CN1821066A - Micro regulating system for electrode gap and electric arc discharging device using said system - Google Patents
Micro regulating system for electrode gap and electric arc discharging device using said system Download PDFInfo
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- CN1821066A CN1821066A CN 200510033258 CN200510033258A CN1821066A CN 1821066 A CN1821066 A CN 1821066A CN 200510033258 CN200510033258 CN 200510033258 CN 200510033258 A CN200510033258 A CN 200510033258A CN 1821066 A CN1821066 A CN 1821066A
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Abstract
The present invention provides one electrode gap trimming system and the electric arc discharging apparatus therewith for preparing carbon nanotube. The electrode gap trimming system includes two electrodes including at least one movable electrode, one voltage sensor for measuring the voltage difference across the electrode gap, one controller connected to the voltage sensor for converting the voltage signal into distance signal, and at least one driving unit connected to the controller and the movable electrode to control the motion of the movable electrode based on the distance signal. The driving unit includes one servo motor and one screw bolt. The system real-time controls the voltage across the electrodes to stabilize the arc discharge in between.
Description
[technical field]
The present invention relates to the arc discharging device of a kind of interelectrode distance micro-tensioning system and this system of use.
[background technology]
Carbon nanotube is a kind of new carbon, is found in 1991 by Japanology personnel Iijima, sees also " Helical microtubules of graphitic carbon ", S Iijima, Nature, Vol.354, P56 (1991).Carbon nanotube is with its good conductivity, perfect crystalline network, characteristics such as the tip of nanoscale and become the filed emission cathode material that has hope have wide prospect in Application Areass such as field emission displays spare, electron tube, HIGH-POWERED MICROWAVES devices.
The preparation method of carbon nanotube mainly comprises pulse laser method of evaporation, chemical Vapor deposition process and arc discharge method.The pulse laser method of evaporation is to utilize the high-energy of pulse laser to evaporate the graphite target acquisition carbon nanotube that contains metal catalyst; Chemical Vapor deposition process be with the transition metal of nanoscale or its oxide compound as catalyzer, the carbonaceous source of pyrolysis gas prepares carbon nanotube under low relatively temperature; Arc discharge method is the Graphite Electrodes arc-over acquisition carbon nanotube that utilizes pure graphite or be mixed with metal catalyst.Wherein, arc discharge method is a kind of important method of preparation carbon nano-tube material, and because of the carbon nanotube degree of graphitization height of this method preparation, physical property is best.
At present, arc discharging device comprises the carbon electrode of at least two correspondences, and the displacement adjustment device that is used to control two carbon electrode gaps.In the arc discharge process, anode top part carbon atom is evaporated vaporization and produces at negative electrode under the bombardment of a large amount of electronics under high temperature (more than 4000 ℃), produce a large amount of active carbon particles and carbon neutral particle and enter arc discharge area, repeat to bump between the various particles and further generate carbon ion and active carbon particle, and on anode, negative electrode and arc discharging device inwall, depositing one deck cigarette ash, it comprises carbon nanotube or soccerballene etc.So the anodic carbon-point will constantly consume in arc discharge process, the gap of two electrodes will constantly change.
Prepare in the experiment of carbon nanotube at arc-over, voltage and gaseous tension are most important two process parameter, and the biggest factor that wherein influences voltage is the distance of two electrode tip.For the voltage that makes arc-over remains in the certain limit, need in arc discharge process, to regulate the gap of two electrodes by displacement adjustment device.
See also Fig. 1, disclose a kind of arc discharging device 10 in No. 02224490.5 Chinese patent of announcing on February 12nd, 2003, it comprises a vacuum chamber 1, is arranged on an anode 4 and a discous negative electrode 5 in this vacuum chamber 1.Wherein, this anode 4 is supported with an anode transfer arm 3 that links to each other with this anode carrier 2 by an anode carrier 2; This negative electrode 5 is supported by a cathode anchor 6, and this anode 4 is located at the top of this negative electrode 5, and the lower end of this anode 4 is corresponding with discous negative electrode 5.The lower end of anode carrier 2 and cathode anchor 6 is respectively arranged with anode turning handle 9 and negative electrode turning handle 8.This equipment is controlled the spacing of this anode 4 and this negative electrode 5 by manual regulation anode turning handle 9 or negative electrode turning handle 8, makes arc-over keep certain voltage.But, this anode 4 can constantly change with the spacing of this negative electrode 5, therefore must be by artificial monitor voltage table, and constantly with manual fine-tuning carbon-point spacing, sometimes experimental period reaches tens of minutes, so this equipment is unfavorable for operator's actually operating, and the uneven problem of carbon nano tube growth appears easily.
