TWM282770U - Micro/nano cylindrical platform with three degrees of freedom - Google Patents

Description

M282770 IV. Creation Instructions (1) [The new type belongs to the creation of a cylindrical three-body three-degree-of-freedom body with a flat spring and [the previous technology has been found in the People ’s Republic of China ’s ultra-fine degree of superstructure]. It is a circular two-wearing cylinder, which is fixed with three plates on the upper circle and is driven by three equilateral three-way internal fixed connections, and is driven together; under the other platform: another-the third technology of the Chinese people Since the national intellectual property dense positioning platform, for example, it mainly packs the base, the flat plate and the cylindrical shape, and fixes a lower money chain and an upper hinge and three on the lower end of the upper flat cylinder of the flat plate. At the exit angle of the transmission wheel, a three-wheel exit platform and the base outer cylinder are fixed at the lower end of the base platform cylinder and the bottom of the currently known technology. The technical field of the upper part of the lower base of the respective base platform with the lower hinged platform inside the platform] The invention relates to a micro / nanometer platform, a micro / nanometer platform, especially-micro / nano positioning Platform: The structural design of the cylinder meter method, in particular, i is a 1 on the platform mechanism is used to cut the connection of the platform base 2 platform base, hinge, disc type meter positioning platform has a type such as China number CN 2580470 Y disclosed in the third figure, the wheel-out platform, threaded conical pin, and t ceramic pre-tensioning mechanism disclosed in the case; the transmission wheel-out platform is divided by a flat plate into upper and lower triangles with three upper hinges and a flat lower surface The upper end of the equilateral triangle cylinder is fixedly connected, and the flat and upper section barrels and the lower section barrels are used as the base platform. The independent piezoelectric ceramic pretensioner of the base platform is fixed with a threaded conical pin. Block, the transmission output is connected to the thread. The platform is published by Dunmimi positioning platform, such as CN 24667 69Y.

M282770

A three-degree-of-freedom ultra-precision automatic positioning platform is shown in the thirteenth figure. It can be seen from the structure disclosed in the case that it is composed of a transmission platform, a hinged actuator, and a piezoelectric actuator. On the three sets of independent piezoelectric ceramics with screw = side-diagonal, on the three sets of piezoelectric ceramics, the screw is combined with a circular drive electric pot to activate the stomach and the piezoelectric pottery actuator; Move the platform to do positioning. ^ 疋 It is not difficult to look at the structure of the two three-degree-of-freedom positioning platforms mentioned above. The main reasons are summarized as follows: X See eight The two three-degree-of-freedom positioning platforms mentioned above have complex structural designs, many assembly parts, and The shortcoming of gap error is easy to occur. Yiwen The above two two-degree-of-freedom positioning platforms, such as the National People's Republic of China State Intellectual Property Office Announcement No. CN 2 5804 70Y, the three micro-structures of the freely-produced ultra-precision positioning platform, mainly guide positioning and translation. =, There are six hinges, and the Chinese People's Republic of China State Intellectual Property Office No. 2 CN 246 6769Υ disclosed the three-degree-of-freedom ultra-precision automatic positioning platform. There are twelve hinges that guide the positioning platform. The chain will reduce the displacement range of the piezoelectric Tao Yao actuator driven to the work platform. The function of the hinge is to transform the platform into relative motion through its corner elasticity. For example, in the People's Republic of China, Qiu Renyang: = Two bites with the Republic of China's national intellectual property rights = Bulletin No. CM 2580470Y In the structure disclosed in the ultra-precise positioning flat, there are three hinges on the upper and lower surfaces of the flat plate. The three hinges are used as the fulcrum to drive the table to rotate.

