JPH0757474B2 - Disaster prevention type clean workbench - Google Patents

Description

Description: TECHNICAL FIELD The present invention relates to a clean workbench, which is used in a clean room while maintaining cleanliness and has a flammability or an explosive property having a specific gravity larger than that of air in a work space. The present invention relates to a disaster prevention type clean workbench suitable for improving safety when handling substances and the like.

[Conventional technology]

Conventional exhaust type cleaning worktables are disclosed, for example, in Japanese Utility Model Publication No. 44-23514 and Japanese Patent Publication No. 52-3160.

As shown in these drawings, the general structure of the conventional exhaust type cleaning workbench is shown in FIG. 27. The working chamber 101 has a side wall 102 and a back wall 103 provided on all sides, a front door 104 and a floor. Is surrounded by a perforated punching plate 105 and a clean air outlet 119 provided on the upper surface, and at the bottom of the clean work table, a prefilter 106 and a fan 107 are provided, and the fan 107 is provided with an air supply duct 108. Is supplied to a high-performance filter 109 provided above the work chamber 101, and the air purified by the high-performance filter 109 is vertically supplied into the work chamber 101 as clean air 110 from a clean air outlet 119. ing.

In such a cleaning workbench, when installing a device that handles flammable or combustible substances during work, for example, when using a spinner device for semiconductor manufacturing in a cleaning workbench, in the working chamber 101 The installed spinner device 11 generates a flammable gas 12 having a higher specific gravity than air, and the gas is discharged to the outside through the punching plate 105 and the exhaust duct 113, but flows out to the outside when the front door 104 is opened. Sometimes I did it. Further, since the work room 101 may be filled with a combustible gas, an illumination lamp 114 having a high degree of safety with respect to the atmosphere in the room is used, and a control box 115 for controlling electrical equipment such as the illumination lamp 114 and the fan 107. Was installed on the front of the legs of the cleaning workbench.

Therefore, the control box 115 may be in the atmosphere of flammable gas, and there is a safety problem when using normal electrical products, and when using explosion-proof type for safety, the control box 115 becomes large and work However, it was not considered to satisfy both safety and functionality at the same time.

Incidentally, in addition to the above, as a device related to this type, there is mentioned JP-B-47-36683, but there is no disclosure of measures for handling flammable substances in the working space.

[Problems to be solved by the invention]

In the above-mentioned conventional technique, when the front door 104 is opened as shown in FIG. 28, there is a dead space in the front lower surface of the ceiling case 116, so that the outside air 117 is attracted and the cleanliness in the working chamber 101 cannot be maintained. Further, since the front door 104 is opened, the air in the room easily flows out, and since there is the illumination lamp 114 exposed in the room, the convection phenomenon occurs in the lower part of the combustible gas 12 generated from the spinner device 11 to the outside. leak. Flammable gas
Since 12 has a larger specific gravity than air, if it flows out of the room, there is a risk of ignition and explosion due to sparks from the switches installed in the fan 107 and control box 115 installed under the clean workbench. .

The flammable gas 12 that has flowed out is sucked by the fan 107 located at the bottom of the cleaning work table, and the air supply duct 1
Repeat the vicious circle of recycling into the work room 101 via 08. Since the inside of the air supply duct 108 has a positive pressure against the outside air, there is a possibility that it will flow out and diffuse to the outside of the room unless the degree of sealing is high on all surfaces where this duct contacts the outside air.

In addition, if you use the explosion-proof specifications that enhance the safety of the internal switches, including the control box 115,
There is also a safety problem that the box itself becomes large and becomes an obstacle when the worker performs the work, and the protruding portion to the outside of the work table becomes large and the worker may collide with it.

The object of the present invention is to prevent not only the conventional high cleanliness, but also the convection of the combustible gas and the explosive gas generated in the work chamber and the outflow to the outside of the work chamber to prevent various disasters and prevent the safety. It is to provide a clean workbench with a high degree of precision.

[Means for solving problems]

The above-mentioned object has a working space having an opening in the front and storing a device for handling a flammable substance therein, an air purifying means arranged above the working space, and a working space communicated below the working space. In the disaster-prevention-type clean work table including an exhaust unit for exhausting the air in the working space, an isolated air flow forming unit and an electrical equipment storage box are provided, and the isolated air flow forming unit is provided above the working space. The electrical equipment storage box is disposed on the upstream side of the equipment with respect to the air flow formed by the isolated air flow forming means and is isolated from the work space, and the air outside the work space is the electrical equipment. This is achieved by forming the air circulation hole so as to flow through the inside of the storage box.

