M366754 五、新型說明： 【新型所屬之技術領域】 本新型是關於一種真空裝置，特別是指一種且 1至丹有兩條 併排之加工通道的單腔雙線式真空裝置。 【先前技術】 在半導體、電機電子與光電產業中，許多製程都需要 經過多道鍍膜步驟以形成多種不同材質的膜層。為了使力 工能夠一貫化作業，申請人曾申請如圖丨所示的折合式真 空裝置I，該真空裝置i包含：一個第一基座u、一個與第 基座11平行間隔之第二基座12、兩條用來平移輸送加工 物件的輸送機構13、一個靶材單元14，以及一個連接該等 第一及第二基座11、12的連接機構15。其中該第一基座u 具有一個界定出一長條形通道lu的腔壁112，該腔壁 具有一内壁部113、一外壁部114，以及數個設在内、外壁 部113、114之間並受控制可打開或關閉的閥門115，而該 通道ill具有一個鄰近連接機構15的出口端116，以及一 個與該出口端116間隔之入口端117。該第二基座12的構 造與第一基座11相同，故亦具有一個通道121，該通道121 貝J疋具有一個鄰近該連接機構15的入口端122，以及一個 與該入口端122間隔之出口端123。 又所述輸送機構13分別安裝在該第一及第二基座u、 12之通道hi、12ι内’並且將加工物件由入口端Η?、I]: 往出口碥116、123移送。該靶材單元14則是具有數個等距 離地安裝在該第一及第二基座u、12上的靶材141。而該 M366754 連接機構15包括一個鄰近第-基座η之出口端116的第— 迴轉件m—個鄰近第二基座12之人口端122的第二迴 轉件152、一個連接該等第一及第二迴轉件i5i、152的連 接腔體153、-個設在該連接腔體153内部的連接輸送件 154,以及一個設於該連接腔體153上的靶材155。 使用時例如基板等等的加工物件是由第—基座u的入 口端U7進人通道⑴β ’並逐漸地通過各個㈣⑷進行 各項加工》當加工物件通過第一迴轉件151時將旋轉％度 ’然後藉由連接輸送件154的傳送移到第二迴轉件152，最 後再旋轉90度後送入第二基座12的通道12卜相同道理取 藉由安襄在第二基座12内的輪送機構13的傳送加工物 件會逐漸地由第二基座12之人口端122往出口端123移送 ’並完成連續加工的作業。 前述新型專利雖然可以利用連接機構15來連接平行間 隔的第一及第二基座U、12，伯a — ， 12但疋该項設計必需利用兩個 分開的腔體來各別界定出兩條間隔的通道m、121，故整 體來說不僅體積龐大，也需要佔據較大的擺放空間，在設 計上未盡理想。 【新型内容】 本新型之目的係在提供—種可縮小體積及擺放空間之 單腔雙線式真空裝置。 本新型之單腔雙線式真空裝置是用來移送-加工物件 ，並包含：-個具有一腔室的基座、一個將該基座之腔室 區隔成帛if道及一第二通道的冷卻區隔單元、兩個分 M366754 m « 別安裝在該腔室之第一及第二通道内並且將加工物件由該 等通道之一入口端往一出口端傳送的輸送機構，以及—個 架設在該基座旁並將加工物件由第一通道移送到第二通道 的連接機構。 本新型的有益功效在於：藉在該基座的腔室内部架設 - 具有區隔及冷卻功能之冷卻區隔單元，除了可以在腔室内 • 區隔出兩條平行之第一及第二通道，以縮小裝置的體積及 φ 擺放空間外，該冷卻區隔單元的設計，也可以降低加工時 的製程咼溫，使真空裝置的各項加工順暢進行。 【實施方式】 有關本新型之前述及其他技術内容、特點與功效，在 以下配合參考圖式之較佳實施例的詳細說明中，將可清楚 的呈現。 在本新型被詳細描述之前，要注意的是，在以下的說 明内容中，類似的元件是以相同的編號來表示。 φ 參閱圖2、3,本新型單腔雙線式真空裝置之第一較佳 - 實施例是用來移送一加工物件，以便在該加工物件上進行 各種的加工。上述真空裝置並包含：一個長矩形的基座2、 一個安裝在該基座2内部的冷卻區隔單元3、一個安裝在該 基座2上的靶材單元4、一第一輸送機構5、一第二輸送機 構5’ ’以及一個安裝在該基座2 一側的連接機構6。 本實施例之基座2實際上是由數個左右併靠之箱體2〇 靠接而成，併靠後該基座2包括一個界定出一個長方形之 腔室21的腔壁22，該腔壁22具有一個沿著長度方向延伸 5 M366754 的第一壁部221，以及一個和該第一壁部221平行間隔的第 二壁部222,該基座2還包括數片間隔並垂直連接在第一及 第二壁部221、222之間的區隔壁23，每個區隔壁23都具 有一個靠近第一壁部221的第一閥門231，以及一個靠近第 二壁部222的第二閥門232，前述第一及第二閥門23丄、 232並受到自動控制可以打開或者關閉。 本實施例之冷卻區隔單元3包括數個分別架設在基座2 上相鄰之區隔壁23間的冷卻隔座30，藉由該等冷卻隔座 30的區隔，可以將基座2之腔室21區隔成一條鄰近第一壁 部221的第一通道211，以及一條鄰近第二壁部222的第二 通道212,其中第一通道211具有一個鄰近連接機構6的出 口端213，以及一個和出口端213間隔的入口端214，而該 第二通道212也是具有一出口端215及一入口端216，但第 二通道212之入口端216是鄰近該連接機構6。 本實施例的每個冷卻隔座30都具有兩片彼此平行並垂 直於區隔壁23的側板31、一個連接在該等側板31之間並 與側板31共同界定出一冷卻室32的連接圍板33。該連接 圍板33具有一個上壁部331、一個與上壁部331上下平行 間隔之下壁部332，以及兩個和所述上、下壁部331、332 連接並且和區隔壁23貼靠的側壁部333、334。又該冷卻隔 座30還具有數片由上壁部331往下延伸的第一隔板34、數 片位在相鄰之第一隔板34之間並由下壁部332往上突出的 第二隔板35、一個連接該上、下壁部331、332的支撐板 %、一支安裝在上、下壁部331、332之間並鄰近側壁部 JVI366754M366754 V. New description: [New technical field] The present invention relates to a vacuum device, in particular to a single-chamber two-wire vacuum device with one and two parallel processing channels. [Prior Art] In the semiconductor, motor, and optoelectronic industries, many processes require multiple coating steps to form layers of different materials. In order to enable the workmanship to be consistent, the applicant has applied for a folding vacuum device I as shown in FIG. ,, which includes a first base u and a second base spaced parallel to the base 11 The seat 12, two transport mechanisms 13 for translating and transporting the workpiece, a target unit 14, and a connecting mechanism 15 connecting the first and second bases 11, 12. The first base u has a cavity wall 112 defining an elongated channel lu, the cavity wall having an inner wall portion 113, an outer wall portion 114, and a plurality of inner and outer wall portions 113, 114. And is controlled by a valve 115 that can be opened or closed, and the passage ill has an outlet end 116 adjacent the connection mechanism 