TWM375866U - Automatic measurement system of planar illumination intensity - Google Patents

Automatic measurement system of planar illumination intensity Download PDF

Info

Publication number
TWM375866U
TWM375866U TW98206450U TW98206450U TWM375866U TW M375866 U TWM375866 U TW M375866U TW 98206450 U TW98206450 U TW 98206450U TW 98206450 U TW98206450 U TW 98206450U TW M375866 U TWM375866 U TW M375866U
Authority
TW
Taiwan
Prior art keywords
measurement
axis displacement
light source
axis
measurement system
Prior art date
Application number
TW98206450U
Other languages
Chinese (zh)
Inventor
Gu-Qin Lin
Pi-Xuan Lin
Kai-Zhong Tu
Cheng-Jian Wang
Pin-Chun Liao
Original Assignee
Kun Shan University Of Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kun Shan University Of Technology filed Critical Kun Shan University Of Technology
Priority to TW98206450U priority Critical patent/TWM375866U/en
Publication of TWM375866U publication Critical patent/TWM375866U/en

Links

Landscapes

  • Photometry And Measurement Of Optical Pulse Characteristics (AREA)

Description

M375866 •· * 五、新型說明: 【新型所屬之技術領域】 本新型屬於一種自動化平面照度量測系統,尤指有關 利用驅動器及電腦設備、程式控制χγ軸位移平台,以供 做精確的平面照度量測,提供理論光學分析的技術領域。 【先前技術】 按,在設計燈具之前,必須就所選用之光源進行研究, -因此檢測光源之目的在於以實際量測參數與廠商所提供之 < · 光源參數資料做比較核對,以減少設計時光源之選擇。 其次,傳統在檢測光源照度值量測之前,係在χ-γ平 面設定一量測區a (參考第一圖之習用圖示),並在量測區 a内取間距相等,且平均對稱之九個量測點i 〇 ,另將光 源2 0用治具固定,以量測區a中心點作校正後,置於離 平台Z軸方向與量測區a中心點垂直處一段距離,另外, 將一照度計3 0放置於χ-γ平面上。據此,將照度計3 〇 ^ 開啟暖機一段時間後,先對環境作誤差值量測,並記錄其 值,再將照度計3 〇的受光器4 0部位依序置於九點量測 點1 0,待量測值穩定後記錄其值,重複步驟量測三次後, 再將平均照度扣掉環境照度值,所得之照度即可視為正確 量測值,所測得之環境照度值為0 lux,以此量測及廠商提 供資料做比較,確認照度值是否完整或有瑕疵的部份。此 量測方式是比較簡易的量測方式,但須手動調整位置做每 一點量測,且有誤差值存在,同一點無法每次量測時都在 固定在一定的位置,且因外在光源影響,每次重新量測還 3 校正,因此會花更多的時間在校正上,且其量測 ^點數較少,無法提供光學分析之所Μ 是需改進的課題。 【新型内容】 鑑於上述習用之平面照度量測系統為手動調整方式, :但有誤差值存在,且其量_數較少,無法達致精密判 2 ’更難以控制品質之穩定度;因此,本賴作人加以研 改進而製作出本創作之自動化平面照度量測系統。 本創作所採取之技術内容如下,其至少包含有一平面 照度量測裝置、—遮蔽物及—電職備;其中: 平面照度量測裝置,具有-χγ轴位移平台、一昭产 計及-Ζ軸位移支架;該χγ軸位移平台由一驅動器驅動二 =照度計係架設於χγ軸位移平台上,另該2轴位移支 架叹有一光源,且該光源由另一驅動器驅動而可沿Ζ軸作 移位,另外ζ軸位移支架上裝設有組接該光源之步進馬 達’使光源可作角度轉變調整,且其轉變角度為⑽度到 180度的範圍,另且,該χγ軸位移平台與電腦設備連線, 具備量測距離及點數之自動定位功能。 遮蔽物.,用以阻隔外界光源而使遮蔽物内部之初 境照度值為0 lux,其遮蓋於該平面照度量測裝置之外 其可為布幕箱。 電腦設備,内建有可原點定位及自動校正該χγ轴位 移平台之-驅動器控制軟體、一設定檢測範圍控制平台程 式’以及_可控制光源轉變角度之步進馬達的操控程式; 置之照度計所測得之照度數據係 另外’由平面照度量測襄 與電腦設備電性連接。 承上’藉電腦設備之驅動器控制軟體可將該x 移平台自動回歸到原點,再配合蚊檢測範圍控制平化 式與該驅絲㈣軟體整合,經顏計算需麵點之二 轴方向之點數,以設定範圍除以量測點 數,而可決疋母一點間之量測距離。 疋以,本創作之主要目的係藉由平面照度量測 電腦設備配合’使可達致自動4測、校正及自動定位之夕、 項優點’不但提升量測之速度、_,且於量測時每^ 距之誤差比傳狀九點制縣更加微小,而可提升 分析之完整驗證資訊之準確度。 予 量測乍t另一目的係藉由一遮蔽物遮蓋於該平面照度 ’、m置之外部,阻隔外界光源而使遮蔽物内部之初 ===排除習用受到環境照度值影響‘ 【實施方式】 6月參閱第二圖所示,本創作「自動化平面照度量 二= 包含平面照度量測裝置卜遮齩物2 平面照度量測裝置1,具有一 XY軸位移平台i工、 照度計12及—z軸位移支架13;該XY轴位移平台 1由驅動器(圖中未繪出)驅動而可呈X軸或γ轴方 向移位,而該照度計i 2架設於χγ軸位移平台1 1上 方,另該Z軸位移支架工3結合有一光源工4,且該光源 1 4由另一驅動11 (圖中並未職)驅動而可沿Z轴方向 作移位;另外,Z袖位移支架13上裝設有與光源i 4連 接之步進馬達141,該步進馬達1 41使光源i 4可作 角度之轉變調整,據可量測出該光源工4之實際光型,而 其可調整之肢為18G度到.⑽度的範M375866 •· * V. New description: [New technical field] This new type belongs to an automated planar photometric measurement system, especially for the use of drives and computer equipment, program control χ γ axis displacement platform for accurate plane illumination Measurement provides the technical field of theoretical optical analysis. [Prior Art] Press, before designing the luminaire, it is necessary to study the selected light source. - Therefore, the purpose of detecting the light source is to compare the actual measurement parameters with the manufacturer's data provided by the manufacturer to reduce the design. The choice of time source. Secondly, before the measurement of the illuminance value of the light source is detected, a measurement area a is set in the χ-γ plane (refer to the conventional diagram of the first figure), and the spacing is equal in the measurement area a, and the average symmetry is Nine measuring points i 〇, and the light source 20 is fixed by the fixture, and after being corrected by the center point of the measuring area a, it is placed at a distance perpendicular to the center point of the measuring area a from the Z-axis direction of the platform, and A illuminometer 30 is placed on the χ-γ plane. According to this, after the illuminometer 3 〇 ^ is turned on for a period of time, the error value of the environment is measured first, and the value is recorded, and then the 40 parts of the light receiver of the illuminance meter are sequentially placed at nine points. Point 10, record the value after the measured value is stable, repeat the step measurement three times, and then deduct the ambient illuminance value from the average illuminance, the obtained illuminance can be regarded as the correct measurement value, and the measured ambient illuminance value is 0 lux, use