CN114783920A - Blue membrane overspeed device tensioner of wafer - Google Patents
Blue membrane overspeed device tensioner of wafer Download PDFInfo
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- CN114783920A CN114783920A CN202210709088.9A CN202210709088A CN114783920A CN 114783920 A CN114783920 A CN 114783920A CN 202210709088 A CN202210709088 A CN 202210709088A CN 114783920 A CN114783920 A CN 114783920A
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67132—Apparatus for placing on an insulating substrate, e.g. tape
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
The application provides a blue membrane overspeed device tensioner of wafer belongs to the equipment technical field who makes semiconductor device, includes: a tension member and a clamping member. The tensioning part comprises a shell, an adjusting mechanism is arranged on the lower section in the shell, a tensioning ring is arranged on the upper section and used for tensioning the blue membrane, and the adjusting mechanism is used for controlling the tensioning ring to move along the axis. The clamping component is arranged above the shell and used for mounting the blue membrane support, the clamping component comprises a pressing plate of an annular structure, the pressing plate is arranged below the blue membrane support and the blue membrane, and the top surface of the tensioning ring is parallel to the pressing plate and the blue membrane support. When the clamping device is used, the tensioning ring upwards penetrates through the bottom of the clamping part and the pressing plate, the tensioning ring upwards moves to jack up the pressing plate upwards, and the pressing plate is tightly pressed on the bottom surface of the blue membrane. Simple structure, can effectively guarantee the top surface of the tensioning ring to be parallel to the blue membrane bracket, and can compress the blue membrane bracket and the blue membrane to prevent the blue membrane from falling off.
Description
Technical Field
The invention belongs to the technical field of semiconductor device preparation, and particularly relates to a wafer blue film tensioning device.
Background
Before a semiconductor device is mounted on a chip, a wafer forming the chip is generally adhered to a blue film, the blue film is fixed on a blue film support of an annular structure, an annular area connected by the blue film is arranged between the wafer and the blue film, and a tensioning device is required to be matched with the annular area during mounting of the chip, so that the blue film is in a tensioning state, and a single chip can be taken out conveniently.
The existing blue film tensioning equipment has the problems that the blue film is separated from a blue film bracket frequently in the use process, and the tension force of the blue film at each position of the peripheral side of a wafer is inconsistent, so that a core feeding needle head cannot accurately position the position of a chip, and the core feeding needle head cannot accurately take out the chip from the wafer. On the other hand, most of the existing devices drive the nut-driven mechanism to drive the tensioning structure to move by using the lead screw, so that the blue film is tensioned, but the devices usually need to be provided with a plurality of groups of lead screw and nut mechanisms, and the positions of the nuts or parts of similar nut structures need to be adjusted to enable the tensioning structure to be in a state parallel to the blue film so as to ensure that the blue film receives the same tensioning force everywhere, and the installation and adjustment processes are complicated.
Disclosure of Invention
In order to solve the defects of the prior art, the invention provides the wafer blue film tensioning device which is simple in structure, can effectively ensure the parallelism between the top surface of the tensioning ring and the blue film support, is provided with the pressing plate for pressing the blue film and the blue film support, can prevent the blue film support from moving during production, can firmly press the blue film, and can effectively prevent the blue film from falling off.
In order to realize the purpose of the invention, the following scheme is adopted:
a wafer blue film tensioning device, comprising: a tension member and a clamping member.
The tensioning part comprises a shell, an adjusting mechanism is arranged on the lower section in the shell, a tubular tensioning ring is arranged on the upper section, the tensioning ring is used for tensioning the blue membrane, an elastic seat is arranged on the outer side wall of the tensioning ring, and the adjusting mechanism is used for controlling the tensioning ring to move along the axis.
The clamping component is arranged above the shell and used for mounting the blue membrane support, the blue membrane is arranged on the bottom surface of the blue membrane support, the clamping component comprises a pressing plate of an annular structure, the pressing plate is located below the blue membrane, and the top surface of the tensioning ring is parallel to the pressing plate and the blue membrane support.
