TWM279718U - Air-isolator fume hood - Google Patents

Air-isolator fume hood Download PDF

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Publication number
TWM279718U
TWM279718U TW094211660U TW94211660U TWM279718U TW M279718 U TWM279718 U TW M279718U TW 094211660 U TW094211660 U TW 094211660U TW 94211660 U TW94211660 U TW 94211660U TW M279718 U TWM279718 U TW M279718U
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TW
Taiwan
Prior art keywords
air
cabinet
valve
suction
gas
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TW094211660U
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Chinese (zh)
Inventor
Rong-Fung Huang
Yu-Kang Chen
Tung-Sheng Shih
Cheng-Ping Chang
Chun-Wan Chen
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Inst Of Occupational Safety & Health Council Of Labor Affairs
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Priority to TW094211660U priority Critical patent/TWM279718U/en
Publication of TWM279718U publication Critical patent/TWM279718U/en
Priority to JP2006186305A priority patent/JP4704284B2/en

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  • Devices For Use In Laboratory Experiments (AREA)

Description

、M279,71S 八、新型說明: 【新型所屬之技術領域】 本創作係有關於一種氣簾式氣櫃,尤指—種可 藉由該氣門活動結合於該櫃體一側,且該氣門上係 =又有一吹氣罩,亚同時藉由該吸氣槽設於該植體前 端下緣處,且設有-吸人口,而該吸人口係對應^ 氣門之吹氣罩設置’進而形成氣簾有效阻隔污= 的外茂’並於該櫃體上方設置整流網,使兼具抽氣 及補氣機制’而就污染源附近做及時有效的局部抽 氣動作,達到節省能源、t H , n有效排除及阻隔有害氣轉 度等效果,而適用於半導# 肢 、千導體業中之多種製程(如 阻蝕刻,石英爐清洗等)、各類實驗室 品之結構者。 員貫給至…專或類似物 【先前技術】 氣罩是局部排氣的主要# 胥放置,主要運作方 將含有有害物的空氣以 式疋 一 仰虱方式吸入局部、 M279,71S VIII. Description of the new type: [Technical field to which the new type belongs] This creation relates to an air curtain type gas cabinet, in particular-a type that can be combined with one side of the cabinet by the valve activity, and the valve system = Another air hood is provided at the same time through the suction groove at the lower edge of the front end of the implant, and-suction population is set, and the suction population corresponds to ^ the air hood setting of the valve is effective to form an air curtain Blocking pollution = Waimao 'and setting up a rectifier network above the cabinet, so as to have both gas extraction and gas supplement mechanism', and perform timely and effective local gas extraction actions near the source of pollution to achieve energy saving, t H, n effectively eliminate And blocking harmful gas rotation and other effects, and is suitable for semiconducting # limbs, a variety of processes in the conductor industry (such as etching resistance, quartz furnace cleaning, etc.), various types of laboratory products structure. [Proprietary technology] The air hood is the main place for local exhaustion. The main operator is to inhale the air containing harmful substances in the form of 疋

官。為配合現場作業環境, ;;V 兄虱罩有多種不同φ + 匕括岔閉式、崗亭式、夕卜努 ^ . ^ ^ 我式、吹吸式與接收式。 其中被閉式氣·罩的捕集效果 飞 界環境的影響。以外 M279718. 構’對於大部 礙。因士 Θ現場作業工作常常造成影響或阻 礙因此,此類名S枚& 的作業場合。二 用於危害性或危險性極高 般防護要求較高的作業常常採用崗 丁^^氣罩,士卜来g々 ^ 、軋罩除一面對外開放或具對外開放 隹:口 lb其餘表面均對外封閉,因此其防護與捕official. In order to match the field operating environment, there are many different types of V brother lice cover φ + dagger closed type, sentry box type, Xibnu ^. ^ ^ Self type, blow suction type and receiving type. Among them, the trapping effect of the closed air hood is influenced by the flying environment. Other than M279718. Structure ’is a major obstacle. Because Θ field work often affects or hinders. Therefore, this type of work place is called & Second, it is used for hazardous or extremely high-protection operations, and often requires a high-end guard ^ ^ air hood, Shi Bulai g々 ^, rolling hood is open except one face or open to the outside 隹: the remaining surface of the mouth lb are all Closed to the outside, so its protection and capture

t 1較其他非密閉式氣罩為佳,性能 也不易受到外界環境的影響。 ^崗T式氣罩目前最常見於學術研究機構實驗 室所使用的化學排氣櫃(ehemieal f_e “Μ)。半導 體業中有夕種製程,如光阻㈣,石英爐清洗等, 也是在化學排氣櫃中進行。近年因生物科技的進 展貫驗至生物危害也逐漸受到重視,微生物實驗 斤使用的生物女全氣櫃(bi〇safe ty cabinet)也是以 崗π式氣罩為基本構型。一般而言,崗亭式氣罩較 常使用於安全防護要求與意識較高的產業t。 與外裝式氣罩比較,一般崗亭式氣罩的構造除 包含四周的氣櫃外,其中尚有抽氣口或抽氣槽縫, 必要時尚須設置使抽氣風量均勻分佈的隔板 (baffle)。防護性能更佳的岡亭式氣罩尚須設置強制 補氣(supply a.ir)裝置。此外,化學排氣櫃與生物安 7 、M279718 全氣櫃都會設置可調整開口面積的垂直或水平拉 岡苧式氣罩設置的最終標的在於避免櫃内的 有害物不致逸散至外界。然而在實際操作下仍不免 有有害物逸散狀況發生。此問題發生原因概略可分 為三類··t 1 is better than other non-closed air hoods, and its performance is not easily affected by the external environment. ^ Gang T-type air hood is currently most commonly used in chemical fume hoods (ehemieal f_e "M) used in the laboratory of academic research institutions. There are many processes in the semiconductor industry, such as photoresistance, quartz furnace cleaning, etc. Exhaust cabinet. In recent years, due to the progress of biotechnology, biological hazards have been gradually paid attention to. The bio-safety cabinet used by microbial experimental caterpillars is also based on the π-type air hood. In general, sentry box air hoods are more commonly used in industries with higher safety protection requirements and awareness. Compared with exterior type air hoods, in general, the structure of sentry box air hoods includes surrounding gas cabinets, of which there are still The suction port or the slot of the suction slot must be provided with a baffle that evenly distributes the amount of the exhaust air. A Gangting-type air hood with better protection performance must also be provided with a supply a.ir device. The chemical fume hood, biosafety 7, and M279718 full gas cabinets will be equipped with vertical or horizontal lagoon-type gas hoods with adjustable opening areas. The ultimate goal is to prevent harmful substances in the cabinet from escaping to the outside world. However, in reality Still can not help but have lower operating hazardous substances escaping condition occurs. This problem occurs outline can be divided into three categories ·