this measurement to compare with the information provided by the manufacturer to confirm whether the illuminance value is complete or defective. This measurement method is a relatively simple measurement method, but the position must be manually adjusted to make each measurement, and there is an error value. The same point cannot be fixed at a certain position every time, and the external light source is fixed. The effect is that each re-measurement also has 3 corrections, so it takes more time to calibrate, and its measurement is less, and it is impossible to provide an optical analysis. [New content] In view of the above-mentioned conventional planar illumination measurement system is a manual adjustment method: but there are error values, and the amount of the number is small, it is impossible to achieve precision judgment 2 'more difficult to control the stability of quality; therefore, Ben Lai has made research and improvement to produce the automated planar photometric measurement system of this creation. The technical content adopted by the present creation is as follows, which includes at least one planar photometric measuring device, a shelter and an electric service; wherein: a planar illumination measuring device having a -χγ axis displacement platform, a production plan and a The shaft displacement bracket; the χ γ axis displacement platform is driven by a driver; the illuminance meter is erected on the χ γ axis displacement platform, and the 2 axis displacement bracket sighs a light source, and the light source is driven by another driver and can be driven along the Ζ axis Shifting, and the stepping motor of the light source is mounted on the x-axis displacement bracket, so that the light source can be adjusted for angle conversion, and the conversion angle is in the range of (10) to 180 degrees, and the χγ-axis displacement platform Connected to computer equipment, with automatic positioning function for measuring distance and points. a shield. For blocking the external light source, the initial illumination value inside the shield is 0 lux, which is covered by the plane measuring device and can be a curtain box. Computer equipment with built-in positioning and automatic correction of the χγ axis displacement platform - drive control software, a set detection range control platform program 'and _ control unit for controlling the angle of the light source stepping motor; The illuminance data measured by the meter is additionally 'electrically connected to the computer equipment by the metric measurement. The drive control software that borrows the computer equipment can automatically return the x-shift platform to the origin, and then integrate the mosquito detection range to control the flat-form and the fuse (4) software integration, and calculate the point of the two-axis direction of the face point. The number is divided by the set range by the number of points measured, and the distance between the points of the mother can be determined. In other words, the main purpose of this creation is to measure the computer equipment with the flat photometry, so that the advantages of the automatic measurement, correction and automatic positioning can be improved, not only the speed of the measurement, but also the measurement. The error per ^ distance is even smaller than that of the nine-point county, which improves the accuracy of the complete verification information of the analysis. Another purpose of measuring 乍t is to cover the plane illuminance ', the outside of the illuminance by a shield, and block the external light source so that the interior of the shield is erected by the ambient illuminance value. 】In June, as shown in the second figure, the author “Automated Planar Measurement Measure 2 = Included Plane Photometric Measurement Device 齩 Concealer 2 Plane Photometric Measurement Device 1 with an XY Axis Displacement Platform i, Illuminance Meter 12 and a z-axis displacement bracket 13; the XY-axis displacement platform 1 is driven by a driver (not shown) to be displaced in the X-axis or γ-axis direction, and the illuminometer i 2 is mounted above the χγ-axis displacement platform 1 1 The Z-axis displacement bracket 3 is combined with a light source 4, and the light source 14 is driven by another drive 11 (not shown) to be displaced in the Z-axis direction; in addition, the Z-sleeve displacement bracket 13 The stepping motor 141 is connected to the light source i 4 , and the stepping motor 1 41 can adjust the angle of the light source i 4 , and the actual light type of the light source 4 can be measured, and the adjustable The limb is 18G to (10) degrees