When the blue film pressing device is used, the tensioning ring penetrates upwards through the pressing plate under the action of the adjusting mechanism, and the elastic seat is driven to jack up the pressing plate upwards and tightly press the pressing plate on the bottom surface of the blue film.
Further, the adjusting mechanism comprises a guide ring, a first connecting rod and a second connecting rod.
The guide ring is coaxial with the tensioning ring, and rotates the setting along the axis, and the guide ring is equipped with the first arc platform of at least three departments along the circumference array, the arcwall face protrusion in the outer wall of guide ring of first arc platform.
The first connecting rods and the second connecting rods are used in groups, the number of the groups of the first connecting rods is consistent with the number of the first arc platforms, each group of the first connecting rods is arranged along the circumference array of the guide ring, the rear ends of the first connecting rods are hinged to the inner wall of the shell, the front ends of the first connecting rods are hinged to the middle section of the second connecting rods, the rear ends of the second connecting rods are hinged to the bottom surface of the tension ring, and the front ends of the second connecting rods are in contact with the outer wall of the guide ring.
Furthermore, a roller component is arranged at the front end of the second connecting rod and comprises a cross, two ends of one shaft of the cross are rotatably connected to the second connecting rod, the rotating axis of the cross is perpendicular to the axis of the guide ring, rollers are arranged at two ends of the other shaft of the cross and are in rolling contact with the outer wall of the guide ring, and the axis of each roller is parallel to the axis of the guide ring.
Furthermore, the adjusting mechanism further comprises a gear ring arranged below the guide ring, the gear ring is coaxial with the guide ring, the gear ring is of an outer gear ring structure, the gear ring is meshed with a worm, and the worm penetrates through the shell.
Furthermore, the guide ring is provided with second arc tables along the circumferential array, the number of the second arc tables is consistent with that of the first arc tables, the second arc tables and the first arc tables are crossed and arranged at intervals, and the radii of annular tracks where the arc vertexes of the second arc tables and the first arc tables are located are different.
Further, the clamping part still includes bottom plate and the baffle of interval locating the bottom plate top, and bottom plate and baffle are all parallel with the top surface of tensioning ring, and the top of bottom plate is located to the clamp plate, and is located the below of baffle, and during the use, blue membrane support is located between bottom plate and the baffle, and the through-hole coaxial with tensioning ring is all seted up to bottom plate and baffle, and the internal diameter of through-hole is greater than the external diameter of tensioning ring, and is less than blue membrane support's outline size.
Furthermore, the bottom surface of the pressing plate is provided with a plurality of ejector rods coaxial with the tensioning ring, the ejector rods penetrate through the bottom plate, and the elastic seat is arranged corresponding to the ejector rods.
Further, the spout that is used for installing blue membrane support is seted up to the top surface of bottom plate, the spout is U type structure, the circular arc structure of its rear end is the constant head tank, its front end opening runs through a lateral wall of bottom plate, the spout middle section is the guiding groove, the width of guiding groove is less than blue membrane support's diameter, blue membrane support's front end has first circular arc section, be used for with the constant head tank cooperation, blue membrane support middle section is the guide section, the lateral wall that the guide section corresponds the guiding groove all has the direction plane, during the use, the guide section slides and locates in the guiding groove, in order to conveniently insert blue membrane support along fixed direction, still can prevent blue membrane support rotation simultaneously, improve the stability of clamping part to blue membrane support installation.
Further, the both sides of guiding groove entrance all are equipped with rotatable buckle, and pivoted axis perpendicular to bottom plate, buckle have the anterior segment and the back end of mutual slope, and the contained angle between anterior segment and the back end is the obtuse angle, and the contained angle all faces the spout in, the anterior segment all faces constant head tank one end.
The rear section of the blue film support is a second circular arc section, the edge of the chord length of the second circular arc section is perpendicular to the guide plane, the size of the chord length is larger than the distance between the guide planes, and two ends of the second circular arc section in the chord length direction are provided with salient points protruding out of the guide plane.
When first circular arc section and constant head tank laminating, the bump just in time contacts with the anterior segment, and the end of back end compresses tightly on the arc outer wall of second circular arc section this moment, and blue membrane support locking is in the spout to the buckle.
