M272608 八 新型說明： 【新型所屬之技術領域】 本新型涉及一種電極間距微調系統以及使用該系統之電弧放電設備。 【先前技術】 奈米石厌管係一種新型碳材料，由日本研究人員iijima于丨991年發現， 4參見’’Helical microtubules of graphitic carbon”，S Iijima，NatureM272608 VIII New type description: [Technical field to which the new type belongs] This new type relates to an electrode pitch fine-tuning system and an arc discharge device using the system. [Previous technology] A new type of carbon material for nanostone anaerobic system was discovered by Japanese researcher iijima in 991, 4 See ‘’ Helical microtubules of graphitic carbon ’, S Iijima, Nature
Vol. 354，P56 (1991)。奈米碳管以其優良之導電性能，完美之晶格結構， 奈米尺度之尖端等特性而成爲極具希望之場發射陰極材料，於場發射平面 顯示器件^真m大功率微波器料顧躺有著廣闊之前景。 奈米碳管之製備方法主要包括脈衝雷射蒸發法、化學氣相沈積法及電 弧放電法。脈衝雷射蒸發法係利用脈衝雷射之高能量蒸發含有金屬催化劑 之石墨減得奈米碳管；化學氣相沈積法個奈米尺度之過渡金屬或其 ^物作為催化劑’於相對低之溫度下熱解含碳的聽體來製備奈米碳管； 二!ί、放電箱、细純石墨或摻有金屬催化劑的石墨電極電弧放電獲得奈米 、+二祕放電法係製備奈米礙管材料之—種重要方法，因這種方 法ι備^奈米碳管石墨化程度高，物理特性最好。 棒電3隙少兩對應之碳棒電極，以及用於控制兩碳 ^^Γ4ηηη°ρ °裝置電弧放電過程中，陽極頂端一部分碳原子於 以上）下被絲汽化以及錯極產生大«子之絲下，產生 及ΐ性碳粒子並進入電弧放《域，各種粒子之間重複發 内壁上沈積;碳粒子，並於陽極、陰極及電弧放電設備 弧放電過程^不斷、、肖#不米碳管或富勒稀等。故，陽極之碳棒於電 =τ將不㈣耗，兩電極之_將不斷變化。 製程參數弧碳管之實驗中，電壓及氣體壓力係最重要之兩項 之電壓仵狀1 最烟素係兩電極糊之距離。驗電弧放電 電圍内，需通過位移調_置於電弧放電過程中調節兩Vol. 354, P56 (1991). Nano carbon tubes have become very promising field emission cathode materials due to their excellent electrical conductivity, perfect lattice structure, and nanometer-scale tips. They are used in field emission planar display devices. Lying has a wide foreground. The preparation methods of carbon nanotubes mainly include pulse laser evaporation method, chemical vapor deposition method and arc discharge method. Pulse laser evaporation method uses the high energy of pulse laser to evaporate graphite containing metal catalysts to reduce carbon nanotubes; chemical vapor deposition method uses nanometer-scale transition metals or their materials as catalysts at relatively low temperatures Carbon nanotubes are pyrolyzed to prepare nanometer carbon tubes; II. Arc discharge by using a discharge box, fine pure graphite, or a graphite electrode doped with a metal catalyst to obtain nanometers, + nanosecondary discharge method to prepare nanometer tubes Material—an important method. Because of this method, carbon nanotubes have a high degree of graphitization and the best physical properties. Carbon rod electrode with two rods with less 3 gaps, and used to control the two carbons ^^ Γ4ηηη ° ρ ° During the arc discharge of the device, a part of the carbon atoms at the top of the anode is vaporized by the wire and the polarities are generated. Under the wire, normal carbon particles are generated and enter the arc discharge field, and various particles are repeatedly deposited on the inner wall of the hair; carbon particles are discharged during the arc discharge in the anode, cathode, and arc discharge equipment. Tube or fullerene etc. Therefore, the carbon rod of the anode will not consume, and the _ of the two electrodes will change continuously. In the process parameter arc carbon tube experiment, the voltage and gas pressure are the two most important voltages. 1 The most nicotin is the distance between the two electrode pastes. Check the arc discharge Within the electrical fence, you need to adjust the two
