M286364M286364
I 八、新型說明： 【新型所屬之技術領域】 本創作係有關於氣體感知器，例如有關使用於檢測氣體漏出之 具有奈米碳管之氣體檢測裝置之相關技術。 【先前技術】 近來’已呈現出奈米碳管逐漸被開發作為各種檢測用元件之趨 $ 電極於由丨條奈米碳管所組成的氣體感測用電阻 魯體的兩端’以作為氣體感知器。而該氣體感知器係測定氣體感測用電 阻70件的電氣特性（電阻值），以求取所欲檢測的對象氣體的濃度。 例如特開雇-82’號公報所揭示，係在錢化合滅導電性高分 :中’散佈奈米碳管之薄膜而作為感測氣體用 之氣體感知器，又，該 氣體感知器串聯有電阻值數⑽程度的電阻元件。 使用如上述之氣體感卿電阻元件的氣體感知器，其奈米 的電軋特性（電阻值），會隨著周圍溫度的變化而顯著的變動， 2法在極佳的溫度_之環境下，則難以測定正確的氣體濃度，且 皿度官糊必須花費極大的成本。而且上述之氣體感知器，各 •賴品中’其奈米碳f的特性零散、並不均勻，導致無法高精度地量 硎對象氣艟。 導，又1 上述專爿公報所揭露之氣體感知11，因必須在有機化合物或 電性科子中散佈奈米碳管，故造财的奈純管之含有量不 虫，製品間之品質魏等現象。此外，上述之氣體感知器，由於使用 聯有電阻值數_呈度的電阻元件，故必須要有配置電阻元件的極 M286364 ^大空間，而導致製品之大型化。 【新型内容】 本案創作人有鑑於此問題，乃費盡心思加以研究創新，而揭示出本 '創作之新穎且實狀奈米碳管氣體感知器。其目的係提供—種能不受 周圍溫度的影響而能高精度地檢卿象氣體、且能縮小其產品特性零 亂之一小型化奈米碳管氣體感知器。 本新型申請專利第1項之奈米碳管氣M>H，係具有： 基板， 感測氣體用電阻元件，其係曝露設置於一對電極間之感測氣體用電 阻體，且由因應於前述基板的表面側之檢珊象氣體的接觸狀態而改 變電阻值的奈米碳管所組成； 基準用電阻元件，其係設置於一對電極間之基準用電阻體，且由形 成於前述基板的前職_之鈍化膜職蓋的奈米碳管所組成； 配線二其係將形成於前述基板的前述表面侧之前述感測氣體用電阻 籲元件和前述基準用電阻元件作串列連接；以及 3個連接墊’其係分職性連接於前述感測氣體用電阻元件與前述 基準用電卩元件之串列電路的兩端、和前述感測氣體用電阻元件與前 --述基準用電阻元件之連接點。 •根據本案新3L申明專利第！項之構成，感測氣體用電阻元件和基準 用電阻元件作串列連接的串接電路，為形成於同一基板，當自定電屢 源施加㈣於該串接電路，即能自感測氣體用電阻元件和基準用電阻 元件的連接點’取得電位而作為輸出電壓，故能不受周圍溫度的影響 M286364 而能高精度地檢測對象氣體，且無製品間之奈米碳管之特性零亂等現 象’而實現高精度、小型化之奈米碳管氣體感知器。 此外，本新型申請專利第2項之奈米碳管氣體感知器，係具有·· 基板； 2個感測氣體用電阻元件，其係曝露設置於一對電極間之感測氣體 用電阻體，且由因應於前述基板的表面側之檢測對象氣體的接觸狀態 而改變電阻值的奈米碳管所組成； _ 2個基準用電阻元件，其係設置於—對電極間之基準㈣阻體，且 由形成於前絲板的前述表賴之鈍倾所覆蓋的奈米碳管所組成； 配線，其係將形成於前述基板的前述表面侧之前述各感測氣體用電 阻7G件和别述各基準用f阻元件，作成前述_氣翻電阻元件們為 位於橋接電路的對邊之狀態的橋式連接；以及 二4個連接墊，其係分職親接於前述橋接電路巾，錄相鄰邊的 前述感測氣體用電阻元件與前述基準用電阻元件之連接點。 根據本案新型申請專利第2項之構成，2個感測氣體用電阻元件與2 ，基準用電阻树之橋式連接的橋接電路，為形成於同—基板，當自 疋電壓源施加電壓於位於該橋接電路之4個連接墊當中的對角之2個 連接墊時，即能自❹姐元件和鲜 ==作1心嶋_溫梅恤高精度地檢 卢Μ料ί無"^間之奈米碳管之特性零就等現象，而實現高精 ^度更佳之奈米碳管氣體感知器。而且，相較於㈣專利第1項， M286364 此外’本新型申請專利第3項之奈米碳管氣體感知器，其前述感測 氣體用電阻體和前述基準用電阻難分別由形成於前述各—對電極間 的複數條的絲碳管的集合斷峨。根脑淑，她於丨條夺米 碳管所組成的電阻體，更能縮小奈米翁的雜零亂之現象。I. New description: [New technical field] This creation is about gas sensors, such as related technologies for gas detection devices with carbon nanotubes for detecting gas leakage. [Prior Art] Recently, it has been shown that carbon nanotubes are gradually being developed as a variety of detecting elements. The electrodes are used as gas at the two ends of the gas sensing resistors composed of the tantalum carbon nanotubes. sensor. On the other hand, the gas sensor measures the electrical characteristics (resistance value) of 70 pieces of gas sensing resistors to determine the concentration of the target gas to be detected. For example, it is disclosed in the Japanese Patent Publication No. 82', which is a gas sensor for sensing gas in a conductive high-concentration: a film that disperses a carbon nanotube, and the gas sensor is connected in series. A resistance element having a resistance value of (10). In the gas sensor using the gas sensing resistor element as described above, the electric rolling characteristics (resistance value) of the nanometer fluctuate significantly with changes in the ambient temperature, and the 2 method is in an excellent temperature environment. It is difficult to determine the correct gas concentration, and the cost of the paste must be extremely