TWM289774U - Leakage preventing structure of vacuum film plating machine - Google Patents

Leakage preventing structure of vacuum film plating machine Download PDF

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Publication number
TWM289774U
TWM289774U TW94218865U TW94218865U TWM289774U TW M289774 U TWM289774 U TW M289774U TW 94218865 U TW94218865 U TW 94218865U TW 94218865 U TW94218865 U TW 94218865U TW M289774 U TWM289774 U TW M289774U
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Taiwan
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vacuum
ring
shaped ring
coating machine
partition
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TW94218865U
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Chinese (zh)
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Yi-Cheng Liou
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Taiwan Sputtering Prec Machine
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Priority to TW94218865U priority Critical patent/TWM289774U/en
Publication of TWM289774U publication Critical patent/TWM289774U/en

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Description

-M289774 八、新型說明: ^【新型所屬之技術領域】 ^ 本創作係提供一種真空鍍膜機之防漏結構(一),尤 指其技術上提供一種作為密封防漏且呈立體型式之〇型 環,且該〇型環為中空可充氣者。 【先前技術】 一般之機構在組裝配置上,難免因為構件材質與加工 精度關係而產生缝隙,但其缝隙會產生洩漏等情形,有時 # 候是不被允許的,如在輸送氣體或液體之管路,則其缝隙 將會讓氣體或液體洩漏出來,而對真空鍍膜機使用上,其 防漏在真空鍍膜機重覆之分開結合構件間施作時,仍要達 到防漏結構不洩漏之目標,然而習用結構顯然並無法達成 此一^目標。 該習用之〇型環主要設於機構與機構間,製成實心且 具若干之彈性,以提供作為機構間鎖緊時,迫壓住習用〇 # 型環使之變形,並達到密封之目的,習用之〇型環變形後 很難回復。 惟,其上述習知之〇型環仍存在有下列缺失: 1 ·因為習用之〇型環係製成實心並具若干彈性,以 提供壓縮密封時之變形密封效用,但因為實心〇型環長時 間處於壓力變形之狀態下,乃會使其定型而無法回復,如 果使用於常需分開、組合之機構上時,其變形之〇型環將 無法有效密封而易有:¾漏者。 2 ·習用之()型環一般製成實心之圈狀()型環,該實 M289774 , 心_狀()型環之使用狀態受限於只能壓縮變形之防漏 技術 密合 抽真 :升, 〇 之效 ,而 成密 開發 盼, 開發 後, 變形 漏, 漏形 了成 ^ 再其習用之真空鍍膜機之防漏上,主要利用鈑金 ^ 將接觸面之鈑金加工到可密合之程度,使加工過程之 動作上,鈑金德:入隔板造成密合,方可形成密室空間 空,但其仍有以下缺失: 1 ·精密加工至密合之程度,其加工精度必然要指 所花費之成本也較多,但是仍無法達到確實防漏效益 2 ·金屬材料如何精密加工都無法達到確實密合 # 果,習用採用金屬材料作密合材料,先天已存在缺失 在於機械之多次分合後,也會影響到密合度效果,造 合不完全。 是以,針對上述習知結構所存在之問題點,如何 一種更具理想實用性之創新結構,實消費者所殷切企 亦係相關業者須努力研發突破之目標及方向。 有鑑於此,創作人本於多年從事相關產品之製造 ^ 與設計經驗,針對上述之目標,詳加設計與審慎評估 終得一確具實用性之本創作。 【新型内容】 欲解決之技術問題點:習知之〇型環僅提供壓縮 之防漏效果,且亦不利於常需分離、組裝之機構間防 形狀上亦普遍製成圈狀,而在真空鍍鍈機上使用之防 態,以鈑金精密加工,作為防漏之效益不佳,又增加 本支出。 解決問題之技術特點:提供一種真空鍍膜機之防漏結 M289774 - 搆(一)…該防漏結構()型環之前 '彳t並得設有充氣祖 - 型環内部設成中空,攄此其〇型環之組設於真空鍍膜 、 構間,並充氣使〇型環膨脹變形充滿於機構間之缝 時,乃得以達到防漏及密封之目的,並在洩氣後可機 作分離,達到立體型式〇型環、膨脹式密封與防漏及 利於常分離、組合之機構間之防漏功效者。 對照先前技術之功效:提供一種真空鍍膜機之防 構(一),有別於習用圈狀實心之〇型環,而其本創作 • 結構〇型環係為中空得充氣作膨脹之密封,而習用〇 係為壓擠變形之密封並不相同,本創作之〇型環得作 分離、組合之機構間之防漏,而習用〇型環則不利於 態使用,本創作具功效上之增進者。 有關本創作所採用之技術、手段及其功效,茲舉 佳實施例並配合圖式詳細說明於后,相信本創作上述 的、構造及特徵,當可由之得一深入而具體的暸解。 Φ 【實施方式】 本創作係提供一種真空鍍膜機之防漏結構(一) 改良設計者。 參閱第一圖所示,係該本創作之其一較佳實施例 示意圖,真空鍍膜機之防漏結構(一)係用以製造透 電膜(ITO Fi lm )、軟性銅羯基板(FCCL)、抗反射月J coating)等等之機器,如其透明導電膜(ITOFilmM 第二圖之產品放大局部剖示圖所示)基本上均是由一 膠板(PC F 1 1 111) ( 5 0 )鍍一層二氧化矽(s I 0,)( 5 1 機機 隙内 構間 其得 漏結 防漏 型環 為常 該形 一較 之目 結構 立體 明導 I ( AR 參閱 層塑 卜 -M289774 - 再鍍一.層氣化銦錫(ί TO ) (: 5 2 )等等,鍍上多層#料’.以 ^ 製成透明導電膜(I 了 0 F 1 1 m ),而其鍍膜過程需要抽真空並 , 灌入不同製程氣體,所以不能相互污染,或相互影響。 其真空鍍膜機之防漏結構(一),主要包含有: 一真空鍍膜機(1 )之真空腔(1 0 ),而其真空腔(1 0)之内室並形成有鍍膜區(1 2),鍍膜區(1 2 )藉由 若干之隔板(1 3 )區隔出複數之鍍膜空間(1 3 1 ); 一真空鍍膜機(1 )之收發料機構(2 0 ),設於真空 w 鍍膜機(1 )之滑執(2 )上,並其真空腔(1 0 )内室 之上方亦設有滑執(1 4 )提供收發料機構(2 0 )上方 滑移時之導正,收發料機構(2 0 )設有隔艙密封組(2 1 )(得配合參照第三圖之隔艙密封組圖示),隔艙密封組 (2 1 )之隔板(2 1 1 )對應真空腔(1 1 )隔板(1 3 )設置,當收發料機構(2 0 )送入至真空腔(1 0 ) 内室時,隔板(1 3 )( 2 1 1 )之區隔乃形成有若干之隔 φ 搶(3 〇)(3 1 ) ( 3 2 ) ( 3 3 ) ( 3 4 ) ( 3 5 ) ( 3 6 ) (得配合參照第四圖之真空鍍膜機側剖示簡圖); 藉由上述之構成,真空腔内部抽真空後,真空腔内隔 艙(3 0 )〜(3 6 )借由泵浦抽氣作真空度調整,可使 得各個隔艙(3 0 )〜(3 6 )真空度獨立調整,且不會 造成其他隔艙真空度無法調整,達到各隔艙(3 0 )〜(3 6)之真空度不一樣。 