15, and an inlet end 117 spaced from the outlet end 116. The second base 12 has the same configuration as the first base 11, and thus has a passage 121 having an inlet end 122 adjacent to the connecting mechanism 15 and a spacing from the inlet end 122. Exit end 123. Further, the transport mechanism 13 is mounted in the channels hi, 12i of the first and second susceptors u, 12, respectively, and transfers the processed articles from the inlet ends 、, I] to the outlet ports 116, 123. The target unit 14 is a target 141 having a plurality of equidistantly mounted on the first and second pedestals u, 12. The M366754 connecting mechanism 15 includes a first rotating member m adjacent to the outlet end 116 of the first base η, a second rotating member 152 adjacent to the population end 122 of the second base 12, and a first connecting unit A connecting cavity 153 of the second rotating member i5i, 152, a connecting conveying member 154 disposed inside the connecting cavity 153, and a target 155 disposed on the connecting cavity 153. In use, a workpiece such as a substrate or the like is fed into the passage (1) β ' by the inlet end U7 of the first base u and is gradually processed by each of the four (4) (4). When the workpiece passes through the first rotary member 151, it will rotate by %. 'Then then moved to the second rotating member 152 by the transfer of the connecting conveying member 154, and finally rotated 90 degrees and then sent to the passage 12 of the second base 12 for the same reason to be taken by the ampoule in the second base 12. The conveyed workpiece of the transfer mechanism 13 is gradually transferred from the population end 122 of the second susceptor 12 to the outlet end 123 and the continuous machining operation is completed. Although the aforementioned novel patent can utilize the connection mechanism 15 to connect the parallel spaced first and second pedestals U, 12, a a, 12, but the design must utilize two separate cavities to define two separate The channels m and 121 are separated, so that the overall volume is not only bulky, but also requires a large space for placement, which is not ideal in design. [New content] The purpose of this new type is to provide a single-chamber two-wire vacuum device that can reduce the volume and space. The novel single-chamber two-wire vacuum device is used for transferring and processing articles, and comprises: a base having a chamber, a chamber partitioning the base into an 帛 if and a second passage Cooling compartment unit, two sub-M366754 m « transport mechanisms that are installed in the first and second passages of the chamber and transport the workpiece from one of the inlet ends to the outlet end, and A connecting mechanism is disposed adjacent to the base and moves the workpiece from the first passage to the second passage. The beneficial effect of the novel is that: by arranging inside the chamber of the pedestal - a cooling compartment having a partition and a cooling function, in addition to separating two parallel first and second passages in the chamber, In addition to reducing the volume of the device and the space for φ placement, the design of the cooling compartment unit can also reduce the temperature of the process during processing, so that the various processing of the vacuum device can be smoothly performed. The above and other technical contents, features and effects of the present invention will be apparent from the following detailed description of the preferred embodiments. Before the present invention is described