In addition, existing arc discharging device also has employing to connect manual displacement conditioning equipment at the arbitrary end of two carbon electrodes, is used to control the voltage between two electrodes.This equipment occurs needing long-time manual operation equally, and occurs the uneven problem of carbon nano tube growth easily.
In view of this, provide a kind of can automatic accurate control electrode spacing, make the voltage of arc-over keep stable interelectrode distance micro-tensioning system and use the arc discharging device reality of this system to be necessity.
[summary of the invention]
Below, will with some embodiment illustrate a kind of can automatic accurate control electrode spacing, make the voltage of arc-over keep stable interelectrode distance micro-tensioning system.
And by these embodiment illustrate a kind of can automatic accurate control electrode spacing, make the voltage of arc-over keep stable arc discharging device.
For realizing foregoing, a kind of interelectrode distance micro-tensioning system is provided, it comprises:
Two corresponding electrodes, wherein at least one electrode is removable;
One is used to measure the voltage-sensor of this two electrode gaps voltage difference;
One controller that is connected with this voltage-sensor is used for voltage signal is converted to apart from signal;
At least one drive unit that is connected with this controller, it is connected with this travelling electrode, is used to control this travelling electrode and moves corresponding distance according to this apart from signal.
This drive unit comprises a servomotor and a screw rod that is connected with the gear mechanism of this servomotor, and this screw rod is connected with this travelling electrode.
And, a kind of arc discharging device is provided, it comprises:
One reactor;
Two are located at the electrode of this inside reactor sidewall, and its top is corresponding mutually, and wherein at least one electrode is removable;
One power supply connects this two electrode, is used to make between this two electrode produce arc-over;
One is used to measure the voltage-sensor of this two electrode gaps voltage difference;
One controller that is connected with this voltage-sensor is used for voltage signal is converted to apart from signal;
At least one drive unit that is connected with this controller, it is connected with this travelling electrode, is used to control this travelling electrode and moves corresponding distance according to this apart from signal.
Compared with prior art, the interelectrode distance micro-tensioning system of the technical program is by this two electrode gaps voltage (processing procedure voltage) value of immediately monitoring, feedback is in controller, give an order then and carry out the fine setting of two interelectrode distances, be used to control this gap voltage in certain value to drive unit (servomotor and screw rod).So the interelectrode distance micro-tensioning system of the technical program can be controlled two electrode gap voltages immediately in certain value, make the arc-over of two electrodes stable.Adopt the arc discharging device level of automation height of this system, help improving its carbon nanotube product quality.
[description of drawings]
Fig. 1 is the arc discharging device structural representation of No. 02224490.5 Chinese patent.
Fig. 2 is the interelectrode distance micro-tensioning system synoptic diagram of first embodiment.
Fig. 3 is the syndeton synoptic diagram of servomotor in the interelectrode distance micro-tensioning system of first embodiment, screw rod and two electrodes.
Fig. 4 is the workflow synoptic diagram of the interelectrode distance micro-tensioning system of first embodiment.
Fig. 5 is the arc discharging device synoptic diagram of second embodiment.
[embodiment]
Below in conjunction with drawings and Examples the technical program is described in further detail.
See also Fig. 2, the interelectrode distance micro-tensioning system 20 of first embodiment, it mainly comprises: two corresponding anode 23 and negative electrodes 24, one voltage-sensor 27, one controller 28, one drive unit (not indicating), this drive unit of present embodiment comprise a servomotor (Servo Motor) 29 and one ball screw (BallScrew) (figure does not show).
This anode 23 and negative electrode 24 are located at a reactor 21 inside, and this anode 23 is connected with the supporter 25 that is positioned at reactor 21 bottoms, and this negative electrode 24 is connected with the supporter 26 of being located at these reactor 21 tops.This two electrode 23,24 respectively with supporter 25,26 electrical isolations.This negative electrode 24 and supporter 26 are removable in the present embodiment, and this anode 23 and supporter 25 are fixed in reactor 21.This two electrode 23,24 all is a carbon electrode, and its spacing keeps suitable distance.
This negative electrode 24 and anode 23 external power supplys (figure does not show) are used to provide a fixed current to make this two electrode 23,24 produce arc-over, and the working current of this power supply of present embodiment is 70A.
This voltage-sensor 27 is connected with anode 23 with this negative electrode 24, it is used to measure the voltage in these two electrodes, 23,24 gaps, this voltage i.e. this two electrode 23,24 also claims processing procedure voltage produce the voltage difference that produces when arc-over forms path between this two electrode 23,24.This voltage-sensor 27 also has the function of sending the voltage difference of surveying.
This controller 28 is connected with this voltage-sensor 27, and it is used for the voltage signal that voltage-sensor 27 is sent is converted to apart from signal.