high. Further, in the gas sensor described above, the characteristics of the nanocarbon f in each of the products are scattered and uneven, and the target gas cannot be accurately measured. In addition, the gas perception revealed by the above-mentioned special bulletin 11 is because the carbon nanotubes must be dispersed in the organic compound or the electrical branch, so the content of the purely pure tube of the wealth is not worm, and the quality between the products is Wei. And so on. Further, in the above-described gas sensor, since a resistor element having a resistance value-number of degrees is used, it is necessary to have a large space in which the resistor element is disposed, and the size of the product is increased. [New content] In view of this problem, the creator of this case is trying hard to study and innovate, and reveals the novel and solid carbon nanotube gas sensor. The purpose of the present invention is to provide a small-sized carbon nanotube gas sensor that can detect a large amount of gas without being affected by the ambient temperature and can reduce the characteristics of the product. The carbon nanotube gas M>H of the first aspect of the present invention has: a substrate, a resistive element for sensing gas, which is a resistor for sensing a gas disposed between a pair of electrodes, and is adapted to a surface of the substrate on which the surface of the substrate is in contact with the gas and a resistance value of the carbon nanotube; the reference resistor is provided in the reference resistor between the pair of electrodes, and is formed on the substrate a second carbon tube composed of a passivation film cover of the predecessor, and a wiring unit 2 for connecting the sensing gas resisting element formed on the surface side of the substrate to the reference resistance element in series; And three connection pads are connected to both ends of the series circuit of the sensing gas resistance element and the reference electric energy element, and the sensing gas resistance element and the front-reference The connection point of the resistive element. • According to the new 3L claim patent in this case! In the configuration of the item, the series circuit for connecting the sensing element for the gas and the reference resistor element is formed on the same substrate, and the self-sensing gas can be self-sensing when the self-contained power source is applied (4) to the series circuit. Since the potential is obtained as the output voltage by the connection point of the resistance element and the reference resistance element, the target gas can be detected with high precision without being affected by the ambient temperature, M286364, and the characteristics of the carbon nanotubes between the products are disorderly. A carbon nanotube gas sensor that achieves high precision and miniaturization. Further, the carbon nanotube gas sensor of the second aspect of the present invention has a substrate, and two resistance elements for sensing gas, which are exposed to a sensing