in detail, it is noted that in the following description, similar elements are denoted by the same reference numerals. φ Referring to Figures 2 and 3, a first preferred embodiment of the novel single-chamber two-wire vacuum apparatus is used to transfer a workpiece to perform various processing on the workpiece. The vacuum device further includes: a long rectangular base 2, a cooling compartment unit 3 mounted inside the base 2, a target unit 4 mounted on the base 2, a first conveying mechanism 5, A second transport mechanism 5'' and a connection mechanism 6 mounted on one side of the base 2. The base 2 of the present embodiment is actually formed by a plurality of left and right abutting boxes 2, and the base 2 includes a cavity wall 22 defining a rectangular chamber 21, the cavity The wall 22 has a first wall portion 221 extending 5 M 366 754 along the length direction, and a second wall portion 222 spaced parallel to the first wall portion 221, the base 2 further comprising a plurality of spaced and vertically connected a partition wall 23 between the first and second wall portions 221, 222, each of the partition walls 23 has a first valve 231 adjacent to the first wall portion 221, and a second valve 232 adjacent to the second wall portion 222. The aforementioned first and second valves 23, 232 are automatically controlled to be opened or closed. The cooling partition unit 3 of the embodiment includes a plurality of cooling partitions 30 respectively disposed between the adjacent partition walls 23 of the base 2, and the partitions of the cooling partitions 30 can be used to partition the base 2 The chamber 21 is partitioned into a first passage 211 adjacent to the first wall portion 221 and a second passage 212 adjacent to the second wall portion 222, wherein the first passage 211 has an outlet end 213 adjacent to the connection mechanism 6, and An inlet end 214 is spaced from the outlet end 213, and the second passage 212 also has an outlet end 215 and an inlet end 216, but the inlet end 216 of the second passage 212 is adjacent to the attachment mechanism 6. Each of the cooling partitions 30 of the present embodiment has two side plates 31 which are parallel to each other and perpendicular to the partition walls 23, and a connecting fence which is connected between the side plates 31 and which together with the side plates 31 define a cooling chamber 32. 33. The connecting plate 33 has an upper wall portion 331, a lower wall portion 332 spaced apart from the upper wall portion 331, and two upper and lower wall portions 331, 332 connected to the partition wall 23. Side wall portions 333, 334. Further, the cooling partition 30 further has a plurality of first partitions 34 extending downward from the upper wall portion 331 and a plurality of first partitions 34 positioned between the adjacent first partitions 34 and projecting upward from the lower wall portion 332. Two partition plates 35, one support plate % connecting the upper and lower wall portions 331, 332, one portion being installed between the upper and lower wall portions 331, 332 and adjacent to the side wall portion JVI366754