This servomotor 29 is connected with this controller 28, and it is used for handling apart from signal that controller 28 sends, exports distance by the gear mechanism (figure does not show) of this servomotor inside at last.This servomotor 29 also comprises a direct current motor (figure does not show), a feedback adjustable potentiometer (figure does not show) and an electronically controlled plate (figure does not show) except that this gear mechanism.
This ball screw (figure does not show) is connected with the gear mechanism of this servomotor 29, and this ball screw (figure does not show) is connected with this supporter 26, is used for moving this negative electrode 24 that is connected with this supporter 26, makes itself and anode 23 keep suitable distance.
The principle of work of interelectrode distance micro-tensioning system 20 is by voltage-sensor 27 immediately monitoring processing procedure magnitudes of voltage, feedback is in controller 28, give an order then and carry out the fine setting of these two electrodes, 23,24 spacings to servomotor 29, make the voltage in these two electrodes, 23,24 gaps keep certain value.
Further describe servomotor 29 and the syndeton of ball screw (figure does not show) and the workflow of entire electrode spacing micro-tensioning system 20 below in conjunction with Fig. 3 and Fig. 4.
As shown in Figure 3, the inner d.c. motor 291 of this servomotor (figure does not show) is connected with gear mechanism 292.This ball screw comprises that a screw rod body 301, is fixed in second gear 302 and one and the supporting nut 303 of screw rod body 301 of screw rod body 301, and it can move on screw rod body 301.This second gear 302 is mutually meshing with this gear mechanism 292.This nut 303 is connected with this supporter 26.This second gear 302 rotates under the drive of this gear mechanism 292, this screw rod body 301 also rotates simultaneously, the rotation of this screw rod 30 can make this nut 303 rotate to these anode 23 directions, and drive this supporter 26 and this negative electrode 24 moves to these anode 23 directions, make the negative electrode 24 and the spacing of anode 23 keep suitable distance.
As shown in Figure 4, the workflow of this interelectrode distance micro-tensioning system 20 is:
Above-mentioned three workflows in whole arc discharge process, can automated cycle be finished.
Be understandable that the various parameter settings before the controller 28 of present embodiment and servomotor 29 must experimentize.The ball screw of present embodiment can also adopt general screw rod.The drive unit of this interelectrode distance micro-tensioning system 20 can also adopt miscellaneous equipment except that servomotor and screw rod, as long as it can satisfy and will convert the condition of virtual electrode displacement apart from signal to.
In addition, spirit according to the technical program, this interelectrode distance micro-tensioning system need be fixed except that an electrode in two electrodes, another electrode is movably outside the situation, certainly adopt this two electrode all to have locomotive function, the interelectrode distance micro-tensioning system needs the corresponding appropriate change of doing in view of the above, and as being connected with this two electrode by two drive units, what controller sent can send this two drive unit to or send portion to a wherein drive unit in turn apart from signal apart from signal with two parts of time-divisions.
See also Fig. 5, second embodiment provides a kind of arc discharging device 50 that uses this interelectrode distance micro-tensioning system, comprise: a closed reactor 51, one is positioned at the negative electrode 53 and an anode 54 corresponding with negative electrode 53 of this reactor 51, this two electrode 53,54 is fixed in 51 liang of inner side-walls of this reactor by supporter 55,52 respectively, wherein, this supporter 55 and negative electrode 53 can move in reactor 51.This two electrode 53,54 is all the graphite rod electrode.One power supply 59 is arranged at this reactor 51 outsides, and being used for provides a fixed current (70A) between this two electrode 53,54, makes and produces the stable arc discharge between this two electrode 53,54.
This arc discharging device 50 also comprises an interelectrode distance micro-tensioning system, and it comprises: one is used to measure the voltage-sensor 57 of this two electrode gaps voltage difference, and it connects this two electrode 53,54 respectively; One controller 58 that is connected with this voltage-sensor 57, it is used for voltage signal is converted to apart from signal; One drive unit 56 that is connected with this controller 58, it is connected with this supporter 55, is used to advance this negative electrode 53.This drive unit 56 can adopt servomotor and screw-rod structure, and its concrete mode of connection can be with reference to the interelectrode distance micro-tensioning system 20 of the foregoing description.
In addition, this arc discharging device 50 also comprises a vacuum pump 64, and it is connected with this reactor 51, is used to reduce the gas pressure intensity in the reactor 51; One airing system, be used to provide working gas (rare gas element), it comprises a gas tank 61, a plurality of airways 63 and a valve 62, these a plurality of airways 63 connect this gas tank 61, valve 62 and reactor 51 successively, and airway 63 can be opened or close to this valve 62 to these reactor 51 air feed.
