583138 捌、發明說明 【發明所屬之技術領域】 本發明係關於一種奈米級電解、電鑄的方法及其裝置， 特別是指一種將奈米碳管裝置在進給位置解析度小於1奈米 的複數軸進給裝置上，並藉由高頻率的脈衝電路供應奈米碳 管電極的電流，使能控制每次脈衝電化學反應的原子移轉數 量，進而達成加工尺寸解析度在數奈米（nm)的方法。 【先前技術】 奈米科技爲時下科學界最爲重視的話題，因爲奈米科技 具有不同於傳統科技的特性，可以突破現有科技的技術瓶頸 ，爲人類的生活提供更好的選擇。 就現有的奈米科技發展方向而言，奈米級加工技術無疑 是其中極爲重要的一環，目前國內外所使用的奈米加工方式 包括有三，其名稱與解析度如後所述： 一、 近場光學，其加工尺寸解析度爲數十奈米； 二、 IBM公司開發的微探針電場氧化技術，其加工尺寸 解析度爲數奈米； 三、 電子束加工，其加工尺寸解析度亦爲數奈米。 而前述三種奈米加工方法，其皆爲對被加工工件進行蝕 刻前之處理，如果工作是需要長出凸出之微結構時，還需要 加上其它如蒸鍍或電鑄的製程，作業相當繁複。 本案即是針對前述缺點所爲的重大發明，其所採用的加 0續次頁（發明說明頁不敷使用時，請註記並使用續頁) 12 發明說 工機械爲複數軸進給裝置，如SPM機台（scannlngprobe Microscope，掃描探針顯微技術），由於SpM機台具有原子級的 表面形狀解析度，故極適用在極微小的奈米級表面加工處理 。而本發明主要以奈米碳管（Carb〇n Nan〇tube)作爲加工電極 ，並將其裝置在SPM機台的探針上。由於奈米碳管具有弾道 導电性（Balhstic Conductance)，因此可以通過很大的電流而 不產生高溫，爲一良好的導電材料；且奈米碳管的化學性質 穩疋，於電解液中的活性較一般金屬低，但奈米碳管的強度 卻比同尺寸的鋼鐵強數倍甚至數十倍，使其不易受損；故奈 米碳管乃是作爲電解、電鑄加工電極的最佳選擇。 如此’本發明即能直接於工件上完成尺寸解析度在數奈 米的去除（局部電解）或堆疊（局部電鑄）的加工製作，省卻繁瑣 的製程’配合控制進給裝置的運動，使其得以順利進行奈米 尺寸級的3 D曲面成型加工。 【發明目的】 本發明之目的即在於提供一種奈米級電解、電鑄的方法 及其裝置，其係以奈米碳管作爲電解、電鑄的電極，並配合 複數軸進給裝置，進行尺寸解析度爲奈米級的3D曲面加工。 本發明之另一目的係在於提供一種奈米級電解、電鑄的 方法及其裝置，其係以高頻率的脈衝電路供應奈米碳管的電 流’使能控制每次脈衝電化學反應的原子移轉數量’而達成 0續次頁（新型說明頁不敷使用時，請註記並使用續頁） 13 583138 發明說明，續：！ 加工的尺寸解析度在數奈米的方法。 【技術內容】 前述發明所稱之奈米級電解、電鑄的方法，係採用尖端 直徑在1 〇奈米以下的奈米碳管作爲電解或電纟尋之電極’將該 奈米碳管裝置在進給位置解析度小於1奈米的複數軸進給裝 -置上，然後將金屬工件浸泡在適當的電解液中’並採用高頻 - 率的脈衝電路供應奈米碳管電極的電流’接著操作進給裝置 - 移動，使奈米碳管根據加工的所需形狀進行移動，而供應奈 ® 米碳管電極的電流配合電極尖端移動的位置調整極性、電壓 、脈衝頻率、脈衝寬度以及奈米碳管電極與工件的距離，使 能控制每次脈衝電化學反應的原子移轉數量，進而達成加工 · 的尺寸解析度在數奈米的要求。 - 【實施方法】 請參閱圖一，本發明係提供一種奈米級電解、電鑄的方 法及其裝置。該裝置係採用尖端直徑在10奈米以下的奈米碳 馨 管1作爲電解或電鑄之電極，並將該奈米碳管丨裝置在一複數 軸進給裝置的工作端（end effect)，用來對進給裝置上的金屬 工件2進行電解、電纟14加工，且複數軸進給裝置可帶動奈米 · 碳管1，使奈米碳管1能在金屬工件2的各個位置進行加工。 而該奈米碳管1與金屬工件2係分別連接在一脈衝電路3的輸 出端兩極，藉由該脈衝電路3提供奈米碳管丨的工作電能。 0續次頁（翻翻頁不雖觸，難雛賴顔) 14583138 发明 Description of the invention [Technical field to which the invention belongs] The present invention relates to a method and a device for nano-scale electrolysis and electroforming, in particular to a device for feeding carbon nanotubes at a feed position with a resolution of less than 1 nm The multi-axis feed device, and the current of the carbon nanotube electrode is supplied by a high-frequency pulse circuit, which can control the number of atomic transfers in each pulse electrochemical reaction, thereby achieving a processing size resolution of several nanometers. (Nm) method. [Previous technology] Nano technology is the most important topic in the scientific community nowadays, because nano technology has different characteristics from traditional technology, it can break through the technical bottleneck of existing technology and provide better choices for human life. As far as the current development direction of nanotechnology is concerned, nano-level processing technology is undoubtedly an extremely important part of it. At present, there are three nano-processing methods used at home and abroad, and their names and resolutions are as follows: 1. Near Field optics, the processing size resolution is tens of nanometers; 2. Micro-probe electric field oxidation technology developed by IBM, its processing size resolution is several nanometers; 3. Electron beam processing, its processing size resolution is also Count nanometers. The aforementioned three nano-processing methods are all pre-etching treatments on the workpiece. If the work needs to grow protruding microstructures, other processes such as evaporation or electroforming are required, and the work is equivalent. complicated. This case is a major invention for the aforesaid shortcomings. The suffix of 0 is used (when the description page of the invention is insufficient, please note and use the sequel). 