Further, the above-mentioned object has an opening in the front surface, a working space for storing a device for handling a combustible substance therein, an air purifying unit arranged above the working space, and a communication space below the working space. In addition, in the disaster-prevention-type clean work table, which is provided with an exhaust unit for exhausting the air in the working space and an isolation airflow forming unit for preventing the air in the working space from flowing out from the opening. An electrical equipment storage box, a fire extinguisher, and a protection damper are provided, and the electrical equipment storage box is disposed upstream of the device with respect to the air flow formed by the isolated air flow forming means, and is isolated from the work space, A fire extinguishing agent container disposed below the workbench and a nozzle connected to the fire extinguishing agent container via a control valve, disposed near the device in the working space, and in the vicinity of the device. A fire detection means arranged in And a control unit for controlling the control valve so as to release the extinguishing agent based on a signal from the fire detection unit, the control unit is provided with an operation state display unit, and the control unit is stored in the electrical equipment storage box. However, it is achieved by providing the fire protection damper in the exhaust part and closing the exhaust part in conjunction with the operation of the fire extinguisher.

According to a preferred embodiment, the fire extinguishing device comprises a pressure gas container, the pressure gas container is connected to a drive device of the fire damper via a second control valve, and the control unit is configured to discharge the fire extinguishing agent at the time of release. It is configured to control the second control valve to release the gas in the pressure gas container to perform the closing operation of the fire protection damper.

[Action]

The isolated airflow forming means forms an airflow that flows from the upper side to the lower side in the working space to prevent the flammable substances generated in the working space from flowing out of the working space and prevent the outside air from entering from the outside of the working space. The exhaust part effectively discharges the flammable substances generated in the work space to the outside of the work space.

As a result, the concentration of combustible substances in the work space can be lowered, and the risk of fire can be reduced.
Since the electrical equipment storage box is arranged upstream of the equipment that handles combustible substances with respect to the air flow formed by the isolated air flow forming means, isolated from the work space, in the unlikely event that flammable substances are present in the work space. Prevents contact between combustible substances and the equipment inside the electrical equipment storage box even when filled.

The air circulation hole formed in the electrical equipment storage box forms an airflow that flows through the electrical equipment storage box due to the heat generated by the equipment in the electrical equipment storage box, so that a flammable substance may enter the electrical equipment storage box. However, it is possible to effectively discharge it to the outside, and prevent flammable substances from staying in the electrical equipment storage box.

The fire extinguisher system should be used in the event of a fire in the work space.
Fire is extinguished by injecting a fire extinguisher into the work space, and the fire damper is closed to prevent burning through the exhaust system.

〔Example〕

 An embodiment of the present invention will be described below with reference to FIGS.

A first embodiment of the present invention will be described with reference to FIGS.

FIG. 1 is a side sectional view showing the construction of a disaster prevention type cleaning workbench in a first embodiment of the present invention. The disaster-prevention-type clean workbench of this embodiment is installed in a clean room, the work space 1 which is a work space is provided with an opening 5 in the front, side walls 2 on both sides and a back wall 3 on the back, respectively. A blowout punching plate 19 for supplying clean air is provided on the ceiling surface, and an exhaust punching plate 20 is provided on the bottom surface. Opening 5
A front door 4 that separates the work chamber 1 from the outside is provided in the door so as to be openable and closable. In this embodiment, the front door 4 is a sliding door, and the outer door 4a and the inner door 4b are configured to be a double-opening sliding door. An embedded illumination lamp 14 is provided above the rear wall 3 of the work chamber 1, and a fire extinguishing nozzle 24 is provided below the illumination lamp 14. The blowout punching plate 19 provided on the ceiling surface of the work chamber 1 has an air curtain blowout portion 19a having a different opening ratio from the other portions on the front surface side, and even when the door 4 is opened, the workroom 1 is opened by the air curtain. It is configured to be able to isolate inside and outside. A hanging wall 21 is provided on the upper front side of the work chamber 1.
Is detachably installed to promote the formation of air curtain airflow.

In this embodiment, the front door 4 and the hanging wall 21 are made of meshed or lined glass for safety. Work room 1
An air supply purifying unit 18 is provided above. Air purification unit 18
The pre-filter 6 is detachably provided on the upper surface of the ceiling case 16 and is provided between the fan 7 and the chamber 26 communicating with the outlet of the fan 7 and between the chamber 26 and the pressure chamber 31. A high performance filter 9 for purifying the supplied air is provided. The clean air 10 purified by the high-performance filter 9 and supplied to the pressure chamber 31 is supplied to the work space 1 via the blowout punching plate 19. Air purification section
Since the inside of 18 communicates with the suction port of fan 7, the pressure becomes a negative pressure with respect to the surroundings, and care is taken so as not to affect the cleanliness even if there is a leak in the filter mounting portion. As shown in FIG. 2, a step 16a is provided on the front surface of the ceiling case 16 of the air supply purifying unit 18, and a control box 15 and an operation panel 25 for accommodating electrical components 30 including an operation circuit are attached to this step. To be The operation panel 25 is provided with an air circulation hole 25a. Control box 15
Is provided separately from the air purification unit 18, and the side facing the work chamber 1 is configured to have a closed structure so that the air in the work chamber 1 does not enter the control box 15. . The operation panel 25 is detachably attached to the control box 15 so that the electric component 30 can be maintained and inspected. The electric wire can be pulled out from the electric component 30 provided in the control box 15 by referring to FIG. 3 and FIG.
As shown in the figure, the air supply purification unit 18 of the control box 15
Control box 15 and air purification section on the side facing the
This is done by providing an opening 15a penetrating 18 and attaching a highly sealed connector to the opening 15a.