參閱第三、五、六圖所示,分別為隔艙密封組立體圖 及0型環立體圖與真空腔内室組入收發料機構後之隔板間 M289774 - 密合闕係局部剖不圖、該隔艙密封組ί 2丨)浓照對應真 , 空腔(1 1 )(參閱第一圖所示)内室(15)隔板(13) 、 位置,亦設有隔板(2 1 1 ) 5母一隔板(2 1 1 )之二側 面並設高出隔板(2 1 1 )之板片(2 1 2 ) ( 2 1 3 ), 使二板片(2 1 2 ) ( 2 1 3 )間形成一嵌槽(2 1 4 ), 該嵌槽(2 1 4 )恰提供〇型環(4 0 )組設其間,嵌槽 (2 1 4 )並提供隔板(1 3 )之嵌入,據此該隔板(1 3)(211)與二板片(212)(213)乃構成一區 # 隔空間,使其〇型環(4 0 )充氣膨脹時,得以有一限制 範圍,並該〇型環之充氣膨脹得以確實密封隔板(1 3 ) (2 1 1 )與二板片(2 1 2 )( 2 1 3 )間任何有可能洩 漏之缝隙,讓各個隔艙(3 0 )〜(3 6 )(參閱第四圖所 示)確實密封。 上述〇型環(4 0 )内部設相互貫通之充氣空間(4 2 )(參第五圖所示),〇型環(4 0 )外側設有充氣呕(4 I 1 )連通至内部充氣空間(4 2 )者。 參閱第四圖所示,一立體型式之〇型環(4 0 ),得包 含有周邊圈繞之環形段(4 3 )及其間之複數直條段(4 4 ),環形段(4 3 )與直條段(4 4 )内部設成充氣空間 (4 2 )(參第五圖所示)且相互貫通連接,其〇型環(4 0 )得設有二充氣呕(4 1 ) ( 4 1 1 ),藉由其充氣吸(4 1 ) ( 4 1 1 )得以充灌氣體進入〇型環(4 0 ),並將之 充氣膨脹,如此該膨脹之〇型環(4 0 )得以充滿於真空 鍍膜機隔艙之隔板間縫隙内,達到密封防漏之目的者。 .M289774 · - 上述該環形段_ ; ί :3 )亦得為中斷之設置。中斷位置 . 二端面(4 3 1 )得形成封閉者。 ^ 參第三圖所示,係該本創作之隔艙密封組立體示意 圖,其真空鍍膜機(1 )之隔艙密封組(2 1 )環周形成 有若干之隔板(2 1 1 ),隔板(2 1 1 )之二側並固設二 板片(2 1 2 ) ( 2 1 3 )高出隔板(2 1 1 ),據以形成 嵌槽(2 1 4 )提供〇型環(4 0 )(參閱第六圖所示)容 組其内,嵌槽(2 1 4 )亦提供隔板(1 3 )(參閱第一圖 Φ 所示)之嵌入,如此使其〇型環(4 0 )充氣時得以有效 密封者。 本創作功效增進之處如下: 1 、提供一種創新結構型態,使其得以利於真空鍍膜 機之防漏結構(一)之於常分離組合形態使用,突破以往 慣用圈形實心〇型環之使用形態,而其立體型式之〇型環 並得製成空心及其二端製有充氣咀,以其充氣咀充氣使其 $ 〇型環膨賬而密封及防漏,其實施態樣亦有別於習用〇型 環,本創作具新穎性者。 2、藉此特殊改良結構設計,其主要該真空鍍膜機之 防漏結構(一)構件上利用立體型式〇型環,及其〇型環 以充氣膨脹作密封防漏,及其〇型環可充氣、:¾氣,而利 於真空鍍膜機之機構間常分離組合者間之防漏使用,本創 作具實用性與進步性者。 3 、該各別隔艙之真空度不同,製程亦不同,藉由〇 型環得以有效密封區隔,使其相互間不會互相污染,也不 M289774 · • 由其上述可知μ本創作之真空鍵膜機之防漏結構 • (一),確為業界首見而符合新型專利之新穎性要件者,而 其全面性之創新設計,符合新型專利之進步性要件,而其 適用於真空鍍膜機常分離組合之機構間防漏,符合較佳之 產業利用性者。 前文係針對本創作之較佳實施例為本創作之技術特徵 進行具體之說明;惟,熟悉此項技術之人士當可在不脫離 ® 本創作之精神與原則下對本創作進行變更與修改,而該等 變更與修改,皆應涵蓋於如下申請專利範圍所界定之範曰壽 中。 【圖式簡單說明】 第一圖:係本創作之其一較佳實施例立體示意圖。 第二圖:係本創作其一產品例之放大局部剖示圖。 第三圖:係本創作之隔4倉密封組立體示意圖。 I 第四圖:係本創作之真空鍍膜機側剖示簡圖。 第五圖:係本創作之〇型環立體圖。 第六圖:係本創作之真空腔内室組入收發料機構後之隔板 間密合關係局部剖示圖。 【主要元件符號說明】 (1 )真空鍍膜機 (2 )滑執 (1 1 )真空腔 (1 2 )鍍膜區 (1 3 )隔板 (1 3 1 )鍍膜空間 M289774 · “ ί 2 U )收發料機構 * ( 2 1 1 )隔板 • ( 2 1 3 )板片 (3 0 )隔艙 (3 2 )隔艙 (3 4 )隔艙 (3 6 )隔艙 (4 1 )充氣哑 # ( 4 2 )充氣空間 (4 3 1 )端面 (5 0 )塑膠板 (5 2 )氧化銦錫 i 2丨)隔艙密封組 (2 i 2 )板片 (2】4 )嵌槽 (3 1 )隔艙 (3 3 )隔艙 (3 5 )隔艙 (4 0 )〇型環 (4 1 1 )充氣口且 (4 3 )環形段 (4 4 )直條段 (5 1 )二氧化矽-M289774 VIII. New description: ^[New technical field] ^ This creation provides a leak-proof structure for vacuum coating machine (1), especially for the technically providing a leak-proof and three-dimensional type. a ring, and the ring is a hollow inflatable. [Prior Art] In general, the assembly of the mechanism is inevitably caused by the relationship between the material of the member and the processing accuracy, but the gap may cause leakage, etc., sometimes it is not allowed, such as in the delivery of gas or liquid. In the pipeline, the gap will allow gas or liquid to leak out. For the vacuum coating machine, the leak-proof structure will not leak when the vacuum coating machine is applied between the separate joint members. Goal, however, the familiar structure obviously does not achieve this goal. The conventional shackle type ring is mainly arranged between the mechanism and the mechanism, and is made solid and has a certain elasticity, so as to provide the deformation of the conventional 〇#-type ring and to achieve the purpose of sealing when the mechanism is locked. It is difficult to recover after