M359789 八、新型說明: 【新型所屬之技術領域】 本創作屬光電產業LED後段製程,LED矽晶圓切割前係貼於藍膜黏面上 (另一面為非黏面),經縱向橫向切割後,便形成一顆顆矩形小晶粒,切割時 只切破矽晶圓而未切至藍膜,由於晶粒尺寸微小,須經藍膜擴張使晶粒間的 間距加大,以利後製程撿工作,本創作係將藍膜擴張之用途。 【先前技術】 # 目前習用藍膜擴張裝置,於擴張後完成之成品具有兩種型態(一)為不 具備自動裁切功能,必須以手工切除廢料(二)具有自動裁切功能,但藍膜材 料向内包覆致使藍膜殘料黏面朝外,當成品上下推疊時,藍膜黏面互相黏結 不易分離,請參閱第三圖,且成品仍緊套於擴張盤上以致不易取出。 本創作之目的係提供藍膜自動裁切,裁切後使藍膜殘料往外反向包覆, 使藍膜材料非黏面朝外,當成品上下推疊時,形成藍膜黏面與非黏面接觸而 易於分離,請參閱第五圖,並且自動將成品頂出脫離擴張盤。 _ 【新型内容】 本創作主要目的,係指藍膜擴張後能自動裁切,裁切後之藍膜殘料向外 反向包覆於塑膠外環,使藍膜非黏面朝外。 本創作之藍膜擴張裝置於擴張盤外為設一切刀座,切刀座設一環狀鋸 齒切刀故能自動裁切藍膜。 另於擴張盤上方設-壓環座,此壓環座周圍設有撐環鍵,此擇環鍵使塑 朦外環之外緣露出以便藍膜切斷時反向包覆又於擴張盤外緣做出比擴張 5 M359789 盤外緣溝槽底部高,用以引導藍膜反向包覆塑膠外環β 本創作另—目的為擴張後之成品,藉由頂銷將成品頂出脫離擴張盤,以 利取出成品。 本創作之藍膜擴張裝置於切刀座上設有頂銷,於藍膜切斷、壓環座上升 後,頂銷將成品頂出脫離擴張盤。 【實施方式】 本創作係由提出一種藍膜擴張環裝置,其具備自動裁切另將藍膜殘料 • 往外反向包覆,使藍膜非黏面朝外,並且由頂銷頂出成品脫離擴張盤。 請參閱第一、二、六圖,本藍膜擴張裝置係由一壓環座7、壓膜環η、 氣缸支架1、掀蓋27、工作台26、擴張盤14與切刀座22所組成。於工作 ρ 26中央„又gj孔容置空間,ju孔上周圍置一獅軟塾η以增加藍膜摩擦 力,此谷置空間中央設一擴張盤14,此盤外環設一外緣溝槽15用以容納塑膠 内環34與塑膠外環31,擴張盤外緣12高於外緣溝槽15底部擴張盤14固 定於擴張機構39,擴張機構39升降由飼服馬達23推動。 _ -切縣22為-環狀形,設於擴張盤14之下切刀座找上方設一單斜 溝槽,溝槽外緣„又環狀織切刀2〇, 一具有斜面之弧狀切刀迫緊塊财 鑛齒切刀20迫緊固定,切刀迫緊塊18中央設有數個頂銷19,頂銷19内設有 頂銷彈簧25,切刀座22之升降由—切刀氣紅24作動切刀座泣 、切刀氣缸 24與擴張機構39同時升降。 '環座7為f形狀巾央具肋條,於環形周圍設有數健環鍵&此鍵可 上下移動並可完全縮入壓環座7·此鍵内設撐環彈簧6,並於外露端設一樓環 6 M359789 鋼珠9’此鋼珠由一撐環彈簧10所外推,難座7由導桿3所導引,壓環座7 升降由壓環氣紅4所作動. 掀蓋27為中空狀設於工作台26上方以鉸鍵28連結於工作台%掀蓋 27中央設-壓環n,此環經由連桿由_氣缸2上下作動壓膜環u下方 設有數個壓膜彈簧16,掀蓋27前緣設一卡勾29以卡住結合工作台訊掀蓋 前端設一定位鍵30作為掀蓋下蓋時與工作台26定位. -氣缸支架1固定於掀蓋27之上,而壓膜氣缸22與壓環氣缸4固定於此 I 支架上, 請參閱第二,六圖,一般操作本裝置時,先將掀蓋27往上掀開,再將塑膠外 環31置放於_座7之撐環鍵8上塑膠内環34放於擴張盤14之外緣溝 槽15,藍膜素材37置放於軟墊π與擴張盤14上,再將掀蓋27蓋合使卡勾 29卡住工作台26, 一卡勾閉鎖氣缸4〇鎖住卡勾29. 請參閱第七圖,伺服馬達23將擴張盤Η推升,使藍膜素材37與晶圓38 同時被擴張,擴張盤14上升亦帶動切刀座22與切刀氣缸24同時上升. > 請參閱第四,七,八圖,當擴張盤14上升到預定高度後,壓環座7將塑膠外 環31下壓套住塑膠内環34,使藍膜素材37夾於兩者之間,此時揮環鍵8往 上退縮,並且切刀氣缸24推升切刀座22,使銀齒切刀20切斷藍膜素材37 由於擴張盤外緣12高於塑膠外環31底部,又塑膠外環31外徑之外緣完全 外露,故藍膜外包35於塑膠外環31外緣· 請參閱第九圖,當完成切膜後,壓環座7上升,撐環鍵8再度彈出,此時頂 銷19亦將成品頂出脫離擴張盤,以利於取出成品. 7 M359789 — 請參閱第五®,若調高舰鱗緣12之高度,因塑餅環31之外程外緣 完全外露,故藍膜完全外包36於塑膠外環& 以上所述之實施例僅係為說明本創作之技術思想及特點,其目的在使熟習 此項技藝之人士能夠了解本創作之内容並據以實施當不能以之限定本創 作之專利範®,即大凡依本創作揭*之精制狀鱗變化或修飾,仍應 涵蓋在本創作之專利範圍内. 【圖式簡單說明】 參 第一圖為本創作剖面正面圖 第二圖為掀蓋蓋合準備擴張狀態, 第二圖為習用擴張成品,藍膜殘料往内包覆使藍膜黏面朝外 第四圖為本創作擴張之成品,藍膜殘料往外包覆使藍膜非黏面朝 外 第五圖為本創作擴張之成品,經調高擴張盤外緣高度,使藍膜殘料完全往外 包覆塑膠外環 鲁 第六圖為塑膠内外環與藍膜已置放於定位 第七圖為擴張盤上升,使藍膜與晶圓被擴張 第八圖為塑膠外環套住塑膠内環,使藍膜夾於兩者中間鑛齒切刀切斷藍膜 第九圖為壓環座上升,頂銷將成品頂出脫離擴張盤以便取出成品 【主要元件符號說明】 8 M359789M359789 VIII, new description: [New technology field] This creation belongs to the LED industry segment of the optoelectronic industry. The LED wafer is attached to the blue film adhesive surface before the wafer is cut (the other side is non-adhesive). , a small rectangular crystal grain is formed, and only the silicon wafer is cut and not cut to the blue film during cutting. Due to the small grain size, the blue film expansion is required to increase the spacing between the crystal grains, so as to facilitate the process.