M271857 八、新型說明: 【新型所屬之技術領域】 本創作係有關-種基板移載定錢備,尤指—獅基板精石崔 進行X、γ軸方向定位之定位設備。 【先前技術】 按’-般面板製程過程巾,必須不斷重覆許多姉的製程, 從-前製程到下-後製程間需由技術員將前製程加工後之面板, 先裝入-面板卡_再以人卫的方式送至魏程,她運的過程 中g因震動的關係而致使該面板於卡时之位置產生位移,加 上該面板卡£運送至後餘之位置亦會有微小之偏位,因此,在 面板進入後餘m機械手臂_面減置於—基板移載定 位設備上加以定位,接著再將定位後之面板送人欲加工的製程。 由方。亥基板移載定位設備,如第5圖所示,其係包括一基座 6,該基座6設有―_反6 1,對應該_板6 1相鄰二侧邊 分別設有-第-調整機構6 2與—第二調整機構6 3,俾藉由各 該調整機構6 2、6 3分別對-面板(圖中未示)進行定位,夂 該調整機構6 2、6 3係分卿手動方式轉動—調整糾2 / 6 31,以使第-調整機構6 2可進行γ轴方向的位移調整,而 鄕二調整機構6 3射進行χ軸方向的位移調整,如此相當費 Ζ不便,加上前述之調整方式,並無法同時進彳亍二方向定位的 力作’使得定位過程需耗費相當長的時間,對講求速度而言之面M271857 8. Description of the new type: [Technical field to which the new type belongs] This creation is related to-a kind of substrate transfer and fixed money preparation, especially-lion substrate fine stone Cui positioning equipment for X, γ axis positioning. [Previous technology] According to the '-panel' panel manufacturing process, we must continue to repeat many sister processes. From -pre-process to bottom-rear process, the technician must process the panel after the pre-process between the -pre-process and the panel card_ Then she was sent to Wei Cheng by human health. During the transportation, the position of the panel at the time of the card was displaced due to vibration. In addition, the panel card will be transported to the remaining position. Offset, so after the panel enters, the robot arm_surface is reduced to the substrate transfer positioning device to position it, and then the positioned panel is sent to the manufacturing process. By party. As shown in FIG. 5, the substrate transfer positioning device of the Hai substrate includes a base 6, which is provided with __anti 6 1, corresponding to _ plate 6 1 and adjacent two sides are provided with- -Adjustment mechanism 6 2 and -Second adjustment mechanism 6 3, 定位 Position the -panel (not shown) with each of the adjustment mechanisms 6 2, 6 3, and the adjustment mechanism 6 2, 6 3 is divided Rotate manually—adjust 2/6 31 so that the first-adjustment mechanism 62 can perform displacement adjustment in the γ-axis direction, and the second-adjustment mechanism 6 3 can perform displacement adjustment in the χ-axis direction, which is quite inconvenient. In addition to the aforementioned adjustment methods, the masterpiece of positioning in two directions cannot be performed at the same time, which makes the positioning process take a considerable time.
M271857 板產業,該基板移載定位設備確有加以改善之必要。 【新型内容】 、本創作之主要目的,在於解決上述關題而提供—種基板移 載定位設備,利用-感應源以同時啟動—x軸調整裝置與—y轴 调整裝置,使-面板可在同—時間下完成x、丫軸之定位,以達 到定位精確且具有增加工作效率之功用。 為達前述之目的,本創作係包括:—架體,該架體具有一X 轴調整裝置與-γ_整裝置,且該⑽調整裝置阶轴調整裝 置係呈相鄰設置,並於該架體下方設有—2軸調整裝置,俾 上述各該輕裝置,以職—絲移較赌備。 9 上、本_之上収其他目難優點,穩從下騎_實施例 之4細說明與附圖中,獲得深入了解。 中展示其構造。 實施方式】 請參閱第!