gas resistor disposed between the pair of electrodes. And consisting of a carbon nanotube that changes the resistance value in response to the contact state of the gas to be detected on the surface side of the substrate; _ two reference resistor elements are provided in the reference (four) resistor between the counter electrodes, And consisting of a carbon nanotube covered by the blunt tilt formed on the front surface of the front wire; the wiring is formed on each of the sensing gas resistors 7G formed on the surface side of the substrate, and Each of the reference f-resistance elements is formed as a bridge connection in which the gas-shear resistor elements are located on opposite sides of the bridge circuit; and two or four connection pads are connected to the bridge circuit, and the video is recorded. A connection point between the resistive element for the sensing gas and the reference resistive element in the adjacent side. According to the second aspect of the novel application of the present invention, the bridge circuit for connecting two sensing gas resistive elements and the reference resistor tree is formed on the same substrate, and a voltage is applied from the voltage source. When the two connecting pads of the four connecting pads of the bridge circuit are the same, it is possible to self-suppress the components and fresh == for 1 heart 嶋 _ warm plum shirt high-precision inspection Lu Μ ί no " The characteristics of the carbon nanotubes are zero, and the carbon nanotube gas sensor with better precision is realized. Further, in comparison with (4) Patent No. 1, M286364, in the carbon nanotube gas sensor of the third aspect of the present invention, the resistor body for the sensing gas and the reference resistor are each formed by each of the foregoing - Breaking the collection of a plurality of carbon nanotubes between the electrodes. Roots and brains, she is able to reduce the phenomenon of miscellaneous chaos in the body of the carbon nanotubes.
此外，本新型申請專利第4項之奈米碳管氣體感知器，其前述感測 氣體用電阻元件與前述基準用電阻元件係分別間離配置前述各一對電 極於前述基板的厚度方向，且前述各—對電極之中，在前述厚度方向 上罪近前述基㈣前絲_的錢極為域奈米韻生長的觸媒材 f斤構成，喊近前述表_的各電極為自各表面生長前述複數條的 Γ米碳管。根據賴成，即能提高靠近祕麵_各電極與奈米碳 :之相對位置精度，且脑合前述各電極之表面積峨劃奈米碳管之 條數。 石^1= t新辦請專利第5項之奈米碳管氣體感知器，其前述奈米 長邊方向與前述基板的前述表面的法線方向係略相—致。根據 二易於製歧計前述奈米碳管之長度尺寸，而能縮小前述各 =乳體用電阻元件與前述各基準用電阻元件之電_性的零亂現 豕0 【實施方式】 本創作之技術思想，可由以下之 〔實施例1) 収各圖式而得以明瞭。 細1之输f峨__—«ω、⑻所示，在由 M286364 l -_板所《的矩形板狀之基板i的表面（主表面）上，形成有由石夕 乳化膜所組成的絕緣膜2 ’且配置感測氣體用電阻元件4及基準用電 阻元件5於絕緣膜2上。又，基板i的背面侧係形成有由魏化膜所 組成的絕緣膜3。 感測氣義電阻元件4係在絕2上，由_她置於第一圖 ⑻的左右方向的-對電極4a、4b、和設置於該—對電極知、此間 之1條奈米碳管所組成的感測氣體用電阻體4c所構成，基準用電阻元 藝件5係在絕賴2上，由_聽置於第i(b)的左右方向的一對 =Γ和設置於該一對電極5a、5b間之1條奈米碳管所組成 的基準用電阻體5c所構成。 氧化各鐵2、％、此係藉由使奈米碳管生長的觸媒材料（例如 ^匕關而形成。又’介在於作為感測氣體用電阻體4c的ι條夺米 、4b ’係形成互相近靠且突出之尖銳的平面形狀，、 錢接各電極4a、4b的前端之直線上，配置有1條奈米碳 >地^、在於作為基準用電_ 5c的i條奈米碳管之—對電極5 的—緯卜 ' ' 7且在連接各電極5a、5b 的别知之直線上，配置有1條太半 準用電阻俨R , 而感測氣體用電阻體4c與基 =電_5c係在—直線上，配置縣邊方向和該直_一致之狀 此外，在基板丨的上述表面側， 及絕緣膜2的表面與感職體用電阻;^覆蓋基準用電阻元件5 化膜所組成之物6。其中，她^的-對電極Μ之魏 膘6上，因係開口有使感測氣 M286364 ί 體用電阻元件4的感測氣體用電阻體4c的絕大部份露出的矩形之露出 窗7 (氣體導人π) ’故能接觸到被感測氣_電阻體&所檢測的對 象氣體（例如m、NOx、COx、H2等）。