The connector is composed of a packing 35, a receptacle 36, and a plug 37. When the receptacle and the plug are connected, the degree of airtightness between them is high, and air circulation can be prevented. The connector is the control box 15
In consideration of the inflow and outflow of air into the inside and the maintenance and inspection of the fan 7 and other electric components in the air supply purification section 18, the connector is attached so that the plug 37 is located at the upper part. Further, by using the connector, it is possible to prevent the damage of the electric wire coating at the portion where the electric component connecting wiring member 38 penetrates the control box 15 and to fix the electric wire.

To increase the airtightness of the connector part, a sealant is
40 may be filled.

A first modified example of the control box is shown in FIG.
In this modified example, a slope 15b is provided below the control box 15 so that more clean air 10 flows in the air curtain, and a space for the air curtain is provided between the front door 4 and the hanging wall 21.
29 is provided. Clean air 10 is blown punching plate
Since 19 has an air resistance, it flows into the air curtain space 29 having a small air resistance, and an air curtain can be formed to prevent inflow and outflow of air in the opening 5. Also, by providing the control box 15 with a gradient 15b, it is possible to prevent air from staying inside the control box 15
It becomes easy for 17 to flow in from the air circulation hole 25a, and the cooling effect of the electrical component 30 provided inside the box can also be enhanced.

FIG. 6 shows a first modification of the supply air purification unit. In this modified example, the mounting portion of the control box 15 is provided at the middle height of the front surface of the air supply purification portion 18. According to this modification,
The pressure chamber 31 can be extended to the front of the air supply purifying unit 18, and a large amount of clean air can be supplied to the air curtain forming unit,
The air curtain can be effectively formed.

FIG. 7 shows a second modification of the supply air purification unit. In this modification, the chamber 26 and the control box 15 are connected by the tube 41. According to this modification, the control box 15 has a positive pressure, and the air in the work chamber 1 can be prevented from entering the control box 1. At the same time, an air flow is forcibly formed in the control box to produce an electrical component. The cooling effect of 30 can be enhanced.

FIG. 8 shows a third modification of the supply air purification unit. In this modified example, the ceiling case 16 of the air supply purifying unit 18 has a rectangular parallelepiped shape without providing the step 16a, and a control box is provided on the front surface thereof.
15 is fixed. This modification is effective when the height of the work room 1 is sufficiently high and the operator does not have to worry about hitting his / her head on the control box. The ceiling case 16 has a simple shape and is easy to manufacture. become. Further, when the height of the work room 1 is not so high, the front surface of the workbench 34 is projected to the same extent as the projection size of the control box 15 so that the operator's head does not physically approach the control box. You may.

FIG. 9 shows a fourth modification of the supply air purification unit.

In this modification, the ceiling case 16 has a rectangular parallelepiped shape as in the modification of FIG. 3, and the control 15 is fixed to the side surface of the ceiling case 16. According to this modification, since the side wall 2 is interposed between the control box 15 and the working chamber 1,
It is possible to effectively prevent the flammable gas generated in the working chamber 1 from entering the control box 15.

Further, in the third modification and the fourth modification, when the height of the work chamber 1 is high, an operation switch may be provided on the lower surface of the control box 15, or the operation switch may be a pull switch. Good.

A workbench 34 is disposed at the bottom of the work chamber 1, the inside of the workbench 34 is formed in a box shape, and the equipment used for the work in the work chamber 1 is installed at the bottom 34b.

In this embodiment, a spinner device 11 is installed as a device.

The spinner device 11 installed in the lower part of the work chamber 1 has an exhaust punching plate 20 on the floor so that the combustible gas 12 having a larger specific gravity than the air generated thereby can be efficiently exhausted and prevented from flowing out of the room. It is used so that the portion where the combustible gas 12 is generated falls close to the punching plate 20.