Page 6 M282770 4. Creation instructions (3) When rotating, they will interfere with each other to make the table rotate symmetrically. In addition, when the positioning platform is displaced in the z-axis direction, the positioning platform will be restrained by the hinge, so that Limited range. Mouth [New Content] ^ This creation is to improve the ultra-precision positioning platform such as the Chinese People ’s Republic of China National Intellectual Property Office Announcement No. CN 25804 70, and the Chinese People ’s Republic of China National Intellectual Property Office Announcement No. CN ^ Flat structure; such as = In addition, there are too many hinges in the structural design, ^ 陥 毹, the main cause of the energy loss of the silkworm ^ a you ^ ^ 疋 & the movement of the piezoelectric ceramic actuated platform Will be subjected to dry brakes, improperly positioned, a "cylinder = self ^ ^ 1, so this creation is a research and development design technology. —Degree of freedom micro / nano positioning platform" to improve the previous The technical means used to provide a round body = a 系 is to act as a 0x, zf self-propelled micro / nano positioning platform. This platform has an actuator and an upper platform, and the platform includes three piezoelectric ceramics. The table base, four hinges, a disc-type flat spring, and a flat bottom processing method 2 workbench. This platform is made by a CNC wire cutting platform mechanism with a circle. ^ The lower end of the platform is a platform mechanism, each with two hinges, and ^ plate springs, disc-type plate springs up and down the platform base, so that the upper umbrella A is separated from each other and connected to the outer ring of the platform mechanism The 0 base and the lower platform base can be moved relatively, and three groups of piezoelectric ceramics are set at 120 degrees apart.

Page 7 M282770 IV. Creation instructions (4) Fixing grooves for actuators, and placing piezoelectric ceramic actuators in each fixing groove. Three piezoelectric ceramic actuators according to different driving force combinations drive the table to produce three High degree of freedom for precise positioning. The creation has the following effects: 1. The structure of the creation is simple; 2. The platform mechanism of the creation uses the manufacturing technology of wire cutting to solve the assembly error caused by the assembly; 3. Because of the structural design, the creation is only The force and displacement generated by the piezoelectric ceramic actuator are driven by the four hinges and transmitted to the workbench for displacement positioning. The energy consumed by the piezoelectric ceramic actuator is small, so a better displacement positioning effect can be achieved. • [Implementation] The three-degree-of-freedom micro / nano positioning platform of this creative cylinder is composed of a platform mechanism (1), an outer ring sleeve (2), a table (3), a fixed base (4), and a piezoelectric ceramic. As shown in the third figure, the components of these cylindrical three-degree-of-freedom micro / nano positioning platforms are introduced step by step. The uppermost component of the cylindrical three-degree-of-freedom micro / nano positioning platform is the worktable (3). The worktable (3) is attached with three worktable countersunk head fixing holes (31a ~ c) to connect the worktable. The platform mechanism (^ element) under the platform (3). The platform mechanism (1) is shown in the first and fourth figures. The base is a hollow circle. The cylinder is divided into an upper platform base by a disc spring (12). lla) is connected to the lower platform base (lib) 'the upper platform base (na) with two upper hinges (13a ~ b), and the two upper money chains (i3a ~ b) are disc springs (12) as The center is placed symmetrically on both sides of the upper plane of the disc-type flat spring (12); the lower end of the upper hinge (13a ~ b) is connected to the disc-type flat spring (12), round

M282770 IV. Creation instructions (5) The lower plane of the disc flat impeachment (12) connects two lower hinges (丨 4a ~ b). These two lower hinges (14a ~ b) are like the upper hinge (i3a ~ b) and The connection method of the disc plate spring (12) is symmetrically placed on both sides of the lower plane of the disc plate spring (12); the positions of the upper hinge (l3a ~ b) and the lower hinge (14a ~ b) are relative to each other. Staggered at ninety degrees, the lower end of the lower hinge ^^ 卜 ㈧ is connected to the lower flat, base (lib). In addition, the inner diameter and outer diameter of the disc-type flat spring (12) are consistent with the inner diameter and outer diameter of the upper platform base body (11 a) and the lower platform base body (lib); the platform mechanism (1) consists of the upper platform The base (11a), the upper hinge (^ b), the disc spring (12), the lower hinge (14a ~ b), and the lower flat 22 (i = 1 1 b) are connected in an integrated manner, and the connecting part is The four hinges penetrate the notch grooves (15a ~ d) and are evenly divided. The teeth are also cut on the platform mechanism (1), and the outer side of the cylindrical base body is equilateral triangle steps (16 'Π has three independent sets of fixing grooves for piezoelectric ceramic actuators "(161a.cx ^ grooves (16a ~ C) Inside, there is an upper compound screw hole at the lower end, and the lower one is attached to the lower fixing groove (16d ~ f) of the piezoelectric ceramic actuator, and (161a cV: r 糸 hole (161d ~ f) is attached to this upper end. Type screw hole pressure, and; counter pressure! The ceramic actuator is pre-fixed in the upper flat a A; ("; the head fixing hole (3la ~ c) is matched, and the worktable (3) is fixed in the groove (1: ;) Inside: work i: the reason, in the lower end of the piezoelectric ceramic actuator composite screw-type boring screw holes (i6id ~ f), here (5a ~ c) produce a box (~ f) The piezoceramic actuator is matched with preload and matched with the positioning hole of the platform mechanism of the fixed base ⑷ to fix the platform mechanism ⑴ on the fixed base 。. Hole