捡Work, this creation is the use of blue film expansion. [Prior Art] # Currently the blue film expansion device is used. After the expansion, the finished product has two types (1). It does not have the automatic cutting function. It must be manually removed (2) with automatic cutting function, but blue. The in-line coating of the film material causes the blue film residue to face outward. When the finished product is pushed up and down, the blue film adhesive faces are not easily separated from each other. Please refer to the third figure, and the finished product is still tightly wrapped on the expansion plate so that it is difficult to remove. . The purpose of this creation is to provide automatic cutting of the blue film. After cutting, the blue film residue is reversely coated, so that the blue film material is non-adhesively facing outward. When the finished product is pushed up and down, the blue film is formed. Adhesive contact is easy to separate, please refer to the fifth picture, and automatically push the finished product out of the expansion disk. _ [New content] The main purpose of this creation is to automatically cut after the blue film is expanded, and the blue film residue after cutting is coated on the outer ring of the plastic to make the blue film non-adhesive surface facing outward. The blue film expansion device of the present invention has a knife holder outside the expansion disk, and an annular saw blade cutter can automatically cut the blue film. In addition, a pressure ring seat is arranged above the expansion disk, and a ring ring button is arranged around the pressure ring seat, and the ring selection key exposes the outer edge of the outer ring of the plastic film so that the blue film is reversely wrapped and then folded outside the expansion disk. The edge is made higher than the bottom of the groove of the outer edge of the 5 M359789 disk to guide the blue film to reversely cover the outer ring of the plastic. The original purpose is to expand the finished product, and the product is pushed out of the expansion disk by the top pin. In order to take out the finished product. The blue film expansion device of the present invention is provided with a top pin on the cutter seat. After the blue film is cut and the pressure ring seat is raised, the top pin pushes the finished product out of the expansion disk. [Embodiment] The present invention proposes a blue film expansion ring device which is provided with automatic cutting and further coating the blue film residue material outwardly, so that the blue film is non-adhesive surface facing outward, and the top product is pushed out by the top pin. Get rid of the expansion disk. Please refer to the first, second and sixth figures. The blue film expansion device is composed of a pressure ring seat 7, a film ring η, a cylinder bracket 1, a tamper cover 27, a table 26, an expansion disk 14 and a cutter seat 22. . In the center of the work ρ 26, and the gj hole accommodates the space, a lion soft 塾 is placed around the ju hole to increase the friction of the blue film. An expansion disk 14 is arranged in the center of the space, and an outer edge groove is arranged on the outer ring of the disk. The groove 15 is for accommodating the plastic inner ring 34 and the plastic outer ring 31. The outer edge 12 of the expansion disk is higher than the outer edge groove 15. The bottom expansion disk 14 is fixed to the expansion mechanism 39, and the expansion mechanism 39 is lifted and lowered by the feeding motor 23. _ - Cut County 22 is a ring-shaped shape. It is located under the expansion plate 