明參閱苐一圖，2003生9 B 10 X 利中揭露-種驗放電 日^告之第G222449G·5射國大陸專 笔叹備10，其包括一真空室1，設置在該真空室1内 M272608 ° ^狀之陰極5。其中，該陽極4由-陽極支架2及與該陽極 陽極移動臂3所支撐；該陰極5由一陰極支架6支撐，該 心士 Γ於雜極5之上方，且該陽極4之下端與盤狀之陰極5相對應。 歧y及陰極支架6之下端分職置有陽極轉動手柄9及陰極轉動手 4丙料通過手動調節陽轉動手柄9或陰轉動手柄8來控制該陽極 ^猶極5之間距，使電弧放電保持之電壓。惟，該陽極4與該陰極 間斷變化，因此必須由人工監視電縣，並稍財咖周碳棒 二，〜時貫驗時縣達數十分鐘，故，該設備不繼操作人員之實際操 ，且谷易出現奈米碳管生長不均勻之問題。 、’、Please refer to the first picture, 2003, 9 B 10 X, which was revealed in the middle of the day-a kind of discharge test date ^ G222449G · 5 Sheguo continent special note 10, which includes a vacuum chamber 1, set in the vacuum chamber 1 M272608 ° ^ shaped cathode 5. Wherein, the anode 4 is supported by the anode support 2 and the anode anode moving arm 3; the cathode 5 is supported by a cathode support 6, the arrogant Γ is above the heteropole 5, and the lower end of the anode 4 and the disk The shaped cathode 5 corresponds. The lower end of the cathode and cathode support 6 is provided with an anode rotation handle 9 and a cathode rotation handle 4 and the material is controlled by manually adjusting the anode rotation handle 9 or the female rotation handle 8 to maintain the arc 5 and the anode 5 to maintain the arc discharge. The voltage. However, the anode 4 and the cathode change discontinuously. Therefore, the electric county must be monitored manually, and the carbon rods can be used for two weeks. The county can be tested for dozens of minutes. Therefore, the equipment does not follow the actual operation of the operator. Moreover, Gu Yi has the problem of uneven growth of carbon nanotubes. , ',
另，先狀電弧放電設賴雜麟兩碳棒電極任—端連接手動之位 移=節設^用於控制兩電極之間之電壓。該設備同樣出現需長時間手動 才呆作，且谷易出現奈米碳管生長不均勻之問題。 有H於此，提供-種可自鱗確控制雜間距，使電贼電之電壓保 夺穩定之電極間距微調系統及使用該系統之電弧放電設備實為必要。 【新型内容】 ’使電孤放電之 ^本新型之目的在於提供一種可自動準確控制電極間距 電壓保持穩定之電極間距微調系統。In addition, the pre-arc arc discharge is based on the position of the two carbon rod electrodes at the end of the joint. The manual shift = joint setting ^ is used to control the voltage between the two electrodes. This equipment also takes a long time to work manually, and Gu Yi suffers from the problem of uneven carbon nanotube growth. Here, it is necessary to provide a fine-tuning system for electrode spacing that can control the miscellaneous spacing from the scales to ensure the stability of the voltage of the thief and the arc discharge equipment using the system. [What's new] ‘Electrically isolated discharge ^ The purpose of this new model is to provide an electrode spacing fine-tuning system that can automatically and accurately control the electrode spacing and maintain a stable voltage.