因此，感測氣體用電_ 4c係 根據周圍的檢測聽氣體之存在鮮、濃度及溫度變細改變電 阻值’而基準用雜元件5難依_ _温度變“改變電阻值。 是故’本實施例i之奈米碳管氣體感知器係備有：感測氣體用電阻元 件4 ’其係設置於-對電極4a、4b間之感測氣體用電阻體&，且由因 應於曝露於前絲板1的上絲關之檢嶋象氣__狀態而改 變電阻值的奈米碳管所組成；以及基準料阻元件5，其係設置於一 對電極5a、5b間之基準用電阻餘，且由形成於前述基^的前述 表面側之鈍化膜6所覆蓋的奈米碳管所組成。 感測氣體用電阻元件4和基準用電阻元件5，係藉由配線8 (第一 圖㈦正中之配線8)而作串列連接，其係跨接感測氣體用電阻元件 4的-方的電極4a與絕緣膜2及基準用電阻元件5的一方的電極％。 =感測氣體用電阻， 圖Cb)右側之配線8)電性赂垃儿μ ... _ 4b與絕賴2，基準用電阻元 性^一方的電極^，係由配線8 (第一圖㈦左侧之配線8)電 •y娜5a與絕緣跡其中,各_係由金細(例如㈣ 如形成’且3條配線8的—部份係構成作為端子的連接墊。 連接的電阻元件4和基準用電阻元件5作串列 連接的串接電路，為形成於同 和基準職阻元件5的錢接點;且麵職_電阻元件4 連接點上’設有上述之連接墊，當自定電麗 M286364Further, in the carbon nanotube gas sensor of the fourth aspect of the invention, the sensing gas resistive element and the reference resistive element are disposed apart from each other in a thickness direction of the substrate, and Among the above-mentioned counter electrodes, in the thickness direction, the sin is close to the base (4) front wire _ the structure of the catalyst material which grows in the nanometer-like rhyme, and the electrodes adjacent to the table _ are grown from the respective surfaces. A plurality of carbon nanotubes. According to Lai Cheng, the relative positional accuracy of each electrode and nanocarbon is improved, and the surface area of the brain is combined with the number of carbon nanotubes. The stone carbon nanotube gas sensor of the fifth aspect of the invention is the same as the normal direction of the surface of the substrate. According to the second length of the carbon nanotubes, it is possible to reduce the electric power of each of the above-mentioned resistance resistors for the emulsion and the respective reference resistors. [Embodiment] The technique of the present invention The idea can be understood by the following [Example 1]. As shown in Fig. 3-1, the surface of the rectangular plate-shaped substrate i (main surface) of the M286364 l-_ plate is formed of a thin emulsion film. The insulating film 2' is disposed on the insulating film 2 with the sensing gas resistive element 4 and the reference resistive element 5. Further, an insulating film 3 composed of a wafer film is formed on the back side of the substrate i. The sensing gas-sense resistor element 4 is on the anode 2, the pair of electrodes 4a, 4b placed in the left-right direction of the first figure (8), and the one set of carbon nanotubes disposed between the pair of electrodes The sensing gas is composed of a resistor body 4c, and the reference resistor element 5 is placed on the absolute 2, and a pair of Γ in the left-right direction of the i-th (b) is set to 该The reference resistor 5c composed of one carbon nanotube between the electrodes 5a and 5b is formed. Oxidation of each of the irons 2%, which is formed by a catalyst material for growing a carbon nanotube (for example, 匕 夺 、 。 。 