M3 03484 八、新型說明： 【新型所屬之技術領域】 本創作係有關於-種串聯式三自由度微/秦来宏相亚M3 03484 VIII. New description: [New technical field] The creation department has a series of three-degree-of-freedom micro/Qin Lai Hong Xiangya
判研笟疋彳立的效果。 【先前技術】 乃是利用如⑮服馬達與滾珠螺桿所 定位工具，將物體或零件正確的放 所謂的定位技術，乃是利用女 構成的定位機構或其它定位工具， 置在預定的位置上。為了應映精密零件的’崎、半導㉙制 程、微機電系統_s).·.等領域中所需要的精密定位: 求，使得定位技術從微米級逐步發朗微奈米級的精^ 位。壓電致魅具有生熱少、機f轉換效率高、體積小、 理論上無限解析度、反應快·.·等優點，且其無摩擦、貝間隙 問題，因此廣泛的被應用到精密定位上。 、 以壓電致動☆、為驅動源而達到定位的效果可分為： 種形式:雜騎式、尺€射彡如及形變式。在ϋ 滑式中’此方式對於摩擦力還沒有完整的模型可以使I 因此在操控上錄會造成域性不佳的情形。尺礎蟲形式 的疋位方式，在單軸方向的移動需要較多的致動器才能達 成。形變式的定位平台，則利用材料的彈性變形達到定位 的效果。職上述’雜騎式與尺姑形式的定位方 式’可以達到長行㈣效果，而形變式定位平台則需借用 M303484 放大機構的設計才能夠具有較大的行程。 、，在形义式以壓電陶究致動&為驅動之單體三自由度微 奈米定位平台中，有一種如中華民國專利公告號_· 披露之單層三自由度微定位平台，如第七圖所示，及如中 華民國專彳_jA。觀252495披露之平面式三自纟度微奈米 疋位’如第八圖所示，單層三自由度微定位平台盘平 面式，自由度微奈米定位平台均是彻不_入組錢Judging the effect of independence. [Prior Art] The so-called positioning technique of correctly positioning an object or a part by using a tool such as a 15-machine motor and a ball screw is placed at a predetermined position by using a female positioning mechanism or other positioning tool. In order to reflect the precise positioning of precision parts in the 'saki, semi-guided 29 process, MEMS _s).., etc., the positioning technology is gradually refined from the micron level. Bit. Piezoelectric enchantment has the advantages of less heat generation, high machine f conversion efficiency, small volume, theoretically infinite resolution, fast response, etc., and its frictionless and shell gap problems are widely applied to precision positioning. . Actuated by piezoelectric ☆, the effect of positioning for the drive source can be divided into: various forms: mixed riding, sturdy and deformed. In the slewing type, this method does not have a complete model for the frictional force, so that I can cause a poor domain in the manipulation. In the form of a worm in the form of a worm, the movement in the uniaxial direction requires more actuators to be achieved. The deformation type positioning platform uses the elastic deformation of the material to achieve the positioning effect. The above-mentioned 'positioning mode of the type of hybrid riding and acupressure' can achieve long-term (four) effects, while the deformation positioning platform needs to borrow the design of the M303484 amplifying mechanism to have a larger stroke. In the single-degree three-degree-of-freedom micro-nano positioning platform driven by the piezoelectric ceramics actuating & driving, there is a single-layer three-degree-of-freedom micro-positioning platform disclosed in the Republic of China Patent Announcement No. _· As shown in the seventh picture, and as the Republic of China specializes in _jA. View 252495 disclosed the flat three-self-twisting micro-nano 疋 position as shown in the eighth figure, the single-layer three-degree-of-freedom micro-positioning platform flat-panel, the degree of freedom micro-nano positioning platform is not _ into the group