Further, one side of back end orientation blue membrane support is equipped with the sand grip of perpendicular to bottom plate direction, corresponds the sand grip on the arc outer wall of second circular arc section and offers flutedly, and when the bump just in time contacted with the anterior segment, the sand grip just in time blocked locates in the recess.
The invention has the beneficial effects that: utilize the guide ring to drive the mode drive tensioning ring of head rod and second connecting rod wobbling and remove to the realization is to the tensioning of blue membrane, its simple structure, only need guarantee each parts machining precision can, need not to adjust during the installation, can make tensioning ring top surface perpendicular to blue membrane support, compares existing equipment, and it is more convenient to use. And utilize the tensioning ring rebound to promote the clamp plate and push up blue membrane and blue membrane support tightly upwards, make blue membrane more stable laminating in blue membrane support bottom surface, prevent to go up the blue membrane in-process and drop, can compress tightly fixedly blue membrane support simultaneously, prevent that blue membrane support from taking place to remove.
Drawings
The drawings described herein are for illustrative purposes only of selected embodiments and not all possible implementations, and are not intended to limit the scope of the present disclosure.
Fig. 1 shows a schematic structural diagram of a preferred embodiment of the present application.
Fig. 2 shows the internal structure of the tension member and the external configuration of the clamping member.
Fig. 3 shows an enlarged view at a in fig. 2.
Fig. 4 shows the structure and connection relationship of the first connecting rod and the second connecting rod.
Figure 5 shows a top view of a preferred construction of the guide ring.
Fig. 6 shows a cross-sectional view of the overall structure of the present application when the blue membrane is not tensioned by the tension ring.
Fig. 7 shows an enlarged view at B in fig. 6.
Fig. 8 shows a cross-sectional view of the overall structure of the present application with the tension ring tensioning the blue membrane.
Fig. 9 shows an enlarged view at C in fig. 8.
Fig. 10 is a schematic view showing a state where the blue film stent is initially inserted into the chute.
Fig. 11 shows a schematic view of a state where the blue film stent is partially inserted into the chute.
Fig. 12 shows an enlarged view at D in fig. 11.
Fig. 13 is a schematic view showing a state where the blue mask holder is mounted on the chute.
Fig. 14 shows an enlarged view at E in fig. 13.
Fig. 15 shows a mounting structure of the pressure plate.
Fig. 16 shows an enlarged view at F in fig. 15.
Fig. 17 shows a structure of a blue film holder to which a wafer is attached.
The specific figures are marked with the following characters: a tensioning part-10, a shell-11, a guide groove-111, an adjusting mechanism-20, a guide ring-21, a first arc platform-211, a second arc platform-212, a first connecting rod-22, a second connecting rod-23, a roller component-24, a cross-shaped frame-241, a roller-242, a gear ring-25, a worm-26, a tensioning ring-30, an elastic seat-31, a limiting block-32, a clamping part-40, a pressing plate-41, a top rod-411, a bottom plate-42, a sliding groove-421, a positioning groove-4211, a guide groove-4212, a baffle-43, a buckle-44, a front section-441, a rear section-442, a convex strip-443, a blue membrane support-50, a first arc section-51, a guide plane-52, a guide plane-51, a guide groove-11, a guide groove-4212, a baffle-43, a buckle-44, a front section-441, a rear section-442, a convex strip-443, a blue membrane support-50, a first arc section-51, a guide plane-52, a guide plane-2, a guide plane, a guide plate, a guide, A second arc segment-53, a groove-531 and a convex point-54.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the following detailed description of the embodiments of the present invention is provided with reference to the accompanying drawings, but the described embodiments of the present invention are a part of the embodiments of the present invention, not all of the embodiments of the present invention.
It should be noted that: like reference numbers and letters refer to like items in the following figures, and thus, once an item is defined in one figure, it need not be further defined and explained in subsequent figures.
The terms "first," "second," and the like are used solely to distinguish one from another and are not to be construed as indicating or implying relative importance. The terms "parallel", "perpendicular", etc. do not require that the components be absolutely parallel or perpendicular, but may be slightly inclined.