the deformation of the conventional ring. However, the above-mentioned conventional 〇-type ring still has the following defects: 1 · Because the conventional 〇-type ring system is made of solid and has some elasticity to provide the deformation sealing effect when the compression seal is used, but because the solid 〇-shaped ring is long In the state of pressure deformation, it will be shaped and cannot be recovered. If it is used on a mechanism that often needs to be separated and combined, the deformed 〇-shaped ring will not be effectively sealed and easily: 3⁄4 leaking. 2 · The conventional () type ring is generally made into a solid ring-shaped () type ring. The use of the real M289774, heart-shaped () type ring is limited by the leak-proof technology that can only compress and deform.升, 〇 效 , 而成 而成 而成 而成 而成 而成 而成 而成 而成 而成 开发 开发 开发 开发 开发 开发 开发 开发 开发 开发 开发 开发 开发 开发 开发 开发 开发 开发 开发 开发 开发 开发 开发 开发 开发 开发 开发 开发 开发 开发 开发 开发 开发 开发 开发 开发 开发 开发 开发 开发 开发 开发To the extent that the operation of the processing process, Jin Jinde: into the partition to create a close, can form a space of the chamber, but it still has the following defects: 1 · the degree of precision machining to close, the processing accuracy must refer to The cost of the cost is also more, but still can not achieve the actual leakage prevention effect. 2 · How can the metal material be accurately processed without the exact processing? #果, the use of metal materials as a close material, the innate existence of the loss lies in the mechanical multiple points After the combination, it will also affect the effect of the fit and the incompleteness of the fit. Therefore, in view of the problems existing in the above-mentioned conventional structure, how to create an innovative structure with more ideals and practicability, and the eagerness of consumers and the relevant industry must strive to develop the goal and direction of breakthrough. In view of this, the creator has been engaged in the manufacturing and design experience of related products for many years, and the design and careful evaluation of the above objectives have resulted in a practical and practical creation. [New content] The technical problem to be solved: the conventional 〇-type ring only provides the anti-leakage effect of compression, and it is also unfavorable for the anti-shape of the mechanism which is often required to be separated and assembled, and is generally formed into a ring shape, and is vacuum-plated. The anti-state used on the machine is precision-processed with sheet metal, which is not good for leak prevention and increases the expenditure. Technical characteristics of solving the problem: providing a leak-proof junction of a vacuum coating machine M289774 - structure (a) ... the leak-proof structure () type ring before the '彳t and has an inflatable ancestor-type ring inside the hollow, this The group of the 〇-shaped ring is arranged in the vacuum coating, the structure, and is inflated to make the 〇-shaped ring expand and deform to fill the gap between the mechanisms, so as to achieve the purpose of leakage prevention and sealing, and can be separated after being deflated. Three-dimensional type 〇-type ring, expansion seal and leak-proof and facilitate the leakage prevention between the mechanisms of separation and combination. Compared with the effect of the prior art: to