333的入水管37 ’以及一支架設在該上、下壁部331、332 間並鄰近側壁部334的出水管38。每個第一隔板34到下壁 部331間都具有一第一通口 341，而所述第二隔板35與上 壁部332間各別具有一第二通口 351，該支撐板36具有數 個鄰近上方的貫孔361，藉此可將冷卻室32分割成一條迂 迴的水道，該水道的起始端是鄰近該入水管37，而水道的 終止端是鄰近該出水管38，前述入水管37及出水管38上 各別設有數個通向水道的孔洞，不再以圖例說明。 當冷卻液由入水管37通入時，冷卻液將由入水管37 流入冷卻室32，並且逐漸地受到第一及第二隔板34、35的 區隔，而以迂迴的方式逐漸地往圖3的右側流動。當冷卻 液流到設置出水管38的末端時，即會由出水f %流出， 藉此達到利用冷卻液之循環來冷卻第一及第二通道2ιι、 212之製程溫度的目的。 本實施例之革巴材單元4是包括數個安裝在基座2上的 乾材4卜上述㈣41分別對應基座2之第—及第二通道 211、212,並且位在相鄰的區隔壁23之間。 W “ J疋合別女褒在基 座2之第-通道211、第二通道212内，每個第一及第二輸 送機構5、5，都包括數個位在相鄰之區隔壁U間的輸送單 兀，以及數個用來驅動所述輸送單元51作用以帶動加工 物件前進的動力單元52,由於前汁楚 … 於刚述第—及第二輸送機構5 、5疋已知技術，不再說明。 本實施例之連接機構6是— 種平移的設計 其係架設 M366754 在基座2的-側，並用來連接絲座2的第—及第二通道 211、212,所述連接機構6並包括一個中空的連接腔體61 、-個架設在該連接腔體61内的平移單元62，以及一個架 設在該平移單元62上的連接承座63，料接腔體Η具有 兩片分別與第-及第二壁部221、222接續的連接主壁6ιι 1及兩條垂直連接該等連接主壁611的辅助滑執M2，而 該平移單元62具有—支可轉動地架設在該等連接主壁611 間的螺# 62卜以及—個驅動該螺桿62ι旋轉的馬達， 而該連接承座63疋架设在螺桿621及輔助滑執上，並 °因馬達622的正轉及反轉，而沿著—平移方向μ往復移 動0 而言，本實施例之真空裝置在使用時，例如基 板等等的加工物件是藉由第—輸送機構5進入第一通道m 並k無地往出口端213移送，當加工物件由第一通道211 的出口端213移出時’就會進人連接機構6的連接腔體61 内’並移送到該連接機構6的連接承座63上，此時，馬達 622就會帶動螺桿621旋轉，並謂連接承座η往第二通 道212的方向移送，之後再由入口 # 進入該第二通道 212,藉由第二輸送機構5,的移送，可讓加工物件逐漸地往 出口端215移送，最後移出該第二通道212。 進一步說明的是，本實施例之真空裝置在設計上，除 了利用該等冷卻隔座3G將腔室21分割成第—及第二通道 外由於一般乾材41在進行濺鑛加工時會產生製 程门/皿而本實施例藉由循環於每個冷卻隔座％的冷卻液 M366754 叮以降低所述第一及第二通道211、212由 〇 内的製程溫度， 以避免基座2内的第一及第二通道211、 .^ 1 212同時進行加工 產生過高的製程溫度，影響到加工的順利進行。 參閱圖4,本新型第二較佳實施例之真空裝置的構造大 致與弟-實施例相同，不同者僅在於：連接機構6，即第_ 較㈣施例的連接機構6是—種可將加工物件以平移方式 移送的設計，此種設計適合在加卫物件的兩個侧面上分別A water inlet pipe 37' of 333 and a water supply pipe 38 provided between the upper and lower wall portions 331, 332 and adjacent to the side wall portion 334 are provided. Each of the first partitions 34 and the lower wall portion 331 has a first opening 341, and the second partition 35 and the upper wall portion 332 respectively have a second opening 351. The support plate 36 Having a plurality of through holes 361 adjacent thereto, thereby dividing the cooling chamber 32 into a bypass waterway, the starting end of the water channel is adjacent to the water inlet pipe 37, and the terminating end of the water channel is adjacent to the water outlet pipe 38, the foregoing A plurality of holes leading to the water channel are provided on the water pipe 37 and the water outlet pipe 38, respectively, and will not be illustrated by way of illustration. When the coolant is introduced through the inlet pipe 37, the coolant will flow from the inlet pipe 37 into the cooling chamber 32, and will gradually be separated by the first and second partitions 34, 35, and gradually return to FIG. 3 in a meandering manner. The right side flows. When the coolant flows to the end of the outlet pipe 38, it is discharged from the outlet water f%, thereby achieving the purpose of cooling the process temperatures of the first and second passages 2, i, 212 by the circulation of the coolant. The leather material unit 4 of the present embodiment includes a plurality of dry materials 4 mounted on the base 2, and the above-mentioned (four) 41 respectively correspond to the first and second passages 211, 212 of the base 2, and are located adjacent to the adjacent partitions. Between 23 . W "J 疋 褒 褒 褒 in the pedestal 2 - channel 211, the second channel 212, each of the first and second transport mechanisms 5, 5, including a plurality of bits in the adjacent zone U a transport unit, and a plurality of power units 52 for driving the transport unit 51 to drive the workpiece to advance, due to the prior art, and the second and second transport mechanisms 5, 5, The connection mechanism 6 of the present embodiment is a translational design which is provided with a M366754 on the side of the base 2 and is used to connect the first and second passages 211, 212 of the wire holder 2, the connection mechanism. 