In the description of the present invention, it should also be noted that, unless otherwise explicitly specified or limited, the terms "disposed," "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; either directly or indirectly through intervening media, or through both elements. The specific meanings of the above terms in the present invention can be understood according to specific situations by those of ordinary skill in the art.
Example 1
As shown in fig. 1 and 2, a wafer blue film tensioning device includes: a tension member 10 and a clamping member 40.
Specifically, as shown in fig. 2, 6 and 8, the tensioning member 10 includes a housing 11, an adjusting mechanism 20 is disposed at a lower section in the housing 11, a tensioning ring 30 is disposed at an upper section, an upper section of the tensioning ring 30 is a thin-walled circular tube structure for tensioning the blue membrane, and an annular disc is disposed at a lower section for mounting and connecting components, such as a mounting elastic seat 31. The adjustment mechanism 20 is used to control the movement of the tension ring 30 along the axis.
Specifically, as shown in fig. 1, 7, 9 and 15, the holding member 40 is provided above the housing 11 for mounting the blue film holder 50, and the blue film holder 50 has a blue film on the bottom surface. The clamping member 40 includes a pressing plate 41 with an annular structure, and when the blue membrane holder 50 is installed in use, the pressing plate 41 is disposed below the blue membrane holder 50 and the blue membrane, and the top surface of the tension ring 30 is parallel to the pressing plate 41 and the blue membrane holder 50, so as to ensure that the blue membrane holder 50 and the blue membrane are uniformly pressed and tensioned around the circumference thereof.
Preferably, as shown in fig. 2, a plurality of limit blocks 32 are disposed on the peripheral side of the tension ring 30, a guide groove 111 is formed in the inner wall of the housing 11 corresponding to each limit block 32, the extending direction of the guide groove 111 is parallel to the axis of the tension ring 30, the tension ring 30 moves along the guide groove 111, the tension ring 30 can be prevented from inclining, and the parallelism between the tension ring 30 and the blue membrane holder 50 is further ensured.
When the device is used, the tensioning ring 30 penetrates through the annular inner ring of the pressing plate 41 upwards under the action of the adjusting mechanism 20, and drives the elastic seat 31 to jack up the pressing plate 41 upwards, so that the pressing plate 41 is pressed on the bottom surface of the blue film, and the blue film bracket 50 can be pressed together, and the blue film bracket 50 is prevented from moving in the core loading process.
Example 2
As a preferred embodiment of the present application, as shown in fig. 2 to 9, the adjusting mechanism 20 includes a guide ring 21, a first connecting rod 22, and a second connecting rod 23.
Specifically, as shown in fig. 2, 6 and 8, the guide ring 21 and the tension ring 30 are coaxial and are rotatably disposed along the axis, the guide ring 21 may be designed as an inner gear ring structure and rotatably driven by a gear, or the bottom surface of the guide ring 21 may be designed as a conical end surface gear structure and rotatably driven by a conical gear structure. Guide ring 21 is equipped with the first arc platform 211 of at least three places along the circumference array, and the arcwall face protrusion of first arc platform 211 is in the outer wall of guide ring 21, and the axis of first arc platform 211 arcwall face is parallel with guide ring 21.
Specifically, as shown in fig. 3 and 4, and fig. 7 and 9, the first connecting rods 22 and the second connecting rods 23 are used in groups, the number of the groups is the same as the number of the first arc tables 211, and the groups are arranged in a circumferential array along the guide ring 21. The rear end of the first connecting rod 22 is hinged to the inner wall of the housing 11, the front end is hinged to the middle section of the second connecting rod 23, the rear end of the second connecting rod 23 is hinged to the bottom surface of the annular disc at the lower section of the tensioning ring 30, and the front end is in contact with the outer wall of the guide ring 21.
