W ， 其係樞設於殼體5上端。在本實施例中，二活動輪々I 〇、 M393682 及二固定輪55,56皆為鏈輪，當然其亦可為其他等 元件或裝置。另外’圊中顯示有二緩衝彈簧”，复―：動 設於殼體5内’另-端則分別組設有傳動帶66G。在， 例中，傳動帶6,60為鏈條，當然其亦可 、也 元件或裝置。然而’每-傳動帶6,6G包括有—固^=動 及活動端62其中，固定端61组設於二緩衝彈 活動端62組設於升降台7。This creation is not limited to the lifting equipment of the test head. It can also be applied to other lifting equipment or implements. < As shown in the figure, there is a casing 5 and a lifting platform 7, wherein the casing 5 is provided with a guide 54 externally, and the lifting platform 7 is provided with a guiding groove 71, and the guiding groove 71 is slidably disposed on the guide rail 54. . However, a test head holding mechanism (not shown) is additionally provided on the lifting table 7 for holding the test head. Among them, the lifting platform 7 can assist the guiding to avoid the shaking or lateral movement of the lifting platform 7 by the design of the guiding (four) and the guiding groove 71 during the process of ascending or descending. Further, the inside of the casing 5 is provided with a drive screw 3 including a first end 31 and a second end 32. Here, the first end 31 of the drive screw 3 is connected to the power source 2, and the power source 2 is driven to rotate the drive screw 3. In the present embodiment, the power source 2 and the drive screw 3 are provided with a _coupling seat 21'. The power source 2 is mechanically coupled to the first 踹 3i of the drive screw 3 via the coupling seat 21. Accordingly, the miscellaneous seat 21 is mainly used to connect the power source 2 and the drive screw 3, which may be a general-purpose device, and when (4) may include a reduction element such as a reduction gear. 3 outside the housing 5 corresponding to the position of the coupling seat 21 is provided with a hand crank 57, which is connected to the coupling seat 2 according to this, hand crank (four) main _ 7 M393682 lack of power, or height needs to be fine-tuned, It can be used to replace the power source 2 and directly lift it manually. Further, the second end 32 of the drive screw 3 is pivotally mounted to a bearing base 53, and the bearing base 53 is assembled to the bottom end of the housing 5. Accordingly, in this embodiment, the fixed driving screw 3 is supported by the bearing base 53, so that the stability of the driving screw 3 during operation can be prevented from affecting the stability of the operation. Further, the figure further shows a lifting base 4' which is screwed to the driving screw 3 and rotated by the driving screw 3 to drive the lifting base 4 to rise or fall. Moreover, a movable wheel 4], 42' is respectively pivoted on two sides of the lifting base 4, and the movable wheels 41, 42 respectively comprise a central sliding shaft 41 1,421. However, the corresponding two sides of the housing 5 are respectively provided with chutes. 51, 52, the central sliding shafts 411, 421 of the movable wheels 41, 42 are slidably disposed in the sliding slot 51, and are slid, guided, and locked by the sliding slot 51, so that the lifting platform 7 does not follow the driving. The screw 3 rotates and rotates in series, which in turn results in an upper or lower drop. In addition, the embodiment further includes two auxiliary output devices 8. Each auxiliary output device 8 includes a first end 81 and a second end 82. Further, the first ends 81 of the two auxiliary output devices 8 are respectively fixed to the casing 5, and the second ends 82 of the two auxiliary output devices 8 are respectively disposed on the opposite sides of the lifting base 4. Accordingly, the auxiliary output device 8 of the present invention is mainly used to assist the power source 2' to drive a heavier load, and has the effect of stabilizing the load. However, the auxiliary output device 8 of the present embodiment is a nitrogen cylinder, which of course may also be a hydraulic cylinder or other equivalent device. Moreover, as shown in the figure, the upper end of the housing 5 further includes two fixed wheels W which are pivotally disposed at the upper end of the housing 5. In this embodiment, the two movable rims I 〇, M393682 and the two fixed wheels 55, 56 are all sprocket wheels, and of course, they may be other components or devices. In addition, there are two buffer springs in the 圊, and the transmission belt 66G is respectively arranged in the housing 5 at the other end. In the example, the transmission belts 6, 60 are chains, of course, It is also a component or device. However, the 'per-drive belt 6, 6G includes a solid-state and a movable end 62. The fixed end 61 is disposed on the second buffering movable end 62 and is disposed on the lifting platform 7.