1、 设計未達到最適當狀況:如抽氣量不足, 抽氣槽縫位置不適當,補氣抽氣配置不當,開口表 面風速分佈不均句,開σ邊緣設計不當等。 2、 未在最適當狀況下操作:如有害物釋放量 過大,内部有害物朝開口方向高速釋放,過大的内 部朝外操作動作,拉門開 Π開啟面積過大,抽氣量未隨 操作狀況調整等。 3、不當的維護:岗亭壁面或導管破 裝置性能降低等。 乳 除了防止其中有宝物挽屮 頁。物逸出5染%境空氣造成 人貝暴路外,在某些產業, 踅、菩不 7干令収與生物科技 ,九 要考慮防止外部空氣對氣罩内樣品的污 木,使,軍的設計與性能評估更形困難。 而乳櫃的類別,由古代文藝復興時代的的箱型 'M279718 氣櫃來看,主要是藉由煙自的自然熱對流效應來使 不良氣體排出室内。在當時,煙囪的建造技術並不 完善,直到後來流體力學的發展,才漸漸發展出利 用N空側向風氣流的技術,來建造煙自,讓煙囪内 部形成局部低壓,使煙囱内部的氣流比較容易被帶 出至外。後來的廂型氣櫃的建構理念也是沿襲古代 廂型氣櫃,並在氣櫃上端加上抽風裝置,以強制對 流的方式將腔内的氣體帶出。 傳統氣櫃的抽氣方式是在氣櫃上端使用抽氣 裝置使櫃内的不良氣體被排出,而類似於這一類型 的氣櫃在現今的文獻中及商品使用上,卻無系統化 的分類與特性發展過程,經過多方面的參考及整理 後’傳統化學氣櫃主要分為CAV(constant volume air volume)及 VAV(variable volume air volume)兩大類 別。 按’習式化學氣櫃主要係於氣櫃1内部裝設有 一的擋板2 (baffle),樓板2在接近抽氣口有一 35 度的轉折角,在y二57, z = 50的座標位置上開有3 個槽3,來輔助抽氣;在檔板2最下端y二57, z = 8 的面上’棺板2與氣櫃1壁面上有一 3cm的狹縫來 9 ,M2797181. The design did not reach the most appropriate situation: such as insufficient air extraction volume, improper position of air extraction slots, improper configuration of supplemental air extraction, uneven distribution of wind speed on the opening surface, improper design of opening σ edges, etc. 2. Failure to operate under the most appropriate conditions: if the amount of harmful substances released is too high, the internal harmful substances are released at high speed toward the opening, the excessively large internal operation moves outwards, the sliding door opens and the opening area is too large, and the air extraction volume is not adjusted according to the operating conditions, etc. . 3. Improper maintenance: the wall of the sentry box or the broken pipe has reduced performance. In addition to milk, there are treasures in it. 5% of the material escapes from the air, causing human shells to go out of the road. In some industries, crickets and pubu 7 are collected and biotechnology. Nine considerations must be taken to prevent external air from contaminating the samples in the air hood. Design and performance evaluation are more difficult. The type of the milk cabinet, viewed from the box type 'M279718' in the ancient Renaissance, is mainly due to the natural heat convection effect of the smoke to discharge the bad gas out of the room. At that time, the construction technology of the chimney was not perfect. It was not until the development of fluid mechanics that the technology of using N-air lateral wind air flow was gradually developed to build the smoke self, so that the interior of the chimney formed a local low pressure and the airflow inside the chimney. It is easier to be taken out. The subsequent construction concept of the box-type gas cabinet also followed the ancient box-type gas cabinet, and a ventilation device was added to the upper end of the gas cabinet to force out the gas in the cavity by means of forced convection. The traditional way of gas extraction is to use an exhaust device on the upper end of the gas cabinet to discharge the bad gas in the cabinet. However, similar types of gas cabinets have no systematic classification in the current literature and the use of goods. And the development process of characteristics, after various references and collation, the traditional chemical gas cabinet is mainly divided into two categories: CAV (constant volume air volume) and VAV (variable volume air volume). According to the 'Xi' style chemical gas cabinet, a baffle 2 is installed inside the gas cabinet 1. The floor 2 has a turning angle of 35 degrees near the suction port, at the coordinate position of y 57 and z = 50. There are 3 slots 3 to assist the suction; on the face of the bottom of the baffle 2 y2 57, z = 8 there is a 3cm slit 9 on the wall surface of the coffin plate 2 and the gas cabinet 1, M279718

輔助抽氣。在氣櫃丄上端的抽氣口連接至文氏管再 經由p"才質的通風管連接到戶外,並藉由5Hp的 抽氣機4 (blower)來進行抽氣動作,抽氣平均流量 約固定在G.5 m3/s。氣櫃1的使用目的主要是用來 ⑽=學反應時所產生的有害物質,在進行化學反 應之前,減機4必須先運轉,進行抽氣動作,此 時氣櫃H5*可完全關閉,因為氣#門5完全_ 且沒有任何補氣機制存在時,會導致抽氣機4的馬 達空轉甚至燒毀。當操作人員需要伸手人櫃内操作 時’氣櫃門5必須打開至當時需求之高度,來進行 化學實驗操作。在此定義氣櫃門5開最大開度為 Hmax = 85cm,任意的氣櫃門5開口高度為η:基 於氣櫃門5在已打開的狀態下,櫃内的有害物質有 洩漏的疑慮,所以對此氣櫃!使用在門已打開的狀 態下進行雷射煙霧流場可視化診斷。然而該氣櫃雖 具有抽除化學反應時所產生的有害氣體之功效,但 因遠傳統型氣櫃並未以流體力學的觀點做為設計 的出發點來改善氣櫃結構及抽氣型態,故該傳統型 氣櫃的流場形態,在櫃内有明顯的大迴流結構,不 論在櫃門開度·為何,這些大迴流結構皆會形成,並 ,M279718 且隨著櫃門開度的減小,迴流結構的範圍增大。因 7流區緊貼櫃門内側,櫃門開口附近紊亂的氣流會 造成櫃門内側流體洩漏至櫃外。所以當櫃内的污染 物未被抽離櫃内而混在迴流區内時,污染物就會藉 由櫃門附近的紊流擾動而擴散至櫃外。氣櫃上層水 平戴面煙霧_漫的的流場狀態顯示除了櫃内迴流 ]題之外,還存在著抽氣效果不彰的現象。在櫃 :’開口附近的流場中’除了櫃門内側迴流茂漏的問 題’門檀上緣及邊壁附近也有明顯的滲漏及迴流形 成。在氣櫃與假人之間的空間流場中,假人胸前也 有迴流形成,由流體力學的觀點來看,假人胸前的 迴流如同流體流經鈍體後方的迴流,這些迴流會導 喿作人員胸刖的氣流與櫃内污染物進行混合交 換’同時讓操作人員身前的污染物濃度增高。 乂上乂些不良的流場型態導致污染物茂漏至 櫃外的問題,都是㈣於傳統氣櫃設計結構是非常 見尘的抽轧結構’亚未考慮動態流體力學的流場 結構。所以一般而言’對傳統型氣櫃就現有結構做 修改’對氣櫃整體流場的改善或是污麵漏的降 低⑼並不㈣現’例如時下的較高播傳統氣櫃在 M279718 擋板、抽氣端、門檻、邊壁等等部分做很大的修改, 這些修改在實際的工程上需要花費許多人力物 資,但是卻不一定得到相對應的效果不—定能 做到一個符合嚴苛標準的程度,故於實際使用上仍 不符合使用者之所需。 【新型内容】 本創作之主要目的係A ^ 旳係在提供一種氣簾式氣 櫃,藉由該氣門活動結合於該榧 々、為櫃體一側,且該氣門Auxiliary pumping. The exhaust port at the upper end of the gas tank is connected to the venturi tube, and then connected to the outdoor through a p " talented vent pipe. The 5Hp exhauster 4 (blower) is used to perform the exhaust operation, and the average exhaust flow is approximately fixed at G.5 m3 / s. The purpose of the gas tank 1 is mainly to use the harmful substances generated during the chemical reaction. Before the chemical reaction, the reducer 4 must be operated to perform the air pumping action. At this time, the gas tank H5 * can be completely closed because When the ## 5 valve is complete and there is no supplementary gas mechanism, the motor of the air extractor 4 may idle or even burn. When the operator needs to reach out and operate in the cabinet, the gas cabinet door 5 must be opened to the height required at that time for chemical experiment operation. Here, the maximum opening degree of the gas cabinet door 5 is Hmax = 85cm, and the height of the opening of any gas cabinet door 5 is η: based on the fact that the gas cabinet door 5 is open, there is a concern about the leakage of harmful substances in the cabinet, so To this gas tank! Visualize the laser smoke flow field with the door open. However, although the gas tank has the effect of removing harmful gases generated during the chemical reaction, since the traditional gas tank has not been designed from the point of view of fluid mechanics to improve the structure of the gas tank and the type of pumping, The flow field form of this traditional gas cabinet has obvious large recirculation structure inside the cabinet. Regardless of the opening degree of the cabinet door, these large recirculation structures will form. And, as the opening of the cabinet door decreases, M279718 The range of the reflow structure is increased. Because the 7-flow zone is close to the inside of the cabinet door, the turbulent air flow near the opening of the cabinet door will cause the fluid inside the cabinet door to leak to the outside of the cabinet. Therefore, when the pollutants in the cabinet are mixed in the return area without being evacuated from the cabinet, the pollutants will spread to the outside of the cabinet by the turbulent disturbance near the cabinet door. On the upper level of the gas tank, the level of the smoke on the surface of the _ diffuse diffused flow field shows that in addition to the problem of backflow in the cabinet, there is also a phenomenon that the suction effect is not good. In the flow field near the cabinet: 'In addition to the problem of backflow leakage inside the cabinet door,' there are also obvious leakage and backflow formation near the upper edge of the door and the side wall. In the spatial flow field between the gas tank and the dummy, a return flow is also formed on the dummy's chest. From the perspective of fluid mechanics, the return flow on the dummy's chest is like the flow of fluid flowing behind the blunt body. The airflow of the operator's chest is mixed with the pollutants in the cabinet, and at the same time, the concentration of pollutants in front of the operator is increased. Some of the problems with the poor flow field patterns leading to the leakage of pollutants outside the cabinet are that the traditional gas tank design structure is a very dusty drawn structure. The flow field structure does not consider dynamic fluid dynamics. So in general, 'modification of existing gas tanks to the existing structure' improves the overall flow field of the gas tanks or reduces the leakage of dirty surfaces, which does not happen. The board, the exhaust end, the threshold, the side wall, etc. have been greatly modified. These modifications require a lot of manpower and materials in actual engineering, but they do not necessarily get the corresponding effect. The degree of strict standards, so in actual use still does not meet the needs of users. [New content] The main purpose of this creation is to provide an air curtain type gas box, which is combined with the 榧 々 by the valve activity, is the side of the cabinet, and the valve