provide a vacuum coating machine (I), which is different from the conventional ring-shaped solid ring, and the original structure of the structure is hollow and inflatable for expansion, and The seals used for compression and deformation are not the same. The 〇-shaped ring of this creation can be used as a leak-proof mechanism for separation and combination, while the conventional 〇-type ring is not conducive to the use of the state. . With regard to the techniques, means and functions of the present invention, it is believed that the above-mentioned embodiments, constructions and features of the present invention can be obtained from a detailed and detailed understanding. Φ [Embodiment] This creation provides a leak-proof structure of a vacuum coating machine (1) Improved designer. Referring to the first figure, it is a schematic diagram of a preferred embodiment of the present invention. The leakproof structure of the vacuum coating machine (1) is used to manufacture a transparent film (ITO Fi lm ) and a soft copper ruthenium substrate (FCCL). , such as the transparent conductive film (the enlarged partial cross-sectional view of the product of the second image of ITOFilmM) is basically made of a rubber sheet (PC F 1 1 111) ( 5 0 ) Plating a layer of cerium oxide (s I 0,) (5 1 machine gap between the internal structure of the leaky leak-proof ring is often the shape of a shape compared to the structure of the stereoscopic I (AR see layer plastic b - M289774 - Re-plating a layer of indium tin oxide (ί TO ) (: 5 2 ), etc., plating a multi-layer #料'. to make a transparent conductive film (I 0 F 1 1 m), and its coating process needs Vacuuming and injecting different process gases, so they can not pollute each other or affect each other. The leak-proof structure of the vacuum coating machine (1) mainly includes: a vacuum chamber (1 0) of a vacuum coating machine (1), The inner chamber of the vacuum chamber (10) is formed with a coating region (12), and the coating region (12) is separated by a plurality of partitions (13). a plurality of coating spaces (1 3 1 ); a vacuum coating machine (1) of the transceiver mechanism (20), which is disposed on the sliding (2) of the vacuum w coating machine (1), and the vacuum chamber (10) The upper part of the inner chamber is also provided with a sliding handle (1 4 ) to provide the guiding of the upper and lower sides of the transceiver mechanism (20), and the transceiver mechanism (20) is provided with a compartment sealing group (2 1 ) (to cooperate Referring to the illustration of the compartment seal group in the third figure), the partition (2 1 1 ) of the compartment seal group (2 1 ) is arranged corresponding to the vacuum chamber (1 1 ) partition (1 3 ), when the transceiver mechanism (2) 0) When feeding into the inner chamber of the vacuum chamber (10), the partition of the partition (1 3 ) ( 2 1 1 ) is formed with a number of intervals of φ grab (3 〇) (3 1 ) ( 3 2 ) ( 3 3 ) ( 3 4 ) ( 3 5 ) ( 3 6 ) (Compared with the side view of the vacuum coating machine according to the fourth figure); With the above configuration, after vacuuming the inside of the vacuum chamber, the vacuum chamber is separated The cabins (3 0 ) to (3 6 ) can be adjusted independently by pumping air, so that the vacuum of each compartment (30)~(3 6) can be adjusted independently without causing other