$ 9 pages M282770 Fourth, creation instructions (6) Place a drive between the fixing groove (16 a ~ c) on the piezoelectric ceramic actuator and the fixing groove (16d ~ f) on the piezoelectric ceramic actuator. The piezoelectric ceramic actuator (5a ~ c) actuated by the table (3), when the piezoelectric ceramic actuator (5a ~ c) changes its length in a controlled manner, the platform mechanism (1) is driven by the three degrees of freedom of the cylinder The micro / nano positioning platform uses the principle of elastic deformation of the material, so that the platform mechanism (丨) will be driven to drive the disc plate spring (12), and the disc plate spring (12) above the hinge 13 (a ~ b) And the lower hinge 丨 4 (a ~ b) as the fulcrum, as an elastic connecting body for relative movement between the upper platform base (11a) and the lower platform base (lib), the upper hinge (13a ~ b) and the lower hinge (14a ~ b) ), The worktable (3) is guided by the elastic deformation of the corner to cause displacement action to achieve precise positioning effect. At the lower end of the flat mouth mechanism (1) is a fixed base (4). As shown in the third figure, the mouthpiece base (4) is provided with a platform mechanism positioning hole (43a ~ c), and the platform mechanism positioning hole (43a ~ c) With the compound screw holes (161d ~ f), the platform mechanism (1) can be fixed on the fixed base (4); in addition, the power socket of the piezoelectric ceramic actuator is fixed on the fixed base (4). Slot (44), the purpose of which is to concentrate the wires of the piezoelectric ceramic actuator (5a ~ c) in a power socket, and place this power socket in the power socket fixing groove (44) of the piezoelectric ceramic actuator ), For beautiful appearance and convenient wiring; the fixed base (4) is also equipped with a platform combination fixing hole (41a ~ d), the purpose of which is to combine the cylindrical three-degree-of-freedom micro / nano positioning platform It can be fixed on other positioning platforms or on other fixed bases. In order to protect the platform mechanism (0 so that the platform mechanism (1) does not deform when it is taken or moved, the platform mechanism (1) is packaged.

M282770 Fourth, the creative description (7) The method for talent is to cover the outer ring (2) outside the platform mechanism (1). As shown in the fifth figure, the outer ring sleeve (2) has four outer ring sleeve fixing screw holes (21a ~ c), and the Z outer ring sleeve fixing screw holes (21a ~ c) and the outer ring on the fixing base (4). The ring sleeve is fixed with the f hole (42a ~ d), and the platform mechanism (丨) and the worktable (3) can be covered in the outer ring sleeve (2) and the fixed base (4) by screwing. As shown in the second figure. The cylinder three-degree-of-freedom micro / nano positioning platform used in this creation is actually used 2 'First, the platform mechanism (1), the outer ring sleeve (2), the worktable (3), the fixed base (4), the piezoelectric ceramics The actuator (5a ~ c) is assembled as shown in the second figure, and then the piezoelectric ceramic actuator (5a ~ c) is controlled by the fine cancer to make the piezoelectric ceramic actuator (5a ~ c) receive Control the length, and use three sets of piezoelectric ceramic actuators (5a ~ c) with different deformation and elongation, you can directly drive the table (3) to achieve three-degrees of freedom in the 0x, 0y and Z axis directions with high precision adjustment positioning In the following, the operation methods in the 0 x, 0 y, and Z axis directions are explained in order: κ is rotated and positioned in the direction, and three piezoelectric ceramic actuators (5a ~ c) are used to deform and displace in different proportions to drive the connection. The upper fixing grooves (16a ~ c) of the piezoelectric ceramic actuator of the platform base body (11a), the upper platform base body (lla) will be supported by the upper hinge (, 13a) and the upper hinge (13b), and a disc plate The spring (12) serves as a guide spring for the platform base (lla) and the lower platform base (llb), so that the upper: red, body (iia) is relative to the lower platform base ία) Rotation of the 0 × axis, and the setting of the driving displacement of the other two piezoelectric ceramic actuators (5a ~ c): If you want to perform rotation positioning of the θχ axis, as shown in the sixth figure The relative positions of the input terminals of the three piezoelectric ceramic actuators (5a ~ c) of the two-two mechanism (η) are shown on the YZ plane as shown in the seventh figure, and the point 0 in the seventh figure represents