圖至第4圖,圖中所示者為本創作所選用之實於 列摘:瞻說明之用',在專利申請上並不受此賴^ 本以u例之基板純疋位设備,如第丄圖所示 ^ · 賴,該架體1具有-购整裝攀一亀二 3,其中,該X轴調整裝置2具有— DJE'衣置 ^弟—滑軌21,該第一滑軌 6 M271857 21之侧邊設有—第—動力源22,於本實施例中,該第一動力 源2 2係為一氣辫备:,η兮μ m 礼土75工且處弗—滑執2 1兩端分別設有—第一滑 動件23,於本例中,該第—滑動件23係指-滑輪,俾供一繞 设於兩滑輪間之第—$ 土 κ乐觸凡件2 4設立,於本例中,該第一傳動 兀件2 4係為-鋼索,且該第—傳動元件2 4係分_定於一第 一主動件25與—第—從動件2 6,且該第-主、從動件25、 2 6具有-呈相對設置之一靠位片2 5丄、2 6丄,而該第一主、 ^牛25、、26遠離靠峨51、261一端之底部係藉由 4動相2 2相連接,而該γ車由調整裝置3具有—第二滑軌 31 ’該f二滑軌31之側邊設有—第二動力源3 2,於本實施 例中;,5亥弟—動力源3 2係為—氣壓缸,且該第二滑執3 1兩端 分別設有-第二滑動件3 3,於本射,該第二滑鱗3 3係指 -滑輪,俾供—繞設於兩滑輪間之第二傳動元件3 4設立,於本 例中’及第—傳動讀3 4係為-嫩,且該第二傳動元件3 4 係分別固定於—第二主動件3 5與-第二從動件3 6,且該第二 主、從動件35、36具有一呈相對設置之-靠位片351、3 61,而該第二主、從動件3 5、3 6遠離靠位片3 5丄、3 6 1-端之底部储由該第二動力源3 2相連接,並於該架體工下 方財-Z軸調整裝置4,於本例中,該z軸調整裝置4具有一 固定座4 1,對應該固定座41設有—滑台42,該滑台42頂 部設有-調整桿4 3,該調整桿4 3係由—第三動力源4 4帶動 M271857 伸縮,且該調整桿4 3之1 42之1設有-承載平台滑台42,異於該滑台 乂供承載一面板4 6,俾葬 上述各該調整裝置2、3、4之細人 '曰由 軸調整裝置3之各触、_;2錄置謝 Z軸調整裝置4承載平台4 5之中师2 6 ' 3 5 ' 3 6皆以該 1 〇 , Y夹岭為基準,由各該滑軌2 丄、d 1之兩端分別向該承載平A /1仁 基板移歡位賴。料。45之巾聽鶴,以形成該 於本實施财,當本__於職程與後製賴,如第2 圖所示,其錢由—機械手臂A將面板4 6從-放置面板之切 内移出,接著將該面板4 6放置於z軸調整裝置4之承載平台4 5上,此時,該X軸調整裝置4中之第—動力源32會同時啟動, 以驅動該第-主動件2 5,由於該第_主動件2 5與鋼索呈固接 狀Q而名鋼索產生一拉力,且該鋼索亦與第一從動件2 6相固 接,加上藉由鋼索繞設於滑輪之仙,讓該第—主動件2 5與第 -攸動件2 6間呈-相向運動,且當設於第—主動件2 5與第一 從動件2 6之靠位片2 51、2 61接觸到面板4 6時,該第一 主動件2 5與第-從動件2 6將停止並完成面板4 6χ轴向之定 位’同-時間’該γ軸調整裝置3亦產生如同前述又軸調整裝置 2相同之作動,藉此,即可使本創作具有在同—時間下能同時完 成X軸與γ轴之雙軸定位,以達収位精確且具有增加工作效率 之功用。 8 M271857 其次’在完成雙軸定位之後,該2轴調整裝置4之舊样4 3將向下位移,如第3圖及第4圖所示,以帶輯承裁平μ $ 亦:下移動,並_該滑台4 2可滑移於酸座4 1之作用,而 將完,m定位之面板4 6運至下—製程,以便於後段製程之工 作人貝無需再作一次定位校正,即可馬上進行後續的工作,如此, 可增加工作效率及減少重覆定位的成本。 以上所述實施例之揭示係用以說明本創作,並非用以限制本 =作’故舉凡數值之變更鱗效元件之置換仍應隸屬本創作之範 0 P由以上雜·,可使熟知本項㈣者明瞭本創作的確可達 成刚逑目的,實已符合專利法之規定,爰提出專利申請。 【圖式簡單說明】 第1圖係本創作之結構示意圖 昂2圖係本創作最佳實施例之動作示意圖之一 弟3圖係本創作最佳實施例之動作示意圖之二 第4圖係本創作最佳實施例之動作示意圖之三 第5圖i*r、g用之基板定位設備的示意圖 【主要元件符號說明】 (習用部分) 固定板6 1 調整輪6 21 基座6 第一調整機構6 2 M271857 第二調整機構6 3 (本創作部分) 架體1 第一滑執2 1 第一滑動件2 3 第一主動件2 5 第一從動件2 6 ^ Y軸調整裝置3 第二動力源3 2 第二傳動元件3 4 靠位片3 5 1 靠位片3 61 - 固定座41 調整桿4 3 p 承載平台45M271857 board industry, the substrate transfer positioning equipment does need to be improved. [New content] The main purpose of this creation is to provide a kind of substrate transfer positioning device that solves the above-mentioned problems. The -induction source is used to start the -x-axis adjustment device and -y-axis adjustment device at the same time, so that the -panel can be In the same time, the positioning of the x-axis and the y-axis is completed in order to achieve accurate positioning and increase work efficiency. In order to achieve the aforementioned purpose, the creative department includes:-a frame body, which has an X-axis adjustment device and -γ_ whole device, and the ⑽ adjustment device step axis adjustment device is arranged adjacently, and is located on the frame Below the body is provided with a 2-axis adjustment device, each of which is a light device, and the silk-shifting is more prepared. 9 It is difficult to receive other advantages from the top and the bottom, and you should follow the details of the 4th embodiment and the drawings to gain in-depth understanding. Show its structure. Embodiment] Please refer to page! Figures to Figure 4. The ones shown in the figure are the actual selections used for this creation: for the purpose of explanation, and are not subject to this in patent applications. As shown in the second figure, Lai, the frame 1 has-purchase a complete pan 1 2 3, wherein the X-axis adjustment device 2 has-DJE 'clothing set ^ brother-slide rail 21, the first slide The rail 6 M271857 21 is provided with a first power source 22 on the side. In this embodiment, the first power source 22 is a pneumatic braid: ημm, etiquette, 75 workers, and processing-slide 2 1 is provided with a first sliding member 23 at both ends. In this example, the first sliding member 23 refers to a pulley, which is provided for the first-$ 土 κ 乐 触 凡 件 2 which is arranged between the two pulleys. 