12 The invention says that the machinery is a multi-axis feed device. The SPM machine (scannlngprobe Microscope, scanning probe microscopy technology), because the SpM machine has an atomic level surface shape resolution, it is extremely suitable for extremely small nano-scale surface processing. In the present invention, a carbon nanotube (Carbon Nanotube) is mainly used as a processing electrode, and the carbon electrode is mounted on a probe of an SPM machine. Because carbon nanotubes have Balhstic Conductance, they can pass a large current without generating high temperature, which is a good conductive material; and the chemical properties of carbon nanotubes are stable. The activity is lower than that of general metals, but the strength of nano carbon tubes is several times or even dozens of times stronger than steel of the same size, making them less vulnerable to damage; therefore, nano carbon tubes are the best electrode for electrolysis and electroforming processing. select. In this way, the present invention can directly perform the dimensional resolution removal (local electrolysis) or stacking (local electroforming) of the nanometer on the workpiece, eliminating the tedious manufacturing process. With the control of the movement of the feeding device, This enables smooth 3D surface molding of nanometer size. [Objective of the Invention] The purpose of the present invention is to provide a method and a device for nano-scale electrolysis and electroforming, which use nano carbon tubes as electrodes for electrolysis and electroforming, and cooperate with a plurality of axis feeding devices to carry out dimensions. 3D surface processing with nanometer resolution. Another object of the present invention is to provide a method and a device for nano-scale electrolysis and electroforming, which are used to supply a current of a nano carbon tube with a high-frequency pulse circuit to enable control of the atoms of each pulse electrochemical reaction. Number of transfers' to reach 0 continuation pages (when the new description page is insufficient, please note and use the continuation page) 13 583138 Invention description, continued:! Processed dimensional resolution in the nanometer method. [Technical content] The nano-scale electrolysis and electroforming method referred to in the foregoing invention uses a nano carbon tube with a tip diameter of less than 10 nanometers as an electrode for electrolysis or electrical searching to 'nano carbon tube device' Plural axis feeding devices with a resolution of less than 1 nanometer at the feed position, and then immerse the metal workpiece in the appropriate electrolyte 'and use the high frequency-rate pulse circuit to supply the current of the carbon nanotube electrode' Next, operate the feed device-move to make the nano carbon tube move according to the desired shape of the process, and the current supplied to the nano carbon electrode is adjusted with the position of the electrode tip to adjust the polarity, voltage, pulse frequency, pulse width and nano The distance between the carbon tube electrode and the workpiece enables the number of atomic transfers to be controlled per pulse electrochemical reaction, thereby achieving the requirements of processing and dimensional resolution of several nanometers. -[Implementation method] Please refer to Fig. 1. The present invention provides a method and device for nano-scale electrolysis and electroforming. The device adopts a nano carbon tube 1 with a tip diameter of less than 10 nanometers as an electrode for electrolysis or electroforming, and the nano carbon tube 丨 the device has an end effect on a plurality of axis feeding devices, It is used to electrolyze and electrolyze the metal workpiece 2 on the feeding device, and the multiple axis feeding device can drive the nano-carbon tube 1 so that the nano-carbon tube 1 can be processed at various positions on the metal workpiece 2. . The nano carbon tube 1 and the metal workpiece 2 are respectively connected to the output terminals of a pulse circuit 3, and the pulse circuit 3 is used to provide the working energy of the nano carbon tube. 0 Continued pages