上係設有一吹氣罩,# fa] |j}: I M U寻糟由該吸氣槽設於該櫃 體前端下緣處,且設有一吸入 八口,而遠吸入口係對 應該氣門之吹氣罩設置,進 心成軋簾有效阻隔污 染物的外洩,,而就污染源附 产 见做及犄有效的局部 抽氣動作,達到節省能源、有 排除及阻隔有害氣 體度專效果,大幅提昇整體之 只用〖生、便利性及安 全性。 本創作之次一目的係在接 辟一山 知仏一種氣簾式氣 輯體上方所設置之整流網,以符合抽氣 與補氣的物理_,以供氣簾 及iiir她Μ 、礼櫃侍以兼具抽氣 及補虱機制,·使具有快速排除 〇乳肢及節省能源 M279718 等效果,增加其實用性及安全性。 為達上述之目的,本創作係一種氣簾式氣櫃, 包括有-櫃體、一氣門、一吸氣槽、一抽氣機及〆 整μ網。该櫃體内係設有排除有害氣體之容置空 間’而該櫃體之—側及上方係形成開放空間;該氣 門活動結合於該櫃體一側’以供控制氣門開度,該 孔門上係&有-吹氣罩;該吸氣槽係設於該植體前 端下緣處,且設有-吸人口,且該吸人口係對應該 氣門之吹氣罩設置;該抽氣機係配設於該吸氣槽之 出口端,以供排除有宝氣體· σ孔體,δ亥整流網係設於櫃體 上方,以提供補氣;蕻丨士,糾尸& … 札,错此,以供氣簾式氣櫃得以兼 具抽氣及補氣機制,而钟士 :九 而就砑染源附近做及時有效的 局部抽氣動作,且形出€盆士 形成軋簾有效阻隔污染物的外 沒,達到節省能源及有效排 又徘除及阻隔有害氣體者。 本創作之上述及其他目 /、’不難從下述 所選用貫施例之詳έ田% ΗΒ咖代 、、田况明與附圖中,獲得深入了 解。 當然,本創作在某歧 一力1干上或另件之安排上 容許有所不同,但所iS > 心女拼工 中早以心、,、 貫施例,則於本說明書 中,予以砰細說明,廿 亚於附圖中展示其構造。 M279718 【實施方式】 請參閱第3〜β闰 士 ^ ^〆 々^ 6圖,本創作係一種氣簾式氣 櫃,該氣簾式氣櫃包括: 櫃體1 0,该櫃體1 〇内係設有排除有宝氣 體之容置空間,而該櫃體1 Q之-側及上方係:成 開放空間;/ 一氣門1 1,該氣門丄丄活動結合於該櫃體工 〇-側,該氣Η 1丄係設有把手i χ,以供移動 氣門1 1 ,進而控制氣門開度者。而該氣門i丄最 大開度為Hmax = 60 cm,任意的氣門開口高度為 Η,並定義氣櫃的原點座標(x,z)在氣櫃中間對稱面 上,且該氣門1 1上係設有一吹氣罩i i 2。該在 氣門1 1吹出氣體的供應方面,主要係以一變頻器 1 6 (inverter)控制送風機1 7 (blower),並經由繞 性管子接至吹氣罩1 1 2上端,氣流在流經整流段 1 1 3 (honeycombs)與一層整流網1 4後,再經穩 定區消散部分紊流能量而到達氣門開口區。 一吸氣槽1 2,該吸氣槽1 2係設於該櫃體1 〇知端下緣處,且設有一吸入口 1 2 1 ,且該吸入 σ 1 2 1係對·應該氣門1 1之吹氣罩1 1 2設置。 M279718 抽氣機1 3,該抽氣機1 3係配設於該吸氣 槽1 2之出口端,以供排除有害氣體,❿該抽氣機 1 3係以一變頻器1 5 (inverter)改變並控制抽氣 機1 3轉速,進而控制氣門吹出平均速度…與吸 乱戴面平均速度Vs者。另,該抽氣機工3與吸氣The upper part is provided with a blowing hood, # fa] | j}: The IMU seeks the troubles by the suction groove set at the lower edge of the front end of the cabinet, and there is a suction eight port, and the remote suction port is corresponding to the valve blowing. The air hood is installed to form a rolling curtain to effectively block the leakage of pollutants, and the local production of the pollution source is effective and the effective local pumping action is achieved to achieve energy saving, have the exclusive effect of eliminating and blocking harmful gases, and greatly improve The whole only uses health, convenience and security. The second purpose of this creation is to connect the rectifier network installed on the top of an air curtain type air collector of Yishan Zhiyuan to meet the physics of pumping and replenishing air. It has both pumping and lice-reinforcing mechanisms, so that it has the effects of rapid elimination of lactating limbs and energy saving M279718, increasing its practicality and safety. In order to achieve the above purpose, this creation is an air curtain type air cabinet, which includes a cabinet, a valve, an air suction tank, an air extractor and a μ-net. The cabinet body is provided with a accommodating space for excluding harmful gases, and an open space is formed on the side and above of the cabinet body; the valve activity is combined with one side of the cabinet body for controlling the valve opening degree, and the orifice door The upper & have-exhaust hood; the suction trough is provided at the lower edge of the front end of the implant, and is provided with a -suction population, and the inhalation population is provided corresponding to the air hood of the valve; the air extractor It is arranged at the outlet end of the suction tank for the exclusion of treasure gas and σ holes. The δHai rectifier network is set above the cabinet to provide gas supplement; 蕻 丨, corpse &… Wrong, the gas-supply-type gas cabinet can have both the exhaust and replenishment mechanisms, and Zhong Shi: Jiu Jiu did a timely and effective local exhaust action near the source of the dye, and formed a pot to form a rolling curtain to effectively block Exhaust of pollutants, to save energy and effectively discharge and eliminate harmful gases. The above and other projects of this creation /, ′ are not difficult to understand in detail from the following detailed examples of the selected implementation examples: Tian% 代 Β coffee, Tian Tianming and the drawings. Of course, this creation can be different in some different ways or other arrangements, but the iS > Heart Girl Fighter has taken the heart ,,,, and examples as an example. In this manual, Bang elaborated, Xia Ya shows its structure in the drawings. M279718 [Embodiment] Please refer to Figure 3 ~ β 闰 士 ^^^^^ 6. This creation is an air curtain type gas cabinet. The gas curtain type gas cabinet includes: cabinet 10, which is installed inside the cabinet There is a accommodating space that excludes Bao gas, and the side of the cabinet 1 Q and the upper side are: an open space; / a valve 1 1, the valve 丄 丄 activity is combined with the cabinet 0-side, the gas Η 1 丄 is provided with a handle i χ for moving the valve 1 1 and then controlling the valve opening degree. The maximum opening degree of the valve i 为 is Hmax = 60 cm, the height of any valve opening is Η, and the origin coordinate (x, z) of the valve is defined on the middle symmetry plane of the valve, and the valve 1 1 is Equipped with a blow hood ii 2. The supply of blown gas from the valve 11 is mainly controlled by an inverter 16 (blower) and connected to the upper end of the blowing hood 1 1 2 through a flexible pipe. After sections 1 1 3 (honeycombs) and a layer of rectifier network 14, some turbulent energy is dissipated through the stabilization zone and reaches the valve opening zone. A suction tank 12 is arranged at the lower edge of the bottom end of the cabinet body 10, and a suction port 1 2 1 is provided, and the suction σ 1 2 1 is corresponding to the valve 1 1 The blowing hood 1 1 2 is set. M279718 air extractor 1 3, the air extractor 1 3 is arranged at the outlet end of the air suction tank 12 to eliminate harmful gas, so the air extractor 1 3 is equipped with an inverter 15 (inverter) Change and control the speed of the air extractor 1 3, and then control the average speed of valve blowing ... and the average speed Vs of the wearing surface. In addition, the suction machine 3 and the suction