compartments to be vacuumless. Adjust to achieve the vacuum of each compartment (30)~(3 6) See the third, fifth and sixth figures, respectively, the three-dimensional view of the compartment seal group and the perspective view of the 0-ring and the partition between the partitions of the vacuum chamber and the transceiver mechanism. M289774 - Close-up of the close-fitting system The compartment seal group ί 2丨) corresponds to the true, cavity (1 1 ) (see the first figure) inner chamber (15) partition (13), position, also has a partition (2 1 1) 5 sides of the two partitions (2 1 1 ) and set the plate (2 1 2 ) ( 2 1 3 ) above the partition (2 1 1 ) to make the two plates (2 1 2 ) ( 2 1 3 ) forms a groove (2 1 4 ), which is provided with a 〇-shaped ring (40), a groove (2 1 4 ) and a partition (1 3 ) The embedding, according to which the partition (13) (211) and the two sheets (212) (213) constitute a compartment # compartment, so that the 〇-shaped ring (40) can be inflated when there is a limit Scope, and the inflation of the 〇-shaped ring can surely seal any gap between the partition (1 3 ) (2 1 1 ) and the two plates (2 1 2 ) ( 2 1 3 ), so that each compartment (3 0 ) ~ (3 6 ) (see the fourth figure) is indeed sealed. The above-mentioned 〇-shaped ring (40) is internally provided with an air-filling space (4 2 ) which is interpenetrated (refer to FIG. 5), and the outer side of the 〇-shaped ring (40) is provided with an inflatable vomiting (4 I 1 ) to the internal inflatable space. (4 2 ). Referring to the fourth figure, a three-dimensional type of ring (40) includes a ring segment (4 3 ) surrounded by a circumference and a plurality of straight segments (4 4 ) therebetween, and the ring segment (4 3 ) The inside of the straight section (4 4 ) is arranged as an inflation space (4 2 ) (as shown in FIG. 5 ) and is connected to each other, and the 〇-shaped ring ( 4 0 ) is provided with two venting vomiting ( 4 1 ) ( 4 1 1), by its inflation suction (4 1 ) ( 4 1 1 ), the gas is filled into the 〇-shaped ring (40) and inflated, so that the expanded 〇-shaped ring (40) can be filled In the gap between the partitions of the vacuum coating machine compartment, the purpose of sealing and leakproof is achieved. .M289774 · - The above ring segment _ ; ί :3 ) also has to be the interrupt setting. Interrupted position. The two end faces (4 3 1 ) have to form a closure. ^ As shown in the third figure, it is a three-dimensional schematic diagram of the compartment sealing group of the present invention. The compartment sealing group (2 1 ) of the vacuum coating machine (1) is formed with a plurality of partitions (2 1 1 ). Two sides of the partition plate (2 1 1 ) are fixed with two plates (2 1 2 ) ( 2 1 3 ) above the partition plate (2 1 1 ), thereby forming a groove (2 1 4 ) to provide a 〇-shaped ring (4 0 ) (refer to Figure 6), the bracket (2 1 4 ) also provides the insertion of the partition (1 3 ) (see the figure Φ in the first figure) so that the ring is made (4 0 ) Effectively sealed when inflated. The enhancements of this creation are as follows: 1. Provide an innovative structure that can be used to facilitate the leak-proof structure of the vacuum coating machine (1). It is used in the often separated combination form, which breaks through the use of the conventional circle-shaped solid ring. The shape and the three-dimensional type of the ring are made into a hollow body and the two ends thereof are provided with an inflation nozzle, and the inflation nozzle is inflated to make the $〇 type ring to be sealed and leakproof, and the implementation manner is different. For the use of the 〇 type ring, this creation is novel. 