二支壓電_H分職生輸人⑽，#由平娜簧及挽性 鉸鍊的設計’達成χ、ΥΑΘΖ轴定位的動作，但是，其中單 層三自由度蚊位平台的撓性鉸鍊及彈簧導引組等相關 機構’僅能帶動工作台進行相同於壓電致動器之長度變化 驗移量’為了擴大定位平台的行程，因此平面式三自由 U示米疋位平台在機構的設計上利用線性放大件來放 大工作平台之位移量。 【新型内容】 省知形變式微奈米定位平台，其係利用材料彈性變形 原理，配合壓電致絲的鶴，透過機構的料達到精密 L在先前技術中，如中華民國專利公告號_1249 路之早層二自由度微定位平台與中 ，披露之平面式三自由度微奈米定位二： =由紐電致動器同時驅動，依不同的作用力達到X、γ f轴三自由度的定位，而這樣的方式在控制上會造成複 =】不易，並且也恤轴間干涉，為了使二 易及減灌〗干涉，因此本_提供—種串赋三自由度 6 M3 03484 微/奈米定位平台來改善上述。 本創作提供-㈣聯_由度微/奈米定 f 一體成型的定位平线構上，包括有-_桿式機構、 說性叙鍊、波浪形撓性平板彈菁 哭㈤〜姑门一 &电致動為、塵電致動The two-component piezoelectric _H is divided into two generations (10), #Design by Pinna and the hinged hinges to achieve the action of χ and ΥΑΘΖ axis positioning, but the flexible hinge of the single-layer three-degree-of-freedom mosquito platform and The related mechanism of the spring guiding group and the like can only drive the table to perform the same amount of change as the piezoelectric actuator. In order to expand the stroke of the positioning platform, the design of the planar three-free U-meter platform is in the design of the mechanism. The linear amplification is used to amplify the displacement of the working platform. [New content] The provincial-made deformation micro-nano positioning platform uses the principle of elastic deformation of materials, and the crane with piezoelectric wire, through the material of the mechanism to achieve precision L in the prior art, such as the Republic of China Patent Bulletin No. _1249 Road The early two-degree-of-freedom micro-positioning platform and the disclosed flat three-degree-of-freedom micro-nano positioning two: = driven by the neo-electric actuator simultaneously, according to different forces to reach the X, γ f-axis three degrees of freedom Positioning, and such a way will cause complex =] in the control, and also interfere with the inter-axis, in order to make the two easy and reduce irrigation interference, so this _ provide - type of string three degrees of freedom 6 M3 03484 micro / Nai The meter positioning platform to improve the above. This creation provides - (four) joint _ by degree micro / nano set f one-piece positioning flat line structure, including - _ rod mechanism, speaking sex chain, wavy flexible flat elastic cries (five) ~ Gu Men &Electrical actuation, dust electric actuation
底座、固定孔、内層移動台、帽移動台 =’本_之主要特色為單體三自由度的平 二不同自由度的連接是採科聯式連接，粒平台結構 中有一槓桿式機構，此槓桿式機構的設計能使定位平台產 果’並且㈣使旋射心精確在整個定 ϋΓ 層移動台、中層移動台以及外層移動 :木=波_撓性平板彈簣作树接，波浪職性平板彈 二因“可撓性大，所以能夠擴大定位平台的位移行程，·另 :’由串聯式三自由度微/奈錢位平台的平台機構設 =可使二自由度的定位分別由三根壓電致動器個別施加 “ ίΐ到定位的動#，減低先前技術中的控致問題，使控 ，間早容易’並且採用串聯的方式能夠減少軸間干涉的問 題0 【實施方式】 本創作-種串聯式三自由度微/奈米定位平台組合示 思圖明參㈣二圖’―種串聯式三自由度微/奈米定位平 台係由平台機構⑴、卫作台⑵、狀基座⑶、塾片⑷ 所組成’如第三圖所示，以下則分別逐步介紹一種串聯式 二自由度微/奈米定位平台的元件。 請參閱第一圖，本創作係提供一種串聯式三自由度微 7 M303484 /奈米定位平台，該平台内層移動台⑴Base, fixed hole, inner layer mobile station, cap mobile station='This main feature is the single three-degree-of-freedom flat two different degrees of freedom connection is a joint connection, the granular platform structure has a lever mechanism, this The design of the lever mechanism enables the positioning platform to produce fruit' and (4) to make the spinning center accurately move through the entire fixed layer mobile station, the middle mobile station and the outer layer: wood=wave_flexible flat magazine for tree