本新型之另-目的在於提供—種可自鱗確控㈣極間距，使電弧放 電之電壓保持穩定之電弧放電設備。 為實現本難目的，本新型提供—種雜_微猶、統，其包括： 兩相對應之電極，其中至少一電極可移動； 一用於測量該兩電極間隙電壓差值之電壓感測器； 一與該電壓細H相連接之控繼，將電壓減轉換成距離訊號； 至少-與雛制H相連接之驅練置，其與該可鶴·相連接，用 於控制該可飾電錄據該距雜號鑛減之距離。 本新5L之驅動裝置包括一飼服馬達及一與該飼服馬達之齒輪機構連接 之螺桿，該螺桿與該可移動電極相連接。 為實現本新型之另-目的，本新型提供一種電弧放電設備，其包括： 一反應器； ^ 兩設於該反應H畴趣之電極，其頂端相互對應，且其巾至少一電 6 M272608 極可移動； 一電源連接該兩電極，用於使該兩電極之間產生電弧放電； 一用於測量該兩電極間隙電壓差值之電壓感測器； 一與該電壓感測器相連接之控制器，用於將電壓訊號轉換成距離訊號； 至>、與0亥控制為相連接之驅動裝置，其與該可移動電極相連接，用 於控制違可移動電極根據該距離訊號移動相應之距離。 與先前技術相較，本新型之電極間距微調系統通過即時監控該兩電極 間隙，壓（製程電壓)值，回鑛於控制器，然後下指令給驅動裝置(祠服馬達 及螺桿）進行兩電極間距之微調，用於控制該間隙電壓於一定值。故，本新 φ 型之電極間距微調系統能即時控制兩電極間隙電壓於一定值，使兩電極之 電弧放電敎。制該彡統之電弧《設備自動練度高，有利於提高太 米碳管產品品質。 °不 【實施方式】 下面將結合附圖及實施例對本新型作進一步之詳細說明。 明參閱第二圖，本新型第一實施例之電極間距微調系統2〇，其主要包 括/兩相對應之陽極23及陰極24，一電壓感測器27，一控制器28，一驅 動裝置(未標示），本實施例該驅動裝置包括一飼服馬達(Serv〇M〇t〇r)2W 一滾珠螺桿(Ball Screw)(圖未示）。 鲁 忒陽極23及陰極24設於一反應器21内部，該陽極23與位於反應器 21底^之支撐體25相連接，該陰極24與設於該反應器21頂部之支撐體 26相連接。该兩電極23，24分別與支撐體25，26電絕緣。本實施例中該 陰極24及支撐體26可移動，該陽極23及支撐體25固定於反應器21。該 兩電極23，24皆為碳棒電極，其間距保持適當距離。 «亥陰極24與陽極23外接-電源（圖未示），用於提供一固定電流使該 兩電極23，24產生電孤放電，本實施例該電源之工作電流為7〇a。 δ亥電壓感測器27與該陰極24及陽極23相連接，其用於測量該兩電極 =24 _之電壓，該電壓即該兩電極23，24因產生電弧放電而形成通路， 亥兩電極23 ’ 24之間產生之電壓差，亦稱製程電壓。該電賊測器27 遷具有發出所測電壓差值之功能。 該控制器28與該電壓感測器27相連接，其用於將電壓感測器27發出 7 M272608 之笔壓5虎轉換成距離訊號。 28M J 28,,^^ «進订纽，錢通職舰馬達内敎絲機構（圖未示 =服馬達29除該齒輪機構外還包括一直流馬達（圖未示）、一反饋可調恭 位為（圖未示）及一電子控制板（圖未示）。 。电 ^滾珠螺桿（圖未示)與該舰馬達29之齒輪機構相連接， 二Λ)與该支撐體26相連接，用於移動與該支擇體26連接之該陰極24了 使其與陽極23保持適當距離。 衣 ，極間距微調系統2〇之工作原理係通過麵感· 27即時監 ，織下指令給伺服馬達29 _兩_3， μ間距之_，使该兩電極23，24間隙之電壓保持一定值。 下面結合第三Β及第_進—步詳細說_ 未不)之連接結構及整個電極間距微調系統2〇之工作流程。及滚珠螺杯(圖 292；™;r^；T"^ 291 r 細配套之螺楊^:桿本本=上之移t 私301亦毛生轉動，韻桿3〇之轉動能使該螺母綱向該陽極α方 =，並帶動該支撐體26及該陰極24向該陽極23方 2 極23之間距鱗適當轉。 使雜24與 如第四圖所示，該電極間距微調系統20之工作流程為· 到irrt兩電極23，24間隙之電壓變化差值。當電孤放電進行 I疋時間’兩電極23 ’ 24之間距隨著電極消耗而變大， 之電壓亦隨著改變。通過電顯測裝置27測量電 24 測裝置f將測得之電壓變化差值Δν傳送給該控彻28。電壓感 △ d之門之拖瞀_ t制 有—實驗數據庫’用於存儲△讀 Ϊ=:控制器28將所得之值傳送給該伺服馬達$ ，5服馬達29及滚珠螺桿將電極移動Ad。由於伺服馬達罚 M272608 ，通過翁輪機構292與滾珠螺桿來移動電極，因此直流馬達291之輸出與 貝際電極移動之距離存在一固定比例，故需先算出馬達實際旋轉之角度， ，，齒輪比(Gear Rati咖滾珠螺桿比(Ball Seale)來進行換算， 最後實現實際電極移動之距離為Ad。 、# 上述二工作流程，在整個電弧放電過程中，可自動循環完成。 可以理解的係，本實施例之控制器28及飼服馬達29必須進行實驗前 之各種參數設定。本實施例之滾珠螺桿亦可採用一般之螺桿。本新型之電 ，間距m统2g之驅動裝置除彳概馬達及螺桿外，還可採用其他設備， 只要其能滿足將距離訊號轉換成實際電極位移之條件。The other purpose of the new model is to provide an arc discharge device which can control the pole spacing from the scales and keep the voltage of the arc discharge stable. In order to achieve this difficult objective, the present invention provides a kind of hybrid micro-system, which includes: two corresponding electrodes, at least one of which is movable; a voltage sensor for measuring the voltage difference between the two electrodes; ; A control relay connected to the voltage H, converts the voltage to a distance signal; at least-a driving device connected to the prototype H, which is connected to the crane, and is used to control the decoration Record the distance from the mined mine. The driving device of the new 5L includes a feeding motor and a screw connected to a gear mechanism of the feeding motor, and the screw is connected to the movable electrode. In order to achieve the other object of the present invention, the present invention provides an arc discharge device, which includes: a reactor; ^ two electrodes arranged in the reaction H domain, the