4 is established. In this example, the first transmission element 24 is a steel cable, and the first transmission element 24 is divided into a first driving element 25 and a first driven element 26. And the first-master and follower members 25 and 26 have one of the positioning pieces 2 5 丄 and 2 6 丄 opposite to each other, and the first master-bearers 25 and 26 are far away from the ends of the leaning members 51 and 261. The bottom is connected by 4 moving phases 2 and 2 phases, and the gamma car is adjusted by the adjusting device 3 Yes—the second slide rail 31 'is provided with a second power source 32 on the side of the second slide rail 31, in this embodiment; 5 Haidi—the power source 32 is a pneumatic cylinder, and the The second sliding handle 3 1 is provided with a second sliding member 3 3 at both ends. In this shot, the second sliding scale 3 3 refers to a pulley, and is provided for a second transmission element 3 wound between the two pulleys. 4 is established, and in this example, 'and the first transmission read 3 4 is-tender, and the second transmission element 3 4 is respectively fixed to-the second driving member 3 5 and-the second follower 36, and The second master and follower members 35 and 36 have oppositely-positioned pieces 351 and 3 61, and the second master and follower pieces 35 and 36 are far away from the seat pieces 3 5 and 36. The bottom storage at the 1-end is connected by the second power source 32, and a Z-axis adjustment device 4 is located under the frame. In this example, the z-axis adjustment device 4 has a fixed base 41, Corresponding to the fixed seat 41, a slide table 42 is provided on the top of the slide table 42. An adjustment lever 4 3 is provided by a third power source 4 4 to drive M271857 to expand and contract. 1 42 of 1 is provided with a bearing platform slide table 42, which is different from the slide table. Load a panel 4 6 and bury the above-mentioned detail of each of the adjustment devices 2, 3, and 4 'by the touch of the axis adjustment device 3; 2 6 '3 5' 3 6 are all based on the 10, Y Jialing, and the two ends of each of the slide rails 2 丄 and d 1 are respectively moved to the bearing flat A / 1 core substrate. material. The 45 towel listens to the crane to form the implementation of this financial. When this __ is based on the post and the post-control, as shown in Figure 2, the money is-the mechanical arm A will remove the panel 4 6 from the panel. Move out, and then place the panel 46 on the bearing platform 45 of the z-axis adjustment device 4. At this time, the first-power source 32 in the x-axis adjustment device 4 will start at the same time to drive the first-active member. 