As shown in FIG. 10, the exhaust punching plate 20 is provided with a square hole 20a for dropping and installing the device 11 in a substantially central portion, and the air curtain blowing portion 19b of the blowing punching plate 19 is provided on the front side. Suction hole 2 that forms an air curtain corresponding to
0b is formed. A suction hole 20c for balancing the air flow is formed on the back side. In this embodiment, in order to enhance the effect of the air curtain, the opening ratio of the suction holes 20b on the front side is made larger than the opening ratio of the suction holes 20c on the rear side.
In order to effectively suck the combustible gas generated from the spinner device 11, a punching portion 20d may be provided around the spinner device 11 as shown in FIG.

The inside of the box-shaped workbench 34 communicates with an exhaust duct 13 provided on the back surface as an exhaust unit. The exhaust duct 13 communicates with the inside of the work table 34 via the connecting portion 13a, and the differential pressure detecting portion 27 and the temperature sensor 28 are provided inside. In the present embodiment, the temperature sensor 28 is provided on the upstream side of the differential pressure detection unit 27, and is configured to be able to quickly detect the temperature rise in the workbench. The exhaust duct 13 has an exhaust damper 22 as a fire damper inside.

The exhaust damper 22 in the exhaust duct 13 has an air volume adjusting mechanism to balance the supply air amount of the supply air purification unit 18 and the exhaust air amount from the building, and through the signal path 23b when the fire extinguisher 23 is activated. A mechanism that can be fully closed is provided in conjunction with the fire extinguisher 23.

The exhaust duct 13 is connected to an exhaust system (not shown) of the building, and a fan (not shown) provided in the exhaust system.
Thus, the air in the work chamber 1 is sucked and exhausted. Workbench
A leg 32 is provided below the 34, and the caster 8 is attached to the leg 32 so that the cleaning workbench can be moved at the time of carrying in and installing. Further, an adjuster 42 is attached to the leg 32 so that the cleaning workbench can be stably installed on the floor surface during installation. A fire extinguisher 23 is provided on the inner surface of the leg 32,
When a fire occurs in the work chamber 1, it is controlled by the control unit 44 of the fire extinguisher provided in the control box 15 so that the fire extinguishing agent is injected from the fire extinguishing nozzle 24 into the work chamber 1 through the pipe 23a.

As shown in FIG. 12 in the present embodiment, the leg portion 32 is formed by assembling the air purifying portion 18, the middle case 33, the workbench 34, and the leg 32 due to the can-making tolerance, the assembly tolerance and the like of the above-mentioned parts. In order to prevent a time-consuming alignment of the end faces, the leg end faces are retracted inward from the end faces of the workbench 34 and the middle case 33 to improve the assemblability.

The front door 4 of the work chamber 1 has one set of each as shown in FIGS. 13 and 14 in order to prevent inflow and outflow of air inside and outside the work chamber when the front surface of the work chamber 1 is fully opened. Inside door
As a four-sliding door type consisting of 4a and outer door 4b, even if the front door 4 is fully opened, it is made smaller than the total area of the front surface of the working chamber 1. Further, in this embodiment, the door 4 is configured as a sliding door using a sash so that the opening / closing operation can be easily performed. FIG. 13 shows the front door 4 fully closed, and FIG. 14 shows the front door 4 fully open. Further, in order to enhance the air curtain effect and prevent the inflow and outflow of air, a transparent hanging wall 21 is provided between the front door 4 and the blowout punching plate 19.

Next, the safety mechanism in this embodiment is shown in FIGS.
It will be described with reference to the drawings.

In the disaster-prevention-type clean workbench according to the present embodiment, safety measures for reducing the exhaust amount and safety measures for the occurrence of fire are taken.

As a safety measure against the reduction of displacement, see Figs. 15-18.
As shown in the figure, when the exhaust volume decreases below the reference value, the differential pressure detection unit 27 provided in the connection portion 13a of the exhaust duct 13 detects an abnormal differential pressure, and the differential pressure switch in the operation circuit 46 is The alarm is activated and the alarm buzzer 48 and the error indicator lamp 50 notify the operator of the abnormality. The differential pressure detector 27 and the operation circuit 46 are connected by a signal path 46a.

When a differential pressure abnormality occurs, the air supply fan 7 may be stopped in addition to the abnormality notification by the alarm buzzer 48 and the abnormality indicator lamp 50, as shown in the flow chart of FIG.

As a result, when the exhaust volume becomes small, the supply / exhaust volume is out of balance, and the combustible gas 12 generated in the work chamber 1
It can be prevented from flowing out of the room.

Further, in order to maintain the balance of the supply / exhaust flow when the door 4 is opened, a position sensor is provided on the upper part of the front door 4 as shown in FIG.
As shown in the flow chart of FIG. 18, when the front door 4 is opened, the position sensor 39 detects the door open state and transmits a signal to the operation circuit 46 via the signal line 46b. Rotation speed control is performed to reduce the supply air volume. As a result, the flammable gas 12 in the work chamber 1 is prevented from flowing out of the room and the operator is warned by the indicator lamp 52 to open the front door 4.