tops of which correspond to each other, and the towel has at least one electric 6 M272608 electrode Movable; a power source connected to the two electrodes for generating an arc discharge between the two electrodes; a voltage sensor for measuring a voltage difference between the two electrodes; a control connected to the voltage sensor A device for converting a voltage signal into a distance signal; to > a driving device connected to the control device, which is connected to the movable electrode, and is used for controlling the movable electrode to move correspondingly according to the distance signal distance. Compared with the prior art, the new electrode pitch fine-tuning system monitors the gap between the two electrodes in real time, presses the value of (process voltage), returns it to the controller, and then issues a command to the drive device (civil service motor and screw) for two electrodes. The fine adjustment of the pitch is used to control the gap voltage to a certain value. Therefore, the new φ-type electrode pitch fine-tuning system can control the gap voltage between the two electrodes to a certain value in real time, so that the arc between the two electrodes can be discharged. The system of making the system "high degree of automatic training equipment is conducive to improving the quality of carbon nanotube products. ° [Embodiment] The present invention will be further described in detail below with reference to the drawings and embodiments. Referring to the second figure, the electrode pitch fine-tuning system 20 of the first embodiment of the new type mainly includes / two corresponding anodes 23 and cathodes 24, a voltage sensor 27, a controller 28, and a driving device ( (Not shown). In this embodiment, the driving device includes a feeding motor (ServoMotor) 2W and a ball screw (not shown). The anode 23 and the cathode 24 are provided inside a reactor 21, the anode 23 is connected to a support 25 located at the bottom of the reactor 21, and the cathode 24 is connected to a support 26 provided at the top of the reactor 21. The two electrodes 23, 24 are electrically insulated from the support bodies 25, 26, respectively. In this embodiment, the cathode 24 and the support body 26 are movable, and the anode 23 and the support body 25 are fixed to the reactor 21. The two electrodes 23 and 24 are both carbon rod electrodes, and the distance between them is kept at a proper distance. «The cathode 24 and the anode 23 are externally connected to a power source (not shown) for providing a fixed current to cause the two electrodes 23, 24 to generate an electrically isolated discharge. The working current of the power source in this embodiment is 70a. The δH voltage sensor 27 is connected to the cathode 24 and the anode 23, and is used to measure the voltage of the two electrodes = 24 °, which is the voltage between the two electrodes 23 and 24 to form a path due to the arc discharge. The two electrodes The voltage difference between 23 '24 is also called process voltage. The electronic thief detector 27 has a function of emitting a measured voltage difference. The controller 28 is connected to the voltage sensor 27, which is used to convert the pen pressure 5 tiger of 7 M272608 sent by the voltage sensor 27 into a distance signal. 