M282770 Creation instructions (8) Plane d, (1) The projection of the main center 'point on the γζ plane, the points, ~, v in the 戥 戥 knife. Do not input for the piezoelectric ceramic actuator (5a ~ c) The = and V points on the γζ plane are the piezoelectric ceramic actuators (5a ~ c), respectively, and χ = ten, and the displacement projection point on the γζ plane. The workbench ⑴ uses: the axis as the rotation center. The χ axis is rotated clockwise, and its platform is driven more than the #ceramic piezoelectric actuator (5a ~ c) that rotates clockwise. You can refer to the projection diagram shown in Figure 7 and use the triangle-ceramic The input displacement ratio of the actuator (5a ~ c) is' 1, π " · Wi. -BCM, and the operation simulation diagram is as shown in the ninth diagram. Similarly, when the X-axis is rotated counterclockwise, the platform mechanism (1) uses a reversed piezoelectric ceramic actuator (5a ~ c) to drive the displacement ratio OQ. One L ~ * --- 2 · rotates in the 0y direction Positioning, using three piezoelectric ceramic actuators (5 & ~ deformation and displacement in different proportions) to drive the upper fixed grooves (16a ~ c) of the piezoelectric ceramic actuator connected to the upper platform base (Ua), and the upper platform base ( lla) will use the lower hinge (14a) and the lower hinge (14b) as the fulcrum, and the disc-type flat spring (12) as the guide bow of the upper platform base (lla) and the lower platform base (nb) | spring, so that the upper platform The base body (lla) performs an axis / direction rotational movement relative to the lower platform base body (llb); the driving displacement of the other three piezoelectric ceramic actuators (5 a ~ c) is set as follows: If 0 y The axial rotation positioning projects the three piezoelectric ceramic actuators (5a ~ c) of the platform mechanism (1) into the XZ plane as shown in the sixth figure, as shown in the sixth figure. In the eighth figure, point 0 represents the projection point of the cylindrical center point of the platform mechanism (1) on the χZ plane, and points L and L are the piezoelectric ceramic actuations, respectively. (5 a~c) X z in the input plane

Page 12 M282770 IV. Creation instructions (9) Projection point, ~ |, 11, c * 1 ke… please rotate the needle; at; =; study the actuation of a standard axis as the center of rotation, for the γ axis When the position is shifted = point 'work =) With the displacement value, the piezoelectric ceramic actuator can be obtained by referring to the driving angle theorem (5a ~ c) shown in the figure below (Puhe uses a polygon, etc. — —-—_ _ _ $ 〖bac) The input displacement ratio is:. Similarly, the counterclockwise rotation is performed on the Y axis, and the center of the axis is actuated ~) The driving displacement ratio is 3. Z axis direction displacement positioning, using three pressures

The same deformation displacement uses the upper hinge 〇3a ~ b) to connect the two-body phase and the disc plate spring (12), and the lower hinge ("a thousand;) J =) the table base (lib) and the disc plate Spring (12), I fixed groove (16 "), = two to