During use, need by vacuum pump 64 reactor 51 to be vacuumized earlier; Feed working gas; Starting power supply 59 makes these two electrodes, 53,54 gaps produce arc-over; Put when arc-over and should carry out certain hour, the processing procedure magnitude of voltage changes, this processing procedure magnitude of voltage of voltage-sensor 57 immediately monitorings, and feedback is in controller 58, give an order then and finely tune, make the processing procedure magnitude of voltage keep certain value to the servomotor and the screw-rod structure of drive unit 56.
Be understandable that, the two corresponding electrodes that this arc discharging device adopts all have locomotive function, the interelectrode distance micro-tensioning system needs the corresponding appropriate change of doing in view of the above, as being connected with this two electrode by two drive units, what controller sent can send this two drive unit to or send portion to a wherein drive unit in turn apart from signal apart from signal with two parts of time-divisions.
The interelectrode distance micro-tensioning system of the technical program is by this two electrode gaps voltage (processing procedure voltage) value of immediately monitoring, feedback is in controller, give an order then and carry out the fine setting of two interelectrode distances, be used to control this gap voltage in certain value to drive unit (servomotor and screw rod).So the interelectrode distance micro-tensioning system of the technical program can be controlled two electrode gap voltages immediately in certain value, make the arc-over of two electrodes stable.Adopt the arc discharging device level of automation height of this system, help improving the carbon nanotube product quality.
Claims (17)
1. interelectrode distance micro-tensioning system, it comprises:
Two corresponding electrodes, wherein at least one electrode is removable;
One is used to measure the voltage-sensor of this two electrode gaps voltage difference;
One controller that is connected with this voltage-sensor is used for voltage signal is converted to apart from signal;
At least one drive unit that is connected with this controller, it is connected with this travelling electrode, is used for
Control this travelling electrode and move corresponding distance apart from signal according to this.
2. interelectrode distance micro-tensioning system as claimed in claim 1 is characterized in that this two electrode is all carbon electrode.
3. interelectrode distance micro-tensioning system as claimed in claim 1 is characterized in that this interelectrode distance micro-tensioning system further comprises a power supply, is used to provide a fixed current to make between this two electrode and produces arc-over.
4. interelectrode distance micro-tensioning system as claimed in claim 1 is characterized in that this drive unit comprises a servomotor and a screw rod that is connected with the gear mechanism of this servomotor, and this screw rod is used to connect this travelling electrode.
5. interelectrode distance micro-tensioning system as claimed in claim 4 is characterized in that this servomotor comprises that flow motor, feeds back adjustable potentiometer, an electronically controlled plate and a gear mechanism always.
6. interelectrode distance micro-tensioning system as claimed in claim 4 is characterized in that this screw rod comprises ball screw.
7. interelectrode distance micro-tensioning system as claimed in claim 6 is characterized in that this ball screw comprises that a screw rod body, is fixed in second gear and one and the supporting nut of screw rod body of screw rod body, and this nut is connected with this travelling electrode.
8. interelectrode distance micro-tensioning system as claimed in claim 7 is characterized in that this second gear is mutually meshing with the gear mechanism of this servomotor.
9. arc discharging device, it comprises:
One reactor;
Two are located at the electrode of this inside reactor sidewall, and its top is corresponding mutually, and wherein at least one electrode is removable;
One power supply connects this two electrode, is used to make between this two electrode produce arc-over;
It is characterized in that also comprising:
One is used to measure the voltage-sensor of this two electrode gaps voltage difference,
One controller that is connected with this voltage-sensor is used for voltage signal is converted to apart from signal,
At least one drive unit that is connected with this controller, it is connected with this travelling electrode, is used to control this travelling electrode and finishes this movement value apart from signal.
10. arc discharging device as claimed in claim 9 is characterized in that this two electrode is all carbon electrode.
11. arc discharging device as claimed in claim 9 is characterized in that this drive unit comprises a servomotor and a screw rod that is connected with the gear mechanism of this servomotor, this screw rod is used to connect this travelling electrode.
12. arc discharging device as claimed in claim 11 is characterized in that this servomotor comprises d.c. motor, feedback adjustable potentiometer, electronically controlled plate and gear mechanism.
13. arc discharging device as claimed in claim 11 is characterized in that this screw rod comprises ball screw.
14. arc discharging device as claimed in claim 13 is characterized in that this ball screw comprises that a screw rod body, is fixed in second gear and one and the supporting nut of screw rod body of screw rod body, this nut is connected with this travelling electrode.
15. arc discharging device as claimed in claim 14 is characterized in that this second gear is mutually meshing with the gear mechanism of this servomotor.
16. arc discharging device as claimed in claim 9 is characterized in that this arc discharging device comprises that further one is connected in the vacuum pump of this reactor.
17. arc discharging device as claimed in claim 9, it is characterized in that this arc discharging device comprises that further one is connected in the airing system of this reactor, it comprises a gas tank, and a plurality of airways that are connected in this gas tank and this reactor are connected the valve of these a plurality of airways with one.
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