28M J 28 ,, ^^ «Advance order, Qiantong's motor ship reeling mechanism (not shown = service motor 29) In addition to the gear mechanism, it also includes a DC motor (not shown), a feedback adjustable The position is (not shown) and an electronic control board (not shown). An electric ball screw (not shown) is connected to the gear mechanism of the ship motor 29, and 2) is connected to the support 26, It is used to move the cathode 24 connected to the selection body 26 so as to keep a proper distance from the anode 23. The working principle of the fine-pitch fine-tuning system 20 is based on the surface feel. 27 real-time monitoring, weave instructions to the servo motor 29 _two_3, μ pitch_, so that the voltage between the two electrodes 23, 24 maintain a certain value . In the following, the connection structure of the third B and the _ step-by-step detailed description of the connection structure and the entire electrode pitch fine-tuning system 20 is described. And ball screw cup (Fig. 292; ™; r ^; T " ^ 291 r Fine matching snails ^: rod book = shift of the upper t private 301 is also hairy rotation, the rotation of the rhyme rod 30 can make the nut class To the anode α square =, and to drive the support 26 and the cathode 24 to the anode 23 square 2 poles 23 to properly rotate the scales. As shown in the fourth figure, the impurity 24 and the electrode spacing fine-tuning system 20 work The flow is the difference between the voltage changes to the gap between the two electrodes 23 and 24 of the irrt. When the electric isolation discharge is performed for a period of time, the distance between the two electrodes 23 and 24 becomes larger as the electrodes are consumed, and the voltage also changes. The display device 27 measures the electricity 24 and the measurement device f sends the measured voltage change difference Δν to the control 28. The voltage sensor △ d is the door of the door _ t is made-the experimental database 'for storage △ reading Ϊ = : The controller 28 transmits the obtained value to the servo motor, the servo motor 29 and the ball screw move the electrode Ad. Since the servo motor is punished by M272608, the electrode is moved by the wheel mechanism 292 and the ball screw, so the DC motor 291 There is a fixed ratio of the distance between the output and the Bezier electrode movement, so you need to calculate the motor first The angle of rotation,, and the gear ratio (Gear Rati Ball Seale ratio) are used for conversion. Finally, the actual electrode movement distance is Ad.. # The above two workflows can be automatically performed during the entire arc discharge process. The cycle is completed. Understandably, the controller 28 and the feeding motor 29 of this embodiment must set various parameters before the experiment. The ball screw of this embodiment can also use a general screw. The new type of electricity, the distance m system In addition to the approximate motor and screw, the 2g drive can also use other equipment, as long as it can meet the conditions for converting the distance signal into the actual electrode displacement.