Spring () as flat. The displacement guide spring of the mechanism (1) causes the upper half of the A body (1U) to move in the z-axis direction relative to the lower platform base (llb): one piece: the driving displacement of the ceramic actuator (5a ~ c) Figure 11 shows. 4 X Teeth

mm iH Page 13 M282770 Schematic description [Schematic description] The first picture is a schematic diagram of the cylinder three-degree-of-freedom micro / nano positioning platform platform mechanism. The second picture is the cylinder three-freedom of the creation. Schematic diagram of the combination of the micro / nano positioning platform. The third picture is the overall exploded view of the cylindrical three-degree-of-freedom micro / nano positioning platform. The fourth picture is the cylindrical three-degree-of-freedom micro / nano positioning platform for this creation. Schematic diagram of the pp section of the platform mechanism • The fifth diagram is a schematic diagram of the outer ring sleeve of a cylindrical three-degree-of-freedom micro / nano positioning platform for this creation Schematic diagram of the projection direction. The seventh diagram is the three-degree-of-freedom cylinder of the creation. The displacement of the input end of the piezoelectric ceramic actuator to the YZ plane is the eighth diagram. / Nano positioning platform Piezoelectric ceramic actuator input terminal displacement to the XZ plane projection diagram The ninth picture is a cylinder three-degree-of-freedom micro / nano positioning platform for the creation of the X-direction rotating operating mode Figure • The tenth picture is the Z-direction of the three-degree-of-freedom micro / nano positioning platform of the cylinder for this creation. The eleventh picture is the Z-direction of the three-degree-of-freedom micro / nano positioning platform for the cylinder of this creation. Displacement operation simulation diagram The twelfth diagram is a three-degree-of-freedom ultra-precision positioning platform of the known technology

Page 14 M282770

Brief Description of the Drawings The thirteenth diagram is a schematic diagram of a three-degree-of-freedom ultra-precision automatic positioning platform of the known technology. [Description of main component symbols] (1) Platform mechanism (11 a) Upper platform base (11 b) Lower platform base (12 ) Disc-type flat spring (13 a ~ b) Upper hinge (14 a ~ b) Lower hinge (15 a ~ d) Hinge penetrating slot (16 a ~ c) Upper fixing groove of piezoelectric ceramic actuator (16 d ~ f) Lower fixing groove (161a ~ c) of piezoelectric ceramic actuator Upper compound screw hole (161d ~ f) Lower compound screw hole (2) Outer ring sleeve (21a ~ d) Outer ring sleeve Fixing screw holes (3) Workbench (31 a ~ c) Countersunk head fixing holes (4) Fixing base (41 a ~ d) Platform combination fixing holes (4 2 a ~ d) Outer ring sleeve fixing holes (43 a ~ c) Platform mechanism positioning hole (44) Power socket fixing slot (5a ~ c) Piezoelectric ceramic actuator

Page 15

Claims (1)

M282770 Λ 5. Scope of patent application The shape of the platform mechanism can be triangular, polygonal, or cylindrical. 4. For example, the cylindrical three-degree-of-freedom micro / nano positioning platform of the scope of patent application, in which the outer ring sleeve is used to protect the platform mechanism, and its shape can be triangular, polygonal, cylindrical, etc. 5. For example, the cylindrical three-degree-of-freedom micro / nano positioning platform of the scope of patent application, wherein the fixing base is provided with a power socket fixing groove, and the electric wires of the piezoelectric ceramic actuator can be concentrated in this groove. The fixed base of the cylindrical three-degree-of-freedom micro / nano positioning and positioning platform is also attached with a platform combination fixing hole, which can be combined with other positioning platforms into a multi-degree-of-freedom platform.隹 · For example, the cylindrical three-degree-of-freedom micro / nano positioning platform of the scope of patent application, in which the actuator can be a piezoelectric ceramic actuator, a magnetostrictive material, and it can provide light at hundreds of microns. , Magnetic, electric, thermal drive. 7. For example, the cylindrical three-degree-of-freedom micro / nano positioning platform of the scope of patent application, wherein the composition of the table, the platform mechanism, and the fixed base includes integral molding, locking, welding, and gluing.