When the front end of the second connecting rod 23 moves from the outer wall of the guide ring 21 to the arc vertex of the first arc table 211, the front end of the second connecting rod 23 will move outwards along the normal direction of the guide ring 21, and through the rotating fit with the first connecting rod 22, the included angle between the second connecting rod 23 and the horizontal plane is gradually increased, the front end of the second connecting rod 23 upwards jacks up the tension ring 30, the tension ring 30 moves upwards, and the blue membrane is tensioned, and in the process, the front end of the second connecting rod 23 also moves along the axial direction of the guide ring 21. The multiple groups of first connecting rods 22 and second connecting rods 23 arranged on the circumference of the guide ring 21 are matched with the outer wall of the guide ring 21, so that the tension ring 30 can stably rise, the top surface of the tension ring 30 and the blue membrane bracket 50 are ensured to be in a parallel state, and the blue membrane is subjected to uniform tension force. Therefore, the front end of the second connecting rod 23 has reliable stability no matter stays at the cambered surface or the arc vertex of the first arc boss 211, and is prevented from sliding automatically.
Preferably, as shown in fig. 4, the roller member 24 is provided at the front end of the second connecting rod 23, the roller member 24 includes a cross 241, two ends of one shaft of the cross 241 are rotatably connected to the second connecting rod 23, the axis of rotation is perpendicular to the axis of the guide ring 21, two ends of the other shaft of the cross 241 are provided with rollers 242, the rollers 242 are in rolling contact with the outer wall of the guide ring 21, and the axis of the rollers 242 is parallel to the axis of the guide ring 21. When the inclination angle of the second connecting rod 23 changes, the cross 241 of the roller member 24 will rotate around the shaft connected to the second connecting rod 23 in an adaptive manner, so as to ensure that the two rollers 242 are constantly attached to the outer wall of the guide ring 21, and by utilizing the rolling contact between the rollers 242 and the outer wall of the guide ring 21, the wear of parts can be reduced, the service life can be prolonged, and the use accuracy can be ensured.
Example 3
As a preferred embodiment of the present application, the guide ring 21 is rotationally driven by using a ring gear 25 as shown in fig. 2, 3, 6, and 8.
Specifically, adjustment mechanism 20 is still including locating ring gear 25 of guide ring 21 below, ring gear 25 is coaxial with guide ring 21, ring gear 25 is outer ring gear structure, and the profile of tooth of ring gear 25 is the teeth of a cogwheel structure of worm wheel, ring gear 25 and the meshing of a worm 26, worm 26 wears to locate casing 11, worm 26 utilizes motor drive, can die ring gear 25 lock through this kind of drive structure, prevent that ring gear 25 from driving guide ring 21 and taking place autogiration, thereby improve the stability in tensioning ring 30 position, in order to improve the stability to the blue membrane tensile force, prevent that the blue membrane from becoming flexible.
Preferably, as shown in fig. 4, the guide ring 21 is provided with second arc platforms 212 along the circumferential array, the number of the second arc platforms 212 is the same as that of the first arc platforms 211, the second arc platforms 212 intersect with the first arc platforms 211 and are arranged at intervals, and the circular track radiuses of the arc vertexes of the second arc platforms 212 and the first arc platforms 211 are different. In this embodiment, the second arc platform 212 and the first arc platform 211 are disposed at four positions, and four sets of the corresponding first connecting rods 22 and the corresponding second connecting rods 23 are also disposed. The tension ring 30 can be raised to different heights by using the difference between the arc vertices of the second arc platform 212 and the first arc platform 211, so as to adjust the tension of the blue membrane.
Example 4
As shown in fig. 1, 2 and 5 to 9, the clamping member 40 further includes a bottom plate 42 and a baffle 43 spaced above the bottom plate 42, the bottom plate 42 and the baffle 43 are parallel to the top surface of the tension ring 30, and the pressing plate 41 is disposed on the top of the bottom plate 42 and below the baffle 43.
During the use, as shown in fig. 7 and 9, the blue membrane support 50 is located between the bottom plate 42 and the baffle 43, through holes coaxial with the tension ring 30 are formed in the bottom plate 42 and the baffle 43, so as to pass through the tension ring 30, and the inner diameter of each through hole is larger than the outer diameter of the tension ring 30 and smaller than the outer contour size of the blue membrane support 50.