才曰1 2之出口知之間係設有文氏管1 8,以供量測 吸氣速度Vs,而該文氏管1 8係配合設置-壓力轉 換计1 9 (pressure transducer),俾利量得壓差者。 一整流網1 4,該整流網丄4係設於櫃體丄〇 上方,以提供補氣;該整流網i 4的網目大小為 1.5mmxl.5mm,線徑為 〇 3mm 者。A venturi tube 18 is provided between the outlets of the twelve and 12 to measure the inspiratory speed Vs, and the venturi tube 18 is provided with a pressure transducer 19 (pressure transducer) for optimal profitability. Those who have differential pressure. A rectifier network 14 is arranged above the cabinet 丄 〇 to provide supplemental air; the mesh size of the rectifier network i 4 is 1.5mm × 1.5mm and the wire diameter is 〇3mm.

另,該藉由電源供應器供電給煙霧產生器3 〇,煙霧產生器3 〇内的白臘油,經由空氣塵縮機 加壓,使煙霧產生器3 〇内的煙霧被釋放出來;而 煙霧產生器3 0内的煙霧係透過快速接頭連結產 煙系統的出煙彎管,使煙霧可以進到污染源控制器 7 0 ( smoke ejector)内,再經由污染源控制器7 〇細網區域漸漸擴散出來;而藉由數位相機6 〇, 可报清晰的觀察流場變化;又,使用風速轉換器5 〇,用來量測·氣門吹出口及氣櫃天花板補氣之平均 M279718 風速。In addition, the smoke generator 3 0 is powered by the power supply, and the white wax in the smoke generator 3 0 is pressurized by an air dust shrinker, so that the smoke in the smoke generator 3 is released; and the smoke is released; The smoke in the generator 30 is connected to the smoke elbow of the smoke production system through a quick connector, so that the smoke can enter the pollution source controller 70 (smoke ejector), and then gradually diffuse out through the pollution source controller 70. ; With the digital camera 60, it is possible to report the changes in the flow field clearly. In addition, the wind speed converter 50 is used to measure the average M279718 wind speed of the valve blow-out port and the ceiling air supply.

藉由上述之結構構成一種氣簾式氣櫃,請參閱 第3〜6圖,本創作之特點係在於藉由該氣門丄工 活動結合於讀櫃體1 0 —側,且該氣門1 1上係設 有一吹氣罩1 1 2,而以變頻器1 6控制送風機1 7,並經由繞性管子接至吹氣罩丄i 2上端,氣流 在流經整流段1 1 3與一層整流網i 4後,再經穩 定區消散部分紊流能量而到達氣門開口區,並同時 藉由該吸氣槽1 2設於該#们◦前端下緣處,且 設有一吸入口 1 2 1,而該吸入口 1 2 1係對應該 虱門1 1之口人軋罩1 ;[ 2設置,進而形成氣簾(即An air curtain type gas cabinet is formed by the above structure. Please refer to Figs. 3 ~ 6. The characteristic of this creation is that it is combined with the reading cabinet body 10-side by the valve masonry activity, and the valve 1 1 is A blower hood 1 1 2 is provided, and the blower 17 is controlled by an inverter 16 and connected to the upper end of the blower hood 丄 i 2 through a winding pipe. The air flows through the rectification section 1 1 3 and a layer of rectifier network i 4 After that, some turbulent energy is dissipated through the stabilization area to reach the valve opening area, and at the same time, the suction groove 12 is set at the bottom of the front end, and a suction port 1 2 1 is provided, and the suction Mouth 1 2 1 is a mouth cover 1 corresponding to the lice gate 1 1; [2 is set to form an air curtain (ie

導入push-puU吹吸式技術的空氣簾幕 (air-iS〇lator))冑效阻隔污染物的外茂,且改變抽氣 的位置’以便靠近櫃内污染源做有效的局部抽氣動 作;而藉由該櫃體10上方所設置之整流網14, 以符合抽氣與補氣的物理機制;藉此,以 乳櫃得以兼具抽氣及補氣 及時有效的局部抽氣動作〜源附近做 除…'抽孔動作,達到節省能源及有效排 、有。氣體,且形成 “廉有效阻隔污染物的外茂, 即W有效排除及阻隔有害氣體,使得本 'M279718 創作具有快速排除、阻隔有害氣體及節省能源等效 果’増加其實用性、便利性及安全性。 本創作於使用時,該櫃體1 〇内部之流場說明 如下: 當氣門開度H/Hmax = 1,Hmax = 60cm,由氣 門1 1釋放煙霧(藉由一煙霧產生器3〇),雷射 光頁(藉由雷射光頁產生器4〇)在\ = 0(:111的平 面上§抽氣速度Vs=12 m/s,吹氣速度vb =2 m/s 時,氣門1 1吹出的氣簾會有往櫃内凹的趨勢,當 氣流流至接近抽氣端時,會受到前下吸的吸力拉 住,而不會繼續凹向櫃内或流至櫃外,·當抽氣速度 Vs 1 2 m/s,σ人氣速度Vb = 5 m/s時,氣流吹出的 速度Vb比剛才圖5_1(a)來的高,所以氣門^丄吹出 的氣簾流場沒有内凹的形態而顯得筆直;當抽氣速 度Vs二6m/s,吹氣速度Vb=lm/s時,氣簾氣流 往櫃内凹,並在櫃内形成明蔡員的迴流;當抽氣速度 Vs 1 2 m/s ’ 口人氣速度Vb = 6 m/s時,氣簾流場筆 直,並在櫃内形成明顯的迴流。 當氣門開度 H/Hmax 二 3/4,Hmax 二 6〇cm,由 氣門1 1釋放煙霧,雷射光頁在X = 〇cm的平面 M279718The air-iSlator with push-puU blow-suction technology can effectively block out the pollutants, and change the position of the exhaust air so as to be close to the source of pollution inside the cabinet to perform an effective local exhaust operation; and Through the rectifier net 14 provided above the cabinet 10, to comply with the physical mechanism of gas extraction and gas supplement; thereby, the breast cabinet can have both gas extraction and gas supplement in time and effectively. In addition to the 'pumping action', it achieves energy saving and effective drainage. Gas, and form a "bad and effective barrier to pollutants, that is, to effectively exclude and block harmful gases, making this 'M279718 creation has the effect of quickly removing, blocking harmful gases and saving energy' plus its practicality, convenience and safety When this creation is used, the flow field inside the cabinet 10 is explained as follows: When the valve opening H / Hmax = 1, Hmax = 60cm, the smoke is released by the valve 11 (by a smoke generator 3) When the laser light page (by the laser light page generator 4) is on the plane of \ = 0 (: 111), the pumping speed Vs = 12 m / s and the blowing speed vb = 2 m / s, the valve 1 1 The blown air curtain will tend to be recessed into the cabinet. When the airflow approaches the exhaust end, it will be pulled by the suction force of the front down suction, and will not continue to be recessed into or out of the cabinet. When the speed Vs 1 2 m / s and the σ popularity speed Vb = 5 m / s, the speed Vb of the airflow is higher than the figure 5_1 (a), so the air curtain flow field blown by the valve ^ 丄 does not have a concave shape. It looks straight; when the speed Vs is 6m / s and the speed Vb = lm / s, the air curtain air flow is concave to the cabinet and is shaped in the cabinet. Cheng Ming Cai's backflow; when the suction speed Vs 1 2 m / s' mouth popularity speed Vb = 6 m / s, the air curtain flow field is straight and an obvious backflow is formed in the cabinet. When the valve opening degree H / Hmax Two three-fourths, Hmax two 60cm, the smoke is released by the valve 1 1 and the laser light page is on the plane M279718 at X = 0cm