14 and has a single oblique groove above the cutter seat. The outer edge of the groove is 环状 and the circular woven cutter is 2〇, and an arc-shaped cutter with a slope is forced. The tight block mining orthodontic cutter 20 is tightly fixed, and the top of the cutter pressing block 18 is provided with a plurality of top pins 19, and the top pin 19 is provided with a top pin spring 25, and the lifting and lowering of the cutter seat 22 is made by the cutter gas red 24 The cutter head is cautious, and the cutter cylinder 24 and the expansion mechanism 39 are simultaneously raised and lowered. 'The ring seat 7 is an f-shaped towel central rib, and there are several health ring keys around the ring. This key can be moved up and down and can be fully retracted into the pressure ring seat. 7. The key ring spring 6 is provided in the key and is exposed at the exposed end. Set the first floor ring 6 M359789 steel ball 9' This steel ball is pushed out by a support ring spring 10, the hard seat 7 is guided by the guide rod 3, and the pressure ring seat 7 is lifted and moved by the pressure ring gas red 4. The cover 27 is The hollow portion is disposed above the table 26 and is connected to the center of the table by the hinge button 28 to the pressure ring n. The ring is provided with a plurality of laminating springs 16 under the pressure film ring u from the cylinder 2 through the connecting rod. The front edge of the cover 27 is provided with a hook 29 for engaging the front end of the joint workbench, and a positioning key 30 is provided as the lower cover of the cover to be positioned with the table 26. The cylinder bracket 1 is fixed on the cover 27, The film cylinder 22 and the pressure ring cylinder 4 are fixed on the I bracket. Please refer to the second and sixth figures. When the device is generally operated, the cover 27 is opened upward, and the plastic outer ring 31 is placed thereon. The plastic inner ring 34 of the retainer ring 8 of the seat 7 is placed on the outer edge groove 15 of the expansion disk 14, and the blue film material 37 is placed on the cushion π and the expansion disk 14, and the cover 27 is closed to make the card Hook 2 9 stuck on the workbench 26, a card hook lock cylinder 4 〇 lock the hook 29. Referring to the seventh figure, the servo motor 23 pushes the expansion disk ,, so that the blue film material 37 and the wafer 38 are simultaneously expanded and expanded. The rise of the disk 14 also drives the cutter holder 22 and the cutter cylinder 24 to rise simultaneously. > Referring to the fourth, seventh, and eighth diagrams, when the expansion disk 14 is raised to a predetermined height, the pressure ring seat 7 presses the plastic outer ring 31. The plastic inner ring 34 is sleeved so that the blue film material 37 is sandwiched between the two, and at this time, the swing ring key 8 is retracted upward, and the cutter cylinder 24 pushes up the cutter seat 22, so that the silver tooth cutter 20 cuts the blue The film material 37 is because the outer edge 12 of the expansion disk is higher than the bottom of the plastic outer ring 31, and the outer edge of the outer diameter of the plastic outer ring 31 is completely exposed, so the blue film is wrapped 35 on the outer edge of the plastic outer ring 31. Please refer to the ninth figure. After the film is cut, the pressure ring seat 7 rises and the ring key 8 is ejected again. At this time, the top pin 19 also pushes the finished product out of the expansion plate to facilitate the removal of the finished product. 