—而且，傳動帶6,6〇分別套設於二活動輪41，42、及二固 定輪55,56。其中，固定輪55,56主要用以改變傳動帶_ 之施力方向，進而改變升降台7之移動方向。此外，本實施 例之二緩衝彈簧22則主要用以緩衝負載，避免負載直接對 傳動機構的衝擊。然而，本創作亦可於緩衝彈簧22上另增 設指示元件、及負載感測器（圖中未示其中指示元^ 主要用以指示目前荷重，而負載感測器主要則用以感測是 否超重。- Moreover, the belts 6, 6 are respectively sleeved on the two movable wheels 41, 42 and the two fixed wheels 55, 56. Among them, the fixed wheels 55, 56 are mainly used to change the direction of the force of the belt _, thereby changing the moving direction of the lifting platform 7. In addition, the buffer spring 22 of the second embodiment is mainly used for buffering the load to avoid the impact of the load directly on the transmission mechanism. However, the present invention can also add an indicator component and a load sensor to the buffer spring 22 (the indicator element is not shown to indicate the current load, and the load sensor is mainly used to sense whether the weight is overweight. .
再且，在本實施例中，升降座4之活動輪41帶動傳動帶 6以連動升降台7上升或下降。詳而言之，當動力源2或手搖 柄57透過聯轴座21帶動驅動螺桿3旋轉，而促使驅動螺桿3 之升降座4上升或下降。然而，升降座4的上升或下降則另 外帶動傳動帶6,60，進而促使殼體5外部之升降台7進行升 降動作。 上述實施例僅係為了方便說明而舉例而已，本創作所 主張之權利範圍自應以申請專利範圍所述為準，而非僅限 於上述實施例。 9 【圖式簡單說明】 圖 圖 圖 圖 =測試頭升降設備之整體立體圖。 ==升降設備之傳動機構的大部分解圖。 ^測域頭升降設備之傳動機構中A-A線段之剖視 圖3 B係習知測試頭升降設備 圖。 之傳動機構中線段之剖視 圖4係本創作一較佳實施例之大部分解圖。 圖5A係本創作一較佳實施例之A_A線段之剖視圖。 圖5B係本創作一較佳實施例之B_B線段之剖視圖。 Η夹持臂 13驅動裝置 15鏈輪 2 動力源 22缓衝彈簧 31第一端 4 升降座 411,421中心滑軸 51,52滑槽 54導執 57手搖柄 【主要元件符號說明】 10測試頭 12升降立柱 14升降導桿 16鏈條 21聯轴座 3 驅動螺桿 32第二端 41，42活動輪 5 殼體 53轴承底座 55,56固定輪 M393682 6,60傳動帶 62活動端 71導槽 81第一端 61固定端 7 升降台 8 輔助出力裝置 82第二端Further, in the present embodiment, the movable wheel 41 of the lift base 4 drives the drive belt 6 to move the lift table 7 up or down. In detail, when the power source 2 or the hand crank 57 drives the drive screw 3 to rotate through the coupling seat 21, the lift base 4 of the drive screw 3 is caused to rise or fall. However, the raising or lowering of the lifting base 4 additionally drives the belts 6, 60, thereby causing the lifting platform 7 outside the casing 5 to perform the lifting operation. The above-described embodiments are merely examples for convenience of description, and the scope of the claims is intended to be based on the scope of the patent application, and is not limited to the above embodiments. 9 [Simple description of the diagram] Figure Figure Figure = Overall perspective view of the test head lifting equipment. == Most of the solution for the drive mechanism of the lifting device. ^ Sectional view of the A-A line segment in the transmission mechanism of the field head lifting device. Figure 3 B shows the conventional test head lifting device. Sectional view of the mid-section of the transmission mechanism Figure 4 is a majority of the solution of a preferred embodiment of the present invention. Figure 5A is a cross-sectional view of the A_A line segment of a preferred embodiment of the present invention. Figure 5B is a cross-sectional view of the B_B line segment of a preferred embodiment of the present invention. ΗClamping arm 13 Drive device 15 Sprocket 2 Power source 22 Buffer spring 31 First end 4 Lifting seat 411, 421 Center sliding shaft 51, 52 Chute 54 Guide 57 Hand crank [Main component symbol description] 10 Test head 12 Lifting column 14 lifting guide 16 chain 21 coupling seat 3 driving screw 32 second end 41, 42 movable wheel 5 housing 53 bearing base 55, 56 fixed wheel M393682 6, 60 transmission belt 62 movable end 71 guide groove 81 first end 61 fixed end 7 lifting platform 8 auxiliary output device 82 second end