上。當抽氣速度Vs = 12 m/s ,吹氣速度Vb =2 m/i 日$氣門11吹出的氣簾會有往櫃内凹的趨勢,告 氣流流至接近抽氣端時,會受到前下吸的吸力2 住’而不會繼續凹向櫃内或流至櫃外;當抽氣速度 Vs 12 m/s,吹氣速度Vb = 5 m/s時,氣流吹出的 速度Vb比剛才來的高’所以氣門1 1吹出的氣簾 流場沒有内凹的形態而顯得筆直;當抽氣速度Vs = 3 m/s ’吹氣速度Vb = i m/s時,氣簾氣流往櫃内凹, 並在櫃内形成明顯的迴流;當抽氣速度Vs = 3m/s, 並在櫃内 吹氣速度Vb = 5 m/s時,氣簾流場筆直 形成明顯的迴流。 當氣門開度Η/Η_叫/2,Hmax = 6〇cm,由 氣門1 1釋放煙霧,雷射光頁在X = G em的平面 上。當抽氣速度Vs=12m/S,吹氣速度Vb=im/s 寺氣門1 1吹出的氣簾會有往櫃内凹的趨勢,當 孔Μ Μ至接近抽氣端時,會受到前下吸的吸力拉 住’而不會繼續凹向櫃内或流至櫃外;當抽氣速度 m/s,吹氣速度Vb = 4 m/s時,氣流吹出的 速度Vb比剛才來的高’所以氣門1 1吹出的氣簾 流場沒有内凹·的形態而顯得筆直;當抽氣速度vs = ' M279718 1 m/s,吹氣速度Vb = 〇.5m/s時,氣簾氣流往櫃内 凹,並在櫃内形成明顯的迴流;當抽氣速度Vs = 1 m/s,吹氣速度vb = 3 m/s時,氣簾流場筆直,並 在櫃内形成明顯的迴流。on. When the suction speed Vs = 12 m / s and the blowing speed Vb = 2 m / i, the air curtain blown out by the valve 11 will tend to sink into the cabinet. When the air flow approaches the suction end, it will be lowered. The suction force 2 stays' without continuing to sink into the cabinet or flow out of the cabinet; when the suction speed Vs 12 m / s and the blowing speed Vb = 5 m / s, the speed Vb of the airflow is higher than that High ', so the air curtain flow field blown by valve 1 1 has no concave shape and appears straight; when the suction speed Vs = 3 m / s' blowing speed Vb = im / s, the air curtain air flow is concave to the cabinet, and An obvious backflow is formed in the cabinet; when the suction speed Vs = 3m / s and the blowing speed Vb = 5m / s in the cabinet, the air curtain flow field directly forms an obvious backflow. When the valve opening degree Η / Η_ is called / 2, Hmax = 60 cm, the smoke is released by the valve 1 1 and the laser light page is on the plane of X = G em. When the pumping speed Vs = 12m / S, and the blowing speed Vb = im / s, the air curtain blown by the temple valve 1 will have a tendency to sink into the cabinet. When the hole Μ approaches the suction end, it will be sucked down. The suction force pulls 'and does not continue to sink into the cabinet or flow out of the cabinet; when the suction speed m / s and the blowing speed Vb = 4 m / s, the speed Vb of the air flow is higher than that just came' so The air curtain flow field blown out by the valve 1 1 is straight without the shape of indentation. When the suction speed vs = 'M279718 1 m / s and the blowing speed Vb = 0.5 m / s, the air curtain flow is concave toward the cabinet. An obvious backflow is formed in the cabinet; when the suction speed Vs = 1 m / s and the blowing speed vb = 3 m / s, the air curtain flow field is straight and an obvious backflow is formed in the cabinet.