2. The special improved structural design is mainly used for the leakage preventing structure of the vacuum coating machine. (1) The three-dimensional type 〇-shaped ring is used on the member, and the 〇-shaped ring is inflated for sealing and leakproof, and the 〇-shaped ring can be Inflatable, 3⁄4 gas, which is conducive to the leakage prevention between the components of the vacuum coating machine. The creation is practical and progressive. 3, the vacuum of the different compartments is different, the process is also different, the 〇-type ring can be effectively sealed, so that they do not pollute each other, nor M289774 · • The vacuum created by the above The leak-proof structure of the key film machine (1) is indeed the first in the industry and meets the novelty requirements of the new patent, and its comprehensive and innovative design meets the progressive requirements of the new patent, and it is suitable for the vacuum coating machine. Often separated and combined, the mechanism is leakproof, which is in line with better industrial utilization. The foregoing description of the preferred embodiment of the present invention is specifically described as a technical feature of the present invention; however, those skilled in the art can make changes and modifications to the present invention without departing from the spirit and principles of the present invention. These changes and modifications shall be covered by Fan Yishou as defined in the scope of the patent application below. BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a perspective view of a preferred embodiment of the present invention. The second figure is an enlarged partial cross-sectional view of a product example of the present creation. The third picture: a three-dimensional schematic diagram of the sealed compartment of the 4 compartments of this creation. I The fourth picture: a side view of the vacuum coating machine of this creation. The fifth picture is a perspective view of the 〇-shaped ring of this creation. Fig. 6 is a partial cross-sectional view showing the close relationship between the partitions of the vacuum chamber of the present invention after being incorporated into the transceiver mechanism. [Main component symbol description] (1) Vacuum coating machine (2) Slipper (1 1) Vacuum chamber (1 2 ) Coating area (1 3 ) Partition (1 3 1 ) Coating space M289774 · " ί 2 U ) Transceiver Material Agency* ( 2 1 1 ) Partition • ( 2 1 3 ) Plate (3 0 ) Compartment (3 2 ) Compartment (3 4 ) Compartment (3 6 ) Compartment (4 1 ) Inflatable Dumb # ( 4 2) Inflatable space (4 3 1 ) End face (50) Plastic plate (5 2 ) Indium tin oxide i 2丨) Compartment seal group (2 i 2 ) Plate (2] 4 ) Insert groove (3 1 ) Compartment (3 3 ) compartment (3 5 ) compartment (4 0 ) 〇 ring ( 4 1 1 ) inflation port and (4 3 ) ring segment (4 4 ) straight section (5 1 ) cerium oxide

Claims (1)