connection, wave position Because of the large flexibility, the flat-panel can expand the displacement stroke of the positioning platform. · Another: 'The platform mechanism of the three-degree-of-freedom micro/neutral platform can be set to two positions of two degrees of freedom. Piezoelectric actuators individually apply "moving to positioning motion #, reducing the problem of control in prior art, making control easier, and making it easy to use" and using series connection to reduce the problem of inter-axis interference. [Embodiment] This creation - A series of three-degree-of-freedom micro/nano positioning platform combined with a demonstration of the Ming ginseng (four) two maps - a series of three-degree-of-freedom micro/nano positioning platform by the platform mechanism (1), the guard station (2), the pedestal (3), cymbals (4) Composition 'as shown in FIG. Third, the following elements are respectively gradually introduced a tandem-type two-degree of freedom in the micro / nano positioning platform. Please refer to the first figure. This creation provides a series three-degree-of-freedom micro 7 M303484 / nano positioning platform, the platform internal mobile station (1)
0^藉由波浪形撓性平板彈簧⑽a〜d)做為賴移S :二:^與外層移動台⑴⑽由波浪形撓性平板彈 育（132a〜d)做為連結。0^ is made by undulating flexible flat springs (10)a to d) as the transition S: two: and the outer moving platform (1) (10) is connected by wavy flexible flattening (132a~d).
種串聯式二自由度微/奈米定位平台在ΘΖ軸的作 動原理就如她板的方式，在距離她板支點若干處施加 -負載’則她板就會以支點為圓心作旋轉的運動，而一 =聯式三自由度微/奈米定位平台有—組槓桿式機構 (111)，該槓桿式機構(111)支點處的撓性鼓鍊⑴2)與固 定底座（113)連結成為槓桿式機構⑴υ的支點，在固定底 座αΐ3)内有固定孔（114a〜b)，固定孔〇i4a~b)用來將平 台固定住；槓桿式機構(111)施力點處的撓性鉸鍊(115)斑 θζ軸壓電致動器固定槽（116)連結成為横桿式機構(即 的施力點；在ΘΖ軸壓電致動器固定槽⑴6)内有肐轴壓 電致動器（11) ’當ΘΖ軸麼電致動器⑼施以電壓時，合 產生伸縮的現象’因此_此特性來當作槓桿式機構⑴曰〇 施力點處的作用力，並以支點處的撓性鉸鍊⑴2)中心處 為旋轉中心4動内層移動台〇17)、中層移動台（ι⑴與 外層移動台（131)作旋轉的動作，請參閱第四圖，當施以肊 軸壓電致動H(ll)的電壓停止時，⑽軸台⑴7)、中 層移動台（121)與外層移動台⑽）會經由支點處的撓性 鉸鍊（112)的彈性回復而回復到原來的位置。 内層移動台（117)與中層移動台（121)之間有一 γ軸壓 電致動固定槽（123)，在Y軸墨電致動器固定槽（i 23)内 8 M303484 放置γ軸壓電致動器⑽，當γ轴壓電致動器⑽施以電 壓時，由於此時内層移動台（117)剛性較中層移動台（121) 大，使的内層移動台⑴7)不動，而中層移動台（⑻朝γ 軸向作動巾層移動台（⑵）的作動同時也帶動外層移動 台031)，使外層移動台⑽）也跟著朝γ軸向作動，請參 閱第五圖，當施以γ軸壓電致動器（12)的電壓停止時，中 層移動台（121)與外層移動台（131)會經由波浪形撓性平 春 板彈黃〇 22a〜d)的彈性回復而回復到原來的位置。 中層移動台（121)與外層移動台（131)之間有一 X軸壓 屯致動裔固定槽（133)，在X軸壓電致動器固定槽（133)内 =置X軸壓電致動器（13)，軸壓電致動器⑽施以電壓 時，由於此時中層移動台（121)剛性較外層移動台（131) 大，使的中層移動台（121)不動，而外層移動台（131)朝X 軸向作動，請參閱第六圖，當施以X軸壓電致動器⑽的 賴停止時，外層機台〇31)會經由驗形撓性平板彈 * *(132a〜d)的彈性回復而回復到原來的位置。 請參閱第-、三圖，外層移動台〇31)附有工作台銜 接螺絲孔（134a〜d)，ji作雜接_孔（134a〜d)與工作台 ⑵附有玉作台沉頭_孔⑵㈣連接，並且在工作台^ 妾累、、、糸孔（134a〜d)與工作台沉頭固定孔(2! a〜d)之間放置 塾片（4a d) ’使工作台⑵能夠懸浮移動，而待加工或量 測的物件放置於工作台⑵上，則可達到三自由度的定 位，固定基座⑶附有基座沉頭固定孔(32a〜b)，基座沉頭 固定孔(32a〜b)可时連接防震桌或其他裝置；固定基座 M303484 (3)上另附有基座螺絲孔（31a〜b)，基座螺絲孔（幻心^用 來與固定孔（114a〜b)連結，並於基座螺絲孔（3ia〜b)與固 疋孔（114a〜b)之間放置墊片（4e〜f)，使平台機構（1)能夠 懸浮移動。 