氣門1 1釋放煙霧,雷射光頁在χ = 〇 cm的平面 上。當抽氣速度Vs = 12m/s,吹氣速度vb = 2m/s 時氣門1 1吹出的氣簾會有往櫃内凹的趨勢,當 氣流流至接近抽氣端時,會受到前下吸的吸力拉 住’而不會繼續凹向櫃内或流至櫃外;當抽氣速度 吹氣速度Vb = 5m/S時,氣流吹出的 速度Vb比剛才來的高’所以氣門u吹出的氣簾 流場沒有内凹的形態而顯得筆直;#抽氣速度Vs = 0.8m/s,吹氣速度時,氣簾氣流往櫃内 凹’亚在櫃内形成明顯的迴流;當抽氣速度Vs = 0.8 油0人虱速度Vb = 3 m/s時’氣簾流場筆直,並 在櫃内形成明顯的迴流。 练合以上四種氣門開度,可得知操作在不 吹吸速度時,各@ , 曰V致櫃内有無迴流的產生。所以 流場的型態得·知, κ 乳廉式氣櫃在使用上,吹吸 M279718 必須加以調校,才能避免迴流形成。除了瞭解到植 内流場有無迴流之外,以下將進一步觀察在不同吹 吸速度下氣櫃門檻附近的流場。 氣簾式氣櫃門檻附近的流場型態如下: 當氣門開度H/Hmax = 1,Hmax = 60cm,由氣 門1 1釋放煙霧’雷射光頁在x^Ocrn的平面上。 當抽氣速度Vs = 13.7 m/s,吹氣速度Vb = 3 m/s時, 櫃内不會產生迴流,氣簾氣流也不會流至門檻上 緣;當抽氣速度Vs = 3 m/s,吹氣速度Vb = 6 m/s 日守’軋簾流場雖然筆直,但是已於櫃内形成明顯的 迴流,並且在氣櫃門檻上緣有迴流產生。 S 氣門開度 H/Hmax = 3/4,Hmax = 60cm,由 氣門1 1釋放煙霧,雷射光頁在X = 0 cm的平面 上。當抽氣速度Vs = 12 m/s,吹氣速度Vb = 2 m/s 4 ’櫃内不會產生迴流,氣簾氣流也不會流至門检 上、、彖’ §才由氣速度Vs = 6m/s,吹氣速度Vb = 4.5 m/s ^ ’氣簾流場雖然筆直,但是已於櫃内與氣櫃門檻 上緣形成明顯的迴流。 ▲氣門開度 H/Hmax = 1/2,Hmax = 60cm,由 厂]丄1釋放煙霧’雷射光頁在>:=〇(:111的平面 20 M279718 上。s抽氣速度Vs = 12 m/s,吹氣速度vb = 3 m/s 日可概内不會產生迴流,氣簾氣流也不會流至門檻 上緣;當抽氣速度Vs二6m/s,吹氣速度Vb二3.8m/s 時’氣襄流場雖然筆直,但是已於櫃内與氣櫃門檻 上緣形成明顯的迴流。 ▲氣門開度 H/Hmax = 1/4,Hmax = 60cm,由 氣門1 1釋放煙霧,雷射光頁在x = 0 cm的平面 上。當抽氣速度Vs = 12 m/s,吹氣速度vb = 3 m/s 寺櫃内不會產生迴流,氣簾氣流也不會流至門才監 上緣;當抽氣速度Vs = 3 m/s,吹氣速度Vb = 2.6 犄,氣簾流場雖然筆直,但是已於櫃内與氣櫃門檻 上緣形成明顯的迴流。 由以上四種氣門開度的門檻流場型態可以得 知,不論氣門在何種開度,操作在不同的吹吸速度 時,除了會造成櫃内有無迴流外,更可分別看到門 才k上緣的迴流型態產生。若回到中間對稱面的側視 流場中,雖然氣簾流場呈現筆直狀態而櫃内無迴流 的情況,但可看到在門檻上緣形成迴流。因此,氣 簾流場在筆直狀態下櫃内雖無迴流形成,但是卻在 門植上緣形成迴流。所以從門檻附近的流場型態得 21 ' M279718 知’氣簾式氣櫃在使用上,吹吸速度必須加以調 校’才能避免迴流形成。 然而氣櫃吹吸速度的改變,氣簾及櫃内都會形 成許多不同的的流場型態,這些不同的型態流場容 易讓人覺得混淆不清而難以掌握到重點,所以必須 藉由多次的實驗及參數的調整,整理出一套有系統 的流場模態,才能釐清吹吸式氣簾的流場型態,並 定出適用的特性區域及範圍。 在流場模態的判別上,是以流場可視化技術將 觀察到的流場型態與相關的吹吸速度做紀錄,並以 此紀錄來做流場模態分區。而在流場模態分區的過 私中’吹吸式氣簾大致上可分為四種主要的模態, 刀別為内凹模怨2 0 (concave curtain)、筆直模態2 1 (straight curtain)、弱吸模態 2 2 (unde卜sucti〇n) 及過吹杈怨2 3 (over-blow)。定義這些模態的條件 除了不同的吹吸速度造成不同的氣簾流場型態之 外,還定義了氣櫃天花板層為一層整流網、抽氣位 置為前下吸、域Η 1 1釋放、㈣,來做為定義這 些不同流場模態的附帶條件。 就這四種模態而言,内凹模態2 〇(concave 22 M279718 curtain)疋屬於四葙 種拉恕中攻佳的操作模態。由於氣 櫃内部的負壓以;二 月’J下吸帶進來的氣流,使得内凹 模態的氣簾具有蠻 ,$曲的形狀。當這道氣簾在接近至 吸氣端時,會被明名 及乳口強大的吸力給拉住,而不會 往氣櫃内部或外却 ^ ^ 9 邛四處〜動。所以當氣門吹氣速度The valve 11 releases smoke, and the laser light page is on the plane of χ = 0 cm. When the suction speed Vs = 12m / s and the blowing speed vb = 2m / s, the air curtain blown by the valve 1 1 will tend to be concave toward the cabinet. When the airflow approaches the suction end, it will be sucked down by the front. Suction pulls' without continuing to sink into the cabinet or flow out of the cabinet; when the suction speed Vb = 5m / S, the speed Vb of the airflow is higher than the previous one, so the air curtain flow blown by the valve u The field appears straight without a concave shape; # Pumping speed Vs = 0.8m / s, when the blowing speed, the air curtain air flow to the cabinet is concave, and a significant backflow is formed in the cabinet; when the pumping speed Vs = 0.8 oil At 0 human lice speed Vb = 3 m / s, the air curtain flow field is straight, and a significant backflow is formed in the cabinet. After practicing the above four valve openings, it can be known that when the operation is not performed, the @, V will cause any backflow in the cabinet. Therefore, the type of the flow field is known. In the use of the κ milk-type gas cabinet, the suction M279718 must be adjusted to avoid the formation of backflow. In addition to knowing whether the flow field in the plant has backflow, the following will further observe the flow field near the threshold of the gas tank at different suction speeds. The flow field pattern near the threshold of the air curtain type gas cabinet is as follows: When the valve opening degree H / Hmax = 1, Hmax = 60cm, the smoke is emitted from the valve 1 1 and the laser light sheet is on the plane of x ^ Ocrn. When the pumping speed Vs = 13.7 m / s and the blowing speed Vb = 3 m / s, no backflow will occur in the cabinet, and the curtain airflow will not flow to the upper edge of the threshold; when the pumping speed Vs = 3 m / s The air blowing speed Vb = 6 m / s. Although Rishou's rolling curtain flow field is straight, a significant backflow has formed in the cabinet, and a backflow has occurred at the upper edge of the gas cabinet door sill. S valve opening H / Hmax = 3/4, Hmax = 60cm, smoke is released by valve 1 1 and the laser light page is on the plane of X = 0 cm. When the suction speed Vs = 12 m / s, the blowing speed Vb = 2 m / s 4 'No backflow will occur in the cabinet, and the air curtain airflow will not flow to the door inspection. 彖' § Only the air speed Vs = 6m / s, blowing speed Vb = 4.5 m / s ^ 'Although the air curtain flow field is straight, it has formed a significant backflow in the cabinet and the upper edge of the gas cabinet threshold. ▲ Valve opening degree H / Hmax = 1/2, Hmax = 60cm, released by factory] 烟雾 1 'laser light page on> == (: 111 plane 20 M279718. S pumping speed Vs = 12 m / s, blowing speed vb = 3 m / s, no backflow will occur in the day, and curtain airflow will not flow to the upper edge of the threshold; when the suction speed Vs is 6m / s, the blowing speed Vb is 3.8m / Although the shang'qixiang flow field is straight, it has formed a significant backflow in the cabinet and the upper edge of the gas cabinet sill. ▲ The valve opening degree H / Hmax = 1/4, Hmax = 60cm, the smoke is released by the valve 1 1 and thunder The light emission page is on the plane of x = 0 cm. When the suction speed Vs = 12 m / s and the blowing speed vb = 3 m / s, no backflow will occur in the temple cabinet, and the curtain airflow will not flow to the door. When the suction speed Vs = 3 m / s and the blowing speed Vb = 2.6 犄, although the air curtain flow field is straight, it has formed a significant backflow in the cabinet and the upper edge of the valve threshold. From the above four valve opening degrees The threshold flow field type can be known, regardless of the opening of the valve, when operating at different blowing speeds, in addition to causing backflow in the cabinet, you can also see the upper edge of the door separately. The flow pattern is generated. If you return to the side-view flow field on the middle symmetry plane, although the air curtain flow field appears straight and there is no backflow in the cabinet, you can see that a backflow is formed on the upper edge of the threshold. Therefore, the air curtain flow field is in the Although there is no backflow formation in the cabinet in a straight state, the backflow is formed on the upper edge of the door plant. Therefore, the flow field pattern near the threshold is 21 'M279718 Known' For the air curtain type gas cabinet, the blowing speed must be adjusted. 'In order to avoid the formation of backflow. However, the change of the suction speed of the gas cabinet will cause many different flow field patterns in the air curtain and the cabinet. These different types of flow fields are easy to feel confused and difficult to grasp the focus. Therefore, it is necessary to sort out a systematic flow field mode through multiple experiments and parameter adjustments to clarify the flow field pattern of the suction air curtain and determine the applicable characteristic area and range. In terms of modal identification, the observed flow field pattern and the related blowing and suction speed are recorded by the flow field visualization technology, and the record is used to make the modal partition of the flow field. private The 'blow-suction' air curtain can be roughly divided into four main modes, the knife type is concave curtain 2 0 (concave curtain), straight mode 2 1 (straight curtain), weak suction mode 2 2 (unde Bu sucti〇n) and over-blow 2 3 (over-blow). In addition to the conditions of these modes, different air curtain flow field patterns are defined, and the ceiling of the gas cabinet is defined as a layer. The rectifier network and pumping position are forward down-suction, domain Η 1 1 release, ㈣, as additional conditions to define these different flow field modes. As far as these four modes are concerned, the concave mode 2 (concave 22 M279718 curtain) 疋 belongs to the four best operating modes of forgiveness. Due to the negative pressure inside the gas cabinet, the airflow brought in by the suction in February ′ J makes the concave curtain air curtain have a pretty, curved shape. When the air curtain is close to the suction end, it will be pulled by the strong suction power of the well-known name and milk mouth, instead of moving around or inside the gas cabinet ^ ^ 9 邛 around ~. So when the valve blows

Vb與前下吸速声 又Vs调整到内凹模態時,就避免污Vb and front down suction speed and Vs are adjusted to the concave mode to avoid contamination