When the blue film bracket is used, the blue film bracket 50 is arranged between the bottom plate 42 and the top plate 43, then the adjusting mechanism 20 drives the tension ring 30 to move upwards, the tension ring 30 moves upwards and jacks up the pressure plate 41 at the same time, so that the blue film and the blue film bracket 50 are pressed tightly by the pressure plate 41, meanwhile, the tension ring 30 continuously rises, and the top surface of the tension ring 30 is in contact with the blue film to tension the blue film.
Preferably, as shown in fig. 7, 9, 15 and 16, the bottom surface of the pressing plate 41 is provided with a plurality of push rods 411 coaxial with the tension ring 30, the push rods 411 penetrate through the bottom plate 42 to prevent the pressing plate 41 from rotating, and the push rods 411 are slidably matched with the bottom plate 42 to ensure that the pressing plate 41 is parallel to the blue membrane holder 50 during use, so that the pressing plate 41 applies uniform pressure to all the circumferential positions of the blue membrane holder 50 to prevent the blue membrane from falling off from the blue membrane holder 50.
More specifically, the top surface of the lower annular disc of the tension ring 30 is provided with an elastic seat 31 corresponding to the top rod 411, the elastic seat 31 has elasticity, and the pressing plate 41 is pressed against the bottom surface of the blue film by applying a pressure towards the blue film holder 50 to the pressing plate 41 through the top rod 411 by the force of the elastic seat 31 restoring elasticity.
Further preferably, the elastic seat 31 includes a spring and a flat plate, and the flat plate is disposed on the top surface of the spring and is used for increasing the contact area with the top rod 411.
Preferably, as shown in fig. 10, 11 and 13, the top surface of the bottom plate 42 is provided with a sliding slot 421 for mounting the blue film support 50, a projection of the sliding slot 421 on the bottom surface of the bottom plate 42 is a U-shaped structure, an arc structure of the rear end is a positioning slot 4211, an opening of the front end penetrates through one side wall of the bottom plate 42, here, an inlet of the blue film support 50, a middle section of the sliding slot 421 is a guiding slot 4212, which has parallel side walls, and a width of the guiding slot 4212 is smaller than a diameter of the blue film support 50.
As shown in fig. 11, 13 and 17, the front end of the blue film support 50 has a first arc segment 51 for cooperating with the positioning groove 4211, the middle segment of the blue film support 50 is a guiding segment, and the guiding segment corresponds to the side wall of the guiding groove 4212 and has a guiding plane 52, when in use, the guiding segment is slidably disposed in the guiding groove 4212 so as to conveniently insert the blue film support 50 along the fixing direction, and at the same time, the blue film support 50 can be prevented from rotating, thereby improving the stability of the clamping member 40 for mounting the blue film support 50.
Preferably, as shown in fig. 11 to 14, rotatable buckle plates 44 are disposed on two sides of the entrance of the guiding groove 4212, the rotation axis of the rotatable buckle plates is perpendicular to the bottom plate 42, each buckle plate 44 has a front section 441 and a rear section 442 which are inclined to each other, the included angle between the front section 441 and the rear section 442 is an obtuse angle, the included angles are both towards the inside of the sliding groove 421, and the front section 441 is both towards one end of the positioning groove 4211.
The rear section of the blue film support 50 is a second circular arc section 53, the edge where the chord length of the second circular arc section 53 is located is perpendicular to the guide planes 52, the size of the chord length is larger than the distance between the guide planes 52, and two ends of the second circular arc section 53 in the chord length direction are provided with salient points 54 protruding out of the guide planes 52 on the corresponding side.
As shown in fig. 14, when the first arc segment 51 is attached to the positioning groove 4211, the protruding point 54 is just in contact with the front segment 441, at this time, the end of the rear segment 442 is pressed against the arc outer wall of the second arc segment 53, and the buckle 44 locks the blue film support 50 in the sliding groove 421. When the blue membrane holder 50 is pulled out, the rear section 442 is pushed by the outer wall of the second circular arc section 53, the buckle plate 44 rotates, the front end of the front section 441 moves towards the guide plane 52, and the rear section 442 is tightly attached to the side wall of the sliding groove 421 in the process of pulling out the blue membrane holder 50. In order to facilitate the insertion of the blue film holder 50 into the sliding groove 421, springs are disposed between the rear section 442 of the buckle 44 and the side wall of the sliding groove 421, and the springs make the rear section 442 cling to the side wall of the sliding groove 421 as shown in fig. 12.