7 M359789 — Please refer to the fifth ® if the ship is adjusted The height of the scale 12 is completely exposed due to the outer edge of the plastic cake ring 31, so the blue film is completely outsourced to the plastic outer ring & In order to explain the technical ideas and characteristics of this creation, the purpose is to enable those skilled in the art to understand the content of the creation and implement the patent model® which cannot be limited by this creation. Refining scale changes or modifications should still be covered by the scope of this patent. [Simplified illustration] The first picture is the front view of the creation section. The second picture shows the expansion of the lid. The second picture is The finished product is expanded, the blue film residue is coated inward, and the blue film is facing outward. The fourth picture is the finished product of the creation expansion. The blue film residue is coated outside to make the blue film non-adhesive surface facing outward. The finished product of the expansion is adjusted to increase the height of the outer edge of the expansion plate, so that the blue film residue is completely covered with plastic outer ring. The sixth picture shows that the inner and outer rings of the plastic and the blue film have been placed in the positioning. The seventh figure is the expansion disk, so that The blue film and the wafer are expanded. The eighth picture shows the plastic outer ring enclosing the inner ring of the plastic, so that the blue film is sandwiched between the two. The orthodontic cutter cuts the blue film. The ninth picture shows that the pressure ring seat rises, and the top pin will be finished. Out of the expansion disk to remove the finished product [main component No. Description 8 M359789
1氣缸支架 3導桿 5連桿 7壓環座 9撐環鋼珠 11壓膜環 13頂銷孔 15擴張盤外緣溝槽 17軟墊 19頂銷 21切刀座外緣 23伺服馬達 25頂銷彈簧 27掀蓋 29卡勾 31塑膠外環 33藍膜内包 35藍膜外包 37藍膜素材 39擴張機構 2壓膜氣缸 4壓環氣缸 6撐環鍵彈簧 8撐環鍵 10撐環彈簧 12擴張盤外緣 14擴張盤 16壓膜環彈簧 18切刀迫緊塊 20鋸齒切刀 22切刀座 24切刀氣缸 26工作台 28鉸鏈 30定位鍵 32藍膜成品 34塑膠内環 36藍膜完全外包 38晶圓 40卡勾閉鎖氣缸 91 cylinder bracket 3 guide rod 5 connecting rod 7 pressure ring seat 9 retaining ring steel ball 11 laminating ring 13 pin hole 15 expansion plate outer edge groove 17 cushion 19 top pin 21 cutter seat outer edge 23 servo motor 25 pin Spring 27 cover 29 hook 31 plastic outer ring 33 blue film package 35 blue film outsourcing 37 blue film material 39 expansion mechanism 2 pressure film cylinder 4 pressure ring cylinder 6 support ring spring 8 support ring key 10 support ring spring 12 expansion disk Outer edge 14 expansion disk 16 laminating ring spring 18 cutter pressing block 20 serrated cutter 22 cutter seat 24 cutter cylinder 26 workbench 28 hinge 30 positioning key 32 blue film finished product 34 plastic inner ring 36 blue film completely outsourced 38 Wafer 40 card hook lock cylinder 9