染物洩漏方面,裔^ 孔門開口所形成的氣簾保護將會比 單純的下吸式氣櫃來的有效。 其他三個模態中,筆直模態(straightcurUin)的 机%型怨疋屬於吹氣速度相對於内凹模態較高的 一種模態。這種流場雖然在吸力夠強的情況下不易 產生櫃内迴流,但由於吹氣速度Vb較高,而造成 了氣櫃門檻上緣迴流及氣門開口附近的紊亂流 场。雖然氣門1 1吹出的是乾淨的空氣,但是這些 Η Μ上緣的迴流以及氣門外部的混亂流場,都有可 ι壤氣櫃内的污染物藉由紊流擴散而洩漏到櫃 外’使氣簾的保護失效。 在弱吸模態2 2 (under-suction)中,由於下吸力 道的不足,而造成氣櫃内部的迴流。氣櫃内所產生 的污染物會隨著櫃内的迴流而慢慢充滿整個氣櫃 23 、M279718 内部’再經由擴勒的 ,、政的方式從氣櫃天花板層及氣門開 口附近洩漏出來。 在過"人拉悲2 3 (〇Ver-bi〇w)中,是屬於筆直模 態與弱吸模綠的έ士人 丄 〜、的^ a。由於下吸力道的不足造成櫃 内的迴流,加上翕η必a、土— > 孔門人軋速度過南,使得櫃内迴流As for the leakage of dyes, the air curtain protection formed by the opening of the door will be more effective than the simple down-suction gas cabinet. Among the other three modes, the straight mode (straightcurUin) machine type complaint is a mode in which the blowing speed is higher than the concave mode. Although this type of flow field is not easy to generate backflow in the cabinet under the condition of strong suction, the high blowing speed Vb causes the backflow of the upper threshold of the gas tank sill and the turbulent flow field near the valve opening. Although the valve 11 is blowing clean air, the backflow of these upper edges and the chaotic flow field outside the valve all have pollutants leaking out of the cabinet due to turbulent diffusion. The protection of the air curtain is ineffective. In the weak-suction mode 2 2 (under-suction), due to the lack of the lower suction channel, the backflow inside the gas cabinet is caused. Contaminants generated in the gas cabinet will gradually fill the entire gas cabinet 23 with the backflow of the cabinet, and the interior of M279718 ’will be leaked from the ceiling layer of the gas cabinet and near the valve openings in an enlarged manner. In "Ren La Bei 2 3 (〇Ver-bi〇w)", it is a person who belongs to straight mode and weak suction green 绿 ~, ^ a. Backflow in the cabinet due to the lack of the lower suction channel, plus 翕 η 必 a, soil — > The door rolling speed of the door is too south, making the backflow in the cabinet

更加嚴重’同時也造成氣Η外部混亂流場及門檻上 緣的迴流。若操作在過吹模態下,不僅不安全,更 加速了迴流及污染物洩漏等問題。 由於這四種流場模態主要是以速度的變化做 為最主要的調整參數,所以就各種不同的吹吸速度 繪製流場模態分區圖,來做為氣簾式氣櫃操作的參 考指標,並且依不同的氣門開度,分別繪製四種氣 門開度的流場模態分區圖,如第7圖至第i 〇圖所 在第7圖至第1 〇圖中,由斜紋線所構成的兩 條粗細不同的速度臨界帶,分別劃分出四種模態的 特性區域。若在氣門開度H/Hmax = 1時,穿7 左上角區域的内凹模態2 0顯示著Vs至少要操作 在10 m/s以上才算安全,但隨著吹氣速度Vb的增 加到大約3.2 m/s之後,Vs必須隨著Vb的增加而 24 M279718 提昇。More serious ’also causes discouraged external chaotic flow fields and backflow of the upper threshold. If it is operated in an over-blowing mode, it is not only unsafe, but also accelerates problems such as backflow and leakage of pollutants. Since these four flow field modalities are mainly based on the speed change as the main adjustment parameter, the zonal maps of the flow field modalities are drawn for different blowing speeds as reference indicators for the operation of the air curtain type gas cabinet. And according to different valve openings, draw the flow field modal division maps of the four valve openings, as shown in Figures 7 to 10. Figures 7 to 10, where two are composed of diagonal lines The speed critical bands with different thicknesses are divided into four modal characteristic regions. If the valve opening degree H / Hmax = 1, the recessed mode 2 in the upper left corner region of the wearer 7 shows that Vs is safe to operate at least 10 m / s or more, but as the blowing speed Vb increases to After about 3.2 m / s, Vs must increase with Vb 24 M279718.

這兩條速度臨界帶除了劃分四種不同特性區 域外,也能以單一條來判斷不同的吹吸速度下所形 成的流場型態。粗的速度臨界帶主要是用來判斷氣 門吹出的氣流是否會吹至氣櫃外,亦即粗的速度臨 界帶是用來調整與控制吹氣速度於適當大小;細的 臨界速度帶主要是用來判斷櫃内有無迴流產生,亦 即用來調整與控制吸氣速度的大小,以避免一眛的 的加大吸氣設備,而造成的能源的浪費。 此外,就四種氣門開度的流場模態分區圖而 言’由於氣門開度逐漸減小’吹氣端與吸氣端的距 離更加接近的情況下,細的臨界速度帶有明顯往下 轉移的趨勢。亦即氣門開度逐漸減小時,吸氣速度 Vs相對減少仍可操作在内凹模態2 〇來避免樞^ 迴流的產生,並節省抽氣端的能源。 綜合以上四種氣簾的流場模態及特性區域而 :’氣櫃在吹吸速度的操作上,建議使用在内凹模 怨 2 〇 (concave curtain)的區域。 閉 、·示上得知’本創作可有效改善習用氣櫃天花板 為封閉時之櫃’内迴流現象(習用氣櫃天花板為封 25 M279718 時,不論在何種氣門開度下,櫃内幾乎都有迴流的 現象。若從流體力學的角度來看,氣櫃天花板封閉 ^成氣櫃上層無法補氣,而破壞了氣櫃自然補氣的 機制,t氣櫃天花板被封閉後,氣門外部的空氣就 疋最主要的自然補氣源,當氣櫃内部持續抽氣呈現 負壓0寸’氣櫃外部的氣流自然會被牽引至氣櫃内In addition to dividing the two speed critical zones into four different characteristic regions, a single bar can also be used to judge the flow field patterns formed at different blowing speeds. The coarse speed critical band is mainly used to judge whether the airflow blown out of the valve will blow out of the gas tank. That is, the thick speed critical band is used to adjust and control the blowing speed to an appropriate size; the thin critical speed band is mainly used to To determine whether there is a backflow in the cabinet, that is, to adjust and control the suction speed, to avoid a large increase in suction equipment, and waste of energy caused. In addition, as for the modal zoning diagrams of the flow fields of the four valve opening degrees, 'because the valve opening degrees are gradually reduced', the closer the distance between the blowing end and the suction end is, the thin the critical velocity is obviously shifted downward. the trend of. That is, when the valve opening gradually decreases, the suction speed Vs is relatively reduced, and the concave mode 2 can still be operated to avoid the occurrence of pivotal backflow and save energy at the suction side. Based on the flow field modalities and characteristic regions of the above four air curtains, it is recommended to use the area of the concave curtain (cacave curtain) in the operation of the suction speed of the air cabinet. Closed, the display shows that 'this creation can effectively improve the conventional gas cabinet when the ceiling is closed cabinet' phenomenon of backflow (when the conventional gas cabinet ceiling is 25 M279718, no matter what valve opening degree, the cabinet almost all There is a phenomenon of backflow. From the perspective of fluid mechanics, the ceiling of the gas cabinet is closed. The upper layer of the gas cabinet cannot be replenished, which destroys the natural gas replenishment mechanism of the gas cabinet. After the ceiling of the gas cabinet is closed, the air outside the valve is closed. It is the most important source of natural air supply. When the internal gas tank is continuously pumped, the negative pressure is 0 inches. The air flow outside the gas tank will naturally be drawn into the gas tank.

部’而逐漸形成迴流’所以氣櫃内部迴流是由於氣 概天花板封閉所造成。這些迴流的形成會混合著樞 内污染物,漸漸的使櫃内污染物的濃度增高,當迴 流緊貼氣門而通過氣門開口時,就會藉由分子擴散 或是_散將污染物茂漏到櫃外。所以氣櫃天花 板在设計上應該以不阻斷上層補氣做為考量。), 免”㈣漏到櫃外’且由氣簾式氣樞的流 %型悲得知,在污染物茂 氣櫃應會有很大的改善。上’比起傳統型 可使熟知本項技藝者明瞭本 目的’實已符合專利法之規 由以上詳細說明, 創作的確可達成前述 定,爰提出專利申請。 准以上所述者,僅為本創 已,# · 較佳實施例而 已田不症以此限定本創作實施之 把園,故,凡依 26 M279718 本創作申請專利範圍及創作說明書内容所作之簡 單的等效變化與修飾,皆應仍屬本創作專利涵蓋之 範圍内。The “returning gradually formed” part, so the backflow inside the gas cabinet is caused by the closed ceiling. The formation of these backflows will mix the pollutants in the hub, and gradually increase the concentration of the pollutants in the cabinet. When the backflow is close to the valve and passes through the valve opening, the pollutants will leak through the molecular diffusion or scattering. Outside the cabinet. Therefore, the design of the gas cabinet ceiling board should be based on not blocking the upper gas supply. ), "No leakage outside the cabinet" and learned from the flow type of the air curtain type armature, there should be a great improvement in the pollutant gas cabinet. The above "compared to the traditional type can be familiar with this technology It is clear that this purpose 'has been in accordance with the above-mentioned details of the Patent Law, and the creation can indeed achieve the aforementioned determination, and then file a patent application. The above mentioned ones are only for this creation, # · The preferred embodiment has been used by Tian Bu This restricts the implementation of this creation. Therefore, any simple equivalent changes and modifications made in accordance with the scope of the patent application and the contents of the creation specification of 26 M279718 for this creation shall still fall within the scope of this creation patent.