M289774 · 九、申請專利範圍: 該真 區藉 空腔 ,收 空腔 之區 之形 且内 ,寂 實密 分隔 防漏 及其 互貫 防漏 斷位 * 1 · 一種真空鍍膜機之防漏結構(一),其中, w空鍍膜機包含有: 一真空腔,真空腔之内室並形成有鍍膜區,鍍膜 由若干之隔板區隔出複數之鍍膜空間; 一收發料機構,設於真空鍍膜機之滑執上,並真 内室之上方亦設有滑執提供收發料機構滑移時之導正 A 發料機構設有隔艙密封組,隔艙密封組之隔板對應真 隔板設置,當收發料機構送入至真空腔内室時,隔板 隔乃形成有若干之隔艙; 該隔艙密封組隔板二惻面固設板片高出隔板,使 成嵌槽,嵌槽恰提供〇型環組設其間,〇型環為立體 部設貫通之充氣空間,外周並設充氣咀連通充氣空間 槽並提供真空腔隔板之嵌入,〇型環充氣膨脹,得確 封二隔板間任何有可能洩漏之縫隙,讓各個隔艙確實 _密封。 2 ·如申請專利範圍第1項所述之真空鍍膜機之 結構(一),其中該〇型環呈立體型式,其具有環形段 間之直條段,而該環形段與直條段内部設成中空且相 通,〇型環之上得設有一個以上之充氣咀。 3 ·如申請專利範圍第1項所述之真空鍍膜機之 結構(一),其中該〇型環環形段得為中斷之設置,中 置二端面得形成封閉者。 4 ·如申請專利範圍第1項所述之真空鍍膜機之防漏 M289774 · 結構(一 ρ其中該充氣咀設成二個為最佳' 且得分則設 •()型環之前、後端者。 十、圖式: 如次頁M289774 · Nine, the scope of application for patents: The real area borrows the cavity, the shape of the area of the cavity is received, and the inner part of the cavity is separated and leakproof and its mutual anti-leakage breakage position * 1 · The leakproof structure of the vacuum coating machine (a) wherein, the w empty coating machine comprises: a vacuum chamber, the inner chamber of the vacuum chamber is formed with a coating area, the coating is separated by a plurality of partitions to form a plurality of coating spaces; a transceiver mechanism is disposed in the vacuum The sliding of the coating machine, and the sliding of the upper part of the inner chamber is also provided. The guiding mechanism is provided when the feeding mechanism is slipped. The discharging mechanism is provided with a compartment sealing group, and the partition of the compartment sealing group corresponds to the true partition. Provided that when the transceiver mechanism is fed into the inner chamber of the vacuum chamber, the partition plate is formed with a plurality of compartments; the partition plate of the partition sealing group is higher than the partition plate to make the groove, The inlay groove is provided with a 〇-shaped ring set therebetween, the 〇-shaped ring is an inflatable space through which the three-dimensional portion is arranged, and the outer circumference is provided with an inflation nozzle communicating with the inflatable space groove and providing the insertion of the vacuum cavity partition plate, and the 〇-shaped ring is inflated and inflated. Any gap between the two partitions that may leak, let Each compartment is indeed _ sealed. 2. The structure (1) of a vacuum coating machine according to claim 1, wherein the 〇-shaped ring has a three-dimensional type, and has a straight section between the annular sections, and the annular section and the straight section are internally provided. It is hollow and connected, and more than one inflatable nozzle is provided on the 〇-shaped ring. 3. The structure (1) of the vacuum coater of claim 1, wherein the ring-shaped ring segment is provided with an interruption, and the center two end faces are formed to form a closure. 4 · The leak-proof M289774 of the vacuum coating machine as described in the scope of claim 1 of the patent application. · Structure (one ρ where the inflation nozzle is set to two is the best' and the score is set before and after the ring type X. Schema: as the next page 1414
TW94218865U 2005-11-01 2005-11-01 Leakage preventing structure of vacuum film plating machine TWM289774U (en)

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI506150B (en) * 2011-09-14 2015-11-01 Hon Hai Prec Ind Co Ltd Arc ion coating device

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI506150B (en) * 2011-09-14 2015-11-01 Hon Hai Prec Ind Co Ltd Arc ion coating device

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