另，根據本新型之精神，本新型之電極間距微調系統除兩電極中一電 ，需固定，另-電極可移動之情況外，t然可採用該兩電極皆具有移動功 月b，此本新型之電極間距微調系統需相應作適當改變，如通過兩驅動裝 2该兩電極相連接，控㈣發送之距離峨可同時分兩份傳送給該兩驅 動裝置或將一份距離訊號輪流傳送給其中一驅動裝置。 Μ參閱第五®，本新型第二實施例提供—種制該電極間距微調系統 之電弧放電設備5G，包括：-密閉反應器5卜_位於該反應器51内之陰 極53,一與陰極53對應之陽極54，該兩電極53，54分別通過支撐體55， =固定於該反應器51兩_壁，其中，該支撐體55及陰極53能於反應器 内移動。該兩電極53，54 ^匕為石墨棒電極。一電源59設置於該反應器 外部，用於在該兩電極53，54之間提供—固定電流(观），使該兩電極 53 ’ 54之間產生穩定電弧放電。 ^〜电弧放電吕又備50還包括一電極間距微調系統，其包括：一用於測置 ，兩電極_電壓差值之電壓感測H 57，其分別連接該兩電極53，54;、一 =該«感測器57相連接之控· 58，其驗將訊號轉換成距離訊 與該控制器58相連接之驅動裝置56，其與該支撐體55相連接，用 ^進該陰極53。該驅動裝置56可採賴服馬達及螺桿結構，其具體連接 万式可參考上述實施例之電極間距微調系統2〇。 相2 ’本新型之電孤放電設備5〇還包括—真空栗64，其與該反應器51 接，降低反應H 51内之氣麵強；—供氣魏，用於提供工作氣 體(½氣體），其包括-氣罐6卜複數導氣管63及一闊門β2，該複 9 M272608 依次連接該氣罐6卜閥⑽及反應器5卜該閥n 62可開啟或關 閉V氣管63向該反應器51供氣。 使用時，需先由真空I 64將反應器51抽真空；通入工作氣體；啟動 ，源59使該兩電極53，54之間隙產生電孤放電；當電弧放電放應進行一定 日才間^製輯難發生變化，電觀靡57即時監控該製程職值，回饋於 U為58，域下指令給驅練置56之健馬達親桿結構進行 程電壓值保持一定值。 使衣 I以理解的係，本新型之修放電設備採狀兩相對應之電極皆具有 移，功I ’據此本新型之電極間距微猶統需相應作適當改變，如通過兩驅 動裝置與該兩雜相連接，控繼發送之距離峨可同時分 · 驅動裝置或將-份距離職輪流傳送給其巾—轉裝置。 兩In addition, according to the spirit of the new model, in addition to one of the two electrodes, the new electrode pitch fine-tuning system needs to be fixed and the electrode can be moved. However, both electrodes can be used to move the work b. The new electrode spacing fine-tuning system needs to be appropriately changed accordingly. For example, the two electrodes are connected by two drivers, and the distance sent by the controller can be sent to the two drivers at the same time or the distance signals are alternately transmitted to One of the driving devices. ΜRefer to Fifth®, the second embodiment of the new type provides an arc discharge device 5G for manufacturing the electrode pitch fine-tuning system, including:-a closed reactor 5-a cathode 53 located in the reactor 51, and a cathode 53 Corresponding to the anode 54, the two electrodes 53, 54 are respectively fixed to the two walls of the reactor 51 through the support 55, wherein the support 55 and the cathode 53 can move in the reactor. The two electrodes 53, 54 are graphite rod electrodes. A power source 59 is provided outside the reactor, and is used to provide a fixed current (view) between the two electrodes 53, 54 to cause a stable arc discharge between the two electrodes 53'54. ^ ~ The arc discharge Lu Youbei 50 also includes an electrode pitch fine-tuning system, which includes: a voltage sensing H 57 for measuring and setting the two electrodes_voltage difference, which are respectively connected to the two electrodes 53, 54; and one = the «Control 57 connected to sensor 57 converts the signal into a driving device 56 connected to the controller 58 and connected to the support 55 and uses it to enter the cathode 53. The driving device 56 may adopt a servo motor and a screw structure. For specific connections, refer to the electrode pitch fine-tuning system 20 of the above embodiment. Phase 2 'The new-type electric isolated discharge device 50 also includes-a vacuum pump 64, which is connected to the reactor 51 to reduce the gas surface strength in the reaction H 51;-a gas supply for the supply of working gas (½ gas ), Which includes-a gas tank 6 b plural air duct 63 and a wide door β2, the complex 9 M272608 is connected in sequence to the gas tank 6 b valve ⑽ and the reactor 5 b the valve n 62 can open or close the V gas pipe 63 to the The reactor 51 is supplied with gas. During use, the reactor 51 needs to be evacuated by vacuum I 64; working gas is introduced; the source 59 causes an electrically isolated discharge between the two electrodes 53, 54; the arc discharge should be performed for a certain period of time ^ It is difficult to change the editing