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 、 Forming a sharp planar shape that is close to each other and protruding, and a line of n-carbons disposed on the straight line connecting the tips of the electrodes 4a and 4b is used as the reference power _ 5c The carbon tube - the opposite side of the electrode 5 - weft ' ' 7 and on the other line connecting the electrodes 5a, 5b, is arranged with one too semi-standard resistor 俨R, and the sensing gas resistor 4c and base = The electric_5c is arranged on the straight line, and the direction of the county side is aligned with the straight line. Further, the surface of the substrate 丨 and the surface of the insulating film 2 and the resistance for the sensory body are used; The material composed of the chemical film 6. Among them, the electrode of the electrode-electrode is the largest part of the resistor body 4c for sensing the gas M286364 The exposed rectangular exposed window 7 (gas guide π)' can contact the object gas detected by the sensed gas_resistor& For example, m, NOx, COx, H2, etc.) Therefore, the sensing gas uses _ 4c to change the resistance value according to the presence of the surrounding detection gas, the concentration and the temperature become thinner, and the reference impurity element 5 is difficult to comply with _ _ The temperature changes to "change the resistance value. Therefore, the carbon nanotube gas sensor system of the present embodiment i is provided with a sensing element for sensing gas 4' which is provided for sensing gas between the counter electrodes 4a, 4b. a resistor body & and consisting of a carbon nanotube which changes resistance value in response to an inspection of the upper wire of the front wire plate 1; and a reference material resistance element 5 The reference between the pair of electrodes 5a and 5b is made of a resistor, and is composed of a carbon nanotube covered by the passivation film 6 formed on the surface side of the substrate. The sensing gas resistive element 4 and the reference resistive element 5, which is connected in series by the wiring 8 (the wiring 8 in the middle of the first figure (7)), which is connected to the electrode 4a of the sensing gas resistive element 4, the insulating film 2, and the reference resistive element 5. % of the electrode of the one. = Resistance for sensing gas, Figure Cb) Wiring on the right side 8) Electrical 垃 儿 μ ... _ 4b and the absolute 2, the reference resistance of the element ^, the electrode ^, by the wiring 8 (the first figure (7) on the left side of the wiring 8) electricity y Na 5a and insulation traces, each _ is made of gold (for example (4) If the portion of the three wirings 8 is formed as a connection pad as a terminal, the serial connection circuit in which the connected resistance element 4 and the reference resistance element 5 are connected in series is formed in the same and the reference resistance element 5 Money contact; and face _ resistance element 4 connection point 'with the above connection pad, when custom electric M286364