6 includes a hollow connecting cavity 61, a translating unit 62 erected in the connecting cavity 61, and a connecting bracket 63 mounted on the translating unit 62. The receiving cavity has two pieces respectively The first and second wall portions 221, 222 are connected to the main wall 6 ι 1 and two auxiliary slides M2 perpendicularly connecting the connecting main walls 611, and the translating unit 62 has a rotatably mounted on the connections a screw #62 between the main wall 611 and a motor that drives the screw 621 to rotate, and The socket 63 is erected on the screw 621 and the auxiliary slide, and the vacuum device of the embodiment is used when the vacuum device of the embodiment is reciprocated 0 in the translational direction by the forward rotation and the reverse rotation of the motor 622. The processed object such as the substrate is transferred into the first passage m by the first conveying mechanism 5 and is transferred to the outlet end 213 without being grounded. When the workpiece is removed from the outlet end 213 of the first passage 211, the connecting mechanism is entered. The connecting cavity 61 of the 6 is connected to the connecting bracket 63 of the connecting mechanism 6. At this time, the motor 622 drives the screw 621 to rotate, and the connecting socket η is transferred to the second passage 212. Then, the second passage 212 is accessed by the inlet #, and the workpiece is gradually transferred to the outlet end 215 by the transfer of the second conveying mechanism 5, and finally the second passage 212 is removed. Further, the embodiment The vacuum device is designed to divide the chamber 21 into the first and second passages by using the cooling partitions 3G. Since the general dry material 41 generates a process door/dish when the sputtering process is performed, the embodiment borrows Cycled through each cooling compartment Cooling liquid M366754 叮 to reduce the process temperature of the first and second passages 211, 212 from the crucible, so as to avoid the simultaneous processing of the first and second passages 211, . The process temperature affects the smooth progress of the process. Referring to Fig. 4, the structure of the vacuum apparatus of the second preferred embodiment of the present invention is substantially the same as that of the embodiment, except that the connection mechanism 6, that is, the first (four) The connecting mechanism 6 of the embodiment is a design that can transfer the processed object in a translational manner, and the design is suitable for respectively on the two sides of the reinforced object.
加工，因為㈣41都位在遠離冷卻區隔單元3的外側。而 本新型第二實施例的連接機才冓6是一種迴轉的設計，即利 用邊迴轉式的連接機構6 ’可以在加卫物件的同—個側面進 行多道的加工。 為了達到以上目的，本實施例之連接機構6包括一個 中空的連接腔體61、一個可36〇度迴轉地架設在該連接腔 1内邛的迴轉座65，以及兩個安裝在所述迴轉座65上 的連接承座63，當該等連接承座63的其中之一平行於第一 輸L機構5的輸送單元51時，架設在該輸送單元上的 加工物件就可以傳送並架設在該連接承座63上，之後該迴 轉座65將轉動180度，以便讓架設加工物件的連接承座63 迴轉後對應第二輸送機才冓5,，以此類推，當承載有加工物 件之連接承座63平行對應第二輸送機構5，時，所述連接承 座《即可將承載之加工物件送往第二輸送機構5’。亦即， 本實施例藉由改變該連接機構6的構造，可以讓加工物件 翻轉180度。 由以上說明可知，本新型在一個腔室21内利用冷卻隔 9 M366754 座30區隔成兩條平行的第一及第二通道211、212，並且利 用一個連接機構6的銜接，將由第一通道211送出的加工物 件精由轉接傳送到第·一通道212的設計不僅未見於習知真 空裝置’前述設計亦具有節省體積及擺設空間的功效。 惟以上所述者’僅為本新型之較佳實施例而已，當不 能以此限定本新型實施之範圍，即大凡依本新型申請專利 範圍及新型說明内容所作之簡單的等效變化與修飾，皆仍 屬本新型專利涵蓋之範圍内。 【圖式簡單說明】 圖1是專利號數第M341704號新型專利的一加工設備 示意圖； 圖2是本新型真空裝置之第一較佳實施例的俯視示意 +圖3是該第一較佳實施例的一局部剖視圖，單獨顯示 °亥真空裝置之一冷卻隔座；及 圖4是-類似圖2的俯視示意圖，顯示本新型真空裝 置之第二較佳實施例。 