In FIG. 15, reference numeral 46c is a connection line for supplying electric power controlled by the operation circuit 46 to the fan 7.

In the present embodiment, the differential pressure detection unit 27 converts the differential pressure into an electric signal and transmits the electric signal to the operation circuit 46 via the signal path 46a constituted by an electric wire, and the contactor which operates based on this signal is operated as a differential pressure signal. Although a switch is used, a switch having a contact that is mechanically turned on / off by air pressure is used as the differential pressure switch, and the air pressure from the differential pressure detection unit 27 is applied to this switch via the signal path 46a formed by the tube. You may make it guide and operate.

Further, in this embodiment, as the door position sensor 39,
Limit switches, lead switches, or photoelectric switches are used.

As a safety measure against the occurrence of a fire, as shown in FIGS. 19 to 21, when a fire occurs in the work room 1, the temperature sensor 28 provided in the connecting portion 13a of the exhaust duct 13 causes a temperature abnormality. Is detected, the fan 7 is stopped so that the flame is not emitted to the outside of the room, and the fire extinguisher is activated.
Discharge to the inside to extinguish the fire in the room. When a fire occurs, the control unit 44 of the fire extinguisher controls the temperature sensor 28 via the signal line 44c.
When the signal from the fire extinguishing agent container is transmitted to the operation circuit 46, the signal for stopping the fan 7 is transmitted to stop the fan 7 and the extinguishant cylinder which is the extinguishant container provided in the fire extinguisher 23 through the signal line 44d. The control valve 58 provided at 54 is controlled to open to inject the extinguishant into the working chamber 1. In addition, in this embodiment, an interlocking mechanism that fully closes the exhaust damper 22 is provided to prevent smoke and fire in other ducts due to fire.

The fully closing mechanism of the exhaust damper 22 in the present embodiment is performed by the gas pressure of the pressure gas filled in the pressure gas cylinder 56 provided in the fire extinguisher 23 at the time of power failure.

The control unit 44 of the fire extinguisher opens the control valve 58 of the extinguishant cylinder 54 via the signal line 44d when a fire occurs, and the second control valve provided in the pressure gas cylinder 56 which is a pressure gas container.
Control to open 59. The pressure of the pressure gas filled in the pressure gas cylinder 56 is the signal path 23 formed by the tube.
It is transmitted to the drive mechanism 22b of the exhaust damper 22 via b, and the drive mechanism 22b fully closes the blades 22a of the damper by this pressure.
Although FIG. 19 shows a single blade 22a of the damper, the number of blades is not limited to this, and it is also possible to use a plurality of blades that are interlocked with each other by a link or the like. Further, in the present embodiment, the damper was driven by gas pressure in consideration of the power failure, but it may be electrically closed when the emergency power source or the like can be secured.

In addition, a temperature fuse (not shown) is provided in the damper 22 and the damper is fully closed even when the temperature fuse is melted by heat, so that the function of the fail-self can be provided and safety is improved. improves.

In the present embodiment, the control unit 44 of the fire extinguisher releases the fire extinguishing agent and gives an alarm by the alarm buzzer 44a and an indication by turning on the abnormality indicator lamp 44b, as shown in the flow chart of FIG. When a plurality of such disaster prevention type cleaning work benches are used side by side as shown in Fig. 21, the control unit 44 generates an emergency signal when the fire extinguisher is activated, and this signal is sent to another adjacent disaster prevention type cleaning workbench. It may be transmitted to the workbench so that the air supply fan 7 of each workbench is stopped or the fire extinguishing agent is injected. In the present embodiment, the occurrence of a fire is judged by the temperature in the exhaust duct, but the temperature in the working chamber may be detected, or light, smoke, etc. other than the temperature may be detected. , And these may be combined with conditional conditions such as AND and OR. Further, in order to transmit the fire occurrence to another workbench, the alarm buzzer may have a special frequency or waveform, and the fire occurrence may be detected by detecting this frequency or waveform.

In the above embodiment, the control unit 44 of the fire extinguisher can operate the fire extinguisher even during a power failure by providing a back-up power supply with a rechargeable battery.

Further, the control unit 44 and the operation circuit 46 of the fire extinguisher may be composed of a sequence circuit using a relay, or may be composed of a logic circuit using a microcomputer.

The position of the fire-extinguishing nozzle 24 is preferably a position where the fire-extinguishing agent can be effectively injected to the spinner device 11 which is likely to become the ignition point. In addition, the turbulent flow formed downstream of the fire extinguishing nozzle 24 prevents the combustible gas from being carried to the upstream side of the air flow in the working chamber 1 and diffusing into the working chamber 1 as well.
It is desirable that it be mounted at a proper distance below the spinner device and kept at a proper distance.

A second embodiment of the present invention will be described with reference to FIGS.