Preferably, as shown in fig. 12 and 14, a protruding strip 443 perpendicular to the direction of the bottom plate 42 is disposed on a side of the end of the rear section 442 facing the blue film bracket 50, a groove 531 is disposed on an arc-shaped outer wall of the second arc section 53 corresponding to the protruding strip 443, when the protruding strip 54 just contacts the front section 441, the protruding strip 443 just engages in the groove 531, so as to increase the firmness of locking the blue film bracket 50, when the pressing plate 41 presses the blue film bracket 50 upwards, the blue film bracket 50 can be locked in the sliding groove 421 by the buckling plate 44, and at the same time, the blue film bracket 50 can move upwards along the protruding strip 443 and be guided by the protruding strip 443.
The foregoing is only a preferred embodiment of the present invention and is not intended to be exhaustive or to limit the invention. It will be understood by those skilled in the art that various changes may be made and equivalents may be substituted without departing from the scope of the invention.
Claims (10)
1. A wafer blue film tensioning device, comprising:
the tensioning component (10) comprises a shell (11), an adjusting mechanism (20) is arranged on the lower section in the shell (11), a tubular tensioning ring (30) is arranged on the upper section, the tensioning ring (30) is used for tensioning the blue membrane, an elastic seat (31) is arranged on the outer side wall of the tensioning ring (30), and the adjusting mechanism (20) is used for controlling the tensioning ring (30) to move along the axis;
the clamping component (40) is arranged above the shell (11) and used for mounting the blue membrane support (50), the blue membrane is arranged on the bottom surface of the blue membrane support (50), the clamping component (40) comprises a pressing plate (41) with an annular structure, after the blue membrane support (50) is mounted, the pressing plate (41) is positioned below the blue membrane, and the top surface of the tensioning ring (30) is parallel to the pressing plate (41) and the blue membrane support (50);
when the blue film pressing device is used, the tensioning ring (30) penetrates through the pressing plate (41) upwards under the action of the adjusting mechanism (20) to drive the elastic seat (31) to jack up the pressing plate (41) upwards and press the pressing plate (41) on the bottom surface of the blue film.
2. The wafer blue film tensioning device according to claim 1, characterized in that the adjusting mechanism (20) comprises a guide ring (21), a first connecting rod (22) and a second connecting rod (23);
the guide ring (21) and the tension ring (30) are coaxial and are rotationally arranged along the axis, the guide ring (21) is provided with at least three first arc platforms (211) along the circumferential array, and the arc-shaped surface of each first arc platform (211) protrudes out of the outer wall of the guide ring (21);
the first connecting rods (22) and the second connecting rods (23) are used in groups, the number of the groups of the first connecting rods is consistent with the number of the first arc platforms (211), each group of the first connecting rods is arranged along the circumferential array of the guide ring (21), the rear ends of the first connecting rods (22) are hinged to the inner wall of the shell (11), the front ends of the first connecting rods are hinged to the middle section of the second connecting rods (23), the rear ends of the second connecting rods (23) are hinged to the bottom surface of the tension ring (30), and the front ends of the second connecting rods are in contact with the outer wall of the guide ring (21).
3. The wafer blue film tensioning device according to claim 2, characterized in that the front end of the second connecting rod (23) is provided with a roller member (24), the roller member (24) comprises a cross (241), two ends of one shaft of the cross (241) are rotatably connected to the second connecting rod (23), the rotating axis is perpendicular to the axis of the guide ring (21), two ends of the other shaft of the cross (241) are provided with rollers (242), the rollers (242) are in rolling contact with the outer wall of the guide ring (21), and the axis of the rollers (242) is parallel to the axis of the guide ring (21).