I =:;==接，，即能自感測氣_電_和基準用電 旦壇而处古作:於取件電位而作為輪出龍，故能不受周圍溫度的 〜曰而此同扣度地檢測對象氣體，且無 “、、裊°口間之奈米碳管之特性零亂 專現=，而,現祕度、小型化之奈⑽管氣體感知器。 (實施例2) a施例2之絲碳管鐘感㈣，魏本構祕和實關丨略同， 如第二圖所示，相異之處係分別各備有2個感測氣體用電阻元件仏 #基準用電阻元件5。2個感測氣體用電阻元件4及2個基準用電阻元件 5係以4條配線8連接成橋接電路，且4條配線8的―部份係構成作 為端子的連接墊。實㈣2巾，連接於該橋接電路的4個連接墊當中 的位於橋接電路的對角之兩個連接墊’當自^電源施加電壓於此之 際’則因能自殘存的兩個連接墊間取得電壓並作為輸出電壓，故不受 周圍溫度的職而能高精度地檢測出縣氣體。此外，因構成上述橋 接電路，故相較於實施例1，具有更高感度之優點。 • (實施例3) 實施例3之奈米碳管氣體感知器，係如第三圖（a)、（b)所示，在 由矽基板所組成的矩形板狀之基板1的表面（主表面）上，配置有2 個感測氣體用電阻元件4及2個基準用電阻元件5，且2個感測氣體 用電阻元件4及2個基準用電阻元件5係被形成於基板丨的上述表面 之由矽氧化膜所組成的絕緣膜2’所包圍。於絕緣膜2上。又，基板1 的背面側係形成有由矽氧化膜所組成的絕緣膜3。 12 M286364 各感測氣體用電阻元件4係由間離而配置於前述基板1的厚度方向 之一對電極4a、4b、及設置於該一對電極4a、4b間之複數條奈米碳 管集合體所組成的感測氣體用電阻體4c所構成，各基準用電阻元件5 係由間離而配置於基板1的厚度方向的一對電極5a、5b、和設置於該 一對電極5a、5b間之複數條奈米碳管集合體所組成的基準用電阻體 5c所構成。 各感測氣體用電阻元件4和各基準用電阻元件5，其靠迎基板J的 籲上述表面側之電極4a、5a，為由使奈米碳管生長的觸媒材料（例如氧 化鐵）所構成。該電極4a、5&係配置於多晶石夕組成的觸媒固定部9。 而遠離基板1的上述表面侧之電極4b、5b，為由金屬材料(例如.⑴ 所構成。 此外’在_基板的前述表關，係形成有由覆蓋基和電阻元件 5及絕緣膜2’齡面之魏化斷城之鈍倾6。射，在鈍化膜 6上因係開口有使各感測氣體用電阻元件*的名感測氣體用電阻體 4c的絕大部份露出的矩形之露謝（氣體導人口），故能接觸到被 感測氣體用電阻體4c所檢測的對象氣體。因此，感測氣體用電阻體 4c係根據觸的檢測對象氣體之存在與否、濃度變化及_變化而改 魏阻值，而基準用電阻元件5難依_ _溫度變化而改變電阻 ⑽庙、係設置於—對電極&、4b間之_氣體用電阻體4c，且 而改變電阻值的奈米碳管所組成；以及基準用電阻元件5，其2置 M286364 ι 9 於一對電極5a、5b間之基準用雷ς α ^ 早職_ 5e，且由形成於前述基板1的 則述表面側之純化膜6所覆蓋的奈米礙管所組成。 又本實把例3中，2個感測氣體用電阻元件4和2個基準用電阻 元件5，係藉由配線8而構成捧姑 構成橋接電路。上述橋接電路係感測氣體用 電阻元件4們為以配線§而互相相料 互相相對向配置，而基準用電阻元件 亦以配線8而互相相對向配置。此外，本實施例3係在不接觸對象氣 體的狀態下，使2個感測氣體用電阻體4c的電阻值形成相等，而設定 構成2個感測氣義電阻體知的奈米碳管的長度尺寸於相同值，亦設 定構成2個鱗用電_ 5c的奈米碳管的長度尺寸於相同值。 、各配線8係由金屬材料（例如㈣）組成的金屬配㈣、和電性 連接於金屬配線8a的擴散配線8b所構成，且4條配線8的各金屬配 線8a的-部份為構成作為端子的連接墊。又，電極化和電性連接於 /電極4b的金屬配線⑹細姻之金屬獅—體成型，電極 5b和電性連接於該電極5b的金細祕亦以綱之金屬材料而連 一體成型。 ' ' 因此，本實施例3之奈米碳管氣體感知器，在同-基板1形成橋式 連接之橋接電路之_下，#自定頓馳加顏於位於該橋接電路 之4個連接墊當中的對角之2個連接墊時，即能自赫的2個連接塾 間取付電位而作騎出賴，故能不受顺溫度的影響而能高精度地 檢測對象II體，且無製品間之奈米碳管之雜零亂等現象。 (創作之功效） 本創作之奈米碳管氣，雜不受厢溫度的影響而能高精I =:;== connect, that is, the self-sensing gas _ electricity _ and the reference electrician altar can be used in ancient times: as the wheel is taken out as a wheel, so it can be free from the ambient temperature. The target gas is detected with the same degree of deduction, and there is no characteristic of the carbon nanotubes between the mouths of the ", and 袅 °, and the current secret, miniaturized (10) tube gas sensor. (Example 2) a Example 2 wire carbon tube clock sense (four), Wei Ben's secret and real customs are similar, as shown in the second figure, there are two sensing gas resistive elements 仏# reference resistors Element 5. Two sensing gas resistive elements 4 and two reference resistive elements 5 are connected by a four-wire 8 to form a bridge circuit, and the "parts of the four wirings 8 constitute a connection pad as a terminal. Actual (4) 2 The two connection pads of the four connection pads connected to the bridge circuit located at the opposite corners of the bridge circuit 'when the voltage is applied from the power source', the voltage is obtained from the two remaining connection pads As the output voltage, the county gas can be detected with high precision without being affected by the ambient temperature. In addition, since the bridge circuit is constructed, Compared with the first embodiment, it has the advantage of higher sensitivity. (Embodiment 3) The carbon nanotube gas sensor of the third embodiment is as shown in the third figure (a) and (b). Two sensing gas resistance elements 4 and two reference resistance elements 5 are disposed on the surface (main surface) of the rectangular plate-shaped substrate 1 composed of the substrate, and two sensing gas resistance elements 4 and 2 are disposed. The reference resistive element 5 is surrounded by an insulating film 2' formed of a tantalum oxide film formed on the surface of the substrate, on the insulating film 2. Further, the back side of the substrate 1 is formed of a tantalum oxide film. The insulating film 3 is composed of 12 M286364. Each of the sensing gas resistive elements 4 is disposed between the pair of electrodes 4a and 4b in a thickness direction of the substrate 1 and is disposed between the pair of electrodes 4a and 4b. The sensing gas is composed of a resistor body 4c composed of a plurality of carbon nanotube assemblies, and each of the reference resistor elements 5 is disposed between the pair of electrodes 5a and 5b disposed in the thickness direction of the substrate 1, and is disposed on Reference resistor composed of a plurality of carbon nanotube assemblies between the pair of electrodes 5a, 5b Each of the sensing gas resistive element 4 and each of the reference resistive elements 5 is a catalyst material for growing the carbon nanotube by the electrodes 4a and 5a on the surface side of the substrate J (for example) The electrode 4a, 5& is disposed in a catalyst fixing portion 9 composed of a polycrystalline stone, and the electrodes 4b and 5b on the surface side away from the substrate 1 are made of a metal material (for example, (1) In addition, the above-mentioned surface of the _substrate is formed by the blunt tilt of the Weihuahuacheng, which is covered by the cover base and the resistive element 5 and the insulating film 2', and is formed on the passivation film 6 by the opening. Each of the sensing gas sensing electrodes* is sensed by a rectangular portion of the gas sensing resistor 4c that is exposed to the rectangular portion (gas-conducting population), so that it can be in contact with the sensed gas resistor 4c. Object gas. Therefore, the sensing gas resistor 4c changes the resistance value according to the presence or absence of the gas to be detected, the concentration change, and the _ change, and the reference resistor element 5 hardly changes the resistance (10) temple according to the _ _ temperature change. It is composed of a gas-receiving body 4c between the counter electrode &, 4b, and a carbon nanotube having a resistance value; and a reference resistor element 5, which is provided with a pair of electrodes 5a, M286364 ι 9 The reference between 5b and the reference is made of a Thunder α ^ premature _ 5e, and is composed of a nano tube covered by the purification film 6 formed on the surface side of the substrate 1 described above. Further, in the third example, the two sensing gas resistive elements 4 and the two reference resistive elements 5 are formed by the wiring 8 to form a bridge circuit. The bridge circuit is configured such that the sensing resistor elements 4 are arranged to face each other with the wiring §, and the reference resistor elements