【圖式簡單說明】 第一圖係為本創作之平台機構示意圖 第一圖係為本創作之組合示意圖 第二圖係為本創作之立體分解圖 第四圖係為本創作之0Z軸作動模擬圖 第五圖係為本創作之γ軸作動模擬圖 第六圖係為本創作之X軸作動模擬圖 =七圖係為已知技術之單層三自由度微定位平台示音圖 第八圖係為已知技術之平面式三自由度微 : 示意圖 心丨儿卞口 【主要元件符號說明】 (1) 平台機構 (11) ΘΖ軸壓電致動器 (111) 槓桿式機構 (112) 支點處的挽性绞鍊 (113) 固定底座 (114a〜b) 固定孔 (115) 施力點處的撓性鉸鍊 (116) ΘΖ軸壓電致動器固定槽 (117) 内層移動台 M303484 (12) Y軸壓電致動器 (121) 中層移動台 (122a〜d) 波浪形撓性平板彈簧 (123) Y軸壓電致動器固定槽 (13) X軸壓電致動器 (131) 外層移動台 (132a〜d) 波浪形撓性平板彈簧 (133) X軸壓電致動器固定槽 * (134a〜d) 工作台銜接螺絲孔 (2) 工作台 (21a〜d) 工作台沉頭固定孔 (3) 固定基座 (31a〜b) 基座螺絲孔 (32a〜b) 基座沉頭固定孔 (4a〜f) • 墊片 11The tandem two-degree-of-freedom micro/nano positioning platform operates on the boring axis in the same way as her plate. When the load is applied to the fulcrum from her plate, the plate will rotate with the fulcrum as the center. And a = three-degree-of-freedom micro/nano positioning platform has a set of lever type mechanism (111), and the flexible drum chain (1) 2) at the fulcrum of the lever mechanism (111) is coupled with the fixed base (113) to be a lever type The fulcrum of the mechanism (1) has a fixing hole (114a~b) in the fixed base αΐ3), and the fixing hole 〇i4a~b) is used to fix the platform; the flexible hinge at the point of application of the lever mechanism (111) (115) The θθ axis piezoelectric actuator fixing groove (116) is coupled to form a crossbar mechanism (ie, a point of application; in the 压电-axis piezoelectric actuator fixing groove (1) 6), a piezoelectric actuator (11) ) 'When the voltage is applied to the electric actuator (9), the telescopic phenomenon occurs. Therefore, this characteristic is used as the force at the point of application of the lever mechanism (1) and the flexibility at the fulcrum. The center of the hinge (1) 2) is the center of rotation 4 moving the inner moving stage 〇 17), the middle moving stage (1 (1) and the outer moving stage (131 For the rotation operation, please refer to the fourth figure. When the voltage applied to the piezoelectric actuator H(ll) of the crucible is stopped, (10) the pillow stage (1) 7), the middle stage mobile station (121) and the outer layer moving stage (10) will pass. The flexible hinge (112) at the fulcrum is resiliently restored to return to its original position. A γ-axis piezoelectric actuator fixing groove (123) is disposed between the inner layer moving stage (117) and the middle layer moving stage (121), and the γ-axis piezoelectric element is placed in the Y-axis ink actuator fixing groove (i 23) 8 M303484 The actuator (10), when the γ-axis piezoelectric actuator (10) is applied with a voltage, since the inner layer moving table (117) is rigider than the middle layer moving table (121) at this time, the inner layer moving table (1) 7) is moved, and the middle layer is moved. The table ((8) acts on the γ-axis moving the moving layer ((2)) and also drives the outer moving table 031), so that the outer moving table (10) also moves toward the γ axis. Please refer to the fifth figure, when applying γ When the voltage of the axial piezoelectric actuator (12) is stopped, the middle layer moving table (121) and the outer layer moving table (131) are restored to the original state by the elastic recovery of the wavy flexible flat spring plate blush 22a~d). s position. There is an X-axis compression actuating fixed groove (133) between the middle mobile station (121) and the outer mobile station (131), and the X-axis piezoelectric actuator is fixed in the X-axis piezoelectric