In this embodiment, two spinner devices 11 can be stored in the working chamber 1.

In this embodiment, as shown in FIG. 23, a fan 7, a chamber 26, a high performance filter 9 and a pressure chamber 31 are provided in the air supply / purification unit 18, and a prefilter 6 and a terminal box 60 are provided on the ceiling.
And are provided. Note that 7a is a vibration-proof rubber. A control box 15 is provided on the front surface of the supply air purification unit 18, and an operation panel 25 is detachably attached to the front surface of the control box so as to be flush with the front surface of the supply air purification unit. An operation circuit 46 and a control unit 44 of the fire extinguisher are provided inside the control box 15. The control box 15 is configured so that the electrical components stored therein can be isolated from the air inside the work chamber 1. As shown in FIG. 22, a differential pressure gauge 68 for mechanically displaying the operating state of the fan 7 is provided above the operation panel 25 on the front surface of the air supply / purification unit 18, and the operation panel 25 has an earth leakage breaker 66. , Control unit 44 of the fire extinguisher, alarm buzzer 48 for notifying an abnormal differential pressure, power supply indicator 65,
A fan operation indicator lamp 62, a fan abnormality indicator lamp 64, a differential pressure abnormality indicator lamp 50, a fan operation switch 71, a fan stop switch 72, an illumination switch 73, an illumination switch 74, and a buzzer stop switch 75 are provided. Alarm buzzer in case of fire 44
The fire occurrence indicator lamp 44b is provided in the control unit 44.

Air circulation holes 25a are provided at the upper and lower ends of the operation panel 25, and the air in the clean room in which the disaster prevention type clean workbench of this embodiment is installed is allowed to flow through the control box 15 through the air circulation holes 25a. And improve the heat dissipation of the built-in electrical products.

In this embodiment, the position of the operation panel 25 becomes higher,
For example, since the height from the floor surface to the lower end of the operation panel is about 1500 mm, the fan operation switch 71, the fan stop switch 72, the light on switch 73, the light off switch 74, etc. An operability is improved by arranging a display lamp such as an indicator light which is not required to be touched above the operation panel 25. Further, since the indicator lamp is arranged at a high position, it is hardly affected by an obstacle placed in front of the workbench, and the state of the indicator lamp can be easily confirmed even from a distance.

The electrical connection diagram of the disaster prevention type cleaning workbench in this embodiment is shown in FIGS. 25 and 26. FIG. 25 is a connection diagram showing the entire electric system, and FIG. 26 is a connection diagram showing the electric system of the fire extinguisher. In Fig. 25, ELB is an earth leakage breaker 66, FL is an illumination lamp.
14, FM is fan 7, PL1 to PL4 are power indicator light 65, fan error indicator light 64, fan operation indicator light 62, differential pressure error indicator light 5
0, PB1 to PB5 are each a fan operation switch 71, a fan stop switch 72, a light-on switch 73, a light-off switch 7
4, Buzzer stop switch 75, 49-1 is thermal relay, 52-
1 to 52-4 are electromagnetic contactors, T is a timer, 63 is a differential pressure switch, BZ is a buzzer 48, UNIT2 is a control unit 44, T1 of the fire extinguisher.
~ T14, T25, T26 respectively show connection terminals. Also, the 26th
In the figure, UNIT2 is a control unit 44 of the fire extinguisher, BOX is a fire extinguisher storage box 23, TH is a temperature sensor 28, and THC1 and THC2 are signal generation circuits that generate signals when the output of the temperature sensor exceeds a reference value. Is. In this embodiment, the signal generating circuit is configured to generate a signal at about 70 ° C. so that the fire can be extinguished quickly.

The working chamber 1 formed below the air purification unit 18 has an opening 5 on the front surface, side walls 2 on both side surfaces, and a rear wall 3 on the back surface, a blow punching plate 19 on the upper surface, and exhaust punching on the lower surface. Each plate 20 is provided. The opening 5 has an outer door
Front door 4 composed of a sliding door composed of 4a and inner door 4b
Is provided so that it can be opened and closed, and the inner door 4b and blowout punching plate 19
A hanging wall 21 is provided between and.

The blowout punching plate 19 has an air curtain blowout port 19 on the front side.
a is formed, and when the door 4 is opened, the inside and outside of the work chamber 1 are isolated. The rear wall 3 is provided with an embedded illuminating lamp 14 using an explosion-proof type device in consideration of safety against combustible gas generated from the spinner device 11 installed in the working room 1, and below the illuminating lamp 14. Is provided with a fire extinguishing nozzle 24 facing the spinner device 11. In this embodiment, the spinner device 11
A pipe 80 that penetrates the workbench 34 is provided between the spinner device 11 and the rear wall 3 so that local exhaust of the air can be removed. In this embodiment, the pipe 23a from the fire extinguishing agent container 54 to the fire extinguishing nozzle 24 is branched in the middle of the two nozzles as shown in FIG. 24 so that the distance from the branching point to both nozzles is equal. There is.