are also arranged to face each other with the wiring 8. Further, in the third embodiment, the resistance values of the two sensing gas resistors 4c are made equal to each other without contacting the target gas, and the carbon nanotubes constituting the two sensing gas resistors are set. The length dimension is the same value, and the length dimension of the carbon nanotubes constituting the two scales _ 5c is also set to the same value. Each of the wirings 8 is composed of a metal material (for example, (4)), and a diffusion wiring 8b electrically connected to the metal wiring 8a, and a portion of each of the metal wirings 8a of the four wirings 8 is configured as Connection pad for the terminal. Further, the metal wire (6) which is electrically and electrically connected to the /electrode 4b is formed into a metal lion body, and the electrode 5b and the gold fine electrode electrically connected to the electrode 5b are integrally molded by a metal material. Therefore, the carbon nanotube gas sensor of the third embodiment has a bridge circuit connected to the same substrate 1 and has a custom connection to the four connection pads located in the bridge circuit. When the two diagonal pads of the middle are connected, the potential can be taken from the two connecting turns of the Hertz, so that the object II can be detected with high precision without being affected by the temperature, and there is no product. The phenomenon of miscellaneous carbon nanotubes between the carbon nanotubes. (Effect of creation) The carbon nanotube gas of this creation can be highly refined without being affected by the temperature of the car.
14 M286364 -度地檢測對象氣體，且無製品間之奈米碳管之特性零亂等現象，更能 提高各電極與奈米碳管之相對位置精度，以配合各電極之表面積而規 劃奈米碳管之條數，實現尚精度、小型化之奈米碳管氣體感知器。 【圖式簡單說明】 第一圖（a)係表示實施例1之平面圖，（b)為截面圖。 第二圖係表示實施例2之平面圖。 #第三圖（a)係表示實施例3之平面圖，（b)為A—A，部截面圖。 【主要元件符號說明】 1基板 2絕緣膜 2’絕緣膜 3絕緣膜 4感測氣體用電阻元件 _ 4a、4b電極 4c感測氣體用電阻體 5基準用電阻元件 -5a、5b電極 -5c基準用電阻體 6鈍化膜 7露出窗 8配線 15 M286364 -8a金屬配線 8b擴散配線 9觸媒固定部14 M286364 - Detecting the target gas in a gradual manner, and the characteristics of the carbon nanotubes between the products are disordered, etc., and the relative positional accuracy of each electrode and the carbon nanotubes can be improved, and the surface carbon of the electrodes can be planned to meet the surface area of each electrode. The number of tubes is used to realize a carbon nanotube gas sensor that is accurate and miniaturized. BRIEF DESCRIPTION OF THE DRAWINGS Fig. 1(a) is a plan view showing a first embodiment, and (b) is a cross-sectional view. The second drawing shows a plan view of Embodiment 2. #图图 (a) shows a plan view of the third embodiment, and (b) is a cross section of A-A. [Description of main component symbols] 1 substrate 2 insulating film 2' insulating film 3 insulating film 4 sensing gas resistance element _ 4a, 4b electrode 4c sensing gas resistor 5 reference resistor element -5a, 5b electrode - 5c reference Passivation body 6 passivation film 7 expose window 8 wiring 15 M286364 -8a metal wiring 8b diffusion wiring 9 catalyst fixing portion