圖)。 几^一 A 遮蔽物2,遮蓋於該平面照度量測裝置1之外部,其 ^用在阻隔外界光源而使遮蔽物2内部之初始值 為,,其主要為確保量測時光源照度在最佳的 二==測裝置,其中,該遮蔽物2可為如第 動校==二;)^ 定檢測範圍控制平11之一驅動器控制軟體'一設 度之步進馬達以及:可控制光源 置1之昭"·Μ 9 祕程式,另外,平面照度量測裝 二…1 2之照度數據與電腦設備3電性連接。 於-防震之自動化平面照度雜統主要先 圖),並於平°面即量;^平彳面照度量測裝置1 (如第二 整個系統外部㈣置1外部包覆遮蔽物2 ;如此, 〇lux,^ 似暗房的架構,使内部環境两度值為 1二,外部光源的影響,這可減少如;用、= 之繁複程序。另平均照度扣掉環境照度值 序另外’本_設有χ、γ、ζ軸方向移動之三Figure). a plurality of masks 2 are covered outside the plane photometric measuring device 1, and are used to block the external light source to make the initial value of the inside of the mask 2, which is mainly for ensuring the illumination of the light source at the time of measurement. a good two == measuring device, wherein the shielding 2 can be as the first motion == two;) ^ detection range control flat 11 one drive control software 'one set stepping motor and: controllable light source Set the 1 Zhao "·Μ 9 secret program, in addition, the flat photometric measurement and installation of the two ... 1 2 illuminance data and computer equipment 3 electrical connection. In the -automated plane illuminance of the anti-shock system, the main picture is first), and the surface is measured in the plane; the flat surface measuring device 1 (such as the second outer part of the whole system (4) is set to 1 external covering shield 2; 〇 lux, ^ like the structure of the darkroom, so that the internal environment is two degrees, the influence of external light source, which can reduce the complicated procedures such as; use =, and the average illuminance deducts the ambient illuminance value order another 'this _ set There are three movements in the direction of χ, γ, and ζ

Claims (1)