4. The wafer blue film tensioning device according to claim 2, wherein the adjusting mechanism (20) further comprises a gear ring (25) arranged below the guide ring (21), the gear ring (25) is coaxial with the guide ring (21), the gear ring (25) is of an external gear ring structure, the gear ring (25) is meshed with a worm (26), and the worm (26) penetrates through the housing (11).
5. The wafer blue film tensioning device according to claim 2, wherein the guide ring (21) is provided with second arc tables (212) along the circumferential array, the number of the second arc tables (212) is the same as that of the first arc tables (211), the second arc tables (212) are crossed with the first arc tables (211) and are arranged at intervals, and the circular track radiuses of the arc vertexes of the second arc tables (212) and the first arc tables (211) are different.
6. The wafer blue film tensioning device according to claim 1, wherein the clamping member (40) further comprises a bottom plate (42) and a baffle plate (43) arranged above the bottom plate (42) at an interval, the bottom plate (42) and the baffle plate (43) are both parallel to the top surface of the tension ring (30), the pressing plate (41) is arranged at the top of the bottom plate (42) and is located below the baffle plate (43), in use, the blue film support (50) is located between the bottom plate (42) and the baffle plate (43), the bottom plate (42) and the baffle plate (43) are both provided with through holes coaxial with the tension ring (30), and the inner diameter of each through hole is larger than the outer diameter of the tension ring (30) and smaller than the outer contour size of the blue film support (50).
7. The wafer blue film tensioning device according to claim 6, characterized in that the bottom surface of the pressure plate (41) is provided with a plurality of ejector rods (411) coaxial with the tensioning ring (30), the ejector rods (411) penetrate through the bottom plate (42), and the elastic seat (31) is arranged corresponding to the ejector rods (411).
8. The wafer blue film tensioning device according to claim 6, wherein a sliding groove (421) for mounting the blue film support (50) is formed in the top surface of the bottom plate (42), the sliding groove (421) is of a U-shaped structure, an arc structure at the rear end of the sliding groove is a positioning groove (4211), an opening at the front end of the sliding groove penetrates through one side wall of the bottom plate (42), a middle section of the sliding groove (421) is a guiding groove (4212), a width of the guiding groove (4212) is smaller than a diameter of the blue film support (50), a first arc section (51) is formed at the front end of the blue film support (50) and is used for being matched with the positioning groove (4211), a middle section of the blue film support (50) is a guiding section, the guiding section corresponds to the side wall of the guiding groove (4212) and is provided with a guiding plane (52), and in use, the guiding section is slidably disposed in the guiding groove 4212.
9. The wafer blue film tensioning device according to claim 8, wherein rotatable buckle plates (44) are disposed on two sides of the inlet of the guide groove (4212), the rotation axes thereof are perpendicular to the bottom plate (42), each buckle plate (44) has a front section (441) and a rear section (442) inclined to each other, an included angle between the front section (441) and the rear section (442) is an obtuse angle, the included angles both face the inside of the sliding groove (421), and the front sections (441) both face one end of the positioning groove (4211);
the rear section of the blue film support (50) is a second circular arc section (53), the side where the chord length of the second circular arc section (53) is located is perpendicular to the guide planes (52), the size of the chord length is larger than the distance between the guide planes (52), and two ends of the second circular arc section (53) in the chord length direction are provided with salient points (54) protruding out of the guide planes (52);
when the first arc section (51) is attached to the positioning groove (4211), the salient point (54) is just in contact with the front section (441), the tail end of the rear section (442) is pressed on the arc-shaped outer wall of the second arc section (53), and the blue film support (50) is locked in the sliding groove (421) by the buckle plate (44).
10. The wafer blue film tensioning device according to claim 9, wherein a protruding strip (443) perpendicular to the direction of the bottom plate (42) is disposed on a side of the end of the rear section (442) facing the blue film holder (50), a groove (531) is disposed on the arc-shaped outer wall of the second arc section (53) corresponding to the protruding strip (443), and when the salient point (54) just contacts the front section (441), the protruding strip (443) just fits into the groove (531).
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