In the connecting portion 13a of the exhaust portion 13 that communicates with the lower portion of the workbench 34,
As the temperature sensor 28, two thermistors are arranged near the respective spinners. The output of each thermistor is generated by the signal generation circuits THC1 and THC2 that generate a signal when it exceeds the reference value.
The fire occurrence detection signal is transmitted to the control unit 44 of the fire extinguisher via the signal path 44c.

In this embodiment, a low voltage of about 5 V is applied to the thermistor via a resistance of several KΩ, and a current of about 0.1 mA is set to flow. Therefore, even if the thermistor is short-circuited, sparks can be prevented from occurring.

The control unit 44 activates the fire extinguisher as a fire occurrence when at least one of THC1 and THC2 is output. In this embodiment, the differential pressure abnormality is detected by using the differential pressure switch 63 that mechanically turns the contacts ON and OFF by the air pressure provided in the operation circuit 46, and the differential pressure detection configured by the differential pressure switch 63 and the pipe joint is performed. A signal path 46a formed by a tube is connected to the section 27.

A fire extinguisher cylinder 54 is attached to the fire extinguisher 23 arranged on the work table 34.
And a pressure gas cylinder 56 for closing the exhaust damper are stored, and the extinguishant cylinder 54 and the pressure gas cylinder 56 have a control valve 58 and a second control valve 59 driven by signals from the control unit 44, respectively. Is provided. Extinguishant cylinder 54
Is filled with a halide extinguishing agent commonly called “halon gas”, and the pressure gas cylinder 56 is filled with carbon dioxide as a pressure gas. The fire extinguisher 23 has a door that can be opened and closed on the front surface, and in the event of a power failure or the like, the handle 23c of the door can be operated to open the door, and the fire extinguishing agent can be sprayed manually.

In this embodiment, the exhaust damper 22 driven by the pressure gas is driven by the drive mechanism 22b and is opened / closed by the drive mechanism 22b.
The blade 22a is composed of a single blade, and the damper is fully closed in conjunction with the injection of the extinguishing agent. The damper 22 is also provided with a temperature fuse (not shown) so that the damper can be fully closed even if the fire extinguisher does not operate.

According to this embodiment, since the pressure gas exclusively used for driving the damper is used, the gas pressure of the extinguishant can be entirely used for injecting the extinguishant at the start of extinguishing, and the extinguishing can be effectively performed. In addition, by separating the gas for extinguishing the fire and the pressure gas for opening and closing the damper, the cylinder can be downsized and the device can be downsized.

In this embodiment, in particular, the wind velocity of the air flow in the front of the work chamber 1 is increased to form the air curtain, but the present invention is not limited to this as long as it can separate the inside and outside of the work space by the air flow. Working chamber 1
You may make it flow to the front of.

According to the above-described embodiment, even if the electrical components used in the control box are not explosion-proof, the safety can be ensured and the device can be downsized.

〔The invention's effect〕

According to the present invention, the inside and outside of the work space is isolated by the air flow formed by the isolated air flow forming means, and the electrical component storage box is provided upstream from the device that emits a flammable gas with respect to the work space. As a result, it is possible to prevent the flammable gas from being ignited by electric sparks, and it is possible to obtain a highly safe disaster prevention type cleaning workbench. Further, according to the present invention, a fire extinguishing device is provided on a disaster prevention cleaning workbench, and the fire extinguishing device is divided into a control unit equipped with a display means for operating state and a fire extinguishant container part, and the control unit is an electrical equipment storage box. Since the fire extinguishant container is installed in the lower part of the workbench and the control part is prevented from being damaged in the event of a fire, and the piping from the fire extinguisher container to the fire extinguishing nozzle can be shortened It is possible to obtain a highly safe disaster-prevention type clean workbench that can reduce the pressure loss at the time and can surely extinguish a fire.

[Brief description of drawings]