10 M366754 【主要元件符號說明】Processing, because (4) 41 are all located away from the outside of the cooling compartment unit 3. However, the connector 6 of the second embodiment of the present invention is a revolving design in which the side-rotating coupling mechanism 6' can perform multi-pass processing on the same side of the object. In order to achieve the above object, the connecting mechanism 6 of the present embodiment includes a hollow connecting cavity 61, a slewing seat 65 which is slidably disposed 36 degrees inside the connecting cavity 1, and two mounted on the slewing seat. The connecting bracket 63 on the 65, when one of the connecting sockets 63 is parallel to the conveying unit 51 of the first conveying mechanism 5, the processed object erected on the conveying unit can be conveyed and erected on the connection On the seat 63, the slewing seat 65 will then be rotated by 180 degrees so that the connecting bracket 63 for erecting the workpiece is rotated to correspond to the second conveyor 冓5, and so on, when the connecting seat carrying the workpiece is carried. 63 parallel to the second conveying mechanism 5, when the connecting socket "send the loaded workpiece to the second conveying mechanism 5'. That is, in the present embodiment, by changing the configuration of the connecting mechanism 6, the workpiece can be flipped by 180 degrees. As can be seen from the above description, the present invention is divided into two parallel first and second passages 211, 212 by a cooling partition 9 M366754 seat 30 in a chamber 21, and is connected by a connecting mechanism 6 to be the first passage. The design of the 211 sent workpieces transferred from the transfer to the first passage 212 is not only found in the conventional vacuum device. The aforementioned design also has the effect of saving volume and space. However, the above description is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention, that is, the simple equivalent changes and modifications made by the novel application scope and the novel description. All remain within the scope of this new patent. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a schematic view of a processing apparatus of a novel patent No. M341704; FIG. 2 is a plan view of a first preferred embodiment of the vacuum apparatus of the present invention; FIG. 3 is a first preferred embodiment. A partial cross-sectional view of an example showing a cooling partition of a vacuum device alone; and FIG. 4 is a top plan view similar to FIG. 2 showing a second preferred embodiment of the vacuum apparatus of the present invention. 10 M366754 [Main component symbol description]
2 基座 334 侧壁部 20 箱體 34 第一隔板 21 腔室 341 第一通口 211 第一通道 35 苐二隔板 212 第二通道 351 第二通口 213 出口端 36 支稽板 214 入口端 361 貫孔 215 出口端 37 入水管 216 入口端 38 出水管 22 腔壁 4 革巴材單元 221 第一壁部 41 靶材 222 第二壁部 5 第一輸送機構 23 區隔壁 5， 第二輸送機構 231 第一閥門 51 輸送單元 232 第二閥門 52 動力單元 3 冷卻區隔單元 6 連接機構 30 冷卻隔座 61 連接腔體 31 側板 611 連接主壁 32 冷卻室 612 辅助滑執 33 連接圍板 62 平移單元 331 上壁部 621 螺桿 332 下壁部 622 馬達 333 側壁部 63 連接承座 11 M366754 65 迴轉座 64 平移方向 122 base 334 side wall portion 20 box 34 first partition 21 chamber 341 first port 211 first channel 35 second partition 212 second channel 351 second port 213 outlet end 36 branch plate 214 entrance End 361 through hole 215 outlet end 37 inlet pipe 216 inlet end 38 outlet pipe 22 cavity wall 4 leather material unit 221 first wall portion 41 target 222 second wall portion 5 first conveying mechanism 23 region partition wall 5, second conveying Mechanism 231 First valve 51 Delivery unit 232 Second valve 52 Power unit 3 Cooling compartment unit 6 Connection mechanism 30 Cooling compartment 61 Connection cavity 31 Side plate 611 Connection main wall 32 Cooling chamber 612 Auxiliary slipper 33 Connecting coaming plate 62 Translation Unit 331 Upper wall portion 621 Screw 332 Lower wall portion 622 Motor 333 Side wall portion 63 Connection socket 11 M366754 65 Slewing seat 64 Translation direction 12