M375866 六、申請專利範圍: 1、一種自動化平面照度量測系統,其包含: 一平面照度量測裝置,具有一 χγ轴位移平台、一照 度計及-Ζ軸位移支架,該χγ軸位移平台由-驅動器驅 動,而該照度計架設於χγ軸位移平台上,另該ζ轴位移 =有—光源’且該光源由另一驅動器驅動而可沿2軸 =蔽物’用峨隔外界細而使歧物内部之初始 ‘兄j值為〇 lux,其遮蓋於該平面照度量㈣置之外 位解!腦設備,其内建有可原點定位自動校正該χγ輪 平㈣賴1及m测範圍控制 中°二 計之照度數據與電腦設備電性連接,其 中’祕動器控制軟體可將該χγ轴位移平 、 匕算需量測點之位置,且量測時可設定; 式與該驅動該設定檢測範圍控制平台每 ㈣定每-點=量=離合。,以設定範圍除以量測點數, 量螂L·:'申其5;專:範圍第1項所述之「自動化平面照度 架上裝設有組接該光ί 壤二t先備内建-操控程—二 貧際光型。 肖又轉變凋整,據以量洌出該光源之 3、如申請專利範圍第2項所述之「自動化平面照摩 M375866 量測系統」,其中,該步進馬達之轉變角度為180度到-180 度的範圍。 4、如申請專利範圍第3項所述之「自動化平面照度 量測系統」,其中,該XY軸位移平台具備量測距離及點數 之自動定位功能,其量測數據進一步經由數值差分法,而 可自動建構更精確之平滑化照度量測。M375866 VI. Scope of Application: 1. An automated planar photometric measurement system comprising: a planar illumination measuring device having a χ γ-axis displacement platform, an illuminance meter and a Ζ-axis displacement bracket, the χ γ-axis displacement platform - the driver is driven, and the illuminometer is mounted on the χ γ axis displacement platform, and the yaw axis displacement = has - the light source ' and the light source is driven by another driver and can be separated by the outer circumference along the 2 axis = the shield The initial 'brother' value inside the dislocation is 〇lux, which is covered by the plane metric (four) set out of the solution! Brain equipment, which has built-in locator positioning to automatically correct the χ γ wheel flat (4) Lai 1 and m measurement In the range control, the illuminance data of the second meter is electrically connected with the computer equipment, wherein the 'cursor control software can shift the χ γ axis to the position of the required measuring point, and can be set during the measurement; Drive the set detection range control platform every (four) fixed every-point = quantity = clutch. , by dividing the set range by the number of measured points, the quantity 螂L·: '申其5;Special: the scope of the first item described in the "Automatic Planar Illumination Rack is equipped with the light of the light Build-manipulation process-two poor light mode. Xiao has changed and smashed, according to the quantity of the light source 3, as described in the second paragraph of the patent application, "automated plane photo M375866 measurement system", wherein The stepping motor has a transition angle ranging from 180 degrees to -180 degrees. 4. The "automated planar photometric measurement system" as described in claim 3, wherein the XY-axis displacement platform has an automatic positioning function for measuring distance and points, and the measurement data is further subjected to a numerical difference method. A more accurate smoothing measurement can be automatically constructed.
TW98206450U 2009-04-17 2009-04-17 Automatic measurement system of planar illumination intensity TWM375866U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW98206450U TWM375866U (en) 2009-04-17 2009-04-17 Automatic measurement system of planar illumination intensity

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW98206450U TWM375866U (en) 2009-04-17 2009-04-17 Automatic measurement system of planar illumination intensity

Publications (1)

Publication Number Publication Date
TWM375866U true TWM375866U (en) 2010-03-11

Family

ID=50593196

Family Applications (1)

Application Number Title Priority Date Filing Date
TW98206450U TWM375866U (en) 2009-04-17 2009-04-17 Automatic measurement system of planar illumination intensity

Country Status (1)

Country Link
TW (1) TWM375866U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI801012B (en) * 2021-10-26 2023-05-01 財團法人工業技術研究院 Inspection method and inspection platform for lithography

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI801012B (en) * 2021-10-26 2023-05-01 財團法人工業技術研究院 Inspection method and inspection platform for lithography

Similar Documents

Publication Publication Date Title
CN108645428A (en) The monoblock type scaling method of six degree of freedom laser target
US20090012731A1 (en) Method and device for calibration of digital sun sensor
CN106370297A (en) High-precision automatic sun photometer
CN203547032U (en) Skylight
CN203657746U (en) Position calibration device applied to laser and camera
US9952090B2 (en) Detecting apparatus and detecting method thereof
CN108225563B (en) Field environment sky polarization modeling alignment measuring device
CN105450912B (en) The real-time field stitching method of scanning method area array CCD detector
CN109875586B (en) Dual laser tuning device and method
CN204855669U (en) Machine carries display photoelectric parameter automatic measuring device
JPWO2017071561A5 (en)
CN109520526B (en) Common-light-path-based star simulator calibration and auto-collimation measurement system and method
CN101216349A (en) Portable infrared temperature measurement apparatus and its self calibration method
CN108645392B (en) Camera installation posture calibration method and device
TWM375866U (en) Automatic measurement system of planar illumination intensity
CN104634765A (en) Device and method for measuring atmospheric transmissivity by optical radiation measurement instrument
CN110455417A (en) For the quantitative measurment error calibration method of infrared optical system stray radiation
CN103954436A (en) High-precision spectral radiance calibration device
Gothe et al. Pointing of HAGAR telescope mirrors
CN213783397U (en) Projector with a light source
CN104865190B (en) A kind of water body apparent spectral observation device and method for observing geometry adjust automatically
CN115202406A (en) Solar direct radiometer and automatic tracking method thereof
CN209486405U (en) The assembling & adjusting system of optical plate in a kind of optics module
EP3971542A1 (en) Manufacturing method of imaging spectrometer having convex grating
CN109632088B (en) Automatic control system for detecting and correcting illuminance of multiple light sources

Legal Events

Date Code Title Description
MM4K Annulment or lapse of a utility model due to non-payment of fees