25, because the _ driving member 25 is connected to the steel wire Q, the famous steel wire generates a tensile force, and the steel wire is also fixed to the first driven member 26, plus the wire is wound around the pulley Immortal, let the first driving member 25 and the second driving member 26 move in opposite directions, and when the first driving member 25 and the first driven member 26 are positioned on the supporting piece 2 51, When 2 61 touches the panel 46, the first driving member 25 and the first-slave member 26 will stop and complete the positioning of the panel 4 6 x-axis 'same-time'. The γ-axis adjustment device 3 also produces the same as described above. The same operation of the axis adjustment device 2 can make the creation have the dual-axis positioning of the X-axis and the γ-axis at the same time at the same time, so as to achieve accurate positioning and increase work efficiency. The function of rate. 8 M271857 Secondly, after the two-axis positioning is completed, the old model 4 3 of the 2-axis adjustment device 4 will be shifted downwards, as shown in Figures 3 and 4, and will be flattened with the tape. Μ $ also: move down And, the slide table 4 2 can be slid on the role of the acid seat 41, and the panel 4 6 m positioning is transported to the bottom-process, so that the workers in the later process do not need to make another positioning correction, The follow-up work can be performed immediately, so that the work efficiency can be increased and the cost of repeated positioning can be reduced. The disclosure of the above-mentioned embodiments is used to explain the creation, not to limit the creation. Therefore, the replacement of the scale effect elements should still belong to the scope of the creation. The project owner knew that this creation could indeed achieve the rigid purpose, and indeed met the requirements of the Patent Law, so he filed a patent application. [Schematic description] Figure 1 is a schematic diagram of the structure of this creation. Figure 2 is a schematic diagram of the action of the best embodiment of this creation. Figure 3 is a schematic diagram of the action of the best embodiment of this creation. The best schematic diagram of the third embodiment of the operation. Figure 5 Schematic diagram of the substrate positioning equipment used for i * r and g [Description of the main component symbols] (conventional part) Fixing plate 6 1 Adjustment wheel 6 21 Base 6 First adjustment mechanism 6 2 M271857 Second adjustment mechanism 6 3 (This creative part) Frame 1 First slider 2 1 First slider 2 3 First driver 2 5 First follower 2 6 ^ Y-axis adjustment device 3 Second Power source 3 2 Second transmission element 3 4 Resting piece 3 5 1 Resting piece 3 61-Fixing seat 41 Adjusting lever 4 3 p Bearing platform 45
機械手臂A 調整輪6 31 X轴調整裝置2 第一動力源2 2 第一傳動元件2 4 靠位片2 5 1 靠位片2 61 第二滑執31 第二滑動件3 3 第二主動件3 5 第二從動件3 6 Z軸調整裝置4 滑台4 2 第三動力源4 4 面板4 6 10Robot arm A adjustment wheel 6 31 X-axis adjustment device 2 First power source 2 2 First transmission element 2 4 Resting piece 2 5 1 Resting piece 2 61 Second slider 31 Second slider 3 3 Second active member 3 5 Second follower 3 6 Z-axis adjustment device 4 Slide table 4 2 Third power source 4 4 Panel 4 6 10