actuator fixing groove (133). When the voltage is applied to the actuator (13) and the piezoelectric actuator (10), since the intermediate moving stage (121) is larger in rigidity than the outer moving stage (131), the middle moving stage (121) is not moved, and the outer layer is moved. The table (131) is actuated toward the X-axis. Referring to the sixth figure, when the X-axis piezoelectric actuator (10) is applied to stop, the outer machine 〇 31) will pass the conformal flexible plate bomb * * (132a ~d) The elastic response returns to its original position. Please refer to the first and third figures, the outer mobile station 〇 31) is attached with the workbench connection screw holes (134a~d), the ji for the _ hole (134a~d) and the workbench (2) with the jade table countersunk head _ Holes (2) and (4) are connected, and a cymbal piece (4a d) is placed between the table ^ 妾 , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , , The suspension moves, and the object to be processed or measured is placed on the worktable (2), and the three-degree-of-freedom positioning can be achieved. The fixed base (3) is attached with the base countersunk fixing hole (32a~b), and the base is fixed by the countersunk head. The holes (32a~b) can be connected to the shockproof table or other devices; the fixed base M303484 (3) is additionally provided with a base screw hole (31a~b), and the base screw hole (the magic hole ^ is used for the fixed hole ( 114a~b) are connected, and a spacer (4e~f) is placed between the base screw hole (3ia~b) and the fixing hole (114a~b) to enable the platform mechanism (1) to float and move. The first picture is the schematic diagram of the platform mechanism of the creation. The first picture is the combination diagram of the creation. The second picture is the three-dimensional exploded view of the creation. The fourth picture is the creation of the original. The fifth picture of the Z-axis simulation is the γ-axis simulation of the creation. The sixth picture is the X-axis simulation of the creation. The seven-picture is a single-layer three-degree-of-freedom micro-positioning platform with known techniques. Figure 8 is a planar three-degree-of-freedom micro of the known technique: Schematic 丨 丨 【 [Main component symbol description] (1) Platform mechanism (11) ΘΖ-axis piezoelectric actuator (111) Lever mechanism (112) Pulling hinge at the fulcrum (113) Fixing base (114a~b) Fixing hole (115) Flexible hinge at the point of application (116) Shaft piezoelectric actuator fixing groove (117) Inner layer movement Table M303484 (12) Y-axis piezoelectric actuator (121) Middle-level moving table (122a~d) Wave-shaped flexible flat spring (123) Y-axis piezoelectric actuator fixing groove (13) X-axis piezoelectric actuation (131) Outer moving table (132a~d) Wave-shaped flexible flat spring (133) X-axis piezoelectric actuator fixing groove* (134a~d) Workbench connecting screw hole (2) Table (21a~d ) Table countersunk head fixing hole (3) Fixing base (31a~b) Base screw hole (32a~b) Base countersunk head fixing hole (4a~f) • Shim 11