FIG. 1 is a side sectional view showing the structure of a disaster prevention type cleaning workbench according to the first embodiment of the present invention, and FIG. 2 is a perspective view showing an air supply purifying unit and an electrical equipment storage box according to the first embodiment of the present invention. Figure, third
FIG. 4 is a side cross-sectional view showing a state in which an electric wire is pulled out from an electrical equipment storage box according to the first embodiment of the present invention, FIG. 4 is a perspective view showing a mounted state of a connector, and FIG. 5 is a view showing a first embodiment of the present invention. Sectional side view showing a first modification of the electrical component storage box, sixth
FIG. 7 and FIG. 7 are side sectional views showing a first modified example and a second modified example of the air supply / purification unit in the first embodiment of the present invention, and FIGS. 8 and 9 are respectively sectional views of the present invention. FIG. 10 is a perspective view showing a third modified example and a fourth modified example of the supply air purification unit in the first embodiment, and FIG. 10 is a plan view showing the states of the exhaust punching plate and the spinner device in the first embodiment of the present invention. , 11th
FIG. 12 is a plan view showing a modification of the exhaust punching plate, and FIG. 12 is a perspective view showing the relationship between the workbench, the middle case, and the legs of the disaster prevention type clean workbench according to the first embodiment of the present invention,
13 and 14 are front views showing a closed state and an open state of the front door of the disaster prevention type clean work table in the first embodiment of the present invention, and FIGS. 15 and 16 are respectively the first view of the present invention. FIG. 17 is a side sectional view showing the differential pressure abnormality detection system of the disaster prevention type clean workbench in the embodiment, and a flow chart showing the operation of the differential pressure abnormality detection system, and FIG. 17 shows a state in which a door position sensor is attached in this embodiment. The front view shown in FIG. 18, FIG. 18 is a flow chart showing an example of the operation by the door position sensor, and FIGS. 19 and 20 are respectively a side sectional view showing the fire extinguishing system and the operation of the fire extinguishing system in the first embodiment of the present invention. The flow chart shown in FIG. 21 is a front view showing a state in which a plurality of disaster prevention type cleaning work benches are used side by side in the first embodiment of the present invention, and FIG. 22 is a disaster prevention measure in the second embodiment of the present invention. Fig. 23 is a front view showing the appearance of the cleaning bench FIG. 24 is a sectional side view showing the structure of a disaster prevention type cleaning workbench according to the second embodiment of the present invention, and FIG. 24 is a sectional view showing a part of the work chamber bottom surface of the disaster prevention type cleaning workbench according to the second embodiment of the present invention. Fig. 25, Fig. 25 and Fig. 26 are respectively the electric connection diagram of the whole of the disaster prevention type cleaning workbench and the electric connection diagram of the fire extinguisher in Fig. 27 and Fig. 28, respectively. It is a sectional side view which shows the case where the front door of the conventional cleaning workbench is half opened, and the case where it is fully opened. 1: Working space, 5: Opening part, 11: Equipment, 13, 13a: Exhaust part, 15:
Electrical equipment storage box, 18: Air purification means, 19,19a, 20,20a, 20b, 2
0c, 20d: Isolation air flow forming means, 22: Fire damper, 22b: Drive device, 23, 44: Fire extinguishing device, 24: Fire extinguishing nozzle, 25a: Air circulation hole, 28: Fire detecting means, 44: Control unit, 44a, 44b: display means,
54: Fire extinguisher container, 56: Pressure gas container, 58: Control valve, 59: Second
Control valve

Claims (3)

[Claims] 1. A working space having an opening on the front surface for storing a device handling a combustible substance therein, an air purifying means arranged above the working space, and a working space below the working space. In addition, in the disaster-prevention-type clean work table including an exhaust part for exhausting air in the working space, an isolated air flow forming means and an electrical equipment storage box are provided, and the isolated air flow forming means is located above the working space. The electrical equipment storage box is disposed upstream of the device with respect to the air flow formed by the isolated air flow forming means, separated from the work space, and the air outside the work space is A disaster-prevention-type clean workbench characterized in that an air circulation hole is formed so as to flow through the electrical equipment storage box. 2. A working space having an opening on the front surface and storing a device for handling a combustible substance therein, an air purifying means arranged above the working space, and a working space below the working space. In addition, in the disaster-prevention-type clean work table, which is provided with an exhaust unit for exhausting the air in the working space and an isolation airflow forming unit for preventing the air in the working space from flowing out from the opening. An electrical equipment storage box, a fire extinguishing device, and a prevention damper, wherein the electrical equipment storage box is disposed upstream of the device with respect to the air flow formed by the isolated air flow forming means, and is isolated from the work space, The fire extinguisher is arranged in the vicinity of the device in the extinguishant container arranged below the work table, and in the work space, and in the vicinity of the device and a nozzle connected to the extinguishant container via a control valve. And a fire detection means arranged in the The control unit controls the control valve to release the fire extinguishing agent based on the signal of the detection unit, and the control unit is provided with the operation state display unit and is stored in the electrical equipment storage box, and the fire protection damper is A disaster-prevention-type cleaning workbench which is provided in the exhaust part and is configured to close the exhaust part in conjunction with the operation of the fire extinguisher. 3. The fire extinguisher device comprises a pressure gas container, the pressure gas container is connected to a drive device of the fire protection damper through a second control valve, and the control unit is configured to operate the first extinguishant when the fire extinguishing agent is released. The disaster prevention type cleaning workbench according to claim 2, characterized in that it is configured to control the second control valve to release the gas in the pressure gas container to close the fire damper. .