system. Dianguan 57 monitors the value of the process in real time, and returns to U as 58. The command under the domain is to maintain a certain value of the process voltage for the pro-structure of the healthy motor that is driven by 56. In order to understand the system, the two electrodes of this new type of repair and discharge equipment have shifts. According to this, the electrode spacing of this new type needs to be appropriately changed accordingly, such as through the two driving devices and The two hybrids are connected, and the distance sent by the controller can be split and driven at the same time, or it can alternately transfer the distance to the towel-turn device. Two
^本新型之電極間距微調系統通過即時監控該兩電極間隙電壓（製程電 壓）值’回饋於控繼，然後下指令給驅動裝置(舰馬達及螺桿)進行兩電 極間距之微調，控制該間隙電壓於—定值。故，本新型之電極間距微 調糸統能即時㈣兩電極_電壓於—定值，使兩f極之·放電穩定： 採用該系統之電孤放電設備自動化程度高，有利於提高奈米碳管產品口:口質。 綜上所述，本新型確已符合新型專利之要件，遂依法提出專利申請。 惟’ ^上所述者僅為本新型之較佳實施方式，自不能以此限制本案之; 專利範圍。舉凡熟悉本案技藝之人士援依本新型之精神所作之等效修 變化，皆應涵蓋於以下申請專利範圍内。 7 ^ 【圖式簡單說明】 ，一圖係第02224490· 5號中國大陸專利之電弧放電設備結構示意圖。 第二圖係本新型第一實施例之電極間距微調系統示意圖。 第二圖係本新型第一實施例之電極間距微調系統中伺服 兩電極之連接結構示意圖。 糾干與 ^四圖係本新型第一實施例之電極間距微調系統之工作流程示意圖。 第五圖係本新型第二實施例之電弧放電設備示意圖。 【主要元件符號說明】 電極間距微調系、統20 反應器 91 , r. M272608 陽極 23，54 陰極 24，53 支撐體 25 ， 26 ， 52 ， 55 電壓感測器 27，57 控制器 28，58 伺服馬達 29 直流馬達 291 與齒輪機構 292 螺桿本體 301 第二齒輪 302 螺母 303 電弧放電設備 50 驅動裝置 56 電源 59 氣罐 61 閥門 62 導氣管 63 真空泵 64 11^ The new electrode gap fine-tuning system monitors the gap voltage (process voltage) of the two electrodes in real time by giving feedback to the controller, and then instructs the drive device (ship motor and screw) to fine-tune the gap between the two electrodes to control the gap voltage. In-set value. Therefore, this new type of electrode pitch fine-tuning system can instantly set the two electrodes _ voltage at-to make the two f poles and discharge stable: The electrical isolation equipment using this system has a high degree of automation and is conducive to improving the carbon nanotubes Product Mouth: Mouth. In summary, the new model has indeed met the requirements for a new patent, and a patent application was filed in accordance with the law. However, the above is only a preferred embodiment of the present invention, and it cannot be used to limit the scope of this case; the scope of patents. For example, those who are familiar with the skills of this case and make equivalent modifications based on the spirit of this new model should be covered by the following patent applications. 7 ^ [Schematic description], a picture is a schematic diagram of the arc discharge equipment structure of the Chinese mainland patent No. 02224490 · 5. The second figure is a schematic diagram of the electrode pitch fine-tuning system according to the first embodiment of the present invention. The second figure is a schematic diagram of the connection structure of the two servo electrodes in the electrode pitch fine-tuning system of the first embodiment of the present invention. The dry correction and the four figures are schematic diagrams of the work flow of the electrode pitch fine-tuning system according to the first embodiment of the present invention. The fifth figure is a schematic diagram of an arc discharge device according to a second embodiment of the present invention. [Symbol description of main components] Electrode pitch fine adjustment system, system 20 reactor 91, r. M272608 anode 23, 54 cathode 24, 53 support 25, 26, 52, 55 voltage sensor 27, 57 controller 28, 58 servo Motor 29 DC motor 291 and gear mechanism 292 Screw body 301 Second gear 302 Nut 303 Arc discharge device 50 Driving device 56 Power supply 59 Air tank 61 Valve 62 Air duct 63 Vacuum pump 64 11