27 ' M279718 【圖式簡單說明】 第1圖,係習用實施例之平面示意圖。 第2圖,係習用實施例之側面示意圖。 第3圖,係本創作實施例之立體外觀圖。 第4圖,係本創作實施例之平面示意圖。 第5圖,係本創作實施例之側面示意圖。 _ 第6圖,係本創作實施例之使用示意圖。 第7〜1 0圖,係本創作實施例流場模態分區圖。 【主要元件符號說明】 1、氣櫃 3、槽 5、氣櫃門 1 0、櫃體 1 1 1、把手 1 1 3、整流段 1 2 1、吸入口 1 4、整流網 1 6、變頻器 1 8、文氏管· 2、槽板 4、抽氣機 1 1 、氣門 1 1 2、吹氣罩 1 2、吸氣槽 1 3、抽氣機 1 5、變頻器 1 7、送風機 1 9、壓力轉換計 28 M279718 2 Ο、内凹模態 2 2、弱吸模態 3 0、煙霧產生器 5 0、風速轉換器 7 0、污染源控制器 1、筆直模態 3、過吹模態 0、雷射光頁產生器 〇、數位相機27 'M279718 [Schematic description] Figure 1 is a schematic plan view of a conventional embodiment. FIG. 2 is a schematic side view of a conventional embodiment. Fig. 3 is a three-dimensional appearance view of this creative embodiment. Figure 4 is a schematic plan view of this creative embodiment. FIG. 5 is a schematic side view of this creative embodiment. _ Figure 6 is a schematic diagram of the use of this creative embodiment. Figures 7 to 10 are modal partition maps of the flow field in this creative embodiment. [Description of main component symbols] 1. Gas cabinet 3, slot 5, gas cabinet door 1 0, cabinet 1 1 1. handle 1 1 3. rectifier section 1 2 1. suction port 1 4. rectifier network 1 6. inverter 1 8. Venturi tube 2. Slot plate 4. Extractor 1 1 Valve 1 1 2. Blow hood 1 2. Suction tank 1 3. Extractor 1 5. Inverter 1 7. Air blower 1 9 , Pressure conversion meter 28 M279718 2 〇, concave mode 2 2, weak suction mode 3 0, smoke generator 5 0, wind speed converter 7 0, pollution source controller 1, straight mode 3, over blowing mode 0 , Laser light page generator 0, Digital camera

2929

Claims (1)

M279718 九、申請專利範圍: 1· 一種氣簾式氣櫃,該氣簾式氣櫃包括: 一樞體’該櫃體内係設有排除有害氣體之容置空間, 而該植體之一側及上方係形成開放空間; 一氣門,該氣門活動結合於該櫃體一側,以供 門開度,該氣門上係設有一吹氣罩; 吸氣彳9孩吸氣槽係設於該櫃體前端下緣處,且設 "XZ u入口,且該吸入口係對應該氣門之吹氣設 置; m該抽氣機係配設於該吸氣槽之出口端,以 供排除有害氣體;以及 =流網,該整流網係設於櫃體上方,以提供補氣;M279718 IX. Scope of patent application: 1. An air curtain type gas cabinet, which includes: a pivot body; the cabinet body is provided with a accommodating space for excluding harmful gas, and one side of the plant body and above It forms an open space; a valve, which is movably combined with one side of the cabinet for the opening of the door, the valve is provided with an air blowing hood; the suction trough 9 child suction trough is located at the front of the cabinet At the lower edge, there is an "XZ u" inlet, and the suction port is set to correspond to the air blowing of the valve; m The air extractor is arranged at the outlet end of the suction tank to exclude harmful gases; and = Drift network, the rectifier network is located above the cabinet to provide gas supplement; ::::供氣簾式氣植得以兼具抽氣及補氣機制,而 就巧染源附近做及時有 篮古μ 的局部抽氣動作,且形成氣 廉有效阻隔污染物的… 及阻隔有害氣體者。相卽省能源及有效排除 如申清專利範圍第 氣門係設有把手, 者0 · 1員所述之氣簾式氣櫃,其中,該 以供移動名 砂勒虱門,進而控制氣門開度 30 2. ' M279718 申月專利乾圍第1項所述之氣簾式氣櫃,其中,該抽 氣機係以一蠻镅哭 又頻為(inverter)改變並控制抽氣機轉 速進而控制氣門吹出平均速度Vb與吸氣戴面平均 速度Vs者。 項所述之氣簾式氣櫃,其中,該 I5mmxl.5mm,線徑為 03mm 4·如申請專利範圍第工:::: The air supply curtain air planting can have both the air extraction and gas supplementation mechanisms, and the local exhaustion of the ancient μ μ can be performed in time near the source of the dye, and the air-inhibiting and effective blocking of pollutants ... Gas person. With regard to energy saving and effective exclusion, the air curtain type gas tank described in the first patent is covered with a handle, and the air curtain type gas tank is described by 0.1 members. Among them, it is used to move the name of the snail door and control the valve opening degree by 30. 2. 'M279718 Shenyue Patent Qianwei's air curtain type gas cabinet, wherein the air extractor changes and controls the speed of the air extractor with a very weeping and frequent inverter to control the average valve blowout. The speed Vb and the average speed Vs of the inhalation face. The air curtain type gas cabinet according to the above item, wherein the I5mmxl.5mm and the wire diameter is 03mm 4 整流網的網目大小為 者0 5.如申請專利範圍第1項所述之氣簾式氣櫃,其中,該 氣門最大開度為Hma…“m,任意的氣門開口高 度為Η ϋ疋義氣櫃的原點座標(χ,ζ)在氣櫃中間對稱 面上者。 6. 如申請專利範圍第1項 在氣門吹出氣體的供 (inverter)控制送風機 所述之氣簾式氣櫃,其中,該 應方面,主要係以一變頻器 (blower),並經由繞性管子接 至吹氣罩上端’氣流在流經整流段(honeycombs)與 -層整流網後,再經穩定區消散部分紊流能量而到達 氣門開口區。 、M279718 7.如申請專利範圍第1項所述之氣簾式氣櫃,其中,該 抽氣機與吸氣槽之出口端之間係設有文氏管,以供量 測吸氣速度Vs,而該文氏管係配合設置一壓力轉換 計 (pressure transducer),俾利量得壓差者。The mesh size of the rectifier net is 0. 5. The air curtain type gas cabinet described in item 1 of the scope of patent application, wherein the maximum opening degree of the valve is Hma ... "m, and the height of any valve opening is 的 Η The origin coordinate (χ, ζ) is on the middle symmetry plane of the gas tank. 6. The air curtain type gas tank as described in the patent application scope No. 1 which controls the air blower for the air blower in the valve, in which this aspect should It is mainly driven by a frequency converter (blower) and connected to the upper end of the blowing hood through a winding tube. The airflow passes through the honeycombs and -layer rectification network, and then dissipates part of the turbulent energy through the stabilization zone to reach Valve opening area. M279718 7. The air curtain type gas cabinet according to item 1 of the patent application scope, wherein a venturi tube is provided between the air extractor and the outlet end of the suction tank for measuring suction The air velocity Vs, and the Venturi tube system is provided with a pressure transducer to obtain the pressure difference. 3232
TW094211660U 2005-07-08 2005-07-08 Air-isolator fume hood TWM279718U (en)

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JPH0757474B2 (en) * 1986-06-25 1995-06-21 株式会社日立製作所 Disaster prevention type clean workbench
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